CN110986792B - High-precision detection device and detection method for one-dimensional ball or cone nest array - Google Patents

High-precision detection device and detection method for one-dimensional ball or cone nest array Download PDF

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CN110986792B
CN110986792B CN201911289586.7A CN201911289586A CN110986792B CN 110986792 B CN110986792 B CN 110986792B CN 201911289586 A CN201911289586 A CN 201911289586A CN 110986792 B CN110986792 B CN 110986792B
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dimensional
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displacement table
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CN110986792A (en
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赵会宁
于连栋
丁雯静
蒲松
符晗
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Hefei University of Technology
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers

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  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

The invention discloses a high-precision detection device for a one-dimensional ball or cone nest array, which comprises an L-shaped base and the one-dimensional ball or cone nest array, wherein the L-shaped base is provided with an L-shaped structure with a horizontal part and a vertical part, the surface of the vertical part of the L-shaped base is fixedly connected with the one-dimensional ball array or cone nest array, the horizontal part of the L-shaped base is fixedly connected with a one-dimensional high-precision displacement table, and a measuring head is fixed on the one-dimensional high-precision displacement table; the measuring head comprises a fixed base, a lens, a spectroscope and a laser are sequentially arranged on the fixed base according to a straight line, a four-quadrant detector is fixed on one side of the spectroscope, a power supply interface and a signal output interface are arranged on the four-quadrant detector, and the signal output interface is connected with a channel port corresponding to the data acquisition module. The method can measure the distance between the spherical centers of two standard spheres and two conical pits through geometric operation. The problem of calibration of the cone and socket precision is solved, the performance evaluation process is simpler and more convenient, and the measurement cost is saved.

Description

High-precision detection device and detection method for one-dimensional ball or cone nest array
Technical Field
The invention belongs to the technical field of length verification, and relates to a high-precision detection device and a detection method for a one-dimensional ball or cone-nest array.
Background
Aiming at the problem of precision tracing of a one-dimensional ball or cone nest array adopted by the performance evaluation of an articulated arm type coordinate measuring machine or a laser tracker, a high-precision three-coordinate measuring machine or special measuring equipment is mainly adopted for calibration. However, when the method is used for calibrating the one-dimensional spherical array, the calibration accuracy reaches a higher level, but fitting errors exist. For the precision calibration of the cone pits, due to the special structural problem, no matter a three-coordinate measuring machine or a special measuring instrument can not solve the precision calibration problem, the invention adopts a non-contact measuring mode, can solve the precision calibration problem between two cone pits, and realizes the high-precision detection of a one-dimensional ball or cone pit array.
Disclosure of Invention
The invention aims to overcome the defects of the technology and provides a high-precision detection device and a detection method for a one-dimensional ball or cone array, so that the problem of precision traceability of the one-dimensional ball or cone array is solved, the performance evaluation process of an articulated arm type coordinate measuring machine and a laser tracker is simpler and more convenient, and the measurement cost is saved to a great extent.
In order to achieve the purpose, the technical scheme of the invention is as follows:
a high-precision detection device for a one-dimensional ball or cone nest array comprises an L-shaped base 4 and the one-dimensional ball or cone nest array 2, and is characterized in that the L-shaped base is provided with an L-shaped structure with a horizontal part and a vertical part, the surface of the vertical part of the L-shaped base 4 is fixedly connected with the one-dimensional ball array or cone nest array 2, the horizontal part of the L-shaped base 4 is fixedly connected with a one-dimensional high-precision displacement table 1, and a measuring head 3 is fixed on the one-dimensional high-precision displacement table 1; the measuring head comprises a fixed base 33 fixed on a one-dimensional high-precision displacement table, a lens 32, a spectroscope 31 and a laser 34 are sequentially installed on the fixed base 33 according to a straight line, a four-quadrant detector 35 is fixed on one side of the spectroscope 31, a power supply interface and a signal output interface are arranged on the four-quadrant detector 35, the signal output interface is connected with a channel port corresponding to a data acquisition module, and the signal output interface is connected with a channel port corresponding to the data acquisition module in the X-direction and the Y-direction displacement.
Preferably, the one-dimensional high-precision displacement table comprises a one-dimensional high-precision displacement table base 14 fixed on the L-shaped base, the upper surface of the one-dimensional high-precision displacement table base 14 is provided with two guide rails 12, the two guide rails 12 are slidably connected with a one-dimensional high-precision displacement table working table 11 driven by a motor 15, and the outer side of the one-dimensional high-precision displacement table base 14 is fixedly connected with a measuring reflecting mirror of a laser interferometer 13 through a support so as to be matched with the laser interferometer to position the displacement length of the one-dimensional high-precision displacement table.
Preferably, the one-dimensional ball array 2 comprises a standard ball 21 and a ball rod 22, wherein the ball rod 22 is fixed on the surface of the vertical part of the L-shaped base, a notch of the ball rod is provided with a magnet, and the standard ball 21 is partially embedded into the notch and is attracted and fixed by the magnet.
A detection method of a high-precision detection device of a one-dimensional ball or cone-fossa array is characterized by comprising the following steps:
(1) fixing the measuring head 3 on a one-dimensional high-precision displacement table working table 11, driving the one-dimensional high-precision displacement table 1 by a motor, so that the laser of a laser 34 on the measuring head 3 irradiates one standard ball surface of the one-dimensional ball array, moving the one-dimensional high-precision displacement table by the motor 15 until the laser of the laser 34 on the measuring head 3 irradiates the next standard ball surface of the one-dimensional ball array, and repeating the steps to measure;
(2)、yijindicates the displacement distance, Deltax, of the one-dimensional high-precision displacement stage 1 measured by the laser interferometer 13 when the probe moves from the ith reference sphere position to the jth reference sphere positioni、ΔziIs the offset distance of the center of the ith standard sphere in the X direction and the Z direction respectively, Deltaxj、ΔzjIs the offset distance of the center of the jth standard ball in the X direction and the Z direction respectively; the offset amount Deltax in the X direction and the Z direction from the center of the ith standard ball to the center of the jth standard ballij、ΔzijRespectively as follows:
Δxij＝Δxi-Δxj (1)
Δzij＝Δzi-Δzj (2)
the two standard ball centers O can be obtained from the formulas (1) and (2)i、OjActual distance between
Figure BDA0002316815760000021
The method comprises the following steps:
Figure BDA0002316815760000022
the measuring method of the one-dimensional conical pit array is consistent with the measuring method of the same-dimensional spherical array in the measuring principle.
Compared with the prior art, the invention has the following beneficial effects:
1) the measuring method adopted by the invention is non-contact measurement, the measuring precision is high, the measuring mode is flexible, and the problem of precision calibration between two conical pits can be solved.
2) The cost of the materials and the device adopted by the invention is lower than the price of the traditional calibrated instrument and equipment, and the measurement cost is saved to a great extent.
3) The components and small parts of the one-dimensional ball or cone array high-precision detection device have relatively low installation and debugging requirements in the measurement process, so that the calibration process is simpler and more convenient.
Drawings
FIG. 1 is a schematic diagram of the high-precision detection device of the one-dimensional ball or cone-and-socket array according to the present invention.
Fig. 2 is a schematic diagram of a high-precision one-dimensional displacement table of the one-dimensional ball or cone array high-precision detection device of the invention.
Fig. 3 is a schematic diagram of a measuring head of the one-dimensional ball or cone-and-socket array high-precision detection device of the present invention.
Fig. 4 is a schematic diagram of one-dimensional ball array measurement of the one-dimensional ball or cone-and-socket array high-precision detection device of the invention.
Fig. 5 is a schematic diagram of one-dimensional cone-pit array measurement of the one-dimensional ball or cone-pit array high-precision detection device of the invention.
FIG. 6 is a schematic diagram of the measurement of a four-quadrant detector of the one-dimensional ball or cone-and-socket array high-precision detection device of the present invention.
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the invention and together with the description, serve to explain the principles of the invention.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings.
As shown in fig. 1 and 5, a high-precision detection device for a one-dimensional ball or cone array comprises an L-shaped base 4 and a one-dimensional ball or cone array 2, wherein the L-shaped base has an L-shaped structure with a horizontal part and a vertical part, the surface of the vertical part of the L-shaped base 4 is fixedly connected with the one-dimensional ball array or cone array 2, the horizontal part of the L-shaped base 4 is fixedly connected with a one-dimensional high-precision displacement table 1, and a measuring head 3 is fixed on the one-dimensional high-precision displacement table 1; as shown in fig. 3 and 6, the measuring head includes a fixed base 33 fixed on the one-dimensional high-precision displacement table, a lens 32, a spectroscope 31 and a laser 34 are sequentially installed on the fixed base 33 in a straight line, a four-quadrant detector 35 is fixed on one side of the spectroscope 31, a power supply interface and a signal output interface are arranged on the four-quadrant detector 35, and the signal output interface is connected with a corresponding channel port of the data acquisition module. Wherein, the X, Y direction displacement signal output interface is respectively connected with the corresponding channel ports of the data acquisition module.
As shown in fig. 2, the one-dimensional high-precision displacement table includes a one-dimensional high-precision displacement table base 14 fixed to an L-shaped base, two guide rails 12 are arranged on the upper surface of the one-dimensional high-precision displacement table base 14, a one-dimensional high-precision displacement table working table 11 driven by a motor 15 is connected to the two guide rails 12 in a sliding manner, and a measuring reflecting mirror of a laser interferometer 13 is fixedly connected to the outer side of the one-dimensional high-precision displacement table base 14 through a support so as to cooperate with the laser interferometer to position the displacement length of the one-dimensional high-precision displacement table.
As shown in fig. 4, the one-dimensional ball array 2 comprises a standard ball 21 and a ball rod 22, wherein the ball rod 22 is fixed on the surface of the vertical part of the L-shaped base, a notch of the ball rod is provided with a magnet, and the standard ball 21 is partially embedded into the notch and is attracted and fixed by the magnet.
A detection method of a high-precision detection device of a one-dimensional ball or cone-fossa array comprises the following steps:
(1) fixing the measuring head 3 on a one-dimensional high-precision displacement table working table 11, driving the one-dimensional high-precision displacement table 1 by a motor, so that the laser of a laser 34 on the measuring head 3 irradiates one standard ball surface of the one-dimensional ball array, moving the one-dimensional high-precision displacement table by the motor 15 until the laser of the laser 34 on the measuring head 3 irradiates the next standard ball surface of the one-dimensional ball array, and repeating the steps to measure;
(2)、yijindicating that the measuring head is positioned by the ith standard ballWhen the displacement is moved to the j-th reference sphere position, the displacement distance, Deltax, of the one-dimensional high-precision displacement stage 1 is measured by the laser interferometer 13i、ΔziIs the offset distance of the center of the ith standard sphere in the X direction and the Z direction respectively, Deltaxj、ΔzjIs the offset distance of the center of the jth standard ball in the X direction and the Z direction respectively; the offset amount Deltax in the X direction and the Z direction from the center of the ith standard ball to the center of the jth standard ballij、ΔzijRespectively as follows:
Δxij＝Δxi-Δxj (1)
Δzij＝Δzi-Δzj (2)
the two standard ball centers O can be obtained from the formulas (1) and (2)i、OjActual distance between
Figure BDA0002316815760000041
The method comprises the following steps:
Figure BDA0002316815760000042
the measuring method of the one-dimensional conical pit array is consistent with the measuring method of the same-dimensional spherical array in the measuring principle.
The described embodiments are only some embodiments of the invention, not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Claims (3)

1. A high-precision detection device for a one-dimensional ball or cone nest array comprises an L-shaped base (4) and the one-dimensional ball or cone nest array (2), and is characterized in that the L-shaped base is provided with an L-shaped structure with a horizontal part and a vertical part, the surface of the vertical part of the L-shaped base (4) is fixedly connected with the one-dimensional ball array or cone nest array (2), the horizontal part of the L-shaped base (4) is fixedly connected with a one-dimensional high-precision displacement table (1), and a measuring head (3) is fixed on the one-dimensional high-precision displacement table (1); the measuring head comprises a fixed base (33), a lens (32), a spectroscope (31) and a laser (34) are sequentially arranged on the fixed base according to a straight line, a four-quadrant detector (35) is fixed on one side of the spectroscope (31), a power supply interface and a signal output interface are arranged on the four-quadrant detector (35), and the signal output interface is connected with a channel port of a data acquisition module;
the one-dimensional high-precision displacement table 1 comprises a one-dimensional high-precision displacement table base (14) fixed on an L-shaped base (4), two guide rails (12) are arranged on the upper surface of the one-dimensional high-precision displacement table base (14), a one-dimensional high-precision displacement table working table (11) driven by a motor (15) is connected onto the two guide rails (12) in a sliding mode, and a measuring reflecting mirror of a laser interferometer (13) is fixedly connected to the outer side of the one-dimensional high-precision displacement table base (14) through a support so as to be matched with the laser interferometer to position the displacement length of the one-dimensional high-precision displacement table.
2. The device for detecting the high precision of the one-dimensional ball or cone-socket array according to the claim 1 is characterized in that the one-dimensional ball array (2) comprises a standard ball (21) and a ball rod (22), the ball rod (22) is fixed on the surface of the vertical part of the L-shaped base, the notch of the ball rod (22) is provided with a magnet, and the standard ball (21) is partially embedded in the notch and is attracted and fixed by the magnet.
3. The detection method of the high-precision detection device of the one-dimensional ball or cone-and-socket array according to any one of claims 1-2, characterized by comprising the following steps:
(1) fixing a measuring head (3) on a one-dimensional high-precision displacement table workbench (11), driving a one-dimensional high-precision displacement table (1) by a motor 15, so that laser of a laser (34) on the measuring head (3) irradiates one standard ball surface of a one-dimensional ball array, moving the one-dimensional high-precision displacement table (1) by the motor 15 until the laser of the laser (34) on the measuring head (3) irradiates the next standard ball surface of the one-dimensional ball array, and repeating the steps to measure;
(2)、yijindicates the displacement distance of the one-dimensional high-precision displacement table (1) measured by the laser interferometer (13) when the measuring head moves from the ith standard ball (21) position to the jth standard ball position，Δxi、ΔziIs the offset distance of the center of the ith standard sphere in the X direction and the Z direction respectively, Deltaxj、ΔzjIs the offset distance of the center of the jth standard ball in the X direction and the Z direction respectively; the offset amount Deltax in the X direction and the Z direction from the center of the ith standard ball to the center of the jth standard ballij、ΔzijRespectively as follows:
Δxij＝Δxi-Δxj (1)
Δzij＝Δzi-Δzj (2)
the two standard ball centers O can be obtained from the formulas (1) and (2)i、OjActual distance between
Figure FDA0002973819960000021
The method comprises the following steps:
Figure FDA0002973819960000022
the measuring method of the one-dimensional conical pit array is consistent with the measuring method of the same-dimensional spherical array in the measuring principle.
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WO2022067596A1 (en) * 2020-09-30 2022-04-07 成都飞机工业（集团）有限责任公司 Standard ball array-based geometric error detection method for machine tool
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