CN112781727A - Transverse shearing interference spectrum imager based on prism and imaging method - Google Patents
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- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/45—Interferometric spectrometry
Abstract
The invention provides a prism-based transverse shearing interference spectral imager and an imaging method, solves the problem of unstable scanning of a moving part in the existing interference spectral imaging technology, and is applied to the fields of interference wavefront theoretical reconstruction, optical detection, optical metering, image quality evaluation, precision testing and the like. The device comprises a front telescope collimation system, a shearing interferometer, a Fourier transform imaging objective lens and a photoelectric detector which are sequentially arranged along an optical path; the front telescope collimation system is positioned at the most front end of an optical path, and the photoelectric detector is positioned on an image surface of the Fourier transform imaging objective lens; the far-field target sequentially passes through the front telescope system, the shearing interferometer and the Fourier transform imaging objective lens to form interference fringes on the target surface of the photoelectric detector; and the photoelectric detector records the interference fringes and then forms a spectral image through computer processing.
Description
Technical Field
The invention belongs to the technical field of Fourier transform hyperspectral imaging shearing interference, and relates to a prism-based transverse shearing interference spectral imager and an imaging method.
Background
In optical applications, optical interference has its special meaning. Many precision testing efforts rely on optical interference techniques, and interferometry is even the only viable and desirable option for addressing certain testing tasks. The advent of lasers, and the rapid development of optoelectronics and computing technology, since the 60's of the 20 th century has greatly expanded the range of applications and capabilities of interferometers. The interferometers have been developed for over a hundred years, and although the development of the interferometers is gradually improved and diversified and complicated, the application of the original classical interferometers, such as Fizeau interferometers, Jamin interferometers, Michelson interferometers and other prototypes, is not meaningless, but the application potential of the classical interferometers is disclosed and mined to the maximum extent on one hand, and the classical interferometers are modified and developed on the basis of the prototypes to meet the requirements of various purposes in the development of modern scientific technology on the other hand. However, whether the classical interferometer or the modified new interferometer, a common basic principle is that an interference pattern (e.g., a bending amount of interference fringes or a variation amount of interference fringes) formed between a standard wave surface and a measured wave surface is used as a measurement basis. In addition to the spherical fizeau interferometer and the unequal arm tympan-Green (Twyman-Green) interferometer, most interferometers require at least one or several standard mirror surfaces of high precision as a basis and means for generating and transmitting a standard (reference) wavefront. The standard mirror aperture of the mirror is at least equal to or even larger than the aperture of the element or system to be tested. When the caliber of the element or system to be measured exceeds a certain range, for example, the caliber is larger than 300mm, the interferometer is quite high in manufacturing cost, long in period and difficult, and even is unlikely to be manufactured by a common manufacturer. Thus, this requirement significantly limits the interferometric inspection of larger optical mirrors or systems. In addition, generally speaking, the common interferometer is expensive, the usage efficiency is low, the requirements of the working environment (temperature, humidity, vibration, airflow, etc.) are strict, and the common interferometer usually needs a special technician to operate, takes time to adjust, and the common interferometer cannot be carried around for use, so the common interferometer is limited in application. It should be noted that for the last twenty years, planar interferometers with an aperture of phi 600mm and phi (8)0mm have appeared in succession at home and abroad and are also sold, but after all, they are countable several, and the price is yesterling. The large-scale mirror surface is inspected by utilizing the unequal-arm interferometer, and interference patterns sometimes show strong jitter due to external interference such as vibration, particularly on an optical inspection table with poor vibration-proof conditions or on site inspection and adjustment of an astronomical site and a large-scale optical transmitting system or receiving system. Thus, such conventional large-bore interferometric instruments also limit the possibility of application to inspection of large mirrors or systems. Furthermore, if aspheric surfaces are inspected, the interferometer should be equipped with an optical wavefront corrector designed specifically for the object to be inspected. The calculation, grinding, adjustment and inspection of the optical system of the compensator are all very costly and not easy.
Optical engineering technicians desire to find an interferometer which is insensitive to external interference, simple to manufacture, convenient to carry, easy to operate and low in manufacturing cost, and can be used for inspecting large-caliber common mirror surfaces, special mirror surfaces or large-scale pneumatic flow fields and the like. Therefore, a wavefront "shear interferometry" application that does not require a standard wavefront arises.
Shearing interferometers are an important type of interferometer that has certain features of both conventional interferometers and certain unique characteristics of its own. In the application process of the wavefront detection technology, the shearing interference technology is common-path interference based on the interference principle of light. Common-path interference can avoid problems encountered in dual-beam interference and improve the stability of the system. In practical practice of experiments, shearing interferometry is widely used, and shearing interferometry is generally used to measure shearing interferometry. An apparatus that splits a wavefront passing through a test object into two parts in a predetermined direction by an appropriate optical system, and shifts (shears) the two wavefronts from each other to generate an interference pattern at a portion where the two wavefronts overlap is called a shearing interferometer. The shearing interferometry is to separate the wave surface with spatial coherence into two wave surfaces with the same size and spatial dislocation or concentric wave surfaces with similar size after passing through a special device. And the two wave surfaces after dislocation meet the condition of optical interference, fringes are generated in a public area, and the surface shape information of the wave surfaces is obtained by processing the fringes. Certain unique properties of its own. Now, the summary is as follows:
(1) all interferometers take the multiple or fraction of the optical wavelength as a measurement unit, and have high precision and sensitivity;
(2) various interference detection methods can be used for quantitative detection. The shearing interferometer can also carry out quantitative inspection to obtain quantitative results. Only because there is no standard wave surface, the corresponding relation between the change of the measured wave surface and the bending of the interference fringe is not as obvious and intuitive as the common interferometer fringe. The analysis of the wave surface deformation is troublesome and is not as convenient as a common interferometer. This is a major disadvantage of shearing interferometers.
(3) Conventional interferometers inspect mirrors or systems, which are generally limited by the aperture of a standard mirror. Most shearing interferometers are not limited by the caliber size, and can test the mirror surface or system with any size in principle. The test range can be very wide by adding a certain auxiliary element.
(4) In general, conventional interferometers must use a monochromatic or quasi-monochromatic light source to obtain a well-contrasted interference pattern. For some shearing interferometers, the path difference between two coherent beams is very small and close to equal path interference, so that no special requirement is imposed on a light source, and a common incandescent bulb for instruments can clearly observe a color shearing interference pattern. If the light source slit width is properly controlled, a shearing interference pattern with high contrast can be obtained very easily.
(5) The common interferometer is generally non-aplanatic interference, is sensitive to external interference such as air disturbance, ground vibration and the like, and is particularly used in factories, workshops and sites without vibration-proof measures. The shearing interferometer generally belongs to aplanatic interference, is insensitive to external interference, and can clearly and stably observe interference fringes under the condition of no vibration prevention.
(6) The common interferometer has corresponding requirements on the reflectivity of the measured mirror surface because the reflectivity of the standard mirror surface is determined, and if the reflectivity of the measured mirror surface is greatly different from the reflectivity of the standard mirror surface, the contrast of the fringes is obviously reduced. For prism shearing interferometers, there is no requirement for the reflectivity (transmissivity) of the mirror or system being examined. In the processing process of an optical workshop, the mirror surface is wiped clean at any time, and then the shearing interference inspection can be carried out. The reason is simple, a strong beam enters the interferometer and is divided into two stronger beams with equal intensity, a weak beam enters the interferometer and is also divided into two weaker beams with equal intensity, and therefore, an interference pattern with good contrast can be obtained.
(7) Various (prism, flat plate and grating) shearing interferometers have very simple structures, are easy to process and manufacture, and have extremely low cost compared with common interferometers. Because the volume is small and simple, the portable multifunctional medical instrument is convenient to carry and can be used everywhere. The adjustment is also simple and convenient, no special operator is needed, and the general workers after simple training can easily master and use the device. From the above, although the shearing interferometer has some disadvantages, it does have its features and advantages, so when selecting the inspection method, it should balance the advantages and disadvantages of each aspect, and determine the inspection method which is cheap, simple and satisfying the requirements. At present, shearing interferometers are increasingly developed and widely used, and are explained to be a preferable inspection method.
In the traditional Michelson interferometer, when a movable plane mirror moves back and forth in a strict sense, the movable plane mirror and a static plane mirror are perpendicular to each other, the fringes generated by a quasi-monochromatic light source are circular and are localized at infinity, however, a displacement mechanism for driving the movable mirror is difficult to ensure high-precision large-displacement linear reciprocating movement, when two plane mirrors are not perpendicular to each other strictly, equal-thickness interference fringes are generated, and the fringes bend to move to one side.
Disclosure of Invention
The invention aims to provide a prism-based transverse shearing interference spectral imager and an imaging method, solves the problem of unstable scanning of a moving part in the existing interference spectral imaging technology, and can be applied to the fields of interference wavefront theoretical reconstruction, optical detection, optical metering, image quality evaluation, precision testing and the like.
The technical scheme of the invention provides a transverse shearing interference spectral imager based on a prism, which is characterized in that: the device comprises a front telescope collimation system, a shearing interferometer, a Fourier transform imaging objective lens and a photoelectric detector which are sequentially arranged along an optical path; the front telescope collimation system is positioned at the foremost end of an optical path, and the photoelectric detector is positioned on an image surface of the Fourier transform imaging objective lens;
the shearing interferometer comprises a beam splitter, a first right-angle reflecting prism, a second right-angle reflecting prism, a third right-angle reflecting prism, a fourth right-angle reflecting prism, a first pyramid prism and a second pyramid prism; the first right-angle reflecting prism is positioned in a reflecting light path of the beam splitter, the second right-angle reflecting prism is positioned in a reflecting light path of the first right-angle reflecting prism, and the first angle cone prism is positioned in a reflecting light path of the second right-angle reflecting prism; the third right-angle reflecting prism is positioned in a transmission light path of the beam splitter, the fourth right-angle reflecting prism is positioned in a reflection light path of the third right-angle reflecting prism, and the second pyramid prism is positioned in a reflection light path of the fourth right-angle reflecting prism;
the far-field target light is collimated by a front telescope system; the collimated target light is divided into reflected light and transmitted light with the same light intensity through a beam splitter; the reflected light is reflected by a first right-angle reflecting prism, a second right-angle reflecting prism and a first pyramid prism in sequence, then returns along the original light path, and passes through a beam splitter to define the light beam as T light; the transmitted light is reflected by a third right-angle reflecting prism, a fourth right-angle reflecting prism and a second pyramid prism in sequence, and finally returns along the original light path under the transverse movement of the second pyramid prism to be reflected by the beam splitter, and the light beam is defined as R light; the T light and the R light form interference on the target surface of the photoelectric detector after passing through the Fourier transform objective lens.
Furthermore, the interference spectrum imager also comprises at least one-dimensional shifter, at least one right-angle reflecting prism in the first right-angle reflecting prism, the second right-angle reflecting prism, the third right-angle reflecting prism and the fourth right-angle reflecting prism is arranged on the one-dimensional shifter, and the right-angle reflecting prism can be controlled to move along the direction of the hypotenuse or the cathetus of the right-angle reflecting prism through the one-dimensional shifter.
Further, the beam splitter may be a cubic prism, or may be a flat plate beam splitter.
Further, the first pyramid prism and the second pyramid prism are hollow retroreflectors, solid pyramid prism retroreflectors, roof prism reflectors or 180-degree right-angle prism reflectors.
Further, the photoelectric detector is a CCD area-array camera or a CMOS area-array camera.
The invention also provides an interference spectrum imaging method, which is characterized in that the method is realized based on the prism-based transverse shearing interference spectrum imager and comprises the following steps:
step 1, collimating target light from a far field by a front telescope collimation system;
step 2, dividing the collimated target light into reflected light and transmitted light with the same light intensity after passing through a shearing interferometer to form a transverse shearing amount s;
step 2.1, dividing the collimated target light into reflected light and transmitted light with the same light intensity through a beam splitter;
2.2, reflecting light is reflected by a first right-angle reflecting prism, a second right-angle reflecting prism and a first pyramid prism in sequence, then returns along an original light path, and passes through a beam splitter to define the light beam as T light; the transmitted light is reflected by a third right-angle reflecting prism, a fourth right-angle reflecting prism and a second pyramid prism in sequence, and finally returns along the original light path under the transverse movement of the second pyramid prism to be reflected by the beam splitter, and the light beam is defined as R light; the transverse shearing quantity between the T light and the R is s;
and 4, collecting the focused interferometer image by the photoelectric detector and storing the focused interferometer image on a computer.
Further, in step 2, by modulating at least one of the first right-angle reflecting prism, the second right-angle reflecting prism, the third right-angle reflecting prism and the fourth right-angle reflecting prism to move along the hypotenuse direction thereof, the interference image is moved on the target surface of the photoelectric detector; and adjusting the transverse shearing amount between the T light and the R light by modulating at least one right-angle prism in the first right-angle reflecting prism, the second right-angle reflecting prism, the third right-angle reflecting prism and the fourth right-angle reflecting prism to move along the right-angle side of the right-angle prism.
The invention has the beneficial effects that:
(1) the two plane mirrors of the Michelson interferometer are replaced by the two pyramid prisms insensitive to the incident angle, and the spectral resolution of the system is improved by moving the first right-angle reflecting prism, the second right-angle reflecting prism, the third right-angle reflecting prism or the fourth right-angle reflecting prism along the bevel edge or the right-angle edge; the method can be used for far-field target staring observation and is applied to the fields of interference wavefront theoretical reconstruction, optical detection, optical metering, image quality evaluation, precision test and the like.
(2) The invention changes the moving part into a one-dimensional linear phase shifter in the light path, and can complete phase scanning only by moving the phase shifter.
Drawings
FIG. 1 is a schematic diagram of the optical path of the shearing interferometer of the present invention.
In the figure, 1-a front telescope collimation system; 21-a beam splitter; 22-a first right angle reflecting prism; 23-a second right angle reflecting prism; 24-a first pyramid prism; 25-a third right-angle reflecting prism; 26-fourth right angle reflecting prism; 27-a second corner cube; 3-fourier transform imaging objective lens; 4-target surface of the detector.
Detailed Description
The invention is further described with reference to the following figures and specific embodiments.
As shown in FIG. 1, the spectral imager of the present embodiment includes a front telescope collimation system 1, a shearing interferometer, a Fourier transform imaging objective 3 and a photodetector 4 arranged along an optical path.
The shearing interferometer is composed of a beam splitter 21, a first right-angle reflecting prism 22, a second right-angle reflecting prism 23, a first pyramid prism 24, a third right-angle reflecting prism 25, a fourth right-angle reflecting prism 26 and a second pyramid prism 27. The first right-angle reflecting prism 22, the second right-angle reflecting prism 23, and the first pyramid prism 24 are placed in order along the reflected light from the beam splitter 21; a third rectangular reflecting prism 25, a fourth rectangular reflecting prism 26, and a second corner cube 27 are placed in order along the transmitted light coming out of the beam splitter.
The front telescope collimation system 1 is located at the foremost end of an optical path, the shearing interferometer is located on the collimation optical path output by the front telescope collimation system 1, the Fourier transform imaging objective lens 3 is located on the output optical path of the shearing interferometer 1, and the photoelectric detector 4 is located on the image surface of the Fourier transform imaging objective lens 3.
The far-field target sequentially passes through the front telescope system 1, the shearing interferometer and the Fourier transform imaging objective lens 3 to form interference fringes on the target surface of the photoelectric detector 4; the interference fringes are recorded by the photodetector 4 and processed by a computer to form a spectral image.
Any right-angle prism in the shearing interferometer moves along the hypotenuse, so that the optical path difference of the system can be changed, and the spectral resolution of the shearing interferometer is increased; any right-angle prism in the interferometer moves along the right-angle side, so that the transverse shearing quantity of two beams of light of the interferometer can be changed, and the spectral resolution of the shearing interferometer is further changed.
The detailed operation of the present invention will be described in detail with reference to fig. 1.
The reflected, transmitted and radiated light or natural light of a measured target from a far field is collimated by the front telescope collimation system 1, and the collimated target light forms a transverse shearing quantity s after passing through the shearing interferometer. In the shearing interferometer, a beam splitter 21 divides incident collimated light into reflected light and transmitted light with the same light intensity, the reflected light sequentially passes through a first right-angle reflecting prism 22, a second right-angle reflecting prism 23 and a first pyramid prism 24, finally returns along an original light path, and penetrates through the beam splitter 22; the transmitted light passes through a third right-angle reflecting prism 25, a fourth right-angle reflecting prism 26 and a second pyramid prism 27 in sequence, finally returns along the original optical path under the transverse movement of the second pyramid prism 27 and is reflected by the beam splitter 22, and the reflected light and the transmitted light form interference on the target surface of the photoelectric detector 4 after passing through the Fourier transform objective lens 3.
The spectral resolution of the shearing interferometer is determined by the maximum optical path difference that can be formed, and can be expressed as:
Δ L is the maximum optical path difference that the shearing interferometer can form;
n is the number of pixels of a row/column of the target surface of the photoelectric detector;
s is the lateral shearing amount of the shearing interferometer;
f is the focal length of the Fourier transform imaging objective lens;
and b is the size of the target surface pixel of the photoelectric detector.
Claims (7)
1. A lateral shear interference spectral imager based on prism is characterized in that: the device comprises a front telescope collimation system (1), a shearing interferometer, a Fourier transform imaging objective lens (3) and a photoelectric detector (4) which are sequentially arranged along an optical path; the front telescope collimation system (1) is positioned at the foremost end of an optical path, and the photoelectric detector (4) is positioned on an image surface of the Fourier transform imaging objective lens (3);
the shearing interferometer comprises a beam splitter (21), a first right-angle reflecting prism (22), a second right-angle reflecting prism (23), a third right-angle reflecting prism (25), a fourth right-angle reflecting prism (26), a first pyramid prism (24) and a second pyramid prism (27); the first right-angle reflecting prism (22) is positioned in a reflecting light path of the beam splitter (21), the second right-angle reflecting prism (23) is positioned in a reflecting light path of the first right-angle reflecting prism (22), and the first pyramid prism (24) is positioned in a reflecting light path of the second right-angle reflecting prism (23); the third right-angle reflecting prism (25) is positioned in the transmission light path of the beam splitter (21), the fourth right-angle reflecting prism (26) is positioned in the reflection light path of the third right-angle reflecting prism (25), and the second corner cube (27) is positioned in the reflection light path of the fourth right-angle reflecting prism (26);
the far-field target light is collimated by a front telescope system (1); the collimated target light is divided into reflected light and transmitted light with the same light intensity through a beam splitter (21); the reflected light is reflected by a first right-angle reflecting prism (22), a second right-angle reflecting prism (23) and a first angle cone prism (24) in sequence, returns along the original light path, passes through a beam splitter (21) and is defined as T light; the transmitted light is reflected by a third right-angle reflecting prism (25), a fourth right-angle reflecting prism (26) and a second pyramid prism (27) in sequence, and finally returns along the original optical path under the transverse movement of the second pyramid prism (27) to be reflected by a beam splitter (21), and the light beam is defined as R light; the T light and the R light form interference on a target surface of a photoelectric detector (4) after passing through a Fourier transform objective lens (3).
2. The prism-based lateral shear interference spectroscopy imager of claim 1, wherein: the device also comprises at least one-dimensional shifter, wherein at least one of the first right-angle reflecting prism (22), the second right-angle reflecting prism (23), the third right-angle reflecting prism (25) and the fourth right-angle reflecting prism (26) is arranged on the one-dimensional shifter, and the one-dimensional shifter can control the right-angle reflecting prism to move along the hypotenuse direction or the right-angle side direction of the right-angle reflecting prism.
3. The prism-based lateral shear interference spectral imager of claim 2, wherein: the beam splitter is a cube prism or a flat plate beam splitter.
4. The prism-based lateral shear interference spectral imager of claim 3, wherein: the first pyramid prism (24) and the second pyramid prism (25) are hollow retroreflectors, solid pyramid prism retroreflectors, roof prism reflectors or 180-degree right-angle prism reflectors.
5. The prism-based lateral shear interference spectral imager of claim 4, wherein: the photoelectric detector is a CCD area-array camera or a CMOS area-array camera.
6. An interference spectrum imaging method, which is realized based on the prism-based transversal shearing interference spectrum imager of any one of claims 1 to 5, and comprises the following steps:
step 1, collimating target light from a far field by a front telescope collimation system;
step 2, dividing the collimated target light into reflected light and transmitted light with the same light intensity after passing through a shearing interferometer to form a transverse shearing amount s;
step 2.1, dividing the collimated target light into reflected light and transmitted light with the same light intensity through a beam splitter (21);
2.2, reflecting light is reflected by a first right-angle reflecting prism (22), a second right-angle reflecting prism (23) and a first angle cone prism (24) in sequence, then returns along an original light path, penetrates through a beam splitter (21), and defines the light beam as T light; the transmitted light is reflected by a third right-angle reflecting prism (25), a fourth right-angle reflecting prism (26) and a second pyramid prism (27) in sequence, and finally returns along the original optical path under the transverse movement of the second pyramid prism (27) to be reflected by a beam splitter (21), and the light beam is defined as R light; the transverse shearing quantity between the T light and the R light is s;
step 3, focusing the T light with the transverse shearing amount of s and the R light by the Fourier transform imaging objective lens to form an interference image;
and 4, collecting the focused interferometer image by the photoelectric detector and storing the focused interferometer image on a computer.
7. An interference spectrum imaging method according to claim 6, characterized in that, in step 2, the interference image is moved on the target surface of the photodetector by modulating at least one of the first right-angle reflecting prism (22), the second right-angle reflecting prism (23), the third right-angle reflecting prism (25) and the fourth right-angle reflecting prism (26) to move along the hypotenuse direction; and the transverse shearing amount between the T light and the R light is adjusted by modulating at least one of the first right-angle reflecting prism (22), the second right-angle reflecting prism (23), the third right-angle reflecting prism (25) and the fourth right-angle reflecting prism (26) to move along the right-angle side of the right-angle reflecting prism.
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| CN114397255A (en) * | 2021-11-12 | 2022-04-26 | 中国科学院西安光学精密机械研究所 | Wide-spectrum high-resolution video spectral imaging system and method |
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