CN106595515A - White light interference and laser scanning-based morphology measurement device - Google Patents
White light interference and laser scanning-based morphology measurement device Download PDFInfo
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- CN106595515A CN106595515A CN201611062453.2A CN201611062453A CN106595515A CN 106595515 A CN106595515 A CN 106595515A CN 201611062453 A CN201611062453 A CN 201611062453A CN 106595515 A CN106595515 A CN 106595515A
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- light
- laser
- white light
- measurement
- amici prism
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
Abstract
The invention discloses a white light interference and laser scanning-based morphology measurement device comprising a three dimensional motion platform and a white light-laser measurement system positioned on the same. The measurement system comprises a white light source 1, three light splitting prisms, a microscopic ocular lens 5, a microscopic object lens 6, an interference object lens 7, a four-quadrant photoelectric sensor 8, a laser device 9 and an image sensor 10; two measurement optical paths and a laser measurement optical path are provided; the laser optical path has the following structure: light sent via the laser device 9 is turned via a third light splitting prism 4, and then the light is focused onto a surface 11 being measured via the microscopic object lens 6; the light passes through the microscopic object lens 6, the third light splitting prism 4, and a second light splitting prism 3 after being reflected by the surface 11 being measured; then the light is projected to the four-quadrant photoelectric sensor 8 and is used for measuring height information of the surface 11 being measured; light, reflected back by the surface 11 being measured, sent via the laser device 9 is turned via the second light splitting prism 3; after passing through a first light splitting prism 2 and the microscopic ocular lens 5, the light and illumination backlight formed via the white light source 1 are imaged onto the image sensor 10, and a collection image for laser measurement is formed.
Description
Technical field
The present invention relates to a kind of topography measurement device, the machine components, optical component especially for Ultra-precision Turning
Machined surface quality and Shape measure in manufacture process.
Background technology
Surface topography refers to the geometric shape that the separating surface of object and surrounding medium presents, by surface basic configuration and
The surface defect parameter such as percent ripple, texture, surface roughness together constitutes the feature of body surface primary morphology.Added by machinery
The surface topography that the techniques such as work, surface treatment are formed directly affects its function and performance.With national defense industry, Aero-Space
And the field such as machine-building develops rapidly, the demand of Ultra-precision Turning part is also increasingly improved, product surface pattern and structure
Also become increasingly complex, therefore, the surface profile measurement technology such as machine components, optical element to Ultra-precision Turning is most important.
Surface topography measuring method is varied, and in order to adapt to complex surface topography measurement demand, main measurement means are still
For point by point scanning metering system, most common contourograph disclosure satisfy that the demand of ultraprecise highly-efficient processing.Meanwhile, some use whole field
Scan mode realizes the method that surface topography quickly measures optical surface, such as lasing area interferometric method, reflecting grating method.But more than
The measurement data sample rate of method is relatively low, is only capable of obtaining the basic configuration (low-frequency information of surface topography) of surface topography.
And contact contourograph is suitable only for the Roughness Information (high-frequency information of surface topography) on collection surface contour line.However,
The surface details information such as texture or percent ripple of surface topography (intermediate frequency information of surface topography) affects very big to performance.
At present, the white light interference method for being appropriate to surface details analysis is relatively confined to local measurement, and its cardinal principle is using white
The Low coherence characteristic of light, by object surface appearance message reflection to interference signal, and is drawn by the analysis to interference image
Recover the three-dimensional appearance on testing sample surface, Measurement Resolution can reach nanoscale.Accordingly, it would be desirable to complete on a large scale deeper into carrying out
The research of frequency range surface topography (high, medium and low frequency topographical information) measuring method.
