CN108168465A - A kind of light path laser heterodyne interferometry roll angle high precision measuring device and method altogether - Google Patents
A kind of light path laser heterodyne interferometry roll angle high precision measuring device and method altogether Download PDFInfo
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- CN108168465A CN108168465A CN201711411746.1A CN201711411746A CN108168465A CN 108168465 A CN108168465 A CN 108168465A CN 201711411746 A CN201711411746 A CN 201711411746A CN 108168465 A CN108168465 A CN 108168465A
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
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Abstract
The invention belongs to the photoelectric measurement field of roll angle, specially a kind of light path laser heterodyne interferometry roll angle high precision measuring device altogether, including single-frequency frequency stabilized carbon dioxide laser, depolarization Amici prism, polarization splitting prism and right-angle prism；It is disposed with acousto-optic modulator and speculum respectively in the transmission optical axis and reflection optical axis of depolarization Amici prism；Second exit facet of polarization splitting prism is disposed with quarter-wave plate, half wave plate and reflector, and analyzer is additionally provided on the reflection optical axis of reflector, and the exit direction of analyzer is provided with the first photodetector and the second photodetector；First photodetector and the second photodetector are connect with phase difference sensitive detection parts, and phase difference sensitive detection parts are connected with computer.The phase shift that two measurement light are generated by same rolling in measuring device of the present invention is on the contrary, improve Measurement Resolution, and the optical path difference of two light beams is small, small by such environmental effects, measurement result is accurate.
Description
Technical field
The invention belongs to the photoelectric measurement field of roll angle, specially a kind of light path laser heterodyne interferometry roll angle altogether is high
Accuracy measuring device and method.
Background technology
Precise guide rail plays an important role in the industry such as manufacturing industry, aerospace.In the linear guide there is
Six geometric errors are respectively：Position error, two straightness errors, pitch angle, deflection angle and roll angle.Rolling angle error
As the pith of high-grade lathe geometric error, precision is to weigh one of important references index of guide rail performance, its survey
Amount is the key that carry out Product Acceptance Review inspection and progress error compensation.
For rolling angle error, since its direction of error is vertical with measuring beam direction, additional optical path difference can not be introduced,
The thus measurement relative difficulty of roll angle, at present both at home and abroad also in a kind of research and exploratory stage.
Since reference light and measurement light have very big optical path difference in existing laser heterodyne interference measurement method, in big stroke
In the measurement of guide rail, environmental factor can cause serious influence to measurement, it is impossible to accurate to measure.
Invention content
For problems of the prior art, it is high-precision that the present invention provides a kind of light path laser heterodyne interferometry roll angle altogether
Spend measuring device and method；The light path of two measuring beams is identical, and measurement result is accurate.
The present invention is to be achieved through the following technical solutions：
A kind of light path laser heterodyne interferometry roll angle high precision measuring device altogether, which is characterized in that including single-frequency frequency stabilization
Laser, depolarization Amici prism, polarization splitting prism and the right-angle prism for being arranged on single-frequency frequency stabilized carbon dioxide laser emitting light path；Disappear
First sound-optic modulator and the first speculum are disposed in the transmission optical axis of polarization splitting prism；First speculum is used for will
First diffraction light of first sound-optic modulator is reflected into polarization splitting prism；It is set gradually on depolarization Amici prism reflection optical axis
There are second sound-optic modulator and the second speculum；Second speculum is used to the second diffraction light of second sound-optic modulator being reflected into
Polarization splitting prism；First diffraction light and the second diffraction light are all positive level-one or are all negative one grade；
First exit facet of the polarization splitting prism and the first right-angle surface of right-angle prism connect, polarization splitting prism
The direction of second exit facet is identical with the direction of the second right-angle surface of right-angle prism；Second exit facet of polarization splitting prism with it is straight
The exit direction of second right-angle surface of angle prism is disposed with quarter-wave plate, half wave plate and reflector；Two points
One of the quarter-wave plate side of wave plate be additionally provided with analyzer, the exit direction of analyzer is additionally provided with the first photodetector
With the second photodetector；First photodetector is for receiving from the second exit face of polarization splitting prism and across four
/ mono- wave plate and half wave plate are reflected through reflector using half wave plate and the light beam of analyzer again；Second light
Electric explorer for receive be emitted from the second right-angle surface of right-angle prism and pass through quarter-wave plate and half wave plate again
It is reflected through reflector using half wave plate and the light beam of analyzer；First photodetector and the second photodetector are equal
It is connect with phase difference sensitive detection parts, phase difference sensitive detection parts are connected with the computer for obtaining roll angle according to phase difference.
The laser polarization direction of the single-frequency frequency stabilized carbon dioxide laser outgoing is with the plane of incidence of depolarization Amici prism into 45 degree.
The first diaphragm is provided between the first sound-optic modulator and the first speculum, the first diaphragm is provided with for only
Allow first sound-optic modulator first-order diffraction light by structure.
The second diaphragm is provided between the second sound-optic modulator and the second speculum, the second diaphragm is provided with for only
Allow second sound-optic modulator first-order diffraction light by structure.
First radio frequency amount of the first sound-optic modulator is different from the second radio frequency amount of second sound-optic modulator, and first penetrates
Difference between frequency amount and the second radio frequency amount is in the range of the detection limit of detector.
The reflector be retroreflection prism or two orthogonal plane mirrors of reflecting surface, two reflectings surface
Plating is formed with deielectric-coating.
A kind of measuring method, which is characterized in that including：
1) light beam that single-frequency frequency stabilized carbon dioxide laser is sent out is divided into transmitted light and reflected light after depolarization Amici prism,
Transmitted light generates the first diffraction light by first sound-optic modulator, and the first diffraction light is reflected into polarization spectro rib through the first speculum
Mirror；Reflected light generates the second diffraction light by second sound-optic modulator, and the second diffraction light is reflected into polarization point through the second speculum
Light prism；First speculum and the second speculum cause the first diffraction light and the second diffraction light vertical phase in same level
It hands over；
The s components of the p-component of first diffraction light and the second diffraction light synthesize a branch of double frequency light conduct by polarization splitting prism
Measure light one；The s components of first diffraction light and the p-component of the second diffraction light by polarization splitting prism synthesize a branch of polarization direction and
The opposite double frequency light of light one is measured as light two is measured, and reflected by right-angle prism, the measurement light two after reflection is with measuring light one
Inceptive direction keeping parallelism；
2) it measures light one and measures light two through the half by being fixed on testee after quarter-wave plate
Wave plate, then, two light beams are returned by reflector reflected parallel, again by half wave plate；Beat frequency is formed by analyzer
After signal, corresponded to receive by the first photodetector and the second photodetector respectively；
3) the first photodetector and the signal of the second photodetector output are input to phase difference sensitive detection parts phase demodulation, will
For data transfer to computer, computer calculates two points according to the relational expression between the variable quantity and roll angle of two signal phase differences
One of wave plate institute fixed pan roll angle Δ α.
The survey calculation formula of the roll angle Δ α is：Wherein, Δ ψ is measures light one and measures light two
Phase difference variable quantity, KaFor the amplification factor of measuring system, Ka=8 (tan θ+cot θ), θ are quarter-wave plate fast axis direction
With the angle of p light components in measuring beam one.
Compared with prior art, the present invention has technique effect beneficial below：
The layout that measuring device of the present invention is total to light path reduces the interference of environmental factor, is utilized and only serves reference role
Reference beam is converted to two beams by depolarization Amici prism, polarization splitting prism and right-angle prism and measures light by reference beam,
And two measuring beams generate the opposite phase shift in direction, improve Measurement Resolution, while use two measuring beams measured
Optical path difference reduces, small by such environmental effects, improves measurement accuracy, makes measurement result accurate.
Further, the laser polarization direction that single-frequency frequency stabilized carbon dioxide laser of the invention is emitted enters with depolarization Amici prism
Face is penetrated into 45 degree, 45 degree of settings enable depolarization Amici prism that light beam is divided into two identical light beams of ingredient.
Further, the first diaphragm, the first light are provided between first sound-optic modulator of the invention and the first speculum
Door screen be provided with for only allow the first-order diffraction light of first sound-optic modulator by structure.Setting causes other series in this way
Diffraction light cannot pass through, and can block hot spot so that the measurement effect of light beam is more preferable.
Further, the second diaphragm, the second light are provided between second sound-optic modulator of the invention and the second speculum
Door screen be provided with for only allow the first-order diffraction light of second sound-optic modulator by structure.Setting causes other series in this way
Diffraction light cannot pass through, and can block hot spot so that the measurement effect of light beam is more preferable.
Further, the first radio frequency amount of first sound-optic modulator of the invention and the second radio frequency of second sound-optic modulator
Amount is different, and the difference between the first radio frequency amount and the second radio frequency amount is in the range of the detection limit of detector.Two radio frequency amounts are not
With that can generate double-frequency laser, the beat signal frequency of double-frequency laser stroke is difference frequency value.
Further, reflector of the invention is retroreflection prism or two orthogonal plane reflections of reflecting surface
Mirror, two reflectings surface plate and are formed with deielectric-coating.The better light beam of reflector is reflected.
Further, the invention also discloses a kind of measuring method, by measuring light one and measuring the phase measurement of light two,
And then roll angle is calculated, two measure light generates the opposite phase shift in direction by same roll angle, improves Measurement Resolution, in addition
It is identical with the light path for measuring light two to measure light one, and optical path difference is small, and high certainty of measurement, speed is fast, and setting is easy to adjust.
Description of the drawings
Fig. 1 is the structure diagram of measuring device of the present invention.
In figure：1 is single-frequency frequency stabilized carbon dioxide laser；2 be depolarization Amici prism；3a is first sound-optic modulator；3b is second
Acousto-optic modulator；4a is the first diaphragm；4b is the second diaphragm；The first speculums of 5a；5b is the second speculum；6 be polarization spectro
Prism；7 be right-angle prism；8 be quarter-wave plate；9 be half wave plate；10 be reflector；11 be analyzer；12a is
First photodetector；12b is the second photodetector；13 be phase difference sensitive detection parts；14 be computer.
Specific embodiment
The present invention is described in further detail below in conjunction with the accompanying drawings, and described is explanation of the invention rather than limit
It is fixed.
Referring to Fig. 1, a kind of light path laser heterodyne interferometry roll angle high precision measuring device altogether, which is characterized in that including
Single-frequency frequency stabilized carbon dioxide laser 1, the depolarization Amici prism 2 for being arranged on 1 emitting light path of single-frequency frequency stabilized carbon dioxide laser, polarization splitting prism 6
With right-angle prism 7；First sound-optic modulator 3a and the first speculum are disposed in the transmission optical axis of depolarization Amici prism 2
5a；First speculum 5a is used to the first diffraction light of first sound-optic modulator 3a being reflected into polarization splitting prism 6；Depolarization point
Second sound-optic modulator 3b and the second speculum 5b are disposed on 2 reflection optical axis of light prism；Second speculum 5b is used for will
The second diffraction light of second sound-optic modulator 3b is reflected into polarization splitting prism 6；First diffraction light and the second diffraction light are all just
Level-one is all negative one grade；
First exit facet of the polarization splitting prism 6 is connect with the first right-angle surface of right-angle prism 7, polarization splitting prism
The direction of 6 the second exit facet is identical with the direction of the second right-angle surface of right-angle prism 7；Second outgoing of polarization splitting prism 6
The exit direction of second right-angle surface of face and right-angle prism 7 is disposed with quarter-wave plate 8, half wave plate 9 and anti-
Emitter 10；8 side of quarter-wave plate of half wave plate 9 is additionally provided with analyzer 11, and the exit direction of analyzer 11 is also set
It is equipped with the first photodetector 12a and the second photodetector 12b；First photodetector 12a is used to receive from polarization spectro
Second exit face of prism 6 and across quarter-wave plate 8 and half wave plate 9 again through reflector 10 reflect using
The light beam of half wave plate 9 and analyzer 11；Second photodetector 12b is used to receive from the second right angle of right-angle prism 7
Face is emitted and passes through quarter-wave plate 8 and half wave plate 9 and reflected through reflector 10 using 9 He of half wave plate
The light beam of analyzer 11；First photodetector 12a and the second photodetector 12b are connect with phase difference sensitive detection parts 13,
Phase difference sensitive detection parts 13 are connected with the computer 14 for obtaining roll angle according to phase difference.
The laser polarization direction and the plane of incidence of depolarization Amici prism 2 that the single-frequency frequency stabilized carbon dioxide laser 1 is emitted are into 45 degree.
The first diaphragm 4a, the first diaphragm 4a setting is provided between the first sound-optic modulator 3a and the first speculum 5a
Be useful for only allowing the first-order diffraction light of first sound-optic modulator 3a by structure.
The second diaphragm 4b, the second diaphragm 4b setting is provided between the second sound-optic modulator 3b and the second speculum 5b
Be useful for only allowing the first-order diffraction light of second sound-optic modulator 3b by structure.
The first radio frequency amount of the first sound-optic modulator 3a is different from the second radio frequency amount of second sound-optic modulator 3b, the
Difference between one radio frequency amount and the second radio frequency amount is in the range of the detection limit of detector 12.
The reflector 10 is retroreflection prism or two orthogonal plane mirrors of reflecting surface, and two reflect
It plates and is formed with deielectric-coating in face.
A kind of measuring method, which is characterized in that including：
1) light beam that single-frequency frequency stabilized carbon dioxide laser 1 is sent out is divided into transmitted light and reflection after depolarization Amici prism 2
Light, transmitted light generate the first diffraction light by first sound-optic modulator 3a, and the first diffraction light is reflected into partially through the first speculum 5a
Shake Amici prism 6；Reflected light generates the second diffraction light by second sound-optic modulator 3b, and the second diffraction light is through the second speculum 5b
It is reflected into polarization splitting prism 6；First speculum 5a and the second speculum 5b causes the first diffraction light and the second diffraction light same
It intersects vertically on one horizontal plane；
The s components of the p-component of first diffraction light and the second diffraction light synthesize a branch of double frequency light conduct by polarization splitting prism 6
Measure light one；The s components of first diffraction light and the p-component of the second diffraction light synthesize a branch of polarization direction by polarization splitting prism 6
The double frequency light opposite with light one is measured is as light two is measured, and reflected by right-angle prism 7, and the measurement light two after reflection is with measuring light
One inceptive direction keeping parallelism；
2) it measures light one and measures light two through the half by being fixed on testee after quarter-wave plate 8
Wave plate 9, then, two light beams are returned by 10 reflected parallel of reflector, again by half wave plate 9；By 11 shape of analyzer
Into after beat signal, corresponded to receive by the first photodetector 12a and the second photodetector 12b respectively；
3) signal of the first photodetector 12a and the second photodetector 12b outputs is input to phase difference sensitive detection parts
13 phase demodulations, pass data to computer 14, and computer 14 is according to the pass between the variable quantity and roll angle of two signal phase differences
It is the roll angle Δ α that formula calculates 9 fixed pans of half wave plate.
The survey calculation formula of the roll angle Δ α is：Wherein, Δ ψ is measures light one and measures light two
Phase difference variable quantity, KaFor the amplification factor of measuring system, Ka=8 (tan θ+cot θ), θ are 8 fast axle side of quarter-wave plate
To the angle with measuring p light components in light one.
The derivation of the mathematic(al) representation of its phase difference variable quantity and roll angle is as follows：
As shown in Figure 1, set the electric vector for measuring light one and measuring light two that polarization splitting prism 6 and right-angle prism 7 are emitted
Respectively B1And B2, and respectively with B1In two direction vectors as x-axis, y-axis, coordinate system is established in the light direction of propagation for z-axis；Four
The F (fast axle) of/mono- wave plate 8 and x-axis angle are θ；The F axis of half wave plate 9 and x-axis angle are α；Analyzer 11 and x-axis
Angle be γ, then can be used Jones matrix represent measuring signal it is as follows：
Wherein, B1To measure the Jones matrix of light one, B2To measure the Jones matrix of light two, P is Jones's square of analyzer 11
Battle array；H represents the Jones matrix of half wave plate 9；Q is the Jones matrix of quarter-wave plate 8.They are respectively：
More than expression formula is substituted into formula (1), the AC compounent of two measuring signals can be obtained：
In formula (2) and (3), k1And k2It is directly proportional to the light intensity value of measuring signal；
So, the phase difference ψ of two signals is
ψ=2 [tan-1(tanθtan(4α+γ))+tan-1(cotθtan(4α+γ))] (4)
4 α+γ=n × 90 ° (n=0,1,2, ,) when, the relationship of phase difference ψ and roll angle α is approximately linear, definition
KaFor measuring system amplification factor, have in the range of linearity：
Ka=d ψ/d α=8 (tan θ+cot θ) (5)
I.e.：
Δ ψ=Ka·Δα (6)
The change of Δ α, that is, roll angle is caused by the rolling of sensing element half wave plate 9, is measured；Δ
ψ is the phase difference variable quantity for measuring light one and measuring light two.
Therefore, it is by the survey calculation formula of formula (6) roll angle Δ α：
When quarter-wave plate and x-axis angle theta=2 °, KaIt is 228.If at this point, phasometer resolution ratio be 0.01 °,
The detectable rolling angular resolution of this method is 0.13 ", sign is determined by system calibrating.
In Fig. 1, f after the first speculum 5a1Two arrows represent frequency be f1Light both direction distribution, second
Two arrows after speculum 5b represent that frequency is f2Light both direction distribution, measure light one in arrow represent, frequency f1
In x directional spredings, frequency f2In y directions.Measure light two in arrow similarly.
In conclusion measuring device of the present invention, is utilized the reference beam for only serving reference role, two beams are converted it into
Light is measured, and two measuring beams is made to generate the opposite phase shift in direction, makes measurement sensitive volume double.The invention device has high
Angular resolution, meanwhile, compared with existing roll angle measurement method, due to common light path layout, reduce the interference of environmental factor.Energy
Rolling angle measurement enough for precise guide rail kinematic pair, high-grade, digitally controlled machine tools etc. provides more accurate and reliable detection method and skill
Art.
The present invention is suitable for high-precision field of industrial measurement, is particularly suitable for precise guide rail kinematic pair and using it as base
The equipment of plinth is such as：The industry such as the rolling measurement of high-grade, digitally controlled machine tools, the promotion Machine Manufacture that extensive use can be larger
Development.
More than content is merely illustrative of the invention's technical idea, it is impossible to protection scope of the present invention is limited with this, it is every to press
According to technological thought proposed by the present invention, any change done on the basis of technical solution each falls within claims of the present invention
Protection domain within.
Claims (8)
1. a kind of light path laser heterodyne interferometry roll angle high precision measuring device altogether, which is characterized in that swash including single-frequency frequency stabilization
Light device (1), the depolarization Amici prism (2) for being arranged on single-frequency frequency stabilized carbon dioxide laser (1) emitting light path, polarization splitting prism (6) and
Right-angle prism (7)；First sound-optic modulator (3a) and first is disposed in the transmission optical axis of depolarization Amici prism (2) instead
Penetrate mirror (5a)；First speculum (5a) by the first diffraction light of first sound-optic modulator (3a) for being reflected into polarization splitting prism
(6)；Second sound-optic modulator (3b) and the second speculum (5b) are disposed on depolarization Amici prism (2) reflection optical axis；
Second speculum (5b) by the second diffraction light of second sound-optic modulator (3b) for being reflected into polarization splitting prism (6)；First
Diffraction light and the second diffraction light are all positive level-one or are all negative one grade；
First exit facet of the polarization splitting prism (6) is connect with the first right-angle surface of right-angle prism (7), polarization splitting prism
(6) direction of the second exit facet is identical with the direction of the second right-angle surface of right-angle prism (7)；The of polarization splitting prism (6)
Two exit facets and the exit direction of the second right-angle surface of right-angle prism (7) are disposed with quarter-wave plate (8), half
Wave plate (9) and reflector (10)；Quarter-wave plate (8) side of half wave plate (9) is additionally provided with analyzer (11), analyzing
The exit direction of device (11) is additionally provided with the first photodetector (12a) and the second photodetector (12b)；First photodetection
Device (12a) for receive from the second exit face of polarization splitting prism (6) and across quarter-wave plate (8) and two/
One wave plate (9) but through reflector (10) reflect using half wave plate (9) and the light beam of analyzer (11)；Second photoelectricity is visited
Device (12b) is surveyed to be emitted from the second right-angle surface of right-angle prism (7) for reception and pass through quarter-wave plate (8) and half
Wave plate (9) but through reflector (10) reflect using half wave plate (9) and the light beam of analyzer (11)；First photodetection
Device (12a) and the second photodetector (12b) are connect with phase difference sensitive detection parts (13), phase difference sensitive detection parts (13) connection
It is useful for obtaining the computer (14) of roll angle according to phase difference.
2. light path laser heterodyne interferometry roll angle high precision measuring device altogether according to claim 1, which is characterized in that
The laser polarization direction of single-frequency frequency stabilized carbon dioxide laser (1) outgoing is with the plane of incidence of depolarization Amici prism (2) into 45 degree.
3. light path laser heterodyne interferometry roll angle high precision measuring device altogether according to claim 1, which is characterized in that
The first diaphragm (4a), the first diaphragm (4a) setting are provided between the first sound-optic modulator (3a) and the first speculum (5a)
Be useful for only allow first sound-optic modulator (3a) first-order diffraction light by structure.
4. light path laser heterodyne interferometry roll angle high precision measuring device altogether according to claim 1, which is characterized in that
The second diaphragm (4b), the second diaphragm (4b) setting are provided between the second sound-optic modulator (3b) and the second speculum (5b)
Be useful for only allow second sound-optic modulator (3b) first-order diffraction light by structure.
5. light path laser heterodyne interferometry roll angle high precision measuring device altogether according to claim 1, which is characterized in that
First radio frequency amount of the first sound-optic modulator (3a) is different from the second radio frequency amount of second sound-optic modulator (3b), and first penetrates
Difference between frequency amount and the second radio frequency amount is in the range of the detection limit of detector (12).
6. light path laser heterodyne interferometry roll angle high precision measuring device altogether according to claim 1, which is characterized in that
The reflector (10) is plated for retroreflection prism or two orthogonal plane mirrors of reflecting surface, two reflectings surface
It is formed with deielectric-coating.
7. a kind of common light path type laser heterodyne interferometry roll angle high-acruracy survey according to claim 1-6 any one
The measuring method of device, which is characterized in that including：
1) light beam that single-frequency frequency stabilized carbon dioxide laser (1) is sent out is divided into transmitted light and reflection after depolarization Amici prism (2)
Light, transmitted light generate the first diffraction light by first sound-optic modulator (3a) and are reflected into polarization spectro rib through the first speculum (5a)
Mirror (6)；Reflected light generates the second diffraction light by second sound-optic modulator (3b) and is reflected into polarization point through the second speculum (5b)
Light prism (6)；First speculum (5a) and the second speculum (5b) cause the first diffraction light and the second diffraction light in same level
It intersects vertically on face；
The s components of the p-component of first diffraction light and the second diffraction light synthesize a branch of double frequency light as survey by polarization splitting prism (6)
Measure light one；The s components of first diffraction light and the p-component of the second diffraction light synthesize a branch of polarization direction by polarization splitting prism (6)
With the double frequency light opposite with measuring light one as light two is measured, and reflected by right-angle prism (7), the measurement light two after reflection is with surveying
Measure one inceptive direction keeping parallelism of light；
2) it measures light one and measures light two through the half wave by being fixed on testee after quarter-wave plate (8)
Piece (9), then, two light beams are returned by reflector (10) reflected parallel, again by half wave plate (9)；By analyzer
(11) after forming beat signal, respectively by the first photodetector (12a) and the corresponding reception of the second photodetector (12b)；
3) the first photodetector (12a) and the signal of the second photodetector (12b) output are input to phase difference sensitive detection parts
(13) phase demodulation, passes data to computer (14), computer (14) according to the variable quantity and roll angle of two signal phase differences it
Between relational expression calculate the roll angle Δ α of half wave plate (9) institute fixed object.
8. measuring method according to claim 7, which is characterized in that the survey calculation formula of the roll angle Δ α is：Wherein, Δ ψ is to measure light one and measure the phase difference variable quantity of light two, KaFor the amplification factor of measuring system,
Ka=8 (tan θ+cot θ), θ are angle of quarter-wave plate (8) fast axis direction with measuring p light components in light one.
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