CN107063122B - The detection method and its device of surface shape of optical aspheric surface - Google Patents
The detection method and its device of surface shape of optical aspheric surface Download PDFInfo
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- CN107063122B CN107063122B CN201710293334.6A CN201710293334A CN107063122B CN 107063122 B CN107063122 B CN 107063122B CN 201710293334 A CN201710293334 A CN 201710293334A CN 107063122 B CN107063122 B CN 107063122B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2433—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring outlines by shadow casting
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2504—Calibration devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/254—Projection of a pattern, viewing through a pattern, e.g. moiré
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- Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Abstract
The invention discloses a kind of detection methods of surface shape of optical aspheric surface, this method comprises: reverse compensation striped is irradiated to from projecting direction be tested it is aspherical it is upper after, it is tested aspherical catoptric imaging and the modulation stripe that carrying is tested aspheric surface information is obtained by imaging system, aspherical surface form deviation is obtained according to the modulation stripe, and aspherical processing situation is tested according to surface form deviation determination；Also disclose a kind of detection device of rotational symmetry surface shape of optical aspheric surface.
Description
Technical field
The invention belongs to the detection technique fields of optical component surface shape, and in particular to a kind of detection of surface shape of optical aspheric surface
Method and device thereof.
Background technique
Optical aspherical surface has many excellent optical properties, therefore is more and more applied to all kinds of optics and Opto-electrical Section
In system；But due to the radius of curvature of aspherical upper each point difference, aspherical survey cannot be completed with traditional spherical surface measurement method
Amount.Moreover, with the continuous promotion of optical/optoelectronic system performance, the requirement to optical aspherical surface is also higher and higher；Not only
It is required that aspherical have good surface figure accuracy, and the requirement to aspherical degree is also gradually increased；Therefore, non-spherical measuring is always
It is the hot research problem of optical technical field, and is never well solved.
Currently, the main measurement method of optical aspherical surface has consistency profiles, geometrical ray method and interferometry.
Consistency profiles is to carry out contact type scanning to entire tested surface using probe, can only measure the two-dimensional surface in diametrical direction
Shape as a result, and it is very time-consuming, influenced by probe size, movement mechanism especially big, measurement accuracy is not high, is easy to damage measured piece
Surface.
Geometrical ray detection method mainly has Hartmann method, raster method and knife-edge method, and equipment is simple, but measurement accuracy is not
Height is unable to quantitative measurment.
The measurement accuracy of interferometry is high, but optical system and complicated in mechanical structure, the requirement to environment are stringent.Common interference
Method measurement is exactly compensating interferometer method (lens compensation calculates holographic compensation, is also zero check method), it can be achieved that aspheric
The detection of face quantification, detection accuracy are higher.But (compensation lens calculate holographic compensation to the device that needs to compensate of this method
Element), manufacture is extremely complex, and a compensator is only applicable to certain a kind of aspherical detection, poor universality.
Summary of the invention
In view of this, the main purpose of the present invention is to provide a kind of detection method of surface shape of optical aspheric surface and its dresses
It sets.
In order to achieve the above objectives, the technical scheme of the present invention is realized as follows:
The embodiment of the present invention provides a kind of detection method of surface shape of optical aspheric surface, which is characterized in that this method comprises: will
Reverse compensation striped be irradiated to from projecting direction be tested it is aspherical it is upper after, be tested aspherical catoptric imaging and obtained by imaging system
The modulation stripe for carrying tested aspheric surface information, aspherical surface form deviation is obtained according to the modulation stripe, according to institute
It states surface form deviation determination and is tested aspherical processing situation.
In above scheme, the generating process of the reverse compensation striped are as follows: by the straight fringe projection of one or more phase shifts
It is imaged after to desired aspheric reflection, obtains the deforming stripe modulated by desired aspheric；By the deforming stripe to project
Vertical bar line is that symmetry axis overturning generates reverse compensation striped.
