CN109579781A - A kind of big working distance auto-collimation three-dimensional measurement of absolute angle apparatus and method of high-precision - Google Patents
A kind of big working distance auto-collimation three-dimensional measurement of absolute angle apparatus and method of high-precision Download PDFInfo
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- CN109579781A CN109579781A CN201910025690.9A CN201910025690A CN109579781A CN 109579781 A CN109579781 A CN 109579781A CN 201910025690 A CN201910025690 A CN 201910025690A CN 109579781 A CN109579781 A CN 109579781A
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Abstract
The invention belongs to Technology of Precision Measurement fields and optical engineering field, and in particular to a kind of big working distance auto-collimation three-dimensional measurement of absolute angle apparatus and method of high-precision；The device is made of light source, spectroscope, imaging sensor, collimating mirror, reference fluid liquid level and cooperation target；This method passes through cooperation target, measuring beam is set to be divided into two bundles orthogonal measurement light, it is returned after fixed pan reflecting mirror and cooperation target reflection respectively, form respective image on the image sensor respectively, cooperation target is calculated relative to the pitch angle of optical axis, yaw angle and roll angle, to have the detectivity to measured object space three-dimensional corner using two picture position；Due to the present invention for roll angle using optical lever amplification principle, it is consistent with the measuring principle of pitch angle and yaw angle, therefore the technical advantage of the big working distance of high-precision is all had for three-dimensional perspective measurement, and then has and increase measurement accuracy under identical operating distance, or increase the advantage of operating distance under identical measurement accuracy；Using reference fluid liquid level as the zero degree benchmark of object space three-dimensional measurement of absolute angle, therefore the ability with space three-dimensional measurement of absolute angle.In addition, cooperation target designed by the present invention has, structure is simple, technical advantage of low manufacture cost.
Description
Technical field
The invention belongs to Technology of Precision Measurement fields, and in particular to a kind of big working distance auto-collimation three-dimensional absolute angle of high-precision
Spend measuring device and method.
Background technique
It manufactures and leads in Technology of Precision Measurement field, optical engineering field, most advanced branches of science experimental field and high-end precision assembly
In domain, urgent need carries out wide working range, high-precision auto-collimation three-dimensional measurement of absolute angle technology under big working distance.It
Support the development of above-mentioned field technology and instrument and equipment.
In Technology of Precision Measurement and instrument field, autocollimator is combined with Circular gratings, can carry out any line angle measurement；
Auto-collimation technology is combined with polygon, can carry out face angle measurement and circular division measurement；Maximum functional distance from several meters to
Rice up to a hundred；Resolving power is from 0.1 rad to 0.001 rad.
In optical engineering field and most advanced branches of science experimental field, the autocollimator two Circular gratings groups vertical each other with bidimensional
It closes, the measurement of space angle can be carried out；Position reference is formed by two-way autocollimator, the survey of space three-dimensional angle can be carried out
Amount.Angle working range is from tens rads to tens jiaos points.
In most advanced branches of science experimental provision and high-end precision assembly manufacturing field, the most advanced branches of science can be measured using autocollimator
The angle rotating accuracy of experimental provision and high-end precision assembly rotary motion benchmark, the space line precision of measurement linear motion benchmark
The depth of parallelism and verticality of benchmark are moved two-by-two.
Auto-collimation technology has many advantages, such as that non-contact, measurement accuracy is high, easy to use, has in above-mentioned field and answers extensively
With.
Traditional autocollimator is as shown in Figure 1, the device includes that light source 1, transmission-type collimating mirror 4, spectroscope 2 and image pass
Sensor 3；The light beam that light source 1 is emitted is incident on the reflection of measured object 51 after transmission-type collimating mirror 4 is collimated into collimated light beam
Face；From the light beam of 51 reflective surface of measured object, is acquired and be imaged by imaging sensor 3.Under this structure, from 51 surface of measured object
The light beam of reflection only carries the space angle information of two axis of measured object.This condition limitation, so that the device is tested in measurement
When the space angle information of object, the angle information that measured object is rotated around optical axis direction cannot be measured, other two axis can only be measured
Angle information.
And the modified autocollimator based on grating technology and image processing techniques can measure measured object space three-dimensional angle
Information is spent, but there are problems that following two:
The first, for the measuring principle of the roll angle around optical axis direction and traditional autocollimator to the pitching perpendicular to optical axis
Angle and yaw angle measuring principle are inconsistent, cause the measurement accuracy to measured object space three-dimensional angle different, and based at image
Reason technology around optical axis direction rolling angle measurement precision compared with perpendicular to the pitch angle of optical axis and yaw angle a low quantity
Grade；
The second, modified autocollimator need to be measured using grating diffration light around optical axis direction rotation angle angle information,
And there are the biggish angles of divergence for diffraction light.When instrument work is under conditions of big working distance, measurement light cannot be by image sensing
Device acquisition.So that modified autocollimator, which under the operating condition of big working distance, does not have, carries out space three-dimensional angle to measured object
Spend the ability of measurement.
