CN113720279B - Method and device for measuring nanoradian-level three-dimensional angle based on spatial light modulation - Google Patents
Method and device for measuring nanoradian-level three-dimensional angle based on spatial light modulation Download PDFInfo
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- CN113720279B CN113720279B CN202110876134.XA CN202110876134A CN113720279B CN 113720279 B CN113720279 B CN 113720279B CN 202110876134 A CN202110876134 A CN 202110876134A CN 113720279 B CN113720279 B CN 113720279B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
- G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
- G01B11/272—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
Abstract
The invention belongs to the technical field of precision measurement and the field of optical engineering, and particularly relates to a method and a device for measuring a nanoradian order three-dimensional angle based on spatial light modulation; the device consists of a semiconductor laser light source, a convex lens, a multi-slit diaphragm, a spectroscope, a polarizing spectroscope, a turning mirror, a transmission-type spatial light modulator, a collimation objective lens group, an area array CCD, a four-quadrant position detector, a fixed plane reflector and a reflection target; the method endows the reflecting target with asymmetry in the optical axis direction, so that the measuring beam carries pitch angle and yaw angle information of the measured object and is sensitive to roll angle change of the measured object, and the instrument device has the capability of detecting three-dimensional angle change of the measured object; because the invention utilizes the collimating objective lens group to greatly improve the focal length of the objective lens, the invention has the technical advantage that the angle limit resolution reaches the magnitude of nano radian under the same measuring range; the drift amount feedback is carried out by utilizing the convex lens and the multi-slit diaphragm and simultaneously utilizing the four-quadrant position detector and the transmission type spatial light modulator, the stability of the system is improved to ten-nanometer radian magnitude, and therefore the problem that the limit resolution of the autocollimator is limited by the drift amount of the light beam is solved. In addition, the system device designed by the invention has the technical advantages of small structure volume, high measurement precision and high measurement frequency response.
Description
Technical Field
The invention belongs to the technical field of precision measurement, and particularly relates to a method and a device for measuring a nanoradian order three-dimensional angle based on spatial light modulation.
Background
In the fields of precision measurement technology, optical engineering, advanced scientific experiments and high-end precision equipment manufacturing, a technology for measuring an auto-collimation angle with high resolution, high precision and high stability in a large working range is urgently required. It supports the development of technical and instrumental equipment in the above mentioned fields.
In the field of precision measurement technology and instruments, the autocollimator is combined with the circular grating, and can perform any line angle measurement; the autocollimation technology is combined with the polyhedral prism, so that the surface angle measurement and the roundness measurement can be performed; the maximum working distance is from several meters to hundreds of meters; the resolution was from 0.1 to 0.01 arcsec.
In the fields of optical engineering and advanced scientific experiments, an autocollimator is combined with two-dimensional mutually perpendicular circular gratings, so that the spatial angle can be measured; the position reference is formed by two paths of autocollimators, and the included angle or the parallelism of every two optical axes can be measured. The angular operation ranges from tens of arcseconds to tens of angular minutes.
In the field of manufacturing of advanced scientific experimental devices and high-end precision equipment, the autocollimator can be used for measuring the angular rotation precision of the advanced scientific experimental device and the high-end precision equipment on the basis of rotary motion, and measuring the spatial linear precision of a linear motion reference and the parallelism and perpendicularity of every two motion references.
The auto-collimation technology has the advantages of non-contact, high measurement precision, convenience in use and the like, and is widely applied to the fields.
As shown in fig. 1, the conventional autocollimator includes a laser light source 1, a first convex lens 41, a first beam splitter 2, and an image sensor 3; the light beam emitted by the laser light source 1 is collimated into parallel light beams by the convex lens 41 and then enters the reflecting surface of the object 51 to be measured; the light beam reflected from the reflecting surface of the object 51 is imaged by the image sensor 3. Under the structure, the light beam reflected from the surface of the measured object 51 only carries the spatial angle information of two axes of the measured object; the focal length of the collimating lens of the autocollimator is generally 500mm, the limit displacement resolution of a common sensor is 30-50 nm, and meanwhile, the limit resolution of measurement is seriously influenced by instability of measurement due to the large drift of a laser light source. Due to the limitation of the conditions, when the device measures the spatial angle information of the measured object, the device cannot measure the angle information of the measured object rotating around the optical axis direction, and only can measure the angle information of other two axes; meanwhile, when the device is used for measuring the spatial angle information of a measured object, the resolution bottleneck of 0.003 arc second (ten-nanometer radian magnitude) is difficult to break through.
In summary, the system has the following three problems:
firstly, because the reflection target of the autocollimator is only sensitive to the spatial angle information of two axes of the measured object, and the measuring beam does not carry the roll angle information rotating around the optical axis, the device does not have the capability of measuring the spatial three-dimensional angle information of the object;
secondly, the focal length of a collimating objective lens group of the autocollimator is short, and the ultimate displacement resolution of the traditional displacement sensor in a wide range is low, so that the device is difficult to achieve the high angular resolution of 0.001 arc second (nano radian order);
thirdly, the laser source of the traditional autocollimation technology has beam drift, and the angular drift and the horizontal drift of the beam seriously affect the stability of the autocollimation, thereby limiting the limit resolution of the autocollimation. After the laser light source is collimated by the convex lens, the collimation precision can only reach 10 percent due to the drift amount of the laser light source-7Radian order (hundredth radian order). The noise caused by the instability of the light source seriously limits the improvement of the limit resolution of the autocollimator.
Therefore, the traditional auto-collimation technology cannot achieve high angular resolution of a nano radian order in the traditional measurement range while not having three-dimensional angle information measurement capability.
Disclosure of Invention
The invention discloses a method and a device for measuring a three-dimensional angle of a nanoradian order based on spatial light modulation, aiming at the problems that the traditional auto-collimation angle measuring device cannot achieve high angle resolution of the nanoradian order in the traditional measuring range and does not have the capability of measuring three-dimensional angle information.
The method uses a four-quadrant position detector as a feedback detection module at the light source emergent end to detect the drift amounts of the horizontal drift and the angular drift generated by a light source in the device in real time and high precision; the spatial light modulator is used as a feedback execution module, closed-loop feedback control is carried out in real time according to the measured drift amount, light spots emitted by the light source are always controlled at the central position of the four-quadrant position detector, and meanwhile programmable control is carried out on the spatial amplitude distribution of the light intensity of the light source, so that the drift amount of the light source is directly reduced, and the stability of the light intensity of the light source on the spatial distribution is improved. Experiments show that the method controls the flat drift and the angle drift of the light source to be ten-nanometer radian magnitude in real time, and solves the problem that the drift of the light beam limits the ultimate resolution of the autocollimator;
meanwhile, the method utilizes the collimating objective lens group to enlarge the focal length of the collimating objective lens of the angle measuring device to 3-4 times, and further improves the limit angle resolution of the whole system to the magnitude of nano radian. Experiments show that the method can realize the angular resolution of one thousandth of an arc second within the range of three hundred arc seconds, and solve the problem that the autocollimator cannot achieve the high angular resolution of a nanoradian order within the traditional measurement range;
the invention uses a reflection target and a fixed plane reflector as an object space three-dimensional corner detection unit. The structural arrangement endows the reflecting target with asymmetry in the optical axis direction, so that the measuring beam carries pitch angle and yaw angle information of a measured object and is sensitive to a roll angle of the measured object rotating around the optical axis direction, an instrument device has three-dimensional angle measuring capacity for measuring the roll angle of the measured object around the optical axis and the pitch angle and yaw angle of the measured object vertical to the optical axis, and the problem that an autocollimator does not have the three-dimensional angle information measuring capacity is solved;
therefore, compared with the traditional auto-collimation measuring device, the auto-collimation measuring device has the technical advantages of high angle resolution of nano radian magnitude and three-dimensional angle information measuring capability under the condition of the same measuring range.
The purpose of the invention is realized as follows:
the device comprises a semiconductor laser light source, a first convex lens, a fourth convex lens, a first concave lens, a multi-slit diaphragm, a polaroid, a first spectroscope, a second spectroscope, a first polarizing spectroscope, a second polarizing spectroscope, a first turning mirror, a second turning mirror, a first planar array CCD, a second planar array CCD, a four-quadrant position detector, a planar reflector, a fixed planar reflector and a transmission-type spatial light modulator; the semiconductor laser light source is collimated by the fourth convex lens, and after being transmitted by the transmission type spatial light modulator, the semiconductor laser light source is incident to the multi-slit diaphragm in parallel; the multi-slit diaphragm is used as an object plane, and emitted measuring light is transmitted by the polaroid to be changed into linearly polarized light; linearly polarized light reflected by the second beam splitter is vertically incident to the four-quadrant position photoelectric detector to serve as a drift amount feedback detection unit; linearly polarized light transmitted by the second spectroscope is vertically incident to the collimating objective lens group to be collimated into parallel light beams after being refracted by the first refracting mirror and the second refracting mirror, and the parallel light beams are incident to the reflecting target; one path of light passes through a first polarization spectroscope in the reflection target and is incident on a plane reflector in the reflection target, and the reflected light beam is transmitted by the first polarization spectroscope in the reflection target, returns along the original path of the light path, is transmitted by a second polarization spectroscope at the measuring end and is collected and imaged by a first planar array CCD; the other path of the reflected light beam is reflected by a first polarization beam splitter in the reflection target and enters a fixed plane reflector, and the reflected light beam is reflected by the first polarization beam splitter in the reflection target, returns along the original path of the light path, is reflected by a second polarization beam splitter at the measuring end and is collected and imaged by a second planar array CCD;
the transmission type spatial light modulator is used for modulating the measuring light to enable the measuring light to vertically enter the multi-slit diaphragm;
the multi-slit diaphragm is a transmission diaphragm consisting of two groups of three parallel equidistant equal-width linear slits, the two groups of linear slits are perpendicular to each other, and a semiconductor laser light source is collimated by a fourth convex lens and then irradiates the multi-slit diaphragm, so that two groups of perpendicular three parallel equidistant equal-width linear light spots are an object of the device, and light beams emitted by the two groups of perpendicular three parallel equidistant equal-width linear light spots are measuring light of the device;
or
The multi-slit diaphragm is a transmission diaphragm consisting of two groups of four parallel equidistant equal-width linear slits, the two groups of linear slits are perpendicular to each other, and a semiconductor laser light source is collimated by a fourth convex lens and then irradiates the multi-slit diaphragm, so that two groups of perpendicular four parallel equidistant equal-width linear light spots are an object of the device, and light beams emitted by the two groups of perpendicular four parallel equidistant equal-width linear light spots are measuring light of the device;
the polarizing film can adjust the polarization direction of the laser light source, and the light source polarization direction passing through the polarizing film is different from the two mutually perpendicular polarization directions of the first polarizing beam splitter in the reflection target. The polaroid can adjust the light intensity of the light spots of the measuring light received by the first area array CCD and the second area array CCD, so that two paths of the measuring end are kept consistent;
the reflecting target comprises a first polarizing spectroscope and a plane reflector and is arranged on the measuring surface of the measured object; the fixed plane reflector is independent of the reflecting target, is not connected with the reflecting target and the measured object, and is fixed on the same measuring base fixed with the light source, the spectroscope, the sensor and the collimating lens group. When the measured object rotates in a three-dimensional angle, the reflecting target rotates in the same three-dimensional angle with the measured object, and the fixed reflector and other parts of the measuring device are fixed on the measuring base and do not move;
the four-quadrant position detector acquires the real-time drift amount of the semiconductor laser light source, corrects the measurement result and further improves the stability of the system device;
the collimating objective lens group consists of a first convex lens and a first concave lens to form a telephoto objective lens group, and the focal length of the telephoto objective lens group is far greater than that of the first convex lens, so that the limiting angle resolution of the autocollimator is improved;
the first turning mirror and the second turning mirror are arranged in parallel and have a fixed small angle with the main optical axis, so that the long-focus optical path of the system device can be folded, and the space size of the system is reduced.
A method for measuring the nanoradian order three-dimensional angle based on the spatial light modulation, which is realized on the above nanoradian order three-dimensional angle measuring device based on the spatial light modulation, comprises the following steps:
a, fixing a reflection target to the surface of a measured object, and placing a fixed reflector to enable the mirror surface of the fixed reflector to be parallel to the emergent surface of a first polarization spectroscope in the reflection target;
b, lightening a semiconductor laser light source, adjusting the positions of the object to be measured and the fixed reflector, and enabling the light spots received by the first area array CCD and the second area array CCD to be positioned at the center of the sensor so as to fix the position of the fixed reflector;
c, observing the light spot brightness degree of the first area array CCD and the second area array CCD, and adjusting the rotation angle of the polaroid to enable the light intensity received by the two image sensors to be consistent;
d, when the four-quadrant position detector outputs the light spot displacement drift amounts E1 and E2 of the semiconductor laser light source, the transmission-type spatial light modulator adjusts the light beam direction of the semiconductor laser light source to enable the light spot displacement drift amounts E1 and E2 to be 0 all the time;
step e, the reflecting target rotates three-dimensionally along with the object to be measured, the first area array CCD outputs the displacement value of the light beam facula reflected by the plane reflector in the reflecting target, wherein the displacement value of the facula from the center of the sensor is decomposed into S1 and S2, the second area array CCD outputs the displacement value of the light beam facula reflected by the fixed plane reflector, and the displacement value of the facula from the center of the image sensor is S3;
step f, calculating beta and gamma according to S1= f · tan (2 beta) and S2= f · tan (2 gamma) by using the displacements S1 and S2 of the first area array CCD light spot, wherein the beta and the gamma are angles of clockwise rotation of the measured object around the y axis and the z axis;
step g, calculating and obtaining theta according to S3= f · tan (theta) by using the displacement S3 of the second area array CCD light spot, wherein theta is an included angle between one path of light beam return light reflected by the first polarization beam splitter and an optical axis;
and h, calculating according to alpha = G (theta, beta, gamma) to obtain alpha, wherein alpha is an angle of clockwise rotation of the object to be detected around the x axis, and G represents a function. And finally obtaining angles alpha, beta and gamma of the clockwise rotation of the object to be measured around the x, y and z axes.
Has the beneficial effects that:
1. aiming at the problem that the traditional auto-collimation angle measuring device does not have high measuring stability, the method for measuring the nano radian scale three-dimensional angle based on the spatial light modulation is provided. The method uses a four-quadrant position detector as a feedback detection module at the light source emergent end to detect the drift amounts of the horizontal drift and the angular drift generated by a light source in the device in real time and high precision; the spatial light modulator is used as a feedback execution module, closed-loop feedback control is carried out in real time according to the measured drift amount, light spots emitted by the light source are always controlled at the central position of the four-quadrant position detector, and meanwhile, programmable control is carried out on the spatial amplitude distribution of the light intensity of the light source, so that the drift amount of the light source is directly reduced, and the stability of the light intensity of the light source on the spatial distribution is improved; finally, the flat drift and the angle drift of the light source are controlled to be ten-nanometer radian magnitude, and the problem that the limit resolution of the autocollimator is limited due to the drift of the light beam is solved, which is one of the innovation points of the invention different from the prior art;
2. compared with the traditional measuring device, the device provided by the invention utilizes the collimating objective lens group to enlarge the focal length of the collimating objective lens of the angle measuring device to 3-4 times, so that the limit angle resolution of the whole system is improved to a nano radian order. The problem that the autocollimator cannot achieve high angular resolution of a nanoradian order in the traditional measurement range is solved, and the autocollimator is different from the second innovation point of the prior art;
3. aiming at the problem that the traditional auto-collimation angle measuring device does not have the capability of measuring three-dimensional angle information, the invention uses a reflection target and a fixed plane reflector as an object space three-dimensional corner detection unit. The structural arrangement endows the reflecting target with asymmetry in the optical axis direction, so that the measuring beam carries pitch angle and yaw angle information of a measured object and is sensitive to the roll angle of the measured object rotating around the optical axis direction, the instrument device has three-dimensional angle measuring capability of measuring the roll angle of the measured object around the optical axis and the pitch angle and yaw angle of the measured object vertical to the optical axis, and the problem that the autocollimator does not have three-dimensional angle information measuring capability is solved.
In addition, the invention has the following technical advantages:
firstly, a first turning mirror and a second turning mirror are selected to fold a long-focus light path of the system for two times, so that the volume of the system device is reduced, the system device is more suitable for a field measurement environment, and the influence of air fluctuation on a measurement result caused by overlarge size of the system device is avoided;
secondly, selecting a multi-slit diaphragm as an object of the angle measuring device, and simultaneously positioning two groups of three stripe light spots on each area array CCD to improve the measuring stability of the system and the measuring precision of the angle measuring device;
and thirdly, the fixed plane reflector is selected as a third-dimensional angle sensing device, the structure is simple, and the sensing principle of the fixed plane reflector is basically consistent with that of the other three-dimensional angle sensing device around two axes vertical to the optical axis, so that the rotation angles of the fixed plane reflector around the optical axis and the other two axes vertical to the two axes of the optical axis keep high measurement accuracy of the same magnitude.
Drawings
Fig. 1 is a schematic structural view of a conventional self-collimation angle measuring apparatus.
Fig. 2 is a schematic structural diagram of a first specific embodiment of a nanoradian-level three-dimensional angle measuring device based on spatial light modulation.
Fig. 3 is a schematic structural diagram of two kinds of multi-slit diaphragms 8 in the first embodiment.
Fig. 4 is a schematic structural diagram of a second specific embodiment of a nanoradian-level three-dimensional angle measuring device based on spatial light modulation.
Fig. 5 is a schematic structural diagram of a third specific embodiment of a nanoradian-level three-dimensional angle measuring device based on spatial light modulation.
In the figure: the device comprises a laser light source 1, a first spectroscope 2, an image sensor 3, a collimating objective lens group 4, a first convex lens 41, a first concave lens 42, a second concave lens 43, a second convex lens 44, a third convex lens 45, a reflecting target 5, a plane mirror 51, a first polarizing spectroscope 52, a semiconductor laser light source 6, a fourth convex lens 7, a multi-slit diaphragm 8, a polarizing plate 9, a second polarizing spectroscope 10, a first planar array CCD11, a second planar array CCD12, a second planar array spectroscope 13, a four-quadrant position detector 14, a first turning mirror 15, a second turning mirror 16, a fixed planar reflector 17 and a transmissive spatial light modulator 18.
DETAILED DESCRIPTION OF EMBODIMENT (S) OF INVENTION
The following describes in further detail specific embodiments of the present invention with reference to the accompanying drawings.
Detailed description of the preferred embodiment
The embodiment is based on a three-dimensional angle measuring device of a nano radian magnitude of spatial light modulation.
The structural schematic diagram of the three-dimensional angle measuring device based on the spatial light modulation in the magnitude of nanoradians of the embodiment is shown in fig. 2. The angle measuring device comprises a first spectroscope 2, a collimation objective lens group 4 (a first convex lens 41 and a first concave lens 42), a reflection target 5 (a plane reflector 51 and a first polarization spectroscope 52), a semiconductor laser light source 6, a fourth convex lens 7, a multi-slit diaphragm 8, a polaroid 9, a second polarization spectroscope 10, a first planar array CCD11, a second planar array CCD12, a second spectroscope 13, a four-quadrant position detector 14, a first turning mirror 15, a second turning mirror 16, a fixed plane reflector 17 and a transmission-type spatial light modulator 18.
The semiconductor laser light source 6 is collimated by the second convex lens 7, transmitted by the transmission type spatial light modulator 18 and then parallelly incident to the multi-slit diaphragm 8; the multi-slit diaphragm 8 is used as an object plane, and the emitted measuring light is transmitted through the polaroid 9; linearly polarized light reflected by the second beam splitter 13 is vertically incident on the four-quadrant position photoelectric detector 14 to serve as a drift amount feedback detection unit; the linearly polarized light transmitted by the second beam splitter 13 is collimated into parallel beams by the collimating objective lens group 4 after being deflected by the first deflecting mirror 15 and the second deflecting mirror 16, and then is incident on the reflective target 5; one path of light passes through a first polarization beam splitter 52 in the reflection target 5 and enters a plane reflector 51 in the reflection target 5, and the reflected light beam is transmitted by the first polarization beam splitter 52 in the reflection target 5, returns along the original path of the light path, is transmitted by a second polarization beam splitter 10 at the measuring end, and is collected and imaged by a first array CCD 11; the other path is reflected by a first polarization spectroscope 52 in the reflection target and enters a fixed plane reflector 17, the reflected light beam is reflected by the first polarization spectroscope 52 in the reflection target, returns along the original path of the light path, is reflected by a second polarization spectroscope 10 at the measuring end and is collected and imaged by a second planar array CCD 12;
the multi-slit diaphragm 8 is a transmission diaphragm consisting of two groups of three parallel equidistant equal-width linear slits, the two groups of linear slits are perpendicular to each other, and the semiconductor laser light source 6 is collimated by the fourth convex lens 7 and then irradiates the multi-slit diaphragm 8, so that two groups of perpendicular three parallel equidistant equal-width linear light spots are an object of the device, and light beams emitted by the light spots are measuring light of the device;
or
The multi-slit diaphragm 8 is a transmission diaphragm consisting of two groups of four parallel equidistant equal-width linear slits, the two groups of linear slits are perpendicular to each other, and the semiconductor laser light source 6 is collimated by the fourth convex lens 7 and then irradiates the multi-slit diaphragm 8, so that two groups of perpendicular four parallel equidistant equal-width linear light spots are an object of the device, and light beams emitted by the two groups of perpendicular four parallel equidistant equal-width linear light spots are measuring light of the device;
the transmissive spatial light modulator 18 is placed between the fourth convex lens 7 and the multi-slit diaphragm 8, and is used for modulating the measuring light to enable the measuring light to vertically enter the multi-slit diaphragm 8;
the reflection target 5 comprises a first polarization beam splitter 52 and a plane reflector 51, which are installed on the measurement surface of the object to be measured, so that the spatial three-dimensional angle change of the cooperation target 5 is the spatial three-dimensional angle change of the object to be measured; the fixed plane reflector 17 is independent of the reflection target, is not connected with the reflection target 5 and the measured object, and is fixed on the measuring base;
the collimating objective lens group 4 consists of a first convex lens 41 and a first concave lens 42; the first area array CCD11 and the second area array CCD12 are arranged at the focal plane of the collimating objective lens group 4 and are conjugated with the position of the multi-slit diaphragm 8; when the reflecting target 5 does not generate three-dimensional angle change, the centers of light spots collected by the first planar array CCD11 and the second planar array CCD12 are both at the geometric center position of the sensor; the four-quadrant position detector 14 is arranged behind the fourth spectroscope 13 and is used for collecting the real-time drift amount of the semiconductor laser light source 6;
the first turning mirror 15 and the second turning mirror 16 are parallel to each other and have a fixed small angle with the main optical axis.
The measurement principle is as follows:
if the spatial three-dimensional corner of the measured object is measured, firstly, a spatial coordinate system of the three-dimensional corner of the reflection target 5 needs to be defined: setting the direction of an optical axis as an x-axis, the downward direction as a y-axis and the outward direction of the surface of the vertical reflection target 5 as a z-axis; and the spatial three-dimensional rotation angles of the reflective target 5 are defined as alpha, beta and gamma which rotate around the x axis, the y axis and the z axis in the clockwise direction respectively.
Next, the reflective target 5, which includes the first polarization beam splitter 52 and the plane mirror 51, is fixed on the surface of the object to be measured, so that the spatial three-dimensional angle change of the reflective target 5 is the spatial three-dimensional angle change of the object to be measured. The fixed plane mirror 17 is not connected to the reflective target 5, and is fixed to the measurement base.
When the object to be measured rotates around the x axis, the y axis, and the z axis clockwise by angle a, β, and γ respectively, thereby generating spatial three-dimensional angular rotation, the reflective target 5 also rotates around the x axis, the y axis, and the z axis clockwise by angle a, β, and γ respectively, and the spatial position of the fixed plane mirror 17 is unchanged.
The four-quadrant position detector 19 measures the drift amount of the semiconductor laser light source 6 in real time, and the light beam spot and the central position of the four-quadrant position detector 14 respectively generate displacement drift amounts E1 and E2; the transmissive spatial light modulator 18 adjusts the light beam direction of the light source so that the spot displacement drift amounts E1, E2 are always 0.
The light beam incident on the plane mirror 51 in the reflective target 5 is transmitted by the first polarization beam splitter 52, and the plane mirror 51 rotates with the object to be measured in a three-dimensional space angle, so that the light beam reflected by the plane mirror 51 and the original light beam are deflected at angles of 2 β and 2 γ. The principle of the measurement of the traditional autocollimator is consistent, the light beam is converged on the first planar array CCD11, and the light beam spots and the central position of the image sensor generate displacements S1 and S2 respectively.
And satisfies the following relationship, S1-E1= f · tan (2 β), S2-E2= f · tan (2 γ), and f is the focal length of the quasi-straight objective lens group 4.
Therefore, the angles beta and gamma of the rotation of the measured object around the y axis and the z axis can be calculated according to the displacements S1 and S2 of the light spots on the first planar array CCD11 and the central position of the sensor.
The light beam incident on the fixed plane reflector 17 is reflected by the first polarization beam splitter 52, and because the first polarization beam splitter 52 rotates with the object to be measured in a three-dimensional angle, the light beam reflected by the fixed plane reflector 17 is reflected by the first polarization beam splitter 52 to deflect with the original light beam at an angle theta, the light beam is converged on the second area array CCD12, and the light spot of the light beam and the central position of the sensor generate a displacement S3.
And satisfies the following relationship, S3-E1= f · tan (θ), f being the focal length of the quasi-straight objective lens group 4.
The spatial geometry yields θ = F (α, β, γ), and similarly, α = G (θ, β, γ), F, G represent two functions, respectively.
Therefore, according to the displacement S3 between the light spot on the second area array CCD12 and the central position of the sensor, the spatial included angle theta between the light beam and the original light beam can be calculated; and then, according to a formula alpha = G (theta, beta, gamma) and the previously obtained beta and gamma values, an angle alpha can be solved, so that angles alpha, beta and gamma of the object to be measured rotating around an x axis, a y axis and a z axis are obtained, and spatial three-dimensional corner information of the object to be measured is obtained.
The embodiment of the method for measuring the three-dimensional angle of the magnitude of nanoradians based on the spatial light modulation comprises the following steps:
step a, fixing a reflection target 5 on the surface of a measured object, and placing a fixed plane reflector 17 to enable the mirror surface of the reflector to be parallel to the emergent surface of a first polarization spectroscope 52 in the reflection target 5;
b, lighting the semiconductor laser light source 6, adjusting the positions of the object to be measured and the fixed plane reflector 17, enabling the light spots received by the first area array CCD11 and the second area array CCD12 to be positioned at the center of the sensor, and enabling the position of the fixed plane reflector 17 to be fixed;
c, observing the light spot brightness degree of the first area array CCD11 and the second area array CCD12, and adjusting the rotation angle of the polaroid 9 to enable the light intensity received by the two image sensors to be consistent;
d, when the four-quadrant position detector 14 outputs the light spot displacement drift amounts E1 and E2 of the semiconductor laser light source 6, the transmission-type spatial light modulator 18 adjusts the light beam direction of the semiconductor laser light source 6 to enable the light spot displacement drift amounts E1 and E2 to be 0 all the time;
step e, the reflection target 5 rotates three-dimensionally along with the object to be measured, the first planar array CCD11 outputs the displacement value of the light beam spot reflected by the planar reflector in the reflection target, wherein the distance between the light spot and the center of the sensor is decomposed into S1 and S2, the second planar array CCD12 outputs the displacement value of the light beam spot reflected by the fixed planar reflector, and the distance between the light spot and the center of the image sensor is S3;
step f, calculating beta and gamma by using the displacements S1 and S2 of the light spot of the first area array CCD11 according to S1= f · tan (2 beta) and S2= f · tan (2 gamma), wherein the beta and the gamma are angles of clockwise rotation of the measured object around the y axis and the z axis;
step g, calculating to obtain θ according to S3= f · tan (θ) by using the displacement S3 of the light spot of the second area array CCD12, where θ is an included angle between the return light of one path of light beam reflected by the first polarization beam splitter 52 and the optical axis;
and h, calculating according to alpha = G (theta, beta, gamma) to obtain alpha, wherein alpha is an angle of clockwise rotation of the object to be detected around the x axis, and G represents a function. And finally obtaining angles alpha, beta and gamma of the clockwise rotation of the measured object around the x, y and z axes.
The innovation point of the invention is that the fourth convex lens 7 is utilized to collimate the light emitted by the semiconductor laser light source 6, the multi-slit diaphragm 8 is used to modulate the measuring light, and the multi-slit diaphragm 8 is used as an object of the system device, so that the influence of angle drift and flat drift is further reduced;
meanwhile, the four-quadrant position detector 14 is used as a feedback detection module to detect the drift amounts of the flat drift and the angle drift generated by the light source in the device in real time and high precision; the transmission-type spatial light modulator 18 is used as a feedback execution module to perform closed-loop feedback control in real time according to the measured drift amount, and the light spot emitted by the light source is always controlled at the central position of the four-quadrant position detector 14; therefore, the horizontal drift and the angular drift of the light source are controlled to be in ten-nanometer radian magnitude in real time, and the problem that the limit resolution of the autocollimator is limited due to the drift of the light beam is solved; compared with the technical means of using the deflection mirror as a feedback execution module, the spatial light modulator can reduce the light source emission drift amount and can also carry out programmable control on the spatial amplitude distribution of the light source light intensity, so that the stability of the light source light intensity on the spatial distribution is improved, and the measurement stability of the device is further improved;
the plane mirror target is replaced by a reflecting target 5 and a fixed plane reflecting mirror 17 to be used as an object space three-dimensional corner detection unit. The structural arrangement endows the reflecting target 5 with asymmetry in the optical axis direction, so that the measuring beam carries the pitch angle and yaw angle information of the measured object and is sensitive to the roll angle of the measured object rotating around the optical axis direction, and the instrument device has the three-dimensional angle measuring capability of measuring the roll angle of the measured object around the optical axis and the pitch angle and yaw angle perpendicular to the optical axis;
meanwhile, the device of the invention uses the first convex lens 41 and the first concave lens 42 to form the collimating objective lens group 4. In the structure, the collimating objective group enlarges the focal length of the collimating objective of the angle measuring device to 3-4 times, so that the ultimate angle resolution of the whole system is improved to the magnitude of nano radian, and finally the high angle resolution of the system reaching the magnitude of nano radian in the traditional measuring range is realized.
Therefore, compared with the traditional self-collimation angle measuring device, the three-dimensional angle measuring device has the three-dimensional angle information measuring capability, and has the technical advantages that the angle limit resolution reaches the magnitude of nanoradian and the measurement stability is high.
Detailed description of the invention
The embodiment is an embodiment of a nanoradian-level three-dimensional angle measuring device based on spatial light modulation.
The structural schematic diagram of the three-dimensional angle measuring device based on the spatial light modulation in the magnitude of nanoradians of the embodiment is shown in fig. 4. On the basis of the first embodiment, a second concave lens 43, a second convex lens 44 and a third convex lens 45 are added to the collimator objective lens group 4 in the present embodiment, as shown in fig. 4.
The embodiment of the method for measuring the three-dimensional angle of the magnitude of nanoradians based on the spatial light modulation comprises the following steps:
step a, fixing a reflection target 5 on the surface of a measured object, and placing a fixed plane reflector 17 to enable the mirror surface of the reflector to be parallel to the emergent surface of a first polarization spectroscope 52 in the reflection target 5;
b, lighting the semiconductor laser light source 6, adjusting the positions of the object to be measured and the fixed plane reflector 17, enabling the light spots received by the first area array CCD11 and the second area array CCD12 to be positioned at the center of the sensor, and enabling the position of the fixed plane reflector 17 to be fixed;
c, observing the light spot brightness degree of the first area array CCD11 and the second area array CCD12, and adjusting the rotation angle of the polaroid 9 to enable the light intensity received by the two image sensors to be consistent;
d, when the four-quadrant position detector 14 outputs the light spot displacement drift amounts E1 and E2 of the semiconductor laser light source 6, the transmission-type spatial light modulator 18 adjusts the light beam direction of the semiconductor laser light source 6 to enable the light spot displacement drift amounts E1 and E2 to be 0 all the time;
step e, the reflection target 5 rotates three-dimensionally along with the object to be measured, the first planar array CCD11 outputs the displacement value of the light beam spot reflected by the planar reflector in the reflection target, wherein the distance between the light spot and the center of the sensor is decomposed into S1 and S2, the second planar array CCD12 outputs the displacement value of the light beam spot reflected by the fixed planar reflector, and the distance between the light spot and the center of the image sensor is S3;
step f, calculating beta and gamma by using the displacements S1 and S2 of the light spot of the first area array CCD11 according to S1= f · tan (2 beta) and S2= f · tan (2 gamma), wherein the beta and the gamma are angles of clockwise rotation of the measured object around the y axis and the z axis;
step g, calculating to obtain θ according to S3= f · tan (θ) by using the displacement S3 of the light spot of the second area array CCD12, where θ is an included angle between the return light of one path of light beam reflected by the first polarization beam splitter 52 and the optical axis;
and h, calculating alpha according to alpha = G (theta, beta, gamma), wherein alpha is an angle of the clockwise rotation of the detected object around the x axis, and G represents a function. And finally obtaining angles alpha, beta and gamma of the clockwise rotation of the object to be measured around the x, y and z axes.
The innovation point of the present invention is that a second concave lens 43, a second convex lens 44 and a third convex lens 45 are added to the collimating objective lens group 4 to form a new collimating objective lens group 4. The novel collimating objective lens group has a plurality of optimized parameters, so that the influence of the aberration of the optical system of the device on the measurement result can be reduced, and the system error of the whole device is reduced.
Detailed description of the preferred embodiment
The embodiment is based on a three-dimensional angle measuring device of a nano radian magnitude of spatial light modulation.
The structural schematic diagram of the three-dimensional angle measuring device based on the spatial light modulation in the magnitude of nanoradians of the embodiment is shown in fig. 5. On the basis of the first embodiment, in this embodiment, a second spectroscope 13 and a four-quadrant position detector 14 are added between the collimating objective lens group 4 and the reflective target 5 as a feedback detection module; in the collimating objective lens group 4, a second concave lens 43, a second convex lens 44 and a third convex lens 45 are added, as shown in fig. 5.
The embodiment of the method for measuring the three-dimensional angle of the magnitude of nanoradians based on the spatial light modulation comprises the following steps:
step a, fixing a reflection target 5 on the surface of a measured object, and placing a fixed plane reflector 17 to enable the mirror surface of the reflector to be parallel to the emergent surface of a first polarization spectroscope 52 in the reflection target 5;
b, lighting the semiconductor laser light source 6, adjusting the positions of the object to be measured and the fixed plane reflector 17, enabling the light spots received by the first area array CCD11 and the second area array CCD12 to be positioned at the center of the sensor, and enabling the position of the fixed plane reflector 17 to be fixed;
c, observing the light spot brightness degree of the first area array CCD11 and the second area array CCD12, and adjusting the rotation angle of the polaroid 9 to enable the light intensity received by the two image sensors to be consistent;
d, when the four-quadrant position detector 14 outputs the light spot displacement drift amounts E1 and E2 of the semiconductor laser light source 6, the transmission-type spatial light modulator 18 adjusts the light beam direction of the semiconductor laser light source 6 to enable the light spot displacement drift amounts E1 and E2 to be 0 all the time;
step e, the reflection target 5 rotates three-dimensionally along with the object to be measured, the first planar array CCD11 outputs the displacement value of the light beam spot reflected by the planar reflector in the reflection target, wherein the distance between the light spot and the center of the sensor is decomposed into S1 and S2, the second planar array CCD12 outputs the displacement value of the light beam spot reflected by the fixed planar reflector, and the distance between the light spot and the center of the image sensor is S3;
step f, calculating beta and gamma according to S1= f · tan (2 beta) and S2= f · tan (2 gamma) by using the displacements S1 and S2 of the light spot of the first area array CCD11, wherein the beta and the gamma are angles of clockwise rotation of the measured object around the y axis and the z axis;
step g, calculating to obtain θ according to S3= f · tan (θ) by using the displacement S3 of the light spot of the second area array CCD12, where θ is an included angle between the return light of one path of light beam reflected by the first polarization beam splitter 52 and the optical axis;
and h, calculating according to alpha = G (theta, beta, gamma) to obtain alpha, wherein alpha is an angle of clockwise rotation of the object to be detected around the x axis, and G represents a function. And finally obtaining angles alpha, beta and gamma of the clockwise rotation of the object to be measured around the x, y and z axes.
The innovation point of the invention is that a second spectroscope 13 and a four-quadrant position detector 14 are added between a collimating objective lens group 4 and a reflecting target 5 as feedback detection modules, which not only measure the drift amount of light beams of a light source in real time, but also measure the beam drift amount caused by the instability of an optical system in real time, and compensate the light source drift amount in real time by controlling a deflection mirror in a closed loop, thereby solving the problems of the light source drift amount and the measurement instability caused by the instability of the optical system.
Claims (4)
1. The device for measuring the nanoradian-level three-dimensional angle based on the spatial light modulation is characterized by comprising a first spectroscope (2), a collimating objective group (4), a reflection target (5), a semiconductor laser source (6), a fourth convex lens (7), a multi-slit diaphragm (8), a polaroid (9), a second polarization spectroscope (10), a first area array CCD (11), a second area array CCD (12), a second spectroscope (13), a four-quadrant position detector (14), a first turning mirror (15), a second turning mirror (16), a fixed plane reflector (17) and a transmission-type spatial light modulator (18); the collimation objective lens group (4) consists of a first convex lens (41) and a first concave lens (42); the reflecting target (5) comprises a first polarizing beam splitter (52) and a plane reflector (51), and the first polarizing beam splitter and the plane reflector are arranged on the measuring surface of the measured object, so that the spatial three-dimensional angle change of the reflecting target (5) is the spatial three-dimensional angle change of the measured object; the fixed plane reflector (17) is independent of the reflection target, is not connected with the reflection target (5) and the measured object, and is fixed on the measuring base;
the semiconductor laser light source (6) is collimated by the fourth convex lens (7), and after being transmitted by the transmission type spatial light modulator (18), the semiconductor laser light source is incident to the multi-slit diaphragm (8) in parallel; the multi-slit diaphragm (8) is used as an object plane, and emitted measuring light is transmitted through the polaroid (9) and the first spectroscope (2) in sequence; linearly polarized light reflected by the second spectroscope (13) vertically enters a four-quadrant position detector (14) to serve as a drift amount feedback detection unit; linearly polarized light transmitted by the second spectroscope (13) is vertically incident on the collimating objective lens group (4) and collimated into parallel light beams after being refracted by the first refracting mirror (15) and the second refracting mirror (16), and the parallel light beams are incident on the reflecting target (5); one path of light passes through a first polarization spectroscope (52) in the reflection target (5) and is incident on a plane reflector (51) in the reflection target (5), and the reflected light beam returns along the original path of the light path after being transmitted by the first polarization spectroscope (52) in the reflection target (5) and is then transmitted by a second polarization spectroscope (10) at the measuring end and is collected and imaged by a first planar array CCD (11); the other path is reflected by a first polarization spectroscope (52) in the reflection target and enters a fixed plane reflector (17), and the reflected light beam is reflected by the first polarization spectroscope (52) in the reflection target, returns along the original path of the light path, is reflected by a second polarization spectroscope (10) at the measuring end and is collected and imaged by a second planar array CCD (12);
the multi-slit diaphragm (8) is a transmission diaphragm consisting of two groups of three parallel equidistant equal-width linear slits, the two groups of linear slits are perpendicular to each other, and a semiconductor laser light source (6) is collimated by a fourth convex lens (7) and then irradiates the multi-slit diaphragm (8), so that two groups of perpendicular three parallel equidistant equal-width linear light spots are an object of the device, and light beams emitted by the light spots are measuring light of the device;
or
The multi-slit diaphragm (8) is a transmission diaphragm consisting of two groups of four parallel equidistant equal-width linear slits, the two groups of linear slits are perpendicular to each other, and the semiconductor laser light source (6) is collimated by the fourth convex lens (7) and then irradiates the multi-slit diaphragm (8), so that two groups of perpendicular four parallel equidistant equal-width linear light spots are an object of the device, and light beams emitted by the light spots are measuring light of the device;
the first area array CCD (11) and the second area array CCD (12) are arranged at the focal plane of the collimating objective lens group (4) and are conjugated with the position of the multi-slit diaphragm (8); when the reflecting target (5) does not generate three-dimensional angle change, the centers of light spots collected by the first area array CCD (11) and the second area array CCD (12) are both at the geometric center position of the sensor; the four-quadrant position detector (14) is arranged behind the second spectroscope (13) and is used for collecting the real-time drift amount of the semiconductor laser light source (6); the transmission type spatial light modulator (18) is arranged between the fourth convex lens (7) and the multi-slit diaphragm (8) and is used for modulating the measuring light to enable the measuring light to vertically enter the multi-slit diaphragm (8);
the first turning mirror (15) and the second turning mirror (16) are arranged in parallel, and a fixed small angle exists between the normal direction of the mirror surface and the incident direction of the light beam.
2. The spatial light modulation-based nanoradian-scale three-dimensional angle measurement device according to claim 1, further comprising a second concave lens (43), a second convex lens (44) and a third convex lens (45);
the second concave lens (43), the second convex lens (44), the third convex lens (45), the first convex lens (41) and the first concave lens (42) jointly form a collimation objective lens group (4).
3. The spatial light modulation-based nanoradian-scale three-dimensional angle measurement device according to claim 1, further comprising a second concave lens (43), a second convex lens (44) and a third convex lens (45);
the second concave lens (43), the second convex lens (44), the third convex lens (45), the first convex lens (41) and the first concave lens (42) jointly form a collimation objective lens group (4);
the second spectroscope (13) is arranged between the collimating objective lens group (4) and the reflecting target (5); the measuring light is split by the second beam splitter (13), the reflected light beam is reflected to the four-quadrant position detector (14) through the second beam splitter (13) to be collected and imaged, and the transmitted light beam is transmitted through the second beam splitter (13) to continue to propagate.
4. The method for measuring the three-dimensional angle of the magnitude of nanoradian based on the spatial light modulation, which is realized on the three-dimensional angle measuring device of the magnitude of nanoradian based on the spatial light modulation according to claim 1, 2 or 3, is characterized by comprising the following steps:
a, fixing a reflection target (5) to the surface of a measured object, and placing a fixed plane reflector (17) to enable the mirror surface of the reflector to be parallel to the emergent surface of a first polarization spectroscope (52) in the reflection target (5);
b, lighting a semiconductor laser light source (6), adjusting the positions of a measured object and a fixed plane reflector (17), enabling light spots received by a first area array CCD (11) and a second area array CCD (12) to be positioned at the center of a sensor, and enabling the position of the fixed plane reflector (17) to be fixed;
c, observing the light spot brightness degree of the first area array CCD (11) and the second area array CCD (12), and adjusting the rotation angle of the polaroid (9) to enable the light intensity received by the two image sensors to be consistent;
d, when the four-quadrant position detector (14) outputs the light spot displacement drift amounts E1 and E2 of the semiconductor laser light source (6), the transmission type spatial light modulator (18) adjusts the light beam direction of the semiconductor laser light source (6) to enable the light spot displacement drift amounts E1 and E2 to be 0 all the time;
step e, the reflection target (5) rotates three-dimensionally along with the measured object, the first area array CCD (11) outputs the displacement value of the light beam and the light spot reflected by the plane reflector in the reflection target, wherein the distance between the light spot and the center of the sensor is decomposed into S1 and S2, the second area array CCD (12) outputs the displacement value of the light beam and the light spot reflected by the fixed plane reflector, and the distance between the light spot and the center of the image sensor is S3;
step f, calculating beta and gamma according to S1= f · tan (2 beta) and S2= f · tan (2 gamma) by using the displacements S1 and S2 of the light spot of the first area array CCD (11), wherein the beta and the gamma are angles of clockwise rotation of the measured object around the axes y and z;
step g, calculating to obtain theta according to S3= f · tan (theta) by using the displacement S3 of the light spot of the second area array CCD (12), wherein theta is an included angle between the return light of one path of light beam reflected by the first polarization beam splitter 52 and the optical axis;
step h, calculating and obtaining alpha according to alpha = G (theta, beta, gamma), wherein alpha is an angle of clockwise rotation of the object to be detected around an x axis, and G represents a function; and finally obtaining angles alpha, beta and gamma of the clockwise rotation of the measured object around the x, y and z axes.
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