CN106595515B - The topography measurement device that a kind of white light interference and laser scanning combine - Google Patents
The topography measurement device that a kind of white light interference and laser scanning combine Download PDFInfo
- Publication number
- CN106595515B CN106595515B CN201611062453.2A CN201611062453A CN106595515B CN 106595515 B CN106595515 B CN 106595515B CN 201611062453 A CN201611062453 A CN 201611062453A CN 106595515 B CN106595515 B CN 106595515B
- Authority
- CN
- China
- Prior art keywords
- laser
- amici prism
- white light
- measurement
- measured surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The topography measurement device that the present invention discloses a kind of white light interference and laser scanning combines, including three-dimensional movement platform and white light-laser measurement system placed on it, measuring system includes white light source (1), three Amici prisms, micro- eyepiece (5), microcobjective (6), interference objective (7), four-quadrant photoelectric sensor (8), laser (9) and imaging sensor (10), has two optical paths and laser measurement optical path；Laser measurement optical path are as follows: transfer by laser (9) through third Amici prism (4), measured surface (11) are focused to by microcobjective (6), after measured surface (11) reflection, respectively by microcobjective (6), third Amici prism (4) and the second Amici prism (3), it is projected to the measurement of four-quadrant photoelectric sensor (8) for measured surface (11) elevation information；(9 are transferred through the reflected light of measured surface 11 by the second Amici prism (3) laser, after the first Amici prism (2) and micro- eyepiece (5), it is imaged together with the lighting background light formed by white light source (1) to imaging sensor (10), forms acquisition figure when laser measurement.
Description
Technical field
The present invention relates to a kind of topography measurement devices, machine components, optical component especially for Ultra-precision Turning
Machined surface quality and Shape measure in manufacturing process.
Background technique
Surface topography refers to the geometric shape that the interface of object and surrounding medium shows, by surface basic configuration and
The surface defects parameter such as percent ripple, texture, surface roughness together constitutes the feature of body surface primary morphology.Added by machinery
The surface topography that the techniques such as work, surface treatment are formed directly affects its function and service performance.With national defense industry, aerospace
And the rapid development in the fields such as machine-building, the demand of Ultra-precision Turning part also increasingly improve, product surface pattern and structure
Also it becomes increasingly complex, it is therefore, most important to surface profile measurements technologies such as machine components, the optical elements of Ultra-precision Turning.
Surface topography measuring method is varied, and in order to adapt to complex surface topography measurement demand, main measurement means are still
For point by point scanning measurement method, most common contourgraph can satisfy the demand of ultraprecise highly-efficient processing.Meanwhile some use whole field
The method that scanning mode realizes surface topography rapid survey optical surface, such as lasing area interferometry, reflecting grating method.More than but
The measurement data sample rate of method is relatively relatively low, is only capable of obtaining the basic configuration (low-frequency information of surface topography) of surface topography.
And contact contourgraph is suitable only for the Roughness Information (high-frequency information of surface topography) on collection surface contour line.However,
The surface details such as the texture of surface topography or percent ripple information (intermediate frequency information of surface topography) influences service performance very big.
Currently, the white light interference method for being appropriate for surface details analysis is relatively confined to local measurement, cardinal principle is using white
The Low coherence characteristic of light by object surface appearance message reflection to interference signal, and is obtained by the analysis to interference image
Restore the three-dimensional appearance on sample to be tested surface, Measurement Resolution can reach nanoscale.Therefore, it is necessary to a wide range of complete deeper into carrying out
The research of frequency range surface topography (high, medium and low frequency topographical information) measurement method.
Summary of the invention
The object of the present invention is to provide a kind of devices that a wide range of full frequency band measuring surface form in surface may be implemented.This hair
The bright in situ measurement using in a set of measuring device, can both having processed, can also independently carry out off-line measurement.Technical solution is such as
Under:
The topography measurement device that a kind of white light interference and laser scanning combine, including three-dimensional movement platform and placed on it
White light-laser measurement system, white light-laser measurement system includes 1, three Amici prism of white light source, micro- eyepiece 5, micro-
Object lens 6, interference objective 7, four-quadrant photoelectric sensor 8, laser 9 and imaging sensor 10 have two optical paths and swash
Light measurement optical path, wherein
White light interferometric optical path are as follows: be divided into two after issuing light beam parallel projection to the first Amici prism 2 by white light source 1
Beam, light beam are transferred 90 ° by the first Amici prism 2 and project measured surface 11 by interference objective 7, and the light of reflection is through interfering
Object lens 7 and the first Amici prism 2 return to micro- eyepiece 5, and light beam and its light reflected occur dry in micro- 5 visual field of eyepiece
It relates to, imaging sensor 10 obtains interference fringe to obtain the surface topography information in region to be measured；Second beam light passes through the first light splitting
Prism 2 successively passes through the second Amici prism 3, third Amici prism 4 and microcobjective 6, converges at measured surface 11, through tested
Surface 11 reflect after respectively by microcobjective 6, third Amici prism 4, the second Amici prism 3, the first Amici prism 2 and micro-
Eyepiece 5 is imaged onto imaging sensor 10, is responsible for laser measurement optical path and provides lighting background light；
Laser measurement optical path are as follows: transfer by laser 9 through third Amici prism 4, by microcobjective 6 focus to by
Surface 11 is surveyed, after the reflection of measured surface 11, passes through microcobjective 6, third Amici prism 4 and the second Amici prism 3 respectively, throws
It is incident upon measurement of the four-quadrant photoelectric sensor 8 for 11 elevation information of measured surface；Laser 9 is reflected through measured surface 11
Light transferred by the second Amici prism 3, after the first Amici prism 2 and the micro- eyepiece 5, and formed by white light source 1
Lighting background light is imaged together to imaging sensor 10, and acquisition figure when laser measurement is formed.
" white light-laser " complex form that the present invention uses, can be achieved at the same time laser scanning measurement and white light interference pattern
Measurement.Wherein laser scanning measurement realizes that surface topography low-frequency information obtains, and sampled point quantity is few, and measuring speed is fast, can be to quilt
Surface is surveyed quickly to be recognized；White light interference topography measurement then obtains measured surface medium-high frequency by multiple monoscopic connecting methods
Information, monoscopic measuring route can be planned according to understanding of the laser measurement for measured surface.Therefore, the present invention can be to table
Face pattern carries out the measurement of high speed full frequency band.Simultaneously as " white light-laser " measuring system is by laser measurement and white light interferometric
System light path progress is effectively compound, therefore, can form the measuring system that structure is simple, is easily installed, can not only cooperate fortune
Moving platform carries out the scanning survey of measured surface, can also be installed on machining tool, to the surface topography of processed device
In situ measurement avoids the error that secondary dress in process just waits introducings.
Detailed description of the invention:
Fig. 1 " white light-laser " optical path figure
Fig. 2 " white light-laser " measuring system structural schematic diagram
Fig. 3 " white light-laser " measuring system is placed in three-dimensional movement platform schematic diagram
Fig. 4 " white light-laser " measuring system places machining tool schematic diagram
Fig. 5 " white light-laser " measurement flow chart
Fig. 6 " white light-laser " measuring route schematic diagram, (a) helical scan path；(b) grid line scan path 1；(c) grid
Line scan path 2.
The reference numerals are as follows: white light source 1, Amici prism 3, the micro- eyepiece 5 of Amici prism 4, is shown Amici prism 2
Speck mirror 6, interference objective 7,8 laser 9 of four-quadrant photoelectric sensor, imaging sensor 10, measured surface 11, system shell
12, system handle 13, power supply and control 14 " white light-laser " measuring systems 15, linear motion axis 16, (Z-direction kinematic axis) straight line
Kinematic axis 17 (X to kinematic axis), linear motion axis 18 (Y-direction kinematic axis), sample stage 18, be processed device 20, processing knife rest 21,
System of processing 22
Specific embodiment
Present invention combination white light interference and Laser Scanning realize a wide range of full frequency band measuring surface form in surface.White light
Interferometry can fast implement the nanometer accuracy measurement of small field of view boundary surface pattern, since the sampling number of local measurement is more, because
This, may be implemented the acquisition of full frequency band surface information.Broad surface pattern is just needed to carry out multiple haplopia field datas
Splicing fusion.However, since measured surface is complex-shaped, measuring route of how making rational planning for realizes rapid survey and high-precision
Splicing is that the problem of broad surface topography measurement is realized by White Light Interferometer.Therefore, present invention introduces Laser Scannings
Quick predict amount can be carried out to surface to be measured, the characteristic information on surface to be measured is fully understanded by analysis, is targetedly advised
Draw the path of white light interferometric.It is also possible to which binding analysis is as a result, targetedly focal point region carries out piecemeal survey
Amount.In the hope of measured surface is effectively measured and is evaluated.
Therefore, the present invention proposes the method (" white light-laser ") that white light interference and laser scanning measurement combine, by means of swashing
Optical scanning measurement method realizes the acquisition of surface topography low-frequency information, and white light interferometric passes through multiple monoscopic connecting methods
The two is combined into a system integrity measurement by optical path, guarantees measurement by the principle for obtaining surface to be machined medium-high frequency information
The precise measurement to measured surface pattern is realized in the miniaturization of system.Fig. 1 is " white light-laser " measuring system light path schematic diagram.
Measuring system is mainly by white light source 1, Amici prism 2/3/4, micro- eyepiece 5, microcobjective 6, interference objective 7, four-quadrant light
Electric transducer 8, laser 9 and imaging sensor 10 form.Measuring system includes two optical paths.White light interferometric optical path
Light beam parallel projection is issued by white light source 1 and is divided into two beams to Amici prism 2, a branch of prism 2 that is split transfers 90 ° by interference
Object lens 7 project measured surface 11, return to eyepiece 5 through interference objective 7 and Amici prism 2 after reflection, two-beam is in 5 visual field of eyepiece
In interfere, imaging sensor 10 obtains interference fringe to obtain the surface topography information in region to be measured；Another beam, which passes through, to be divided
Light prism 2 converges at measured surface 11 through Amici prism 3, Amici prism 4 and microcobjective 6, and measured surface 11 divides after reflecting
Not Jing Guo microcobjective 6, Amici prism 4, Amici prism 3, Amici prism 2 and eyepiece 5, be imaged onto imaging sensor 10, be responsible for
Lighting background light is provided for laser measurement optical path.Laser measurement optical routing laser 9 sets out transfers through Amici prism 4, by aobvious
Speck mirror 6 focuses to measured surface 11, after the reflection of measured surface 11, respectively by microcobjective 6, Amici prism 4 and light splitting
Prism 3 is projected to measurement of the four-quadrant photoelectric sensor 8 for 11 elevation information of measured surface.When due to 11 quilt of measured surface
Location sets the change of elevation information, will lead to laser irradiation to 8 position of four-quadrant photoelectric sensor difference, by where laser point
Position calculates measured position elevation information.Laser 9 is transferred through the reflected light of measured surface 11 by Amici prism 3, is led to
It crosses the lighting background light that Amici prism 2 and eyepiece 5 and white light source 1 are formed to be imaged together to imaging sensor 10, is formed and swashed
Acquisition figure when light measurement.Since two-way optical path does not simultaneously focus measured zone in measurement process, it is measuring
Either white light interferometric or laser measurement, white light source 1 and laser 9 open simultaneously in the process, but not simultaneously at
As on imaging sensor 10, therefore, two-way measuring system is independent of each other.
Fig. 2 is the structure design diagram of " white light-laser " measuring system.The measuring system can with cooperative movement platform into
The topography scan of row measured surface is realized as shown in figure 3, can also be placed directly in machining tool for surface to be machined
In situ measurement, avoid in process to measured surface 11 measure when the clamping repeatedly to processed device 20, for original
The schematic diagram of position measurement is as shown in Figure 4.
Fig. 5 is flow chart when " white light-laser " system measures.First by laser scanning system according to certain measurement
Measured surface is quickly scanned in path, and scan path spacing is larger, scanning speed is fast, can quick obtaining measured surface it is big
Cause contour feature.Scan path mode is related with the operation form of kinetic control system, main scanning form as shown in fig. 6,
It mainly include that helical scanning or grid line scan.According to white light measuring system single measurement field range, white light measurement system is determined
The measuring route of system guarantees there there is certain overlapping adjacent measurement field range in white light measurement process, to guarantee measurement data
Integrality.And after obtaining measured surface feature, each location point of white light measuring route can be according to the surface characteristics, mainly
It is height relief amount, the elevation carrection position of dialogue light measurement system is quickly positioned, to ensure that the fast of white light systems
Speed measurement, while also ensuring the consistency of measurement dead-center position every time.Measurement after white light is measured, to each visual field
As a result carrying out data fusion can be obtained the system of entire measured surface, complete topographic data.So-called data fusion is by phase
The data overlap part of adjacent measured zone is spliced, and in general, the final partial data is the average value of overlapped data.Number
According to the general technology that fusion is in more visual field tests, can be realized with reference to related data.
Claims (1)
1. the topography measurement device that a kind of white light interference and laser scanning combine, including three-dimensional movement platform and placed on it white
Light-laser measurement system, which is characterized in that white light-laser measurement system includes white light source (1), three Amici prisms, micro-
Eyepiece (5), microcobjective (6), interference objective (7), four-quadrant photoelectric sensor (8), laser (9) and imaging sensor
(10), there is two optical paths and laser measurement optical path, wherein
White light interferometric optical path are as follows: be divided into two after issuing light beam parallel projection to the first Amici prism (2) by white light source (1)
Beam, light beam are transferred 90 ° by the first Amici prism (2) and are projected measured surface (11) by interference objective (7), the light of reflection
It is returned to micro- eyepiece (5) through interference objective (7) and the first Amici prism (2), the light of light beam and its reflection is in micro- eyepiece
(5) it is interfered in visual field, imaging sensor (10) obtains interference fringe to obtain the surface topography information in region to be measured；Second
Shu Guang passes through the first Amici prism (2), successively passes through the second Amici prism (3), third Amici prism (4) and microcobjective (6),
Measured surface (11) are converged at, respectively by microcobjective (6), third Amici prism (4), the after measured surface (11) reflection
Two Amici prisms (3), the first Amici prism (2) and micro- eyepiece (5), are imaged onto imaging sensor (10), are responsible for Laser Measuring
It measures optical path and lighting background light is provided；
Laser measurement optical path are as follows: transfer by laser (9) through third Amici prism (4), focused to by microcobjective (6)
Measured surface (11), after measured surface (11) reflection, respectively by microcobjective (6), third Amici prism (4) and second point
Light prism (3) is projected to the measurement of four-quadrant photoelectric sensor (8) for measured surface (11) elevation information；Laser (9) warp
Measured surface (11) reflected light is transferred by the second Amici prism (3), passes through the first Amici prism (2) and micro- eyepiece
(5) after, and the lighting background light formed by white light source (1) is imaged together to imaging sensor (10), and laser measurement is formed
When acquisition figure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611062453.2A CN106595515B (en) | 2016-11-25 | 2016-11-25 | The topography measurement device that a kind of white light interference and laser scanning combine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611062453.2A CN106595515B (en) | 2016-11-25 | 2016-11-25 | The topography measurement device that a kind of white light interference and laser scanning combine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106595515A CN106595515A (en) | 2017-04-26 |
| CN106595515B true CN106595515B (en) | 2019-01-22 |
Family
ID=58593495
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611062453.2A Active CN106595515B (en) | 2016-11-25 | 2016-11-25 | The topography measurement device that a kind of white light interference and laser scanning combine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106595515B (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108907456B (en) * | 2018-08-07 | 2020-08-07 | 广东工业大学 | Micro-gap weld joint tracking method and system and control terminal |