Therefore traditional autocollimator is not capable of measuring the space three-dimensional angle information of object.And two above problem, explanation change
Have the ability of the space three-dimensional angle information of measurement object, but the measurement accuracy of around direction roll angle into type autocollimator device
It is lower；And do not have three-dimensional perspective measurement capability under the conditions of big working distance.
Meanwhile traditional autocollimator and modified autocollimator do not have zero point of the absolute standard as angle measurement,
Therefore traditional autocollimator and modified autocollimator do not have the ability of measurement of absolute angle.
Summary of the invention
For be not capable of measuring present in traditional auto-collimation angle measurement unit measured object around optical axis direction rotation angle with
And the problem of not being capable of measuring absolute angle, the invention discloses a kind of big working distance auto-collimation three-dimensional measurement of absolute angle of high-precision
Apparatus and method have under conditions of identical measurement accuracy and operating distance simultaneously compared with traditional self-collimation measurement device
It measures in tested object space around the technical advantage of the three-dimensional absolute angle of three axis rotation angles；And compared to other auto-collimation three dimensional angulars
Measuring device is spent, under conditions of all having while measuring in tested object space around the three-dimensional perspective of three axis rotation angles, around light
There is high-precision, the technical advantage of big working distance in the rolling angle measurement of axis direction, and have and measure in tested object space around three
The ability of the three-dimensional absolute angle of axis rotation angle.
The object of the present invention is achieved like this:
A kind of big working distance auto-collimation three-dimensional measurement of absolute angle device of high-precision, including light source, spectroscope, image sensing
Device, transmission-type collimating mirror, reference fluid liquid level and cooperation target；The light beam of light source outgoing, collimates by transmission-type collimating mirror
After collimated light beam.All the way through the spectroscope in cooperation target, it is incident on the plane mirror in cooperation target, reflection
After light beam is using the spectroscope transmission in cooperation target, is acquired and be imaged by imaging sensor；Another way is by cooperation target
Spectroscope reflection, is incident on reference fluid liquid level, after the light beam of reflection is using the spectroscope reflection in cooperation target, by scheming
As sensor acquisition imaging；
The cooperation target includes spectroscope and plane mirror, is installed to the measurement surface of measured object；And benchmark
Liquid levels are not connected with cooperation target and measured object independently of cooperation target, are fixed on big ground, reference fluid liquid level
It is parallel with the plane of the earth.When space three-dimensional angular turn occurs for measured object, cooperation target generates identical sky with measured object
Between three-dimensional perspective rotate, and the other parts of reference fluid liquid level and measuring device do not generate movement.
A kind of big work of high-precision realized on the big working distance auto-collimation three-dimensional measurement of absolute angle device of above-mentioned high-precision
Make away from auto-collimation three-dimensional measurement of absolute angle method, comprising the following steps:
Step a, reference fluid is poured into the container for being fixed on big ground, forms reference fluid liquid level.Combination target is consolidated
It is scheduled on measured object surface, is in reference fluid ullage；
Step b, bright light source is put, measured object is adjusted and combines the position of target, makes received two light of imaging sensor
Spot is in the center of imaging sensor, makes to combine target lower surface and is parallel to reference fluid liquid level, fixed measured object with
And combination target, three axis rotation angles are benchmark zero degree at this time for definition；
Step c, combination target generates space three-dimensional rotation with measured object, and imaging sensor exports the displacement of two hot spots
Value, wherein first hot spot range image sensor center is decomposed into S1, S2, another hot spot range image sensor
Center is S3；
Step d, using displacement S1, S2 of first hot spot, according to S1=ftan (2 β), S2=ftan (2 γ) meter
Calculation acquires β, γ, and wherein β, γ are the absolute angle that measured object is rotated clockwise around y, z-axis；
Step e, using the displacement S3 of another hot spot, θ is acquired according to S3=ftan (θ) calculating, wherein θ is through being divided
Mirror reflects the angle of light beam light echo and optical axis all the way；
Step f, ɑ is acquired according to ɑ=G (θ, beta, gamma) calculating, wherein ɑ is the absolute angle that measured object is rotated clockwise around x-axis
Degree, G indicate a function.Finally obtain absolute angle ɑ, β, γ that measured object is rotated clockwise around x, y, z axis.
