CN106091990A - Portable array zeroing high dynamic accuracy big working distance autocollimation and method - Google Patents
Portable array zeroing high dynamic accuracy big working distance autocollimation and method Download PDFInfo
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- CN106091990A CN106091990A CN201610638786.9A CN201610638786A CN106091990A CN 106091990 A CN106091990 A CN 106091990A CN 201610638786 A CN201610638786 A CN 201610638786A CN 106091990 A CN106091990 A CN 106091990A
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- reflecting mirror
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C15/00—Surveying instruments or accessories not provided for in groups G01C1/00 - G01C13/00
- G01C15/002—Active optical surveying means
Abstract
The invention belongs to Technology of Precision Measurement field and optical engineering field, be specifically related to portable array zeroing high dynamic accuracy big working distance autocollimation and method；This device is made up of light source, collimating mirror, reflecting mirror and feedback imaging system；The method, by adjusting reflecting mirror, makes reflection light beam return to feed back imaging system image plane center, and the angular deflection measurement apparatus on recycling reflecting mirror obtains the angle change on measured object surface；Owing to the present invention adds reflecting mirror on tradition auto-collimation angle measurement system, therefore, it is possible to the problem avoided measured object reflection light deviation measurement system and cause measuring, and then there is increase auto-collimation working range under identical operating distance, or under identical working range, increase the advantage of operating distance；Additionally, the specific design of collimating mirror, feedback imaging system, reflecting mirror etc., the present invention is made also to have miniature portable, certainty of measurement height；Simultaneously can monitored over time measured object assembling process；And the technical advantage quickly measured.
Description
Technical field
The invention belongs to Technology of Precision Measurement field and optical engineering field, be specifically related to the zeroing of portable array high dynamically
Precision big working distance autocollimation and method.
Background technology
In Technology of Precision Measurement field, optical engineering field, the most advanced branches of science experiment field and high-end precision assembly manufacture neck
In territory, urgent needs carries out wide working range, high-precision laser auto-collimation technology under big working distance.It supports above-mentioned field
Technology and the development of instrument and equipment.
At Technology of Precision Measurement and instrument field, Laser Autocollimator combines with Circular gratings, can carry out any line angle degree
Measure；Laser auto-collimation technology combines with polygon, can carry out face angular surveying and circular division is measured；Maximum functional distance
From several meters to rice up to a hundred；Resolving power is from 0.1 rad to 0.001 rad.
Field, two round light that Laser Autocollimator is the most vertical with bidimensional are tested in optical engineering field and the most advanced branches of science
Grid combine, and can carry out the measurement of space angle；Formed position reference by two-way Laser Autocollimator, optical axis two-by-two can be carried out
Angle or the measurement of collimation.Angle working range tens rads to tens jiaos points.
Manufacture field at most advanced branches of science experimental provision and high-end precision assembly, use Laser Autocollimator can measure tip
Scientific experiments device and the angle rotating accuracy of high-end precision assembly gyration benchmark, measure the space line of linear motion benchmark
The depth of parallelism of precision and two-by-two motion benchmark and perpendicularity.
Laser auto-collimation technology has the advantages such as noncontact, certainty of measurement are high, easy to use, has wide in above-mentioned field
General application.
Tradition autocollimator is as it is shown in figure 1, this system includes light source 1, transmission-type collimating mirror 21 and feedback imaging system
6；The light beam of light source 1 outgoing, after transmission-type collimating mirror 21 is collimated into collimated light beam, incides the reflecting surface of measured object 5；From
The light beam of measured object 5 reflective surface, is gathered imaging by feedback imaging system 6.Under this structure, only from measured object 5 surface
The nearly backtracking of light beam of reflection, could be gathered imaging by feedback imaging system 6, and then realize effectively measuring.This Jin Yuan road
The condition returned limits so that the following two aspect shortcomings of this system existence:
The first, measurand 5 mirror surface normal can not be too big with the scope of Laser Autocollimator optical axis included angle, otherwise can
Cause the entrance pupil of reflection BEAM SQUINT Laser Autocollimator optical system, and then cause realizing auto-collimation and the survey of micro-angle
Amount；
The second, measurand 5 mirror surface range measurement Laser Autocollimator entrance pupil must not be too far away, if otherwise reflection light
Axle and autocollimator optical axis deviation minute angle will result in the entrance pupil of reflection BEAM SQUINT Laser Autocollimator optical system, enter
And cause realizing auto-collimation and micro-angular surveying.
Two above problem, makes tradition auto-collimation instrument can only be limited under low-angle, little operating distance use.
Summary of the invention
For two problems existing for tradition autocollimator, the invention discloses the zeroing of a kind of portable array high dynamically
Precision big working distance autocollimation and method, compared with tradition autocollimator, have and dramatically increase under identical operating distance
Auto-collimation working range, or under identical auto-collimation working range, dramatically increase the technical advantage of operating distance.
The object of the present invention is achieved like this:
Portable array zeroing high dynamic accuracy big working distance autocollimation, including light source, reflective collimating mirror, reflection
Mirror and feedback imaging system, described reflecting mirror is provided with angle adjustment measurement apparatus；The light beam of light source outgoing, through anti-
After the formula collimating mirror of penetrating is collimated into collimated light beam, then reflected by reflecting mirror, incide the surface of measured object；Reflect from measured object surface
Light beam, then through reflecting mirror reflect after, by feedback imaging system gather imaging；
Described feedback imaging system is the one in following two form:
The first, it is arranged between light source and reflective collimating mirror, including the first feedback spectroscope and be arranged on reflective
The 4 quadrant detector of focal plane of collimating mirror and multiple single pixel light electric transducer, described single pixel light electric transducer becomes array to divide
Cloth, 4 quadrant detector had not only been positioned at array center, but also had been positioned on feedback imaging system optical axis；Light from the reflection of measured object surface
Bundle, then through reflecting mirror reflect after, successively through reflective collimating mirror transmission, first feedback dichroic mirror, visited by four-quadrant
Survey device or single pixel light electric transducer gathers imaging；
The second, be arranged between reflective collimating mirror and reflecting mirror, including the first feedback spectroscope, first feedback object lens and
It is arranged on the 4 quadrant detector of reflective focal plane of collimating mirror and multiple single pixel light electric transducer, described single pixel opto-electronic conversion
Device becomes array distribution, and 4 quadrant detector had not only been positioned at array center, but also has been positioned on feedback imaging system optical axis；From measured object surface
Reflection light beam, then through reflecting mirror reflect after, successively through first feed back dichroic mirror, first feedback object lens transmission, by
4 quadrant detector or single pixel light electric transducer gather imaging；
Described angle adjustment measurement apparatus includes arranging angular adjustment apparatus on the mirror, dress is measured in angular deflection
Putting and universal drive shaft, angular adjustment apparatus includes the first driver and the second driver；Angular deflection measurement apparatus includes first
Sheet metal, the second sheet metal, the first reflecting mirror, the second reflecting mirror, the first capacitance sensor of corresponding first sheet metal position, with
And the second capacitance sensor of corresponding second sheet metal position, the first laser interferometer of corresponding first reflector position and
Second laser interferometer of corresponding second reflector position；First driver, the first sheet metal, the first reflecting mirror and universal
Axle point-blank, the second driver, the second sheet metal, the second reflecting mirror and universal drive shaft point-blank, and
One driver, second driver vertical with the line of universal drive shaft and the line of universal drive shaft.
