CN108507492A - The high-precision wide-dynamic-range measurement method and measuring system on a kind of plane surface transmissive element surface - Google Patents
The high-precision wide-dynamic-range measurement method and measuring system on a kind of plane surface transmissive element surface Download PDFInfo
- Publication number
- CN108507492A CN108507492A CN201810456759.9A CN201810456759A CN108507492A CN 108507492 A CN108507492 A CN 108507492A CN 201810456759 A CN201810456759 A CN 201810456759A CN 108507492 A CN108507492 A CN 108507492A
- Authority
- CN
- China
- Prior art keywords
- under test
- projection screen
- element under
- ccd camera
- dynamic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
Abstract
The present invention provides the high-precision wide-dynamic-range measurement method and measuring system on a kind of plane surface transmissive element surface, is related to field of measuring technique.Interferometer survey waits for that the flat table of element obtains face graphic data；Three-dimensional coordinates measurement equipment demarcates to obtain deviation light path system locations of structures parameter；Ray tracing establishes desired pattern system and obtains theoretical coordinate positional value；Show that projection screen shows that multistep phase shift sine gray scale vertical bar line, computer solve the corresponding real coordinate position value of striped of CCD camera shooting；Respective coordinates error is worth to by theoretical coordinate positional value and real coordinate position, Surface error slope distribution to be measured is calculated, element under test curved surface face shape error is obtained after integral.The measurement dynamic range that the present invention solves high-precision flat curved surface transmissive element surface measurement in the prior art is small, the technical problem of equipment costliness.The present invention has the beneficial effect that：The measurement method for providing contactless high-precision Larger Dynamic range, realizes the generalization of detection device.It is easy to operate efficient.
Description
Technical field
The present invention relates to field of measuring technique, more particularly, to a kind of survey based on optics deviation art to transmissive element surface
Amount system and measurement method.
Background technology
There are one the transmissive elements that plane its lap is curved surface for plane surface transmissive element, i.e. element.Plane surface transmissive element
It is a kind of important optical element, is indispensable in optical element and industrial products, is widely used in optical system
With industrial system, also it is widely used in image optics, light optics, transparent glass.With advances in technology, for
The quality requirement of plane surface transmissive element is also continuously improved.This also requires measurement means to be continuously improved.Currently, saturating for plane surface
The common method for penetrating element surface measurement is broadly divided into interferometry and geometrical ray detection method.Interferometry is plane surface
Transmissive element surface measurement provides a kind of contactless high-precision measuring method.Chinese patent application publication No.
CN106643548A, data of publication of application on May 10th, 2017, the invention of entitled " aspheric optical element surface shape detection device "
Patent application document discloses a kind of device measuring aspheric surface with interferometry, for aspherical optical element
Face shape information is detected.The speculum that including interferometer and is vertically sequentially arranged from bottom to up, phase shifter, standard
Mirror, compensating glass and aspherical optical element；Interferometer is used to be emitted the measuring beam of horizontal direction；Speculum is used for level side
To measuring beam be transformed into measuring beam vertically upward；Phase shifter is used to adjust the phase of the measuring beam vertically upward
Position；Standard mirror is for providing the plane of reference to reflect the measuring beam vertically upward；Compensating glass is for compensating aspheric
The face shape of face optical element；The measuring beam that the measuring beam of aspherical optical element reflection is reflected with the plane of reference of standard mirror exists
Interference fringe is formed in interferometer.The structure realizes the high-acruracy survey of aspheric optical element surface shape.But interferometry measures
Dynamic range is small, and the design to system, manufacture and calibration all have high request.Flat bent transmissive element table is measured using interferometry
When face, measurement process is complex, can not complete the measurement of Larger Dynamic range.Chinese patent application publication No.
CN107560564A, data of publication of application on January 9th, 2018, the invention of entitled " a kind of free form surface detection method and system "
Patent application document discloses a kind of method and system of the measurement free form surface with reverse Hartmann's detection method, is used for
Reflective free-curved-surface shape information is detected.The structure is one kind of geometrical ray detection method, realize it is reflective from
By the high-acruracy survey of curved surface face shape, but it is relatively difficult to transmission surface testing.
Invention content
In order to which the measurement process for solving high-precision flat curved surface transmissive element surface measurement contactless in the prior art is multiple
Miscellaneous, measurement dynamic range is small and the technical problem of measuring apparatus costliness, and the present invention provides a kind of realization plane surface transmissive element
High-precision surface Larger Dynamic range measurement methodology and measuring system realize that high-precision is surveyed for the single curved surface of flat bent transmissive element
Amount.
The technical scheme is that：A kind of high-precision wide-dynamic-range measurement method on plane surface transmissive element surface：
Including：Show the optics deviation light path system and computer of projection screen, element under test, CCD camera composition.Element under test has one
A plane.Method includes the following steps：Step 1, surface shape measurement is carried out to the plane of element under test with interferometer, obtains face figurate number
According to Wflat；Step 2, with three-dimensional coordinates measurement equipment to the locations of structures parameter calibration of each device in optics deviation light path system；
Step 3, with face graphic data WflatIt is established with corresponding identical knot in the ray-tracing software of computer with locations of structures parameter
The desired pattern system of structure location parameter obtains theoretical coordinate positional value (x on display projection screenideal,yideal)；Step 4, it shows
Show that projection screen shows that the multistep phase shift sine gray scale vertical bar line in the direction x, y, the light that striped is sent out are saturating by element under test respectively
It penetrates and is shot by CCD camera, computer solves the phase distribution corresponding to the striped of CCD camera shooting, and sinusoidal gray scale is calculated
Vertical bar line is projected in the real coordinate position value (x on display projection screenmeas,ymeas)；Step 5, by theoretical coordinate positional value
(xideal,yideal) and real coordinate position value (xmeas,ymeas) substitute into
The slope local of element under test Surface error is calculated, element under test curved surface face shape error is obtained after integral.
Preferably, the face graphic data W measured in step 1flatFor the flat of the element under test in desired pattern system
Face face graphic data.
Preferably, the multistep phase shift sine gray scale vertical bar line in the direction x, y prestores in a computer in step 4, computer
Control shows that projection screen shows the multistep phase shift sine gray scale vertical bar line in the direction x, y successively.
Preferably, the geometrical relationship of each point on element under test curved surface is converted into the slope of each point section in step 5, it is right
The slope of section is integrated to obtain face shape parameter.
A kind of high-precision wide-dynamic-range on plane surface transmissive element surface measures the measuring system of measurement method：Display is thrown
Shadow screen is arranged face-to-face with CCD camera, element under test be located at display projection screen and CCD camera between, the plane of element under test with
Display projection screen is adjacent to, and CCD camera camera lens central axes are vertical with display projection screen, and CCD camera obtains complete member clearly to be measured
Part be imaged, display projection screen, CCD camera respectively with calculate mechatronics.
Compared with prior art, the beneficial effects of the invention are as follows：Using optics deviation principle, the logical of detection device is realized
With change.Number of devices is few, the difficulty for reducing system building and using, easy to operate, efficient.Without other compensation optics members
Part and standard optical elements, measuring system calibration simplify, and under conditions of meeting high-precision with Larger Dynamic range, reduce detection
Cost.Non-contact, high-precision, the measurement method of Larger Dynamic range are provided for the measurement on plane surface transmissive element surface.
Description of the drawings
Attached drawing 1 is optics deviation light path system schematic diagram of the present invention；
Attached drawing 2 is the deviation angle in Fig. 1 by D point light and section inclination angle relational graph where D points；
Attached drawing 3 is the element under test plane surface shape result figure measured with interferometer in the embodiment of the present invention；
Attached drawing 4 is that the embodiment of the present invention measures element under test wrap-around error result figure.
In figure：1- shows projection screen；2- element under tests；3-CCD cameras；4- computers.
Specific implementation mode
Below with reference to the embodiments and with reference to the accompanying drawing the technical solutions of the present invention will be further described.
Embodiment 1：
As shown in Figure 1, a kind of measuring system of the high-precision wide-dynamic-range measurement method on plane surface transmissive element surface：It is wrapped
Include display projection screen 1, element under test 2, CCD camera 3 and computer 4.There are one planes for the tool of element under test 2, remaining is curved surface.
