CN106247990A - The big working distance autocollimation of portable array zeroing high accuracy and method - Google Patents
The big working distance autocollimation of portable array zeroing high accuracy and method Download PDFInfo
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- CN106247990A CN106247990A CN201610638818.5A CN201610638818A CN106247990A CN 106247990 A CN106247990 A CN 106247990A CN 201610638818 A CN201610638818 A CN 201610638818A CN 106247990 A CN106247990 A CN 106247990A
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- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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Abstract
The invention belongs to Technology of Precision Measurement field and optical engineering field, be specifically related to the portable array big working distance autocollimation of zeroing high accuracy and method；This device is made up of light source, collimating mirror, reflecting mirror and feedback imaging system；The method, by adjusting reflecting mirror, makes reflection light beam return to feed back imaging system image plane center, and the angular deflection measurement apparatus on recycling reflecting mirror obtains the angle change on measured object surface；Owing to the present invention adds reflecting mirror on tradition auto-collimation angle measurement system, therefore, it is possible to the problem avoided measured object reflection light deviation measurement system and cause measuring, and then there is increase auto-collimation working range under identical operating distance, or under identical working range, increase the advantage of operating distance；Additionally, the specific design of collimating mirror, feedback imaging system, reflecting mirror etc., the present invention is made also to have miniature portable, certainty of measurement height；Under the lowest sample frequency, there is high measurement accuracy；And the technical advantage quickly measured.
Description
Technical field
The invention belongs to Technology of Precision Measurement field and optical engineering field, be specifically related to portable array zeroing high accuracy
Big working distance autocollimation and method.
Background technology
In Technology of Precision Measurement field, optical engineering field, the most advanced branches of science experiment field and high-end precision assembly manufacture neck
In territory, urgent needs carries out wide working range, high-precision laser auto-collimation technology under big working distance.It supports above-mentioned field
Technology and the development of instrument and equipment.
At Technology of Precision Measurement and instrument field, Laser Autocollimator combines with Circular gratings, can carry out any line angle degree
Measure；Laser auto-collimation technology combines with polygon, can carry out face angular surveying and circular division is measured；Maximum functional distance
From several meters to rice up to a hundred；Resolving power is from 0.1 rad to 0.001 rad.
Field, two round light that Laser Autocollimator is the most vertical with bidimensional are tested in optical engineering field and the most advanced branches of science
Grid combine, and can carry out the measurement of space angle；Formed position reference by two-way Laser Autocollimator, optical axis two-by-two can be carried out
Angle or the measurement of collimation.Angle working range tens rads to tens jiaos points.
Manufacture field at most advanced branches of science experimental provision and high-end precision assembly, use Laser Autocollimator can measure tip
Scientific experiments device and the angle rotating accuracy of high-end precision assembly gyration benchmark, measure the space line of linear motion benchmark
The depth of parallelism of precision and two-by-two motion benchmark and perpendicularity.
Laser auto-collimation technology has the advantages such as noncontact, certainty of measurement are high, easy to use, has wide in above-mentioned field
General application.
Tradition autocollimator is as it is shown in figure 1, this system includes light source 1, transmission-type collimating mirror 21 and feedback imaging system
6；The light beam of light source 1 outgoing, after transmission-type collimating mirror 21 is collimated into collimated light beam, incides the reflecting surface of measured object 5；From
The light beam of measured object 5 reflective surface, is gathered imaging by feedback imaging system 6.Under this structure, only from measured object 5 surface
The nearly backtracking of light beam of reflection, could be gathered imaging by feedback imaging system 6, and then realize effectively measuring.This Jin Yuan road
The condition returned limits so that the following two aspect shortcomings of this system existence:
The first, measurand 5 mirror surface normal can not be too big with the scope of Laser Autocollimator optical axis included angle, otherwise can
Cause the entrance pupil of reflection BEAM SQUINT Laser Autocollimator optical system, and then cause realizing auto-collimation and the survey of micro-angle
Amount；
The second, measurand 5 mirror surface range measurement Laser Autocollimator entrance pupil must not be too far away, if otherwise reflection light
Axle and autocollimator optical axis deviation minute angle will result in the entrance pupil of reflection BEAM SQUINT Laser Autocollimator optical system, enter
And cause realizing auto-collimation and micro-angular surveying.
Two above problem, makes tradition auto-collimation instrument can only be limited under low-angle, little operating distance use.
Summary of the invention
For two problems existing for tradition autocollimator, the invention discloses a kind of portable array zeroing high accuracy
Big working distance autocollimation and method, compared with tradition autocollimator, have and dramatically increase autocollimatic under identical operating distance
Straight working range, or under identical auto-collimation working range, dramatically increase the technical advantage of operating distance.
The object of the present invention is achieved like this:
The portable array zeroing big working distance autocollimation of high accuracy, including light source, reflective collimating mirror, reflecting mirror,
And feedback imaging system, described reflecting mirror is provided with angle adjustment measurement apparatus；The light beam of light source outgoing, through reflective
After collimating mirror is collimated into collimated light beam, then reflected by reflecting mirror, incide the surface of measured object；Light from the reflection of measured object surface
Bundle, then after reflecting mirror reflects, feedback imaging system gather imaging；
Described feedback imaging system is in following two form:
The first, it is arranged between light source and reflective collimating mirror, including the first feedback spectroscope and be arranged on reflective
The 4 quadrant detector of focal plane of collimating mirror and multiple single pixel light electric transducer, described single pixel light electric transducer becomes array to divide
Cloth, 4 quadrant detector had not only been positioned at array center, but also had been positioned on feedback imaging system optical axis；Light from the reflection of measured object surface
Bundle, then through reflecting mirror reflect after, successively through reflective collimating mirror transmission, first feedback dichroic mirror, visited by four-quadrant
Survey device or single pixel light electric transducer gathers imaging；
The second, be arranged between reflective collimating mirror and reflecting mirror, including the first feedback spectroscope, first feedback object lens and
It is arranged on the 4 quadrant detector of reflective focal plane of collimating mirror and multiple single pixel light electric transducer, described single pixel opto-electronic conversion
Device becomes array distribution, and 4 quadrant detector had not only been positioned at array center, but also has been positioned on feedback imaging system optical axis；From measured object surface
Reflection light beam, then through reflecting mirror reflect after, successively through first feed back dichroic mirror, first feedback object lens transmission, by
4 quadrant detector or single pixel light electric transducer gather imaging；
Described angle adjustment measurement apparatus includes arranging angular adjustment apparatus on the mirror, dress is measured in angular deflection
Putting and universal drive shaft, angular adjustment apparatus includes the first driver and the second driver；Angular deflection measurement apparatus includes first
Sheet metal, the second sheet metal, the first capacitance sensor of corresponding first sheet metal position and corresponding second sheet metal position
Second capacitance sensor；First driver, the first sheet metal and universal drive shaft point-blank, the second driver, the second gold medal
Belong to sheet and universal drive shaft point-blank, and the first driver second driver vertical with the line of universal drive shaft is with universal
The line of axle.
Realize on the above-mentioned portable array big working distance autocollimation of zeroing high accuracy is portable portable
The big working distance auto-collimation method of formula array zeroing high accuracy, comprises the following steps:
Step a, some bright light source, feed back imaging system images, if:
The first, the some image position obtained is in single pixel light electric transducer region, according to single pixel light electric transducer coordinate,
Obtain a picture deviation image plane center direction, utilize the first driver and the second driver to adjust mirror angle, make a picture return to
4 quadrant detector region, enters step b；
The second, the some image position obtained, in 4 quadrant detector region, is directly entered step b；
Step b, 4 quadrant detector imaging, obtain some picture deviation 4 quadrant detector image plane center position after step a terminates
Put Δ x and Δ y, utilize the first driver and the second driver to adjust mirror angle, make a picture return to 4 quadrant detector picture
Center, face；
Step c, read the capacitance change, Δ C1 of the first capacitance sensor, and the capacitance change, Δ of the second capacitance sensor
C2, be reconverted into reflecting mirror angle changes delta θ andAnd then obtain angle changes delta α and the Δ β on measured object surface；Wherein,
Δ θ=f1 (Δ C1, Δ C2),WithF1, f2, f3, f4 represent
4 functions.
The big working distance autocollimation of above-mentioned portable array zeroing high accuracy, also includes that Wavefront detecting system and wavefront are mended
Repay system；
Described Wavefront detecting system includes Wavefront detecting spectroscope and air agitation wave front detector and reflecting mirror deformation
At least one in wave front detector；Described Wavefront detecting spectroscope is arranged between reflecting mirror and measured object, air agitation ripple
Front detector is arranged on the spectroscopical reflected light path of Wavefront detecting, and reflecting mirror deformation wave front detector is arranged on the two of reflecting mirror
In secondary reflection light path；
Described wavefront compensation system includes compensatory light, compensates collimating mirror and transmission liquid crystal spatial light modulator；Mend
Repay the light beam of light source outgoing, after overcompensation collimating mirror is collimated into collimated light beam, then adjusted by transmission liquid crystal spatial light modulator
System, incides on Wavefront detecting spectroscope.
Realize on the above-mentioned portable array big working distance autocollimation of zeroing high accuracy is portable portable
The big working distance auto-collimation method of formula array zeroing high accuracy, it is desirable to Wavefront detecting system only includes Wavefront detecting spectroscope and air
Disturbance wave front detector；
Comprise the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source, be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a,
Air agitation wave front detector respectively obtains two groups of data of GA and GB；
Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；
Step d, according to f5 (G1) adjust transmission liquid crystal spatial light modulator parameter, light compensatory light, make-up air
Disturbance；
Step e, some bright light source, feed back imaging system images, if:
The first, the some image position obtained is in single pixel light electric transducer region, according to single pixel light electric transducer coordinate,
Obtain a picture deviation image plane center direction, utilize the first driver and the second driver to adjust mirror angle, make a picture return to
4 quadrant detector region, enters step f；
The second, the some image position obtained, in 4 quadrant detector region, is directly entered step f；
Step f, 4 quadrant detector imaging, obtain some picture deviation 4 quadrant detector image plane center position after step a terminates
Put Δ x and Δ y, utilize the first driver and the second driver to adjust mirror angle, make a picture return to 4 quadrant detector picture
Center, face；
Step g, read the capacitance change, Δ C1 of the first capacitance sensor, and the capacitance change, Δ of the second capacitance sensor
C2, be reconverted into reflecting mirror angle changes delta θ andAnd then obtain angle changes delta α and the Δ β on measured object surface；Wherein,
Δ θ=f1 (Δ C1, Δ C2),WithF1, f2, f3, f4 represent
4 functions.
Realize on the above-mentioned portable array big working distance autocollimation of zeroing high accuracy is portable portable
The big working distance auto-collimation method of formula array zeroing high accuracy, it is desirable to Wavefront detecting system only includes Wavefront detecting spectroscope and reflection
Mirror deformation wave front detector；
Comprise the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source, be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a,
Reflecting mirror deformation wave front detector respectively obtains two groups of data of GC and GD；
Step c, G2=GC-GD, obtain air agitation and wavefront variation that reflecting mirror deformation causes jointly；
Step d, according to f5 (G2) adjust transmission liquid crystal spatial light modulator parameter, light compensatory light, make-up air
Disturbance and reflecting mirror deformation；
Step e, feedback imaging system images, if:
The first, the some image position obtained is in single pixel light electric transducer region, according to single pixel light electric transducer coordinate,
Obtain a picture deviation image plane center direction, utilize the first driver and the second driver to adjust mirror angle, make a picture return to
4 quadrant detector region, enters step f；
The second, the some image position obtained, in 4 quadrant detector region, is directly entered step f；
Step f, 4 quadrant detector imaging, obtain some picture deviation 4 quadrant detector image plane center position after step a terminates
Put Δ x and Δ y, utilize the first driver and the second driver to adjust mirror angle, make a picture return to 4 quadrant detector picture
Center, face；
Step g, read the capacitance change, Δ C1 of the first capacitance sensor, and the capacitance change, Δ of the second capacitance sensor
C2, be reconverted into reflecting mirror angle changes delta θ andAnd then obtain angle changes delta α and the Δ β on measured object surface；Wherein,
Δ θ=f1 (Δ C1, Δ C2),WithF1, f2, f3, f4 represent
4 functions.