Realize on above-mentioned portable array zeroing high dynamic accuracy big working distance autocollimation is portable
Portable array zeroing high dynamic accuracy big working distance auto-collimation method, comprises the following steps:
Step a, some bright light source, feed back imaging system images, if:
The first, the some image position obtained is in single pixel light electric transducer region, according to single pixel light electric transducer coordinate,
Obtain a picture deviation image plane center direction, utilize the first driver and the second driver to adjust mirror angle, make a picture return to
4 quadrant detector region, enters step b；
The second, the some image position obtained, in 4 quadrant detector region, is directly entered step b；
Step b, 4 quadrant detector imaging, obtain some picture deviation 4 quadrant detector image plane center position after step a terminates
Put Δ x and Δ y, utilize the first driver and the second driver to adjust mirror angle, make a picture return to 4 quadrant detector picture
Center, face；
Step c, read the capacitance change, Δ C1 of the first capacitance sensor, and the capacitance change, Δ C2 of the second capacitance sensor,
It is reconverted into angle changes delta θ 1 He of reflecting mirrorRead the change in displacement Δ x1 that the first laser interferometer obtains simultaneously, with
And the second change in displacement Δ x2 that obtain of laser interferometer, it is reconverted into angle changes delta θ 2 He of reflecting mirrorAnd then obtain
Angle changes delta α on measured object surface and Δ β；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),Δ θ 2=
F3 (Δ x1, Δ x2),With
F1, f2, f3, f4 represent 4 functions.
Above-mentioned portable array zeroing high dynamic accuracy big working distance autocollimation, also includes Wavefront detecting system and ripple
Precompensation system；
Described Wavefront detecting system includes Wavefront detecting spectroscope and air agitation wave front detector and reflecting mirror deformation
At least one in wave front detector；Described Wavefront detecting spectroscope is arranged between reflecting mirror and measured object, air agitation ripple
Front detector is arranged on the spectroscopical reflected light path of Wavefront detecting, and reflecting mirror deformation wave front detector is arranged on the two of reflecting mirror
In secondary reflection light path；
Described wavefront compensation system includes compensatory light, compensates collimating mirror and transmission liquid crystal spatial light modulator；Mend
Repay the light beam of light source outgoing, after overcompensation collimating mirror is collimated into collimated light beam, then adjusted by transmission liquid crystal spatial light modulator
System, incides on Wavefront detecting spectroscope.
Realize on above-mentioned portable array zeroing high dynamic accuracy big working distance autocollimation is portable
Portable array zeroing high dynamic accuracy big working distance auto-collimation method, it is desirable to Wavefront detecting system only includes Wavefront detecting light splitting
Mirror and air agitation wave front detector；
Comprise the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source, be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a,
Air agitation wave front detector respectively obtains two groups of data of GA and GB；
Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；
Step d, according to f5 (G1) adjust transmission liquid crystal spatial light modulator parameter, light compensatory light, make-up air
Disturbance；
Step e, some bright light source, feed back imaging system images, if:
The first, the some image position obtained is in single pixel light electric transducer region, according to single pixel light electric transducer coordinate,
Obtain a picture deviation image plane center direction, utilize the first driver and the second driver to adjust mirror angle, make a picture return to
4 quadrant detector region, enters step f；
The second, the some image position obtained, in 4 quadrant detector region, is directly entered step f；
Step f, 4 quadrant detector imaging, obtain some picture deviation 4 quadrant detector image plane center position after step a terminates
Put Δ x and Δ y, utilize the first driver and the second driver to adjust mirror angle, make a picture return to 4 quadrant detector picture
Center, face；
Step g, read the capacitance change, Δ C1 of the first capacitance sensor, and the capacitance change, Δ C2 of the second capacitance sensor,
It is reconverted into angle changes delta θ 1 He of reflecting mirrorRead the change in displacement Δ x1 that the first laser interferometer obtains simultaneously, with
And the second change in displacement Δ x2 that obtain of laser interferometer, it is reconverted into angle changes delta θ 2 He of reflecting mirrorAnd then obtain
Angle changes delta α on measured object surface and Δ β；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),Δ θ 2=
F3 (Δ x1, Δ x2),With
F1, f2, f3, f4 represent 4 functions.
Realize on above-mentioned portable array zeroing high dynamic accuracy big working distance autocollimation is portable
Portable array zeroing high dynamic accuracy big working distance auto-collimation method, it is desirable to Wavefront detecting system only includes Wavefront detecting light splitting
Mirror and reflecting mirror deformation wave front detector；
Comprise the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source, be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a,
Reflecting mirror deformation wave front detector respectively obtains two groups of data of GC and GD；
Step c, G2=GC-GD, obtain air agitation and wavefront variation that reflecting mirror deformation causes jointly；
Step d, according to f5 (G2) adjust transmission liquid crystal spatial light modulator parameter, light compensatory light, make-up air
Disturbance and reflecting mirror deformation；
Step e, feedback imaging system images, if:
The first, the some image position obtained is in single pixel light electric transducer region, according to single pixel light electric transducer coordinate,
Obtain a picture deviation image plane center direction, utilize the first driver and the second driver to adjust mirror angle, make a picture return to
4 quadrant detector region, enters step f；
The second, the some image position obtained, in 4 quadrant detector region, is directly entered step f；
Step f, 4 quadrant detector imaging, obtain some picture deviation 4 quadrant detector image plane center position after step a terminates
Put Δ x and Δ y, utilize the first driver and the second driver to adjust mirror angle, make a picture return to 4 quadrant detector picture
Center, face；
Step g, read the capacitance change, Δ C1 of the first capacitance sensor, and the capacitance change, Δ C2 of the second capacitance sensor,
It is reconverted into angle changes delta θ 1 He of reflecting mirrorRead the change in displacement Δ x1 that the first laser interferometer obtains simultaneously, and
The change in displacement Δ x2 that second laser interferometer obtains, is reconverted into angle changes delta θ 2 He of reflecting mirrorAnd then obtain
Angle changes delta α on measured object surface and Δ β；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),Δ θ 2=
F3 (Δ x1, Δ x2),With
F1, f2, f3, f4 represent 4 functions.
Realize on above-mentioned portable array zeroing high dynamic accuracy big working distance autocollimation is portable
Portable array zeroing high dynamic accuracy big working distance auto-collimation method, it is desirable to Wavefront detecting system includes that Wavefront detecting divides simultaneously
Light microscopic, air agitation wave front detector and reflecting mirror deformation wave front detector；
Comprise the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source, be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a,
Air agitation wave front detector respectively obtains two groups of data of GA and GB, and reflecting mirror deformation wave front detector respectively obtains GC and GD two
Group data；
Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；G2=GC-GD, obtains air agitation with anti-
Penetrate the wavefront variation that mirror deformation causes jointly；G=G2-G1, obtains the wavefront variation that reflecting mirror deformation causes；
Step d,
Adjust transmission liquid crystal spatial light modulator parameter according to f5 (G1), light compensatory light, make-up air disturbance；
Or
Adjust transmission liquid crystal spatial light modulator parameter according to f5 (G2), light compensatory light, make-up air disturbance and
Reflecting mirror deformation；
Or
Adjust transmission liquid crystal spatial light modulator parameter according to f5 (G), light compensatory light, compensatory reflex mirror deformation；
Step e, feedback imaging system images, if:
The first, the some image position obtained is in single pixel light electric transducer region, according to single pixel light electric transducer coordinate,
Obtain a picture deviation image plane center direction, utilize the first driver and the second driver to adjust mirror angle, make a picture return to
4 quadrant detector region, enters step f；
The second, the some image position obtained, in 4 quadrant detector region, is directly entered step f；
Step f, 4 quadrant detector imaging, obtain some picture deviation 4 quadrant detector image plane center position after step a terminates
Put Δ x and Δ y, utilize the first driver and the second driver to adjust mirror angle, make a picture return to 4 quadrant detector picture
Center, face；
Step g, read the capacitance change, Δ C1 of the first capacitance sensor, and the capacitance change, Δ C2 of the second capacitance sensor,
It is reconverted into angle changes delta θ 1 He of reflecting mirrorRead the change in displacement Δ x1 that the first laser interferometer obtains simultaneously, with
And the second change in displacement Δ x2 that obtain of laser interferometer, it is reconverted into angle changes delta θ 2 He of reflecting mirrorAnd then obtain
Angle changes delta α on measured object surface and Δ β；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),Δ θ 2=
F3 (Δ x1, Δ x2),With
F1, f2, f3, f4 represent 4 functions.
Beneficial effect:
Compared with tradition autocollimator, invention increases reflecting mirror and angle adjustment measurement on the mirror is set
Device, this structure is arranged, it is possible to has bigger drift angle or there is relatively larger transverse position between measured object incident illumination and reflection light
In the case of shifting, adjust reflecting mirror attitude by angle adjustment measurement apparatus, it is ensured that reflection light backtracking is also fed back imaging
System receives, and then is prevented effectively from measured object reflection light deviation measurement system and causes the problem that cannot measure, and then makes this
Invent to have under identical operating distance, dramatically increase auto-collimation working range, or significantly increase under identical auto-collimation working range
Add the technical advantage of operating distance.
In addition, the present invention also has following a few technical advantage:
The first, reflective collimating mirror is selected, although add manufacture difficulty, improve cost of manufacture, but this structure
There are the following three irreplaceable technical advantages of aspect: the most reflective collimating mirror is conducive to instrument miniaturization, makes portable
Instrument；Secondly reflective collimating mirror no color differnece, light source frequency range is the widest, and the advantage of its certainty of measurement is the most obvious；3rd is by plating
Membrane technology, it is possible to the heat absorption realizing reflective collimating mirror is far smaller than transmission-type, is prevented effectively from sending out of collimating mirror thermal deformation problem
Raw, this not only enables whole system mate high power light source, and is also beneficial to ensure the measuring precision；
The second, select multiple single pixel light electric transducer with 4 quadrant detector collectively as becoming in feedback imaging system
As device, combine the advantage that multiple single pixel light electric transducer area is big and 4 quadrant detector position resolution is high；Its
In, multiple single pixel light electric transducers combine, it can be ensured that in the case of measured object reflection light and incident illumination drift angle are relatively big,
Reflection light still is able to enter the entrance pupil of optical system, without departing from range of receiving；On this basis, recycling reflecting mirror realizes
The quickly return compensation in real time of reflection light, is adjusted to 4 quadrant detector position by reflection light, again can be according to Quadrant detector
The high position resolution advantage of device obtains higher angle-measurement accuracy；Therefore, by multiple single pixel light electric transducers and four
Quadrant detector combines, and not only makes auto-collimation working range of the present invention or operating distance greatly be extended, and favorably
In improving angle-measurement accuracy；
3rd, select capacitance sensor and laser interferometer collectively as angular deflection measurement apparatus so that the present invention is not
Be only capable of utilize capacitance sensor superelevation displacement sensory characteristic and in the range of minute angle displacement of the lines be easily converted into angle
The good characteristic of displacement so that the present invention can have the highest measurement essence under the conditions of low sample frequency (20Hz and following)
Degree, angle highest measurement resolving power can bring up to 0.0005 rad from 0.005 rad of tradition autocollimator, improve a quantity
Level；And laser interferometer can also allow the invention to complete angle under high sample frequency (can reach 2000Hz)
Measure, i.e. there is the highest measuring speed；If the first reflecting mirror and the second reflecting mirror use prism of corner cube, it is also possible to utilize angle
The optical characteristics that inclined for incident ray turnback is returned by cone prism, makes the angular surveying scope of the present invention be greatly enhanced, i.e.
The present invention has very while high measurement speed, also has the technical advantage of wide-angle range；The two combines, moreover it is possible to it is right to play
The measured object having high accuracy assembling demand carries out the effect of monitored over time；
4th, the present invention additionally uses techniques below: the first driver, the first sheet metal, the first reflecting mirror and universal
Axle point-blank, the second driver, the second sheet metal, the second reflecting mirror and universal drive shaft point-blank, and
One driver, second driver vertical with the line of universal drive shaft and the line of universal drive shaft；This two orthogonal two dimensions of line
Arrange so that the data in different line directions are non-interference, it is not necessary to decoupling computing, so can conveniently demarcate, simplify and calculated
Journey, improves measuring speed.
Accompanying drawing explanation
Fig. 1 is the structural representation of tradition auto-collimation angle measurement system.
Fig. 2 is the of the present invention portable array zeroing high dynamic accuracy big working distance autocollimation specific embodiment one
A kind of structural representation.
Fig. 3 is the structural representation of angle adjustment measurement apparatus.
Fig. 4 is the of the present invention portable array zeroing high dynamic accuracy big working distance autocollimation specific embodiment one
Two kinds of structural representations.
Fig. 5 is the knot of the present invention portable array zeroing high dynamic accuracy big working distance autocollimation specific embodiment two
Structure schematic diagram.
Fig. 6 is the knot of the present invention portable array zeroing high dynamic accuracy big working distance autocollimation specific embodiment three
Structure schematic diagram.
Fig. 7 is the knot of the present invention portable array zeroing high dynamic accuracy big working distance autocollimation specific embodiment four
Structure schematic diagram.
In figure: 1 light source, 22 reflective collimating mirrors, 3 reflecting mirrors, 4 angle adjustment measurement apparatus, 411 first drivers, 412
Second driver, 421 first sheet metals, 422 second sheet metals, 423 first capacitance sensors, 424 second capacitance sensors,
425 first reflecting mirrors, 426 second reflecting mirrors, 427 first laser interferometer, 428 second laser interferometer, 43 universal drive shafts, 5 quilts
Survey thing, 6 feedback imaging systems, 61 first feedback spectroscopes, 63 first feedback object lens, 66 4 quadrant detectors, 67 single pixel light
Before electric transducer, 7 Wavefront detecting systems, 71 Wavefront detecting spectroscopes, 72 air agitation wave front detectors, 73 reflecting mirror deformation waves
Detector, 8 wavefront compensation system, 81 compensatory lights, 82 compensation collimating mirror, 83 transmission liquid crystal spatial light modulators.
Specific embodiment
Below in conjunction with the accompanying drawings the specific embodiment of the invention is described in further detail.
Specific embodiment one
The present embodiment is portable array zeroing high dynamic accuracy big working distance autocollimation embodiment.
The portable array zeroing high dynamic accuracy big working distance autocollimation of the present embodiment, structural representation such as Fig. 2
Shown in.This autocollimation includes light source 1, reflective collimating mirror 22, reflecting mirror 3 and feedback imaging system 6, described reflection
Angle adjustment measurement apparatus 4 it is provided with on mirror 3；The light beam of light source 1 outgoing, is collimated into collimated light beam through reflective collimating mirror 22
After, then reflected by reflecting mirror 3, incide the surface of measured object 5；From the light beam of measured object 5 surface reflection, then through reflecting mirror 3
After reflection, feedback imaging system 6 gather imaging；
Described feedback imaging system 6 is arranged between light source 1 and reflective collimating mirror 22, including the first feedback spectroscope
61 and be arranged on the 4 quadrant detector 66 of reflective collimating mirror 22 focal plane and multiple single pixel light electric transducer 67, described
Single pixel light electric transducer 67 becomes array distribution, and 4 quadrant detector 66 had not only been positioned at array center, but also has been positioned at feedback imaging system 6
On optical axis；From the light beam of measured object 5 surface reflection, then after reflecting mirror 3 reflects, successively saturating through reflective collimating mirror 22
Penetrate, the first feedback spectroscope 61 reflects, gathered imaging by 4 quadrant detector 66 or single pixel light electric transducer 67；
Described angle adjustment measurement apparatus 4 includes that dress is measured in the angular adjustment apparatus being arranged on reflecting mirror 3, angular deflection
Putting and universal drive shaft 43, angular adjustment apparatus includes the first driver 411 and the second driver 412；Angular deflection measurement apparatus
Including first sheet metal the 421, second sheet metal the 422, first reflecting mirror the 425, second reflecting mirror 426, corresponding first sheet metal 421
First capacitance sensor 423 of position and the second capacitance sensor 424 of corresponding second sheet metal 422 position, correspondence first
First laser interferometer 427 of reflecting mirror 425 position and the second laser interferometer of corresponding second reflecting mirror 426 position
428；Point-blank, second drives for first driver the 411, first sheet metal the 421, first reflecting mirror 425 and universal drive shaft 43
Dynamic device the 412, second sheet metal the 422, second reflecting mirror 426 and universal drive shaft 43 point-blank, and the first driver
411 second drivers 412 vertical with the line of universal drive shaft 43 and the lines of universal drive shaft 43, as shown in Figure 3.
It should be noted that in the present embodiment, feedback imaging system 6 can also select following structure: is arranged on reflection
Between formula collimating mirror 22 and reflecting mirror 3, feed back object lens 63 including the first feedback spectroscope 61, first and be arranged on reflective collimation
The 4 quadrant detector 66 of mirror 22 focal plane and multiple single pixel light electric transducer 67, described single pixel light electric transducer 67 becomes array
Distribution, 4 quadrant detector 66 had not only been positioned at array center, but also had been positioned on feedback imaging system 6 optical axis；Reflect from measured object 5 surface
Light beam, then through reflecting mirror 3 reflect after, successively through first feedback spectroscope 61 reflect, first feedback object lens 63 transmission, by
4 quadrant detector 66 or single pixel light electric transducer 67 gather imaging；As shown in Figure 4.
Specific embodiment two
The present embodiment is portable array zeroing high dynamic accuracy big working distance autocollimation embodiment.
The portable array zeroing high dynamic accuracy big working distance autocollimation of the present embodiment, structural representation such as Fig. 5
Shown in.On the basis of specific embodiment one, the portable array zeroing high dynamic accuracy big working distance auto-collimation of the present embodiment
Device is additionally provided with Wavefront detecting system 7 and wavefront compensation system 8；
Described Wavefront detecting system 7 includes Wavefront detecting spectroscope 71 and air agitation wave front detector 72；Described wavefront
Detection spectroscope 71 is arranged between reflecting mirror 3 and measured object 5, and air agitation wave front detector 72 is arranged on Wavefront detecting light splitting
On the reflected light path of mirror 71, reflecting mirror deformation wave front detector 73 is arranged in the secondary reflection light path of reflecting mirror 3；
Described wavefront compensation system 8 includes compensatory light 81, compensates collimating mirror 82 and transmission liquid crystal spatial light modulation
Device 83；The light beam of compensatory light 81 outgoing, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space
Photomodulator 83 is modulated, and incides on Wavefront detecting spectroscope 71.
Specific embodiment three
The present embodiment is portable array zeroing high dynamic accuracy big working distance autocollimation embodiment.
The portable array zeroing high dynamic accuracy big working distance autocollimation of the present embodiment, structural representation such as Fig. 6
Shown in.On the basis of specific embodiment one, the portable array zeroing high dynamic accuracy big working distance auto-collimation of the present embodiment
Device is additionally provided with Wavefront detecting system 7 and wavefront compensation system 8；
Described Wavefront detecting system 7 includes Wavefront detecting spectroscope 71 and reflecting mirror deformation wave front detector 73；Described ripple
Front detection spectroscope 71 is arranged between reflecting mirror 3 and measured object 5, and air agitation wave front detector 72 is arranged on Wavefront detecting and divides
On the reflected light path of light microscopic 71, reflecting mirror deformation wave front detector 73 is arranged in the secondary reflection light path of reflecting mirror 3；
Described wavefront compensation system 8 includes compensatory light 81, compensates collimating mirror 82 and transmission liquid crystal spatial light modulation
Device 83；The light beam of compensatory light 81 outgoing, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space
Photomodulator 83 is modulated, and incides on Wavefront detecting spectroscope 71.
Specific embodiment four
The present embodiment is portable array zeroing high dynamic accuracy big working distance autocollimation embodiment.
The portable array zeroing high dynamic accuracy big working distance autocollimation of the present embodiment, structural representation such as Fig. 7
Shown in.On the basis of specific embodiment one, the portable array zeroing high dynamic accuracy big working distance auto-collimation of the present embodiment
Device is additionally provided with Wavefront detecting system 7 and wavefront compensation system 8；
Described Wavefront detecting system 7 includes Wavefront detecting spectroscope 71, air agitation wave front detector 72 and reflecting mirror shape
Become wave front detector 73；Described Wavefront detecting spectroscope 71 is arranged between reflecting mirror 3 and measured object 5, and air agitation wavefront is visited
Surveying device 72 to be arranged on the reflected light path of Wavefront detecting spectroscope 71, reflecting mirror deformation wave front detector 73 is arranged on reflecting mirror 3
Secondary reflection light path on；
Described wavefront compensation system 8 includes compensatory light 81, compensates collimating mirror 82 and transmission liquid crystal spatial light modulation
Device 83；The light beam of compensatory light 81 outgoing, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space
Photomodulator 83 is modulated, and incides on Wavefront detecting spectroscope 71.
For above autocollimation embodiment, following 2 needs are also had to illustrate:
The first, the first driver 411 and the second driver 412 in described angular adjustment apparatus, both can select to drive
The motor of speed or motor servo driver, can select again the piezoelectric ceramic actuator driving precision higher, also
Motor or motor servo driver can be used in mixed way with piezoelectric ceramic actuator；Those skilled in the art can basis
It is actually needed and rationally selects.
The second, in all above autocollimation embodiment, angular deflection measurement apparatus all only includes two pairs of sheet metals
With the combination of capacitance sensor, and two pairs of plane mirrors and the combination of laser interferometer, this design is acquiescence reflecting mirror 3
The most do not produce translation and make；If it is considered that reflecting mirror 3 produces translation at work and affects measurement essence
Degree, can place the 3rd pair of sheet metal and the combination of capacitance sensor, and the 3rd pair of plane reflection in universal drive shaft 43 position
Mirror and the combination of laser interferometer, to offset three capacitance sensors and the identical translation of three laser interferometer generations, really
Protect certainty of measurement.Specific embodiment five
The present embodiment is at portable array zeroing high dynamic accuracy big working distance auto-collimation dress described in specific embodiment one
Put the portable array zeroing high dynamic accuracy big working distance auto-collimation embodiment of the method for realization.
The portable array zeroing high dynamic accuracy big working distance auto-collimation method of the present embodiment, comprises the following steps:
Step a, some bright light source 1, feed back imaging system 6 imaging, if:
The first, the some image position obtained is in single pixel light electric transducer 67 region, according to single pixel light electric transducer 67
Coordinate, obtains a picture deviation image plane center direction, utilizes the first driver 411 and the second driver 412 to adjust reflecting mirror 3 jiaos
Degree, makes a picture return to 4 quadrant detector 66 region, enters step b；
The second, the some image position obtained, in 4 quadrant detector 66 region, is directly entered step b；
Step b, 4 quadrant detector 66 imaging, obtain some picture after step a terminates and deviate in 4 quadrant detector 66 image planes
Heart position Δ x and Δ y, utilizes the first driver 411 and the second driver 412 to adjust reflecting mirror 3 angle, makes a picture return to four-quadrant
Limit detector 66 image plane center position；
Step c, read the capacitance change, Δ C1 of the first capacitance sensor 423, and the electric capacity of the second capacitance sensor 424
Changes delta C2, is reconverted into angle changes delta θ 1 He of reflecting mirror 3Read the position that the first laser interferometer 427 obtains simultaneously
Move changes delta x1, and the change in displacement Δ x2 that the second laser interferometer 428 obtains, be reconverted into the angle change of reflecting mirror 3
Δ θ 2 HeAnd then obtain angle changes delta α and the Δ β on measured object 5 surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),Δ θ 2=f3 (Δ x1, Δ x2),
WithF1, f2, f3, f4 represent 4 functions.
The main innovative point of the present invention is the angle adjustment measurement dress adding reflecting mirror 3 and being arranged on reflecting mirror 3
Putting 4, this structure can have bigger drift angle or there are the feelings of relatively larger transverse displacement between measured object 5 incident illumination and reflection light
Under condition, adjust 4 whole reflecting mirror attitudes by angle adjustment measurement apparatus, make reflection light backtracking and connect by feedback imaging system 6
Receive, be prevented effectively from measured object reflection light deviation measurement system and the problem that causes measuring.
But, the introducing of reflecting mirror 3, its face type error can be delivered in final result, reduces the certainty of measurement of system；With
Time, the increase of operating distance makes again the air agitation between reflecting mirror 3 and measured object 5 can not ignore, and also can reduce system
Certainty of measurement.Visible, want to realize high-acruracy survey, be necessary in view of 3 type errors of reflecting mirror and reflecting mirror 3 with tested
The air agitation impact on measurement result between thing 5, to this end, devise specific embodiment six, specific embodiment seven and concrete
Embodiment eight.
Specific embodiment six
The present embodiment is at portable array zeroing high dynamic accuracy big working distance auto-collimation dress described in specific embodiment two
Put the portable array zeroing high dynamic accuracy big working distance auto-collimation embodiment of the method for realization.
The portable array zeroing high dynamic accuracy big working distance auto-collimation method of the present embodiment, comprises the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source 1, be individually positioned in operating position A and nearly operating position by the reference substance selected by step a
B, air agitation wave front detector 72 respectively obtains two groups of data of GA and GB；
Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；
Step d, according to f5 (G1) adjust transmission liquid crystal spatial light modulator 83 parameter, light compensatory light 81, compensate
Air agitation；
Step e, some bright light source 1, feed back imaging system 6 imaging, if:
The first, the some image position obtained is in single pixel light electric transducer 67 region, according to single pixel light electric transducer 67
Coordinate, obtains a picture deviation image plane center direction, utilizes the first driver 411 and the second driver 412 to adjust reflecting mirror 3 jiaos
Degree, makes a picture return to 4 quadrant detector 66 region, enters step f；
The second, the some image position obtained, in 4 quadrant detector 66 region, is directly entered step f；
Step f, 4 quadrant detector 66 imaging, obtain some picture after step a terminates and deviate in 4 quadrant detector 66 image planes
Heart position Δ x and Δ y, utilizes the first driver 411 and the second driver 412 to adjust reflecting mirror 3 angle, makes a picture return to four-quadrant
Limit detector 66 image plane center position；
Step g, read the capacitance change, Δ C1 of the first capacitance sensor 423, and the electric capacity of the second capacitance sensor 424
Changes delta C2, is reconverted into angle changes delta θ 1 He of reflecting mirror 3Read what the first laser interferometer 427 obtained simultaneously
Change in displacement Δ x1, and the change in displacement Δ x2 that the second laser interferometer 428 obtains, the angle being reconverted into reflecting mirror 3 becomes
Change Δ θ 2 HeAnd then obtain angle changes delta α and the Δ β on measured object 5 surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),Δ θ 2=f3 (Δ x1, Δ x2),
WithF1, f2, f3, f4 represent 4 functions.
The method implementing the present embodiment on the device of specific embodiment two, it is possible to utilize air agitation wave front detector 72
Air agitation is separated, and then utilizes wavefront compensation system 8 that air agitation is compensated, finally realize without air agitation
The high-acruracy survey of impact.
Specific embodiment seven
The present embodiment is at portable array zeroing high dynamic accuracy big working distance auto-collimation dress described in specific embodiment three
Put the portable array zeroing high dynamic accuracy big working distance auto-collimation embodiment of the method for realization.
The portable array zeroing high dynamic accuracy big working distance auto-collimation method of the present embodiment, comprises the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source 1, be individually positioned in operating position A and nearly operating position by the reference substance selected by step a
B, reflecting mirror deformation wave front detector 73 respectively obtains two groups of data of GC and GD；
Step c, G2=GC-GD, obtain air agitation and wavefront variation that reflecting mirror deformation causes jointly；
Step d, according to f5 (G2) adjust transmission liquid crystal spatial light modulator 83 parameter, light compensatory light 81, compensate
Air agitation and reflecting mirror deformation；
Step e, feedback imaging system 6 imaging, if:
The first, the some image position obtained is in single pixel light electric transducer 67 region, according to single pixel light electric transducer 67
Coordinate, obtains a picture deviation image plane center direction, utilizes the first driver 411 and the second driver 412 to adjust reflecting mirror 3 jiaos
Degree, makes a picture return to 4 quadrant detector 66 region, enters step f；
The second, the some image position obtained, in 4 quadrant detector 66 region, is directly entered step f；
Step f, 4 quadrant detector 66 imaging, obtain some picture after step a terminates and deviate in 4 quadrant detector 66 image planes
Heart position Δ x and Δ y, utilizes the first driver 411 and the second driver 412 to adjust reflecting mirror 3 angle, makes a picture return to four-quadrant
Limit detector 66 image plane center position；
Step g, read the capacitance change, Δ C1 of the first capacitance sensor 423, and the electric capacity of the second capacitance sensor 424
Changes delta C2, is reconverted into angle changes delta θ 1 He of reflecting mirror 3Read what the first laser interferometer 427 obtained simultaneously
Change in displacement Δ x1, and the change in displacement Δ x2 that the second laser interferometer 428 obtains, the angle being reconverted into reflecting mirror 3 becomes
Change Δ θ 2 HeAnd then obtain angle changes delta α and the Δ β on measured object 5 surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),Δ θ 2=f3 (Δ x1, Δ x2),
WithF1, f2, f3, f4 represent 4 functions.
The method implementing the present embodiment on the device of specific embodiment three, it is possible to utilize reflecting mirror deformation wave front detector
Air agitation and reflecting mirror deformation are carried out overall separation by 73, and then utilize wavefront compensation system 8 to air agitation and reflecting mirror
Deformation carries out entire compensation, finally realizes without air agitation and the high-acruracy survey of reflecting mirror influence of crust deformation.
Specific embodiment eight
The present embodiment is at portable array zeroing high dynamic accuracy big working distance auto-collimation dress described in specific embodiment four
Put the portable array zeroing high dynamic accuracy big working distance auto-collimation embodiment of the method for realization.
The portable array zeroing high dynamic accuracy big working distance auto-collimation method of the present embodiment, comprises the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source 1, be individually positioned in operating position A and nearly operating position by the reference substance selected by step a
B, air agitation wave front detector 72 respectively obtains two groups of data of GA and GB, and reflecting mirror deformation wave front detector 73 respectively obtains GC
With two groups of data of GD；
Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；G2=GC-GD, obtains air agitation with anti-
Penetrate the wavefront variation that mirror deformation causes jointly；G=G2-G1, obtains the wavefront variation that reflecting mirror deformation causes；
Step d,
Adjusting transmission liquid crystal spatial light modulator 83 parameter according to f5 (G1), light compensatory light 81, make-up air is disturbed
Dynamic；
Or
Adjusting transmission liquid crystal spatial light modulator 83 parameter according to f5 (G2), light compensatory light 81, make-up air is disturbed
Move and reflecting mirror deformation；
Or
Adjust transmission liquid crystal spatial light modulator 83 parameter according to f5 (G), light compensatory light 81, compensatory reflex mirror shape
Become；
Step e, feedback imaging system 6 imaging, if:
The first, the some image position obtained is in single pixel light electric transducer 67 region, according to single pixel light electric transducer 67
Coordinate, obtains a picture deviation image plane center direction, utilizes the first driver 411 and the second driver 412 to adjust reflecting mirror 3 jiaos
Degree, makes a picture return to 4 quadrant detector 66 region, enters step f；
The second, the some image position obtained, in 4 quadrant detector 66 region, is directly entered step f；
Step f, 4 quadrant detector 66 imaging, obtain some picture after step a terminates and deviate in 4 quadrant detector 66 image planes
Heart position Δ x and Δ y, utilizes the first driver 411 and the second driver 412 to adjust reflecting mirror 3 angle, makes a picture return to four-quadrant
Limit detector 66 image plane center position；
Step g, read the capacitance change, Δ C1 of the first capacitance sensor 423, and the electric capacity of the second capacitance sensor 424
Changes delta C2, is reconverted into angle changes delta θ 1 He of reflecting mirror 3Read what the first laser interferometer 427 obtained simultaneously
Change in displacement Δ x1, and the change in displacement Δ x2 that the second laser interferometer 428 obtains, the angle being reconverted into reflecting mirror 3 becomes
Change Δ θ 2 HeAnd then obtain angle changes delta α and the Δ β on measured object 5 surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),Δ θ 2=f3 (Δ x1, Δ x2),
WithF1, f2, f3, f4 represent 4 functions.
The method implementing the present embodiment on the device of specific embodiment four, it is possible to utilize air agitation wave front detector 72
With reflecting mirror deformation wave front detector 73, air agitation and reflecting mirror deformation are separately separated, and then optionally to air
Disturbance carries out separate compensation, reflecting mirror deformation carries out separate compensation or air agitation and reflecting mirror deformation carry out overall benefit
Repay, final realize without air agitation or no-mirror deformation or the high accuracy survey without air agitation and reflecting mirror influence of crust deformation
Amount.
The present embodiment has an advantage that, that is, after air agitation and reflecting mirror deformation being separately separated, can be to each
The size that affects of result is individually assessed by part, can not only find out in air agitation and reflecting mirror deformation, and who is impact
The principal contradiction of certainty of measurement, and mirror deformation individually can be assessed, reflecting mirror crudy is carried out simultaneously
Effective evaluation.
Claims (6)
- The most portable array zeroing high dynamic accuracy big working distance autocollimation, it is characterised in that include light source (1), reflection Formula collimating mirror (22), reflecting mirror (3) and feedback imaging system (6), described reflecting mirror (3) is provided with angle adjustment and measures Device (4)；The light beam of light source (1) outgoing, after reflective collimating mirror (22) is collimated into collimated light beam, then by reflecting mirror (3) Reflection, incides the surface of measured object (5)；From the light beam of measured object (5) surface reflection, then after reflecting mirror (3) reflects, by Feedback imaging system (6) gathers imaging；Described feedback imaging system (6) is the one in following two form:The first, it is arranged between light source (1) and reflective collimating mirror (22), including the first feedback spectroscope (61) and setting 4 quadrant detector (66) and multiple single pixel light electric transducer (67), described single pixel at reflective collimating mirror (22) focal plane Optical-electrical converter (67) becomes array distribution, and 4 quadrant detector (66) had not only been positioned at array center, but also has been positioned at feedback imaging system (6) On optical axis；From the light beam of measured object (5) surface reflection, then after reflecting mirror (3) reflects, successively through reflective collimating mirror (22) transmission, the first feedback spectroscope (61) are reflected, are gathered by 4 quadrant detector (66) or single pixel light electric transducer (67) Imaging；The second, it is arranged between reflective collimating mirror (22) and reflecting mirror (3), including the first feedback spectroscope (61), first anti- Present object lens (63) and be arranged on the 4 quadrant detector (66) of reflective collimating mirror (22) focal plane and multiple single pixel opto-electronic conversion Device (67), described single pixel light electric transducer (67) becomes array distribution, and 4 quadrant detector (66) had not only been positioned at array center, but also position On feedback imaging system (6) optical axis；From the light beam of measured object (5) surface reflection, then after reflecting mirror (3) reflects, successively Through the first feedback spectroscope (61) reflection, the first feedback object lens (63) transmission, by 4 quadrant detector (66) or single pixel light Electric transducer (67) gathers imaging；Described angle adjustment measurement apparatus (4) includes that dress is measured in the angular adjustment apparatus being arranged on reflecting mirror (3), angular deflection Putting and universal drive shaft (43), angular adjustment apparatus includes the first driver (411) and the second driver (412)；Angular deflection is surveyed Amount device includes the first sheet metal (421), the second sheet metal (422), the first reflecting mirror (425), the second reflecting mirror (426), right Answer first capacitance sensor (423) and the second of corresponding second sheet metal (422) position of the first sheet metal (421) position Capacitance sensor (424), first laser interferometer (427) of corresponding first reflecting mirror (425) position and corresponding second reflection Second laser interferometer (428) of mirror (426) position；First driver (411), the first sheet metal (421), the first reflecting mirror (425) and universal drive shaft (43) point-blank, the second driver (412), the second sheet metal (422), the second reflecting mirror (426) and universal drive shaft (43) point-blank, and the first driver (411) vertical with the line of universal drive shaft (43) Two drivers (412) and the line of universal drive shaft (43).
- Portable array the most according to claim 1 zeroing high dynamic accuracy big working distance autocollimation, its feature exists In, also include Wavefront detecting system (7) and wavefront compensation system (8)；Described Wavefront detecting system (7) includes Wavefront detecting spectroscope (71) and air agitation wave front detector (72) and anti- Penetrate at least one in mirror deformation wave front detector (73)；Described Wavefront detecting spectroscope (71) is arranged on reflecting mirror (3) and quilt Surveying between thing (5), air agitation wave front detector (72) is arranged on the reflected light path of Wavefront detecting spectroscope (71), reflecting mirror Deformation wave front detector (73) is arranged in the secondary reflection light path of reflecting mirror (3)；Described wavefront compensation system (8) includes compensatory light (81), compensates collimating mirror (82) and transmission liquid crystal spatial light tune Device processed (83)；The light beam of compensatory light (81) outgoing, after overcompensation collimating mirror (82) is collimated into collimated light beam, then by transmission-type LCD space light modulator (83) is modulated, and incides on Wavefront detecting spectroscope (71).
- 3. realize on portable array zeroing high dynamic accuracy big working distance autocollimation described in claim 1 Portable array zeroing high dynamic accuracy big working distance auto-collimation method, it is characterised in that comprise the following steps:Step a, some bright light source (1), feed back imaging system (6) imaging, if:The first, the some image position obtained is in single pixel light electric transducer (67) region, according to single pixel light electric transducer (67) Coordinate, obtains a picture deviation image plane center direction, utilizes the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, makes a picture return to 4 quadrant detector (66) region, enters step b；The second, the some image position obtained, in 4 quadrant detector (66) region, is directly entered step b；Step b, 4 quadrant detector (66) imaging, obtain some picture after step a terminates and deviate in 4 quadrant detector (66) image planes Heart position Δ x and Δ y, utilizes the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, makes a picture return To 4 quadrant detector (66) image plane center position；Step c, read the capacitance change, Δ C1 of the first capacitance sensor (423), and the electric capacity of the second capacitance sensor (424) Changes delta C2, is reconverted into angle changes delta θ 1 He of reflecting mirror (3)Read the first laser interferometer (427) to obtain simultaneously Change in displacement Δ x1, and the change in displacement Δ x2 that the second laser interferometer (428) obtains, be reconverted into reflecting mirror (3) Angle changes delta θ 2 HeAnd then obtain angle changes delta α and the Δ β on measured object (5) surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),Δ θ 2=f3 (Δ x1, Δ x2), WithF1, f2, f3, f4 represent 4 functions.
- 4. realize on portable array zeroing high dynamic accuracy big working distance autocollimation described in claim 2 Portable array zeroing high dynamic accuracy big working distance auto-collimation method, it is desirable to Wavefront detecting system (7) only includes ripple Front detection spectroscope (71) and air agitation wave front detector (72)；It is characterized in that, comprise the following steps:Step a, choose surface and be perpendicular to the reference substance of optical axis direction；Step b, some bright light source (1), be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a, Air agitation wave front detector (72) respectively obtains two groups of data of GA and GB；Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；Step d, according to f5 (G1) adjust transmission liquid crystal spatial light modulator (83) parameter, light compensatory light (81), compensate Air agitation；Step e, some bright light source (1), feed back imaging system (6) imaging, if:The first, the some image position obtained is in single pixel light electric transducer (67) region, according to single pixel light electric transducer (67) Coordinate, obtains a picture deviation image plane center direction, utilizes the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, makes a picture return to 4 quadrant detector (66) region, enters step f；The second, the some image position obtained, in 4 quadrant detector (66) region, is directly entered step f；Step f, 4 quadrant detector (66) imaging, obtain some picture after step a terminates and deviate in 4 quadrant detector (66) image planes Heart position Δ x and Δ y, utilizes the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, makes a picture return To 4 quadrant detector (66) image plane center position；Step g, read the capacitance change, Δ C1 of the first capacitance sensor (423), and the electric capacity of the second capacitance sensor (424) becomes Change Δ C2, be reconverted into angle changes delta θ 1 He of reflecting mirror (3)Read what the first laser interferometer (427) obtained simultaneously Change in displacement Δ x1, and the change in displacement Δ x2 that the second laser interferometer (428) obtains, be reconverted into the angle of reflecting mirror (3) Degree changes delta θ 2 HeAnd then obtain angle changes delta α and the Δ β on measured object (5) surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),Δ θ 2=f3 (Δ x1, Δ x2), WithF1, f2, f3, f4 represent 4 functions.
- 5. realize on portable array zeroing high dynamic accuracy big working distance autocollimation described in claim 2 Portable array zeroing high dynamic accuracy big working distance auto-collimation method, it is desirable to Wavefront detecting system (7) only includes ripple Front detection spectroscope (71) and reflecting mirror deformation wave front detector (73)；It is characterized in that, comprise the following steps:Step a, choose surface and be perpendicular to the reference substance of optical axis direction；Step b, some bright light source (1), be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a, Reflecting mirror deformation wave front detector (73) respectively obtains two groups of data of GC and GD；Step c, G2=GC-GD, obtain air agitation and wavefront variation that reflecting mirror deformation causes jointly；Step d, according to f5 (G2) adjust transmission liquid crystal spatial light modulator (83) parameter, light compensatory light (81), compensate Air agitation and reflecting mirror deformation；Step e, feedback imaging system (6) imaging, if:The first, the some image position obtained is in single pixel light electric transducer (67) region, according to single pixel light electric transducer (67) Coordinate, obtains a picture deviation image plane center direction, utilizes the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, makes a picture return to 4 quadrant detector (66) region, enters step f；The second, the some image position obtained, in 4 quadrant detector (66) region, is directly entered step f；Step f, 4 quadrant detector (66) imaging, obtain some picture after step a terminates and deviate in 4 quadrant detector (66) image planes Heart position Δ x and Δ y, utilizes the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, makes a picture return To 4 quadrant detector (66) image plane center position；Step g, read the capacitance change, Δ C1 of the first capacitance sensor (423), and the electric capacity of the second capacitance sensor (424) becomes Change Δ C2, be reconverted into angle changes delta θ 1 He of reflecting mirror (3)Read what the first laser interferometer (427) obtained simultaneously Change in displacement Δ x1, and the change in displacement Δ x2 that the second laser interferometer (428) obtains, be reconverted into the angle of reflecting mirror (3) Changes delta θ 2 HeAnd then obtain angle changes delta α and the Δ β on measured object (5) surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),Δ θ 2=f3 (Δ x1, Δ x2), WithF1, f2, f3, f4 represent 4 functions.
- 6. realize on portable array zeroing high dynamic accuracy big working distance autocollimation described in claim 2 Portable array zeroing high dynamic accuracy big working distance auto-collimation method, it is desirable to Wavefront detecting system (7) includes simultaneously Wavefront detecting spectroscope (71), air agitation wave front detector (72) and reflecting mirror deformation wave front detector (73)；It is characterized in that, comprise the following steps:Step a, choose surface and be perpendicular to the reference substance of optical axis direction；Step b, some bright light source (1), be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a, Air agitation wave front detector (72) respectively obtains two groups of data of GA and GB, and reflecting mirror deformation wave front detector (73) respectively obtains Two groups of data of GC and GD；Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；G2=GC-GD, obtains air agitation and reflecting mirror The wavefront variation that deformation causes jointly；G=G2-G1, obtains the wavefront variation that reflecting mirror deformation causes；Step d,Adjusting transmission liquid crystal spatial light modulator (83) parameter according to f5 (G1), light compensatory light (81), make-up air is disturbed Dynamic；OrAdjusting transmission liquid crystal spatial light modulator (83) parameter according to f5 (G2), light compensatory light (81), make-up air is disturbed Move and reflecting mirror deformation；OrAdjust transmission liquid crystal spatial light modulator (83) parameter according to f5 (G), light compensatory light (81), compensatory reflex mirror shape Become；Step e, feedback imaging system (6) imaging, if:The first, the some image position obtained is in single pixel light electric transducer (67) region, according to single pixel light electric transducer (67) Coordinate, obtains a picture deviation image plane center direction, utilizes the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, makes a picture return to 4 quadrant detector (66) region, enters step f；The second, the some image position obtained, in 4 quadrant detector (66) region, is directly entered step f；Step f, 4 quadrant detector (66) imaging, obtain some picture after step a terminates and deviate in 4 quadrant detector (66) image planes Heart position Δ x and Δ y, utilizes the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, makes a picture return To 4 quadrant detector (66) image plane center position；Step g, read the capacitance change, Δ C1 of the first capacitance sensor (423), and the electric capacity of the second capacitance sensor (424) becomes Change Δ C2, be reconverted into angle changes delta θ 1 He of reflecting mirror (3)Read what the first laser interferometer (427) obtained simultaneously Change in displacement Δ x1, and the change in displacement Δ x2 that the second laser interferometer (428) obtains, be reconverted into the angle of reflecting mirror (3) Changes delta θ 2 HeAnd then obtain angle changes delta α and the Δ β on measured object (5) surface；Wherein, Δ θ 1=f1 (Δ C1, Δ C2),Δ θ 2=f3 (Δ x1, Δ x2), WithF1, f2, f3, f4 represent 4 functions.
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