In above scheme, this method further include: when the position for being tested aspherical position and reverse compensation fringe projection
Set to it is corresponding when the modulation stripe is not calibrated, specifically: according to Fourier transformation or phase-shifting technique to the item of acquisition
Line carries out phase extraction processing, obtains phase data；Later, rotation is tested an aspherical angle, equally to the modulation of acquisition
Striped carries out phase extraction processing, obtains phase data；Finally, rotation is tested aspherical one week, a series of modulation to acquisition
Striped carries out phase extraction processing, obtains a series of phase datas；Phase change is the smallest in a series of phase datas
The corresponding position of modulation stripe is to be tested the best position of aspherical calibration.
It is described that aspherical surface form deviation is obtained according to the modulation stripe in above scheme, specifically: to the modulation
Striped carries out the phase value that phase extraction obtains the modulation stripeAccording to phase valueWith the corresponding relationship formula of wavefront W, obtain
Obtain surface form deviation W, i.e. W=K
It is described that aspherical processing situation is tested according to surface form deviation determination in above scheme, specifically: according to quilt
It surveys the aspherical surface form deviation relative to desired aspheric and quilt is finally obtained by the synthesis of surface form deviation and desired aspheric
Survey aspherical actual measurement face shape.
The embodiment of the present invention also provides a kind of detection device of rotational symmetry surface shape of optical aspheric surface, which includes reverse
Compensation striped generating means, standard lens, are tested aspherical, imaging system at beam splitting arrangement, and the reverse compensation striped generates dress
Set, beam splitting arrangement, standard lens, be tested it is aspherical be successively from left to right arranged on optical axis, it is described be tested it is aspherical, imaging system
System is located at the side any up and down of beam splitting arrangement and its imaging optical axis perpendicular to optical axis.
In above scheme, the imaging system includes the imaging len set gradually along optical axis and CCD camera.
The embodiment of the present invention also provides a kind of detection device of non-rotational symmetry surface shape of optical aspheric surface, which includes inverse
To compensation striped generating means, beam splitting arrangement, standard lens, it is tested aspherical, plane mirror, imaging system, it is described reverse
The light beam that compensation striped generating means issue is projected to through standard lens is tested the reflected light aspherical, the tested spherical surface issues
Beam is reflected into imaging system through standard lens, plane mirror.
In above scheme, the imaging system includes the imaging len set gradually along optical axis and CCD camera.
Compared with prior art, beneficial effects of the present invention:
1. the present invention is different from interferometry, standard reference lens are not needed, it is low to environmental requirement；Also different from traditional projection
Method, the optical axis of imaging system are the reflection directions in incident ray.It is an advantage of the invention that structure is simple, measurement accuracy is high,
Measurement dynamic range is big, versatile.
2. the present invention can obtain phase shift striped without expensive interference phase-shifter, it is only necessary to reflection strip carry out at
Picture is obtained with surveyed aspherical face shape by simply calculating.Due to being that reflection strip is imaged, it is different from passing
The fringe projection measurement method of system, therefore measurement accuracy is high.
3. the illumination striped that the present invention uses is generated with computer according to being tested aspherical parameter, it is to be understood that non-
Sphere parameters, so that it may generate arbitrary illumination striped, therefore versatile.
4. the illumination striped that the present invention uses is generated with computer according to being tested aspherical parameter, can be according to non-
Surface of sphere generates reverse compensation illumination striped, therefore measurement range is big.
Detailed description of the invention
Fig. 1 is that a kind of structure for the detection device that the embodiment of the present invention 1 provides non-rotational symmetry surface shape of optical aspheric surface is shown
It is intended to；
Fig. 2 is that the embodiment of the present invention 1 is provided and inversely mended in the detection device of non-rotational symmetry surface shape of optical aspheric surface a kind of
Repay the first structural schematic diagram of striped generating means；
Fig. 3 is that the embodiment of the present invention 1 is provided and inversely mended in the detection device of non-rotational symmetry surface shape of optical aspheric surface a kind of
Repay second of structural schematic diagram of striped generating means；
Fig. 4 is that the embodiment of the present invention 1 is provided and inversely mended in the detection device of non-rotational symmetry surface shape of optical aspheric surface a kind of
Repay the third structural schematic diagram of striped generating means
Fig. 5 is that a kind of structure for the detection device that the embodiment of the present invention 2 provides non-rotational symmetry surface shape of optical aspheric surface is shown
It is intended to.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.
The embodiment of the present invention provides a kind of detection method of surface shape of optical aspheric surface, this method comprises: item will be compensated inversely
Line be irradiated to from projecting direction be tested it is aspherical it is upper after, be tested aspherical catoptric imaging by imaging system obtain carry be tested it is non-
The modulation stripe of spherical surface shape information obtains aspherical surface form deviation according to the modulation stripe, according to the surface form deviation
Determination is tested aspherical processing situation.
The generating process of the reverse compensation striped are as follows: the vertical bar line of one or more phase shifts is projected into desired aspheric
It is imaged after reflection, obtains the deforming stripe modulated by desired aspheric；It with the vertical bar line projected is symmetrical by the deforming stripe
Axis overturning generates reverse compensation striped.
This method further include: when it is described be tested aspherical position and the position of reverse compensation fringe projection not to it is corresponding when
The modulation stripe is calibrated, specifically: phase is carried out to the striped of acquisition according to Fourier transformation or phase-shifting technique
Extraction process obtains phase data；Later, rotation is tested an aspherical angle, equally carries out phase to the modulation stripe of acquisition
Position extraction process, obtains phase data；Finally, rotation is tested aspherical one week, phase is carried out to a series of modulation stripes of acquisition
Position extraction process, obtains a series of phase datas；The smallest modulation stripe pair of phase change in a series of phase datas
The position answered is to be tested the best position of aspherical calibration.
It is described that aspherical surface form deviation is obtained according to the modulation stripe, specifically: phase is carried out to the modulation stripe
Extract the phase value for obtaining the modulation stripe in positionAccording to phase valueWith the corresponding relationship formula of wavefront W, surface form deviation is obtained
W, i.e.,
It is described that aspherical processing situation is tested according to surface form deviation determination, specifically: according to being tested aspherical phase
For the surface form deviation of desired aspheric, by the synthesis of surface form deviation and desired aspheric, finally acquisition is tested aspherical
Actual measurement face shape.
If tested aspherical degree is excessive, the backwards projection striped designed will the bending of overstocked or striped more than one
Fringe spacing, at this moment will with due regard to striped processing capacity problem, for example subtract on the desired aspheric of design one light
It spends aspherical；Imaging system obtain modulation stripe be relative to desired aspheric (or standard aspheric plus compensation it is light
Spend aspherical) modulation deforming stripe, finally according to modulation deforming stripe determination be tested aspherical face shape.
The embodiment of the present invention 1 provides a kind of detection device of surface shape of optical aspheric surface, as shown in Figure 1, the device includes inverse
To compensation striped generating means, beam splitting arrangement, standard lens, it is tested aspherical, imaging system, the reverse compensation striped generates
Device, beam splitting arrangement, standard lens, be tested it is aspherical be successively from left to right arranged on optical axis, it is described be tested it is aspherical, imaging
System is located at the side any up and down of beam splitting arrangement and its imaging optical axis perpendicular to optical axis.
The imaging system includes the imaging len set gradually along optical axis and CCD camera.
Three kinds of structures: liquid crystal spatial light modulation method, DMD Reflective spatial can be used in the reverse compensation striped generating means
Light modulation method, display bounce technique.
Liquid crystal spatial light modulation method: laser is irradiated to LCD space light modulator by beam-expanding collimation, and the modulator is by counting
The control of calculation machine, transmission obtain inversely compensating striped, as shown in Figure 2.
DMD reflection type spatial light modulation method: laser is radiated in DMD spatial light modulator by beam-expanding collimation, computer
DMD spatial light modulator is controlled, reflection obtains the method for inversely compensating striped, as shown in Figure 3.
Display bounce technique: reverse compensation striped is generated by computer, shows, is reflected through reflecting mirror over the display, passed through
Collimating mirror collimates to obtain the reverse compensation striped that measurement needs, as shown in Figure 4.
The embodiment of the present invention 2 provides a kind of detection device of surface shape of optical aspheric surface, as shown in figure 5, the device includes inverse
To compensation striped generating means, beam splitting arrangement, standard lens, it is tested aspherical, plane mirror, imaging system, it is described reverse
The light beam that compensation striped generating means issue is projected to through standard lens is tested the reflected light aspherical, the tested spherical surface issues
Beam is reflected into imaging system through standard lens, plane mirror.
The foregoing is only a preferred embodiment of the present invention, is not intended to limit the scope of the present invention.
Claims (1)
1. a kind of detection method of surface shape of optical aspheric surface, which is characterized in that this method comprises: striped will inversely be compensated from projection
Direction be irradiated to be tested it is aspherical it is upper after, be tested aspherical catoptric imaging and obtained by imaging system and carry tested aspheric surface
The modulation stripe of information obtains aspherical surface form deviation according to the modulation stripe, is determined according to the surface form deviation tested
Aspherical processing situation；
The generating process of the reverse compensation striped are as follows: the vertical bar line of one or more phase shifts is projected into desired aspheric reflection
After be imaged, obtain the deforming stripe modulated by desired aspheric；The deforming stripe is turned over using the vertical bar line projected as symmetry axis
Reincarnation is at reverse compensation striped；
This method further include: when it is described be tested aspherical position and the position of reverse compensation fringe projection not to it is corresponding when to institute
Modulation stripe is stated to be calibrated, specifically: phase extraction is carried out to the striped of acquisition according to Fourier transformation or phase-shifting technique
Processing obtains phase data；Later, rotation is tested an aspherical angle, equally carries out phase to the modulation stripe of acquisition and mentions
Processing is taken, phase data is obtained；Finally, rotation is tested aspherical one week, phase is carried out to a series of modulation stripes of acquisition and is mentioned
Processing is taken, a series of phase datas are obtained；The smallest modulation stripe of phase change is corresponding in a series of phase datas
Position is to be tested the best position of aspherical calibration；
Aspherical surface form deviation is obtained according to the modulation stripe, specifically: phase extraction is carried out to the modulation stripe and is obtained
Obtain the phase value of the modulation stripeAccording to phase valueWith the corresponding relationship formula of wavefront, surface form deviation W is obtained, i.e.,
It is tested aspherical processing situation according to surface form deviation determination, specifically: according to being tested aspherical surface form deviation,
By the synthesis of surface form deviation and desired aspheric, finally obtains and be tested aspherical actual measurement face shape.
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| CN108286950A (en) * | 2017-12-27 | 2018-07-17 | 中国科学院长春光学精密机械与物理研究所 | A kind of online test method of reflecting mirror surface shape |
| CN108917652B (en) * | 2018-07-09 | 2020-04-10 | 中国科学院光电技术研究所 | Pose optimization method for off-axis aspheric surface of structured light detection |
| CN109708591A (en) * | 2019-03-13 | 2019-05-03 | 茂莱（南京）仪器有限公司 | A kind of detection device of aspherical optical element |
| CN110487205B (en) * | 2019-07-31 | 2020-10-13 | 北京理工大学 | Aspheric parameter error interference measurement method combining dispersion confocal positioning |
| CN111288929B (en) * | 2020-03-16 | 2021-08-17 | 苏州依诺维视智能科技有限公司 | Three-dimensional high-precision vision measurement method for workpiece with large curvature surface |
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