CN104864822A - Method and system for normal tracking aspheric measurement based on laser interference - Google Patents
Method and system for normal tracking aspheric measurement based on laser interference Download PDFInfo
- Publication number
- CN104864822A CN104864822A CN201510313714.2A CN201510313714A CN104864822A CN 104864822 A CN104864822 A CN 104864822A CN 201510313714 A CN201510313714 A CN 201510313714A CN 104864822 A CN104864822 A CN 104864822A
- Authority
- CN
- China
- Prior art keywords
- laser
- laser interference
- aspheric surface
- gauge head
- lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
The invention provides a method and a system for normal tracking aspheric measurement based on laser interference, and belongs to the technical field of surface topography measurement. The method comprises three parts of a scanning mechanism, a laser interference measuring head, and a revolving workpiece table. A measured aspheric surface is placed on the revolving workpiece table, the scanning mechanism realizes scanning in a XZ plane by using a X-direction guide rail and a Z-direction guide rail, the laser interference measuring head is fixed on the rail end of the Z-direction guide rail through a rotation mechanism, and the laser interference measuring head ensures high-precision measurement of the aspheric surface by using a laser interference measuring principle. A position sensor is in the laser interference measuring head to measure slope variation of the surface of the aspheric surface. In a measuring process, a rotation mechanism is adjusted in real time according to output of the position sensor, so that the measuring head and the surface of the aspheric surface maintain vertical to each other all along, so as to ensure the measuring head to receive enough optical signals. The method and the system realize ultraprecise and rapid measurement of surface shapes of large diameter, high-numerical aperture, and large curvature aspheric elements.
Description
Technical field
Normal tracking mode non-spherical measuring method and system based on laser interference belongs to measuring surface form technical field, particularly a kind of ultraprecise of the non-spherical element surface shape measuring for heavy caliber, high-NA and deep camber, high speed interferometric method and system.
Background technology
Because aspheric surface has more design freedom, optical system is made to have greater flexibility, can aberration correction, improve picture element, expand visual field, and make optical system structure simplification, weight saving, therefore be widely applied in contemporary optics system, particularly in the high-end technical field such as optical imagery guidance system of astronomical telescope, deep-UV lithography, laser weapon optical system, laser fusion optical system and seeker.At present, non-spherical measuring Measures compare is many, comprising: contact type scanning method, Fizeau interference mensuration, calculation holographic method and cofocus scanning mensuration etc.
Contact type scanning method is the most classical measuring method, in measuring process, machinery gauge head keeps in touch with measured surface all the time, and the structure on surface and face deformationization can cause the displacement of mechanical gauge head generation vertical direction, namely can be obtained the face shape profile information of measured surface by this displacement of perception.The method has reliably, characteristic easily, but directly contacts with measured surface due to gauge head, therefore there is the risk damaging measured surface, is not suitable for pressure release surface, biological surface and comprises the device surface etc. of information.
Fizeau interference mensuration is identical in essence with calculation holographic method, generally need introduce zero compensation technology, it is exactly the use by compensating element, (calculation holographic plate), plane wave or spherical wave are become the corrugated consistent with tested aspheric surface desirable face shape, compare using this corrugated as standard corrugated and measured surface, by the means such as method of geometrical optics or interferometric method observation difference therebetween.The method does not need scanning mechanism, can be obtained the 3 d shape of measured surface by one-shot measurement, and measuring speed is fast, and spatial resolution is high, and measuring accuracy is high, non-cpntact measurement etc.But its major defect needs compensating element, and different measured workpiece needs different compensating element,s, and considerably increase and measure cost and complexity, the non-constant of versatility, seriously limits its measurement range; In addition, when aspheric curvature is larger, will cause that interference fringe is overstocked cannot be measured.
Cofocus scanning mensuration has a minimum pin hole before the detectors, only has when object point is positioned in focus, and reflected light can be collected by photodetector by this aperture, and beyond focus, the reflected light of object then can fall in conductively-closed.In scanning process, along with optical system is constantly moved in the vertical direction, test sample is layered imaging by with the form of section, and this process is referred to as optical chromatography.The method not only has the features such as good vertical resolution and horizontal resolution, and there is good degree of depth response characteristic, light intensity contrast ratio is high, anti-scattering luminous energy power is strong, but for high-NA or the larger surface of Curvature varying, because detection system cannot collect enough light echos, be therefore difficult to the measurement realizing its surface.
Summary of the invention
For the deficiency of above-mentioned existing non-spherical measuring method, the present invention proposes a kind of normal tracking mode non-spherical measuring method and system based on laser interference, this method adopts laser interferometry principle to measure, and laser interference gauge head has spinfunction, ultraprecise, the Quick Measurement of heavy caliber, high-NA, deep camber non-spherical element surface configuration therefore can be realized.
Object of the present invention is achieved through the following technical solutions:
Based on a normal tracking mode non-spherical measuring method for laser interference, it is characterized in that the method step is as follows:
(1) the method mainly comprises scanning mechanism, laser interference gauge head and rotary work piece platform three part; Scanning mechanism adopts X direction guiding rail and Z-direction guide rail to realize the interscan of XZ plane, and Z-direction guide rail end is with rotating mechanism, and laser interference gauge head is fixed on this rotating mechanism, can carry out gyration, and tested aspheric surface is placed on rotary work piece platform;
(2) by scanning mechanism laser interference gauge head moved to the tested point in tested aspheric surface, the X adopting laser interferometer to record now rotating mechanism center to Z-direction position coordinates, be designated as x respectively
1, z
1, in moving process, the measurement light of laser interferometer and rotating mechanism center meet abbe ' s principle all the time, thus eliminate the Abbe error in measuring; Then laser interference gauge head is utilized to measure tested aspheric surface;
(3) laser interference gauge head adopts frequency stabilized laser as light source, the output light of this frequency stabilized laser is first through an optoisolator, to eliminate the impact of light echo on frequency stabilized laser, then laser beam through 1/2nd wave plates laggard enter fiber coupler, be coupled into polarization maintaining optical fibre to transmit, simultaneously by the quick shaft direction of adjustment 1/2nd wave plate, the polarization direction of laser beam is mated with polarization maintaining optical fibre;
(4) laser beam is after polarization maintaining optical fibre transmission, be collimated mirror group and convert parallel beam to, parallel beam is polarized spectroscope and is divided into two bundles, wherein a branch ofly being converged to as with reference to light on reference mirror through after quarter-wave plate by lens, a branch ofly in addition to be converged in tested aspheric surface as measuring light by lens after quarter-wave plate;
(5) the light part reflected from tested aspheric surface is converged to position transducer by lens, converts the position of convergent beam to corresponding electric signal, and electric signal is sent into signal processing system processes; When measuring light and being vertical with tested aspheric surface, convergent beam is positioned at center sensor, and exporting electric signal is 0; When measuring light and tested aspheric surface out of plumb, convergent beam will depart from center sensor, exporting electric signal is not 0, output electric signal is sent into signal processing system process, signal processing system exports a control signal to regulate the anglec of rotation of Z-direction guide rail end rotating mechanism, until make the measurement light of laser interference gauge head vertical with tested aspheric surface, now the angle of rotating mechanism is designated as θ
1, thus ensureing in measuring process, the measurement light of laser interference gauge head remains vertical with tested aspheric surface, not by the impact of tested aspheric curvature;
(6) when the measurement light of laser interference gauge head is vertical with tested aspheric surface, another part of tested aspheric surface reflected light again superposes at polarization spectroscope place with reference mirror reflected light and forms interference signal, this interference signal converts electric signal to by by photoelectric detector, and sends into signal processing system and carry out process and obtain corresponding displacement information l
1;
(7) x of signal processing system by recording in analysis to measure process
1, z
1, θ
1, l
1, the coordinate figure of tested point in tested aspheric surface can be calculated;
(8) according to the track while scan preset, laser interference gauge head is moved to tested aspheric next tested point by scanning mechanism, the measuring process of step (2) ~ (7) is repeated at each tested point, until complete the measurement of whole track while scan, tested aspheric shape information can be obtained by the coordinate figure of measurement points all on comprehensive scanning track.
The above-mentioned normal tracking mode non-spherical measuring method based on laser interference, described laser interference gauge head adopts homodyne laser interferometry principle.
The above-mentioned normal tracking mode non-spherical measuring method based on laser interference, described laser interference gauge head adopts heterodyne laser interference measuring principle.
A kind of normal tracking mode aspherical measuring system based on laser interference, it is characterized in that, this system comprises X direction guiding rail, Z-direction guide rail, rotating mechanism, laser interference gauge head, tested aspheric surface, rotary table, Z-direction laser interferometer, X to laser interferometer, wherein, X direction guiding rail and the mutual at right angle setting of Z-direction guide rail, the scanning in XZ plane can be realized, laser interference gauge head is fixed on the end of Z-direction guide rail by rotating mechanism, the rotary motion of laser interference gauge head can be realized, Z-direction laser interferometer and X are fixed on Z-direction guide rail to laser interferometer, and Z-direction laser interferometer and X to the axis direction of laser interferometer measurement light all by the center of rotating mechanism, tested aspheric surface is fixed on rotary table, described laser interference measuring head structure is complicated, comprises frequency stabilized laser, optoisolator, 1/2nd wave plates, fiber coupler, single-mode polarization maintaining fiber, collimating mirror group, polarization spectroscope, quarter-wave plate A, lens A, reference mirror, lens B, photodetector, signal processing card, position transducer, lens C, spectroscope, lens D, quarter-wave plate B, wherein, frequency stabilized laser, optoisolator, / 2nd wave plates and fiber coupler are coaxially placed successively, fiber coupler is connected with collimating mirror group by single-mode polarization maintaining fiber, collimating mirror group, polarization spectroscope, quarter-wave plate B, spectroscope and lens D coaxially place successively, quarter-wave plate A is placed successively at the reflection direction of polarization spectroscope, lens A and reference mirror, lens B and photodetector is placed successively at another reflection direction of polarization spectroscope, lens C and position transducer is placed successively in dichroic mirror direction, photodetector is connected with signal processing card respectively with position transducer.
The above-mentioned normal tracking mode aspherical measuring system based on laser interference, described frequency stabilized laser exports a branch of single-frequency laser.
The above-mentioned normal tracking mode aspherical measuring system based on laser interference, described frequency stabilized laser exports a branch of double-frequency laser.
The invention has the beneficial effects as follows, because the present invention adopts the displacement at laser interferometer measurement rotating mechanism center, and the measurement light of laser interferometer and rotating mechanism center meet abbe ' s principle all the time in moving process, thus eliminate Abbe error, improve measuring accuracy; Measure based on the gauge head of laser interference principle because the present invention adopts, therefore can obtain very high measuring accuracy and directly can be traceable to optical maser wavelength; The measuring beam of laser interference gauge head converges to tested aspheric surface after lens, because lens have certain focal depth range, does not require strict aligning, thus can improve measurement efficiency, realize Quick Measurement in the focus position measurement process of laser beam; Because laser interference gauge head is fixed on a rotating mechanism, by controlling rotating mechanism in measuring process, make measuring beam keep vertical with measured surface all the time, make detection system can collect enough light signal strengths all the time, the Curvature varying not by measured surface affects; Generally speaking, the present invention can realize ultraprecise, the Quick Measurement of heavy caliber, high-NA, deep camber non-spherical element surface configuration.
Accompanying drawing explanation
Fig. 1 is the structural scheme of mechanism of the normal tracking mode aspherical measuring system that the present invention is based on laser interference;
Fig. 2 is the structural representation of laser interference gauge head in the present invention.
In figure, 1X direction guiding rail, 2Z direction guiding rail, 3 rotating mechanisms, 4 laser interference gauge heads, 5 tested aspheric surfaces, 6 rotary tables, 7Z are to laser interferometer, 8X to laser interferometer, 9 frequency stabilized lasers, 10 optoisolators, 1/11st 2 wave plate, 12 fiber couplers, 13 single-mode polarization maintaining fibers, 14 collimating mirror groups, 15 polarization spectroscopes, 16 quarter-wave plate A, 17 lens A, 18 reference mirrors, 19 lens B, 20 photodetectors, 21 signal processing cards, 22 position transducers, 23 lens C, 24 spectroscopes, 25 lens D, 26 quarter-wave plate B.
Embodiment
Below in conjunction with accompanying drawing, example of the present invention is described in detail.
A kind of normal tracking mode aspherical measuring system based on laser interference, its structure as shown in Figure 1, it is characterized in that, this system comprises X direction guiding rail 1, Z-direction guide rail 2, rotating mechanism 3, laser interference gauge head 4, tested aspheric surface 5, rotary table 6, Z-direction laser interferometer 7, X to laser interferometer 8, wherein, X direction guiding rail 1 and Z-direction guide rail 2 at right angle setting mutually, the scanning in XZ plane can be realized, laser interference gauge head 4 is fixed on the end of Z-direction guide rail 2 by rotating mechanism 3, the rotary motion of laser interference gauge head 4 can be realized, Z-direction laser interferometer 7 and X are fixed on Z-direction guide rail 2 to laser interferometer 8, and Z-direction laser interferometer 7 and X measure the axis direction of light all by the center of rotating mechanism 3 to laser interferometer 8, and tested aspheric surface 5 is fixed on rotary table 6, described laser interference gauge head 4 complex structure, as shown in Figure 2, frequency stabilized laser 9, optoisolator 10,1/2nd wave plate 11, fiber coupler 12, single-mode polarization maintaining fiber 13, collimating mirror group 14, polarization spectroscope 15, quarter-wave plate A 16, lens A 17, reference mirror 18, lens B 19, photodetector 20, signal processing card 21, position transducer 22, lens C 23, spectroscope 24, lens D 25, quarter-wave plate B 26 is comprised, wherein, frequency stabilized laser 9, optoisolator 10, / 2nd wave plates 11 and fiber coupler 12 are coaxially placed successively, fiber coupler 12 is connected with collimating mirror group 14 by single-mode polarization maintaining fiber 13, collimating mirror group 14, polarization spectroscope 15, quarter-wave plate B 26, spectroscope 24 and lens D 25 coaxially place successively, quarter-wave plate A 16 is placed successively at the reflection direction of polarization spectroscope 15, lens A 17 and reference mirror 18, lens B 19 and photodetector 20 is placed successively at another reflection direction of polarization spectroscope 15, lens C 23 and position transducer 22 is placed successively at spectroscope 24 reflection direction, photodetector 20 is connected with signal processing card 21 respectively with position transducer 22.Both can adopt the laser instrument exporting single-frequency laser based on the frequency stabilized laser 7 in the normal tracking mode aspherical measuring system of laser interference, also can adopt the laser instrument exporting double-frequency laser.
Based on a normal tracking mode non-spherical measuring method for laser interference, it is characterized in that the method step is as follows:
(1) the method mainly comprises scanning mechanism, laser interference gauge head and rotary work piece platform three part; Scanning mechanism adopts X direction guiding rail and Z-direction guide rail to realize the interscan of XZ plane, and Z-direction guide rail end is with rotating mechanism, and laser interference gauge head is fixed on this rotating mechanism, can carry out gyration, and tested aspheric surface is placed on rotary work piece platform;
(2) by scanning mechanism laser interference gauge head moved to the tested point in tested aspheric surface, the X adopting laser interferometer to record now rotating mechanism center to Z-direction position coordinates, be designated as x respectively
1, z
1, in moving process, the measurement light of laser interferometer and rotating mechanism center meet abbe ' s principle all the time, thus eliminate the Abbe error in measuring; Then laser interference gauge head is utilized to measure tested aspheric surface;
(3) laser interference gauge head adopts frequency stabilized laser as light source, the output light of this frequency stabilized laser is first through an optoisolator, to eliminate the impact of light echo on frequency stabilized laser, then laser beam through 1/2nd wave plates laggard enter fiber coupler, be coupled into polarization maintaining optical fibre to transmit, simultaneously by the quick shaft direction of adjustment 1/2nd wave plate, the polarization direction of laser beam is mated with polarization maintaining optical fibre;
(4) laser beam is after polarization maintaining optical fibre transmission, be collimated mirror group and convert parallel beam to, parallel beam is polarized spectroscope and is divided into two bundles, wherein a branch ofly being converged to as with reference to light on reference mirror through after quarter-wave plate by lens, a branch ofly in addition to be converged in tested aspheric surface as measuring light by lens after quarter-wave plate;
(5) the light part reflected from tested aspheric surface is converged to position transducer by lens, converts the position of convergent beam to corresponding electric signal, and electric signal is sent into signal processing system processes; When measuring light and being vertical with tested aspheric surface, convergent beam is positioned at center sensor, and exporting electric signal is 0; When measuring light and tested aspheric surface out of plumb, convergent beam will depart from center sensor, exporting electric signal is not 0, output electric signal is sent into signal processing system process, signal processing system exports a control signal to regulate the anglec of rotation of Z-direction guide rail end rotating mechanism, until make the measurement light of laser interference gauge head vertical with tested aspheric surface, now the angle of rotating mechanism is designated as θ
1, thus ensureing in measuring process, the measurement light of laser interference gauge head remains vertical with tested aspheric surface, not by the impact of tested aspheric curvature;
(6) when the measurement light of laser interference gauge head is vertical with tested aspheric surface, another part of tested aspheric surface reflected light again superposes at polarization spectroscope place with reference mirror reflected light and forms interference signal, this interference signal converts electric signal to by by photoelectric detector, and sends into signal processing system and carry out process and obtain corresponding displacement information l
1;
(7) x of signal processing system by recording in analysis to measure process
1, z
1, θ
1, l
1, the coordinate figure of tested point in tested aspheric surface can be calculated;
(8) according to the track while scan preset, laser interference gauge head is moved to tested aspheric next tested point by scanning mechanism, the measuring process of step (2) ~ (7) is repeated at each tested point, until complete the measurement of whole track while scan, tested aspheric shape information can be obtained by the coordinate figure of measurement points all on comprehensive scanning track.
Claims (6)
1., based on a normal tracking mode non-spherical measuring method for laser interference, it is characterized in that the method step is as follows:
(1) the method mainly comprises scanning mechanism, laser interference gauge head and rotary work piece platform three part; Scanning mechanism adopts X direction guiding rail and Z-direction guide rail to realize the interscan of XZ plane, and Z-direction guide rail end is with rotating mechanism, and laser interference gauge head is fixed on this rotating mechanism, can carry out gyration, and tested aspheric surface is placed on rotary work piece platform;
(2) by scanning mechanism laser interference gauge head moved to the tested point in tested aspheric surface, the X adopting laser interferometer to record now rotating mechanism center to Z-direction position coordinates, be designated as x respectively
1, z
1, in moving process, the measurement light of laser interferometer and rotating mechanism center meet abbe ' s principle all the time, thus eliminate the Abbe error in measuring; Then laser interference gauge head is utilized to measure tested aspheric surface;
(3) laser interference gauge head adopts frequency stabilized laser as light source, the output light of this frequency stabilized laser is first through an optoisolator, to eliminate the impact of light echo on frequency stabilized laser, then laser beam through 1/2nd wave plates laggard enter fiber coupler, be coupled into polarization maintaining optical fibre to transmit, simultaneously by the quick shaft direction of adjustment 1/2nd wave plate, the polarization direction of laser beam is mated with polarization maintaining optical fibre;
(4) laser beam is after polarization maintaining optical fibre transmission, be collimated mirror group and convert parallel beam to, parallel beam is polarized spectroscope and is divided into two bundles, wherein a branch ofly being converged to as with reference to light on reference mirror through after quarter-wave plate by lens, a branch ofly in addition to be converged in tested aspheric surface as measuring light by lens after quarter-wave plate;
(5) the light part reflected from tested aspheric surface is converged to position transducer by lens, converts the position of convergent beam to corresponding electric signal, and electric signal is sent into signal processing system processes; When measuring light and being vertical with tested aspheric surface, convergent beam is positioned at center sensor, and exporting electric signal is 0; When measuring light and tested aspheric surface out of plumb, convergent beam will depart from center sensor, exporting electric signal is not 0, output electric signal is sent into signal processing system process, signal processing system exports a control signal to regulate the anglec of rotation of Z-direction guide rail end rotating mechanism, until make the measurement light of laser interference gauge head vertical with tested aspheric surface, now the angle of rotating mechanism is designated as θ
1, thus ensureing in measuring process, the measurement light of laser interference gauge head remains vertical with tested aspheric surface, not by the impact of tested aspheric curvature;
(6) when the measurement light of laser interference gauge head is vertical with tested aspheric surface, another part of tested aspheric surface reflected light again superposes at polarization spectroscope place with reference mirror reflected light and forms interference signal, this interference signal converts electric signal to by by photoelectric detector, and sends into signal processing system and carry out process and obtain corresponding displacement information l
1;
(7) x of signal processing system by recording in analysis to measure process
1, z
1, θ
1, l
1, the coordinate figure of tested point in tested aspheric surface can be calculated;
(8) according to the track while scan preset, laser interference gauge head is moved to tested aspheric next tested point by scanning mechanism, the measuring process of step (2) ~ (7) is repeated at each tested point, until complete the measurement of whole track while scan, tested aspheric shape information can be obtained by the coordinate figure of measurement points all on comprehensive scanning track.
2. the normal tracking mode non-spherical measuring method based on laser interference according to claim 1, is characterized in that laser interference gauge head adopts homodyne laser interferometry principle.
3. the normal tracking mode non-spherical measuring method based on laser interference according to claim 1, is characterized in that laser interference gauge head adopts heterodyne laser interference measuring principle.
4. the normal tracking mode aspherical measuring system based on laser interference, it is characterized in that, this system comprises X direction guiding rail (1), Z-direction guide rail (2), rotating mechanism (3), laser interference gauge head (4), tested aspheric surface (5), rotary table (6), Z-direction laser interferometer (7), X to laser interferometer (8), wherein, X direction guiding rail (1) and Z-direction guide rail (2) at right angle setting mutually, the scanning in XZ plane can be realized, laser interference gauge head (4) is fixed on the end of Z-direction guide rail (2) by rotating mechanism (3), the rotary motion of laser interference gauge head (4) can be realized, Z-direction laser interferometer (7) and X are fixed on Z-direction guide rail (2) to laser interferometer (8), and Z-direction laser interferometer (7) and X measure the axis direction of light all by the center of rotating mechanism (3) to laser interferometer (8), tested aspheric surface (5) is fixed on rotary table (6), described laser interference gauge head (4) complex structure, comprise frequency stabilized laser (9), optoisolator (10), / 2nd wave plates (11), fiber coupler (12), single-mode polarization maintaining fiber (13), collimating mirror group (14), polarization spectroscope (15), quarter-wave plate A (16), lens A (17), reference mirror (18), lens B (19), photodetector (20), signal processing card (21), position transducer (22), lens C (23), spectroscope (24), lens D (25), quarter-wave plate B (26), wherein, frequency stabilized laser (9), optoisolator (10), / 2nd wave plates (11) and fiber coupler (12) are coaxially placed successively, fiber coupler (12) is connected with collimating mirror group (14) by single-mode polarization maintaining fiber (13), collimating mirror group (14), polarization spectroscope (15), quarter-wave plate B (26), spectroscope (24) and lens D (25) coaxially place successively, quarter-wave plate A (16) is placed successively at the reflection direction of polarization spectroscope (15), lens A (17) and reference mirror (18), lens B (19) and photodetector (20) is placed successively at another reflection direction of polarization spectroscope (15), lens C (23) and position transducer (22) is placed successively at spectroscope (24) reflection direction, photodetector (20) is connected with signal processing card (21) respectively with position transducer (22).
5. the normal tracking mode aspherical measuring system based on laser interference according to claim 4, is characterized in that frequency stabilized laser (9) exports a branch of single-frequency laser.
6. the normal tracking mode aspherical measuring system based on laser interference according to claim 4, is characterized in that frequency stabilized laser (9) exports a branch of double-frequency laser.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510313714.2A CN104864822B (en) | 2015-06-10 | 2015-06-10 | Normal tracking mode non-spherical measuring method and system based on laser interference |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510313714.2A CN104864822B (en) | 2015-06-10 | 2015-06-10 | Normal tracking mode non-spherical measuring method and system based on laser interference |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104864822A true CN104864822A (en) | 2015-08-26 |
| CN104864822B CN104864822B (en) | 2018-02-13 |
Family
ID=53910828
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510313714.2A Expired - Fee Related CN104864822B (en) | 2015-06-10 | 2015-06-10 | Normal tracking mode non-spherical measuring method and system based on laser interference |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104864822B (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108332683A (en) * | 2018-02-09 | 2018-07-27 | 苏州大学 | A kind of interference optical for three dimension profile measurement is popped one's head in |
| CN108344381A (en) * | 2018-02-09 | 2018-07-31 | 苏州大学 | A kind of non-contact 3-D surface shape measurement method |
| CN108344383A (en) * | 2018-02-09 | 2018-07-31 | 苏州大学 | A kind of non-contact coordinate measuring machine |
| CN110296662A (en) * | 2018-03-23 | 2019-10-01 | 株式会社钢臂功科研 | Form measuring instrument and its method |
| CN110986792A (en) * | 2019-12-13 | 2020-04-10 | 合肥工业大学 | High-precision detection device and detection method for one-dimensional ball or cone nest array |
| CN112857221A (en) * | 2021-01-15 | 2021-05-28 | 海伯森技术（深圳）有限公司 | Scanning method and device for quickly positioning spherical extreme point |
| CN113465533A (en) * | 2021-06-23 | 2021-10-01 | 中国科学院长春光学精密机械与物理研究所 | Non-contact optical profile measuring method and device |
| CN114248154A (en) * | 2021-11-05 | 2022-03-29 | 上海交通大学 | Five-axis machine tool space positioning precision detection device and method |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006126103A (en) * | 2004-11-01 | 2006-05-18 | Canon Inc | Aspheric surface shape measuring method |
| CN101270975A (en) * | 2008-05-16 | 2008-09-24 | 湖南大学 | Combined interference device for aspheric surface measurement |
| CN101377410A (en) * | 2008-10-10 | 2009-03-04 | 哈尔滨工业大学 | Large caliber aspheric surface measuring apparatus and method based on ultra-precise revolving scanning |
| CN101571382A (en) * | 2009-06-09 | 2009-11-04 | 厦门大学 | Test method of surface shapes of axisymmetric aspheric optical elements |
| JP2011215016A (en) * | 2010-03-31 | 2011-10-27 | Fujifilm Corp | Aspheric surface measuring apparatus |
| JP2011215018A (en) * | 2010-03-31 | 2011-10-27 | Fujifilm Corp | Aspheric surface measuring apparatus |
| CN103105141A (en) * | 2012-12-30 | 2013-05-15 | 北京理工大学 | Outline scanning measuring method and device of large-scale sphere and aspheric surface |
| CN103292729A (en) * | 2013-05-16 | 2013-09-11 | 厦门大学 | Aspheric normal error detecting device |
-
2015
- 2015-06-10 CN CN201510313714.2A patent/CN104864822B/en not_active Expired - Fee Related
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006126103A (en) * | 2004-11-01 | 2006-05-18 | Canon Inc | Aspheric surface shape measuring method |
| CN101270975A (en) * | 2008-05-16 | 2008-09-24 | 湖南大学 | Combined interference device for aspheric surface measurement |
| CN101377410A (en) * | 2008-10-10 | 2009-03-04 | 哈尔滨工业大学 | Large caliber aspheric surface measuring apparatus and method based on ultra-precise revolving scanning |
| CN101571382A (en) * | 2009-06-09 | 2009-11-04 | 厦门大学 | Test method of surface shapes of axisymmetric aspheric optical elements |
| JP2011215016A (en) * | 2010-03-31 | 2011-10-27 | Fujifilm Corp | Aspheric surface measuring apparatus |
| JP2011215018A (en) * | 2010-03-31 | 2011-10-27 | Fujifilm Corp | Aspheric surface measuring apparatus |
| CN102235853A (en) * | 2010-03-31 | 2011-11-09 | 富士胶片株式会社 | Aspheric surface measuring apparatus |
| CN103105141A (en) * | 2012-12-30 | 2013-05-15 | 北京理工大学 | Outline scanning measuring method and device of large-scale sphere and aspheric surface |
| CN103292729A (en) * | 2013-05-16 | 2013-09-11 | 厦门大学 | Aspheric normal error detecting device |
Non-Patent Citations (1)
| Title |
|---|
| 贺俊等: "使用红外干涉仪测量非球面面形", 《光学精密工程》 * |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108332683A (en) * | 2018-02-09 | 2018-07-27 | 苏州大学 | A kind of interference optical for three dimension profile measurement is popped one's head in |
| CN108344381A (en) * | 2018-02-09 | 2018-07-31 | 苏州大学 | A kind of non-contact 3-D surface shape measurement method |
| CN108344383A (en) * | 2018-02-09 | 2018-07-31 | 苏州大学 | A kind of non-contact coordinate measuring machine |
| CN108332683B (en) * | 2018-02-09 | 2020-09-18 | 苏州大学 | Interference type optical probe for three-dimensional surface shape measurement |
| CN110296662A (en) * | 2018-03-23 | 2019-10-01 | 株式会社钢臂功科研 | Form measuring instrument and its method |
| CN110296662B (en) * | 2018-03-23 | 2021-08-10 | 株式会社钢臂功科研 | Shape measuring device and method thereof |
| CN110986792B (en) * | 2019-12-13 | 2021-05-25 | 合肥工业大学 | High-precision detection device and detection method for one-dimensional ball or cone nest array |
| CN110986792A (en) * | 2019-12-13 | 2020-04-10 | 合肥工业大学 | High-precision detection device and detection method for one-dimensional ball or cone nest array |
| CN112857221A (en) * | 2021-01-15 | 2021-05-28 | 海伯森技术（深圳）有限公司 | Scanning method and device for quickly positioning spherical extreme point |
| CN112857221B (en) * | 2021-01-15 | 2023-02-24 | 海伯森技术（深圳）有限公司 | Scanning method and device for quickly positioning spherical extreme point |
| CN113465533A (en) * | 2021-06-23 | 2021-10-01 | 中国科学院长春光学精密机械与物理研究所 | Non-contact optical profile measuring method and device |
| CN113465533B (en) * | 2021-06-23 | 2022-04-22 | 中国科学院长春光学精密机械与物理研究所 | Non-contact optical profile measuring method and device |
| CN114248154A (en) * | 2021-11-05 | 2022-03-29 | 上海交通大学 | Five-axis machine tool space positioning precision detection device and method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104864822B (en) | 2018-02-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104864822A (en) | Method and system for normal tracking aspheric measurement based on laser interference | |
| CN104848802B (en) | Normal tracking mode differential confocal non-spherical measuring method and system | |
| CN102147240B (en) | Method and device for measuring multiple element parameters in differential con-focus interference manner | |
| CN104913732B (en) | The normal tracking mode non-spherical measuring method and system interfered based on recombination laser | |
| CN104913733B (en) | The normal tracking mode non-spherical measuring method and system interfered based on multiwavelength laser | |
| CN102679894B (en) | Method for measuring central thickness of reflecting type differential confocal lens | |
| CN104154869B (en) | White light interference lens center thickness measuring system and method | |
| CN108801178B (en) | Differential confocal auto-collimation center deviation and curvature radius measuring method and device | |
| CN101793500B (en) | Method and device for measuring central thickness of differential confocal lens | |
| CN107843213A (en) | Confocal auto-collimation center partially and curvature radius measurement method and device | |
| CN102425998B (en) | Full parameter detection apparatus of polished surface quality of optical element and detection method thereof | |
| CN102679895B (en) | Method for measuring center thickness of reflective confocal lens | |
| CN101788271A (en) | Method and device for measuring thickness of the center of confocal lens | |
| CN103162616B (en) | For microsphere surface morphology detect instantaneous phase-shifting interference measuring instrument and adopt this measuring instrument to realize the measuring method of microsphere surface morphology | |
| CN103884491A (en) | Two-dimensional dynamic angle measuring and calibrating method and device of scanning camera mirror | |
| CN102494623A (en) | Method for non-contact measuring center to center distance of lens optical surfaces and measuring device | |
| CN105181298A (en) | Multiple reflection type laser con-focal long focal length measuring method and device | |
| CN110081823B (en) | Five-degree-of-freedom geometric motion error measurement system of machine tool | |
| CN101813458A (en) | Method and device for measuring optical axis and gap of lens group by differential confocal internal focusing method | |
| CN101762240B (en) | Method for measuring axial gaps of differential confocal lens set | |
| CN103123251B (en) | Differential confocal internal focusing method lens axis and method for measuring thickness | |
| CN109186479B (en) | Method and device for measuring axial clearance of rear-mounted pupil laser differential confocal lens group | |
| CN104315985A (en) | Interference measuring method for thickness of center of lens | |
| CN103673926A (en) | Reflection cavity type confocal measuring method of super-large radius of curvature | |
| CN104154868A (en) | Bifocal lens-based non-contact lens central thickness measuring device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| EXSB | Decision made by sipo to initiate substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180213 Termination date: 20180610 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |