CN103940348A - Device and method for detecting movement errors of working platform in multiple degrees of freedom - Google Patents
Device and method for detecting movement errors of working platform in multiple degrees of freedom Download PDFInfo
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Abstract
本发明公开了一种工作台运动误差多自由度检测的装置及方法,本发明的反射光经过光路调整反射镜反射到固定在工作台上的三面反射镜上,经过三面反射镜的依次反射后,回到光路调整反射镜,并反射到第二分光片上,经第二分光片的反射后进入扩束镜,投射到探测器上;透射光经过第二分光片的透射后,进入扩束镜,投射到探测器上。两束光在探测器上产生干涉,对干涉条纹的形状的调整与相移的测量,能够实现对工作台的偏转与运动位移的测量;本发明可用在对工作台的摇摆角、俯仰角与轴向运动位移的同步实时测量,由此可以通过测量结果进行实时补偿,消除运动误差的影响,从而提高测量精度与制造精度。角度的测量范围在±3mrad范围内,满足工作台的测量要求。
The invention discloses a device and method for multi-degree-of-freedom detection of workbench motion errors. The reflected light of the invention is reflected on three reflectors fixed on the workbench through an optical path adjustment reflector, and is sequentially reflected by the three reflectors. , return to the optical path to adjust the reflector, and reflect to the second beam splitter, enter the beam expander after being reflected by the second beam splitter, and project on the detector; the transmitted light enters the beam expander after being transmitted by the second beam splitter , projected onto the detector. The two beams of light interfere on the detector, and the adjustment of the shape of the interference fringe and the measurement of the phase shift can realize the measurement of the deflection and motion displacement of the worktable; the present invention can be used to measure the swing angle, pitch angle and The synchronous real-time measurement of the axial movement displacement enables real-time compensation through the measurement results to eliminate the influence of movement errors, thereby improving the measurement accuracy and manufacturing accuracy. The measurement range of the angle is within ±3mrad, which meets the measurement requirements of the workbench.
Description
the
技术领域 technical field
本发明涉及到一种工作台多自由度检测装置,该装置可实现工作台摇摆角、俯仰角与直线运动位移的同步测量。 The invention relates to a workbench multi-degree-of-freedom detection device, which can realize the synchronous measurement of the workbench's swing angle, pitch angle and linear motion displacement.
the
背景技术 Background technique
精密工作台是表面形貌测量与精密加工的关键部件,其运动精度直接决定着测量精度与加工精度,因而研究与设计对工作台角偏与线偏的实时在线测量方法具有重要意义。 The precision table is a key component of surface topography measurement and precision machining, and its movement accuracy directly determines the measurement accuracy and machining accuracy. Therefore, research and design are of great significance to the real-time on-line measurement method of the angle deviation and line deviation of the work table.
目前对工作台运动误差的测量方法中,高精度测量方法,所测量的自由度少或只能进行单自由度测量;多自由度测量方法中,测量精度较低,或采用组合式的测量方式测量精度高,但成本高、体积庞大。 Among the current measurement methods for the motion error of the workbench, the high-precision measurement method has few degrees of freedom or can only measure a single degree of freedom; in the multi-degree-of-freedom measurement method, the measurement accuracy is low, or a combined measurement method is used The measurement accuracy is high, but the cost is high and the volume is bulky.
现有的工作台运动误差测量方法主要有几种:一是采用激光干涉法,即基于激光干涉原理的干涉测量方法,应用光学元件在工作台上的各种组合,通过对激光的反射与折射等,形成与工作台运动误差相关的光程差,然后对光程差导致的相位差的计算,得到工作台的运动误差。由于以激光波长为标准,所以测量精度能达到较高要求,但一般只能满足单自由度的要求,当要求进行多自由度测量时,必须同时采用多个类似激光干涉仪,这导致系统结构过于庞大。二是基于激光准直原理测量二维角度,直接利用四象限探测器或CCD获取光斑重心,对导轨或工作台直线度进行测量。该方法除了需要对激光光束进行严格的准直处理外,由于受激光光斑发散角与光束漂移的影响,很难达到高精度的要求;三是其他多传感器组合测量的方法,包括采用电容、光栅等传感器,对工作台不同部位进行测量,从而计算其运动误差,一般这种方法结构复杂,只适合于对专门的工作台进行运动误差的研究与分析。且安装要求很高,对环境的要求也很严格,成本较高。 There are several existing worktable motion error measurement methods: one is to use laser interferometry, that is, an interferometric method based on the principle of laser interference, which uses various combinations of optical components on the workbench, through the reflection and refraction of laser light etc. to form the optical path difference related to the movement error of the worktable, and then calculate the phase difference caused by the optical path difference to obtain the movement error of the worktable. Since the laser wavelength is used as the standard, the measurement accuracy can meet higher requirements, but generally it can only meet the requirements of a single degree of freedom. When multi-degree-of-freedom measurement is required, multiple similar laser interferometers must be used at the same time, which leads to system structure too large. The second is to measure the two-dimensional angle based on the principle of laser collimation, directly use the four-quadrant detector or CCD to obtain the center of gravity of the light spot, and measure the straightness of the guide rail or worktable. In addition to the need for strict collimation of the laser beam, this method is difficult to meet the high-precision requirements due to the influence of the laser spot divergence angle and beam drift; the third is other multi-sensor combination measurement methods, including the use of capacitors, gratings and other sensors to measure different parts of the workbench to calculate its motion error. Generally, this method has a complex structure and is only suitable for the research and analysis of the motion error of a special workbench. Moreover, the installation requirements are very high, the environmental requirements are also very strict, and the cost is relatively high.
the
发明内容 Contents of the invention
为了解决上述的技术问题,本发明提供了一种工作台运动误差多自由度检测的装置及方法,用于精密工作台运动误差的同步检测。 In order to solve the above technical problems, the present invention provides a device and method for multi-degree-of-freedom detection of worktable motion errors, which are used for synchronous detection of precision worktable motion errors.
本发明的装置所采用的技术方案是:一种工作台运动误差多自由度检测的装置,通过上位机控制;其特征在于:包括激光光源单元、激光光路方向调整与干涉调制单元、三面反射镜测量靶面单元和光电接收与转换单元;所述的激光光源单元产生的激光一部分作为参考光路光线直线穿过所述的激光光路方向调整与干涉调制单元后,投射到所述的光电接收与转换单元中,另一部分作为测量光路光线分别一一经所述的激光光路方向调整与干涉调制单元、三面反射镜测量靶面单元、激光光路方向调整与干涉调制单元顺序反射后,投射到所述的光电接收与转换单元中,所述的测量光路光线和参考光路光线在所述的光电接收与转换单元中产生干涉;所述的上位机分别于所述的激光光路方向调整与干涉调制单元和光电接收与转换单元连接,用于控制所述的激光光路方向调整与干涉调制单元和光电接收与转换单元;所述的三面反射镜测量靶面单元固定在所述的工作台上,随工作台的运动与偏转,改变光路光程与方向,同时所述的激光光路方向调整与干涉调制单元根据干涉条纹信号形状,实时调整光路方向,保证测量光路与参考光路之间拥有相对固定的夹角,从而保证干涉条纹信号形状基本稳定;所述的光电接收与转换单元用于完成干涉条纹信号的光电接收、条纹计数与条纹形状识别,并通过识别的结果控制激光光路方向调整与干涉调制单元,同时上位机也完成激光光路方向调整与干涉调制单元的驱动控制与光程差的调制,实现工作台多自由度的测量。 The technical solution adopted by the device of the present invention is: a device for multi-degree-of-freedom detection of workbench motion errors, which is controlled by a host computer; it is characterized in that it includes a laser light source unit, a laser light path direction adjustment and interference modulation unit, and a three-sided mirror Measuring the target surface unit and the photoelectric receiving and converting unit; a part of the laser light generated by the laser light source unit is used as a reference optical path light to pass through the laser optical path direction adjustment and interference modulation unit in a straight line, and then projected to the photoelectric receiving and converting unit In the unit, the other part is used as the light of the measuring optical path—after being sequentially reflected by the laser optical path direction adjustment and interference modulation unit, the three-mirror measuring target surface unit, and the laser optical path direction adjustment and interference modulation unit, it is projected onto the described In the photoelectric receiving and converting unit, the measurement optical path light and the reference optical path light interfere in the photoelectric receiving and converting unit; The receiving and conversion unit is connected to control the adjustment of the laser light path direction and the interference modulation unit and the photoelectric receiving and conversion unit; the three-mirror measuring target surface unit is fixed on the workbench, with the workbench Movement and deflection change the optical path and direction of the optical path. At the same time, the laser optical path direction adjustment and interference modulation unit adjusts the optical path direction in real time according to the shape of the interference fringe signal to ensure that there is a relatively fixed angle between the measurement optical path and the reference optical path. Ensure that the shape of the interference fringe signal is basically stable; the photoelectric receiving and converting unit is used to complete the photoelectric receiving, fringe counting and fringe shape recognition of the interference fringe signal, and control the adjustment of the laser light path direction and the interference modulation unit through the recognition result, while the upper The machine also completes the adjustment of the direction of the laser optical path, the drive control of the interference modulation unit and the modulation of the optical path difference, and realizes the measurement of multiple degrees of freedom on the workbench.
作为优选,所述的激光光源单元包括高稳频激光器和扩束准直器,所述的高稳频激光器产生的激光经所述的扩束准直器后输入到所述的激光光路方向调整与干涉调制单元中;从而保证激光具有高稳频特点、相干长度长,扩束准直器输出的光斑发散角小,且应保证光斑直径大于5mm,满足足够宽干涉条纹的要求。 Preferably, the laser light source unit includes a high-frequency stable laser and a beam expander collimator, and the laser light generated by the high-frequency stable laser is input to the laser light path direction adjustment after being passed through the beam expander collimator. In the interferometric modulation unit; so as to ensure that the laser has high frequency stability, long coherence length, small divergence angle of the spot output by the beam expander collimator, and the spot diameter should be greater than 5mm to meet the requirements of wide enough interference fringes.
作为优选,所述的激光光路方向调整与干涉调制单元包括第一分光片、第二分光片、三自由度的PZT装置、光路调整反射镜或偏摆镜、扩束镜和偏摆驱动器,所述的偏摆驱动器一端与所述的上位机连接、另一端与所述的三自由度的PZT装置连接,用于控制所述的三自由度的PZT装置执行三自由度调整,所述的激光光源单元产生的激光一部分作为参考光路直线穿过所述的第一分光片、第二分光片和扩束镜后投射到所述的光电接收与转换单元中,另一部分作为测量光路分别一一经所述的第一分光片、光路调整反射镜或偏摆镜、三面反射镜测量靶面单元、光路调整反射镜或偏摆镜和第二分光片顺序反射后,经过所述的扩束镜后投射到所述的光电接收与转换单元中。三自由度的PZT装置,可以完成θ x ,θ y 与z向的调整,调整范围分别为±3mrad、±3mrad与30μm。 Preferably, the laser light path direction adjustment and interference modulation unit includes a first beam splitter, a second beam splitter, a three-degree-of-freedom PZT device, an optical path adjustment mirror or a deflection mirror, a beam expander, and a deflection driver. One end of the yaw driver is connected to the host computer, and the other end is connected to the three-degree-of-freedom PZT device, which is used to control the three-degree-of-freedom PZT device to perform three-degree-of-freedom adjustment. The laser Part of the laser light generated by the light source unit passes through the first beam splitter, the second beam splitter and the beam expander in a straight line as a reference optical path and then projects into the photoelectric receiving and conversion unit, and the other part is used as a measurement optical path respectively through After the first beam splitter, optical path adjustment mirror or deflection mirror, three-sided mirror measuring target surface unit, optical path adjustment mirror or deflection mirror and the second beam splitter are sequentially reflected, after passing through the beam expander projected into the photoelectric receiving and converting unit. The three-degree-of-freedom PZT device can complete the adjustment of θ x , θ y and z directions, and the adjustment ranges are ±3mrad, ±3mrad and 30μm respectively.
作为优选,所述的三自由度的PZT装置由二维偏摆和一维位移移动装置组成。二维偏摆实现光路的摇摆、俯仰角度调整,保证测量过程中入射光路方向与中间反射镜法线重合;一维位移驱动沿反射镜法线方向,用于调制光程差,便于动态干涉条纹的采集。 Preferably, the three-degree-of-freedom PZT device is composed of a two-dimensional deflection device and a one-dimensional displacement device. The two-dimensional yaw realizes the swing and pitch angle adjustment of the optical path to ensure that the direction of the incident optical path coincides with the normal line of the middle mirror during the measurement process; the one-dimensional displacement drive is along the normal direction of the mirror to modulate the optical path difference and facilitate dynamic interference fringes collection.
作为优选,所述的三面反射镜测量靶面单元由三平面镜组合而成,中间平面镜与两边入射或出射平面镜夹角均为120°,所述的测量光路光线经过三平面镜依次反射后,投射到所述的激光光路方向调整与干涉调制单元中;且测量过程中,要求中间反射镜法线与光路重合。三面反射镜作为靶面固定在工作台上,并置于激光干涉系统的测量臂光路中,当工作台产生摇摆俯仰与轴向运动时,返回的测量光路光束方向与光程差发生相应的改变,同时使干涉条纹的形状与相移也发生变化。经过三面反射镜反射光路的方法,不同于常规角隅棱镜的反射方法,它保留了工作台的偏转信息,同时避开了采用单平面镜反射后沿原光路返回的问题,使测量系统在不需要光隔的条件下,避免了激光的回馈现象。 As a preference, the three-mirror measuring target surface unit is composed of three plane mirrors, the angle between the middle plane mirror and the incident or exit plane mirrors on both sides is 120°, and the light of the measurement optical path is reflected by the three plane mirrors sequentially and then projected onto the In the laser light path direction adjustment and interference modulation unit; and during the measurement process, it is required that the normal line of the intermediate mirror coincides with the light path. The three-sided mirror is fixed on the workbench as the target surface and placed in the optical path of the measuring arm of the laser interferometer system. When the workbench swings, pitches and moves axially, the beam direction and optical path difference of the returned measuring light path change accordingly. , while changing the shape and phase shift of the interference fringes. The method of reflecting the light path through three-sided mirrors is different from the reflection method of conventional corner cubes. It retains the deflection information of the worktable, and at the same time avoids the problem of returning along the original light path after reflection by a single plane mirror, so that the measurement system does not need Under the condition of optical separation, the laser feedback phenomenon is avoided.
作为优选,所述的光电接收与转换单元包括探测器、光电转换电路、A/D采样电路和整形与细分辨向电路,所述的A/D采样电路和整形与细分辨向电路并联连接后,与所述的上位机、探测器和光电转换电路串联连接,用于接收所述的激光光路方向调整与干涉调制单元投射的光线,并进行光电转换后采样,采样的信号经过差分整形,进行干涉条纹的细分计数,应用椭圆拟合或三角函数方法实现干涉条纹形状的识别。 Preferably, the photoelectric receiving and conversion unit includes a detector, a photoelectric conversion circuit, an A/D sampling circuit, and a shaping and fine resolution circuit, and the A/D sampling circuit and the shaping and fine resolution circuit are connected in parallel , connected in series with the host computer, detector and photoelectric conversion circuit, used to receive the light projected by the laser optical path direction adjustment and interference modulation unit, and perform photoelectric conversion and sampling, the sampled signal undergoes differential shaping, and performs Subdivision counting of interference fringes, using ellipse fitting or trigonometric function method to realize the identification of interference fringe shape.
作为优选,所述的探测器采用对称的‘田字形’四象限探测器。 Preferably, the detector adopts a symmetrical four-quadrant detector in the shape of a square.
作为优选,所述的光电转换电路由四个NPN三极管及四个电阻完成,利用四个放大倍数一致的三极管与四个大小相同的电阻,通过电流放大的方式来完成,保证探测器信号具有相同的放大倍数。 As a preference, the photoelectric conversion circuit is completed by four NPN triodes and four resistors, using four transistors with the same magnification and four resistors of the same size to complete by current amplification to ensure that the detector signals have the same of magnification.
作为优选,所述的整形与细分辨向电路由差分电路、比较电路与细分辨向电路构成,完成干涉条纹的计数处理,得到Z向位移。 Preferably, the shaping and fine resolution circuit is composed of a differential circuit, a comparison circuit and a fine resolution circuit to complete the counting process of the interference fringes to obtain the displacement in the Z direction.
作为优选,所述的A/D采样电路由高速同步A/D转换电路构成,同步速度达100k以上。 Preferably, the A/D sampling circuit is composed of a high-speed synchronous A/D conversion circuit, and the synchronous speed is above 100k.
本发明的方法所采用的技术方案是:一种工作台运动误差多自由度检测的方法,其特征在于,包括以下步骤: The technical solution adopted by the method of the present invention is: a method for multi-degree-of-freedom detection of workbench motion error, characterized in that it comprises the following steps:
步骤1:测量前,调试所述的装置,保证测量光路入射光线平行于出射光线,即入射光线平行于三面反射镜测量靶面单元的中间镜法线,然后调整所述的激光光路方向调整与干涉调制单元,保证测量光线与参考光线之间形成一个很小的夹角,光电接收与转换单元上出现合适的干涉条纹,使干涉条纹的差分信号的相差尽量靠近90°,这样便于干涉条纹信号的细分辨向与计数处理; Step 1: Before the measurement, debug the device to ensure that the incident light of the measurement light path is parallel to the outgoing light, that is, the incident light is parallel to the normal line of the middle mirror of the three-sided mirror measurement target unit, and then adjust the laser light path direction adjustment and The interference modulation unit ensures that a small angle is formed between the measuring light and the reference light, and that suitable interference fringes appear on the photoelectric receiving and converting unit, so that the difference of the differential signals of the interference fringes is as close as possible to 90°, which is convenient for the interference fringe signal Subdivided orientation and counting processing;
步骤2:启动所述的工作台,开始测量,驱动激光光路方向调整与干涉调制单元在一个波长内的Z向运动,进行干涉调制的同时,光电接收与转换单元探测的光电信号一方面进行差分处理,得到用于计数的原始信号;另一方面通过椭圆拟合或正余弦函数相乘算法计算准确的信号相位差,用于光路方向偏转角度调整参数的计算; Step 2: Start the workbench, start the measurement, drive the laser optical path direction adjustment and the Z-direction movement of the interference modulation unit within a wavelength, and at the same time as the interference modulation is performed, the photoelectric signal detected by the photoelectric receiving and converting unit is differentiated on the one hand. Processing to obtain the original signal used for counting; on the other hand, the accurate signal phase difference is calculated by ellipse fitting or sine-cosine function multiplication algorithm, which is used for the calculation of the adjustment parameter of the deflection angle of the optical path direction;
步骤3:通过计算的相位差与偏转角度参数,一方面显示偏转角度,另一方面控制激光光路方向调整与干涉调制单元,调整角度,使干涉条纹的大小不受工作台运动误差的影响。 Step 3: Through the calculated phase difference and deflection angle parameters, on the one hand, the deflection angle is displayed, and on the other hand, the laser light path direction adjustment and the interference modulation unit are controlled to adjust the angle so that the size of the interference fringe is not affected by the movement error of the workbench.
本发明的特点在于: The present invention is characterized in that:
(1)根据三面反射镜随工作台的偏转、运动对光束方向与光程的影响,导致干涉条纹形状与相移变化的原理,实现对工作台多自由度的测量; (1) According to the principle that the deflection and movement of the three-sided mirror with the worktable affect the beam direction and optical path, resulting in the change of the shape and phase shift of the interference fringe, the measurement of the multi-degree-of-freedom of the workbench is realized;
(2)经过三面反射镜反射光路的方法,不同于常规角隅棱镜的反射方法,它保留了工作台的偏转信息,同时避开了采用单平面镜反射后沿原光路返回的问题,使测量系统在不需要光隔的条件下,避免了激光的回馈现象; (2) The method of reflecting the light path through three-sided mirrors is different from the reflection method of conventional corner cubes. It retains the deflection information of the worktable, and at the same time avoids the problem of returning along the original light path after reflection by a single plane mirror, making the measurement system Under the condition of no need for optical separation, the laser feedback phenomenon is avoided;
(3)利用二维偏摆装置,根据干涉条纹的形状反馈处理,实时调整光路,保证干涉条纹形状基本稳定,不影响大范围运动位移的同步测量; (3) Using the two-dimensional yaw device, according to the feedback processing of the shape of the interference fringe, the optical path is adjusted in real time to ensure that the shape of the interference fringe is basically stable and does not affect the simultaneous measurement of large-scale motion displacement;
(4)采用压电微位移器实现光程差的调制,提高了对条纹信号相位提取的精度; (4) The modulation of the optical path difference is realized by using the piezoelectric micro-displacement device, which improves the accuracy of the phase extraction of the fringe signal;
(5)应用对称四象限探测器进行条纹信号接收,实现条纹信号形状的提取,其采样与处理速度远远优于CCD的采样与处理速度。 (5) The symmetrical four-quadrant detector is used to receive the fringe signal to realize the extraction of the shape of the fringe signal, and its sampling and processing speed is far superior to that of the CCD.
相对于现有技术,本发明可用在精密表面测量与精密加工中,对工作台的摇摆角、俯仰角与轴向运动位移的同步实时测量,由此可以通过测量结果进行实时补偿,消除运动误差的影响,从而提高测量精度与制造精度,本发明角度的测量范围在±3mrad范围内,满足工作台的测量要求。 Compared with the prior art, the present invention can be used in precision surface measurement and precision machining to measure the sway angle, pitch angle and axial movement displacement of the worktable in real time synchronously, so that real-time compensation can be performed through the measurement results to eliminate motion errors influence, thereby improving the measurement accuracy and manufacturing accuracy, the measurement range of the angle of the present invention is within the range of ±3mrad, which meets the measurement requirements of the workbench.
the
附图说明 Description of drawings
图1:为本发明实施例的装置结构图。 Fig. 1: is the device structure diagram of the embodiment of the present invention.
图2:为本发明实施例的方法流程图。 Fig. 2: is the flow chart of the method of the embodiment of the present invention.
the
具体实施方式 Detailed ways
为了便于本领域普通技术人员理解和实施本发明,下面结合附图及实施例对本发明作进一步的详细描述,应当理解,此处所描述的实施示例仅用于说明和解释本发明,并不用于限定本发明。 In order to facilitate those of ordinary skill in the art to understand and implement the present invention, the present invention will be described in further detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the implementation examples described here are only used to illustrate and explain the present invention, and are not intended to limit this invention.
请见图1,本发明的装置所采用的技术方案是:一种工作台运动误差多自由度检测的装置,通过上位机控制;包括激光光源单元1、激光光路方向调整与干涉调制单元2、三面反射镜测量靶面单元3和光电接收与转换单元4;激光光源单元1包括高稳频激光器101和扩束准直器102,激光光路方向调整与干涉调制单元2包括第一分光片201、第二分光片202、三自由度的PZT装置203、光路调整反射镜或偏摆镜204、扩束镜205和偏摆驱动器206,偏摆驱动器206一端与上位机连接、另一端与三自由度的PZT装置203连接,用于控制三自由度的PZT装置203执行三自由度调整,三自由度的PZT装置203由二维偏摆和一维位移移动装置组成,三面反射镜测量靶面单元3由三平面镜组合而成,中间平面镜与两边入射或出射平面镜夹角均为120°,光电接收与转换单元4包括探测器401、光电转换电路402、A/D采样电路403和整形与细分辨向电路404;高稳频激光器101产生的激光经扩束准直器102后,一部分作为参考光路直线穿过第一分光片201、第二分光片202和扩束镜205后投射到探测器401中,另一部分作为测量光路分别一一经第一分光片201、光路调整反射镜或偏摆镜204、三面反射镜测量靶面单元3的三平面镜、光路调整反射镜或偏摆镜204和第二分光片202顺序反射后,经过扩束镜205后投射到探测器401中;A/D采样电路403和整形与细分辨向电路404并联连接后,与上位机、探测器401和光电转换电路402串联连接,用于接收扩束镜205投射的光线,并进行光电转换后采样,采样的信号经过差分整形,进行干涉条纹的细分计数,应用椭圆拟合或三角函数方法实现干涉条纹形状的识别。 Please see Fig. 1, the technical solution adopted by the device of the present invention is: a device for detecting motion errors of a worktable with multiple degrees of freedom, controlled by a host computer; including a laser light source unit 1, a laser light path direction adjustment and interference modulation unit 2, The three-sided mirror measures the target surface unit 3 and the photoelectric receiving and converting unit 4; the laser light source unit 1 includes a high-frequency stable laser 101 and a beam expander collimator 102, and the laser optical path direction adjustment and interference modulation unit 2 includes a first beam splitter 201, The second beam splitter 202, the three-degree-of-freedom PZT device 203, the optical path adjustment mirror or the yaw mirror 204, the beam expander 205, and the yaw driver 206, one end of the yaw driver 206 is connected to the host computer, and the other end is connected to the three-degree-of-freedom The PZT device 203 is connected to control the three-degree-of-freedom PZT device 203 to perform three-degree-of-freedom adjustment. The three-degree-of-freedom PZT device 203 is composed of a two-dimensional deflection and a one-dimensional displacement device, and a three-sided mirror measures the target surface unit 3 Composed of three plane mirrors, the angle between the middle plane mirror and the incident or exit plane mirrors on both sides is 120°, the photoelectric receiving and converting unit 4 includes a detector 401, a photoelectric conversion circuit 402, an A/D sampling circuit 403 and shaping and fine resolution Circuit 404; after the laser light generated by the high-frequency stable laser 101 passes through the beam expander collimator 102, a part of it passes through the first beam splitter 201, the second beam splitter 202 and the beam expander 205 as a reference optical path, and then projects into the detector 401 , the other part is used as the measurement optical path respectively—through the first beam splitter 201, the optical path adjustment reflector or the deflection mirror 204, the three-sided reflector measuring the three-plane mirror of the target surface unit 3, the optical path adjustment reflector or the deflection mirror 204 and the second After the beam splitter 202 is sequentially reflected, it is projected into the detector 401 after passing through the beam expander 205; after the A/D sampling circuit 403 is connected in parallel with the shaping and fine resolution circuit 404, it is connected with the host computer, the detector 401 and the photoelectric conversion circuit 402 Connected in series to receive the light projected by the beam expander 205, and perform photoelectric conversion and sampling, the sampled signal is differentially shaped, and the interference fringes are subdivided and counted, and the shape of the interference fringes is recognized by ellipse fitting or trigonometric function method .
本实施例的探测器401采用对称的‘田字形’四象限探测器,光电转换电路402由四个NPN三极管及四个电阻完成,利用四个放大倍数一致的三极管与四个大小相同的电阻,通过电流放大的方式来完成,保证探测器401信号具有相同的放大倍数,整形与细分辨向电路404由差分电路、比较电路与细分辨向电路构成,完成干涉条纹的计数处理,得到Z向位移,A/D采样电路403由高速同步A/D转换电路构成,同步速度达100k以上。 The detector 401 of the present embodiment adopts a symmetrical 'square' four-quadrant detector, and the photoelectric conversion circuit 402 is completed by four NPN triodes and four resistors, utilizing four transistors with the same magnification and four resistors of the same size, It is completed by means of current amplification to ensure that the signal of the detector 401 has the same amplification factor. The shaping and fine resolution circuit 404 is composed of a differential circuit, a comparison circuit and a fine resolution circuit to complete the counting process of interference fringes and obtain the Z direction displacement. , The A/D sampling circuit 403 is composed of a high-speed synchronous A/D conversion circuit, and the synchronous speed is above 100k.
本发明的方法所采用的技术方案是:一种工作台运动误差多自由度检测的方法,包括以下步骤: The technical scheme adopted by the method of the present invention is: a method for detecting a multi-degree-of-freedom motion error of a workbench, comprising the following steps:
步骤1:正式测量前,尽量保证测量光路入射光线平行于出射光线,即入射光线尽量平行于三面组合测量中间镜的法线。然后调整第二分光镜202的角度,保证测量光线与参考光线之间形成一个很小的夹角,探测器上出现合适的干涉条纹,使干涉条纹的差分信号的相差尽量靠近90°,这样便于条纹信号的细分辨向与计数处理; Step 1: Before formal measurement, try to ensure that the incident ray of the measurement light path is parallel to the outgoing ray, that is, the incident ray is as parallel as possible to the normal of the three-sided combined measurement intermediate mirror. Then adjust the angle of the second beam splitter 202 to ensure that a small angle is formed between the measuring light and the reference light, and suitable interference fringes appear on the detector, so that the difference of the differential signals of the interference fringes is as close as possible to 90°, which is convenient Fine resolution and counting processing of fringe signals;
步骤2:启动工作台,开始测量。驱动三自由度的PZT装置203在一个波长内的Z向运动,进行干涉调制的同时。四象限探测器401探测的光电信号一方面送入整形与细分辨向电路404的差分电路进行差分处理,得到用于计数的原始信号;另一方面送入A/D采样电路403的高速同步A/D转换电路,通过椭圆拟合或正余弦函数相乘算法计算准确的信号相位差,用于光路方向偏转角度调整参数的计算; Step 2: Start the workbench and start measuring. Drive the three-degree-of-freedom PZT device 203 to move in the Z direction within one wavelength, while performing interference modulation. On the one hand, the photoelectric signal detected by the four-quadrant detector 401 is sent to the differential circuit of the shaping and fine resolution circuit 404 for differential processing to obtain the original signal for counting; on the other hand, it is sent to the high-speed synchronous A signal of the A/D sampling circuit 403 The /D conversion circuit calculates the accurate signal phase difference through ellipse fitting or multiplication of sine and cosine functions, and is used for the calculation of the adjustment parameters of the deflection angle of the optical path direction;
步骤3:通过计算的相位差与偏转角度参数,一方面显示偏转角度,另一方面控制三自由度的PZT装置203,调整偏摆镜角度,使干涉条纹的大小不受工作台运动误差的影响。 Step 3: Through the calculated phase difference and deflection angle parameters, on the one hand, display the deflection angle, and on the other hand, control the three-degree-of-freedom PZT device 203, adjust the angle of the deflection mirror, so that the size of the interference fringe is not affected by the motion error of the workbench .
尽管本文较多地使用了激光光源单元1、激光光路方向调整与干涉调制单元2、三面反射镜测量靶面单元3、光电接收与转换单元4、高稳频激光器101、扩束准直器102、第一分光片201、第二分光片202、三自由度的PZT装置203、光路调整反射镜或偏摆镜204、扩束镜205、偏摆驱动器206、探测器401、光电转换电路402、A/D采样电路403和整形与细分辨向电路404等术语,但并不排除使用其他术语的可能性。使用这些术语仅仅是为了更方便的描述本发明的本质,把它们解释成任何一种附加的限制都是与本发明精神相违背的。 Although this article uses a lot of laser light source unit 1, laser light path direction adjustment and interference modulation unit 2, three-sided mirror measurement target unit 3, photoelectric receiving and conversion unit 4, high-frequency stable laser 101, and beam expander collimator 102 , a first beam splitter 201, a second beam splitter 202, a three-degree-of-freedom PZT device 203, an optical path adjustment mirror or a yaw mirror 204, a beam expander 205, a yaw driver 206, a detector 401, a photoelectric conversion circuit 402, A/D sampling circuit 403 and shaping and subdivision circuit 404 are terms, but the possibility of using other terms is not excluded. These terms are only used to describe the essence of the present invention more conveniently, and it is against the spirit of the present invention to interpret them as any additional limitation.
应当理解的是,上述针对较佳实施例的描述较为详细,并不能因此而认为是对本发明专利保护范围的限制,本领域的普通技术人员在本发明的启示下,在不脱离本发明权利要求所保护的范围情况下,还可以做出替换或变形,均落入本发明的保护范围之内,本发明的请求保护范围应以所附权利要求为准。 It should be understood that the above-mentioned descriptions for the preferred embodiments are relatively detailed, and should not therefore be considered as limiting the scope of the patent protection of the present invention. Within the scope of protection, replacements or modifications can also be made, all of which fall within the protection scope of the present invention, and the scope of protection of the present invention should be based on the appended claims.
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