CN108253897B - Large-range high-precision point diffraction interference three-dimensional coordinate measuring method - Google Patents
Large-range high-precision point diffraction interference three-dimensional coordinate measuring method Download PDFInfo
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- CN108253897B CN108253897B CN201711478909.8A CN201711478909A CN108253897B CN 108253897 B CN108253897 B CN 108253897B CN 201711478909 A CN201711478909 A CN 201711478909A CN 108253897 B CN108253897 B CN 108253897B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/03—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring coordinates of points
Abstract
The invention provides a large-range high-precision point diffraction interference three-dimensional coordinate measuring method, and relates to the technical field of measurement. The measuring probe emits spherical waves and forms an interference field, the photoelectric detector collects interference fringe pictures in real time, when the photoelectric detector cannot obtain clear interference fringe pictures, the computer controls the three-dimensional guide rail to move until the photoelectric detector can collect clear interference fringe pictures again, the computer applies a multi-step phase-shifting algorithm to the interference fringe pictures to obtain phase difference information, and three-dimensional coordinates of the measuring probe on the measured object at the moment are obtained by utilizing an iterative algorithm. The invention solves the technical problem that coordinate positions in three directions realized by a point diffraction interferometry system in the prior art have great limitation on the measurement range. The invention has the beneficial effects that: the method breaks through the limitation of factors such as the aperture angle of the optical fiber point diffraction wavefront, the performance of the photoelectric detector, the structure of the measuring probe and the like, and greatly improves the measuring range of the point diffraction interference three-dimensional absolute coordinate.
Description
Technical Field
The invention relates to the technical field of measurement, in particular to a large-range high-precision point diffraction interference three-dimensional coordinate measuring method.
Background
With the production expansion and rapid development of modern industry, three-dimensional coordinate measurement plays an increasingly important role in the fields of precision measurement, design and manufacturing. As a universal and accurate measuring method, the three-coordinate measuring machine becomes an important means for guaranteeing the manufacturing quality of modern industry, and is widely applied to the fields of positioning, dimension measurement, reverse engineering and the like. However, due to expensive high precisionThe special guide rail and the huge marble measuring platform for the measuring device can not meet the real-time rapid measuring requirement of a processing field. With the continuous development of the point diffraction interferometer technology, people propose to utilize the point diffraction interferometer to realize the high-precision measurement of three-dimensional displacement, and the method avoids the influence of the machining error of a standard element in the traditional interferometer on the three-dimensional measurement precision. The point diffraction interference systems disclosed at home and abroad mainly comprise a pinhole point diffraction interference system and an optical fiber point diffraction interferometer system. The invention discloses a Chinese patent application publication No. CN104330039A, application publication date 2015, 2 month 4 and entitled 'a large numerical aperture optical fiber point diffraction interference device and method for three-coordinate measurement', which adopts the conical emergent ends of two sub-wavelength aperture single-mode optical fibers as measuring probes, and can simultaneously obtain point diffraction spherical wavefront with high brightness and large numerical aperture by using the two probes, and mainly enlarges the transverse measurement range. The invention discloses a three-dimensional coordinate rapid measurement method based on particle swarm demodulation point light source interference, which is disclosed by Chinese patent application publication No. CN105066880A, application publication date 2015, 11 month 18 and named as the three-dimensional coordinate rapid measurement method based on particle swarm demodulation point light source interference. The invention patent application document named as 'a three-coordinate measuring device and method based on two-channel point diffraction interference' of Chinese patent application publication No. CN106643507A, application publication No. 2017, 5, 10, uses two submicron-aperture optical fiber pairs, and solves the problem that the existing point diffraction interferometer with only one optical fiber pair is in the prior artxAndythe sensitivity is different in the two directions, resulting in a problem of low accuracy in the direction parallel to the stripes. However, due to the limitation of factors such as the aperture angle of the point-diffraction wavefront of the optical fiber, the performance of the CDD photodetector, and the power of the laser, the coordinate positions in three directions that can be realized by the above point-diffraction interferometry system have great limitations on the measurement range. Especially, for large objects, it is difficult to measure with high precision.
Disclosure of Invention
The invention provides a large-range high-precision point diffraction interference three-dimensional coordinate measuring method, which aims to solve the technical problem that the coordinate positions in three directions realized by a point diffraction interference measuring system in the prior art have great limitation on the measuring range and are difficult to realize the high-precision measurement of a large measured object.
The technical scheme of the invention is as follows: a large-range high-precision point diffraction interference three-dimensional coordinate measuring method comprises the following steps: it includes: the device comprises a closed bin, a CDD photoelectric detector, a three-dimensional guide rail and a computer, wherein laser emitted by a polarization laser in the closed bin is divided into two paths through a beam splitter prism, one path of reflected light is reflected by a reflector connected with a piezoelectric ceramic phase shifter through a quarter-wave plate and becomes transmitted light through the quarter-wave plate, the transmitted light is coupled to a sub-wavelength aperture optical fiber SF I by a coupler, the other path of transmitted light is coupled to a sub-wavelength aperture optical fiber SF II by the coupler, two sub-wavelength aperture optical fibers extend out of the closed bin and are parallelly integrated on a measuring probe, the CDD photoelectric detector is connected with a vertical rod of the three-dimensional guide rail, the measuring probe is placed on the surface of a measured object, the polarization laser emits laser, the two sub-wavelength aperture optical fibers respectively emit high-precision spherical waves at the tail end part of the measuring probe and form an interference field, the computer controls the piezoelectric ceramic phase, when the CDD photoelectric detector cannot obtain a clear interference fringe picture, the computer controls the three-dimensional guide rail to move until the CDD photoelectric detector can acquire the clear interference fringe picture again, the computer applies a multi-step phase-shifting algorithm to the interference fringe picture acquired by the CDD photoelectric detector to obtain phase difference information, an iterative algorithm is used for obtaining the current three-dimensional coordinate of the measuring probe on the measured object, and the three-dimensional geometric information of the measured object is obtained through all three-dimensional coordinates on the surface of the measured object.
Preferably, in the same tested object test, the CDD photoelectric detector is fixedly connected with the vertical rod of the three-dimensional guide rail.
Preferably, when the measurement probe is placed on the surface of the object to be measured and measurement is started, the position of the CDD photodetector at this time is set as the origin of the three-dimensional coordinates.
Preferably, when the CCD photodetector cannot collect clear interference fringes, the computer controls the movement of the three-dimensional guide rail, the CDD photodetector collects a clear interference image again, and the relative movement amount of the three-dimensional guide rail plus the position of the measurement probe obtained by the computer analysis after the movement is the spatial position information of the measurement probe at that time.
Compared with the prior art, the invention has the beneficial effects that: the method breaks through the limitation of factors such as the aperture angle of the optical fiber point diffraction wavefront, the performance of the CDD photoelectric detector, the structure of the measuring probe and the like, and greatly improves the measuring range of the point diffraction interference three-dimensional absolute coordinate. The requirement of the equipment for forming the test is not high, the measurement precision is high, and the application range is wide.
Drawings
FIG. 1 is a schematic test diagram of the present invention;
FIG. 2 is a light path diagram of the system of the present invention.
In the figure: 1-a polarized laser; 2-one-half wave plate I; 3-a beam splitting prism; 4-a quarter wave plate; 5-a reflector; 6-piezoelectric ceramic phase shifter; 7-coupler I; 8-sub-wavelength aperture fiber SF I; 9-one-half wave plate II; 10-coupler ii; 11-sub-wavelength aperture fiber SF II; 12-a measurement probe; 13-sealing the bin; 14-CDD photodetector; 15-a three-dimensional guide rail; 16-the test object.
Detailed Description
The technical scheme of the invention is further specifically described by the following embodiments and the accompanying drawings.
Example 1:
as shown in fig. 1 and 2, a method for measuring a three-dimensional coordinate by point diffraction interference with a large range and high precision comprises the following steps: the device comprises a closed bin 13, a CDD photoelectric detector 14, a three-dimensional guide rail 15 and a computer. Laser emitted by the polarization laser 1 in the closed bin 13 is transmitted into the beam splitter prism 3 through the half wave plate I2 and is divided into two paths: one path of reflected light is reflected by a reflector 5 connected with a piezoelectric ceramic phase shifter 6 through a quarter-wave plate 4, becomes transmitted light through the quarter-wave plate 4, and is coupled to a sub-wavelength aperture optical fiber SF I8 by a coupler I7; the other path of transmitted light is coupled to the sub-wavelength aperture optical fiber SF II 11 through a half-wave plate II 9 by a coupler II 10. The two sub-wavelength aperture optical fibers extend out of the closed bin 13 and are integrated in the measuring probe 12 in parallel. The CDD photodetector 14 is connected to the vertical rod of the three-dimensional guide 15. In the test of the same tested object 16, the CDD photoelectric detector 14 is fixedly connected with the vertical rod of the three-dimensional guide rail (15). The CDD photodetector 14 is fixed to the vertical rod of the three-dimensional guide rail and cannot move or rotate. The measurement probe 12 is placed on the surface of the object 16 to be measured. In fig. 1, for clarity, only the measurement probe 12 is shown, and two sub-wavelength aperture optical fibers connected to the measurement probe 12 and the sealed chamber 13 are not shown. The dotted line in the figure indicates a point in the middle of the measured object 16.
When the measuring probe 12 is in the position a of fig. 1, the polarized laser 1 emits laser light with a wavelength λ of 632.8 nm. The two sub-wavelength aperture optical fibers emit high-precision spherical waves at the distal end of the measuring probe 12 and form an interference field. The computer controls the piezoelectric ceramic phase shifter 6 to move the reflector 5 for multiple times to change the optical path difference between the two diffraction spherical wave fronts, and the CDD photoelectric detector 14 collects interference fringe pictures in real time. At each measurement point, the CDD photodetector 14 collects four or more clear interference fringe pictures. This embodiment takes the example of collecting clear interference fringe images as five continuous interference patterns. The measurement probe 12 starts measurement at the position a, and the position of the CDD photodetector 14 at this time is set as the origin of the three-dimensional coordinates. The computer applies a multi-step phase shift algorithm to the interference fringe image collected by the CDD photodetector 14 to obtain phase difference information. The three-dimensional coordinates of the measurement probe 12 at this point on the measured object 16 are obtained using an iterative algorithm. The measurement probe 12 is moved along the profile of the object 16 to the position B of figure 1. At this point, the CDD photodetector 14 cannot obtain a clear image of the interference fringes. The computer controls the movement of the three-dimensional guide 15 until the CDD photodetector 14 can again acquire a clear image of the interference fringes, as shown in dotted lines in fig. 1. The computer controls the piezoelectric ceramic phase shifter 6 to move the reflector 5 for multiple times to change the optical path difference between two diffraction spherical wave fronts, and the CDD photoelectric detector 14 acquires five clear interference fringe pictures in real time. The computer applies a multi-step phase shift algorithm to the interference fringe image collected by the CDD photodetector 14 to obtain phase difference information. The relative movement amount of the three-dimensional guide rail and the position of the measuring probe 12 obtained by the computer analysis after the movement are the space position information of the measuring probe 12 at the moment.
The specific description is as follows: when the measuring probe 12 is at the position a, the CCD photodetector 14 is fixed on the three-dimensional guide 15 and is set to zero, and the corresponding coordinate of the three-dimensional guide 15 is (0, 0, 0) m at this time. And reconstructing a three-dimensional space coordinate (20, 10, 300) mm of the measuring probe 12 by the computer according to the acquired picture, wherein the three-dimensional space coordinate is centered on the CCD photoelectric detector 14. After the measuring probe 12 is moved to the B position, the CCD photodetector 14 cannot acquire a clear image. The computer controls the three-dimensional guide rail 15 to move until the CCD photoelectric detector 14 can collect clear interference fringes. The corresponding three-dimensional rail coordinate is (0, 1.200, 0) m at this time. At the same time, the computer reconstructs the three-dimensional space coordinates (10, 15, 200) mm of the measuring probe at the moment. The spatial three-dimensional coordinates of the B position at this time were found to be (10, 1215, 200) mm by synthesis. And similarly, the measuring device can be moved to other positions, and after the outline of the measured object 16 is completely measured, the three-dimensional coordinate of each measuring point is used for obtaining the three-dimensional geometric information of the measured object 16.
Claims (4)
1. A large-range high-precision point diffraction interference three-dimensional coordinate measuring method comprises the following steps: it includes: airtight storehouse (13), CDD photoelectric detector (14), three-dimensional guide rail (15) and computer, the laser that polarization laser ware (1) sent in airtight storehouse (13) is divided into two the tunnel through beam splitter prism (3), the reflection light of the same way is reflected by speculum (5) of being connected with piezoceramics looks shifter (6) through quarter wave plate (4), become the transmitted light through quarter wave plate (4), couple to sub-wavelength aperture optic fibre SF I (8) by coupler I (7), another way transmitted light is coupled to sub-wavelength aperture optic fibre SF II (11) by coupler II (10), two sub-wavelength aperture optic fibres stretch out airtight storehouse (13) outward, parallel integration in measuring probe (12), its characterized in that: the CDD photoelectric detector (14) is connected with a vertical rod of a three-dimensional guide rail (15), the measuring probe (12) is placed on the surface of a measured object (16), the polarization laser (1) emits laser, two sub-wavelength aperture optical fibers respectively emit high-precision spherical waves at the tail end part of the measuring probe (12) and form an interference field, the computer controls the piezoelectric ceramic phase shifter (6) and the reflector (5) to displace slightly, the CDD photoelectric detector (14) collects interference fringe pictures in real time, when the CDD photoelectric detector (14) cannot obtain clear interference fringe pictures, the computer controls the three-dimensional guide rail (15) to move until the CDD photoelectric detector (14) can collect clear interference fringe pictures again, the computer obtains phase difference information by applying a multi-step phase-shifting algorithm to the interference fringe pictures collected by the CDD photoelectric detector (14), and obtains the three-dimensional coordinates of the measuring probe (12) on the measured object (16) by using an iterative algorithm, obtaining three-dimensional geometric information of the measured object (16) through all three-dimensional coordinates of the surface of the measured object (16); at each measuring point, the CDD photoelectric detector (14) collects four or more clear interference fringe pictures.
2. The wide-range high-precision point diffraction interference three-dimensional coordinate measuring method according to claim 1, characterized in that: in the test of the same tested object (16), the CDD photoelectric detector (14) is fixedly connected with the vertical rod of the three-dimensional guide rail (15).
3. The wide-range high-precision point diffraction interference three-dimensional coordinate measuring method according to claim 1, characterized in that: when the measuring probe (12) is placed on the surface of a measured object (16) to start measurement, the position of the CDD photoelectric detector (14) at the moment is set as the origin of three-dimensional coordinates.
4. The wide-range high-precision point diffraction interference three-dimensional coordinate measuring method according to claim 1, characterized in that: when the CCD photoelectric detector (14) cannot collect clear interference fringes, the computer controls the three-dimensional guide rail (15) to move, the CDD photoelectric detector (14) collects clear interference images again, and the relative movement amount of the three-dimensional guide rail is added with the position of the measuring probe (12) obtained by the computer analysis after the movement, namely the space position information of the measuring probe (12) at the moment.
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| CN108981623B (en) * | 2018-07-23 | 2020-04-28 | 浙江大学 | Remote micro-displacement detection method based on microwave signals |
| CN114187362B (en) * | 2022-02-15 | 2022-04-29 | 苏州英示测量科技有限公司 | Point diffraction interference three-dimensional positioning method, electronic equipment and point diffraction interference device |
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| CN101839700A (en) * | 2010-03-29 | 2010-09-22 | 重庆建设工业(集团)有限责任公司 | Non-contact image measuring system |
| CN103217104A (en) * | 2013-03-15 | 2013-07-24 | 中国计量学院 | Non-guide measurement device and method of point diffraction three-dimensional absolute displacement |
| CN104330039B (en) * | 2014-09-28 | 2017-09-19 | 中国计量学院 | A kind of large-numerical aperture optical fiber point-diffraction interference device and method for three-dimensional coordinates measurement |
| CN106643507B (en) * | 2017-02-13 | 2019-03-05 | 中国计量大学 | A kind of Three-coordinate measurer and method based on binary channels point-diffraction interference |
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