| CN110181334B (en) * | 2019-05-30 | 2020-06-09 | 哈尔滨工业大学 | Free-form surface optical element surface shape error on-machine detection device based on white light confocal principle and detection method thereof |
| CN111412861B (en) * | 2020-03-31 | 2022-02-11 | 天津大学 | Linear white light surface profile measuring method |
| CN111929279B (en) * | 2020-08-12 | 2023-06-06 | 西南大学 | Material laser detection device |
| CN113251949B (en) * | 2021-06-18 | 2021-11-30 | 三代光学科技（天津）有限公司 | Method for generating single-point optical measurement path of micro-lens array surface shape |
| CN114234863B (en) * | 2022-02-23 | 2022-11-15 | 三代光学科技（天津）有限公司 | High-precision measuring light path structure for surface roughness of inner cavity and outer cavity and automatic measuring system |
| CN114608481B (en) * | 2022-03-18 | 2022-11-01 | 天津大学 | Automatic measurement method and system for three-dimensional profile of complex curved surface of unknown model |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05291146A (en) * | 1992-04-07 | 1993-11-05 | Hitachi Ltd | Method and equipment for forming transparent film |
| CN1587980A (en) * | 2004-09-15 | 2005-03-02 | 中国科学院上海光学精密机械研究所 | Fully optical fiber probe scan type near-field optical microscope |
| JP2010237183A (en) * | 2009-03-31 | 2010-10-21 | Sumitomo Osaka Cement Co Ltd | Low coherence interferometer and optical microscope |
| CN105865370A (en) * | 2016-05-23 | 2016-08-17 | 华南师范大学 | White-light scanning interferometry measurement method and system |
-
2016
- 2016-11-25 CN CN201611062453.2A patent/CN106595515B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05291146A (en) * | 1992-04-07 | 1993-11-05 | Hitachi Ltd | Method and equipment for forming transparent film |
| CN1587980A (en) * | 2004-09-15 | 2005-03-02 | 中国科学院上海光学精密机械研究所 | Fully optical fiber probe scan type near-field optical microscope |
| JP2010237183A (en) * | 2009-03-31 | 2010-10-21 | Sumitomo Osaka Cement Co Ltd | Low coherence interferometer and optical microscope |
| CN105865370A (en) * | 2016-05-23 | 2016-08-17 | 华南师范大学 | White-light scanning interferometry measurement method and system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106595515A (en) | 2017-04-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106441157B (en) | A kind of complex topography method for fast measuring | |
| CN106595515B (en) | The topography measurement device that a kind of white light interference and laser scanning combine | |
| Gao et al. | On-machine and in-process surface metrology for precision manufacturing | |
| TWI576563B (en) | Method and device for non-contact measuring surfaces | |
| CN106767500B (en) | Light path system for topography measurement | |
| CN106643550B (en) | Three-dimensional shape measuring device and method based on digital holographic scanning | |
| CN201569419U (en) | Rapid surface quality measuring device | |
| EP2998693B1 (en) | Surface-geometry measurement method and device used therein | |
| CN103115585B (en) | Based on fluorescence interference microscopic measuring method and the device of stimulated radiation | |
| CN104913732B (en) | The normal tracking mode non-spherical measuring method and system interfered based on recombination laser | |
| CN115325963B (en) | Wafer surface three-dimensional shape measuring device and measuring method thereof | |
| JP2006250826A (en) | Measuring element, processing device and measuring method, and measuring element of refractive index | |
| CN103115582A (en) | Stimulated radiation based Michelson fluorescence interference microscopic measurement device | |
| CN103115583B (en) | Based on the Mirau fluorescence interference micro-measurement apparatus of stimulated radiation | |
| Duan et al. | Novel method of measuring optical freeform surface based on laser focusing probe without calibrating focus error signal | |
| US10012491B2 (en) | Large numerical aperture phase-shifting dual pinhole diffraction interferometer and its test method | |
| CN109341571A (en) | A kind of dual wavelength synchronizes the surface figure measuring device and method of interference | |
| CN108253897B (en) | Large-range high-precision point diffraction interference three-dimensional coordinate measuring method | |
| CN112857263A (en) | Oblique illumination type color confocal measurement system and detection method | |
| Kapusi et al. | White light interferometry utilizing the large measuring volume of a nanopositioning and nanomeasuring machine | |
| CN220271181U (en) | Defect detection system for interference of bright and dark fields and white light | |
| JPH03156305A (en) | Aspherical-shape measuring apparatus | |
| Manske et al. | Nanopositioning and nanomeasuring machine for multi-sensor applications | |
| JP3635350B2 (en) | Non-contact shape measurement method | |
| Huang et al. | Development of on-machine surface profile measuring instrument based on white light interference principle |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |