CN106017440B - The big working distance autocollimation of portable combined zeroing high frequency sound and method - Google Patents
The big working distance autocollimation of portable combined zeroing high frequency sound and method Download PDFInfo
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- CN106017440B CN106017440B CN201610638926.2A CN201610638926A CN106017440B CN 106017440 B CN106017440 B CN 106017440B CN 201610638926 A CN201610638926 A CN 201610638926A CN 106017440 B CN106017440 B CN 106017440B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C15/00—Surveying instruments or accessories not provided for in groups G01C1/00 - G01C13/00
- G01C15/002—Active optical surveying means
- G01C15/004—Reference lines, planes or sectors
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Abstract
The invention belongs to Technology of Precision Measurement field and optical engineering field, and in particular to the big working distance autocollimation of portable combined zeroing high frequency sound and method；The device is made of light source, collimating mirror, speculum and feedback imaging system；This method makes the reflected beams return to feedback imaging system image plane center, recycles the angular deflection measuring device on speculum to obtain the angle change on measured object surface by adjusting speculum；Since the present invention adds speculum on traditional auto-collimation angle measurement system, therefore measured object reflected light can be avoided the problem that to deviate measuring system and lead to not measurement, and then have and auto-collimation working range is dramatically increased under identical operating distance, or the technical advantage of operating distance is dramatically increased under identical auto-collimation working range；In addition, the specific design of collimating mirror, feedback imaging system, speculum etc., makes the present invention also have the characteristics that miniature portable, high certainty of measurement；There is very high measuring speed at the same time.
Description
Technical field
The invention belongs to Technology of Precision Measurement field and optical engineering field, and in particular to portable combined zeroing high frequency sound
Big working distance autocollimation and method.
Background technology
Manufacture and lead in Technology of Precision Measurement field, optical engineering field, most advanced branches of science experimental field and high-end precision assembly
In domain, active demand carries out wide working range, high-precision laser auto-collimation technology under big working distance.It supports above-mentioned field
The development of technology and instrument and equipment.
In Technology of Precision Measurement and instrument field, Laser Autocollimator is combined with Circular gratings, can carry out any line angle degree
Measurement；Laser auto-collimation technology is combined with polygon, can carry out face angular surveying and circular division measurement；Maximum functional distance
From several meters to rice up to a hundred；Resolving power is from 0.1 rad to 0.001 rad.
In optical engineering field and most advanced branches of science experimental field, the Laser Autocollimator two round light vertical each other with bidimensional
Grid combine, and can carry out the measurement of space angle；Position reference is formed by two-way Laser Autocollimator, optical axis two-by-two can be carried out
The measurement of angle or collimation.Tens rads to tens jiaos points of angle working range.
In most advanced branches of science experimental provision and high-end precision assembly manufacturing field, tip can be measured using Laser Autocollimator
The angle rotating accuracy of scientific experiment device and high-end precision assembly rotary motion benchmark, the space line of measurement linear motion benchmark
Precision and the depth of parallelism and verticality for moving benchmark two-by-two.
Laser auto-collimation technology has the advantages that non-contact, high certainty of measurement, easy to use, has in above-mentioned field wide
General application.
Traditional autocollimator is as shown in Figure 1, the system includes light source 1, transmission-type collimating mirror 21 and feedback imaging system
6；The light beam that light source 1 is emitted, after transmission-type collimating mirror 21 is collimated into collimated light beam, incides the reflecting surface of measured object 5；From
The light beam of 5 reflective surface of measured object, imaging is gathered by feedback imaging system 6.Under this structure, only from 5 surface of measured object
The nearly backtracking of light beam of reflection, could be gathered imaging by feedback imaging system 6, and then realize effectively measurement.This Jin Yuan road
The condition limitation of return so that there are following two aspects shortcoming for the system：
Firstth, 5 mirror surface normal of measurand cannot be too big with the scope of Laser Autocollimator optical axis included angle, otherwise can
Cause the reflected beams to deviate the entrance pupil of Laser Autocollimator optical system, and then lead to not realize that auto-collimation and micro- angle are surveyed
Amount；
Secondth, 5 mirror surface range measurement Laser Autocollimator entrance pupil of measurand must not be too far away, as long as otherwise reflected light
Axis will result in the entrance pupil of the reflected beams deviation Laser Autocollimator optical system with autocollimator optical axis deviation minute angle, into
And lead to not realize auto-collimation and micro- angular surveying.
Two above problem, makes traditional auto-collimation instrument to be limited under low-angle, small operating distance and uses.
The content of the invention
For two problems present in traditional autocollimator, the invention discloses a kind of portable combined zeroing high frequency sound
Big working distance autocollimation and method, compared with traditional autocollimator, have and dramatically increase autocollimatic under identical operating distance
Straight working range, or dramatically increase under identical auto-collimation working range the technical advantage of operating distance.
The object of the present invention is achieved like this：
Portable combined return to zero the big working distance autocollimation of high frequency sound, including light source, reflective collimating mirror, speculum,
And imaging system is fed back, angled adjustment measuring device is set on the speculum；The light beam of light source outgoing, process are reflective
After collimating mirror is collimated into collimated light beam, then reflected by speculum, incide the surface of measured object；From the light of measured object surface reflection
Beam, then after speculum reflects, gathered and be imaged by feedback imaging system；
The feedback imaging system is any one in following two forms：
Firstth, feedback imaging system includes imaging sensor imaging system and 4 quadrant detector imaging system；
Described image sensor imaging system includes the first feedback spectroscope and is arranged on reflective collimating mirror focal point
Imaging sensor；From the light beam of measured object surface reflection, then after speculum reflects, successively thrown by reflective collimating mirror
Penetrate, first feeds back dichroic mirror, gathers imaging by imaging sensor；Under conditions of vertical with optical axis on measured object surface, figure
As sensor into a picture in image plane center position；
Or
Described image sensor imaging system includes the first feedback spectroscope, the first feedback object lens and is arranged on the first feedback
Imaging sensor at object focal point；From the light beam of measured object surface reflection, then after speculum reflects, successively by first
Feed back dichroic mirror, the first feedback object lens transmission, imaging is gathered by imaging sensor；It is vertical with optical axis on measured object surface
Under the conditions of, imaging sensor institute is into a picture in image plane center position；
The 4 quadrant detector imaging system includes the second feedback spectroscope and is arranged on reflective collimating mirror focal point
4 quadrant detector；From the light beam of measured object surface reflection, then after speculum reflects, successively by reflective collimating mirror
Projection, first feed back dichroic mirror, gather imaging by 4 quadrant detector；In the measured object surface condition vertical with optical axis
Under, 4 quadrant detector institute is into a picture in image plane center position；
Or
The 4 quadrant detector imaging system includes the second feedback spectroscope, the second feedback object lens and to be arranged on second anti-
Present the 4 quadrant detector at object focal point；From the light beam of measured object surface reflection, then after speculum reflects, successively pass through
Second feedback dichroic mirror, the second feedback object lens transmit, gather imaging by 4 quadrant detector；In measured object surface and optical axis
Under conditions of vertical, 4 quadrant detector institute is into a picture in image plane center position；
Secondth, feeding back imaging system includes the first feedback spectroscope and the imaging sensor and four-quadrant that are carried by guide rail
Detector is limited, the guide rail shares two stall positions, and it is reflective that a stall position corresponds to imaging sensor image plane center
The focal position of collimating mirror, another stall position make 4 quadrant detector image plane center correspond to the focus position of reflective collimating mirror
Put；
Or
Feeding back imaging system includes the first feedback spectroscope, the first feedback object lens and the image sensing carried by guide rail
Device and 4 quadrant detector, the guide rail share two stall positions, and a stall position makes imaging sensor image plane center position
In the focal position of the first feedback object lens, another stall position makes 4 quadrant detector image plane center positioned at the first feedback object lens
Focal position；
The angle adjustment measuring device includes setting angular adjustment apparatus, angular deflection measurement dress on the mirror
Put and universal shaft, angular adjustment apparatus include the first driver and the second driver；Angular deflection measuring device includes first
Speculum, the second speculum, the first laser interferometer of corresponding first reflector position and corresponding second reflector position
Second laser interferometer；First driver, the first speculum and universal shaft are point-blank, the second driver, second anti-
Penetrate mirror and universal shaft point-blank, and the first driver the second driver vertical with the line of universal shaft with it is universal
The line of axis.
The portable combined realized on the above-mentioned portable combined zeroing big working distance autocollimation of high frequency sound returns to zero high
The big working distance auto-collimation method of frequency response, comprises the following steps：
Step a, bright light source is put, imaging sensor imaging, deviates image plane center direction according to a picture, utilize the first driver
Mirror angle is adjusted with the second driver, a picture is returned to imaging sensor image plane center region；
Step b, 4 quadrant detector is imaged, and point is as deviateing 4 quadrant detector image plane center position after obtaining step a
Δ x and Δ y are put, mirror angle is adjusted using the first driver and the second driver, a picture is returned to 4 quadrant detector picture
Face center；
Step c, the change in displacement Δ x1 that first laser interferometer obtains, and the position that second laser interferometer obtains are read
Move changes delta x2, be reconverted into speculum angle change Δ θ andAnd then obtain measured object surface angle change Δ α and
Δβ；Wherein, Δ θ=f1 (Δ x1, Δ x2),Withf1、f2、
F3, f4 represent 4 functions.
The above-mentioned portable combined zeroing big working distance autocollimation of high frequency sound, further includes Wavefront detecting system and wavefront is mended
Repay system；
The Wavefront detecting system includes Wavefront detecting spectroscope and air agitation wave front detector and speculum deformation
It is at least one in wave front detector；The Wavefront detecting spectroscope is arranged between speculum and measured object, air agitation ripple
Preceding detector is arranged on the spectroscopical reflected light path of Wavefront detecting, and speculum deformation wave front detector is arranged on the two of speculum
In secondary reflection light path；
The wavefront compensation system includes compensatory light, compensation collimating mirror and transmission liquid crystal spatial light modulator；Mend
The light beam of light source outgoing is repaid, after overcompensation collimating mirror is collimated into collimated light beam, then by transmission liquid crystal spatial light modulator tune
System, is incided on Wavefront detecting spectroscope.
The portable combined realized on the above-mentioned portable combined zeroing big working distance autocollimation of high frequency sound returns to zero high
The big working distance auto-collimation method of frequency response, it is desirable to which Wavefront detecting system only includes Wavefront detecting spectroscope and air agitation Wavefront detecting
Device；
Comprise the following steps：
Step a, reference substance of the surface perpendicular to optical axis direction is chosen；
Step b, bright light source is put, the selected reference substances of step a are individually positioned in operating position A and nearly operating position B,
Air agitation wave front detector respectively obtains two groups of data of GA and GB；
Step c, G1=GA-GB, obtains wavefront variation caused by air agitation；
Step d, transmission liquid crystal spatial light modulator parameter is adjusted according to f5 (G1), lights compensatory light, make-up air
Disturbance；
Step e, imaging sensor is imaged, and is deviateed image plane center direction according to a picture, is utilized the first driver and second to drive
Dynamic device adjustment mirror angle, makes a picture return to imaging sensor image plane center region；
Step f, 4 quadrant detector is imaged, and point is as deviateing 4 quadrant detector image plane center position after obtaining step a
Δ x and Δ y are put, mirror angle is adjusted using the first driver and the second driver, a picture is returned to 4 quadrant detector picture
Face center；
Step g, the change in displacement Δ x1 that first laser interferometer obtains, and the position that second laser interferometer obtains are read
Move changes delta x2, be reconverted into speculum angle change Δ θ andAnd then obtain measured object surface angle change Δ α and
Δβ；Wherein, Δ θ=f1 (Δ x1, Δ x2),Withf1、f2、
F3, f4 represent 4 functions.
The portable combined realized on the above-mentioned portable combined zeroing big working distance autocollimation of high frequency sound returns to zero high
The big working distance auto-collimation method of frequency response, it is desirable to which Wavefront detecting system is visited before only including Wavefront detecting spectroscope and speculum deformation waves
Survey device；
Comprise the following steps：
Step a, reference substance of the surface perpendicular to optical axis direction is chosen；
Step b, bright light source is put, the selected reference substances of step a are individually positioned in operating position A and nearly operating position B,
Speculum deformation wave front detector respectively obtains two groups of data of GC and GD；
Step c, G2=GC-GD, obtain air agitation and speculum deformation it is common caused by wavefront variation；
Step d, transmission liquid crystal spatial light modulator parameter is adjusted according to f5 (G2), lights compensatory light, make-up air
Disturbance and speculum deformation；
Step e, imaging sensor is imaged, and is deviateed image plane center direction according to a picture, is utilized the first driver and second to drive
Dynamic device adjustment mirror angle, makes a picture return to imaging sensor image plane center region；
Step f, 4 quadrant detector is imaged, and point is as deviateing 4 quadrant detector image plane center position after obtaining step a
Δ x and Δ y are put, mirror angle is adjusted using the first driver and the second driver, a picture is returned to 4 quadrant detector picture
Face center；
Step g, the change in displacement Δ x1 that first laser interferometer obtains, and the position that second laser interferometer obtains are read
Move changes delta x2, be reconverted into speculum angle change Δ θ andAnd then obtain measured object surface angle change Δ α and
Δβ；Wherein, Δ θ=f1 (Δ x1, Δ x2),Withf1、f2、
F3, f4 represent 4 functions.
The portable combined realized on the above-mentioned portable combined zeroing big working distance autocollimation of high frequency sound returns to zero high
The big working distance auto-collimation method of frequency response, it is desirable to which Wavefront detecting system is visited including Wavefront detecting spectroscope, air agitation wavefront at the same time
Survey device and speculum deformation wave front detector；
Comprise the following steps：
Step a, reference substance of the surface perpendicular to optical axis direction is chosen；
Step b, bright light source is put, the selected reference substances of step a are individually positioned in operating position A and nearly operating position B,
Air agitation wave front detector respectively obtains two groups of data of GA and GB, and speculum deformation wave front detector respectively obtains GC and GD two
Group data；
Step c, G1=GA-GB, obtains wavefront variation caused by air agitation；G2=GC-GD, obtains air agitation and anti-
Penetrate mirror deformation it is common caused by wavefront variation；G=G2-G1, obtains wavefront variation caused by speculum deformation；
Step d,
Transmission liquid crystal spatial light modulator parameter is adjusted according to f5 (G1), lights compensatory light, make-up air disturbance；
Or
Adjust transmission liquid crystal spatial light modulator parameter according to f5 (G2), light compensatory light, make-up air disturbance and
Speculum deformation；
Or
Transmission liquid crystal spatial light modulator parameter is adjusted according to f5 (G), lights compensatory light, compensatory reflex mirror deformation；
Step e, imaging sensor is imaged, and is deviateed image plane center direction according to a picture, is utilized the first driver and second to drive
Dynamic device adjustment mirror angle, makes a picture return to imaging sensor image plane center region；
Step f, 4 quadrant detector is imaged, and point is as deviateing 4 quadrant detector image plane center position after obtaining step a
Δ x and Δ y are put, mirror angle is adjusted using the first driver and the second driver, a picture is returned to 4 quadrant detector picture
Face center；
Step g, the change in displacement Δ x1 that first laser interferometer obtains, and the position that second laser interferometer obtains are read
Move changes delta x2, be reconverted into speculum angle change Δ θ andAnd then obtain measured object surface angle change Δ α and
Δβ；Wherein, Δ θ=f1 (Δ x1, Δ x2),Withf1、f2、
F3, f4 represent 4 functions.
Beneficial effect：
Compared with traditional autocollimator, invention increases speculum and angle on the mirror is set to adjust measurement
Device, this structure setting, can have larger drift angle between measured object incident light and reflected light or there are relatively larger transverse position
In the case of shifting, measuring device is adjusted by angle and adjusts speculum posture, it is ensured that reflected light backtracking is simultaneously imaged by feedback
System receives, and then effectively avoids the problem that measured object reflected light deviates measuring system and leads to not measurement, so that this
Invention has dramatically increases auto-collimation working range under identical operating distance, or significantly increases under identical auto-collimation working range
Add the technical advantage of operating distance.
In addition, the present invention also has following several technical advantages：
Firstth, reflective collimating mirror, although adding manufacture difficulty, improving cost of manufacture, this structure are selected
With the irreplaceable technical advantage of following three aspects：Collimating mirror reflective first is conducive to instrument miniaturization, makes portable
Instrument；Secondly reflective collimating mirror no color differnece, light source frequency range is wider, and the advantage of its measurement accuracy is more obvious；3rd is to pass through plating
Membrane technology, can realize that the heat absorption of reflective collimating mirror is far smaller than transmission-type, effectively avoid the hair of collimating mirror thermal deformation problem
Raw, this not only enables whole system match high power light source, but also is also beneficial to ensure the measuring precision；
Secondth, imaging sensor and 4 quadrant detector are selected collectively as the image device in feedback imaging system, knot
The advantage that image area sensor is big and 4 quadrant detector position resolution is high is closed；Wherein, imaging sensor can be true
Protect in the case where measured object reflected light and incident light drift angle are larger, reflected light still is able to the entrance pupil into optical system, will not
Beyond range of receiving；On this basis, recycle speculum to realize reflected light quickly real-time return compensation, reflected light is adjusted to
4 quadrant detector position, and can be surveyed according to the high position resolution advantage of 4 quadrant detector to obtain the angle of higher
Accuracy of measurement；Therefore, imaging sensor and 4 quadrant detector are combined, not only so that auto-collimation working range or work of the present invention
Greatly extended as distance, and be conducive to improve angle-measurement accuracy；
3rd, laser interferometer is selected as angular deflection measuring device so that the present invention can be in high sample frequency (most
High energy reaches 2000Hz) under complete angular surveying, that is, there is very high measuring speed；If the first speculum and the second speculum
Using prism of corner cube, the optical characteristics that prism of corner cube can also be utilized to return to incident ray deflection 180 degree, makes angle of the invention
Degree measurement range is greatly enhanced, i.e., while the present invention is with very high measurement speed, the also technology with wide-angle range
Advantage；
4th, the present invention additionally uses following technology：First driver, the first speculum and universal shaft are straight at one
On line, the second driver, the second speculum and universal shaft point-blank, and the company of the first driver and universal shaft
The line of vertical second driver of line and universal shaft；The orthogonal two dimension setting of this two lines so that different line sides
To data it is non-interference, without decoupling computing, so can conveniently demarcate, simplify calculating process, improve measuring speed.
Brief description of the drawings
Fig. 1 is the structure diagram of traditional auto-collimation angle measurement system.
Fig. 2 is that the structure of the portable combined zeroing big working distance autocollimation specific embodiment one of high frequency sound of the present invention is shown
It is intended to.
Fig. 3 is the structure diagram of angle adjustment measuring device.
Fig. 4 is second of structure diagram of imaging sensor imaging system.
Fig. 5 is second of structure diagram of 4 quadrant detector imaging system.
Fig. 6 is the first of the portable combined zeroing big working distance autocollimation specific embodiment two of high frequency sound of the present invention
Structure diagram.
Fig. 7 is second of the portable combined zeroing big working distance autocollimation specific embodiment two of high frequency sound of the present invention
Structure diagram.
Fig. 8 is that the structure of the portable combined zeroing big working distance autocollimation specific embodiment three of high frequency sound of the present invention is shown
It is intended to.
Fig. 9 is that the structure of the portable combined zeroing big working distance autocollimation specific embodiment four of high frequency sound of the present invention is shown
It is intended to.
Figure 10 is the structure of the portable combined zeroing big working distance autocollimation specific embodiment five of high frequency sound of the present invention
Schematic diagram.
In figure：1 light source, 22 reflective collimating mirrors, 3 speculums, 4 angles adjustment measuring device, 411 first drivers, 412
Second driver, 425 first speculums, 426 second speculums, 427 first laser interferometers, 428 second laser interferometers, 43
Universal shaft, 5 measured objects, 6 feedback imaging systems, 61 first feedback spectroscopes, 62 second feedback spectroscopes, 63 first feedback things
Mirror, 64 second feedback object lens, 65 imaging sensors, 66 4 quadrant detectors, 68 guide rails, 7 Wavefront detecting systems, 71 Wavefront detectings
Spectroscope, 72 air agitation wave front detectors, 73 speculum deformation wave front detectors, 8 wavefront compensation systems, 81 compensatory lights,
82 compensation collimating mirrors, 83 transmission liquid crystal spatial light modulators.
Specific embodiment
The specific embodiment of the invention is described in further detail below in conjunction with the accompanying drawings.
Specific embodiment one
The present embodiment is the portable combined zeroing big working distance autocollimation embodiment of high frequency sound.
The portable combined zeroing big working distance autocollimation of high frequency sound of the present embodiment, structure diagram are as shown in Figure 2.
The autocollimation includes light source 1, reflective collimating mirror 22, speculum 3 and feeds back imaging system 6, on the speculum 3
Angled adjustment measuring device 4 is set；The light beam that light source 1 is emitted, after reflective collimating mirror 22 is collimated into collimated light beam, then
Reflected by speculum 3, incide the surface of measured object 5；Reflected from the light beam of 5 surface of measured object reflection, then by speculum 3
Afterwards, imaging is gathered by feedback imaging system 6；
The feedback imaging system 6 includes imaging sensor imaging system and 4 quadrant detector imaging system；
Described image sensor imaging system includes the first feedback spectroscope 61 and is arranged on 21 focus of transmission-type collimating mirror
The imaging sensor 65 at place；From the light beam of 5 surface of measured object reflection, then after the reflection of speculum 3, successively by transmission-type quasi
Straight mirror 21 projects, the first feedback spectroscope 61 reflects, gathers imaging by imaging sensor 65；Hang down on 5 surface of measured object with optical axis
Under conditions of straight, the institute of imaging sensor 65 is into a picture in image plane center position；
The 4 quadrant detector imaging system includes the second feedback spectroscope 62, second and feeds back object lens 64 and be arranged on the
The 4 quadrant detector 66 of two feedback 64 focal points of object lens；Reflected from the light beam of 5 surface of measured object reflection, then by speculum 3
Afterwards, successively reflected by the second feedback spectroscope 62, the second feedback object lens 64 transmit, gather imaging by 4 quadrant detector 66；
Under conditions of vertical with optical axis on 5 surface of measured object, the institute of 4 quadrant detector 66 is into a picture in image plane center position；
The angle adjustment measuring device 4 includes angular adjustment apparatus, the angular deflection measurement dress being arranged on speculum 3
Put and universal shaft 43, angular adjustment apparatus include the first driver 411 and the second driver 412；Angular deflection measuring device
Including the first speculum 425, the second speculum 426, corresponding first speculum, 425 position first laser interferometer 427 and
The second laser interferometer 428 of corresponding second speculum, 426 position；First driver 411, the first speculum 425 and universal
Axis 43 point-blank, the second driver 412, the second speculum 426 and universal shaft 43 point-blank, and
The line of one driver 411, second driver 412 vertical with the line of universal shaft 43 and universal shaft 43；As shown in Figure 3.
It should be noted that：
Firstth, in the present embodiment, imaging sensor imaging system is also an option that such as lower structure：Including the first feedback point
Light microscopic 61, first feeds back object lens 63 and is arranged on the imaging sensor 65 of 63 focal point of the first feedback object lens；From 5 surface of measured object
The light beam of reflection, then by speculum 3 reflection after, successively by first feedback spectroscope 61 reflect, first feedback object lens 63 it is saturating
Penetrate, imaging is gathered by imaging sensor 65；Under conditions of vertical with optical axis on 5 surface of measured object, the institute of imaging sensor 65 is into point
As in image plane center position；As shown in figure 4, in the figure, eliminate 4 quadrant detector imaging system.
Secondth, in the present embodiment, 4 quadrant detector imaging system is also an option that such as lower structure：Including the second feedback
Spectroscope 62 and the 4 quadrant detector 66 for being arranged on 21 focal point of transmission-type collimating mirror；The light beam reflected from 5 surface of measured object,
Again after the reflection of speculum 3, successively projected by transmission-type collimating mirror 21, the first feedback spectroscope 61 reflects, by four-quadrant
The collection imaging of detector 66；Under conditions of vertical with optical axis on 5 surface of measured object, the institute of 4 quadrant detector 66 is into a picture in image planes
Center；As shown in figure 5, in the figure, eliminate imaging sensor imaging system.
Specific embodiment two
The present embodiment is the portable combined zeroing big working distance autocollimation embodiment of high frequency sound.
The portable combined zeroing big working distance autocollimation of high frequency sound of the present embodiment, the difference with specific embodiment one
It is the structure for feeding back imaging system 6；The structure of the present embodiment feedback imaging system 6 is one kind in following two forms：
Firstth, feeding back imaging system 6 includes the first feedback spectroscope 61 and the imaging sensor 65 carried by guide rail 68
With 4 quadrant detector 66, as shown in Figure 6；The guide rail 68 shares two stall positions, and a stall position makes image sensing
65 image plane center of device corresponds to the focal position of reflective collimating mirror 22, another stall position makes in 66 image planes of 4 quadrant detector
The heart corresponds to the focal position of reflective collimating mirror 22；
Secondth, feeding back imaging system 6 includes the first feedback spectroscope 61, first feedback object lens 63 and is held by guide rail 68
The imaging sensor 65 and 4 quadrant detector 66 of load, as shown in Figure 7；The guide rail 68 shares two stall positions, and one is stopped
Position makes 65 image plane center of imaging sensor make four-quadrant positioned at the focal position of the first feedback object lens 63, another stall position
66 image plane center of detector is limited positioned at the focal position of the first feedback object lens 63.
Specific embodiment three
The present embodiment is the portable combined zeroing big working distance autocollimation embodiment of high frequency sound.
The portable combined zeroing big working distance autocollimation of high frequency sound of the present embodiment, structure diagram are as shown in Figure 8.
On the basis of specific embodiment one, the portable combined zeroing big working distance autocollimation of high frequency sound of the present embodiment is also set up
There are Wavefront detecting system 7 and wavefront compensation system 8；
The Wavefront detecting system 7 includes Wavefront detecting spectroscope 71 and air agitation wave front detector 72；The wavefront
Detection spectroscope 71 is arranged between speculum 3 and measured object 5, and air agitation wave front detector 72 is arranged on Wavefront detecting light splitting
On the reflected light path of mirror 71, speculum deformation wave front detector 73 is arranged in the secondary reflection light path of speculum 3；
The wavefront compensation system 8 includes compensatory light 81, compensation collimating mirror 82 and the light modulation of transmission liquid crystal space
Device 83；The light beam that compensatory light 81 is emitted, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space
Optical modulator 83 is modulated, and is incided on Wavefront detecting spectroscope 71.
Specific embodiment four
The present embodiment is the portable combined zeroing big working distance autocollimation embodiment of high frequency sound.
The portable combined zeroing big working distance autocollimation of high frequency sound of the present embodiment, structure diagram are as shown in Figure 9.
On the basis of specific embodiment one, the portable combined zeroing big working distance autocollimation of high frequency sound of the present embodiment is also set up
There are Wavefront detecting system 7 and wavefront compensation system 8；
The Wavefront detecting system 7 includes Wavefront detecting spectroscope 71 and speculum deformation wave front detector 73；The ripple
Preceding detection spectroscope 71 is arranged between speculum 3 and measured object 5, and air agitation wave front detector 72 is arranged on Wavefront detecting point
On the reflected light path of light microscopic 71, speculum deformation wave front detector 73 is arranged in the secondary reflection light path of speculum 3；
The wavefront compensation system 8 includes compensatory light 81, compensation collimating mirror 82 and the light modulation of transmission liquid crystal space
Device 83；The light beam that compensatory light 81 is emitted, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space
Optical modulator 83 is modulated, and is incided on Wavefront detecting spectroscope 71.
Specific embodiment five
The present embodiment is the portable combined zeroing big working distance autocollimation embodiment of high frequency sound.
The portable combined zeroing big working distance autocollimation of high frequency sound of the present embodiment, structure diagram such as Figure 10 institutes
Show.On the basis of specific embodiment one, the big working distance autocollimation of portable combined zeroing high frequency sound of the present embodiment is also
It is provided with Wavefront detecting system 7 and wavefront compensation system 8；
The Wavefront detecting system 7 includes Wavefront detecting spectroscope 71, air agitation wave front detector 72 and speculum shape
Become wave front detector 73；The Wavefront detecting spectroscope 71 is arranged between speculum 3 and measured object 5, and air agitation wavefront is visited
Survey device 72 to be arranged on the reflected light path of Wavefront detecting spectroscope 71, speculum deformation wave front detector 73 is arranged on speculum 3
Secondary reflection light path on；
The wavefront compensation system 8 includes compensatory light 81, compensation collimating mirror 82 and the light modulation of transmission liquid crystal space
Device 83；The light beam that compensatory light 81 is emitted, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space
Optical modulator 83 is modulated, and is incided on Wavefront detecting spectroscope 71.
For above autocollimation embodiment, there are following three points to need to illustrate：
Firstth, the first driver 411 and the second driver 412 in described angular adjustment apparatus, can both select to drive
The stepper motor or motor servo driver of speed, and the higher piezoelectric ceramic actuator of driving precision can be selected, also
Stepper motor or motor servo driver can be used in mixed way with piezoelectric ceramic actuator；Those skilled in the art can basis
Actual needs is reasonably selected.
Although the secondth, specific embodiment three, specific embodiment four and specific embodiment five, are all in specific embodiment
Wavefront detecting system 7 and wavefront compensation system 8 are set on the basis of one, but wavefront is set on the basis of specific embodiment two
Detection system 7 and wavefront compensation system 8, also set up.Those skilled in the art can in conjunction with specific embodiments a system with
These three are easily set wavefront by the difference between system described in specific embodiment two on the basis of specific embodiment two
The system building of detection system 7 and wavefront compensation system 8 comes out, therefore no longer describes in detail here.
3rd, in all of above autocollimation embodiment, it is anti-that angular deflection measuring device all only includes two pairs of planes
The combination of mirror and laser interferometer is penetrated, this design acquiescence speculum 3 does not produce translation and makes during the work time；Such as
Fruit produces translation in view of speculum 3 and influences measurement accuracy at work, and the 3rd pair can be placed at 43 position of universal shaft
The combination of plane mirror and laser interferometer, to offset the identical translation that three laser interferometer produce, it is ensured that measurement accuracy.
Specific embodiment six
The present embodiment is to return to zero in portable combined described in specific embodiment one on the big working distance autocollimation of high frequency sound
The portable combined zeroing big working distance auto-collimation embodiment of the method for high frequency sound of realization.
The portable combined zeroing big working distance auto-collimation method of high frequency sound of the present embodiment, comprises the following steps：
Step a, bright light source 1 is put, imaging sensor 65 is imaged, and is deviateed image plane center direction according to a picture, is utilized first to drive
Dynamic device 411 and second driver 412 adjustment 3 angle of speculum, makes a picture return to 65 image plane center region of imaging sensor；
Step b, 4 quadrant detector 66 is imaged, and point is as deviateing in 66 image planes of 4 quadrant detector after obtaining step a
The heart position Δ x and Δ y, adjust 3 angle of speculum using the first driver 411 and the second driver 412, a picture is returned to four-quadrant
Limit 66 image plane center position of detector；
Step c, the change in displacement Δ x1 that first laser interferometer 427 obtains is read, and second laser interferometer 428 obtains
The change in displacement Δ x2 arrived, be reconverted into speculum 3 angle change Δ θ andAnd then the angle for obtaining 5 surface of measured object becomes
Change Δ α and Δ β；Wherein, Δ θ=f1 (Δ x1, Δ x2),With
F1, f2, f3, f4 represent 4 functions.
It should be noted that if the present embodiment is in the method realized described in specific embodiment two in system, then
After point picture returns to 65 image plane center region of imaging sensor, guide rail 68 is adjusted to another stall position from a stall position,
66 image plane center of 4 quadrant detector is corresponded to the focal position of transmission-type collimating mirror 21, then carry out into 4 quadrant detector 66
Picture.
The main innovative point of the present invention is the angle adjustment measurement dress for adding speculum 3 and being arranged on speculum 3
4 are put, this structure can have larger drift angle or the feelings there are relatively larger transverse displacement between 5 incident light of measured object and reflected light
Under condition, measuring device 4 is adjusted by angle and adjusts speculum posture, makes reflected light backtracking and is connect by feedback imaging system 6
Receive, effectively avoid the problem that measured object reflected light deviates measuring system and leads to not measurement.
However, the introducing of speculum 3, its face type error can be delivered in final result, reduce the measurement accuracy of system；Together
When, the increase of operating distance causes the air agitation between speculum 3 and measured object 5 can not ignore again, can also reduce system
Measurement accuracy.As it can be seen that to realize high-acruracy survey, 3 face type error of speculum and speculum 3 are just must take into account with being tested
Influence of the air agitation to measurement result between thing 5, for this reason, devising specific embodiment seven, specific embodiment eight and specific
Embodiment nine.
Specific embodiment seven
The present embodiment is to return to zero in portable combined described in specific embodiment three on the big working distance autocollimation of high frequency sound
The portable combined zeroing big working distance auto-collimation embodiment of the method for high frequency sound of realization.
The portable combined zeroing big working distance auto-collimation method of high frequency sound of the present embodiment, comprises the following steps：
Step a, reference substance of the surface perpendicular to optical axis direction is chosen；
Step b, bright light source 1 is put, the selected reference substances of step a are individually positioned in operating position A and nearly operating position
B, air agitation wave front detector 72 respectively obtain two groups of data of GA and GB；
Step c, G1=GA-GB, obtains wavefront variation caused by air agitation；
Step d, according to 83 parameter of f5 (G1) adjustment transmission liquid crystals spatial light modulator, compensatory light 81 is lighted, is compensated
Air agitation；
Step e, imaging sensor 65 is imaged, and according to as deviateing an image plane center direction, utilizes the first driver 411 and the
Two drivers 412 adjust 3 angle of speculum, a picture is returned to 65 image plane center region of imaging sensor；
Step f, 4 quadrant detector 66 is imaged, and point is as deviateing in 66 image planes of 4 quadrant detector after obtaining step a
The heart position Δ x and Δ y, adjust 3 angle of speculum using the first driver 411 and the second driver 412, a picture is returned to four-quadrant
Limit 66 image plane center position of detector；
Step g, the change in displacement Δ x1 that first laser interferometer 427 obtains is read, and second laser interferometer 428 obtains
The change in displacement Δ x2 arrived, be reconverted into speculum 3 angle change Δ θ andAnd then the angle for obtaining 5 surface of measured object becomes
Change Δ α and Δ β；Wherein, Δ θ=f1 (Δ x1, Δ x2),With
F1, f2, f3, f4 represent 4 functions.
Implement the method for the present embodiment in the system of specific embodiment three, air agitation wave front detector 72 can be utilized
Air agitation is separated, and then air agitation is compensated using wavefront compensation system 8, is finally realized without air agitation
The high-acruracy survey of influence.
Specific embodiment eight
The present embodiment is to return to zero in portable combined described in specific embodiment four on the big working distance autocollimation of high frequency sound
The portable combined zeroing big working distance auto-collimation embodiment of the method for high frequency sound of realization.
The portable combined zeroing big working distance auto-collimation method of high frequency sound of the present embodiment, comprises the following steps：
Step a, reference substance of the surface perpendicular to optical axis direction is chosen；
Step b, bright light source 1 is put, the selected reference substances of step a are individually positioned in operating position A and nearly operating position
B, speculum deformation wave front detector 73 respectively obtain two groups of data of GC and GD；
Step c, G2=GC-GD, obtain air agitation and speculum deformation it is common caused by wavefront variation；
Step d, according to 83 parameter of f5 (G2) adjustment transmission liquid crystals spatial light modulator, compensatory light 81 is lighted, is compensated
Air agitation and speculum deformation；
Step e, imaging sensor 65 is imaged, and according to as deviateing an image plane center direction, utilizes the first driver 411 and the
Two drivers 412 adjust 3 angle of speculum, a picture is returned to 65 image plane center region of imaging sensor；
Step f, 4 quadrant detector 66 is imaged, and point is as deviateing in 66 image planes of 4 quadrant detector after obtaining step a
The heart position Δ x and Δ y, adjust 3 angle of speculum using the first driver 411 and the second driver 412, a picture is returned to four-quadrant
Limit 66 image plane center position of detector；
Step g, the change in displacement Δ x1 that first laser interferometer 427 obtains is read, and second laser interferometer 428 obtains
The change in displacement Δ x2 arrived, be reconverted into speculum 3 angle change Δ θ andAnd then the angle for obtaining 5 surface of measured object becomes
Change Δ α and Δ β；Wherein, Δ θ=f1 (Δ x1, Δ x2),With
F1, f2, f3, f4 represent 4 functions.
Implement the method for the present embodiment on the device of specific embodiment four, speculum deformation wave front detector can be utilized
Air agitation and speculum deformation are carried out overall separation by 73, and then using wavefront compensation system 8 to air agitation and speculum
Deformation carries out entire compensation, finally realizes the high-acruracy survey without air agitation and speculum influence of crust deformation.
Specific embodiment nine
The present embodiment is to return to zero in portable combined described in specific embodiment five on the big working distance autocollimation of high frequency sound
The portable combined zeroing big working distance auto-collimation embodiment of the method for high frequency sound of realization.
The portable combined zeroing big working distance auto-collimation method of high frequency sound of the present embodiment, comprises the following steps：
Step a, reference substance of the surface perpendicular to optical axis direction is chosen；
Step b, bright light source 1 is put, the selected reference substances of step a are individually positioned in operating position A and nearly operating position
B, air agitation wave front detector 72 respectively obtain two groups of data of GA and GB, and speculum deformation wave front detector 73 respectively obtains GC
With two groups of data of GD；
Step c, G1=GA-GB, obtains wavefront variation caused by air agitation；G2=GC-GD, obtains air agitation and anti-
Penetrate mirror deformation it is common caused by wavefront variation；G=G2-G1, obtains wavefront variation caused by speculum deformation；
Step d,
According to 83 parameter of f5 (G1) adjustment transmission liquid crystals spatial light modulator, compensatory light 81 is lighted, make-up air is disturbed
It is dynamic；
Or
According to 83 parameter of f5 (G2) adjustment transmission liquid crystals spatial light modulator, compensatory light 81 is lighted, make-up air is disturbed
Dynamic and speculum deformation；
Or
According to 83 parameter of f5 (G) adjustment transmission liquid crystals spatial light modulator, compensatory light 81, compensatory reflex mirror shape are lighted
Become；
Step e, imaging sensor 65 is imaged, and according to as deviateing an image plane center direction, utilizes the first driver 411 and the
Two drivers 412 adjust 3 angle of speculum, a picture is returned to 65 image plane center region of imaging sensor；
Step f, 4 quadrant detector 66 is imaged, and point is as deviateing in 66 image planes of 4 quadrant detector after obtaining step a
The heart position Δ x and Δ y, adjust 3 angle of speculum using the first driver 411 and the second driver 412, a picture is returned to four-quadrant
Limit 66 image plane center position of detector；
Step g, the change in displacement Δ x1 that first laser interferometer 427 obtains is read, and second laser interferometer 428 obtains
The change in displacement Δ x2 arrived, be reconverted into speculum 3 angle change Δ θ andAnd then the angle for obtaining 5 surface of measured object becomes
Change Δ α and Δ β；Wherein, Δ θ=f1 (Δ x1, Δ x2),With
F1, f2, f3, f4 represent 4 functions.
Implement the method for the present embodiment on the device of specific embodiment five, air agitation wave front detector 72 can be utilized
Air agitation and speculum deformation are separately separated with speculum deformation wave front detector 73, and then optionally to air
Disturbance carries out separate compensation, separate compensation is carried out to speculum deformation or carries out overall benefit to air agitation and speculum deformation
Repay, finally realize that the high accuracy without air agitation or no-mirror deformation or without air agitation and speculum influence of crust deformation is surveyed
Amount.
The present embodiment has an advantage that, that is, can be to each after being separately separated air agitation and speculum deformation
Influence size of the part to result is individually assessed, and can not only be found out in air agitation and speculum deformation, who is to influence
The principal contradiction of measurement accuracy, and mirror deformation can individually be assessed, while speculum processing quality is carried out
Effective evaluation.
It should also be noted that, if specific embodiment three, specific embodiment four and specific embodiment five are based on tool
Body embodiment two and the device built, then in specific embodiment seven, specific embodiment eight and specific embodiment nine,
After point picture returns to 65 image plane center region of imaging sensor, guide rail 68 is adjusted to another stall position from a stall position,
66 image plane center of 4 quadrant detector is corresponded to the focal position of transmission-type collimating mirror 21, then carry out into 4 quadrant detector 66
Picture.
Claims (6)
- The big working distance autocollimation of high frequency sound 1. portable combined returns to zero, it is characterised in that including light source (1), reflective standard Straight mirror (22), speculum (3) and feedback imaging system (6), set angled adjustment measuring device on the speculum (3) (4)；The light beam of light source (1) outgoing, reflects after reflective collimating mirror (22) is collimated into collimated light beam, then by speculum (3), Incide the surface of measured object (5)；From the light beam of measured object (5) surface reflection, then after speculum (3) reflection, by feeding back Imaging system (6) collection imaging；The feedback imaging system (6) is any one in following two forms：Firstth, feeding back imaging system (6) includes imaging sensor imaging system and 4 quadrant detector imaging system；Described image sensor imaging system includes the first feedback spectroscope (61) and is arranged on reflective collimating mirror (22) focus The imaging sensor (65) at place；From the light beam of measured object (5) surface reflection, then after speculum (3) reflection, successively by anti- Penetrate formula collimating mirror (22) projection, the first feedback spectroscope (61) reflection, imaging is gathered by imaging sensor (65)；In measured object (5) under conditions of surface is vertical with optical axis, imaging sensor (65) institute is into a picture in image plane center position；OrDescribed image sensor imaging system includes the first feedback spectroscope (61), the first feedback object lens (63) and is arranged on first Feed back the imaging sensor (65) of object lens (63) focal point；From the light beam of measured object (5) surface reflection, then by speculum (3) After reflection, successively adopted by the first feedback spectroscope (61) reflection, the first feedback object lens (63) transmission, by imaging sensor (65) Collection imaging；Under conditions of vertical with optical axis on measured object (5) surface, imaging sensor (65) institute is into a picture in image plane center position Put；The 4 quadrant detector imaging system includes the second feedback spectroscope (62) and is arranged on reflective collimating mirror (22) Jiao 4 quadrant detector (66) at point；From the light beam of measured object (5) surface reflection, then after speculum (3) reflection, successively pass through Cross reflective collimating mirror (22) projection, the first feedback spectroscope (61) reflection, imaging is gathered by 4 quadrant detector (66)；In quilt Under conditions of survey thing (5) surface is vertical with optical axis, 4 quadrant detector (66) institute is into a picture in image plane center position；OrThe 4 quadrant detector imaging system includes the second feedback spectroscope (62), the second feedback object lens (64) and is arranged on the The 4 quadrant detector (66) of two feedback object lens (64) focal points；From the light beam of measured object (5) surface reflection, then by speculum (3) after reflecting, successively by the second feedback spectroscope (62) reflection, the second feedback object lens (64) transmission, by 4 quadrant detector (66) collection imaging；Under conditions of vertical with optical axis on measured object (5) surface, 4 quadrant detector (66) institute is into a picture in image planes Center；Secondth, feeding back imaging system (6) includes the first feedback spectroscope (61) and the imaging sensor carried by guide rail (68) (65) and 4 quadrant detector (66), the guide rail (68) share two stall positions, and a stall position makes imaging sensor (65) image plane center corresponds to the focal position of reflective collimating mirror (22), another stall position make 4 quadrant detector (66) as Face center corresponds to the focal position of reflective collimating mirror (22)；OrFeeding back imaging system (6) includes the first feedback spectroscope (61), the first feedback object lens (63) and is carried by guide rail (68) Imaging sensor (65) and 4 quadrant detector (66), the guide rail (68) shares two stall positions, a stall position Imaging sensor (65) image plane center is set to make four-quadrant positioned at the focal position of the first feedback object lens (63), another stall position Detector (66) image plane center is positioned at the focal position of the first feedback object lens (63)；The angle adjustment measuring device (4) includes angular adjustment apparatus, the angular deflection measurement dress being arranged on speculum (3) Put and universal shaft (43), angular adjustment apparatus include the first driver (411) and the second driver (412)；Angular deflection is surveyed Amount device, which includes the first speculum (425), the second speculum (426), the first laser of corresponding first speculum (425) position, to be done Interferometer (427) and the second laser interferometer (428) of corresponding second speculum (426) position；First driver (411), One speculum (425) and universal shaft (43) point-blank, the second driver (412), the second speculum (426) and Universal shaft (43) point-blank, and the first driver (411) the second driver vertical with the line of universal shaft (43) (412) with the line of universal shaft (43).
- The big working distance autocollimation of high frequency sound 2. portable combined according to claim 1 returns to zero, it is characterised in that also Including Wavefront detecting system (7) and wavefront compensation system (8)；The Wavefront detecting system (7) is including Wavefront detecting spectroscope (71) and air agitation wave front detector (72) and instead Penetrate at least one in mirror deformation wave front detector (73)；The Wavefront detecting spectroscope (71) is arranged on speculum (3) and quilt Survey between thing (5), air agitation wave front detector (72) is arranged on the reflected light path of Wavefront detecting spectroscope (71), speculum Deformation wave front detector (73) is arranged in the secondary reflection light path of speculum (3)；The wavefront compensation system (8) includes compensatory light (81), compensation collimating mirror (82) and transmission liquid crystal spatial light tune Device (83) processed；The light beam of compensatory light (81) outgoing, after overcompensation collimating mirror (82) is collimated into collimated light beam, then by transmission-type LCD space light modulator (83) is modulated, and is incided on Wavefront detecting spectroscope (71).
