CN101105391A - Synthetic wave interference nano surface tri-dimensional on-line measuring system and method - Google Patents
Synthetic wave interference nano surface tri-dimensional on-line measuring system and method Download PDFInfo
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Abstract
The invention relates to a nano-surface interference 3D online measurement method with composite wave and by light scanning and the system thereof. The range depends on the wavelength of the composite wave, and the system has a common path interference structure. The beam with spectral width of 40 nm is color dispersed into two sectored lights with wavelength continuously and uniformly distributed in space by a grating, the two sectored lights are collimated to two parallel lights with transverse misplacement and partial overlapping, and the overlapped part forms a composite wave. The parallel lights of the composite wave passes through a plano-convex focusing lens with a cylindrical surface coated with a semi-transmitting and reflective film, then one half of the lights are reflected to become reference light and the other half of the lights are focused to become light, and then the light is reflected by different measuring points, interfered with the reference light and detected by an array CCD. If the phase variation of the interference signal of each pixel of CCD is measured, then the longitudinal variation at the measuring point can be obtained. The nano-surface 2D measurement is finished by once location; and the nano-surface 3D measurement is finished by transverse scanning of light. The measurement range is 600-1,000 micron, and the resolution is higher than 5 nm. The invention has the advantages of high measurement speed, and low cost; and is suitable for measurement of nano-surface with boss and deep groove.
Description
Technical Field
The invention relates to a three-dimensional online measurement method and a three-dimensional online measurement system for a synthetic wave interference nano surface by utilizing light scanning, in particular to a three-dimensional online measurement method and a three-dimensional online measurement system for a nano surface with a boss and deep groove structure, belonging to the technical field of optical measurement.
Background
[1] Hand, t.a.carolan, j.s.barton, and j.d.c.jones, optical bulletin (Optics Letters), 1993, vol 18, no. 16, pages 1361-1363. The working principle of the prior art document [1] is as shown in fig. 1, light emitted by a semiconductor laser reaches a measuring head after passing through a faraday isolator and an optical fiber 50: 50 coupler, the measuring head is a fizeau interferometer, one part of light is reflected by an end face of an optical fiber to be used as reference light, the other part of light is focused by a self-focusing lens to be projected onto a measured surface, is reflected by the measured surface to return to a system again and interferes with the reference light, an interference signal is detected by a detector D1, and the phase of the interference signal is determined by the longitudinal height of a measured point on the measured surface; the driving current of the laser is changed to change the light emitting frequency of the laser, four lights with different frequencies are used for measuring the same point to obtain four interference signals, the phases of the four interference signals are different due to different incident light wave frequencies, the driving current is adjusted to enable the phase difference pi/2 of two adjacent interference signals to demodulate the optical path difference D of the point through the following formula, and the single-point measurement is completed:
I n (n =1,2,3,4) is the intensity of the nth order interference signal, c is the speed of light, and v is the incident light frequency. The stepping motor drives the measuring head to transversely scan the measured surface, and the measurement of the measured surface is completed.
[2] Dejiao Lin, xiangqian Jiang, fang Xie, wei Zhang, lin Zhang and Ian Bennion, optical Express (Optics Express), 2004, vol.12, no. 23, pp.5729-5734. The working principle of the prior art document [2] is shown in fig. 2, light with wavelength λ 0 emitted by a semiconductor laser is divided into two paths after passing through two 3 dB-couplers, one path is reflected by a fiber grating, and the other path is reflected by a reference reflector. The two paths of reflected light meet and interfere again after passing through the 3 dB-coupler, interference signals are reflected by another fiber grating after passing through the gyrator, then pass through the gyrator again and are detected by the PIN detector, signals detected by the detector are processed by the servo circuit and then drive the piezoelectric ceramic tube to adjust the length of a reference arm of the fiber interferometer, and the two interference arms of the stable interferometer are always in an orthogonal state (the phase difference is pi/2), so that the purpose of stabilizing the interferometer is achieved.
Wavelength lambda emitted by a tunable laser m The variable light is divided into two paths after passing through two optical fiber 3 dB-couplers, one path of light passes through an optical fiber auto-collimation lens and then is reflected by a measuring mirror to return to the interferometer again, the other path of light passes through the optical fiber auto-collimation lens and then is reflected by a reference mirror to return to the interferometer again, the two paths of light meet after passing through the 3 dB-couplers to form interference signals, the interference signals are detected by a PIN detector after passing through a gyrator and an optical fiber grating, and the displacement of the measuring mirror is measured through phase analysis.
The problems and disadvantages of the two prior arts are:
1. the point scanning measurement mode is adopted, the measurement speed is low, two-dimensional scanning is required for surface three-dimensional measurement, the scanning mechanism is complex, and the instrument cost is high;
2. the sensor is sensitive to the interference of measuring environment vibration, temperature drift and the like, and is not suitable for on-line measurement;
3. the measurement range is limited by the wavelength lambda of incident light waves, is less than lambda/2, and cannot be used for measuring the nano surface with the boss and deep groove structures.
The invention aims to provide a method and a system for three-dimensional online measurement of a composite wave interference nano surface by utilizing light scanning, aiming at the problems and the defects in the prior art.
Disclosure of Invention
The purpose of the invention is realized by the following technical scheme:
the system is composed of a super-radiation light emitting diode SLD, an optical fiber auto-collimation lens Z, a grating G, a collimation lens L1, a parallel glass flat plate P with two sides plated with reflecting films, a spectroscope BS, a flat column focusing lens L2 with a plane plated with a semi-transparent and semi-reflective film, a longitudinal micro-motion workbench M1, a transverse micro-motion workbench M2, a high-speed linear array CCD, phase measurement, a signal generator, an A/D conversion card, a computer, result output and drive control; a common-path interferometer is formed by a super-radiation light-emitting diode SLD with the center wavelength of 850nm and the spectral width of 40nm, an optical fiber auto-collimation lens Z, a grating G, a parallel glass flat plate P, a spectroscope BS and a flat column focusing lens L2 with a plane plated with a semi-transparent semi-reflective film, so that the influence of environmental vibration and temperature drift on a measuring system is subjected to common-mode suppression, and the measuring system is suitable for online measurement; the light with the spectral width of 40nm emitted by the super-radiation light-emitting diode SLD is collimated into parallel light beams after passing through the optical fiber auto-collimation lens Z, the parallel light beams are dispersed into fan-shaped light sheets with the wavelength continuously and uniformly distributed in space by the grating G, the fan-shaped light sheets are collimated into parallel light sheets with the wavelength continuously and uniformly distributed in space by the collimating lens L1, the parallel light sheets are reflected by two surfaces (the upper surface is plated with a partial reflecting film, and the lower surface is plated with a total reflecting film) of a parallel glass flat plate P to form two parallel light sheets which are parallel to each other, transversely staggered and partially overlapped, and the overlapped part of the two parallel light sheets in space forms a parallel light sheet consisting of a series of parallel synthesized waves. The synthesized wave parallel light sheet is vertically incident on a plano-cylindrical lens focusing L2 after passing through a spectroscope BS, a semi-transparent and semi-reflective film is plated on the plane of the plano-cylindrical lens focusing L2, half of the light intensity of the synthesized wave parallel light sheet is reflected and returns along the original path, and the part of the light is used as reference light; the other half of the light intensity is transmitted and focused into a light ray with the width less than 1 μm, the light ray scans the surface of the tested device, the light ray is reflected by the tested surface to meet and interfere with the reference light in the system, the synthesized wave interference signal is reflected by the spectroscope BS and then detected by the high-speed linear array CCD, different pixels of the CCD detect the interference signal generated by the contact of the light reflected by different tested points of the tested surface and the reference light, and the longitudinal (vertical to the tested surface) information of the tested surface is loaded in the phase change of the interference signal. The phase variation of each pixel interference signal of the CCD is demodulated, namely the longitudinal variation of a corresponding measured point on the measured surface is measured, and the two-dimensional measurement of the surface is realized; the transverse micro-motion workbench M2 drives the tested device to transversely move, the light scans the surface of the tested device, and interference signals detected by each pixel of the CCD are processed in the same way, so that three-dimensional measurement of the surface is realized.
In order to demodulate the phase variation of the interference signal, a signal generator sends out periodic sawtooth wave voltage with certain amplitude, and the sawtooth wave voltage drives a longitudinal micro-motion workbench M1 to adjust the optical path of a measuring optical path through drive control; if the measured surface is a surface with a boss and deep groove structure and longitudinal change of delta h exists, the phase difference between the interference signal and the sawtooth wave signal is
Wherein λ is s Comparing the phase of interference signal with the phase of sawtooth wave signal to synthesize wavelength, measuring out its phase difference delta by phase measurement, analog-to-digital converting by A/D converting card, processing data by computer to measure the longitudinal variation delta h of the corresponding measured point, and processing the interference signal output by each pixel of linear array CCD to complete the two-dimensional measurement of the measured surface; driving and controlling the transverse worktable M2 to transversely move, transversely scanning the surface to be measured by light rays, and performing identical processing on signals output by each pixel of the linear array CCD one by one to finish the three-dimensional measurement of the surface to be measured; the measurement range is lambda s /2, synthetic wavelength
Much larger than the wavelength lambda of light wave 1 And λ 2 (ii) a Different light wave wavelengths lambda can be obtained by adjusting the thickness of the parallel glass plate P and the incident angle of the parallel light sheet when the parallel light sheet is reflected on the parallel glass plate 1 And λ 2 Therefore, the synthetic wavelengths with different sizes are obtained to adjust the size of the measuring range, so that the system is suitable for the three-dimensional online measurement of the nano surface with the boss and deep groove structures.
The invention has the beneficial effects that:
1. and scanning the nanometer surface by light rays to carry out three-dimensional measurement. Scanning the measured surface with parallel light sheets comprising a series of parallel synthesized waves to perform line scanning measurement, and positioning once in the measurement process to complete surface two-dimensional measurement; and (5) transversely scanning the surface to be measured by light rays to finish the three-dimensional measurement of the surface. The invention has the advantages of high measuring speed, simple scanning mechanism, low system cost and high measuring precision.
2. The invention uses the light source, the optical fiber auto-collimation lens Z, the grating G, the collimation lens L1, the parallel glass plate P, the spectroscope BS and the flat column focusing lens to form a common-path interference system, so that the influence of the interference such as environmental vibration, temperature drift and the like on the measurement system is suppressed in a common mode, and the system is suitable for online measurement.
3. The measuring range of the interference is enlarged by using a method of interference of the synthetic wave. Measuring range is lambda s /2, synthetic wavelength
Much larger than the wavelength lambda of light wave 1 And λ 2 And can be adjusted by adjusting the wavelength λ of light wave 1 And λ 2 The synthetic wavelengths with different sizes are obtained to obtain the measuring ranges with different sizes, the measuring ranges can reach 600-1000 mu m, and the method is suitable for the three-dimensional online measurement of the nanometer surface with the lug boss and the deep groove structure.
Drawings
FIG. 1 is a schematic diagram of the operation of prior art document [1 ];
FIG. 2 is a schematic diagram of the operation of prior art document [2 ];
fig. 3 is a working principle diagram of the present invention.
The figure is marked with: the device comprises a Z-optical fiber auto-collimation lens, a G-grating, an L1-collimation lens, a P-parallel glass plate, a BS-spectroscope, an L2-plano-cylindrical focusing lens, an M1-longitudinal micro-motion workbench and an M2-transverse micro-motion workbench.
Detailed Description
The invention is further described with reference to the following figures and detailed description.
As shown in FIG. 3, the light with a spectral width of 40nm emitted from the superluminescent diode SLD with a center wavelength of 850nm is transmittedThe parallel light beams are dispersed into fan-shaped light sheets with the wavelengths continuously and uniformly distributed in space through a grating G, the fan-shaped light sheets are collimated into parallel light sheets with the wavelengths continuously and uniformly distributed in space through a collimating lens L1, the parallel light sheets are obliquely incident on a parallel glass flat plate P with the thickness of d and coated with films on two surfaces, the upper surface of the parallel glass flat plate P is coated with a partial reflecting film, the lower surface of the parallel glass flat plate P is coated with a reflecting film with the reflectivity of 100%, the two parallel light sheets obtained by the reflection of the upper surface and the lower surface are parallel to each other, are transversely staggered, have an overlapped part in space, and the light intensities of the two light sheets are approximately equal. Wavelength lambda of two parallel light sheets corresponding to different points in the transverse direction of the overlapped part of the two parallel light sheets 1 And λ 2 In contrast, two different wavelengths meet to form a composite wave. So that the parallel light sheets formed after the two surfaces of the parallel glass plate are reflected and meet each other are composed of a series of parallel synthetic waves, and the synthetic wavelength of the synthetic wavesMuch larger than the wavelength lambda of light wave 1 And λ 2 . The parallel light sheet of the synthesized wave vertically enters a plano-cylindrical focusing lens L2 through a spectroscope BS, and the parallel light sheet of the synthesized wave is reflected by the plano-cylindrical focusing lens L2The plane is plated with a semi-transparent semi-reflecting film, half of the light intensity of the synthesized wave parallel light sheet is reflected and returns along the original path, the part of light is used as reference light, the other half of the light intensity is transmitted and focused into a light ray with the width less than 1 mu m, the light ray is projected onto the surface of a detected device and reflected back to the system by the detected surface, the light ray meets the reference light and generates synthesized wave interference, and the synthesized wave interference signal is reflected by a spectroscope BS and detected by a high-speed linear array CCD. Different pixels of the linear array CCD detect interference signals formed by reflected light of different measured points on the measured surface and reference light, and the phase change amount delta of the interference signals reflects the longitudinal change value delta h of the measured points. Δ and Δ h have a relationship ofSynthetic wavelength lambda s Depending on the angle of incidence of the parallel light sheet on the parallel glass plate P and the thickness d of the parallel glass plate, which is much larger than the wavelength lambda of the light wave 1 And λ 2 . The measuring range of the system is lambda s And 2, the measurement range is far larger than the measurement range lambda/2 (lambda is the wavelength of light waves) of the traditional interferometry, the purpose of wide-range interferometry is realized, and the system is suitable for three-dimensional online measurement of the nanometer surface with a boss and deep groove structure.
In order to demodulate the phase variation of the interference signal, the signal generator sends a sawtooth wave signal to drive the longitudinal micro-motion workbench M1 to perform uniform-speed longitudinal scanning through driving control so as to realize the adjustment of the optical path of the measuring optical path. And adjusting the initial position of the workbench and the amplitude of the sawtooth wave signal to enable the sawtooth wave signal and an interference signal of a certain pixel of the CCD to change in the same frequency and the same phase in the optical path scanning process. If the measured surface is an ideal plane, interference signals of other pixels of the CCD are also in the same frequency and the same phase as the sawtooth wave signals; if the measured surface is a surface with a boss and deep groove structure, the phases of interference signals of other pixels of the CCD and sawtooth wave signals are different, phase difference delta between the interference signals and the sawtooth wave signals is measured by the phase, and a longitudinal change value delta h corresponding to the measured point is obtained after computer data processing; the interference signal of each pixel of the CCD is processed in such a way that the two-dimensional measurement of the measured surface is completed; the driving control drives the transverse micro-motion workbench M2 to transversely move, the light rays scan the surface to be measured, and then the interference signals of each pixel of the CCD are processed, so that the three-dimensional measurement of the surface is completed.
The specific examples described above are described in order to illustrate implementations of the invention. Other variations and modifications of the invention will be apparent to those skilled in the art, and it is intended that any modifications/variations or equivalent arrangements which fall within the spirit and scope of the invention disclosed and the basic underlying principles thereof fall within the scope of the invention claimed.
Claims (3)
1. A three-dimensional on-line measuring system of the interference nano surface of the synthetic wave is characterized in that: scanning the surface of a tested device by using a parallel optical sheet consisting of a series of parallel synthetic waves to perform line scanning measurement, wherein a measuring light path and a reference light path form a common path interference system; the system consists of a superluminescent light-emitting diode (SLD), an optical fiber auto-collimation lens Z, a grating G, a collimation lens L1, a parallel glass flat plate P, a spectroscope BS, a plano-cylindrical focusing lens L2, a longitudinal micro-motion workbench M1, a transverse micro-motion workbench M2, a high-speed linear array CCD, phase measurement, a signal generator, an A/D conversion card, a computer, result output and drive control; a common-path interferometer is formed by a super-radiation light-emitting diode SLD with the center wavelength of 850nm and the spectral width of 40nm, an optical fiber auto-collimation lens Z, a grating G, a parallel glass flat plate P, a spectroscope BS and a flat column focusing lens L2 with a semi-transparent semi-reflective film plated on the plane, so that the influence of environmental vibration and temperature drift on a measuring system is subjected to common-mode suppression, and the measuring system is suitable for online measurement.
2. A three-dimensional on-line measurement method for a synthetic wave interference nano surface is characterized by comprising the following steps: the light with the spectral width of 40nm emitted by a super-radiation light-emitting diode (SLD) is collimated into parallel beams after passing through an optical fiber collimating lens Z, and the parallel beams are dispersed into wavelength which is connected in space by a grating GThe two parallel light sheets are reflected by the two surfaces of the parallel glass flat plate P to obtain two parallel light sheets which are parallel to each other, transversely staggered and partially overlapped, and the two parallel light sheets form a parallel light sheet consisting of a series of parallel synthesized waves at the spatially overlapped part; the synthesized wave parallel light sheet vertically enters a plano-cylindrical focusing lens L2 after passing through a spectroscope BS, a semi-transparent and semi-reflective film is plated on the plane of the plano-cylindrical focusing lens L2, half of the light intensity of the synthesized wave parallel light sheet is reflected and returns along the original path, and the part of the light is used as reference light; the other half of the light intensity is transmitted and focused to form a strip with a width less than 1 μmThe light rays scan the surface of the tested device, are reflected back to the system by the tested surface and are in contact interference with the reference light, the synthesized wave interference signal is reflected by the spectroscope BS and is detected by the high-speed linear array CCD, and different pixels of the CCD detect the interference signals generated by the contact of the light reflected back by different tested points of the tested surface and the reference light; longitudinal (vertical to the measured surface) information of the measured surface is carried in the phase change of the interference signal, and the phase change quantity of the interference signal of each pixel of the CCD is demodulated, namely the longitudinal change quantity of the corresponding measured point on the measured surface is measured; in order to demodulate the phase variation of the interference signal, a sawtooth wave signal sent by a signal generator drives a longitudinal micro-motion workbench M1 to perform uniform-speed longitudinal scanning through a drive control link to realize the adjustment of the optical path of a measuring optical path, and the initial position of the workbench and the amplitude of the sawtooth wave signal are adjusted, so that the sawtooth wave signal and the interference signal of a certain pixel of the CCD change in the same frequency and the same phase in the scanning process of the longitudinal micro-motion workbench M1; if the measured surface is an ideal plane, interference signals of other pixels of the CCD are also in the same frequency and the same phase as the sawtooth wave signals; if the measured surface is a surface with a boss and deep groove structure and longitudinal change of delta h exists, the phase difference between the interference signal and the sawtooth wave signal is 
Wherein the synthetic wavelength
λ 1 And λ 2 Is the wavelength of the light wave; the phase measurement link measures out the phase difference delta , the phase difference is subjected to analog-to-digital conversion through an A/D conversion card, then data processing is carried out through a computer, namely the longitudinal change value delta h corresponding to a measured point is measured, and interference signals output by each pixel of the linear array CCD are sequentially subjected to the processing, so that the two-dimensional measurement of the measured surface is completed; the driving control drives the transverse micro-motion workbench M2 to realize that light rays transversely scan the surface to be measured, and interference signals output by each pixel of the linear array CCD are processed one by one in the same way, namely the three-dimensional measurement of the surface to be measured is completed.
3. The method for the three-dimensional online measurement of the interference nano surface of the synthetic wave as claimed in claim 2, wherein: the measuring range is expanded by using a synthetic wave interference method, so that the measuring range of the system breaks through the limitation of the wavelength of the light wave, and is determined by the synthetic wavelength lambda s The measuring range of the system is lambda s Adjusting the thickness of the parallel glass plate P and the parallel light sheet upon reflection by the parallel glass plateIncident angle, adjustable composite wavelength lambda s To obtain measuring ranges of different sizes; the measurement amount Cheng Keda is 600-1000 μm, the resolution is better than 5nm, and the method is suitable for three-dimensional online measurement of the nanometer surface with a boss structure and a deep groove structure.
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| CN109211142B (en) * | 2018-09-19 | 2020-10-20 | 苏州佳世达光电有限公司 | Three-dimensional scanning system |
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