CN103940348A - Device and method for detecting movement errors of working platform in multiple degrees of freedom - Google Patents
Device and method for detecting movement errors of working platform in multiple degrees of freedom Download PDFInfo
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Abstract
The invention discloses a device and a method for detecting movement errors of a working platform in multiple degrees of freedom. Reflected light is reflected onto a three-surface reflector fixed on the working platform through a light path regulation reflector, returns to the light path regulation reflector after being reflected by the three-surface reflector in sequence, is reflected onto a second light splitting piece, enters a beam expanding mirror after being reflected by the second light splitting piece, and is projected onto a detector. Transmission light enters the beam expanding mirror after being transmitted by the second light splitting piece and is projected onto the detector. Two beams of light generate interference on the detector, and measurement on deflection and movement displacement of the working platform can be achieved by regulating shapes of interference fringes and measuring phase displacement. By means of the device and the method for detecting movement errors of the working platform, synchronous and real-time measurement on an angle of oscillation, an angle of pitch and axial movement displacement of the working platform can be performed, real-time compensation is performed according to the measurement result to eliminate effect caused by movement errors, and measurement precision and manufacturing precision can be improved. The angle measurement ranges from +3rad to -3mrad, and measurement requirements of the working platform can be met.
Description
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Technical field
The present invention relates to a kind of worktable multiple degrees of freedom pick-up unit, this device can be realized the synchro measure of worktable angle of oscillation, the angle of pitch and rectilinear motion displacement.
Background technology
Precision stage is measuring surface form and precision machined critical component, and its kinematic accuracy is directly determining measuring accuracy and machining precision, thereby studies and design work corner of table real-time online measuring method inclined to one side and that line is inclined to one side significant.
Current in the measuring method of working table movement error, high-precision measuring method, measured degree of freedom maybe can only be carried out single-degree-of-freedom measurement less; In multi-degree of freedom measurement method, measuring accuracy is lower, or adopts knockdown metering system measuring accuracy high, but cost is high, bulky.
Existing working table movement error measurement method mainly contains several: the one, adopt laser interferance method, the i.e. interferometric method based on laser interference principle, the various combinations of applied optics element on worktable, by to swashing reflection of light and refraction etc., form the optical path difference relevant to working table movement error, the calculating of the phase differential then optical path difference being caused, obtains the kinematic error of worktable.Due to taking optical maser wavelength as standard, so measuring accuracy can reach high requirement, but generally can only meet the requirement of single-degree-of-freedom, in the time requiring to carry out multi-degree of freedom measurement, must adopt multiple similar laser interferometers simultaneously, this causes system architecture too huge.The 2nd, measure two dimension angular based on laser alignment principle, directly utilize 4 quadrant detector or CCD to obtain hot spot center of gravity, guide rail or worktable linearity are measured.The method is except carrying out, strict collimation processing, due to the impact of the Stimulated Light hot spot angle of divergence and beam drift, being difficult to reach high-precision requirement to laser beam; The 3rd, the method that other multi sensor combinations are measured, comprise sensors such as adopting electric capacity, grating, worktable different parts is measured, thereby calculated its kinematic error, general this method complex structure, is only suitable for carrying out in the worktable to special the research and analysis of kinematic error.And installation requirement is very high, also very strict to the requirement of environment, cost is higher.
Summary of the invention
In order to solve above-mentioned technical matters, the invention provides the device and method that a kind of working table movement error multiple degrees of freedom detects, for the synchronous detection of precision stage kinematic error.
