CN106052549A - Combined zero-setting high-dynamic-precision long-working-distance auto-collimation device and method thereof - Google Patents

Abstract

The invention belongs to the precision measurement technology field and the optical engineering field and especially relates to a combined zero-setting high-dynamic-precision long-working-distance auto-collimation device and a method thereof. The device is formed by a light source, a collimating mirror, a reflecting mirror and a feedback imaging system. Through adjusting the reflecting mirror, a reflected light beam is returned to an image plane center of the feedback imaging system. And an angle deflection measurement apparatus on the reflecting mirror is used to acquire an angle change of a measured object surface. Because the reflecting mirror is added in a traditional auto-collimation angle measurement system in the invention, a problem that reflected light of the measured object is deviated from the measurement system so that measurement can not be performed can be avoided. Therefore, under a same working distance, an auto-collimation working range is increased or under a same working range, the working distance is increased. In addition, through specific designs of the collimating mirror, the feedback imaging system, the reflecting mirror and the like, the structure is simple and manufacturing cost is low; simultaneously, a measured object assembling process can be monitored in a whole course mode; and the measurement is rapid.

Description

Combination zeroing high dynamic accuracy big working distance autocollimation and method

Technical field

The invention belongs to Technology of Precision Measurement field and optical engineering field, be specifically related to the high dynamically essence of a kind of combination zeroing Spend big working distance autocollimation and method.

Background technology

In Technology of Precision Measurement field, optical engineering field, the most advanced branches of science experiment field and high-end precision assembly manufacture neck In territory, urgent needs carries out wide working range, high-precision laser auto-collimation technology under big working distance.It supports above-mentioned field Technology and the development of instrument and equipment.

At Technology of Precision Measurement and instrument field, Laser Autocollimator combines with Circular gratings, can carry out any line angle degree Measure；Laser auto-collimation technology combines with polygon, can carry out face angular surveying and circular division is measured；Maximum functional distance From several meters to rice up to a hundred；Resolving power is from 0.1 rad to 0.001 rad.

Field, two round light that Laser Autocollimator is the most vertical with bidimensional are tested in optical engineering field and the most advanced branches of science Grid combine, and can carry out the measurement of space angle；Formed position reference by two-way Laser Autocollimator, optical axis two-by-two can be carried out Angle or the measurement of collimation.Angle working range tens rads to tens jiaos points.

Manufacture field at most advanced branches of science experimental provision and high-end precision assembly, use Laser Autocollimator can measure tip Scientific experiments device and the angle rotating accuracy of high-end precision assembly gyration benchmark, measure the space line of linear motion benchmark The depth of parallelism of precision and two-by-two motion benchmark and perpendicularity.

Laser auto-collimation technology has the advantages such as noncontact, certainty of measurement are high, easy to use, has wide in above-mentioned field General application.

Tradition autocollimator is as it is shown in figure 1, this system includes light source 1, transmission-type collimating mirror 21 and feedback imaging system 6；The light beam of light source 1 outgoing, after transmission-type collimating mirror 21 is collimated into collimated light beam, incides the reflecting surface of measured object 5；From The light beam of measured object 5 reflective surface, is gathered imaging by feedback imaging system 6.Under this structure, only from measured object 5 surface The nearly backtracking of light beam of reflection, could be gathered imaging by feedback imaging system 6, and then realize effectively measuring.This Jin Yuan road The condition returned limits so that the following two aspect shortcomings of this system existence:

The first, measurand 5 mirror surface normal can not be too big with the scope of Laser Autocollimator optical axis included angle, otherwise can Cause the entrance pupil of reflection BEAM SQUINT Laser Autocollimator optical system, and then cause realizing auto-collimation and the survey of micro-angle Amount；

The second, measurand 5 mirror surface range measurement Laser Autocollimator entrance pupil must not be too far away, if otherwise reflection light Axle and autocollimator optical axis deviation minute angle will result in the entrance pupil of reflection BEAM SQUINT Laser Autocollimator optical system, enter And cause realizing auto-collimation and micro-angular surveying.

Two above problem, makes tradition auto-collimation instrument can only be limited under low-angle, little operating distance use.

Summary of the invention

For two problems existing for tradition autocollimator, the invention discloses a kind of combination high dynamic accuracy of zeroing big Working distance autocollimation and method, compared with tradition autocollimator, have and dramatically increase auto-collimation under identical operating distance Working range, or under identical auto-collimation working range, dramatically increase the technical advantage of operating distance.

The object of the present invention is achieved like this:

Combination zeroing high dynamic accuracy big working distance autocollimation, including light source, transmission-type collimating mirror, reflecting mirror, with And feedback imaging system, described reflecting mirror is provided with angle adjustment measurement apparatus；The light beam of light source outgoing, through transmission-type quasi After straight mirror is collimated into collimated light beam, then reflected by reflecting mirror, incide the surface of measured object；Light from the reflection of measured object surface Bundle, then after reflecting mirror reflects, feedback imaging system gather imaging；

Described feedback imaging system is in following two form:

The first, feedback imaging system includes imageing sensor imaging system and 4 quadrant detector imaging system；

Described imageing sensor imaging system includes the first feedback spectroscope and is arranged at transmission-type collimation mirror foci Imageing sensor；From the light beam of measured object surface reflection, then after reflecting mirror reflects, successively throw through transmission-type collimating mirror Penetrate, first feedback dichroic mirror, gathered imaging by imageing sensor；Under conditions of measured object surface is vertical with optical axis, figure As sensor is become a picture in image plane center position；

Or

Described imageing sensor imaging system includes the first feedback spectroscope, the first feedback object lens and is arranged on the first feedback Imageing sensor at object focal point；From the light beam of measured object surface reflection, then after reflecting mirror reflects, successively through first Feed back dichroic mirror, the first feedback object lens transmission, gathered imaging by imageing sensor；Vertical with optical axis on measured object surface Under the conditions of, imageing sensor is become a picture in image plane center position；

Described 4 quadrant detector imaging system includes the second feedback spectroscope and is arranged at transmission-type collimation mirror foci 4 quadrant detector；From the light beam of measured object surface reflection, then after reflecting mirror reflects, successively through transmission-type collimating mirror Projection, first feedback dichroic mirror, gathered imaging by 4 quadrant detector；In the condition that measured object surface is vertical with optical axis Under, 4 quadrant detector is become a picture in image plane center position；

Or

Described 4 quadrant detector imaging system includes the second feedback spectroscope, the second feedback object lens and to be arranged on second anti- 4 quadrant detector at feedback object focal point；From the light beam of measured object surface reflection, then after reflecting mirror reflects, successively pass through Second feedback dichroic mirror, second feedback object lens transmission, gathered imaging by 4 quadrant detector；At measured object surface and optical axis Under conditions of Chui Zhi, 4 quadrant detector is become a picture in image plane center position；

The second, feedback imaging system includes the first feedback spectroscope and the imageing sensor carried by guide rail and four-quadrant Limit detector, described guide rail has two stall position, and a stall position makes imageing sensor image plane center correspondence transmission-type The focal position of collimating mirror, another stall position makes the focus position of 4 quadrant detector image plane center correspondence transmission-type collimating mirror Put；

Or

Feedback imaging system includes the first feedback spectroscope, the first feedback object lens and the image sensing carried by guide rail Device and 4 quadrant detector, described guide rail has two stall position, and a stall position makes imageing sensor image plane center position In the focal position of the first feedback object lens, another stall position makes 4 quadrant detector image plane center be positioned at the first feedback object lens Focal position；

Described angle adjustment measurement apparatus includes arranging angular adjustment apparatus on the mirror, dress is measured in angular deflection Putting and universal drive shaft, angular adjustment apparatus includes the first driver and the second driver；Angular deflection measurement apparatus includes first Sheet metal, the second sheet metal, the first reflecting mirror, the second reflecting mirror, the first capacitance sensor of corresponding first sheet metal position, with And the second capacitance sensor of corresponding second sheet metal position, the first laser interferometer of corresponding first reflector position and Second laser interferometer of corresponding second reflector position；First driver, the first sheet metal, the first reflecting mirror and universal Axle point-blank, the second driver, the second sheet metal, the second reflecting mirror and universal drive shaft point-blank, and One driver, second driver vertical with the line of universal drive shaft and the line of universal drive shaft.

The portable combined realized on above-mentioned portable combined zeroing high dynamic accuracy big working distance autocollimation is adjusted Zero high dynamic accuracy big working distance auto-collimation method, comprises the following steps:

Step a, some bright light source, imageing sensor imaging, according to a picture deviation image plane center direction, utilize the first driver Adjust mirror angle with the second driver, make a picture return to imageing sensor image plane center region；

Step b, 4 quadrant detector imaging, obtain some picture deviation 4 quadrant detector image plane center position after step a terminates Put Δ x and Δ y, utilize the first driver and the second driver to adjust mirror angle, make a picture return to 4 quadrant detector picture Center, face；

Step c, read the capacitance change, Δ C1 of the first capacitance sensor, and the capacitance change, Δ C2 of the second capacitance sensor, It is reconverted into angle changes delta θ 1 He of reflecting mirrorRead the change in displacement Δ x1 that the first laser interferometer obtains simultaneously, with And the second change in displacement Δ x2 that obtain of laser interferometer, it is reconverted into angle changes delta θ 2 He of reflecting mirrorAnd then obtain Angle changes delta α on measured object surface and Δ β；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),Δ θ 2= F3 (Δ x1, Δ x2),Withf1、 F2, f3, f4 represent 4 functions.

Combinations thereof zeroing high dynamic accuracy big working distance autocollimation, also includes Wavefront detecting system and wavefront compensation System；

Described Wavefront detecting system includes Wavefront detecting spectroscope and air agitation wave front detector and reflecting mirror deformation At least one in wave front detector；Described Wavefront detecting spectroscope is arranged between reflecting mirror and measured object, air agitation ripple Front detector is arranged on the spectroscopical reflected light path of Wavefront detecting, and reflecting mirror deformation wave front detector is arranged on the two of reflecting mirror In secondary reflection light path；

Described wavefront compensation system includes compensatory light, compensates collimating mirror and transmission liquid crystal spatial light modulator；Mend Repay the light beam of light source outgoing, after overcompensation collimating mirror is collimated into collimated light beam, then adjusted by transmission liquid crystal spatial light modulator System, incides on Wavefront detecting spectroscope.

The portable combined realized on above-mentioned portable combined zeroing high dynamic accuracy big working distance autocollimation is adjusted Zero high dynamic accuracy big working distance auto-collimation method, it is desirable to Wavefront detecting system only includes Wavefront detecting spectroscope and air agitation Wave front detector；

Comprise the following steps:

Step a, choose surface and be perpendicular to the reference substance of optical axis direction；

Step b, some bright light source, be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a, Air agitation wave front detector respectively obtains two groups of data of GA and GB；

Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；

Step d, according to f5 (G1) adjust transmission liquid crystal spatial light modulator parameter, light compensatory light, make-up air Disturbance；

Step e, imageing sensor imaging, according to a picture deviation image plane center direction, utilize the first driver and second to drive Dynamic device adjusts mirror angle, makes a picture return to imageing sensor image plane center region；

Step f, 4 quadrant detector imaging, obtain some picture deviation 4 quadrant detector image plane center position after step a terminates Put Δ x and Δ y, utilize the first driver and the second driver to adjust mirror angle, make a picture return to 4 quadrant detector picture Center, face；

Step g, read the capacitance change, Δ C1 of the first capacitance sensor, and the capacitance change, Δ of the second capacitance sensor C2, is reconverted into angle changes delta θ 1 He of reflecting mirrorRead the change in displacement Δ that the first laser interferometer obtains simultaneously X1, and the change in displacement Δ x2 that the second laser interferometer obtains, be reconverted into angle changes delta θ 2 He of reflecting mirrorEnter And obtain angle changes delta α and the Δ β on measured object surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2), Δ θ 2=f3 (Δ x1, Δ x2),Withf1、 F2, f3, f4 represent 4 functions.

The portable combined realized on above-mentioned portable combined zeroing high dynamic accuracy big working distance autocollimation is adjusted Zero high dynamic accuracy big working distance auto-collimation method, it is desirable to Wavefront detecting system only includes Wavefront detecting spectroscope and reflecting mirror shape Become wave front detector；

Comprise the following steps:

Step a, choose surface and be perpendicular to the reference substance of optical axis direction；

Step b, some bright light source, be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a, Reflecting mirror deformation wave front detector respectively obtains two groups of data of GC and GD；

Step c, G2=GC-GD, obtain air agitation and wavefront variation that reflecting mirror deformation causes jointly；

Step d, according to f5 (G2) adjust transmission liquid crystal spatial light modulator parameter, light compensatory light, make-up air Disturbance and reflecting mirror deformation；

Step e, imageing sensor imaging, according to a picture deviation image plane center direction, utilize the first driver and second to drive Dynamic device adjusts mirror angle, makes a picture return to imageing sensor image plane center region；

Step f, 4 quadrant detector imaging, obtain some picture deviation 4 quadrant detector image plane center position after step a terminates Put Δ x and Δ y, utilize the first driver and the second driver to adjust mirror angle, make a picture return to 4 quadrant detector picture Center, face；

Step g, read the capacitance change, Δ C1 of the first capacitance sensor, and the capacitance change, Δ of the second capacitance sensor C2, is reconverted into angle changes delta θ 1 He of reflecting mirrorRead the change in displacement Δ that the first laser interferometer obtains simultaneously X1, and the change in displacement Δ x2 that the second laser interferometer obtains, be reconverted into angle changes delta θ 2 He of reflecting mirrorEnter And obtain angle changes delta α and the Δ β on measured object surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2), Δ θ 2=f3 (Δ x1, Δ x2),With F1, f2, f3, f4 represent 4 functions.

The portable combined realized on above-mentioned portable combined zeroing high dynamic accuracy big working distance autocollimation is adjusted Zero high dynamic accuracy big working distance auto-collimation method, it is desirable to Wavefront detecting system includes that Wavefront detecting spectroscope, air are disturbed simultaneously Dynamic wave front detector and reflecting mirror deformation wave front detector；

Comprise the following steps:

Step a, choose surface and be perpendicular to the reference substance of optical axis direction；

Step b, some bright light source, be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a, Air agitation wave front detector respectively obtains two groups of data of GA and GB, and reflecting mirror deformation wave front detector respectively obtains GC and GD two Group data；

Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；G2=GC-GD, obtains air agitation with anti- Penetrate the wavefront variation that mirror deformation causes jointly；G=G2-G1, obtains the wavefront variation that reflecting mirror deformation causes；

Step d,

Adjust transmission liquid crystal spatial light modulator parameter according to f5 (G1), light compensatory light, make-up air disturbance；

Or

Adjust transmission liquid crystal spatial light modulator parameter according to f5 (G2), light compensatory light, make-up air disturbance and Reflecting mirror deformation；

Or

Adjust transmission liquid crystal spatial light modulator parameter according to f5 (G), light compensatory light, compensatory reflex mirror deformation；

Step e, imageing sensor imaging, according to a picture deviation image plane center direction, utilize the first driver and second to drive Dynamic device adjusts mirror angle, makes a picture return to imageing sensor image plane center region；

Step f, 4 quadrant detector imaging, obtain some picture deviation 4 quadrant detector image plane center position after step a terminates Put Δ x and Δ y, utilize the first driver and the second driver to adjust mirror angle, make a picture return to 4 quadrant detector picture Center, face；

Step g, read the capacitance change, Δ C1 of the first capacitance sensor, and the capacitance change, Δ of the second capacitance sensor C2, is reconverted into angle changes delta θ 1 He of reflecting mirrorRead the change in displacement Δ that the first laser interferometer obtains simultaneously X1, and the change in displacement Δ x2 that the second laser interferometer obtains, be reconverted into angle changes delta θ 2 He of reflecting mirrorEnter And obtain angle changes delta α and the Δ β on measured object surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2), Δ θ 2=f3 (Δ x1, Δ x2),With F1, f2, f3, f4 represent 4 functions.

Beneficial effect:

Compared with tradition autocollimator, invention increases reflecting mirror and angle adjustment measurement on the mirror is set Device, this structure is arranged, it is possible to has bigger drift angle or there is relatively larger transverse position between measured object incident illumination and reflection light In the case of shifting, adjust reflecting mirror attitude by angle adjustment measurement apparatus, it is ensured that reflection light backtracking is also fed back imaging System receives, and then is prevented effectively from measured object reflection light deviation measurement system and causes the problem that cannot measure, and then makes this Invent to have under identical operating distance, dramatically increase auto-collimation working range, or significantly increase under identical auto-collimation working range Add the technical advantage of operating distance.

In addition, the present invention also has following a few technical advantage:

The first, selective transmission formula collimating mirror, makes apparatus of the present invention simple in construction, and cost of manufacture is low, easy to use；

The second, select imageing sensor and 4 quadrant detector collectively as the image device in feedback imaging system, knot Close the advantage that image area sensor is big and 4 quadrant detector position resolution is high；Wherein, imageing sensor can be true Protecting in the case of measured object reflection light and incident illumination drift angle are relatively big, reflection light still is able to enter the entrance pupil of optical system, will not Beyond range of receiving；On this basis, recycling reflecting mirror realizes the quickly return compensation in real time of reflection light, is adjusted to by reflection light 4 quadrant detector position, can obtain higher angle according to the high position resolution advantage of 4 quadrant detector again and survey Accuracy of measurement；Therefore, imageing sensor and 4 quadrant detector are combined, not only make auto-collimation working range of the present invention or work Greatly extended as distance, and be conducive to improving angle-measurement accuracy；

3rd, select capacitance sensor and laser interferometer collectively as angular deflection measurement apparatus so that the present invention is not Be only capable of utilize capacitance sensor superelevation displacement sensory characteristic and in the range of minute angle displacement of the lines be easily converted into angle The good characteristic of displacement so that the present invention can have the highest measurement essence under the conditions of low sample frequency (20Hz and following) Degree, angle highest measurement resolving power can bring up to 0.0005 rad from 0.005 rad of tradition autocollimator, improve a quantity Level；And laser interferometer can also allow the invention to complete angle under high sample frequency (can reach 2000Hz) Measure, i.e. there is the highest measuring speed；If the first reflecting mirror and the second reflecting mirror use prism of corner cube, it is also possible to utilize angle The optical characteristics that inclined for incident ray turnback is returned by cone prism, makes the angular surveying scope of the present invention be greatly enhanced, i.e. The present invention has very while high measurement speed, also has the technical advantage of wide-angle range；The two combines, moreover it is possible to it is right to play The measured object having high accuracy assembling demand carries out the effect of monitored over time；

4th, the present invention additionally uses techniques below: the first driver, the first sheet metal, the first reflecting mirror and universal Axle point-blank, the second driver, the second sheet metal, the second reflecting mirror and universal drive shaft point-blank, and One driver, second driver vertical with the line of universal drive shaft and the line of universal drive shaft；This two orthogonal two dimensions of line Arrange so that the data in different line directions are non-interference, it is not necessary to decoupling computing, so can conveniently demarcate, simplify and calculated Journey, improves measuring speed.

Accompanying drawing explanation

Fig. 1 is the structural representation of tradition auto-collimation angle measurement system.

Fig. 2 is the structural representation that the present invention combines zeroing high dynamic accuracy big working distance autocollimation specific embodiment one Figure.

Fig. 3 is the structural representation of angle adjustment measurement apparatus.

Fig. 4 is the second structural representation of imageing sensor imaging system.

Fig. 5 is the second structural representation of 4 quadrant detector imaging system.

Fig. 6 is the first knot that the present invention combines zeroing high dynamic accuracy big working distance autocollimation specific embodiment two Structure schematic diagram.

Fig. 7 is the second knot that the present invention combines zeroing high dynamic accuracy big working distance autocollimation specific embodiment two Structure schematic diagram.

Fig. 8 is the structural representation that the present invention combines zeroing high dynamic accuracy big working distance autocollimation specific embodiment three.

Fig. 9 is the structural representation that the present invention combines zeroing high dynamic accuracy big working distance autocollimation specific embodiment four.

Figure 10 be the present invention combine zeroing high dynamic accuracy big working distance autocollimation specific embodiment five structure show It is intended to.

In figure: 1 light source, 21 transmission-type collimating mirrors, 3 reflecting mirrors, 4 angle adjustment measurement apparatus, 411 first drivers, 412 Second driver, 421 first sheet metals, 422 second sheet metals, 423 first capacitance sensors, 424 second capacitance sensors, 425 first reflecting mirrors, 426 second reflecting mirrors, 427 first laser interferometer, 428 second laser interferometer, 43 universal drive shafts, 5 quilts Survey thing, 6 feedback imaging systems, 61 first feedback spectroscopes, 62 second feedback spectroscopes, 63 first feedback object lens, 64 second anti- Feedback object lens, 65 imageing sensors, 66 4 quadrant detectors, 68 guide rails, 7 Wavefront detecting systems, 71 Wavefront detecting spectroscopes, 72 skies Gas disturbance wave front detector, 73 reflecting mirror deformation wave front detectors, 8 wavefront compensation system, 81 compensatory lights, 82 compensation collimations Mirror, 83 transmission liquid crystal spatial light modulators.

Specific embodiment

Below in conjunction with the accompanying drawings the specific embodiment of the invention is described in further detail.

Specific embodiment one

The present embodiment is combination zeroing high dynamic accuracy big working distance autocollimation embodiment.

The combination zeroing high dynamic accuracy big working distance autocollimation of the present embodiment, structural representation is as shown in Figure 2.Should Autocollimation includes light source 1, transmission-type collimating mirror 21, reflecting mirror 3 and feedback imaging system 6, and described reflecting mirror 3 sets It is equipped with angle adjustment measurement apparatus 4；The light beam of light source 1 outgoing, after transmission-type collimating mirror 21 is collimated into collimated light beam, then by Reflecting mirror 3 reflects, and incides the surface of measured object 5；From the light beam of measured object 5 surface reflection, then after reflecting mirror 3 reflects, Imaging is gathered by feedback imaging system 6；

Described feedback imaging system 6 includes imageing sensor imaging system and 4 quadrant detector imaging system；

Described imageing sensor imaging system includes the first feedback spectroscope 61 and is arranged on transmission-type collimating mirror 21 focus The imageing sensor 65 at place；From the light beam of measured object 5 surface reflection, then after reflecting mirror 3 reflects, successively through transmission-type quasi Straight mirror 21 projects, the first feedback spectroscope 61 reflects, gathered imaging by imageing sensor 65；Hang down with optical axis on measured object 5 surface Under conditions of Zhi, imageing sensor 65 is become a little as in image plane center position；

Described 4 quadrant detector imaging system includes that the second feedback spectroscope 62, second feeds back object lens 64 and is arranged on the The 4 quadrant detector 66 of two feedback object lens 64 focal point；From the light beam of measured object 5 surface reflection, then reflect through reflecting mirror 3 After, successively through second feedback spectroscope 62 reflect, second feedback object lens 64 transmission, gathered imaging by 4 quadrant detector 66； Under conditions of measured object 5 surface is vertical with optical axis, 4 quadrant detector 66 is become a little as in image plane center position；

Described angle adjustment measurement apparatus 4 includes that dress is measured in the angular adjustment apparatus being arranged on reflecting mirror 3, angular deflection Putting and universal drive shaft 43, angular adjustment apparatus includes the first driver 411 and the second driver 412；Angular deflection measurement apparatus Including first sheet metal the 421, second sheet metal the 422, first reflecting mirror the 425, second reflecting mirror 426, corresponding first sheet metal 421 First capacitance sensor 423 of position and the second capacitance sensor 424 of corresponding second sheet metal 422 position, correspondence first First laser interferometer 427 of reflecting mirror 425 position and the second laser interferometer of corresponding second reflecting mirror 426 position 428；Point-blank, second drives for first driver the 411, first sheet metal the 421, first reflecting mirror 425 and universal drive shaft 43 Dynamic device the 412, second sheet metal the 422, second reflecting mirror 426 and universal drive shaft 43 point-blank, and the first driver 411 second drivers 412 vertical with the line of universal drive shaft 43 and the lines of universal drive shaft 43, as shown in Figure 3.

It should be understood that

The first, in the present embodiment, imageing sensor imaging system can also select following structure: includes that the first feedback is divided Light microscopic 61, first feeds back object lens 63 and is arranged on the imageing sensor 65 of the first feedback object lens 63 focal point；From measured object 5 surface Reflection light beam, then through reflecting mirror 3 reflect after, successively through first feedback spectroscope 61 reflect, first feedback object lens 63 saturating Penetrate, gathered imaging by imageing sensor 65；Under conditions of measured object 5 surface is vertical with optical axis, the become point of imageing sensor 65 As in image plane center position；As shown in Figure 4, in the figure, 4 quadrant detector imaging system is eliminated.

The second, in the present embodiment, 4 quadrant detector imaging system can also select following structure: includes the second feedback Spectroscope 62 and the 4 quadrant detector 66 being arranged on transmission-type collimating mirror 21 focal point；From the light beam of measured object 5 surface reflection, Again through reflecting mirror 3 reflect after, successively project through transmission-type collimating mirror 21, first feedback spectroscope 61 reflect, by four-quadrant Detector 66 gathers imaging；Under conditions of measured object 5 surface is vertical with optical axis, 4 quadrant detector 66 is become a little as in image planes Center；As it is shown in figure 5, in the figure, imageing sensor imaging system is eliminated.

Specific embodiment two

The present embodiment is combination zeroing high dynamic accuracy big working distance autocollimation embodiment.

The present embodiment combination zeroing high dynamic accuracy big working distance autocollimation, different from specific embodiment one Structure in feedback imaging system 6；The structure of the present embodiment feedback imaging system 6 is the one in following two form:

The first, feedback imaging system 6 includes the first feedback spectroscope 61 and the imageing sensor 65 carried by guide rail 68 With 4 quadrant detector 66, as shown in Figure 6；Described guide rail 68 has two stall position, and a stall position makes image sensing The focal position of device 65 image plane center correspondence transmission-type collimating mirror 21, another stall position makes in 4 quadrant detector 66 image planes The focal position of heart correspondence transmission-type collimating mirror 21；

The second, feedback imaging system 6 includes that the first feedback spectroscope 61, first feeds back object lens 63 and held by guide rail 68 The imageing sensor 65 carried and 4 quadrant detector 66, as shown in Figure 7；Described guide rail 68 has two stall position, and one is stopped Position makes imageing sensor 65 image plane center be positioned at the focal position of the first feedback object lens 63, and another stall position makes four-quadrant Limit detector 66 image plane center is positioned at the focal position of the first feedback object lens 63.

Specific embodiment three

The present embodiment is combination zeroing high dynamic accuracy big working distance autocollimation embodiment.

The combination zeroing high dynamic accuracy big working distance autocollimation of the present embodiment, structural representation is as shown in Figure 8.? On the basis of specific embodiment one, the combination zeroing high dynamic accuracy big working distance autocollimation of the present embodiment is additionally provided with ripple Front detection system 7 and wavefront compensation system 8；

Described Wavefront detecting system 7 includes Wavefront detecting spectroscope 71 and air agitation wave front detector 72；Described wavefront Detection spectroscope 71 is arranged between reflecting mirror 3 and measured object 5, and air agitation wave front detector 72 is arranged on Wavefront detecting light splitting On the reflected light path of mirror 71, reflecting mirror deformation wave front detector 73 is arranged in the secondary reflection light path of reflecting mirror 3；

Described wavefront compensation system 8 includes compensatory light 81, compensates collimating mirror 82 and transmission liquid crystal spatial light modulation Device 83；The light beam of compensatory light 81 outgoing, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space Photomodulator 83 is modulated, and incides on Wavefront detecting spectroscope 71.

Specific embodiment four

The present embodiment is combination zeroing high dynamic accuracy big working distance autocollimation embodiment.

The combination zeroing high dynamic accuracy big working distance autocollimation of the present embodiment, structural representation is as shown in Figure 9.? On the basis of specific embodiment one, the combination zeroing high dynamic accuracy big working distance autocollimation of the present embodiment is additionally provided with ripple Front detection system 7 and wavefront compensation system 8；

Described Wavefront detecting system 7 includes Wavefront detecting spectroscope 71 and reflecting mirror deformation wave front detector 73；Described ripple Front detection spectroscope 71 is arranged between reflecting mirror 3 and measured object 5, and air agitation wave front detector 72 is arranged on Wavefront detecting and divides On the reflected light path of light microscopic 71, reflecting mirror deformation wave front detector 73 is arranged in the secondary reflection light path of reflecting mirror 3；

Described wavefront compensation system 8 includes compensatory light 81, compensates collimating mirror 82 and transmission liquid crystal spatial light modulation Device 83；The light beam of compensatory light 81 outgoing, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space Photomodulator 83 is modulated, and incides on Wavefront detecting spectroscope 71.

Specific embodiment five

The present embodiment is combination zeroing high dynamic accuracy big working distance autocollimation embodiment.

The combination zeroing high dynamic accuracy big working distance autocollimation of the present embodiment, structural representation is as shown in Figure 10. On the basis of specific embodiment one, the combination zeroing high dynamic accuracy big working distance autocollimation of the present embodiment is additionally provided with Wavefront detecting system 7 and wavefront compensation system 8；

Described Wavefront detecting system 7 includes Wavefront detecting spectroscope 71, air agitation wave front detector 72 and reflecting mirror shape Become wave front detector 73；Described Wavefront detecting spectroscope 71 is arranged between reflecting mirror 3 and measured object 5, and air agitation wavefront is visited Surveying device 72 to be arranged on the reflected light path of Wavefront detecting spectroscope 71, reflecting mirror deformation wave front detector 73 is arranged on reflecting mirror 3 Secondary reflection light path on；

Described wavefront compensation system 8 includes compensatory light 81, compensates collimating mirror 82 and transmission liquid crystal spatial light modulation Device 83；The light beam of compensatory light 81 outgoing, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space Photomodulator 83 is modulated, and incides on Wavefront detecting spectroscope 71.

For above autocollimation embodiment, following 4 needs are also had to illustrate:

The first, the first driver 411 and the second driver 412 in described angular adjustment apparatus, both can select to drive The motor of speed or motor servo driver, can select again the piezoelectric ceramic actuator driving precision higher, also Motor or motor servo driver can be used in mixed way with piezoelectric ceramic actuator；Those skilled in the art can basis It is actually needed and rationally selects.

Although the second specific embodiment three, specific embodiment four and specific embodiment five, it is all at specific embodiment Wavefront detecting system 7 and wavefront compensation system 8 are set on the basis of one, but wavefront is set on the basis of specific embodiment two Detection system 7 and wavefront compensation system 8, also set up.Those skilled in the art can in conjunction with specific embodiments device described in Difference between device described in specific embodiment two, arranges wavefront by these three easily on the basis of specific embodiment two The system building of detection system 7 and wavefront compensation system 8 out, therefore no longer describes in detail herein.

3rd, described transmission-type collimating mirror 21 can select binary optical lenses, and logical ordinary optical lens are compared, binary optical Learning lens thinner, beneficially system compact, binary optical lenses collimation is more preferable simultaneously, is conducive to improving systematic survey essence Degree.

4th, in all above autocollimation embodiment, angular deflection measurement apparatus all only includes two pairs of sheet metals With the combination of capacitance sensor, and two pairs of plane mirrors and the combination of laser interferometer, this design is acquiescence reflecting mirror 3 The most do not produce translation and make；If it is considered that reflecting mirror 3 produces translation at work and affects measurement essence Degree, can place the 3rd pair of sheet metal and the combination of capacitance sensor, and the 3rd pair of plane reflection in universal drive shaft 43 position Mirror and the combination of laser interferometer, to offset three capacitance sensors and the identical translation of three laser interferometer generations, really Protect certainty of measurement.Specific embodiment six

The present embodiment is real on combination zeroing high dynamic accuracy big working distance autocollimation described in specific embodiment one Existing combination zeroing high dynamic accuracy big working distance auto-collimation embodiment of the method.

The combination zeroing high dynamic accuracy big working distance auto-collimation method of the present embodiment, comprises the following steps:

Step a, some bright light source 1, imageing sensor 65 imaging, according to a picture deviation image plane center direction, utilize first to drive Dynamic device 411 and the second driver 412 adjust reflecting mirror 3 angle, make a picture return to imageing sensor 65 image plane center region；

Step b, 4 quadrant detector 66 imaging, obtain some picture after step a terminates and deviate in 4 quadrant detector 66 image planes Heart position Δ x and Δ y, utilizes the first driver 411 and the second driver 412 to adjust reflecting mirror 3 angle, makes a picture return to four-quadrant Limit detector 66 image plane center position；

Step c, read the capacitance change, Δ C1 of the first capacitance sensor 423, and the electric capacity of the second capacitance sensor 424 Changes delta C2, is reconverted into angle changes delta θ 1 He of reflecting mirror 3Read the position that the first laser interferometer 427 obtains simultaneously Move changes delta x1, and the change in displacement Δ x2 that the second laser interferometer 428 obtains, be reconverted into the angle change of reflecting mirror 3 Δ θ 2 HeAnd then obtain angle changes delta α and the Δ β on measured object 5 surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),Δ θ 2=f3 (Δ x1, Δ x2), WithF1, f2, f3, f4 represent 4 functions.

If it should be noted that the present embodiment is the method realized on device described in specific embodiment two, then After point is as returning to imageing sensor 65 image plane center region, guide rail 68 is adjusted to another stall position from a stall position, Make the focal position of 4 quadrant detector 66 image plane center correspondence transmission-type collimating mirror 21, then make 4 quadrant detector 66 become Picture.

The main innovative point of the present invention is the angle adjustment measurement dress adding reflecting mirror 3 and being arranged on reflecting mirror 3 Putting 4, this structure can have bigger drift angle or there are the feelings of relatively larger transverse displacement between measured object 5 incident illumination and reflection light Under condition, adjust 4 whole reflecting mirror attitudes by angle adjustment measurement apparatus, make reflection light backtracking and connect by feedback imaging system 6 Receive, be prevented effectively from measured object reflection light deviation measurement system and the problem that causes measuring.

But, the introducing of reflecting mirror 3, its face type error can be delivered in final result, reduces the certainty of measurement of system；With Time, the increase of operating distance makes again the air agitation between reflecting mirror 3 and measured object 5 can not ignore, and also can reduce system Certainty of measurement.Visible, want to realize high-acruracy survey, be necessary in view of 3 type errors of reflecting mirror and reflecting mirror 3 with tested The air agitation impact on measurement result between thing 5, to this end, devise specific embodiment seven, specific embodiment eight and concrete Embodiment nine.

Specific embodiment seven

The present embodiment is real on combination zeroing high dynamic accuracy big working distance autocollimation described in specific embodiment three Existing combination zeroing high dynamic accuracy big working distance auto-collimation embodiment of the method.

The combination zeroing high dynamic accuracy big working distance auto-collimation method of the present embodiment, comprises the following steps:

Step a, choose surface and be perpendicular to the reference substance of optical axis direction；

Step b, some bright light source 1, be individually positioned in operating position A and nearly operating position by the reference substance selected by step a B, air agitation wave front detector 72 respectively obtains two groups of data of GA and GB；

Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；

Step d, according to f5 (G1) adjust transmission liquid crystal spatial light modulator 83 parameter, light compensatory light 81, compensate Air agitation；

Step e, imageing sensor 65 imaging, according to as a deviation image plane center direction, utilize the first driver 411 and the Two drivers 412 adjust reflecting mirror 3 angle, make a picture return to imageing sensor 65 image plane center region；

Step f, 4 quadrant detector 66 imaging, obtain some picture after step a terminates and deviate in 4 quadrant detector 66 image planes Heart position Δ x and Δ y, utilizes the first driver 411 and the second driver 412 to adjust reflecting mirror 3 angle, makes a picture return to four-quadrant Limit detector 66 image plane center position；

Step g, read the capacitance change, Δ C1 of the first capacitance sensor 423, and the electric capacity of the second capacitance sensor 424 Changes delta C2, is reconverted into angle changes delta θ 1 He of reflecting mirror 3Read what the first laser interferometer 427 obtained simultaneously Change in displacement Δ x1, and the change in displacement Δ x2 that the second laser interferometer 428 obtains, the angle being reconverted into reflecting mirror 3 becomes Change Δ θ 2 HeAnd then obtain angle changes delta α and the Δ β on measured object 5 surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),Δ θ 2=f3 (Δ x1, Δ x2), WithF1, f2, f3, f4 represent 4 functions.

The method implementing the present embodiment on the device of specific embodiment three, it is possible to utilize air agitation wave front detector 72 Air agitation is separated, and then utilizes wavefront compensation system 8 that air agitation is compensated, finally realize without air agitation The high-acruracy survey of impact.

Specific embodiment eight

The present embodiment is real on combination zeroing high dynamic accuracy big working distance autocollimation described in specific embodiment four Existing combination zeroing high dynamic accuracy big working distance auto-collimation embodiment of the method.

The combination zeroing high dynamic accuracy big working distance auto-collimation method of the present embodiment, comprises the following steps:

Step a, choose surface and be perpendicular to the reference substance of optical axis direction；

Step b, some bright light source 1, be individually positioned in operating position A and nearly operating position by the reference substance selected by step a B, reflecting mirror deformation wave front detector 73 respectively obtains two groups of data of GC and GD；

Step c, G2=GC-GD, obtain air agitation and wavefront variation that reflecting mirror deformation causes jointly；

Step d, according to f5 (G2) adjust transmission liquid crystal spatial light modulator 83 parameter, light compensatory light 81, compensate Air agitation and reflecting mirror deformation；

Step e, imageing sensor 65 imaging, according to as a deviation image plane center direction, utilize the first driver 411 and the Two drivers 412 adjust reflecting mirror 3 angle, make a picture return to imageing sensor 65 image plane center region；

Step f, 4 quadrant detector 66 imaging, obtain some picture after step a terminates and deviate in 4 quadrant detector 66 image planes Heart position Δ x and Δ y, utilizes the first driver 411 and the second driver 412 to adjust reflecting mirror 3 angle, makes a picture return to four-quadrant Limit detector 66 image plane center position；

Step g, read the capacitance change, Δ C1 of the first capacitance sensor 423, and the electric capacity of the second capacitance sensor 424 Changes delta C2, is reconverted into angle changes delta θ 1 He of reflecting mirror 3Read what the first laser interferometer 427 obtained simultaneously Change in displacement Δ x1, and the change in displacement Δ x2 that the second laser interferometer 428 obtains, the angle being reconverted into reflecting mirror 3 becomes Change Δ θ 2 HeAnd then obtain angle changes delta α and the Δ β on measured object 5 surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),Δ θ 2=f3 (Δ x1, Δ x2), WithF1, f2, f3, f4 represent 4 functions.

The method implementing the present embodiment on the device of specific embodiment four, it is possible to utilize reflecting mirror deformation wave front detector Air agitation and reflecting mirror deformation are carried out overall separation by 73, and then utilize wavefront compensation system 8 to air agitation and reflecting mirror Deformation carries out entire compensation, finally realizes without air agitation and the high-acruracy survey of reflecting mirror influence of crust deformation.

Specific embodiment nine

The present embodiment is real on combination zeroing high dynamic accuracy big working distance autocollimation described in specific embodiment five Existing combination zeroing high dynamic accuracy big working distance auto-collimation embodiment of the method.

The combination zeroing high dynamic accuracy big working distance auto-collimation method of the present embodiment, comprises the following steps:

Step a, choose surface and be perpendicular to the reference substance of optical axis direction；

Step b, some bright light source 1, be individually positioned in operating position A and nearly operating position by the reference substance selected by step a B, air agitation wave front detector 72 respectively obtains two groups of data of GA and GB, and reflecting mirror deformation wave front detector 73 respectively obtains GC With two groups of data of GD；

Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；G2=GC-GD, obtains air agitation with anti- Penetrate the wavefront variation that mirror deformation causes jointly；G=G2-G1, obtains the wavefront variation that reflecting mirror deformation causes；

Step d,

Adjusting transmission liquid crystal spatial light modulator 83 parameter according to f5 (G1), light compensatory light 81, make-up air is disturbed Dynamic；

Or

Adjusting transmission liquid crystal spatial light modulator 83 parameter according to f5 (G2), light compensatory light 81, make-up air is disturbed Move and reflecting mirror deformation；

Or

Adjust transmission liquid crystal spatial light modulator 83 parameter according to f5 (G), light compensatory light 81, compensatory reflex mirror shape Become；

Step e, imageing sensor 65 imaging, according to as a deviation image plane center direction, utilize the first driver 411 and the Two drivers 412 adjust reflecting mirror 3 angle, make a picture return to imageing sensor 65 image plane center region；

Step f, 4 quadrant detector 66 imaging, obtain some picture after step a terminates and deviate in 4 quadrant detector 66 image planes Heart position Δ x and Δ y, utilizes the first driver 411 and the second driver 412 to adjust reflecting mirror 3 angle, makes a picture return to four-quadrant Limit detector 66 image plane center position；

Step g, read the capacitance change, Δ C1 of the first capacitance sensor 423, and the electric capacity of the second capacitance sensor 424 Changes delta C2, is reconverted into angle changes delta θ 1 He of reflecting mirror 3Read what the first laser interferometer 427 obtained simultaneously Change in displacement Δ x1, and the change in displacement Δ x2 that the second laser interferometer 428 obtains, the angle being reconverted into reflecting mirror 3 becomes Change Δ θ 2 HeAnd then obtain angle changes delta α and the Δ β on measured object 5 surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),Δ θ 2=f3 (Δ x1, Δ x2), WithF1, f2, f3, f4 represent 4 functions.

The method implementing the present embodiment on the device of specific embodiment five, it is possible to utilize air agitation wave front detector 72 With reflecting mirror deformation wave front detector 73, air agitation and reflecting mirror deformation are separately separated, and then optionally to air Disturbance carries out separate compensation, reflecting mirror deformation carries out separate compensation or air agitation and reflecting mirror deformation carry out overall benefit Repay, final realize without air agitation or no-mirror deformation or the high accuracy survey without air agitation and reflecting mirror influence of crust deformation Amount.

The present embodiment has an advantage that, that is, after air agitation and reflecting mirror deformation being separately separated, can be to each The size that affects of result is individually assessed by part, can not only find out in air agitation and reflecting mirror deformation, and who is impact The principal contradiction of certainty of measurement, and mirror deformation individually can be assessed, reflecting mirror crudy is carried out simultaneously Effective evaluation.

If also, it should be noted specific embodiment three, specific embodiment four and specific embodiment five are based on tool Body embodiment two and the device built, then in specific embodiment seven, specific embodiment eight and specific embodiment nine, After point is as returning to imageing sensor 65 image plane center region, guide rail 68 is adjusted to another stall position from a stall position, Make the focal position of 4 quadrant detector 66 image plane center correspondence transmission-type collimating mirror 21, then make 4 quadrant detector 66 become Picture.

Claims (6)

1. combination zeroing high dynamic accuracy big working distance autocollimation, it is characterised in that include that light source (1), transmission-type collimate Mirror (21), reflecting mirror (3) and feedback imaging system (6), described reflecting mirror is provided with angle adjustment measurement apparatus on (3) (4)；The light beam of light source (1) outgoing, after transmission-type collimating mirror (21) is collimated into collimated light beam, then is reflected by reflecting mirror (3), Incide the surface of measured object (5)；From the light beam of measured object (5) surface reflection, then after reflecting mirror (3) reflects, by feeding back Imaging system (6) gathers imaging；

Described feedback imaging system (6) is in following two form:

The first, feedback imaging system (6) includes imageing sensor imaging system and 4 quadrant detector imaging system；

Described imageing sensor imaging system includes the first feedback spectroscope (61) and is arranged on transmission-type collimating mirror (21) focus The imageing sensor (65) at place；From the light beam of measured object (5) surface reflection, then after reflecting mirror (3) reflects, successively through thoroughly Penetrate formula collimating mirror (21) projection, the first feedback spectroscope (61) reflection, gathered imaging by imageing sensor (65)；At measured object (5), under conditions of surface is vertical with optical axis, imageing sensor (65) is become a little as in image plane center position；

Or

Described imageing sensor imaging system includes the first feedback spectroscope (61), the first feedback object lens (63) and is arranged on first The imageing sensor (65) of feedback object lens (63) focal point；From the light beam of measured object (5) surface reflection, then through reflecting mirror (3) After reflection, successively through first feedback spectroscope (61) reflection, first feedback object lens (63) transmission, adopted by imageing sensor (65) Collection imaging；Under conditions of measured object (5) surface is vertical with optical axis, imageing sensor (65) is become a little as in image plane center position Put；

Described 4 quadrant detector imaging system includes the second feedback spectroscope (62) and is arranged on transmission-type collimating mirror (21) Jiao 4 quadrant detector (66) at Dian；From the light beam of measured object (5) surface reflection, then after reflecting mirror (3) reflects, warp after elder generation Cross transmission-type collimating mirror (21) projection, the first feedback spectroscope (61) reflection, gathered imaging by 4 quadrant detector (66)；At quilt Under conditions of survey thing (5) surface is vertical with optical axis, 4 quadrant detector (66) is become a little as in image plane center position；

Or

Described 4 quadrant detector imaging system includes the second feedback spectroscope (62), the second feedback object lens (64) and is arranged on the The 4 quadrant detector (66) of two feedback object lens (64) focal point；From the light beam of measured object (5) surface reflection, then through reflecting mirror (3) reflection after, successively through second feedback spectroscope (62) reflection, second feedback object lens (64) transmission, by 4 quadrant detector (66) imaging is gathered；Under conditions of measured object (5) surface is vertical with optical axis, 4 quadrant detector (66) is become a little as in image planes Center；

The second, feedback imaging system (6) includes the first feedback spectroscope (61) and the imageing sensor carried by guide rail (68) (65) and 4 quadrant detector (66), described guide rail (68) has two stall position, and a stall position makes imageing sensor (65) focal position of image plane center correspondence transmission-type collimating mirror (21), another stall position make 4 quadrant detector (66) as The focal position at center, face correspondence transmission-type collimating mirror (21)；

Or

Feedback imaging system (6) includes the first feedback spectroscope (61), the first feedback object lens (63) and is carried by guide rail (68) Imageing sensor (65) and 4 quadrant detector (66), described guide rail (68) has two stall position, a stall position Making imageing sensor (65) image plane center be positioned at the focal position of the first feedback object lens (63), another stall position makes four-quadrant Detector (66) image plane center is positioned at the focal position of the first feedback object lens (63)；

Described angle adjustment measurement apparatus (4) includes that dress is measured in the angular adjustment apparatus being arranged on reflecting mirror (3), angular deflection Putting and universal drive shaft (43), angular adjustment apparatus includes the first driver (411) and the second driver (412)；Angular deflection is surveyed Amount device includes the first sheet metal (421), the second sheet metal (422), the first reflecting mirror (425), the second reflecting mirror (426), right Answer first capacitance sensor (423) and the second of corresponding second sheet metal (422) position of the first sheet metal (421) position Capacitance sensor (424), first laser interferometer (427) of corresponding first reflecting mirror (425) position and corresponding second reflection Second laser interferometer (428) of mirror (426) position；First driver (411), the first sheet metal (421), the first reflecting mirror (425) and universal drive shaft (43) point-blank, the second driver (412), the second sheet metal (422), the second reflecting mirror (426) and universal drive shaft (43) point-blank, and the first driver (411) vertical with the line of universal drive shaft (43) Two drivers (412) and the line of universal drive shaft (43).

Combination zeroing high dynamic accuracy big working distance autocollimation the most according to claim 1, it is characterised in that also wrap Include Wavefront detecting system (7) and wavefront compensation system (8)；

Described Wavefront detecting system (7) includes Wavefront detecting spectroscope (71) and air agitation wave front detector (72) and anti- Penetrate at least one in mirror deformation wave front detector (73)；Described Wavefront detecting spectroscope (71) is arranged on reflecting mirror (3) and quilt Surveying between thing (5), air agitation wave front detector (72) is arranged on the reflected light path of Wavefront detecting spectroscope (71), reflecting mirror Deformation wave front detector (73) is arranged in the secondary reflection light path of reflecting mirror (3)；

Described wavefront compensation system (8) includes compensatory light (81), compensates collimating mirror (82) and transmission liquid crystal spatial light tune Device processed (83)；The light beam of compensatory light (81) outgoing, after overcompensation collimating mirror (82) is collimated into collimated light beam, then by transmission-type LCD space light modulator (83) is modulated, and incides on Wavefront detecting spectroscope (71).

3. realize on portable combined zeroing high dynamic accuracy big working distance autocollimation described in claim 1 is portable Combination zeroing high dynamic accuracy big working distance auto-collimation method, it is characterised in that comprise the following steps:

Step a, some bright light source (1), imageing sensor (65) imaging, according to a picture deviation image plane center direction, utilize first to drive Dynamic device (411) and the second driver (412) adjust reflecting mirror (3) angle, make a picture return to imageing sensor (65) image plane center Region；

Step b, 4 quadrant detector (66) imaging, obtain some picture after step a terminates and deviate in 4 quadrant detector (66) image planes Heart position Δ x and Δ y, utilizes the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, makes a picture return To 4 quadrant detector (66) image plane center position；

Step c, read the capacitance change, Δ C1 of the first capacitance sensor (423), and the electric capacity of the second capacitance sensor (424) Changes delta C2, is reconverted into angle changes delta θ 1 He of reflecting mirror (3)Read the first laser interferometer (427) to obtain simultaneously Change in displacement Δ x1, and the change in displacement Δ x2 that the second laser interferometer (428) obtains, be reconverted into reflecting mirror (3) Angle changes delta θ 2 HeAnd then obtain angle changes delta α and the Δ β on measured object (5) surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),Δ θ 2=f3 (Δ x1, Δ x2), WithF1, f2, f3, f4 represent 4 functions.

4. realize on portable combined zeroing high dynamic accuracy big working distance autocollimation described in claim 2 is portable Combination zeroing high dynamic accuracy big working distance auto-collimation method, it is desirable to Wavefront detecting system (7) only includes Wavefront detecting spectroscope And air agitation wave front detector (72) (71)；

It is characterized in that, comprise the following steps:

Step a, choose surface and be perpendicular to the reference substance of optical axis direction；

Step b, some bright light source (1), be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a, Air agitation wave front detector (72) respectively obtains two groups of data of GA and GB；

Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；

Step d, according to f5 (G1) adjust transmission liquid crystal spatial light modulator (83) parameter, light compensatory light (81), compensate Air agitation；

Step e, imageing sensor (65) imaging, according to as a deviation image plane center direction, utilize the first driver (411) and the Two drivers (412) adjust reflecting mirror (3) angle, make a picture return to imageing sensor (65) image plane center region；

Step f, 4 quadrant detector (66) imaging, obtain some picture after step a terminates and deviate in 4 quadrant detector (66) image planes Heart position Δ x and Δ y, utilizes the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, makes a picture return To 4 quadrant detector (66) image plane center position；

Step g, read the capacitance change, Δ C1 of the first capacitance sensor (423), and the electric capacity of the second capacitance sensor (424) becomes Change Δ C2, be reconverted into angle changes delta θ 1 He of reflecting mirror (3)Read what the first laser interferometer (427) obtained simultaneously Change in displacement Δ x1, and the change in displacement Δ x2 that the second laser interferometer (428) obtains, be reconverted into the angle of reflecting mirror (3) Degree changes delta θ 2 HeAnd then obtain angle changes delta α and the Δ β on measured object (5) surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),Δ θ 2=f3 (Δ x1, Δ x2), WithF1, f2, f3, f4 represent 4 functions.

5. realize on portable combined zeroing high dynamic accuracy big working distance autocollimation described in claim 2 is portable Combination zeroing high dynamic accuracy big working distance auto-collimation method, it is desirable to Wavefront detecting system (7) only includes Wavefront detecting spectroscope And reflecting mirror deformation wave front detector (73) (71)；

It is characterized in that, comprise the following steps:

Step a, choose surface and be perpendicular to the reference substance of optical axis direction；

Step b, some bright light source (1), be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a, Reflecting mirror deformation wave front detector (73) respectively obtains two groups of data of GC and GD；

Step c, G2=GC-GD, obtain air agitation and wavefront variation that reflecting mirror deformation causes jointly；

Step d, according to f5 (G2) adjust transmission liquid crystal spatial light modulator (83) parameter, light compensatory light (81), compensate Air agitation and reflecting mirror deformation；

Step e, imageing sensor (65) imaging, according to as a deviation image plane center direction, utilize the first driver (411) and the Two drivers (412) adjust reflecting mirror (3) angle, make a picture return to imageing sensor (65) image plane center region；

Step f, 4 quadrant detector (66) imaging, obtain some picture after step a terminates and deviate in 4 quadrant detector (66) image planes Heart position Δ x and Δ y, utilizes the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, makes a picture return To 4 quadrant detector (66) image plane center position；

Step g, read the capacitance change, Δ C1 of the first capacitance sensor (423), and the electric capacity of the second capacitance sensor (424) Changes delta C2, is reconverted into angle changes delta θ 1 He of reflecting mirror (3)Read the first laser interferometer (427) to obtain simultaneously Change in displacement Δ x1, and the change in displacement Δ x2 that the second laser interferometer (428) obtains, be reconverted into reflecting mirror (3) Angle changes delta θ 2 HeAnd then obtain angle changes delta α and the Δ β on measured object (5) surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),Δ θ 2=f3 (Δ x1, Δ x2), WithF1, f2, f3, f4 represent 4 functions.

6. realize on portable combined zeroing high dynamic accuracy big working distance autocollimation described in claim 2 is portable Combination zeroing high dynamic accuracy big working distance auto-collimation method, it is desirable to Wavefront detecting system (7) includes Wavefront detecting light splitting simultaneously Mirror (71), air agitation wave front detector (72) and reflecting mirror deformation wave front detector (73)；

It is characterized in that, comprise the following steps:

Step a, choose surface and be perpendicular to the reference substance of optical axis direction；

Step b, some bright light source (1), be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a, Air agitation wave front detector (72) respectively obtains two groups of data of GA and GB, and reflecting mirror deformation wave front detector (73) respectively obtains Two groups of data of GC and GD；

Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；G2=GC-GD, obtains air agitation and reflecting mirror The wavefront variation that deformation causes jointly；G=G2-G1, obtains the wavefront variation that reflecting mirror deformation causes；

Step d,

Adjusting transmission liquid crystal spatial light modulator (83) parameter according to f5 (G1), light compensatory light (81), make-up air is disturbed Dynamic；

Or

Adjusting transmission liquid crystal spatial light modulator (83) parameter according to f5 (G2), light compensatory light (81), make-up air is disturbed Move and reflecting mirror deformation；

Or

Adjust transmission liquid crystal spatial light modulator (83) parameter according to f5 (G), light compensatory light (81), compensatory reflex mirror shape Become；

Step e, imageing sensor (65) imaging, according to as a deviation image plane center direction, utilize the first driver (411) and the Two drivers (412) adjust reflecting mirror (3) angle, make a picture return to imageing sensor (65) image plane center region；

Step f, 4 quadrant detector (66) imaging, obtain some picture after step a terminates and deviate in 4 quadrant detector (66) image planes Heart position Δ x and Δ y, utilizes the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, makes a picture return To 4 quadrant detector (66) image plane center position；

Step g, read the capacitance change, Δ C1 of the first capacitance sensor (423), and the electric capacity of the second capacitance sensor (424) becomes Change Δ C2, be reconverted into angle changes delta θ 1 He of reflecting mirror (3)Read what the first laser interferometer (427) obtained simultaneously Change in displacement Δ x1, and the change in displacement Δ x2 that the second laser interferometer (428) obtains, be reconverted into the angle of reflecting mirror (3) Degree changes delta θ 2 HeAnd then obtain angle changes delta α and the Δ β on measured object (5) surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),Δ θ 2=f3 (Δ x1, Δ x2), WithF1, f2, f3, f4 represent 4 functions.