CN207180619U - Three-dimensional small angle error simultaneous measuring apparatus based on beam drift compensation - Google Patents
Three-dimensional small angle error simultaneous measuring apparatus based on beam drift compensation Download PDFInfo
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- CN207180619U CN207180619U CN201720699266.9U CN201720699266U CN207180619U CN 207180619 U CN207180619 U CN 207180619U CN 201720699266 U CN201720699266 U CN 201720699266U CN 207180619 U CN207180619 U CN 207180619U
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Abstract
The utility model discloses the three-dimensional small angle error simultaneous measuring apparatus compensated based on beam drift to solve the problems such as existing guide rail three-dimensional low-angle high accuracy while measuring method measurement accuracy are low, measurement range is small, poor anti jamming capability.Including laser, collimation lens, polarization splitting prism, quarter-wave plate, the right-angle prism for being coated with beam splitting coating, beam splitter, condenser lens, Position-Sensitive Detector, 4 quadrant detector, signal processing circuit.Collimation lens, polarization splitting prism, quarter-wave plate are set between laser and the right-angle prism for being coated with beam splitting coating, realize the processing to incident light and reflected light, the information of the reflected light and transmitted light after beam splitting is received and measured by 4 quadrant detector and Position-Sensitive Detector, realizes the angle of pitch, deflection angle and rolling angle error, the measurement of light drift compensation.The utility model utilizes dual-beam variate, realizes error separate, enhances antijamming capability, few using optics, light source power is low, and cost is cheap；Optical texture is simple, easy to operate, and movable part can be easy to in-site measurement without cable；Angle resolution is higher.
Description
Technical field
The utility model belongs to photoelectric detection technology field, is related to a kind of simple and compact for structure, high accuracy while measurement three
Tie up the device of small angle error.Particularly including it is difficult to the rolling angle error measured.
Background technology
Mechanical guide kinematic pair all includes three linearity errors：Site error vertically, two perpendicular to axial direction are straight
Dimension error.And the angular error of three pivotings：The angle of pitch, deflection angle, roll angle.If instrument and lathe are at these
Geometric moving error has Abbe arm on corresponding direction, and these geometric moving errors will result in Abbe error and influence theirs
Processing or measurement accuracy.At present, Abbe error is reduced or eliminated mainly to reduce Abbe arm from structure, improve by not Lay grace suggestion
Guide rail kinematic accuracy and error correction, and the influence of Abbe error is reduced or eliminated by Ai Pengsitan principles from structure.By
In the limitation of mechanical structure and physical dimension, almost all of three coordinate measuring machine and lathe have Abbe arm.Therefore it is accurate
It is extremely important for the accuracy assessment and error correction of instrument and lathe to measure these geometric moving errors.Using rectangular co-ordinate
The lathe or three coordinate measuring machine of system share 21 geometric error parameters, wherein 18 errors can be surveyed with ready-made interferometer
Amount, including be most difficult to measure 3 rolling angle errors.In fields such as high-accuracy machine-building, processing, detections, Modified geometrical and motion
Error raising linear motion system precision is most important, therefore, the high-precision measuring method of six degree of freedom error and technical research
An always important topic, and Three Degree Of Freedom angular error is three important parameters measured in six degree of freedom error, wherein
Rolling angle error is that a parameter of measurement is most difficult in six degree of freedom error.
For the high-acruracy survey of guide rail three-dimensional low-angle, there are following several measuring methods：
1. diffractometry method, the five degree of freedom based on plane diffraction grating while measuring method [Miller J M, Barton
R O.Multi-axis alignment apparatus. U.S. Patent numbers：4804270.1989] this method measurement accuracy compared with
It is low, fixed cell connecting cable is moved, limits the convenience of measurement.Five degree of freedom simultaneous measurement method based on hololens
[JBergin M T, Bartolotta C S.Multi-axis optical alignment system includingA
Spatial filter, U.S. Patent number：3701602 1972] this method is simple, element is few, cost is low, but roll angle
The stability requirement measured to light beam is very high, and its measurement accuracy is not high.
2. the combination measuring method of laser interference and collimation, a kind of five degree of freedom or six degree of freedom that Lau is proposed are simultaneously
Measuring system [Lau K C, Liu Y Q.Five-axis/six-axis laser measuring system：EP, the U.S. are special
Profit number：US6049377 [P] .2000.] the measuring precision is high, and it is unique commercial multiple degrees of freedom while to survey in the world at present
Amount system, but system mobile unit tape cable connects, and is unsuitable for the high speed and long range measurements at scene, while the rolling of the system
Outer corner measurement also needs to electrolevel, it is impossible to applies the measurement in the roll angle of vertical axes, and involves great expense.Bruce L.
Et al. propose a kind of five degree of freedom based on 2 directional lights simultaneously measuring system [Thomas B L, Bass H M, Loftus L K,
Et al.Laser aligned five-axis position measurement device, U.S. Patent number：
US5798828.1998.], as long as the distance of this method system architecture simply, between adjustment detector can reach different measurements
Resolution ratio.But the collimation of two-beam line is difficult adjustment with hot spot uniformity, measurement error, and mobile fixed cell band can be caused
Cable, it has not been convenient to the dynamic measurement of High Speed NC Machine Tools.
3. the measuring method, Liu C H et al. of laser grating interference proposes a kind of five degree of freedom measuring method simultaneously
[Liu C H, Huang H L, Lee H W.Five-degrees-of-freedom diffractive laser encoder.
[J] .Applied Optics, 2009 ,] and a kind of simple six degree of freedoms for proposing of Lee simultaneously measuring method [Lee C B,
Kim G H, Lee S K.Design and construction of a single unit multi-function
optical encoder for a six-degree-of-freedom motion error measurement in an
Ultraprecision linear stage [J] .Measurement Science＆Technology, 2011 ,] above method
Laser grating interference technique is based on, measuring principle and system architecture are simpler, but the size of accurate diffraction grating is limited, because
This measurement range is smaller.
The content of the invention
The technical problems to be solved in the utility model is：A kind of optical texture simple and compact is proposed, is easy to practical operation, essence
The three-dimensional low-angle simultaneous measuring apparatus that degree, stability and economy can be taken into account.
The utility model proposes a kind of three-dimensional low-angle simultaneous measuring apparatus.
Including fixed cell and mobile unit, mobile unit is fixed on test platform；The mobile unit includes being coated with
The right-angle prism of beam splitting coating, the right-angle prism for being coated with beam splitting coating are fixed on the measuring table moved along guide rail；It is described fixed single
Member includes quick by laser, collimation lens, polarization splitting prism, quarter-wave plate, beam splitter, 4 quadrant detector, position
Sense detector, condenser lens and signal processing circuit, collimation lens, polarization splitting prism and quarter-wave plate are successively set on
On light between laser and the right-angle prism for being coated with beam splitting coating；The beam splitter includes beam splitter I and beam splitter II, four-quadrant
Limit detector includes 4 quadrant detector I and 4 quadrant detector II, Position-Sensitive Detector include Position-Sensitive Detector I with
Position-Sensitive Detector II, condenser lens include condenser lens I and condenser lens II, and beam splitter I and condenser lens I are set gradually
On the light of the transmitted light beam for the right-angle prism for being coated with beam splitting coating, Jiao that Position-Sensitive Detector I is arranged on condenser lens I puts down
On face, 4 quadrant detector II is arranged in beam splitter I light path；Beam splitter II and 4 quadrant detector I is arranged on polarization point
In the light path of light prism, condenser lens II and Position-Sensitive Detector II are arranged in beam splitter II light path, and position sensing is visited
Device II is surveyed to be arranged on condenser lens II focal plane；The Position-Sensitive Detector I, Position-Sensitive Detector II, four-quadrant
Detector I and 4 quadrant detector II are connected with signal processing circuit, and signal processing circuit is connected with processing terminal.
The laser is the laser of He-Ne lasers or semiconductor laser；The right-angle prism is to be coated with beam splitting
The right-angle prism of film；The collimation lens is simple lens or lens group；Described Position-Sensitive Detector is PSD position sensors
Part or CCD photoelectric receiving devices.
The utility model uses a right-angle prism for being coated with beam splitting coating as Sensitive Apparatus, using dual-beam variate,
Error separate is realized, enhances antijamming capability；Position-Sensitive Detector has been used, has realized light drift compensation；Use optics
Device is few, and light source power is low, and cost is cheap；Optical texture simple and compact, easy to operate, movable part can be easy to without cable
In-site measurement；Angle resolution is up to 0.3 " even more high.
Brief description of the drawings
Fig. 1：Three-dimensional low-angle measures the schematic device of embodiment simultaneously.
In figure：In figure, 1 is laser, and 2 be collimation lens, and 3 be polarization splitting prism, and 4 be quarter-wave plate, and 5 be plating
There is a right-angle prism of beam splitting coating, 6 be beam splitter I, and 7 be condenser lens I, and 8 be Position-Sensitive Detector I, and 9 be beam splitter II, 10
It is 4 quadrant detector II for 4 quadrant detector I, 11,12 be condenser lens II, and 13 be Position-Sensitive Detector II, and 14 be letter
Number process circuit, 15 be computer, and 101 be fixed cell, and 102 be mobile unit.
Embodiment
It is described further below in conjunction with the accompanying drawings to the utility model is expanded on further.
The method that three-dimensional small angle error described in the utility model based on beam drift compensation measures simultaneously, including with
Lower step：
Step 1：Laser 1 sends laser, is emitted after the collimation of collimation lens 2；Light beam by polarization splitting prism 3,
Quarter-wave plate 4 incides being coated with the inclined edge surfaces of right-angle prism 5 of beam splitting coating on platform to be tested；
Step 2：The reflected beams for being coated with the right-angle prism 5 of beam splitting coating return, and light beam is inclined after quarter-wave plate 4
The direction that shakes changes, then again after the beam splitting of polarization splitting prism 3, by the position sensing positioned at the focal plane of condenser lens 12
Detector 13 receives, when pitching and beat occur for platform to be measured, focal spot of the reflected beams on Position-Sensitive Detector
Position changes,
According to
α≈dy/ (2f), β ≈ dx/(2f)
In formula, f is the focal length of lens, dxAnd dyThe respectively displacement in picture point x-axis and y-axis direction on Position-Sensitive Detector.
The photosignal of Position-Sensitive Detector output is sent into processing terminal and included after signal processing circuit 14
The error measure of the angle of pitch and deflection angle to be measured of laser beam drift error；
Step 3：By the reflected beams for the right-angle prism 5 for being coated with beam splitting coating and into after being coated with the right-angle prism of beam splitting coating
The transmitted light beam of injection is split through different beam splitters respectively, and two different 4 quadrant detectors receive the light after beam splitting
Beam, rolling angle measurement is realized after calculus of differences；That is basis
Step 4：Penetrated by the reflected beams for the right-angle prism for being coated with beam splitting coating and into after being coated with the right-angle prism of beam splitting coating
The transmitted light beam gone out is split through different beam splitters respectively, and two light beams are arrived separately at positioned at two condenser lens focal planes
Two Position-Sensitive Detectors and carry out reception processing, angular light drift amount is obtained after calculus of differences, is then surveyed in former each error
Measurement error on the basis of value caused by angular light drift amount, obtains high-precision error measuring value, and then realizes light drift compensation.
Last above-mentioned roll angle, the angle of pitch, deflection angle, light drifts about variable quantity through passing through signal transacting caused by environment
Circuit 14, which inputs computer 15, can obtain numerical values recited.
As shown in figure 1, the device that the three-dimensional small angle error based on beam drift compensation measures simultaneously, it is characterised in that：
Fixed cell 101 and mobile unit 102, mobile unit 102 are fixed on test platform；The mobile unit 102 includes being coated with
The right-angle prism 5 of beam splitting coating, the right-angle prism 5 for being coated with beam splitting coating are fixed on the measuring table moved along guide rail；The fixation
Unit 101 is included by laser 1, collimation lens 2, polarization splitting prism 3, quarter-wave plate 4, beam splitter, Quadrant detector
Device, Position-Sensitive Detector, condenser lens and signal processing circuit 15, collimation lens 2, polarization splitting prism 3 and a quarter
Wave plate 4 is successively set on the light between laser 1 and the right-angle prism 5 for being coated with beam splitting coating；The beam splitter includes beam splitting
Device I6 and beam splitter II9,4 quadrant detector include 4 quadrant detector I10 and 4 quadrant detector II11, and position sensing is visited
Surveying device includes Position-Sensitive Detector I8 and Position-Sensitive Detector II13, and condenser lens includes condenser lens I7 and condenser lens
II12, beam splitter I6 and condenser lens I7 are successively set on the light of the transmitted light beam for the right-angle prism 5 for being coated with beam splitting coating, position
Put sensing detector I8 to be arranged on condenser lens I7 focal plane, 4 quadrant detector II11 is arranged on beam splitter I6 light path
On；Beam splitter II9 and 4 quadrant detector I10 are arranged in the light path of polarization splitting prism 3, and condenser lens II12 and position are quick
Sense detector II13 is arranged in beam splitter II9 light path, and Position-Sensitive Detector II13 is arranged on condenser lens II12 Jiao
In plane；The Position-Sensitive Detector I8, Position-Sensitive Detector II13,4 quadrant detector I10 and 4 quadrant detector
II11 is connected with signal processing circuit 14, and signal processing circuit 14 is connected with computer 15.
Claims (4)
1. the three-dimensional small angle error simultaneous measuring apparatus based on beam drift compensation, it is characterised in that including fixed cell
(101) it is fixed on mobile unit (102), mobile unit (102) on test platform；The mobile unit (102) includes being coated with
The right-angle prism (5) of beam splitting coating, the right-angle prism (5) for being coated with beam splitting coating are fixed on the measuring table moved along guide rail；It is described
Fixed cell (101) is included by laser (1), collimation lens (2), polarization splitting prism (3), quarter-wave plate (4), beam splitting
Device, 4 quadrant detector, Position-Sensitive Detector, condenser lens and signal processing circuit (14), collimation lens (2), polarization point
Light prism (3) and quarter-wave plate (4) are successively set between laser (1) and the right-angle prism (5) for being coated with beam splitting coating
On light；The beam splitter includes beam splitter I (6) and beam splitter II (9), and 4 quadrant detector includes 4 quadrant detector I
(10) and 4 quadrant detector II (11), Position-Sensitive Detector include Position-Sensitive Detector I (8) and Position-Sensitive Detector
II (13), condenser lens include condenser lens I (7) and condenser lens II (12), and beam splitter I (6) and condenser lens I (7) are successively
It is arranged on the light of the transmitted light beam for the right-angle prism (5) for being coated with beam splitting coating, Position-Sensitive Detector I (8) is arranged on focusing
On lens I (7) focal plane, 4 quadrant detector II (11) is arranged in the light path of beam splitter I (6)；Beam splitter II (9) and four
Quadrant detector I (10) is arranged in the light path of polarization splitting prism (3), condenser lens II (12) and Position-Sensitive Detector II
(13) it is arranged in the light path of beam splitter II (9), Jiao that Position-Sensitive Detector II (13) is arranged on condenser lens II (12) puts down
On face；The Position-Sensitive Detector I (8), Position-Sensitive Detector II (13), 4 quadrant detector I (10) and four-quadrant are visited
Survey device II (11) with signal processing circuit (14) to be connected, signal processing circuit (14) is connected with processing terminal (15).
2. the three-dimensional small angle error simultaneous measuring apparatus according to claim 1 based on beam drift compensation, its feature
It is, the laser (1) is the laser of He-Ne lasers or semiconductor laser；The collimation lens (2) is simple lens
Or lens group.
3. the three-dimensional small angle error simultaneous measuring apparatus according to claim 1 based on beam drift compensation, its feature
It is, the right-angle prism (5) is the right-angle prism for being coated with beam splitting coating.
4. the three-dimensional small angle error simultaneous measuring apparatus according to claim 1 based on beam drift compensation, its feature
It is, described Position-Sensitive Detector is PSD position sensitive detectors or CCD photoelectric receiving devices.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201720699266.9U CN207180619U (en) | 2017-06-16 | 2017-06-16 | Three-dimensional small angle error simultaneous measuring apparatus based on beam drift compensation |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720699266.9U CN207180619U (en) | 2017-06-16 | 2017-06-16 | Three-dimensional small angle error simultaneous measuring apparatus based on beam drift compensation |
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| CN207180619U true CN207180619U (en) | 2018-04-03 |
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| CN201720699266.9U Expired - Fee Related CN207180619U (en) | 2017-06-16 | 2017-06-16 | Three-dimensional small angle error simultaneous measuring apparatus based on beam drift compensation |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108548488A (en) * | 2018-05-02 | 2018-09-18 | 大连理工大学 | A kind of error-detecting of high-precision laser measuring system and separation method |
| CN110082071A (en) * | 2019-04-19 | 2019-08-02 | 南京理工大学 | A kind of measuring device and method of right-angle prism optical parallelism error |
| CN110830123A (en) * | 2019-11-12 | 2020-02-21 | 郑州轻工业学院 | Entanglement state-based quantum information beam splitting device suitable for twin double-beam coding |
| CN112325803A (en) * | 2020-10-23 | 2021-02-05 | 北京交通大学 | Common-path difference-based laser measurement method and device for change of included angle of polyhedral workpiece |
| CN112325802A (en) * | 2020-10-23 | 2021-02-05 | 北京交通大学 | Two-dimensional small-angle laser measurement method and device based on common-path difference and self-zero calibration |
| CN113465551A (en) * | 2021-07-06 | 2021-10-01 | 天津大学 | Two-dimensional space laser angle measurement method based on CCD camera |
| CN113587844A (en) * | 2021-07-27 | 2021-11-02 | 中国科学院长春光学精密机械与物理研究所 | Phase-shifting interferometry system and method |
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2017
- 2017-06-16 CN CN201720699266.9U patent/CN207180619U/en not_active Expired - Fee Related
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108548488A (en) * | 2018-05-02 | 2018-09-18 | 大连理工大学 | A kind of error-detecting of high-precision laser measuring system and separation method |
| CN108548488B (en) * | 2018-05-02 | 2019-06-21 | 大连理工大学 | A kind of error-detecting of high-precision laser measuring system and separation method |
| CN110082071A (en) * | 2019-04-19 | 2019-08-02 | 南京理工大学 | A kind of measuring device and method of right-angle prism optical parallelism error |
| CN110082071B (en) * | 2019-04-19 | 2021-03-02 | 南京理工大学 | Device and method for measuring optical parallel difference of right-angle prism |
| CN110830123A (en) * | 2019-11-12 | 2020-02-21 | 郑州轻工业学院 | Entanglement state-based quantum information beam splitting device suitable for twin double-beam coding |
| CN110830123B (en) * | 2019-11-12 | 2022-04-08 | 郑州轻工业学院 | Entanglement state-based quantum information beam splitting device suitable for twin double-beam coding |
| CN112325803A (en) * | 2020-10-23 | 2021-02-05 | 北京交通大学 | Common-path difference-based laser measurement method and device for change of included angle of polyhedral workpiece |
| CN112325802A (en) * | 2020-10-23 | 2021-02-05 | 北京交通大学 | Two-dimensional small-angle laser measurement method and device based on common-path difference and self-zero calibration |
| CN112325803B (en) * | 2020-10-23 | 2022-03-04 | 北京交通大学 | Common-path difference-based laser measurement method and device for change of included angle of polyhedral workpiece |
| CN113465551A (en) * | 2021-07-06 | 2021-10-01 | 天津大学 | Two-dimensional space laser angle measurement method based on CCD camera |
| CN113587844A (en) * | 2021-07-27 | 2021-11-02 | 中国科学院长春光学精密机械与物理研究所 | Phase-shifting interferometry system and method |
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