The utility model has the advantages that
Compared with traditional Littrow angle degree measuring device, the present invention by plane mirror target therein replace with cooperation target with
Reference fluid liquid level is as object space three-dimensional corner probe unit, and using reference fluid liquid level as object space three-dimensional absolute angle
Spend the zero degree benchmark of measurement.This structure setting, measuring beam is divided into two, all the way by the plane reflection in cooperation target
The absolute angle information of measured object pitch angle, yaw angle is carried after mirror reflection, another way is after the reflection of reference fluid liquid level
Carry the absolute roll angle angle information that measured object is rotated around optical axis direction.This two-way measurement light is acquired by sensor, therefore
The information of object pitch angle, yaw angle absolute rotation angle has not only been obtained, but also the absolute angle of object roll angle is also obtained
Information makes apparatus have the three-dimensional absolute angle of the pitch angle of measurement object roll angle and vertical optical axis, yaw angle angle
Spend measurement capability；The principle one of the measuring principle of roll angle absolute rotation angle and traditional autocollimator measurement pitch angle, yaw angle
It causes, using the enlarge-effect of optical lever, so that measurement accuracy of the present invention is higher than the device using grating and image processing techniques；This
Invention device will not generate optical grating diffraction effect bring diffraction light, measure light echo and elementary beam angular deviation is small, identical
Under measurement range, apparatus of the present invention have biggish operating distance.Therefore, compared with traditional Littrow angle degree measuring device, this
Inventing has the technology for increasing angle measurement dimension under identical operating distance, identical measurement accuracy, realizing measurement of absolute angle
Advantage；With based on grating technology, compared with the modified autocollimator of image processing techniques, the present invention has in equal angular survey
Measure big operating distance, the high-precision, the technical advantage for realizing measurement of absolute angle under dimension.
In addition to this, the present invention also has following several technical advantages:
The first, spectroscope and plane mirror composition combination target are selected, volume weight is small, installs to measured object surface not
It will affect measured object space three-dimensional angular movement；And by reference fluid liquid level as reflecting surface, compared to other auto-collimations three-dimensional
Special target in angle measurement unit, structure is simple, easy to manufacture.
The second, select reference fluid liquid level as third dimension angle sensing equipment, structure it is simple and in addition around perpendicular to
The sensing principle of two axis of optical axis is almost the same, so that of the invention around optical axis direction and perpendicular to other two axis sides of two axis of optical axis
To rotation angle all keep the high measurement accuracy of same order；
Spectroscope generates space three-dimensional angle as a part and measured object of combination target jointly in third, the present invention
Rotation, so that absolute rotation angle (yaw angle) measurement accuracy around the wherein axis perpendicular to optical axis doubles.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of traditional auto-collimation angle measurement unit.
Fig. 2 is the structure of the big working distance auto-collimation three-dimensional measurement of absolute angle device specific embodiment one of high-precision of the invention
Schematic diagram.
Fig. 3 is the structure of the big working distance auto-collimation three-dimensional measurement of absolute angle device specific embodiment two of high-precision of the invention
Schematic diagram.
Fig. 4 is the structure of the big working distance auto-collimation three-dimensional measurement of absolute angle device specific embodiment three of high-precision of the invention
Schematic diagram.
Fig. 5 is the structure of the big working distance auto-collimation three-dimensional measurement of absolute angle device specific embodiment four of high-precision of the invention
Schematic diagram.
In figure: 1 light source, 2 spectroscopes, 3 imaging sensors, 4 transmission-type collimating mirrors, 5 cooperation targets, 51 plane mirrors,
52 spectroscopes, 53 polarization spectroscopes, 54 dichroscopes, 6 reference fluid liquid levels, 7RGB color image sensor, 8 polarization spectros
Mirror, 9 imaging sensors, 10 polarizers, 11 red light sources, 12 green light sources, 13 dichroscopes, 14 spectroscopes.
Specific embodiment
The specific embodiment of the invention is described in further detail with reference to the accompanying drawing.
Specific embodiment one
The present embodiment is the big working distance auto-collimation three-dimensional measurement of absolute angle Installation practice of high-precision.
The big working distance auto-collimation three-dimensional measurement of absolute angle device of the high-precision of the present embodiment, structural schematic diagram such as Fig. 2 institute
Show.The angle measurement unit include light source 1, spectroscope 2, imaging sensor 3, transmission-type collimating mirror 4, cooperation target 5 (wherein wrap
Include spectroscope 52, plane mirror 51) and reference fluid liquid level 6.
The light beam that light source 1 is emitted is incident in cooperation target 5 after transmission-type collimating mirror 4 is collimated into collimated light beam
On spectroscope 52；Through the light beam all the way of spectroscope 52, after the plane mirror 51 in cooperation target 5 reflects, Yan Yuanlu is returned
It returns, and is acquired and be imaged by imaging sensor 3；And another way light beam is incident in reference fluid liquid level 6 after the reflection of spectroscope 52
On surface, then after the reflection of reference fluid liquid level 6, along backtracking, and is acquired and be imaged by imaging sensor 3.