Realize on the above-mentioned portable array big working distance autocollimation of zeroing high accuracy is portable portable
The big working distance auto-collimation method of formula array zeroing high accuracy, it is desirable to Wavefront detecting system includes Wavefront detecting spectroscope, sky simultaneously
Gas disturbance wave front detector and reflecting mirror deformation wave front detector；
Comprise the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source, be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a,
Air agitation wave front detector respectively obtains two groups of data of GA and GB, and reflecting mirror deformation wave front detector respectively obtains GC and GD two
Group data；
Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；G2=GC-GD, obtains air agitation with anti-
Penetrate the wavefront variation that mirror deformation causes jointly；G=G2-G1, obtains the wavefront variation that reflecting mirror deformation causes；
Step d,
Adjust transmission liquid crystal spatial light modulator parameter according to f5 (G1), light compensatory light, make-up air disturbance；
Or
Adjust transmission liquid crystal spatial light modulator parameter according to f5 (G2), light compensatory light, make-up air disturbance and
Reflecting mirror deformation；
Or
Adjust transmission liquid crystal spatial light modulator parameter according to f5 (G), light compensatory light, compensatory reflex mirror deformation；
Step e, feedback imaging system images, if:
The first, the some image position obtained is in single pixel light electric transducer region, according to single pixel light electric transducer coordinate,
Obtain a picture deviation image plane center direction, utilize the first driver and the second driver to adjust mirror angle, make a picture return to
4 quadrant detector region, enters step f；
The second, the some image position obtained, in 4 quadrant detector region, is directly entered step f；
Step f, 4 quadrant detector imaging, obtain some picture deviation 4 quadrant detector image plane center position after step a terminates
Put Δ x and Δ y, utilize the first driver and the second driver to adjust mirror angle, make a picture return to 4 quadrant detector picture
Center, face；
Step g, read the capacitance change, Δ C1 of the first capacitance sensor, and the capacitance change, Δ of the second capacitance sensor
C2, be reconverted into reflecting mirror angle changes delta θ andAnd then obtain angle changes delta α and the Δ β on measured object surface；Wherein,
Δ θ=f1 (Δ C1, Δ C2),WithF1, f2, f3, f4 represent 4
Individual function.
Beneficial effect:
Compared with tradition autocollimator, invention increases reflecting mirror and angle adjustment measurement on the mirror is set
Device, this structure is arranged, it is possible to has bigger drift angle or there is relatively larger transverse position between measured object incident illumination and reflection light
In the case of shifting, adjust reflecting mirror attitude by angle adjustment measurement apparatus, it is ensured that reflection light backtracking is also fed back imaging
System receives, and then is prevented effectively from measured object reflection light deviation measurement system and causes the problem that cannot measure, and then makes this
Invent to have under identical operating distance, dramatically increase auto-collimation working range, or significantly increase under identical auto-collimation working range
Add the technical advantage of operating distance.
In addition, the present invention also has following a few technical advantage:
The first, reflective collimating mirror is selected, although add manufacture difficulty, improve cost of manufacture, but this structure
There are the following three irreplaceable technical advantages of aspect: the most reflective collimating mirror is conducive to instrument miniaturization, makes portable
Instrument；Secondly reflective collimating mirror no color differnece, light source frequency range is the widest, and the advantage of its certainty of measurement is the most obvious；3rd is by plating
Membrane technology, it is possible to the heat absorption realizing reflective collimating mirror is far smaller than transmission-type, is prevented effectively from sending out of collimating mirror thermal deformation problem
Raw, this not only enables whole system mate high power light source, and is also beneficial to ensure the measuring precision；
The second, select multiple single pixel light electric transducer with 4 quadrant detector collectively as becoming in feedback imaging system
As device, combine the advantage that multiple single pixel light electric transducer area is big and 4 quadrant detector position resolution is high；Its
In, multiple single pixel light electric transducers combine, it can be ensured that in the case of measured object reflection light and incident illumination drift angle are relatively big,
Reflection light still is able to enter the entrance pupil of optical system, without departing from range of receiving；On this basis, recycling reflecting mirror realizes anti-
Penetrate light quickly return compensation in real time, reflection light is adjusted to 4 quadrant detector position, again can be according to 4 quadrant detector
High position resolution advantage obtain higher angle-measurement accuracy；Therefore, by multiple single pixel light electric transducers and four-quadrant
Limit detector combines, and not only makes auto-collimation working range of the present invention or operating distance greatly be extended, and is conducive to
Improve angle-measurement accuracy；
3rd, selecting capacitance sensor as angular deflection measurement apparatus, the superelevation displacement utilizing capacitance sensor is sensitive
Degree characteristic and in the range of minute angle displacement of the lines be easily converted into the good characteristic of angular displacement so that the present invention can adopt low
Having the highest certainty of measurement under the conditions of sample frequency (20Hz and following), angle highest measurement resolving power can be from tradition auto-collimation
0.005 rad of instrument brings up to 0.0005 rad, improves an order of magnitude；
4th, the present invention additionally uses techniques below: the first driver, the first sheet metal and universal drive shaft are straight at one article
On line, the second driver, the second sheet metal and universal drive shaft point-blank, and the company of the first driver and universal drive shaft
Vertical second driver of line and the line of universal drive shaft；The orthogonal two dimension of this two lines is arranged so that different line sides
To data non-interference, it is not necessary to decoupling computing, so can conveniently demarcate, simplify calculating process, improve measuring speed.
Accompanying drawing explanation
Fig. 1 is the structural representation of tradition auto-collimation angle measurement system.
Fig. 2 is the first of the present invention portable array big working distance autocollimation specific embodiment one of zeroing high accuracy
Structural representation.
Fig. 3 is the structural representation of angle adjustment measurement apparatus.
Fig. 4 is the second of the present invention portable array big working distance autocollimation specific embodiment one of zeroing high accuracy
Structural representation.
Fig. 5 is that the structure of the present invention portable array big working distance autocollimation specific embodiment two of zeroing high accuracy is shown
It is intended to.
Fig. 6 is that the structure of the present invention portable array big working distance autocollimation specific embodiment three of zeroing high accuracy is shown
It is intended to.
Fig. 7 is that the structure of the present invention portable array big working distance autocollimation specific embodiment four of zeroing high accuracy is shown
It is intended to.
In figure: 1 light source, 22 reflective collimating mirrors, 3 reflecting mirrors, 4 angle adjustment measurement apparatus, 411 first drivings
Device, 412 second drivers, 421 first sheet metals, 422 second sheet metals, 423 first capacitance sensors, 424 second electricity
Hold sensor, 43 universal drive shafts, 5 measured objects, 6 feedback imaging systems, 61 first feedback spectroscopes, 63 first feedback object lens,
66 4 quadrant detectors, 67 single pixel light electric transducer, 7 Wavefront detecting systems, 71 Wavefront detecting spectroscopes, 72 air
Disturbance wave front detector, 73 reflecting mirror deformation wave front detectors, 8 wavefront compensation system, 81 compensatory lights, 82 compensation collimations
Mirror, 83 transmission liquid crystal spatial light modulators.
Specific embodiment
Below in conjunction with the accompanying drawings the specific embodiment of the invention is described in further detail.
Specific embodiment one
The present embodiment is the portable array big working distance autocollimation embodiment of zeroing high accuracy.
The portable array big working distance autocollimation of zeroing high accuracy of the present embodiment, structural representation is as shown in Figure 2.
This autocollimation includes light source 1, reflective collimating mirror 22, reflecting mirror 3 and feedback imaging system 6, on described reflecting mirror 3
It is provided with angle adjustment measurement apparatus 4；The light beam of light source 1 outgoing, after reflective collimating mirror 22 is collimated into collimated light beam, then
Reflected by reflecting mirror 3, incide the surface of measured object 5；From the light beam of measured object 5 surface reflection, then reflect through reflecting mirror 3
After, feedback imaging system 6 gather imaging；
Described feedback imaging system 6 is arranged between light source 1 and reflective collimating mirror 22, including the first feedback spectroscope
61 and be arranged on the 4 quadrant detector 66 of reflective collimating mirror 22 focal plane and multiple single pixel light electric transducer 67, described
Single pixel light electric transducer 67 becomes array distribution, and 4 quadrant detector 66 had not only been positioned at array center, but also has been positioned at feedback imaging system 6
On optical axis；From the light beam of measured object 5 surface reflection, then after reflecting mirror 3 reflects, successively saturating through reflective collimating mirror 22
Penetrate, the first feedback spectroscope 61 reflects, gathered imaging by 4 quadrant detector 66 or single pixel light electric transducer 67；
Described angle adjustment measurement apparatus 4 includes that dress is measured in the angular adjustment apparatus being arranged on reflecting mirror 3, angular deflection
Putting and universal drive shaft 43, angular adjustment apparatus includes the first driver 411 and the second driver 412；Angular deflection measurement apparatus
Including first sheet metal the 421, second sheet metal 422, the first capacitance sensor 423 of corresponding first sheet metal 421 position and
Second capacitance sensor 424 of corresponding second sheet metal 422 position；First driver the 411, first sheet metal 421 and universal
Axle 43 point-blank, second driver the 412, second sheet metal 422 and universal drive shaft 43 point-blank, and
One driver 411, second driver 412 vertical with the line of universal drive shaft 43 and the line of universal drive shaft 43；As shown in Figure 3.
It should be noted that in the present embodiment, feedback imaging system 6 can also select following structure: is arranged on reflection
Between formula collimating mirror 22 and reflecting mirror 3, feed back object lens 63 including the first feedback spectroscope 61, first and be arranged on reflective collimation
The 4 quadrant detector 66 of mirror 22 focal plane and multiple single pixel light electric transducer 67, described single pixel light electric transducer 67 becomes array
Distribution, 4 quadrant detector 66 had not only been positioned at array center, but also had been positioned on feedback imaging system 6 optical axis；Reflect from measured object 5 surface
Light beam, then through reflecting mirror 3 reflect after, successively through first feedback spectroscope 61 reflect, first feedback object lens 63 transmission, by
4 quadrant detector 66 or single pixel light electric transducer 67 gather imaging；As shown in Figure 4.
Specific embodiment two
The present embodiment is the portable array big working distance autocollimation embodiment of zeroing high accuracy.
The portable array big working distance autocollimation of zeroing high accuracy of the present embodiment, structural representation is as shown in Figure 5.
On the basis of specific embodiment one, the portable array big working distance autocollimation of zeroing high accuracy of the present embodiment also sets up
There are Wavefront detecting system 7 and wavefront compensation system 8；
Described Wavefront detecting system 7 includes Wavefront detecting spectroscope 71 and air agitation wave front detector 72；Described wavefront
Detection spectroscope 71 is arranged between reflecting mirror 3 and measured object 5, and air agitation wave front detector 72 is arranged on Wavefront detecting light splitting
On the reflected light path of mirror 71, reflecting mirror deformation wave front detector 73 is arranged in the secondary reflection light path of reflecting mirror 3；
Described wavefront compensation system 8 includes compensatory light 81, compensates collimating mirror 82 and transmission liquid crystal spatial light modulation
Device 83；The light beam of compensatory light 81 outgoing, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space
Photomodulator 83 is modulated, and incides on Wavefront detecting spectroscope 71.
Specific embodiment three
The present embodiment is the portable array big working distance autocollimation embodiment of zeroing high accuracy.
The portable array big working distance autocollimation of zeroing high accuracy of the present embodiment, structural representation is as shown in Figure 6.
On the basis of specific embodiment one, the portable array big working distance autocollimation of zeroing high accuracy of the present embodiment also sets up
There are Wavefront detecting system 7 and wavefront compensation system 8；
Described Wavefront detecting system 7 includes Wavefront detecting spectroscope 71 and reflecting mirror deformation wave front detector 73；Described ripple
Front detection spectroscope 71 is arranged between reflecting mirror 3 and measured object 5, and air agitation wave front detector 72 is arranged on Wavefront detecting and divides
On the reflected light path of light microscopic 71, reflecting mirror deformation wave front detector 73 is arranged in the secondary reflection light path of reflecting mirror 3；
Described wavefront compensation system 8 includes compensatory light 81, compensates collimating mirror 82 and transmission liquid crystal spatial light modulation
Device 83；The light beam of compensatory light 81 outgoing, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space
Photomodulator 83 is modulated, and incides on Wavefront detecting spectroscope 71.
Specific embodiment four
The present embodiment is the portable array big working distance autocollimation embodiment of zeroing high accuracy.
The portable array big working distance autocollimation of zeroing high accuracy of the present embodiment, structural representation is as shown in Figure 7.
On the basis of specific embodiment one, the portable array big working distance autocollimation of zeroing high accuracy of the present embodiment also sets up
There are Wavefront detecting system 7 and wavefront compensation system 8；
Described Wavefront detecting system 7 includes Wavefront detecting spectroscope 71, air agitation wave front detector 72 and reflecting mirror shape
Become wave front detector 73；Described Wavefront detecting spectroscope 71 is arranged between reflecting mirror 3 and measured object 5, and air agitation wavefront is visited
Surveying device 72 to be arranged on the reflected light path of Wavefront detecting spectroscope 71, reflecting mirror deformation wave front detector 73 is arranged on reflecting mirror 3
Secondary reflection light path on；
Described wavefront compensation system 8 includes compensatory light 81, compensates collimating mirror 82 and transmission liquid crystal spatial light modulation
Device 83；The light beam of compensatory light 81 outgoing, after overcompensation collimating mirror 82 is collimated into collimated light beam, then by transmission liquid crystal space
Photomodulator 83 is modulated, and incides on Wavefront detecting spectroscope 71.
For above autocollimation embodiment, following 2 needs are also had to illustrate:
The first, the first driver 411 and the second driver 412 in described angular adjustment apparatus, both can select to drive
The motor of speed or motor servo driver, can select again the piezoelectric ceramic actuator driving precision higher, also
Motor or motor servo driver can be used in mixed way with piezoelectric ceramic actuator；Those skilled in the art can basis
It is actually needed and rationally selects.
The second, in all above autocollimation embodiment, angular deflection measurement apparatus all only includes two pairs of sheet metals
With the combination of capacitance sensor, this design acquiescence reflecting mirror 3 does not the most produce translation and makes；If examined
Consider and produce translation at work to reflecting mirror 3 and affect certainty of measurement, the 3rd pair of metal can be placed in universal drive shaft 43 position
Sheet and the combination of capacitance sensor, to offset the identical translation that three capacitance sensors produce, it is ensured that certainty of measurement.
Specific embodiment five
The present embodiment is on the big working distance autocollimation of portable array zeroing high accuracy described in specific embodiment one
The portable array big working distance auto-collimation embodiment of the method for zeroing high accuracy realized.
The portable array big working distance auto-collimation method of zeroing high accuracy of the present embodiment, comprises the following steps:
Step a, some bright light source 1, feed back imaging system 6 imaging, if:
The first, the some image position obtained is in single pixel light electric transducer 67 region, according to single pixel light electric transducer 67
Coordinate, obtains a picture deviation image plane center direction, utilizes the first driver 411 and the second driver 412 to adjust reflecting mirror 3 jiaos
Degree, makes a picture return to 4 quadrant detector 66 region, enters step b；
The second, the some image position obtained, in 4 quadrant detector 66 region, is directly entered step b；
Step b, 4 quadrant detector 66 imaging, obtain some picture after step a terminates and deviate in 4 quadrant detector 66 image planes
Heart position Δ x and Δ y, utilizes the first driver 411 and the second driver 412 to adjust reflecting mirror 3 angle, makes a picture return to four-quadrant
Limit detector 66 image plane center position；
Step c, read the capacitance change, Δ C1 of the first capacitance sensor 423, and the electric capacity of the second capacitance sensor 424
Changes delta C2, be reconverted into reflecting mirror 3 angle changes delta θ andAnd then obtain measured object 5 surface angle changes delta α and
Δβ；Wherein, Δ θ=f1 (Δ C1, Δ C2),Withf1、f2、
F3, f4 represent 4 functions.
The main innovative point of the present invention is the angle adjustment measurement dress adding reflecting mirror 3 and being arranged on reflecting mirror 3
Putting 4, this structure can have bigger drift angle or there are the feelings of relatively larger transverse displacement between measured object 5 incident illumination and reflection light
Under condition, adjust 4 whole reflecting mirror attitudes by angle adjustment measurement apparatus, make reflection light backtracking and connect by feedback imaging system 6
Receive, be prevented effectively from measured object reflection light deviation measurement system and the problem that causes measuring.
But, the introducing of reflecting mirror 3, its face type error can be delivered in final result, reduces the certainty of measurement of system；With
Time, the increase of operating distance makes again the air agitation between reflecting mirror 3 and measured object 5 can not ignore, and also can reduce system
Certainty of measurement.Visible, want to realize high-acruracy survey, be necessary in view of 3 type errors of reflecting mirror and reflecting mirror 3 with tested
The air agitation impact on measurement result between thing 5, to this end, devise specific embodiment six, specific embodiment seven and concrete
Embodiment eight.
Specific embodiment six
The present embodiment is on the big working distance autocollimation of portable array zeroing high accuracy described in specific embodiment two
The portable array big working distance auto-collimation embodiment of the method for zeroing high accuracy realized.
The portable array big working distance auto-collimation method of zeroing high accuracy of the present embodiment, comprises the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source 1, be individually positioned in operating position A and nearly operating position by the reference substance selected by step a
B, air agitation wave front detector 72 respectively obtains two groups of data of GA and GB；
Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；
Step d, according to f5 (G1) adjust transmission liquid crystal spatial light modulator 83 parameter, light compensatory light 81, compensate
Air agitation；
Step e, some bright light source 1, feed back imaging system 6 imaging, if:
The first, the some image position obtained is in single pixel light electric transducer 67 region, according to single pixel light electric transducer 67
Coordinate, obtains a picture deviation image plane center direction, utilizes the first driver 411 and the second driver 412 to adjust reflecting mirror 3 jiaos
Degree, makes a picture return to 4 quadrant detector 66 region, enters step f；
The second, the some image position obtained, in 4 quadrant detector 66 region, is directly entered step f；
Step f, 4 quadrant detector 66 imaging, obtain some picture after step a terminates and deviate in 4 quadrant detector 66 image planes
Heart position Δ x and Δ y, utilizes the first driver 411 and the second driver 412 to adjust reflecting mirror 3 angle, makes a picture return to four-quadrant
Limit detector 66 image plane center position；
Step g, read the capacitance change, Δ C1 of the first capacitance sensor 423, and the electric capacity of the second capacitance sensor 424
Changes delta C2, be reconverted into reflecting mirror 3 angle changes delta θ andAnd then obtain measured object 5 surface angle changes delta α and
Δβ；Wherein, Δ θ=f1 (Δ C1, Δ C2),Withf1、f2、
F3, f4 represent 4 functions.
The method implementing the present embodiment on the device of specific embodiment two, it is possible to utilize air agitation wave front detector 72
Air agitation is separated, and then utilizes wavefront compensation system 8 that air agitation is compensated, finally realize without air agitation
The high-acruracy survey of impact.
Specific embodiment seven
The present embodiment is on the big working distance autocollimation of portable array zeroing high accuracy described in specific embodiment three
The portable array big working distance auto-collimation embodiment of the method for zeroing high accuracy realized.
The portable array big working distance auto-collimation method of zeroing high accuracy of the present embodiment, comprises the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source 1, be individually positioned in operating position A and nearly operating position by the reference substance selected by step a
B, reflecting mirror deformation wave front detector 73 respectively obtains two groups of data of GC and GD；
Step c, G2=GC-GD, obtain air agitation and wavefront variation that reflecting mirror deformation causes jointly；
Step d, according to f5 (G2) adjust transmission liquid crystal spatial light modulator 83 parameter, light compensatory light 81, compensate
Air agitation and reflecting mirror deformation；
Step e, feedback imaging system 6 imaging, if:
The first, the some image position obtained is in single pixel light electric transducer 67 region, according to single pixel light electric transducer 67
Coordinate, obtains a picture deviation image plane center direction, utilizes the first driver 411 and the second driver 412 to adjust reflecting mirror 3 jiaos
Degree, makes a picture return to 4 quadrant detector 66 region, enters step f；
The second, the some image position obtained, in 4 quadrant detector 66 region, is directly entered step f；
Step f, 4 quadrant detector 66 imaging, obtain some picture after step a terminates and deviate in 4 quadrant detector 66 image planes
Heart position Δ x and Δ y, utilizes the first driver 411 and the second driver 412 to adjust reflecting mirror 3 angle, makes a picture return to four-quadrant
Limit detector 66 image plane center position；
Step g, read the capacitance change, Δ C1 of the first capacitance sensor 423, and the electric capacity of the second capacitance sensor 424
Changes delta C2, be reconverted into reflecting mirror 3 angle changes delta θ andAnd then obtain measured object 5 surface angle changes delta α and
Δβ；Wherein, Δ θ=f1 (Δ C1, Δ C2),Withf1、f2、
F3, f4 represent 4 functions.
The method implementing the present embodiment on the device of specific embodiment three, it is possible to utilize reflecting mirror deformation wave front detector
Air agitation and reflecting mirror deformation are carried out overall separation by 73, and then utilize wavefront compensation system 8 to air agitation and reflecting mirror
Deformation carries out entire compensation, finally realizes without air agitation and the high-acruracy survey of reflecting mirror influence of crust deformation.
Specific embodiment eight
The present embodiment is on the big working distance autocollimation of portable array zeroing high accuracy described in specific embodiment four
The portable array big working distance auto-collimation embodiment of the method for zeroing high accuracy realized.
The portable array big working distance auto-collimation method of zeroing high accuracy of the present embodiment, comprises the following steps:
Step a, choose surface and be perpendicular to the reference substance of optical axis direction；
Step b, some bright light source 1, be individually positioned in operating position A and nearly operating position by the reference substance selected by step a
B, air agitation wave front detector 72 respectively obtains two groups of data of GA and GB, and reflecting mirror deformation wave front detector 73 respectively obtains GC
With two groups of data of GD；
Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；G2=GC-GD, obtains air agitation with anti-
Penetrate the wavefront variation that mirror deformation causes jointly；G=G2-G1, obtains the wavefront variation that reflecting mirror deformation causes；
Step d,
Adjusting transmission liquid crystal spatial light modulator 83 parameter according to f5 (G1), light compensatory light 81, make-up air is disturbed
Dynamic；
Or
Adjusting transmission liquid crystal spatial light modulator 83 parameter according to f5 (G2), light compensatory light 81, make-up air is disturbed
Move and reflecting mirror deformation；
Or
Adjust transmission liquid crystal spatial light modulator 83 parameter according to f5 (G), light compensatory light 81, compensatory reflex mirror shape
Become；
Step e, feedback imaging system 6 imaging, if:
The first, the some image position obtained is in single pixel light electric transducer 67 region, according to single pixel light electric transducer 67
Coordinate, obtains a picture deviation image plane center direction, utilizes the first driver 411 and the second driver 412 to adjust reflecting mirror 3 jiaos
Degree, makes a picture return to 4 quadrant detector 66 region, enters step f；
The second, the some image position obtained, in 4 quadrant detector 66 region, is directly entered step f；
Step f, 4 quadrant detector 66 imaging, obtain some picture after step a terminates and deviate in 4 quadrant detector 66 image planes
Heart position Δ x and Δ y, utilizes the first driver 411 and the second driver 412 to adjust reflecting mirror 3 angle, makes a picture return to four-quadrant
Limit detector 66 image plane center position；
Step g, read the capacitance change, Δ C1 of the first capacitance sensor 423, and the electric capacity of the second capacitance sensor 424
Changes delta C2, be reconverted into reflecting mirror 3 angle changes delta θ andAnd then obtain measured object 5 surface angle changes delta α and
Δβ；Wherein, Δ θ=f1 (Δ C1, Δ C2),Withf1、f2、
F3, f4 represent 4 functions.
The method implementing the present embodiment on the device of specific embodiment four, it is possible to utilize air agitation wave front detector 72
With reflecting mirror deformation wave front detector 73, air agitation and reflecting mirror deformation are separately separated, and then optionally to air
Disturbance carries out separate compensation, reflecting mirror deformation carries out separate compensation or air agitation and reflecting mirror deformation carry out overall benefit
Repay, final realize without air agitation or no-mirror deformation or the high accuracy survey without air agitation and reflecting mirror influence of crust deformation
Amount.
The present embodiment has an advantage that, that is, after air agitation and reflecting mirror deformation being separately separated, can be to each
The size that affects of result is individually assessed by part, can not only find out in air agitation and reflecting mirror deformation, and who is impact
The principal contradiction of certainty of measurement, and mirror deformation individually can be assessed, reflecting mirror crudy is carried out simultaneously
Effective evaluation.
Claims (6)
- The big working distance autocollimation of the most portable array zeroing high accuracy, it is characterised in that include light source (1), reflective standard Straight mirror (22), reflecting mirror (3) and feedback imaging system (6), described reflecting mirror is provided with angle adjustment measurement apparatus on (3) (4)；The light beam of light source (1) outgoing, after reflective collimating mirror (22) is collimated into collimated light beam, then is reflected by reflecting mirror (3), Incide the surface of measured object (5)；From the light beam of measured object (5) surface reflection, then after reflecting mirror (3) reflects, by feeding back Imaging system (6) gathers imaging；Described feedback imaging system (6) is in following two form:The first, it is arranged between light source (1) and reflective collimating mirror (22), including the first feedback spectroscope (61) and setting 4 quadrant detector (66) and multiple single pixel light electric transducer (67), described single pixel at reflective collimating mirror (22) focal plane Optical-electrical converter (67) becomes array distribution, and 4 quadrant detector (66) had not only been positioned at array center, but also has been positioned at feedback imaging system (6) On optical axis；From the light beam of measured object (5) surface reflection, then after reflecting mirror (3) reflects, successively through reflective collimating mirror (22) transmission, the first feedback spectroscope (61) are reflected, are gathered by 4 quadrant detector (66) or single pixel light electric transducer (67) Imaging；The second, it is arranged between reflective collimating mirror (22) and reflecting mirror (3), including the first feedback spectroscope (61), first anti- Present object lens (63) and be arranged on the 4 quadrant detector (66) of reflective collimating mirror (22) focal plane and multiple single pixel opto-electronic conversion Device (67), described single pixel light electric transducer (67) becomes array distribution, and 4 quadrant detector (66) had not only been positioned at array center, but also position On feedback imaging system (6) optical axis；From the light beam of measured object (5) surface reflection, then after reflecting mirror (3) reflects, successively Through the first feedback spectroscope (61) reflection, the first feedback object lens (63) transmission, by 4 quadrant detector (66) or single pixel light Electric transducer (67) gathers imaging；Described angle adjustment measurement apparatus (4) includes that dress is measured in the angular adjustment apparatus being arranged on reflecting mirror (3), angular deflection Putting and universal drive shaft (43), angular adjustment apparatus includes the first driver (411) and the second driver (412)；Angular deflection is surveyed Amount device includes that the first sheet metal (421), the second sheet metal (422), the first electric capacity of corresponding first sheet metal (421) position pass Second capacitance sensor (424) of sensor (423) and corresponding second sheet metal (422) position；First driver (411), One sheet metal (421) and universal drive shaft (43) point-blank, the second driver (412), the second sheet metal (422) and Universal drive shaft (43) point-blank, and the first driver (411) second driver vertical with the line of universal drive shaft (43) (412) with the line of universal drive shaft (43).
- The big working distance autocollimation of portable array the most according to claim 1 zeroing high accuracy, it is characterised in that also Including Wavefront detecting system (7) and wavefront compensation system (8)；Described Wavefront detecting system (7) includes Wavefront detecting spectroscope (71) and air agitation wave front detector (72) and anti- Penetrate at least one in mirror deformation wave front detector (73)；Described Wavefront detecting spectroscope (71) is arranged on reflecting mirror (3) and quilt Surveying between thing (5), air agitation wave front detector (72) is arranged on the reflected light path of Wavefront detecting spectroscope (71), reflecting mirror Deformation wave front detector (73) is arranged in the secondary reflection light path of reflecting mirror (3)；Described wavefront compensation system (8) includes compensatory light (81), compensates collimating mirror (82) and transmission liquid crystal spatial light tune Device processed (83)；The light beam of compensatory light (81) outgoing, after overcompensation collimating mirror (82) is collimated into collimated light beam, then by transmission-type LCD space light modulator (83) is modulated, and incides on Wavefront detecting spectroscope (71).
- 3. realize on the big working distance autocollimation of portable array zeroing high accuracy described in claim 1 is portable The big working distance auto-collimation method of formula portable array zeroing high accuracy, it is characterised in that comprise the following steps:Step a, some bright light source (1), feed back imaging system (6) imaging, if:The first, the some image position obtained is in single pixel light electric transducer (67) region, according to single pixel light electric transducer (67) Coordinate, obtains a picture deviation image plane center direction, utilizes the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, makes a picture return to 4 quadrant detector (66) region, enters step b；The second, the some image position obtained, in 4 quadrant detector (66) region, is directly entered step b；Step b, 4 quadrant detector (66) imaging, obtain some picture after step a terminates and deviate in 4 quadrant detector (66) image planes Heart position Δ x and Δ y, utilizes the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, makes a picture return To 4 quadrant detector (66) image plane center position；Step c, read the capacitance change, Δ C1 of the first capacitance sensor (423), and the electric capacity of the second capacitance sensor (424) Changes delta C2, be reconverted into reflecting mirror (3) angle changes delta θ andAnd then obtain the angle changes delta on measured object (5) surface α and Δ β；Wherein, Δ θ=f1 (Δ C1, Δ C2),Withf1、 F2, f3, f4 represent 4 functions.
- 4. realize on the big working distance autocollimation of portable array zeroing high accuracy described in claim 2 is portable The big working distance auto-collimation method of formula portable array zeroing high accuracy, it is desirable to Wavefront detecting system (7) only includes that Wavefront detecting divides Light microscopic (71) and air agitation wave front detector (72)；It is characterized in that, comprise the following steps:Step a, choose surface and be perpendicular to the reference substance of optical axis direction；Step b, some bright light source (1), be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a, Air agitation wave front detector (72) respectively obtains two groups of data of GA and GB；Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；Step d, according to f5 (G1) adjust transmission liquid crystal spatial light modulator (83) parameter, light compensatory light (81), compensate Air agitation；Step e, some bright light source (1), feed back imaging system (6) imaging, if:The first, the some image position obtained is in single pixel light electric transducer (67) region, according to single pixel light electric transducer (67) Coordinate, obtains a picture deviation image plane center direction, utilizes the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, makes a picture return to 4 quadrant detector (66) region, enters step f；The second, the some image position obtained, in 4 quadrant detector (66) region, is directly entered step f；Step f, 4 quadrant detector (66) imaging, obtain some picture after step a terminates and deviate in 4 quadrant detector (66) image planes Heart position Δ x and Δ y, utilizes the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, makes a picture return To 4 quadrant detector (66) image plane center position；Step g, read the capacitance change, Δ C1 of the first capacitance sensor (423), and the electric capacity of the second capacitance sensor (424) Changes delta C2, be reconverted into reflecting mirror (3) angle changes delta θ andAnd then obtain the angle changes delta on measured object (5) surface α and Δ β；Wherein, Δ θ=f1 (Δ C1, Δ C2),Withf1、 F2, f3, f4 represent 4 functions.
- 5. realize on the big working distance autocollimation of portable array zeroing high accuracy described in claim 2 is portable The big working distance auto-collimation method of formula portable array zeroing high accuracy, it is desirable to Wavefront detecting system (7) only includes that Wavefront detecting divides Light microscopic (71) and reflecting mirror deformation wave front detector (73)；It is characterized in that, comprise the following steps:Step a, choose surface and be perpendicular to the reference substance of optical axis direction；Step b, some bright light source (1), be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a, Reflecting mirror deformation wave front detector (73) respectively obtains two groups of data of GC and GD；Step c, G2=GC-GD, obtain air agitation and wavefront variation that reflecting mirror deformation causes jointly；Step d, according to f5 (G2) adjust transmission liquid crystal spatial light modulator (83) parameter, light compensatory light (81), compensate Air agitation and reflecting mirror deformation；Step e, feedback imaging system (6) imaging, if:The first, the some image position obtained is in single pixel light electric transducer (67) region, according to single pixel light electric transducer (67) Coordinate, obtains a picture deviation image plane center direction, utilizes the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, makes a picture return to 4 quadrant detector (66) region, enters step f；The second, the some image position obtained, in 4 quadrant detector (66) region, is directly entered step f；Step f, 4 quadrant detector (66) imaging, obtain some picture after step a terminates and deviate in 4 quadrant detector (66) image planes Heart position Δ x and Δ y, utilizes the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, makes a picture return To 4 quadrant detector (66) image plane center position；Step g, read the capacitance change, Δ C1 of the first capacitance sensor (423), and the electric capacity of the second capacitance sensor (424) Changes delta C2, be reconverted into reflecting mirror (3) angle changes delta θ andAnd then obtain the angle changes delta on measured object (5) surface α and Δ β；Wherein, Δ θ=f1 (Δ C1, Δ C2),Withf1、 F2, f3, f4 represent 4 functions.
- 6. realize on the big working distance autocollimation of portable array zeroing high accuracy described in claim 2 is portable The big working distance auto-collimation method of formula portable array zeroing high accuracy, it is desirable to Wavefront detecting system (7) includes Wavefront detecting simultaneously Spectroscope (71), air agitation wave front detector (72) and reflecting mirror deformation wave front detector (73)；It is characterized in that, comprise the following steps:Step a, choose surface and be perpendicular to the reference substance of optical axis direction；Step b, some bright light source (1), be individually positioned in operating position A and nearly operating position B by the reference substance selected by step a, Air agitation wave front detector (72) respectively obtains two groups of data of GA and GB, and reflecting mirror deformation wave front detector (73) respectively obtains Two groups of data of GC and GD；Step c, G1=GA-GB, obtain the wavefront variation that air agitation causes；G2=GC-GD, obtains air agitation and reflecting mirror The wavefront variation that deformation causes jointly；G=G2-G1, obtains the wavefront variation that reflecting mirror deformation causes；Step d,Adjusting transmission liquid crystal spatial light modulator (83) parameter according to f5 (G1), light compensatory light (81), make-up air is disturbed Dynamic；OrAdjusting transmission liquid crystal spatial light modulator (83) parameter according to f5 (G2), light compensatory light (81), make-up air is disturbed Move and reflecting mirror deformation；OrAdjust transmission liquid crystal spatial light modulator (83) parameter according to f5 (G), light compensatory light (81), compensatory reflex mirror shape Become；Step e, feedback imaging system (6) imaging, if:The first, the some image position obtained is in single pixel light electric transducer (67) region, according to single pixel light electric transducer (67) Coordinate, obtains a picture deviation image plane center direction, utilizes the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, makes a picture return to 4 quadrant detector (66) region, enters step f；The second, the some image position obtained, in 4 quadrant detector (66) region, is directly entered step f；Step f, 4 quadrant detector (66) imaging, obtain some picture after step a terminates and deviate in 4 quadrant detector (66) image planes Heart position Δ x and Δ y, utilizes the first driver (411) and the second driver (412) to adjust reflecting mirror (3) angle, makes a picture return To 4 quadrant detector (66) image plane center position；Step g, read the capacitance change, Δ C1 of the first capacitance sensor (423), and the electric capacity of the second capacitance sensor (424) Changes delta C2, be reconverted into reflecting mirror (3) angle changes delta θ andAnd then obtain the angle changes delta on measured object (5) surface α and Δ β；Wherein, Δ θ=f1 (Δ C1, Δ C2),Withf1、 F2, f3, f4 represent 4 functions.
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