- 3. in the portable combined realized described in claim 1 on the portable combined zeroing big working distance autocollimation of high frequency sound Return to zero the big working distance auto-collimation method of high frequency sound, it is characterised in that comprises the following steps：Step a, bright light source (1) is put, imaging sensor (65) imaging, deviates image plane center direction according to a picture, utilize first to drive Dynamic device (411) and the second driver (412) adjustment speculum (3) angle, makes a picture return to imaging sensor (65) image plane center Region；Step b, 4 quadrant detector (66) is imaged, and point is as deviateing in 4 quadrant detector (66) image planes after obtaining step a The heart position Δ x and Δ y, adjust speculum (3) angle using the first driver (411) and the second driver (412), return a picture To 4 quadrant detector (66) image plane center position；Step c, the change in displacement Δ x1 that first laser interferometer (427) obtains is read, and second laser interferometer (428) obtains The change in displacement Δ x2 arrived, be reconverted into speculum (3) angle change Δ θ andAnd then obtain the angle on measured object (5) surface Spend changes delta α and Δ β；Wherein, Δ θ=f1 (Δ x1, Δ x2),WithF1, f2, f3, f4 represent 4 functions.
- 4. in the portable combined realized described in claim 2 on the portable combined zeroing big working distance autocollimation of high frequency sound Return to zero the big working distance auto-collimation method of high frequency sound, it is desirable to which Wavefront detecting system (7) only includes Wavefront detecting spectroscope (71) and sky Gas disturbance wave front detector (72)；It is characterised in that it includes following steps：Step a, reference substance of the surface perpendicular to optical axis direction is chosen；Step b, bright light source (1) is put, the selected reference substances of step a are individually positioned in operating position A and nearly operating position B, Air agitation wave front detector (72) respectively obtains two groups of data of GA and GB；Step c, G1=GA-GB, obtains wavefront variation caused by air agitation；Step d, transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G1), lights compensatory light (81), compensated Air agitation；Step e, imaging sensor (65) is imaged, and according to as deviateing an image plane center direction, utilizes the first driver (411) and the Two drivers (412) adjust speculum (3) angle, a picture is returned to imaging sensor (65) image plane center region；Step f, 4 quadrant detector (66) is imaged, and point is as deviateing in 4 quadrant detector (66) image planes after obtaining step a The heart position Δ x and Δ y, adjust speculum (3) angle using the first driver (411) and the second driver (412), return a picture To 4 quadrant detector (66) image plane center position；Step g, the change in displacement Δ x1 that first laser interferometer (427) obtains is read, and second laser interferometer (428) obtains The change in displacement Δ x2 arrived, be reconverted into speculum (3) angle change Δ θ andAnd then obtain the angle on measured object (5) surface Spend changes delta α and Δ β；Wherein, Δ θ=f1 (Δ x1, Δ x2),WithF1, f2, f3, f4 represent 4 functions.
- 5. in the portable combined realized described in claim 2 on the portable combined zeroing big working distance autocollimation of high frequency sound Return to zero the big working distance auto-collimation method of high frequency sound, it is desirable to which Wavefront detecting system (7) is only including Wavefront detecting spectroscope (71) and instead Penetrate mirror deformation wave front detector (73)；It is characterised in that it includes following steps：Step a, reference substance of the surface perpendicular to optical axis direction is chosen；Step b, bright light source (1) is put, the selected reference substances of step a are individually positioned in operating position A and nearly operating position B, Speculum deformation wave front detector (73) respectively obtains two groups of data of GC and GD；Step c, G2=GC-GD, obtain air agitation and speculum deformation it is common caused by wavefront variation；Step d, transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G2), lights compensatory light (81), compensated Air agitation and speculum deformation；Step e, imaging sensor (65) is imaged, and according to as deviateing an image plane center direction, utilizes the first driver (411) and the Two drivers (412) adjust speculum (3) angle, a picture is returned to imaging sensor (65) image plane center region；Step f, 4 quadrant detector (66) is imaged, and point is as deviateing in 4 quadrant detector (66) image planes after obtaining step a The heart position Δ x and Δ y, adjust speculum (3) angle using the first driver (411) and the second driver (412), return a picture To 4 quadrant detector (66) image plane center position；Step g, the change in displacement Δ x1 that first laser interferometer (427) obtains is read, and second laser interferometer (428) obtains The change in displacement Δ x2 arrived, be reconverted into speculum (3) angle change Δ θ andAnd then obtain the angle on measured object (5) surface Spend changes delta α and Δ β；Wherein, Δ θ=f1 (Δ x1, Δ x2),WithF1, f2, f3, f4 represent 4 functions.
- 6. in the portable combined realized described in claim 2 on the portable combined zeroing big working distance autocollimation of high frequency sound Return to zero the big working distance auto-collimation method of high frequency sound, it is desirable to Wavefront detecting system (7) at the same including Wavefront detecting spectroscope (71), sky Gas disturbance wave front detector (72) and speculum deformation wave front detector (73)；It is characterised in that it includes following steps：Step a, reference substance of the surface perpendicular to optical axis direction is chosen；Step b, bright light source (1) is put, the selected reference substances of step a are individually positioned in operating position A and nearly operating position B, Air agitation wave front detector (72) respectively obtains two groups of data of GA and GB, and speculum deformation wave front detector (73) respectively obtains Two groups of data of GC and GD；Step c, G1=GA-GB, obtains wavefront variation caused by air agitation；G2=GC-GD, obtains air agitation and speculum Wavefront variation caused by deformation is common；G=G2-G1, obtains wavefront variation caused by speculum deformation；Step d,Transmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G1), lights compensatory light (81), make-up air is disturbed It is dynamic；OrTransmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G2), lights compensatory light (81), make-up air is disturbed Dynamic and speculum deformation；OrTransmission liquid crystal spatial light modulator (83) parameter is adjusted according to f5 (G), lights compensatory light (81), compensatory reflex mirror shape Become；Step e, imaging sensor (65) is imaged, and according to as deviateing an image plane center direction, utilizes the first driver (411) and the Two drivers (412) adjust speculum (3) angle, a picture is returned to imaging sensor (65) image plane center region；Step f, 4 quadrant detector (66) is imaged, and point is as deviateing in 4 quadrant detector (66) image planes after obtaining step a The heart position Δ x and Δ y, adjust speculum (3) angle using the first driver (411) and the second driver (412), return a picture To 4 quadrant detector (66) image plane center position；Step g, the change in displacement Δ x1 that first laser interferometer (427) obtains is read, and second laser interferometer (428) obtains The change in displacement Δ x2 arrived, be reconverted into speculum (3) angle change Δ θ andAnd then obtain the angle on measured object (5) surface Spend changes delta α and Δ β；Wherein, Δ θ=f1 (Δ x1, Δ x2),WithF1, f2, f3, f4 represent 4 functions.
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