The spectroscope 2 is arranged between light source 1 and transmission-type collimating mirror 4, and the setting of imaging sensor 3 is collimated in transmission-type
4 focal plane of mirror, the position conjugate with light source 1；The two-way light beam returned from cooperation target 5, successively passes through transmission-type collimating mirror 4
Transmission, the reflection of spectroscope 2 acquire imaging by imaging sensor 3；
The cooperation target 5 includes spectroscope 52 and plane mirror 51, is installed to the measurement surface of measured object；And
Reference fluid liquid level 6 is not connected with cooperation target 5 and measured object independently of cooperation target, is fixed on big ground, benchmark liquid
Body fluid face 6 is parallel with the plane of the earth.When space three-dimensional angular turn occurs for measured object, cooperation target 5 is generated with measured object
Identical space three-dimensional angular turn, and the other parts of reference fluid liquid level 6 and measuring device do not generate movement.With benchmark liquid
Body fluid face 6 is the zero degree benchmark of object space three-dimensional measurement of absolute angle, is become when measured object does not generate the rotation of space three-dimensional angle
When change, the space three-dimensional absolute angle of measured object is zero degree, and the institute of imaging sensor 3 at picture in image plane center position.
Measuring principle is as follows:
If measuring the absolute corner of space three-dimensional of measured object, the space coordinates for defining measured object three-dimensional corner are needed first:
If optical axis direction is x-axis, be y-axis, vertical cooperation 5 surface outwardly direction of target to the normal direction of reference fluid liquid level 6 is z
Axis；And the space three-dimensional corner for defining measured object is respectively around x-axis, y-axis, z-axis right handed ɑ, β, γ.The conjunction
Make target 5, including spectroscope 52 and plane mirror 51, be fixed on the surface of measured object, therefore cooperates the space three of target 5
Dimension angle change is the space three-dimensional angle change of measured object.
Secondly, reference fluid liquid level 6 is not connect then with cooperation target 5, it is fixed on big ground.If with reference fluid liquid level
6 be the zero degree benchmark of object space three-dimensional measurement of absolute angle, when measured object does not generate the rotation of space three-dimensional angle, measured object
Space three-dimensional absolute angle ɑ, β, γ be 0 degree.
When measured object rotates the angle ɑ, β, γ respectively clockwise around x-axis, y-axis, the benchmark zero-bit of z-axis to generate space
When three-dimensional perspective rotates, the light beam being incident in cooperation target on plane mirror 51 is transmitted by spectroscope 52, due to plane
Mirror 51 generates space three-dimensional angular turn with measured object, and the light beam reflected through plane mirror 51 and benchmark zero-bit generate 2 β, 2 γ
The deflection at angle.With traditional autocollimator measurement principle it is consistent, this road light beam converges on imaging sensor 3, beam and focus with
Image sensor center position generates displacement S1 and S2 respectively.
And meeting following relationship, S1=ftan (2 β), S2=ftan (2 γ), f are the focal length of transmission-type collimating mirror 4.
Therefore it can be calculated according to the displacement S1 and S2 of hot spot on imaging sensor 3 and image sensor center position
Measured object 7 is around absolute angle β, the γ angle that y-axis, z-axis rotate.
The light beam for being incident in reference fluid liquid level 6 is reflected by spectroscope 52, since spectroscope 52 generates sky with measured object
Between the three-dimensional perspective light beam that rotates, therefore reflected through reference fluid liquid level 6, then generate θ angle with optical axis through the reflection of spectroscope 52
Deflection, this road light beam converge on imaging sensor 3, and beam and focus and image sensor center position generate displacement S3.
And meeting following relationship, S3=ftan (θ), f are the focal length of transmission-type collimating mirror 4.
θ=F (ɑ, beta, gamma) is obtained by space geometry relationship, can similarly obtain ɑ=G (θ, beta, gamma), F, G respectively indicate two letters
Number.
Therefore this road can be calculated according to the displacement S3 of hot spot on imaging sensor 3 and image sensor center position
The space angle θ of light beam and elementary beam；Further according to β, γ value formula ɑ=G (θ, beta, gamma) and acquired before, so that it may calculate ɑ
Angle, to obtain measured object 7 around the angle absolute angle ɑ, β, γ that x-axis, y-axis, z-axis rotate, the space three-dimensional for obtaining measured object is exhausted
To angle information.
The big working distance auto-collimation three-dimensional measurement of absolute angle embodiment of the method for the high-precision of the present embodiment, including following step
It is rapid:
Step a, reference fluid is poured into the container for being fixed on big ground, forms reference fluid liquid level 6.Target 5 will be combined
It is fixed on measured object surface, is at 6 top of reference fluid liquid level；
Step b, bright light source 1 is put, measured object is adjusted and combines the position of target 5, makes imaging sensor 3 received two
Hot spot is in the center of imaging sensor, and combination 5 lower surface of target is made to be parallel to reference fluid liquid level 6, fixed tested
Object and combination target 5, three axis rotation angles are benchmark zero degree at this time for definition；
Step c, combination target 5 generates space three-dimensional rotation with measured object, and imaging sensor 3 exports the displacement of two hot spots
Value, wherein first hot spot range image sensor center is decomposed into S1, S2, another hot spot range image sensor
Center is S3；
Step d, using displacement S1, S2 of first hot spot, according to S1=ftan (2 β), S2=ftan (2 γ) meter
Calculation acquires β, γ, and wherein β, γ are the absolute angle that measured object is rotated clockwise around y, z-axis；
Step e, using the displacement S3 of another hot spot, θ is acquired according to S3=ftan (θ) calculating, wherein θ is through being divided
Mirror reflects the angle of light beam light echo and optical axis all the way；
Step f, ɑ is acquired according to ɑ=G (θ, beta, gamma) calculating, wherein ɑ is the absolute angle that measured object is rotated clockwise around x-axis
Degree, G indicate a function.Finally obtain absolute angle ɑ, β, γ that measured object is rotated clockwise around x, y, z axis.