CCD camera 3 is equipped with optical filter, and optical filter is equipped with optical filtering aperture.Optical filter and the camera end face paste of CCD camera 3 are tight.Display projection
Screen 1 is arranged face-to-face with CCD camera 3.Element under test 2 is located between display projection screen 1 and CCD camera 3.In order to avoid display is thrown
The light that shadow screen 1 is sent out enters element under test 2 and will appear deviation, and plane and the display projection screen 1 of element under test 2 are adjacent to, curved surface
Towards CCD camera 3.3 camera lens central axes of CCD camera are vertical with display projection screen 1.CCD camera 3 apart from display projection screen 1 away from
From can be obtained depending on complete clearly element under test 2 is imaged with CCD camera 3.Show projection screen 1, element under test 2, CCD camera 3
Constitute optics deviation light path system (indicating light path with arrow fine line in Fig. 1).Show projection screen 1, CCD camera 3 respectively with meter
Calculation machine 4 is electrically connected (being indicated with fine line in Fig. 1).
A kind of high-precision wide-dynamic-range measurement method on plane surface transmissive element surface, includes the following steps：Step 1：
Surface shape measurement is carried out to the plane of element under test 2 with interferometer, obtains face graphic data Wflat.Since interferometer measurement error can be with
Ignore, the face graphic data W that setting interferometer measurement arrivesflatFor the plane surface shape data of the element under test 2 in desired pattern system.
Step 2：With three-dimensional coordinates measurement equipment to the locations of structures parameter calibration of each device in optics deviation light path system.
Locations of structures parameter calibration including element under test 2, display projection screen 1, CCD camera 3.Locations of structures parameter F={ xi,yi,
zi；Ti,x,Ti,y,Ti,z,dm2screen}I=1,2,3It indicates.Wherein：(xi,yi,zi) be i-th of element spatial value position,
(Ti,x,Ti,y,Ti,z) indicate inclination angle of i-th of element about each reference axis, dm2screenIt is corresponding for the point on curved surface to be measured
Distance on display projection screen 1 between light emitting pixel point.
Step 3：Computer 4 is equipped with ray-tracing software.The face graphic data W obtained with step 1flatIt is obtained with step 2
Locations of structures parameter is established and practical optics deviation light path system counter structure position in the ray-tracing software of computer 4
The desired pattern system of parameter.Computer 4 carries out ray tracing, obtains showing display projection screen 1 with 2 phase of practical element under test
On projection coordinate be worth corresponding theoretical coordinate positional value, be (xideal,yideal)。
Step 4：The multistep phase shift sine gray scale vertical bar line in the direction x, y is pre-stored in computer 4.The control of computer 4 is aobvious
Show that projection screen 1 shows the multistep phase shift sine gray scale vertical bar line in the direction x, y successively.Display projection screen 1 shows the direction x, y respectively
Multistep phase shift sine gray scale vertical bar line.The light that the striped in the direction x, y is sent out successively in display projection screen 1 penetrates element under test 2
Plane and curved surface, corresponding picture is acquired by CCD camera 3.The picture that CCD camera 3 acquires is through the item deformed after element under test 2
Line.Computer 4 solves the phase distribution Φ corresponding to the striped of the deformation using multistep phase shift unwrapping algorithmxAnd Φy, and
Real coordinate position value (the x that sinusoidal gray scale vertical bar line is projected on display projection screen 1 is calculatedmeas,ymeas)。
Step 5：As shown in Fig. 2, the light that display 1 light emitting pixel point of projection screen is sent out is sent out after the curved surface of element under test 2
Raw deviation, is then received by CCD camera 3.According to optics deviation principle, in optics deviation light path system, 2 curved surface of element under test
The geometrical relationship of upper each point is(wherein：N is the refractive index of element under test 2；A is on 2 curved surface of element under test
Certain point incident ray and horizontal angle, B are the emergent ray of the point and horizontal angle；θ is the inclination of the section
Angle), you can the slope for acquiring 2 curved surface of the element under test section isIt will
The geometrical relationship of optics deviation light path system is converted into each point section slope on 2 curved surface of element under test, and by the optics deviation light
Each point coordinate value substitutes into the system of road, can obtain：
Wherein：(xm,ym) it is the coordinate value put on 2 curved surface of element under test；(xscreen,yscreen) it is to shine on display projection screen 1
The coordinate value of pixel；(xcamera,ycamera) it is optical filtering small hole center coordinate value on 3 optical filter of CCD camera；dm2screenIt is to be measured
The distance between light emitting pixel point on the corresponding display projection screen 1 of point on curved surface；dm2cameraFor on 2 curved surface of element under test
Point on 3 optical filter of CCD camera at a distance from optical filtering small hole center.The face shape error Δ w of 2 curved surface of element under test is element under test 2
The practical face shape w of curved surfaceactualWith the ideal element face shape w in desired pattern systemidealBetween deviation.Face shape error Δ w is corresponded to
Slope local be：
In formula：N is the refractive index of element under test 2, cos θzFor the light and 3 camera lens of CCD camera after the refraction of element under test 2
The cosine value of central axes angle.Using integration method, 2 Surface error of element under test is obtained..
It is described further again with a specific practical measuring examples：
The pixel resolution of display projection screen 1 is that the catercorner length of 1920 × 1080, projection screen is 58.4cm, screen width high ratio
It is 16:9.In order to facilitate narration, it is plane that element under test 2, which selects bottom surface, and curved surface is the plane surface transmissive element of concave spherical.It is recessed
It is 25.4mm to fall into spherical surface bore, and the distance of radius of curvature 100mm, refractive index 1.51, center of surface to plane are 3mm.It waits for
It surveys element 2 to be placed between display projection screen 1 and CCD camera 3, display projection screen 1 is close in bottom surface.Equipped with filter before CCD camera 3
Light aperture, CCD camera 3 can obtain the complete blur-free imaging of element under test 2.Show projection screen 1, element under test 2 and CCD camera 3
Constitute optics deviation light path system.
Measuring process is as follows：
Step 1：Using interferometer, surface shape measurement is carried out to the bottom surface of element under test 2 in advance, obtains its face graphic data Wflat,
Fig. 3 is measured face graphic data.
Step 2：The three-dimensional coordinates measurement equipment for being 1.9 μm with measurement accuracy is to each device in the optics deviation light path system
Carry out location parameter F calibration.
Step 3：The locations of structures parameter of the optics deviation light path system of gained is demarcated using three coordinate arrangements and is utilized dry
Plane surface shape data W measured by interferometerflatBeing established in the ray-tracing software of computer 4 has corresponding identical locations of structures
The desired pattern system of parameter.Obtain theoretical coordinate position corresponding with projection coordinate's value of the actual phase on display projection screen 1
It is (x to set valueideal,yideal)。
Step 4：The control of computer 4 realizes that the multistep phase shift sine gray scale vertical bar line in the direction x, y is aobvious in display projection screen 1
Show, the corresponding straight width of fringe of gray scale is 8.18mm.CCD camera 3 acquires multistep phase shift sine gray scale vertical bar line by waiting in real time
Survey the picture after element 2 transmits.And after use multistep phase shift unwrapping algorithm solves the transmission element under test 2 that CCD camera 3 is shot
Phase distribution Φ corresponding to the striped of deformationxAnd Φy, and sinusoidal gray scale vertical bar line is calculated and is projected on display projection screen 1
Coordinate value (xmeas,ymeas)。xmeas=Φx/2π×8.18,ymeas=Φy/2π×8.18。
Step 5：According to optics deviation principle, calculating the corresponding slope local of the transmission Surface error of element under test 2 is：To local slope deviation (Δ wx,Δwy) integrated and waited for
2 Surface error of element is surveyed, as shown in Figure 4.
Claims (5)
1. a kind of high-precision wide-dynamic-range measurement method on plane surface transmissive element surface：Including：Show projection screen, member to be measured
The optics deviation light path system and computer of part, CCD camera composition, there are one planes for the element under test tool, it is characterised in that：
Method includes the following steps：Step 1, surface shape measurement is carried out to the plane of element under test with interferometer, obtains face graphic data Wflat；
Step 2, with three-dimensional coordinates measurement equipment to the locations of structures parameter calibration of each device in optics deviation light path system；Step 3, it uses
Face graphic data WflatIt is established with corresponding identical locations of structures ginseng in the ray-tracing software of computer with locations of structures parameter
Several desired pattern systems obtains theoretical coordinate positional value (x on display projection screenideal,yideal)；Step 4, projection screen is shown
Show that the multistep phase shift sine gray scale vertical bar line in the direction x, y, the light that striped is sent out are transmitted by element under test by CCD phases respectively
Machine is shot, and computer solves the phase distribution corresponding to the striped of CCD camera shooting, and the straight fringe projection of sinusoidal gray scale is calculated
Real coordinate position value (x on display projection screenmeas,ymeas)；Step 5, by theoretical coordinate positional value (xideal,yideal) and
Real coordinate position value (xmeas,ymeas) substitute intoIt is calculated to be measured
The slope local of element Surface error obtains element under test curved surface face shape error after integral.
2. a kind of high-precision wide-dynamic-range measurement method on plane surface transmissive element surface according to claim 1,
It is characterized in that：The face graphic data W measured in step 1flatFor the plane surface shape number of the element under test in desired pattern system
According to.
3. a kind of high-precision wide-dynamic-range measurement method on plane surface transmissive element surface according to claim 1,
It is characterized in that：The multistep phase shift sine gray scale vertical bar line in the direction x, y prestores in a computer in step 4, computer control display
Projection screen shows the multistep phase shift sine gray scale vertical bar line in the direction x, y successively.
4. a kind of high-precision wide-dynamic-range measurement method on plane surface transmissive element surface according to claim 1,
It is characterized in that：The geometrical relationship of each point on element under test curved surface is converted into the slope of each point section, to the oblique of section in step 5
Rate is integrated to obtain face shape parameter.
5. a kind of survey of the high-precision wide-dynamic-range measurement method on plane surface transmissive element surface according to claim 1
Amount system, it is characterised in that：The display projection screen is arranged face-to-face with CCD camera, and the element under test is located at display and projects
Between screen and CCD camera, plane and the display projection screen of element under test are adjacent to, and CCD camera camera lens central axes are thrown with display
Shadow screen is vertical, and CCD camera obtains complete clearly element under test and is imaged, the display projection screen, CCD camera respectively with computer
Electrical connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810456759.9A CN108507492A (en) | 2018-05-14 | 2018-05-14 | The high-precision wide-dynamic-range measurement method and measuring system on a kind of plane surface transmissive element surface |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810456759.9A CN108507492A (en) | 2018-05-14 | 2018-05-14 | The high-precision wide-dynamic-range measurement method and measuring system on a kind of plane surface transmissive element surface |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108507492A true CN108507492A (en) | 2018-09-07 |
Family
ID=63400500
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810456759.9A Pending CN108507492A (en) | 2018-05-14 | 2018-05-14 | The high-precision wide-dynamic-range measurement method and measuring system on a kind of plane surface transmissive element surface |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108507492A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109870129A (en) * | 2019-03-25 | 2019-06-11 | 中国计量大学 | A kind of wafer surface roughness detection device based on phase deviation principle |
| CN110260817A (en) * | 2019-06-27 | 2019-09-20 | 复旦大学 | Complex-curved deviation based on virtual mark point measures method for self-locating |
| CN117194849B (en) * | 2023-11-06 | 2024-01-12 | 中国科学院长春光学精密机械与物理研究所 | Surface shape error solving method based on vector multiplication |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09269275A (en) * | 1996-04-02 | 1997-10-14 | Nec Corp | Method for evaluating light transmission line |
| CN101629813A (en) * | 2009-07-29 | 2010-01-20 | 天津大学 | Measuring method of 3D profilometry of free-form surface based on computer-generated hologram |
| CN103292739A (en) * | 2013-06-28 | 2013-09-11 | 湖南长重机器股份有限公司 | Actuator-free surface shape accurate measurement device and method |
| CN103776389A (en) * | 2014-01-10 | 2014-05-07 | 浙江大学 | High-precision aspheric combined interference detection device and high-precision aspheric combined interference detection method |
| CN107543683A (en) * | 2017-07-31 | 2018-01-05 | 中国计量大学 | The high-precision wide-dynamic-range measuring system and measuring method of a kind of transmissive element aberration |
-
2018
- 2018-05-14 CN CN201810456759.9A patent/CN108507492A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09269275A (en) * | 1996-04-02 | 1997-10-14 | Nec Corp | Method for evaluating light transmission line |
| CN101629813A (en) * | 2009-07-29 | 2010-01-20 | 天津大学 | Measuring method of 3D profilometry of free-form surface based on computer-generated hologram |
| CN103292739A (en) * | 2013-06-28 | 2013-09-11 | 湖南长重机器股份有限公司 | Actuator-free surface shape accurate measurement device and method |
| CN103776389A (en) * | 2014-01-10 | 2014-05-07 | 浙江大学 | High-precision aspheric combined interference detection device and high-precision aspheric combined interference detection method |
| CN107543683A (en) * | 2017-07-31 | 2018-01-05 | 中国计量大学 | The high-precision wide-dynamic-range measuring system and measuring method of a kind of transmissive element aberration |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109870129A (en) * | 2019-03-25 | 2019-06-11 | 中国计量大学 | A kind of wafer surface roughness detection device based on phase deviation principle |
| CN110260817A (en) * | 2019-06-27 | 2019-09-20 | 复旦大学 | Complex-curved deviation based on virtual mark point measures method for self-locating |
| CN110260817B (en) * | 2019-06-27 | 2020-11-20 | 复旦大学 | Complex surface deflection measurement self-positioning method based on virtual mark points |
| CN117194849B (en) * | 2023-11-06 | 2024-01-12 | 中国科学院长春光学精密机械与物理研究所 | Surface shape error solving method based on vector multiplication |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102494634B (en) | Off-axis aspheric lens detection method based on fringe reflection | |
| US20220221270A1 (en) | A calibration method for fringe projection systems based on plane mirrors | |
| CN107560564B (en) | A kind of free form surface detection method and system | |
| CN102183213B (en) | Aspherical mirror detection method based on phase measurement deflectometry | |
| CN203231736U (en) | Specular object measurement device based on binocular vision | |
| CN105180841B (en) | A kind of new micro element three-dimension measuring system and its measuring method | |
| CN108759721A (en) | A kind of 3 D measuring method and device for projecting and reflecting based on optical stripe | |
| CN104111036A (en) | Mirror object measuring device and method based on binocular vision | |
| CN107543683A (en) | The high-precision wide-dynamic-range measuring system and measuring method of a kind of transmissive element aberration | |
| CN109307480B (en) | Method for detecting multi-surface shape of transmission element | |
| CN108507492A (en) | The high-precision wide-dynamic-range measurement method and measuring system on a kind of plane surface transmissive element surface | |
| CN107063122B (en) | The detection method and its device of surface shape of optical aspheric surface | |
| CN111765851B (en) | Mirror surface object three-dimensional shape measuring method and device based on double-screen transmission display | |
| CN104713489B (en) | A kind of three-dimensional moire interferometer and material surface measuring method | |
| CN107941168A (en) | Reflective striped surface shape measurement method and device based on speckle location position | |
| CN108195314B (en) | Reflective striped three dimension profile measurement method based on more field stitchings | |
| CN107957251A (en) | Reflecting sphere generalization detection method based on computer-assisted correction | |
| CN103471561B (en) | A kind of three-dimensional small-angle and method | |
| CN113280755B (en) | Large-curvature mirror surface three-dimensional shape measuring method based on curved surface screen phase deflection | |
| CN113899321A (en) | Mirror surface object three-dimensional shape measuring method and system with concave mirror auxiliary imaging | |
| CN105180840A (en) | Method and device for measuring mirror shape of large-diameter concave mirror face based on color double-frequency fringe reflection | |
| CN108151674A (en) | A kind of method and apparatus for improving optical detecting instrument precision | |
| Maestro-Watson et al. | LCD screen calibration for deflectometric systems considering a single layer refraction model | |
| CN109458959A (en) | A kind of change inclination angle phase shift grazing-incidence interferometer measuring device and method | |
| CN112033304B (en) | System and method for detecting three-dimensional surface shape of mirror surface object based on stripe deflection |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20180907 |
|
| RJ01 | Rejection of invention patent application after publication |