The technical scheme that device of the present invention adopts is: the device that a kind of working table movement error multiple degrees of freedom detects, passes through PC control, it is characterized in that: comprise that LASER Light Source unit, the adjustment of laser optical path direction are measured target surface unit with interference modulations unit, thrihedral reflector and photoelectricity receives and converting unit, a laser part for described LASER Light Source unit generation is as passing with reference to light path light straight line after the described adjustment of laser optical path direction and interference modulations unit, project in described photoelectricity reception and converting unit, another part one is adjusted and interference modulations unit once described laser optical path direction respectively as optical path light, thrihedral reflector is measured target surface unit, after laser optical path direction is adjusted and is reflected with interference modulations sequence of unit, project in described photoelectricity reception and converting unit, described optical path light and reference path light produce and interfere in described photoelectricity reception and converting unit, described host computer is adjusted with interference modulations unit and photoelectricity and is received and be connected with converting unit respectively at described laser optical path direction, receives and converting unit with interference modulations unit and photoelectricity for controlling described laser optical path direction adjustment, described thrihedral reflector is measured target surface unit and is fixed on described worktable, with motion and the deflection of worktable, change light path light path and direction, described laser optical path direction is adjusted with interference modulations unit according to interferometric fringe signal shape simultaneously, adjust in real time optical path direction, ensure to have relatively-stationary angle between optical path and reference path, thereby ensure that interferometric fringe signal shape is basicly stable, described photoelectricity receives the photoelectricity reception, fringe count and the shape of stripes identification that have been used for interferometric fringe signal with converting unit, and adjust and interference modulations unit by the output control laser optical path direction of identification, host computer also completes the adjustment of laser optical path direction and the driving control of interference modulations unit and the modulation of optical path difference simultaneously, realizes the multivariant measurement of worktable.
As preferably, described LASER Light Source unit comprises high frequency stabilized laser and beam-expanding collimation device, the laser that described high frequency stabilized laser produces after described beam-expanding collimation device, be input to described laser optical path direction adjust with interference modulations unit in; Thereby ensure that laser has high frequency stabilization feature, coherent length is long, the hot spot angle of divergence of beam-expanding collimation device output is little, and should ensure that spot diameter is greater than 5mm, meets enough requirements of wide interference fringe.
As preferably, the described adjustment of laser optical path direction and interference modulations unit comprise the first light splitting piece, the second light splitting piece, the PZT device of Three Degree Of Freedom, light path is adjusted catoptron or beat mirror, beam expanding lens and beat driver, described beat driver one end is connected with described host computer, the other end is connected with the PZT device of described Three Degree Of Freedom, carry out Three Degree Of Freedom adjustment for the PZT device of controlling described Three Degree Of Freedom, the laser part that described LASER Light Source unit produces is as passing the first described light splitting piece with reference to light path straight line, after the second light splitting piece and beam expanding lens, project in described photoelectricity reception and converting unit, another part distinguishes one once the first described light splitting piece as optical path, light path is adjusted catoptron or beat mirror, thrihedral reflector is measured target surface unit, light path is adjusted after catoptron or beat mirror and the second light splitting piece order-reflected, after described beam expanding lens, project in described photoelectricity reception and converting unit.The PZT device of Three Degree Of Freedom, can complete
θ x ,
θ y with z to adjustment, be respectively ± 3mrad of setting range, ± 3mrad and 30 μ m.
As preferably, the PZT device of described Three Degree Of Freedom is made up of two-dimentional beat and one dimension displacement mobile device.Two dimension beat is realized the waving of light path, luffing angle adjustment, ensures that in measuring process, input path direction overlaps with intermediate mirrors normal; One dimension displacement drives along catoptron normal direction, for light modulated path difference, is convenient to the collection of dynamic interference striped.
As preferably, described thrihedral reflector is measured target surface unit and is combined by three level crossings, mid-plane mirror and both sides incident or exit plane mirror angle are 120 °, described optical path light, after three level crossings reflect successively, projects in the described adjustment of laser optical path direction and interference modulations unit; And in measuring process, require intermediate mirrors normal to overlap with light path.Thrihedral reflector is fixed on worktable as target surface, and be placed in the gage beam light path of laser interference system, in the time that pitching and axially-movable are waved in worktable generation, there is corresponding change in the optical path beam direction returning and optical path difference, make the shape of interference fringe and phase shift also change simultaneously.Through the method for thrihedral reflector reflected light path, be different from the method for reflection of conventional corner cube, it has retained the deflection information of worktable, avoided adopting the problem of returning along original optical path after the mirror reflection of monoplane simultaneously, make measuring system do not need light every condition under, avoided the feedback phenomenon of laser.
As preferably, described photoelectricity receives with converting unit and comprises detector, photoelectric switching circuit, A/D sample circuit and shaping and segmentation sensing circuit, after described A/D sample circuit and shaping and segmentation sensing circuit are connected in parallel, with described host computer, detector and photoelectric switching circuit are connected in series, adjust for receiving described laser optical path direction the light projecting with interference modulations unit, and carry out opto-electronic conversion post-sampling, the signal of sampling is through difference shaping, carry out the subdivision and count of interference fringe, application ellipse fitting or trigonometric function method realize the identification of shape of interference fringe.
As preferably, described detector adopts symmetrical ' matrix pattern ' 4 quadrant detector.
As preferably, described photoelectric switching circuit is completed by four NPN triodes and four resistance, utilize four triodes and four resistance that size is identical that enlargement factor is consistent, the mode of amplifying by electric current completes, and ensures that detector signal has identical enlargement factor.
As preferably, described shaping is made up of difference channel, comparator circuit and segmentation sensing circuit with segmentation sensing circuit, completes the counting processing of interference fringe, obtains Z-direction displacement.
As preferably, described A/D sample circuit is made up of high-speed synchronous A/D change-over circuit, more than synchronous speed reaches 100k.
The technical scheme that method of the present invention adopts is: a kind of method that working table movement error multiple degrees of freedom detects, it is characterized in that, and comprise the following steps:
Step 1: before measurement, the device that debugging is described, ensure that optical path incident ray is parallel to emergent ray, it is the intermediate mirror normal that incident ray is parallel to thrihedral reflector measurement target surface unit, then adjusting described laser optical path direction adjusts and interference modulations unit, between guarantee measurement light and reference ray, form a very little angle, in photoelectricity reception and converting unit, there is suitable interference fringe, the differing of differential signal of interference fringe tried one's best near 90 °, be convenient to like this subdivide with distinguished and count processing of interferometric fringe signal;
Step 2: start described worktable, start to measure, driving laser optical path direction is adjusted the motion of the Z-direction in a wavelength with interference modulations unit, when carrying out interference modulations, photoelectricity receives the photosignal of surveying with converting unit and carries out difference processing on the one hand, obtains the original signal for counting; Calculate signal phase difference accurately by ellipse fitting or sin cos functions phase multiplication algorithm on the other hand, adjust the calculating of parameter for optical path direction deflection angle;
Step 3: by phase differential and the deflection angle parameter calculated, show deflection angle on the one hand, control on the other hand laser optical path direction and adjust and interference modulations unit, adjust angle, make the size of interference fringe not be subject to the impact of working table movement error.
Feature of the present invention is:
(1) according to thrihedral reflector with the deflection of worktable, the impact of motion on beam direction and light path, cause the principle of shape of interference fringe and phase shift variations, realization is to the multivariant measurement of worktable;
(2) method of process thrihedral reflector reflected light path, be different from the method for reflection of conventional corner cube, it has retained the deflection information of worktable, avoided adopting the problem of returning along original optical path after the mirror reflection of monoplane simultaneously, make measuring system do not need light every condition under, avoided the feedback phenomenon of laser;
(3) utilize two-dimentional deflection device, according to the shape feedback processing of interference fringe, adjust in real time light path, ensure that shape of interference fringe is basicly stable, do not affect the synchro measure of grand movement displacement;
(4) adopt piezoelectric actuator to realize the modulation of optical path difference, improved the precision to stripe signal phase extraction;
(5) apply symmetrical 4 quadrant detector and carry out stripe signal reception, realize the extraction of stripe signal shape, its sampling and processing speed are far superior to sampling and the processing speed of CCD.
With respect to prior art, the present invention can be used in precision surface measurement and Precision Machining, the synchronous real-time measurement of angle of oscillation, the angle of pitch and axially-movable displacement to worktable, can carry out real-Time Compensation by measurement result thus, eliminate the impact of kinematic error, thereby improve measuring accuracy and manufacturing accuracy, the measurement range of angle of the present invention, within the scope of ± 3mrad, meets the measurement requirement of worktable.
Brief description of the drawings
Fig. 1: be the structure drawing of device of the embodiment of the present invention.
Fig. 2: be the method flow diagram of the embodiment of the present invention.
Embodiment
Understand and enforcement the present invention for the ease of those of ordinary skill in the art, below in conjunction with drawings and Examples, the present invention is described in further detail, should be appreciated that exemplifying embodiment described herein, only for description and interpretation the present invention, is not intended to limit the present invention.
Ask for an interview Fig. 1, the technical scheme that device of the present invention adopts is: the device that a kind of working table movement error multiple degrees of freedom detects, passes through PC control, comprise that LASER Light Source unit 1, the adjustment of laser optical path direction are measured target surface unit 3 with interference modulations unit 2, thrihedral reflector and photoelectricity receives and converting unit 4, LASER Light Source unit 1 comprises high frequency stabilized laser 101 and beam-expanding collimation device 102, the adjustment of laser optical path direction and interference modulations unit 2 comprise the first light splitting piece 201, the second light splitting piece 202, the PZT device 203 of Three Degree Of Freedom, light path is adjusted catoptron or beat mirror 204, beam expanding lens 205 and beat driver 206, beat driver 206 one end are connected with host computer, the other end is connected with the PZT device 203 of Three Degree Of Freedom, carry out Three Degree Of Freedom adjustment for the PZT device 203 of controlling Three Degree Of Freedom, the PZT device 203 of Three Degree Of Freedom is made up of two-dimentional beat and one dimension displacement mobile device, thrihedral reflector is measured target surface unit 3 and is combined by three level crossings, mid-plane mirror and both sides incident or exit plane mirror angle are 120 °, photoelectricity receives with converting unit 4 and comprises detector 401, photoelectric switching circuit 402, A/D sample circuit 403 and shaping and segmentation sensing circuit 404, the laser that high frequency stabilized laser 101 produces is after beam-expanding collimation device 102, a part is as projecting in detector 401 through after the first light splitting piece 201, the second light splitting piece 202 and beam expanding lens 205 with reference to light path straight line, another part one is measured after three level crossings, light path adjustment catoptron or beat mirror 204 and second light splitting piece 202 order-reflected of target surface unit 3 once the first light splitting piece 201, light path adjustment catoptron or beat mirror 204, thrihedral reflector respectively as optical path, projects in detector 401 after beam expanding lens 205, after A/D sample circuit 403 and shaping and segmentation sensing circuit 404 are connected in parallel, be connected in series with host computer, detector 401 and photoelectric switching circuit 402, for receiving the light that beam expanding lens 205 projects, and carry out opto-electronic conversion post-sampling, the signal of sampling is through difference shaping, carry out the subdivision and count of interference fringe, application ellipse fitting or trigonometric function method realize the identification of shape of interference fringe.
The detector 401 of the present embodiment adopts symmetrical ' matrix pattern ' 4 quadrant detector, photoelectric switching circuit 402 is completed by four NPN triodes and four resistance, utilize four triodes and four resistance that size is identical that enlargement factor is consistent, the mode of amplifying by electric current completes, ensure that detector 401 signals have identical enlargement factor, shaping and segmentation sensing circuit 404 are by difference channel, comparator circuit forms with segmentation sensing circuit, complete the counting processing of interference fringe, obtain Z-direction displacement, A/D sample circuit 403 is made up of high-speed synchronous A/D change-over circuit, more than synchronous speed reaches 100k.
The technical scheme that method of the present invention adopts is: a kind of method that working table movement error multiple degrees of freedom detects, comprises the following steps:
Step 1: before formal measurement, ensure that optical path incident ray is parallel to emergent ray, incident ray is parallel to the normal of three multiple measurement intermediate mirror as far as possible as far as possible.Then adjust the angle of the second spectroscope 202, between guarantee measurement light and reference ray, form a very little angle, on detector, there is suitable interference fringe, the differing of differential signal of interference fringe tried one's best near 90 °, be convenient to like this subdivide with distinguished and count processing of stripe signal;
Step 2: start worktable, start to measure.The Z-direction motion of the PZT device 203 of driving Three Degree Of Freedom in a wavelength, when carrying out interference modulations.The photosignal that 4 quadrant detector 401 is surveyed is sent on the one hand shaping and is carried out difference processing with the difference channel of segmentation sensing circuit 404, obtains the original signal for counting; Send on the other hand the high-speed synchronous A/D change-over circuit of A/D sample circuit 403, calculate signal phase difference accurately by ellipse fitting or sin cos functions phase multiplication algorithm, adjust the calculating of parameter for optical path direction deflection angle;
Step 3: by phase differential and the deflection angle parameter calculated, show deflection angle on the one hand, control on the other hand the PZT device 203 of Three Degree Of Freedom, adjust beat mirror angle, make the size of interference fringe not be subject to the impact of working table movement error.
Although more used LASER Light Source unit 1 herein, laser optical path direction is adjusted and interference modulations unit 2, thrihedral reflector is measured target surface unit 3, photoelectricity receives and converting unit 4, high frequency stabilized laser 101, beam-expanding collimation device 102, the first light splitting piece 201, the second light splitting piece 202, the PZT device 203 of Three Degree Of Freedom, light path is adjusted catoptron or beat mirror 204, beam expanding lens 205, beat driver 206, detector 401, photoelectric switching circuit 402, the terms such as A/D sample circuit 403 and shaping and segmentation sensing circuit 404, but do not get rid of the possibility that uses other terms.Use these terms to be only used to describe more easily essence of the present invention, they are construed to any additional restriction is all contrary with spirit of the present invention.
Should be understood that; the above-mentioned description for preferred embodiment is comparatively detailed; can not therefore think the restriction to scope of patent protection of the present invention; those of ordinary skill in the art is under enlightenment of the present invention; do not departing from the scope situation that the claims in the present invention protect; can also make and replacing or distortion, within all falling into protection scope of the present invention, request protection domain of the present invention should be as the criterion with claims.
Claims (11)
1. the device that working table movement error multiple degrees of freedom detects, passes through PC control, it is characterized in that: comprise that LASER Light Source unit (1), the adjustment of laser optical path direction are measured target surface unit (3) with interference modulations unit (2), thrihedral reflector and photoelectricity receives and converting unit (4), a laser part for described LASER Light Source unit (1) generation is as passing with reference to light path light straight line after the described adjustment of laser optical path direction and interference modulations unit (2), project in described photoelectricity reception and converting unit (4), another part one is adjusted and interference modulations unit (2) once described laser optical path direction respectively as optical path light, thrihedral reflector is measured target surface unit (3), after the adjustment of laser optical path direction and interference modulations unit (2) order-reflected, project in described photoelectricity reception and converting unit (4), described optical path light and reference path light produce and interfere in described photoelectricity reception and converting unit (4), described host computer is adjusted with interference modulations unit (2) and photoelectricity and is received and be connected with converting unit (4) respectively at described laser optical path direction, receives and converting unit (4) with interference modulations unit (2) and photoelectricity for controlling described laser optical path direction adjustment, described thrihedral reflector is measured target surface unit (3) and is fixed on described worktable, with motion and the deflection of worktable, change light path light path and direction, described laser optical path direction is adjusted with interference modulations unit (2) according to interferometric fringe signal shape simultaneously, adjust in real time optical path direction, ensure to have relatively-stationary angle between optical path and reference path, thereby ensure that interferometric fringe signal shape is basicly stable, described photoelectricity receives with converting unit (4) for completing photoelectricity reception, fringe count and the shape of stripes identification of interferometric fringe signal, and adjust and interference modulations unit (2) by the output control laser optical path direction of identification, host computer also completes the adjustment of laser optical path direction and the driving control of interference modulations unit (2) and the modulation of optical path difference simultaneously, realizes the multivariant measurement of worktable.
2. the device that working table movement error multiple degrees of freedom according to claim 1 detects, it is characterized in that: described LASER Light Source unit (1) comprises high frequency stabilized laser (101) and beam-expanding collimation device (102), the laser that described high frequency stabilized laser (101) produces is input in the described adjustment of laser optical path direction and interference modulations unit (2) after described beam-expanding collimation device (102).
3. the device that working table movement error multiple degrees of freedom according to claim 1 detects, it is characterized in that: described laser optical path direction is adjusted with interference modulations unit (2) and comprised the first light splitting piece (201), the second light splitting piece (202), the PZT device (203) of Three Degree Of Freedom, light path is adjusted catoptron or beat mirror (204), beam expanding lens (205) and beat driver (206), described beat driver (206) one end is connected with described host computer, the other end is connected with the PZT device (203) of described Three Degree Of Freedom, carry out Three Degree Of Freedom adjustment for the PZT device (203) of controlling described Three Degree Of Freedom, the laser part that described LASER Light Source unit (1) produces is as passing described the first light splitting piece (201) with reference to light path straight line, after the second light splitting piece (202) and beam expanding lens (205), project in described photoelectricity reception and converting unit (4), another part distinguishes one once described the first light splitting piece (201) as optical path, light path is adjusted catoptron or beat mirror (204), thrihedral reflector is measured target surface unit (3), light path is adjusted after catoptron or beat mirror (204) and the second light splitting piece (202) order-reflected, after described beam expanding lens (205), project in described photoelectricity reception and converting unit (4).
4. the device that working table movement error multiple degrees of freedom according to claim 3 detects, is characterized in that: the PZT device (203) of described Three Degree Of Freedom is made up of two-dimentional beat and one dimension displacement mobile device.
5. the device and method that working table movement error multiple degrees of freedom according to claim 1 detects, it is characterized in that: described thrihedral reflector is measured target surface unit (3) and combined by three level crossings, mid-plane mirror and both sides incident or exit plane mirror angle are 120 °, described optical path light, after three level crossings reflect successively, projects in the described adjustment of laser optical path direction and interference modulations unit (2).
6. the device that working table movement error multiple degrees of freedom according to claim 1 detects, it is characterized in that: described photoelectricity receives with converting unit (4) and comprises detector (401), photoelectric switching circuit (402), A/D sample circuit (403) and shaping and segmentation sensing circuit (404), after described A/D sample circuit (403) and shaping and segmentation sensing circuit (404) are connected in parallel, with described host computer, detector (401) and photoelectric switching circuit (402) are connected in series, adjust for receiving described laser optical path direction the light projecting with interference modulations unit (2), and carry out opto-electronic conversion post-sampling, the signal of sampling is through difference shaping, carry out the subdivision and count of interference fringe, application ellipse fitting or trigonometric function method realize the identification of shape of interference fringe.
7. the device that working table movement error multiple degrees of freedom according to claim 6 detects, is characterized in that: described detector (401) adopts symmetrical ' matrix pattern ' 4 quadrant detector.
8. the device that working table movement error multiple degrees of freedom according to claim 6 detects, it is characterized in that: described photoelectric switching circuit (402) is completed by four NPN triodes and four resistance, utilize four triodes and four resistance that size is identical that enlargement factor is consistent, the mode of amplifying by electric current completes, and ensures that detector (401) signal has identical enlargement factor.
9. the device that working table movement error multiple degrees of freedom according to claim 6 detects, it is characterized in that: described shaping is made up of difference channel, comparator circuit and segmentation sensing circuit with segmentation sensing circuit (404), complete the counting processing of interference fringe, obtain Z-direction displacement.
10. the device that working table movement error multiple degrees of freedom according to claim 6 detects, is characterized in that: described A/D sample circuit (403) is made up of high-speed synchronous A/D change-over circuit, more than synchronous speed reaches 100k.
11. 1 kinds of devices that utilize profit to require the working table movement error multiple degrees of freedom described in 1 to detect carry out the method that working table movement error multiple degrees of freedom detects, and it is characterized in that, comprise the following steps:
Step 1: before measurement, the device that debugging is described, ensure that optical path incident ray is parallel to emergent ray, it is the intermediate mirror normal that incident ray is parallel to thrihedral reflector measurement target surface unit (3), then adjusting described laser optical path direction adjusts and interference modulations unit (2), between guarantee measurement light and reference ray, form a very little angle, photoelectricity receives the interference fringe suitable with the upper appearance of converting unit (4), the differing of differential signal of interference fringe tried one's best near 90 °, be convenient to like this subdivide with distinguished and count processing of interferometric fringe signal;
Step 2: start described worktable, start to measure, driving laser optical path direction is adjusted the motion of the Z-direction in a wavelength with interference modulations unit (2), when carrying out interference modulations, photoelectricity receives the photosignal of surveying with converting unit (4) and carries out difference processing on the one hand, obtains the original signal for counting; Calculate signal phase difference accurately by ellipse fitting or sin cos functions phase multiplication algorithm on the other hand, adjust the calculating of parameter for optical path direction deflection angle;
Step 3: by phase differential and the deflection angle parameter calculated, show deflection angle on the one hand, control on the other hand laser optical path direction and adjust and interference modulations unit (2), adjust angle, make the size of interference fringe not be subject to the impact of working table movement error.
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