Specific embodiment two
The present embodiment is the big working distance auto-collimation three-dimensional measurement of absolute angle Installation practice of high-precision.
The big working distance auto-collimation three-dimensional measurement of absolute angle device of the high-precision of the present embodiment, structural schematic diagram such as Fig. 3 institute
Show.On the basis of specific embodiment one, the spectroscope 52 cooperated in target 5 is replaced with polarization spectroscope 53 by the present embodiment；
Polarization spectroscope 8 is added between spectroscope 2 and imaging sensor 3, image is set at another exit facet of polarization spectroscope 8
Sensor 9；The polarizer 10 is added between light source 1 and spectroscope 2.
The big working distance auto-collimation three-dimensional measurement of absolute angle embodiment of the method for the high-precision of the present embodiment, including following step
It is rapid:
Step a, reference fluid is poured into the container for being fixed on big ground, forms reference fluid liquid level 6.Target 5 will be combined
It is fixed on measured object surface, is at 6 top of reference fluid liquid level；
Step b, bright light source 1 is put, measured object is adjusted and combines the position of target 5, makes imaging sensor 3 and image sensing
9 received two hot spots of device are in the center of imaging sensor, and combination 5 lower surface of target is made to be parallel to reference fluid liquid
Face 6, fixed measured object and combination target 5, three axis rotation angles are benchmark zero degree at this time for definition；
Step c, the hot spot light levels of the first imaging sensor 3 and the second imaging sensor 9 are observed, the polarizer 10 is adjusted
The light intensity that corner receives two imaging sensors is consistent；
Step d, combination target 5 generates space three-dimensional rotation with measured object, and imaging sensor 3 is exported through plane mirror 51
The shift value of the beam and focus of reflection, wherein hot spot range image sensor center is decomposed into S1, S2, imaging sensor 9
The shift value for the beam and focus that outputting reference liquid levels 6 reflect, wherein hot spot range image sensor center is S3；
Step e, using displacement S1, S2 of 3 hot spot of the first imaging sensor, according to S1=ftan (2 β), S2=f
Tan (2 γ) calculating acquires β, γ, and wherein β, γ are the absolute angle that measured object is rotated clockwise around y, z-axis；
Step f, using the displacement S3 of 9 hot spot of the second imaging sensor, θ is acquired according to S3=ftan (θ) calculating, wherein
θ is the angle that light beam light echo and optical axis all the way are reflected through spectroscope；
Step g, ɑ is acquired according to ɑ=G (θ, beta, gamma) calculating, wherein ɑ is the angle that measured object is rotated clockwise around x-axis, G
Indicate a function.Finally obtain absolute angle ɑ, β, γ that measured object is rotated clockwise around x, y, z axis.
The innovation of the invention consists in that forming cooperation target 5 using polarization spectroscope 53, and polarization point is added in measurement end
Light microscopic 8.This structure assigns two-way measuring beam different polarizabilities by polarization spectroscope 53, will by polarization spectroscope 8
Two-way measuring beam separates, and is received respectively with imaging sensor 3 and imaging sensor 9.It is connect to solve imaging sensor
Problem is distinguished in the identification for two hot spots received, and simplifies the program of imaging sensor image procossing, is reduced to image processing software
The requirement of technology；The speed of data processing is improved simultaneously, to improve the frequency response of system.
Secondly the hot spot light intensity that imaging sensor 3 and imaging sensor 9 receive is adjusted using the polarizer 10, solves two
Beam measuring beam light intensity avoids having in two-way hot spot light intensity excessively weak or too strong makes since light path element determines the problem of cannot be adjusted
The problem of at immeasurability.
Specific embodiment three
The present embodiment is the big working distance auto-collimation three-dimensional measurement of absolute angle Installation practice of high-precision.
The big working distance auto-collimation three-dimensional measurement of absolute angle device of the high-precision of the present embodiment, structural schematic diagram such as Fig. 4 institute
Show.On the basis of specific embodiment one, the spectroscope 52 cooperated in target 5 is replaced with dichroscope 54 by the present embodiment；It will
Imaging sensor 3 is changed to rgb color imaging sensor 7；Light source 1 is changed to red light source 11 and green light source 12, in spectroscope 2
Spectroscope 14 is added between red light source 11 and green light source 12.
The big working distance auto-collimation three-dimensional measurement of absolute angle embodiment of the method for the high-precision of the present embodiment, including following step
It is rapid:
Step a, reference fluid is poured into the container for being fixed on big ground, forms reference fluid liquid level 6.Target 5 will be combined
It is fixed on measured object surface, is at 6 top of reference fluid liquid level；
Step b, red light source 11, green light source 12 are lighted, measured object is adjusted and combines the position of target 5, makes RGB color
7 received two red-green glow spots of color imaging sensor are in image sensor center position, are parallel to combination 5 lower surface of target
Reference fluid liquid level 6, fixed measured object and combination target 5, three axis rotation angles are benchmark zero degree at this time for definition；
Step c, combination target 5 generates space three-dimensional rotation with measured object, and rgb color imaging sensor 7 is exported through plane
The shift value for the light beam red hot spot that reflecting mirror 51 reflects, wherein hot spot range image sensor center is decomposed into S1, S2,
Simultaneously 7 outputting reference liquid levels 6 of rgb color imaging sensor reflection light beam green spot shift value, wherein hot spot away from
It is S3 from image sensor center position；
Step d, using displacement S1, S2 of red hot spot, according to S1=ftan (2 β), S2=ftan (2 γ) is calculated
β, γ are acquired, wherein β, γ are the absolute angle that measured object is rotated clockwise around y, z-axis；
Step e, using the displacement S3 of green spot, θ is acquired according to S3=ftan (θ) calculating, wherein θ is through spectroscope
Reflect the angle of light beam light echo and optical axis all the way；
Step f, ɑ is acquired according to ɑ=G (θ, beta, gamma) calculating, wherein ɑ is the angle that measured object is rotated clockwise around x-axis, G
Indicate a function.Finally obtain absolute angle ɑ, β, γ that measured object is rotated clockwise around x, y, z axis.
The innovation of the invention consists in that forming cooperation target 5 using dichroscope 54.This structure is assigned by dichroscope
The different wavelength properties of two-way measuring beam are given, and uses rgb color imaging sensor as sensor while receiving green and red
Color beam hot spot.To solve the problems, such as that the identification of received two hot spots of imaging sensor is distinguished, imaging sensor is simplified
The program of image procossing reduces the requirement to image processing software technology；The speed of data processing is improved simultaneously, to improve
The frequency response of system.
Specific embodiment four
The present embodiment is the big working distance auto-collimation three-dimensional measurement of absolute angle Installation practice of high-precision.
The big working distance auto-collimation three-dimensional measurement of absolute angle device of the high-precision of the present embodiment, structural schematic diagram such as Fig. 5 institute
Show.On the basis of specific embodiment three, rgb color imaging sensor 7 is changed to dichroscope 13, image sensing by the present embodiment
Device 3 and imaging sensor 9；
The big working distance auto-collimation three-dimensional measurement of absolute angle embodiment of the method for the high-precision of the present embodiment, including following step
It is rapid:
Step a, reference fluid is poured into the container for being fixed on big ground, forms reference fluid liquid level 6.Target 5 will be combined
It is fixed on measured object surface, is at 6 top of reference fluid liquid level；
Step b, red light source 11, green light source 12 are lighted, measured object is adjusted and combines the position of target 5, makes image
Sensor 3 and 9 received two red-green glow spots of imaging sensor are in image sensor center position, make to combine 5 following table of target
Face is parallel to reference fluid liquid level 6, fixed measured object and combination target 5, and three axis rotation angles are benchmark zero degree at this time for definition；
Step c, combination target 5 generates space three-dimensional rotation with measured object, and imaging sensor 3 is exported through plane mirror 51
The shift value of the light beam red hot spot of reflection, wherein hot spot range image sensor center is decomposed into S1, S2, image sensing
The shift value of the light beam green spot of 9 outputting reference liquid levels 6 of device reflection, wherein hot spot range image sensor center
For S3；
Step d, using displacement S1, S2 of the hot spot of the first imaging sensor 3 acquisition, according to S1=ftan (2 β), S2
=ftan (2 γ) calculating acquires β, γ, and wherein β, γ are the absolute angle that measured object is rotated clockwise around y, z-axis；
Step e, it using the displacement S3 of the hot spot of the second imaging sensor 9 acquisition, is acquired according to S3=ftan (θ) calculating
θ, wherein θ is the angle that light beam light echo and optical axis all the way are reflected through spectroscope；
Step f, ɑ is acquired according to ɑ=G (θ, beta, gamma) calculating, wherein ɑ is the angle that measured object is rotated clockwise around x-axis, G
Indicate a function.Finally obtain absolute angle ɑ, β, γ that measured object is rotated clockwise around x, y, z axis.
The improvement of the present embodiment is using the first imaging sensor 3 and the second imaging sensor 9 instead of RGB color coloured picture
The feux rouges and green light measuring beam that two-way different wave length component is distinguished as sensor 7, using dichroscope 13, to solve figure
As the identification differentiation problem of received two hot spots of sensor, the program of imaging sensor image procossing is simplified, is reduced to figure
As the requirement of processing software technology；The speed of data processing is improved simultaneously, to improve the frequency response of system.
Claims (6)
1. a kind of big working distance auto-collimation three-dimensional measurement of absolute angle device of high-precision, which is characterized in that including light source (1), divide
Light microscopic (2), imaging sensor (3), transmission-type collimating mirror (4), cooperation target (5) and reference fluid liquid level (6), the cooperation
Target (5) is made of plane mirror (51) and spectroscope (52)；The light beam of light source (1) outgoing, by transmission-type collimating mirror (4)
After being collimated into collimated light beam, it is incident on the spectroscope (52) in cooperation target (5)；Through the light beam all the way of spectroscope (52),
After plane mirror (51) reflection in cooperation target (5), along backtracking, and is acquired and be imaged by imaging sensor (3)；And
Another way light beam is incident on the surface of reference fluid liquid level (6), then after spectroscope (52) are reflected through reference fluid liquid level
(6) it after reflecting, along backtracking, and is acquired and is imaged by imaging sensor (3)；
The spectroscope (2) is arranged between light source (1) and transmission-type collimating mirror (4), and imaging sensor (3) is arranged in transmission-type
Collimating mirror (4) focal plane, the position conjugate with light source (1)；
The cooperation target (5) includes spectroscope (52) and plane mirror (51), is installed to the measurement surface of measured object；
And reference fluid liquid level (6) is not connected independently of cooperation target (5) with cooperation target (5) and measured object, is fixed on the earth
On, reference fluid liquid level (6) is parallel with the plane of the earth.When space three-dimensional angular turn occurs for measured object, cooperate target (5)
Identical space three-dimensional angular turn is generated with measured object, and the other parts of reference fluid liquid level (6) and measuring device do not produce
Raw movement；When space three-dimensional angular turn does not occur for measured object, imaging sensor (3) institute is respectively positioned on image plane center position at a picture
It sets, space three-dimensional absolute angle is zero degree.
2. the big working distance auto-collimation three-dimensional measurement of absolute angle device of high-precision according to claim 1, which is characterized in that
It further include polarization spectroscope (53), polarization spectroscope (8), imaging sensor (9) and the polarizer (10)；
Before the polarization spectroscope (53) is placed on plane mirror (51), measuring beam is set to be divided into two bundles polarization state orthogonal
Measurement light；
The polarizer (10) makes light source (1) become linearly polarized light, is divided into two bundles measurement light through polarization spectroscope (53)；Through polarizing
The polarization direction of a branch of measuring beam of spectroscope (53) reflection is measured with the second beam transmitted through polarization spectroscope (53) just
The polarization direction of light is perpendicular；
Described image sensor (3) and imaging sensor (9) are located at the focal plane of transmission-type collimating mirror (4), position and light source
(1) it is conjugated.
3. the big working distance auto-collimation three-dimensional measurement of absolute angle device of high-precision according to claim 1, which is characterized in that
It further include dichroscope (54), rgb color imaging sensor (7), red light source (11), green light source (12) and spectroscope
(14)；
Before the dichroscope (54) is placed on plane mirror (51), measuring beam is made to be divided into two bundles the survey of Different lightwave wavelength
Measure light；The spectroscope (14) is placed between red light source (11), green light source (12) and spectroscope (2), by red light source
(11) and green light source (12) closes beam；
The rgb color imaging sensor (7) is located at the focal plane of transmission-type collimating mirror (4), position and red-light source (11),
Green-light source (12) conjugation；
Or
The rgb color imaging sensor (7) can be changed to dichroscope (13), imaging sensor (3) and imaging sensor
(9)；Described image sensor (3) and imaging sensor (9) are respectively positioned on the focal plane of transmission-type collimating mirror (4), position with it is red
Radiant (11), green-light source (12) conjugation.
4. the one kind realized on a kind of big working distance auto-collimation three-dimensional measurement of absolute angle device of high-precision described in the claim 1
The big working distance auto-collimation three-dimensional measurement of absolute angle method of high-precision, which comprises the following steps:
Step a, reference fluid is poured into the container for being fixed on big ground, is formed reference fluid liquid level (6).Target (5) will be combined
It is fixed on measured object surface, is above reference fluid liquid level (6)；
Step b, bright light source (1) is put, adjust measured object and combines the position of target (5), make imaging sensor (3) received two
A hot spot is in the center of imaging sensor, and combination target (5) lower surface is made to be parallel to reference fluid liquid level (6), Gu
Determine measured object and combination target (5), three axis rotation angles are benchmark zero degree at this time for definition；
Step c, combination target (5) generates space three-dimensional rotation with measured object, and imaging sensor (3) exports the displacement of two hot spots
Value, wherein first hot spot range image sensor center is decomposed into S1, S2, another hot spot range image sensor
Center is S3；
Step d, using displacement S1, S2 of first hot spot, according to S1=ftan (2 β), S2=ftan (2 γ) calculating is asked
β, γ are obtained, wherein β, γ are the absolute angle that measured object is rotated clockwise around y, z-axis；
Step e, using the displacement S3 of another hot spot, θ is acquired according to S3=ftan (θ) calculating, wherein θ is anti-through spectroscope
Penetrate the angle of light beam light echo and optical axis all the way；
Step f, ɑ is acquired according to ɑ=G (θ, beta, gamma) calculating, wherein ɑ is the absolute angle that measured object is rotated clockwise around x-axis, G
Indicate a function.Finally obtain absolute angle ɑ, β, γ that measured object is rotated clockwise around x, y, z axis.
5. the one kind realized on a kind of big working distance auto-collimation three-dimensional measurement of absolute angle device of high-precision described in the claim 2
The big working distance auto-collimation three-dimensional measurement of absolute angle method of high-precision, which comprises the following steps:
Step a, reference fluid is poured into the container for being fixed on big ground, is formed reference fluid liquid level (6).Target (5) will be combined
It is fixed on measured object surface, is above reference fluid liquid level (6)；
Step b, bright light source (1) is put, adjust measured object and combines the position of target (5), pass imaging sensor (3) and image
Received two hot spots of sensor (9) are in the center of imaging sensor, and combination target (5) lower surface is made to be parallel to benchmark
Liquid levels (6), fixed measured object and combination target (5), three axis rotation angles are benchmark zero degree at this time for definition；
Step c, the hot spot light levels of the first imaging sensor (3) and the second imaging sensor (9) are observed, the polarizer is adjusted
(10) light intensity that corner receives two imaging sensors is consistent；
Step d, combination target (5) generates space three-dimensional rotation with measured object, and imaging sensor (3) is exported through plane mirror
(51) shift value of the beam and focus reflected, wherein hot spot range image sensor center is decomposed into S1, S2, image sensing
The shift value of the beam and focus of device (9) outputting reference liquid levels (6) reflection, wherein hot spot range image sensor center
For S3；
Step e, using displacement S1, S2 of the first imaging sensor (3) hot spot, according to S1=ftan (2 β), S2=ftan
(2 γ) calculating acquires β, γ, and wherein β, γ are the absolute angle that measured object is rotated clockwise around y, z-axis；
Step f, using the displacement S3 of the second imaging sensor (9) hot spot, θ is acquired according to S3=ftan (θ) calculating, wherein θ
For the angle for reflecting light beam light echo and optical axis all the way through spectroscope；
Step g, ɑ is acquired according to ɑ=G (θ, beta, gamma) calculating, wherein ɑ is the angle that measured object is rotated clockwise around x-axis, and G is indicated
One function.Finally obtain absolute angle ɑ, β, γ that measured object is rotated clockwise around x, y, z axis.
6. the one kind realized on a kind of big working distance auto-collimation three-dimensional measurement of absolute angle device of high-precision described in the claim 3
The big working distance auto-collimation three-dimensional measurement of absolute angle method of high-precision, which comprises the following steps:
Step a, reference fluid is poured into the container for being fixed on big ground, is formed reference fluid liquid level (6).Target (5) will be combined
It is fixed on measured object surface, is above reference fluid liquid level (6)；
Step b, red light source (11), green light source (12) are lighted, measured object is adjusted and combines the position of target (5), makes RGB
The received two red-green glow spots of color image sensor (7) are in image sensor center position, make to combine target (5) lower surface
It is parallel to reference fluid liquid level (6), fixed measured object and combination target (5), three axis rotation angles are benchmark zero degree at this time for definition；
Step c, combination target (5) generates space three-dimensional rotation with measured object, and rgb color imaging sensor (7) is exported through plane
Reflecting mirror (51) reflection light beam red hot spot shift value, wherein hot spot range image sensor center be decomposed into S1,
S2, while the shift value of the light beam green spot of rgb color imaging sensor (7) outputting reference liquid levels (6) reflection, wherein
Hot spot range image sensor center is S3；
Or
Step c, combination target (5) measured object generates space three-dimensional rotation, and imaging sensor (3) is exported through plane mirror (51)
The shift value of the light beam red hot spot of reflection, wherein hot spot range image sensor center is decomposed into S1, S2, image sensing
Device (9) exports the shift value of the light beam green spot of fixed pan reflecting mirror (6) reflection, wherein in hot spot range image sensor
Heart position is S3；
Step d, using displacement S1, S2 of red hot spot, according to S1=ftan (2 β), S2=ftan (2 γ) calculating is acquired
β, γ, wherein β, γ are the absolute angle that measured object is rotated clockwise around y, z-axis；
Step e, using the displacement S3 of green spot, θ is acquired according to S3=ftan (θ) calculating, wherein θ is to reflect through spectroscope
The angle of light beam light echo and optical axis all the way；
Step f, ɑ is acquired according to ɑ=G (θ, beta, gamma) calculating, wherein ɑ is the angle that measured object is rotated clockwise around x-axis, and G is indicated
One function.Finally obtain absolute angle ɑ, β, γ that measured object is rotated clockwise around x, y, z axis.
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