The content of the invention
It is an object of the invention to provide a kind of device that can realize surface full frequency band measuring surface form on a large scale.This
It is bright using a set of measurement apparatus in, the in site measurement in both can processing can also independently carry out off-line measurement.Technical scheme is such as
Under：
The topography measurement device that a kind of white light interference and laser scanning are combined, including three-dimensional movement platform and placed on it
White light-laser measurement system, white light-laser measurement system includes 1, three Amici prisms of white light source, micro- eyepiece 5, micro-
Object lens 6, interference objective 7, four-quadrant photoelectric sensor 8, laser instrument 9 and imageing sensor 10, with two optical paths and swash
Photo measure light path, wherein,
White light interferometric light path is：Parallel beam is sent by white light source 1 project and be divided into two after the first Amici prism 2
Beam, light beam is transferred 90 ° by the first Amici prism 2 and projects measured surface 11 through interference objective 7, and the light Jing of reflection interferes
The Amici prism 2 of object lens 7 and first returns to the light of micro- eyepiece 5, light beam and its reflection to be occurred to do in the visual field of micro- eyepiece 5
Relate to, imageing sensor 10 obtains interference fringe to obtain the surface topography information in region to be measured；Second beam light passes through the first light splitting
Prism 2, sequentially passes through the second Amici prism 3, the 3rd Amici prism 4 and microcobjective 6, converges at measured surface 11, and Jing is tested
Surface 11 reflect after respectively through microcobjective 6, the 3rd Amici prism 4, the second Amici prism 3, the first Amici prism 2 and micro-
Eyepiece 5, is imaged onto imageing sensor 10, is responsible for laser measurement light path and provides lighting background light；
Laser measurement light path is：The Amici prisms 4 of Jing the 3rd are transferred by laser instrument 9, by microcobjective 6 focus to by
Surface 11 is surveyed, Jing after measured surface 11 reflects, respectively through microcobjective 6, the 3rd Amici prism 4 and the second Amici prism 3, is thrown
Being incident upon four-quadrant photoelectric sensor 8 is used for the measurement of the elevation information of measured surface 11；The Jing measured surfaces 11 of laser instrument 9 are reflected
Light transferred by the second Amici prism 3, by the first Amici prism 2 and micro- eyepiece 5 after, and formed by white light source 1
Lighting background light is imaged to imageing sensor 10 together, forms collection figure during laser measurement.
" white light-laser " complex form that the present invention is adopted, can simultaneously realize laser scanning measurement and white light interference pattern
Measurement.Wherein laser scanning measurement realizes that surface topography low-frequency information is obtained, and sampled point quantity is few, and measuring speed is fast, can be to quilt
Surveying surface carries out quick cognition；White light interference topography measurement then obtains measured surface medium-high frequency by multiple monoscopic connecting methods
Information, monoscopic measuring route can be according to laser measurement for the understanding of measured surface is planned.Therefore, the present invention can be to table
Face pattern carries out high speed full frequency band measurement.Simultaneously as " white light-laser " measuring system is by laser measurement and white light interferometric
System light path is effectively combined, and therefore, it can to form simple structure, easy-to-install measuring system, not only can coordinate fortune
Moving platform carries out the scanning survey of measured surface, can also be installed on machining tool, the surface topography to being processed device
In site measurement, it is to avoid secondary dress just waits the error of introducing in the course of processing.
Description of the drawings：
Fig. 1 " white light-laser " measuring light path diagram
Fig. 2 " white light-laser " measuring system structural representation
Fig. 3 " white light-laser " measuring system is positioned over three-dimensional movement platform schematic diagram
Fig. 4 " white light-laser " measuring system places machining tool schematic diagram
Fig. 5 " white light-laser " measurement procedure figure
Fig. 6 " white light-laser " measuring route schematic diagram, (a) helical scan path；(b) grid line scanning pattern 1；(c) grid
Line scanning pattern 2.
Description of reference numerals is as follows：It is the micro- eyepiece 5 of white light source 1, Amici prism 2, Amici prism 3, Amici prism 4, aobvious
Speck mirror 6, interference objective 7, the laser instrument 9 of four-quadrant photoelectric sensor 8, imageing sensor 10, measured surface 11, system shell
12nd, system handle 13, power supply and 14 " white light-laser " measuring systems 15 of control, linear motion axis 16, (Z-direction kinematic axiss) straight line
Kinematic axiss 17 (X is to kinematic axiss), linear motion axis 18 (Y-direction kinematic axiss), sample stage 18, be processed device 20, processing knife rest 21,
System of processing 22
Specific embodiment
The present invention combines white light interference and Laser Scanning realizes surface full frequency band measuring surface form on a large scale.White light
Interferometric method can quickly realize the nanometer accuracy measurement of small field of view boundary surface pattern, due to the sampling number of local measurement it is many, because
This, it is possible to achieve the acquisition of full frequency band surface information.For broad surface pattern is accomplished by carrying out multiple haplopia field datas
Splicing fusion.However, because measured surface is complex-shaped, measuring route of how making rational planning for realizes quick measurement and high accuracy
Splicing is the difficult problem that broad surface topography measurement is realized by White Light Interferometer.Therefore, present invention introduces Laser Scanning
Measurement surface can be treated carries out fast prediction amount, and by analysis the characteristic information on surface to be measured is fully understanded, targetedly advises
Draw the path of white light interferometric.It is also possible to binding analysis result, targetedly focal point region carries out piecemeal survey
Amount.Effectively measure and evaluate in the hope of carrying out to measured surface.
Therefore, the present invention proposes the method (" white light-laser ") that white light interference and laser scanning measurement are combined, by means of sharp
Photoscanning metering system realizes the acquisition of surface topography low-frequency information, and white light interferometric is by multiple monoscopic connecting methods
The principle of surface to be machined medium-high frequency information is obtained, both are combined into into a system integrity measurement by light path, it is ensured that measurement
The miniaturization of system, realizes the accurate measurement to measured surface pattern.Fig. 1 is " white light-laser " measuring system light path schematic diagram.
Measuring system is mainly by white light source 1, Amici prism 2/3/4, micro- eyepiece 5, microcobjective 6, interference objective 7, four-quadrant light
Electric transducer 8, laser instrument 9 and imageing sensor 10 are constituted.Measuring system includes two optical paths.White light interferometric light path
Parallel beam is sent by white light source 1 project Amici prism 2 and be divided into two beams, a branch of prism 2 that is split transfers 90 ° through interfering
Object lens 7 project measured surface 11, and Jing interference objectives 7 and Amici prism 2 return to eyepiece 5 after reflection, and two-beam is in the visual field of eyepiece 5
In interfere, imageing sensor 10 obtains interference fringe to obtain the surface topography information in region to be measured；Another beam is passed through and divided
Light prism 2, Jing Amici prisms 3, Amici prism 4 and microcobjective 6 converge at measured surface 11, and measured surface 11 divides after reflecting
Not through microcobjective 6, Amici prism 4, Amici prism 3, Amici prism 2 and eyepiece 5, imageing sensor 10 is imaged onto, is responsible for
Lighting background light is provided for laser measurement light path.The Jing Amici prisms 4 that set out of laser measurement optical routing laser instrument 9 are transferred, by aobvious
Speck mirror 6 focuses to measured surface 11, Jing after measured surface 11 reflects, respectively through microcobjective 6, Amici prism 4 and light splitting
Prism 3, being projected to four-quadrant photoelectric sensor 8 is used for the measurement of the elevation information of measured surface 11.When due to the quilt of measured surface 11
Location puts the change of elevation information, and laser can be caused to expose to the position of four-quadrant photoelectric sensor 8 difference, is located by laser spots
Position calculation measured position elevation information.The light that the Jing measured surfaces 11 of laser instrument 9 are reflected is transferred by Amici prism 3, is led to
Amici prism 2 and eyepiece 5 are crossed, and the lighting background light that white light source 1 is formed is imaged to imageing sensor 10 together, is formed and is swashed
Collection figure during photo measure.Due to focusing on to measured zone when two-way optical path is different in measurement process, therefore, in measurement
During either white light interferometric or laser measurement, white light source 1 and laser instrument 9 open simultaneously, but will not simultaneously into
As on imageing sensor 10, therefore, two-way measuring system is independent of each other.
Fig. 2 is the structure design schematic diagram of " white light-laser " measuring system.The measuring system can be entered with routing motion platform
The topography scan of row measured surface, as shown in Figure 3, it is also possible in being placed directly in machining tool, realizes for surface to be machined
In site measurement, it is to avoid when measuring measured surface 11 in the course of processing to be processed device 20 clamping repeatedly, for original
The schematic diagram of position measurement is as shown in Figure 4.
Fig. 5 is flow chart when " white light-laser " system is measured.First by laser scanning system according to certain measurement
Path is quickly scanned to measured surface, and scanning pattern spacing is larger, scanning speed is fast, can quick obtaining measured surface it is big
Cause contour feature.Scanning pattern mode is relevant with the operation form of kinetic control system, main scanning form as shown in fig. 6,
Mainly include that helical scanning or grid line are scanned.According to white light measuring system single measurement field range, white light measurement system is determined
The measuring route of system, it is ensured that adjacent measurement field range has certain overlapping in white light measurement process, so as to ensure measurement data
Integrity.And after measured surface feature is obtained, each location point of white light measuring route can be according to the surface character, mainly
It is height relief amount, the elevation carrection position of dialogue light measurement system is quickly positioned, so as to ensure that the fast of white light systems
Speed measurement, while also ensure that the concordance of measurement dead-center position every time.Measurement after white light is measured, to each visual field
As a result carry out data fusion and the system of whole measured surface, complete topographic data is obtained.So-called data fusion, is by phase
The data overlap part of adjacent measured zone is spliced, and in general, the final partial data is the meansigma methodss of overlapped data.Number
It is the current techique in many visual field test according to fusion, may be referred to related data realization.
Claims (1)
1. the topography measurement device that a kind of white light interference and laser scanning are combined, including three-dimensional movement platform and placed on it white
Light-laser measurement system, it is characterised in that white light-laser measurement system includes white light source (1), three Amici prisms, micro-
Eyepiece (5), microcobjective (6), interference objective (7), four-quadrant photoelectric sensor (8), laser instrument (9) and imageing sensor
(10), with two optical paths and laser measurement light path.Wherein,
White light interferometric light path is：Parallel beam is sent by white light source (1) project and be divided into two after the first Amici prism (2)
Beam, light beam is transferred 90 ° by the first Amici prism (2) and projects measured surface (11), the light of reflection through interference objective (7)
Jing interference objectives (7) and the first Amici prism (2) return to the light of micro- eyepiece (5), light beam and its reflection in micro- eyepiece
(5) interfere in visual field, imageing sensor (10) obtains interference fringe to obtain the surface topography information in region to be measured；Second
Shu Guang passes through the first Amici prism (2), sequentially passes through the second Amici prism (3), the 3rd Amici prism (4) and microcobjective (6),
Converge at measured surface (11), Jing after measured surface (11) reflection respectively through microcobjective (6), the 3rd Amici prism (4), the
Two Amici prisms (3), the first Amici prism (2) and micro- eyepiece (5), are imaged onto imageing sensor (10), are responsible for Laser Measuring
Amount light path provides lighting background light；
Laser measurement light path is：The turnover of the Amici prisms (4) of Jing the 3rd, is focused to by microcobjective (6) by laser instrument (9)
Measured surface (11), Jing after measured surface (11) reflection, respectively through microcobjective (6), the 3rd Amici prism (4) and second point
Light prism (3), is projected to four-quadrant photoelectric sensor (8) for the measurement of measured surface (11) elevation information；Laser instrument (9) Jing
The light that measured surface (11) is reflected is transferred by the second Amici prism (3), by the first Amici prism (2) and micro- eyepiece
(5) after, and it is imaged to imageing sensor (10) together by the lighting background light that white light source (1) is formed, is formed laser measurement
When collection figure.
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| CN201611062453.2A CN106595515B (en) | 2016-11-25 | 2016-11-25 | The topography measurement device that a kind of white light interference and laser scanning combine |
Applications Claiming Priority (1)
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| CN201611062453.2A CN106595515B (en) | 2016-11-25 | 2016-11-25 | The topography measurement device that a kind of white light interference and laser scanning combine |
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| CN106595515B CN106595515B (en) | 2019-01-22 |
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Cited By (7)
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| CN108907456A (en) * | 2018-08-07 | 2018-11-30 | 广东工业大学 | A kind of microgap welding seam tracking method, system and controlling terminal |
| CN110181334A (en) * | 2019-05-30 | 2019-08-30 | 哈尔滨工业大学 | Freeform optics element face shape error On-machine Test device and its detection method based on white light confocal principle |
| CN111412861A (en) * | 2020-03-31 | 2020-07-14 | 天津大学 | Linear white light surface profile measuring method |
| CN111929279A (en) * | 2020-08-12 | 2020-11-13 | 西南大学 | Substance laser detection device |
| CN113251949A (en) * | 2021-06-18 | 2021-08-13 | 三代光学科技（天津）有限公司 | Method for generating single-point optical measurement path of micro-lens array surface shape |
| CN114608481A (en) * | 2022-03-18 | 2022-06-10 | 天津大学 | Automatic measurement method and system for three-dimensional profile of complex curved surface of unknown model |
| WO2023160429A1 (en) * | 2022-02-23 | 2023-08-31 | 天津大学 | High-precision measurement optical path structure for measuring roughness of inner and outer cavity surfaces, and automatic measurement system |
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| CN113251949A (en) * | 2021-06-18 | 2021-08-13 | 三代光学科技（天津）有限公司 | Method for generating single-point optical measurement path of micro-lens array surface shape |
| CN113251949B (en) * | 2021-06-18 | 2021-11-30 | 三代光学科技（天津）有限公司 | Method for generating single-point optical measurement path of micro-lens array surface shape |
| WO2023160429A1 (en) * | 2022-02-23 | 2023-08-31 | 天津大学 | High-precision measurement optical path structure for measuring roughness of inner and outer cavity surfaces, and automatic measurement system |
| CN114608481A (en) * | 2022-03-18 | 2022-06-10 | 天津大学 | Automatic measurement method and system for three-dimensional profile of complex curved surface of unknown model |
| CN114608481B (en) * | 2022-03-18 | 2022-11-01 | 天津大学 | Automatic measurement method and system for three-dimensional profile of complex curved surface of unknown model |
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