CN201569419U - Rapid surface quality measuring device - Google Patents
Rapid surface quality measuring device Download PDFInfo
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- CN201569419U CN201569419U CN2009202000655U CN200920200065U CN201569419U CN 201569419 U CN201569419 U CN 201569419U CN 2009202000655 U CN2009202000655 U CN 2009202000655U CN 200920200065 U CN200920200065 U CN 200920200065U CN 201569419 U CN201569419 U CN 201569419U
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Abstract
The utility model discloses a rapid surface quality measuring device, which comprises two sets of common-path interferometers. One of the interferometers is a reference interferometer for compensating noises, which includes a beam expander (19), a laser (21), a detector (6), a servo control circuit (8) and a compensating piezoelectric ceramic (9), and is specially used for detecting vibrations, air turbulence and other ambient noises and eliminating the influence of interference of such background noises through negative feedback. The other interferometer is a main interferometer for measuring and includes a data acquisition card (1), a computer (2), an image acquisition card (3), three spectroscopes (4, 14 and 15), a camera (5), two objective lenses (7 and 13), a reference reflector (10), an image lens (1), a collimating lens (16), a tunable light filter (17), a white light source (18) and a light filter driving unit (20). The main interferometer adopts the acousto-optic light filter to control optical wavelength emitted thereon, and utilizes large-scale GPGPU-based parallel arithmetic to process generated interference signals, so as to rapidly acquire the three-dimensional features of a tested surface. The utility model can realize real-time measurement and dispenses with mechanical optical distance scanning during measuring, thereby achieving a very high measuring speed (the updating rate is at 1-2 seconds in average and can be increased after optimization); the active optical path compensation technology can reduce the influence of ambient noises on measurement; the measuring precision is controlled at sub-nanometers; and the device dispenses with generally-used costly high-precision translation stages, thereby achieving lower manufacturing cost. The device can be used in processing workshops with higher interference.
Description
Technical field
The utility model relates to a kind of optical metrological instrument, especially relates to a kind of accelerated surface apparatus for measuring quality.
Background technology
Surface quality detects the performance that affects most industrial products, and the engineering part more than 90% lost efficacy from the surface according to investigations.Therefore, the detection of in product processing surperficial quality pack being drawn together face shape, waviness, roughness etc. can control job sequence exactly so that product obtains best quality and serviceable life, and reduces rejection rate.For high-accuracy processing, on-line measurement seems and is even more important.In addition, online surface is detected the wear condition that also can in time find process tool and was changed before it damages.Because the environmental restraint in the process generally requires online test method must have noncontact, fast, the jamproof characteristics of speed.
At present, online detection is mostly based on optical means, wherein optical scattering method is a kind of technology of comparative maturity, its utilizes the scattered light incide the laser of measured surface on it the getting in touch of aspect such as scattering direction, polarization state, speckle contrast and surfaceness, and can obtain the Roughness Information of measured surface comparatively exactly by statistical study.But its shortcoming is its surface measurements waviness and face shape quantitatively, and its validity usually is subjected to the influence of measured workpiece processing technology.
Interferometer then can remedy the above-mentioned shortcoming of scattering method well, has the characteristics of high precision, quantitative test, can obtain the information such as face shape, waviness, roughness of measured surface exactly.Wherein white light interferometer and length scanning interferometer can obtain the Measurement Resolution of nm level, and owing to having the low-coherent light of employing or tunable optical as light source, there is not the phase place uncertain problem of single frequency laser interferometer, can measures rough surface and structural plane.But, also need to solve two important problem, i.e. antijamming capability and measuring speed if be applied to on-line measurement.On-line measurement often need be carried out at more tangible processing environments such as vibrations, air turbulences, and therefore the antijamming capability to measurement mechanism requires than higher, and general optical interdferometer is difficult to be competent at; Simultaneously, in order to shorten the production time, to improve working (machining) efficiency, require interference technique to finish in the short period of time, preferably can bear results in the several seconds, this has all proposed challenge to white light interferometer and length scanning interferometer.
Summary of the invention
The purpose of this utility model provides a kind of accelerated surface apparatus for measuring quality, it comprises the two covers interferometer of light path altogether, wherein a cover comfort noise reference interferometer is to be specifically designed to noises such as vibration in the testing environment, air turbulence, eliminates the influence of these ground unrests interference by negative feedback.Another set of measurement adopts acousto-optic filter control to incide the optical wavelength of interferometer with the main interference instrument, utilizes based on the large-scale parallel computing of GPGPU the interference signal that produces is handled, and can promptly obtain the three-dimensional appearance of measured surface.
The technical solution adopted in the utility model is:
Comprise the interferometer composition that two covers are coupled, wherein:
1) cover is measured and is used the main interference instrument: comprise data collecting card, computing machine, image pick-up card, three spectroscopes, camera, two object lens, reference mirror, imaging len, collimating mirror, tunable filter, white light source and light filter driver element; The incident light that white light source sends, through tunable filter, become directional light behind the collimating mirror, behind first spectroscope to the second spectroscope, incident light is divided into two-way, one road light incides on the reference mirror through first object lens, another road second object lens incide the sample surface, again form in the stack of the second spectroscope place after inciding the lip-deep light of reference mirror and sample and being reflected respectively and interfere, interference light is through imaging len, again be divided into two-way light behind the 3rd spectroscope, spectroscope light full impregnated mistake that white light is sent wherein, through image pick-up card, obtain the face shape of sample after the Computer Processing, the output wavelength of tunable filter is controlled via the output frequency that data collecting card 1 changes the light filter driver element by computing machine;
2) a cover comfort noise reference interferometer: comprise beam expander, laser instrument, detector, servo control circuit and compensation piezoelectric ceramics; The laser that laser instrument sends is coupled with white light source behind first spectroscope through beam expander, the laser that laser instrument is sent is reflected onto detector at the 3rd spectroscope place and changes photosignal into, and servo control circuit utilizes this photosignal control compensation piezoelectric ceramics to suppress the interference of neighbourhood noise to measuring.
Described servo control circuit adopts PID closed-loop control unit.
Described light filter driver element is to adopt to select the light of different wave length to pass through light filter by the electric signal that light filter is applied certain frequency.
The beneficial effect that the utlity model has is:
1. measure in real time: because acousto-optic filter has the extremely short reaction time (microsecond level), and need not mechanical light path scanning in the measuring process, can reach very fast measuring speed.Average 1-2 just can upgrade once second, and is faster through being expected after optimizing.Can save a large amount of quality time for processing.
2. anti-interference: various interference can't be avoided in the processing environment, and the general interferometer measurement time is long, and is very sensitive to noises such as vibrations.This programme improves measuring speed on the one hand, adds initiatively optical path compensation technology, can reduce neighbourhood noise as far as possible to the influence that measurement brings, and can be used for disturbing in the more job shop.
3. high precision: can reach the measuring accuracy of Subnano-class, satisfy the surperficial accuracy of detection demand in the ultraprecise process substantially.
4. cost is comparatively cheap: the high precision translational platform that has saved common costliness.
Description of drawings
Accompanying drawing is a structural principle synoptic diagram of the present utility model.
Among the figure: 1, data collecting card, 2, computing machine, 3, image pick-up card, 4, spectroscope, 5, camera, 6, detector, 7, object lens, 8, servo control circuit, 9, compensation piezoelectric ceramics, 10, reference mirror, 11, imaging len, 12, sample, 13, object lens, 14, spectroscope, 15, spectroscope, 16, collimating mirror, 17, tunable filter, 18, white light source, 19, beam expander, 20, the light filter driver element, 21, laser instrument.
Embodiment
As shown in drawings, the utility model comprises the interferometer composition that two covers are coupled, wherein:
1) cover is measured and is used the main interference instrument: comprise data collecting card 1, computing machine 2,3, three spectroscopes of image pick- up card 4,14,15,5, two object lens of camera 7,13, reference mirror 10, imaging len 11, collimating mirror 16, tunable filter 17, white light source 18 and light filter driver element 20; The incident light that white light source 18 sends, through tunable filter 17, become directional light behind the collimating mirror 16, behind first spectroscope, 15 to second spectroscopes 14, incident light is divided into two-way, one road light incides on the reference mirror 10 through first object lens 7, another road second object lens 13 incide sample 12 surfaces, again form in the stack of second spectroscope, 14 places after inciding reference mirror 10 and sample 12 lip-deep light and being reflected respectively and interfere, interference light is through imaging len 11, again be divided into two-way light behind the 3rd spectroscope 4, the light full impregnated mistake sent of 4 pairs of white lights 18 of spectroscope wherein, through image pick-up card 3, computing machine 2 is handled the face shape that the back obtains sample, and the output wavelength of tunable filter 17 is controlled via the output frequency that data collecting card 1 changes light filter driver element 20 by computing machine 2;
2) a cover comfort noise reference interferometer: comprise beam expander 19, laser instrument 21, detector 6, servo control circuit 8 and compensation piezoelectric ceramics 9; The laser that laser instrument 21 sends is coupled with white light source 18 behind first spectroscope 15 through beam expander 19, the laser that laser instrument 21 is sent is reflected onto detector 6 at the 3rd spectroscope 4 places and changes photosignal into, and servo control circuit 8 utilizes this photosignal control compensation piezoelectric ceramics 9 to suppress the interference of neighbourhood noise to measuring.
Described servo control circuit 8 adopts PID closed-loop control unit.As the N1100 type PID controller of Ocean Controls company, it drives compensation piezoelectric ceramics 9 by closed-loop control and changes system's optical path difference, and the photosignal that makes detector 6 obtain keeps stable, to suppress the interference of neighbourhood noise to measuring.
It is to adopt to select the light of different wave length to pass through light filter by the electric signal that light filter 17 is applied certain frequency that described light filter drives Unit 20.64020-200-2ADMDFS-A type light filter driver element as Gooch and Housego company.
Different is with general white light interferometric device, and this measurement mechanism does not rely on light path scanning, without any need for mechanical motion, therefore can realize measuring in real time fast during measurement.Its key point has been to use the acousto-optic optical filtering technique, and stack forms interference to the light that is reflected by measured surface and reference mirror at spectroscope 2 places, enters acousto-optic filter subsequently.Acousto-optic filter has wavelength selection effect, by it being applied different driving frequencies, can make the interference figure of each wavelength shine on the camera successively, by these interference figures are handled the pattern that can obtain measured surface, isolate parameters such as needed surfaceness, waviness, face shape then.
In order to eliminate neighbourhood noise to measuring the influence of reliability and precision, this programme has adopted common road principle.The light source of reference interferometer merges the back with measuring light (white light) to be propagated and is radiated at respectively on measured surface and the reference mirror along identical light path at the dichroscope place, and its interference signal is obtained by detector.Because the two is identical through the path, the noise of two interferometer experience is also identical, these noises can cause measured light intensity of detector or position to change mutually, and this variable quantity can drive the compensation piezoelectric ceramics after by feedback control unit neighbourhood noise is carried out corresponding compensation.
The concrete principle of work of measuring with the main interference instrument is:
The light that sends by white light source 18, only there is the light of specific wavelength to pass through through behind the tunable filter, and this wavelength can be added in light filter by change and drive 20 frequency and regulate, become directional light through behind the collimating mirror 16, by spectroscope 14 incident light is divided into two bundles subsequently, wherein a branch of light incides on the reference mirror 10, other one the tunnel incides sample 12 surfaces, the effect of object lens 7 and object lens 13 is to focus light on the respective surfaces, again stack up at spectroscope 14 places after inciding reference mirror 10 and sample 12 glazings and being reflected respectively to form and interfere, received by camera 5 by imaging len 11 backs, can obtain and carry out follow-up signal Processing by computing machine 2 by image pick-up card 3, obtain the three-dimensional appearance of measured surface, isolate needed surfaceness then, waviness, parameters such as face shape.The wavelength selection of light filter and the interference image collection of camera are by computer control.
Comfort noise with the concrete principle of work of reference interferometer is:
The monochromatic light that is sent by laser instrument 21 enlarges through beam expander 19 and is in white light source at spectroscope 15 behind the spot diameters and is coupled, in order to improve the utilization factor of luminous energy, spectroscope 15 can adopt the high and design high to the reflectivity of optical maser wavelength of dialogue light transmission rate.In the light path between spectroscope 15 and spectroscope 4, laser overlaps with the travel path of white light (through the light after the light filter filtration), is obtained the interference signal of laser at last by detector 6.Because the light path of two interferometers overlaps, environmental interference (as continuing vibration, air turbulence, temperature drift etc.) is also similar to the variation of two interferometer optical path differences, therefore can change the situation of obtaining environmental interference by the light intensity of monitoring detector 6, and the feedback control compensation PZT by servo control circuit 8 offsets the influence that environmental interference is brought, so the utility model can be used in and disturbs in the more job shop.
The processing of interference signal: certain pixel on the camera (x, y) (corresponding to sample surfaces point (x ', y ')) light intensity of detecting can be expressed as:
I(x，y；k)＝a(x，y；k)+b(x，y；k)cos(2πkh(x，y))， (1)
A in the formula (x, y, k) and b (x, y k) represent the contrast of background light intensity and interference fringe respectively, and k is inverse 1/ λ of wave number and optical wavelength, h (x, y) two arm optical path differences of expression interferometer.
The position phase of interference signal
Provide by following formula
Can continuously change the wave number that enters interferometer by continuously changing the signal frequency that is added in tunable filter, by (2) formula as can be seen, the position of interference signal also can produce mutually and continuously change at this moment,
The variable quantity of position phase is directly proportional with the variable quantity of wave number as can be known, and then (x y) can be expressed as optical path difference h
Calculate the optical path difference that CCD goes up each pixel respectively, then can obtain the each point height relative value of measured surface, thereby obtain the information of measured surface.
In order to improve the processing speed of interference signal, the utility model proposes large-scale parallel algorithm based on general GPU, can improve conversion speed in tens of times of ground.This method compare additive method have do not need special hardware configuration, establish one's own system, advantage such as not obvious increase processing cost, highly versatile.
Claims (3)
1. accelerated surface apparatus for measuring quality is characterized in that: comprise that the interferometer that two covers are coupled forms, wherein:
1) cover is measured and is used the main interference instrument: comprise data collecting card (1), computing machine (2), image pick-up card (3), three spectroscopes (4,14,15), camera (5), two object lens (7,13), reference mirror (10), imaging len (11), collimating mirror (16), tunable filter (17), white light source (18) and light filter driver element (20); The incident light that white light source (18) sends, through tunable filter (17), collimating mirror becomes directional light after (16), through first spectroscope (15) to second spectroscope (14), incident light is divided into two-way, one road light incides on the reference mirror (10) through first object lens (7), another road second object lens (13) incide sample (12) surface, again locating stack at second spectroscope (14) after inciding reference mirror (10) and the lip-deep light of sample (12) and being reflected respectively forms and interferes, interference light is through imaging len (11), the 3rd spectroscope is divided into two-way light after (4) again, spectroscope (4) light full impregnated mistake that white light (18) is sent wherein, through image pick-up card (3), computing machine (2) is handled the face shape that the back obtains sample, and the output wavelength of tunable filter (17) is controlled via the output frequency that data collecting card (1) changes light filter driver element (20) by computing machine (2);
2) a cover comfort noise reference interferometer: comprise beam expander (19), laser instrument (21), detector (6), servo control circuit (8) and compensation piezoelectric ceramics (9); The laser that laser instrument (21) sends is coupled with white light source (18) behind first spectroscope (15) through beam expander (19), the laser that laser instrument (21) is sent is located to be reflected onto detector (6) at the 3rd spectroscope (4) and is changed photosignal into, and servo control circuit (8) utilizes this photosignal control compensation piezoelectric ceramics (9) to suppress the interference of neighbourhood noise to measuring.
2. a kind of accelerated surface apparatus for measuring quality according to claim 1 is characterized in that: described servo control circuit (8) adopts PID closed-loop control unit.
3. a kind of accelerated surface apparatus for measuring quality according to claim 1 is characterized in that: it is to adopt to select the light of different wave length to pass through light filter by the electric signal that light filter (17) is applied certain frequency that described light filter drives (20) unit.
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| Application Number | Priority Date | Filing Date | Title |
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| CN2009202000655U CN201569419U (en) | 2009-11-16 | 2009-11-16 | Rapid surface quality measuring device |
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| CN2009202000655U CN201569419U (en) | 2009-11-16 | 2009-11-16 | Rapid surface quality measuring device |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102589415A (en) * | 2012-03-06 | 2012-07-18 | 天津市计量监督检测科学研究院 | Metering type digital image plane equal thickness interferometer and method for measuring flatness of object surface by employing the same |
| CN103309240A (en) * | 2012-03-13 | 2013-09-18 | 中国船舶重工集团公司第七一三研究所 | High-frequency vibration target simulation device based on driving of piezoelectric ceramic |
| CN105067634A (en) * | 2015-08-14 | 2015-11-18 | 华侨大学 | Method and system for detecting surface quality of flat plate |
| CN105091780A (en) * | 2015-05-19 | 2015-11-25 | 哈尔滨工业大学 | Ultra-precision turning surface three-dimensional microscopic morphology measuring device based on characteristic of diffraction light spot of laser beam |
| CN106441157A (en) * | 2016-11-25 | 2017-02-22 | 天津大学 | Rapid complex topography measurement method |
| CN106767500A (en) * | 2016-11-25 | 2017-05-31 | 天津大学 | For the light path system of topography measurement |
| CN111609997A (en) * | 2020-05-07 | 2020-09-01 | 中国科学院光电技术研究所 | Detection apparatus suitable for transmission-type optical element optical path uniformity measurement |
| CN112525070A (en) * | 2020-11-18 | 2021-03-19 | 南京理工大学 | Vibration-resistant white light interference measurement method based on non-uniform sampling correction |
| CN112964197A (en) * | 2021-03-23 | 2021-06-15 | 哈尔滨工业大学 | Micro-sphere surface morphology detection device based on negative feedback phase-locked vibration suppression |
| CN112985299A (en) * | 2021-02-19 | 2021-06-18 | 同济大学 | Optical probe on-line detection device and method based on path planning |
| CN113922757A (en) * | 2021-09-30 | 2022-01-11 | 南京理工大学 | Wide-spectrum light beam induced current imaging device and application thereof |
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- 2009-11-16 CN CN2009202000655U patent/CN201569419U/en not_active Expired - Fee Related
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102589415A (en) * | 2012-03-06 | 2012-07-18 | 天津市计量监督检测科学研究院 | Metering type digital image plane equal thickness interferometer and method for measuring flatness of object surface by employing the same |
| CN103309240A (en) * | 2012-03-13 | 2013-09-18 | 中国船舶重工集团公司第七一三研究所 | High-frequency vibration target simulation device based on driving of piezoelectric ceramic |
| CN103309240B (en) * | 2012-03-13 | 2015-11-04 | 中国船舶重工集团公司第七一三研究所 | A kind of dither target simulator based on Piezoelectric Ceramic |
| CN105091780A (en) * | 2015-05-19 | 2015-11-25 | 哈尔滨工业大学 | Ultra-precision turning surface three-dimensional microscopic morphology measuring device based on characteristic of diffraction light spot of laser beam |
| CN105067634A (en) * | 2015-08-14 | 2015-11-18 | 华侨大学 | Method and system for detecting surface quality of flat plate |
| CN106767500B (en) * | 2016-11-25 | 2019-03-22 | 天津大学 | Light path system for topography measurement |
| CN106767500A (en) * | 2016-11-25 | 2017-05-31 | 天津大学 | For the light path system of topography measurement |
| CN106441157B (en) * | 2016-11-25 | 2019-01-22 | 天津大学 | A kind of complex topography method for fast measuring |
| CN106441157A (en) * | 2016-11-25 | 2017-02-22 | 天津大学 | Rapid complex topography measurement method |
| CN111609997A (en) * | 2020-05-07 | 2020-09-01 | 中国科学院光电技术研究所 | Detection apparatus suitable for transmission-type optical element optical path uniformity measurement |
| CN112525070A (en) * | 2020-11-18 | 2021-03-19 | 南京理工大学 | Vibration-resistant white light interference measurement method based on non-uniform sampling correction |
| CN112525070B (en) * | 2020-11-18 | 2022-04-01 | 南京理工大学 | Vibration-resistant white light interference measurement method based on non-uniform sampling correction |
| CN112985299A (en) * | 2021-02-19 | 2021-06-18 | 同济大学 | Optical probe on-line detection device and method based on path planning |
| CN112964197A (en) * | 2021-03-23 | 2021-06-15 | 哈尔滨工业大学 | Micro-sphere surface morphology detection device based on negative feedback phase-locked vibration suppression |
| CN112964197B (en) * | 2021-03-23 | 2022-04-29 | 哈尔滨工业大学 | Micro-sphere surface morphology detection device based on negative feedback phase-locked vibration suppression |
| CN113922757A (en) * | 2021-09-30 | 2022-01-11 | 南京理工大学 | Wide-spectrum light beam induced current imaging device and application thereof |
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Granted publication date: 20100901 Termination date: 20111116 |