CN110514147A - A kind of two-frequency laser interferometer that can measure roll angle and straightness simultaneously - Google Patents
A kind of two-frequency laser interferometer that can measure roll angle and straightness simultaneously Download PDFInfo
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- CN110514147A CN110514147A CN201910728477.4A CN201910728477A CN110514147A CN 110514147 A CN110514147 A CN 110514147A CN 201910728477 A CN201910728477 A CN 201910728477A CN 110514147 A CN110514147 A CN 110514147A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
- G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
- G01B11/272—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
Abstract
The present invention discloses a kind of two-frequency laser interferometer that can measure roll angle and straightness simultaneously, including double-frequency laser head and neutral spectroscope, the first polarizing beamsplitter is set gradually on the first optical path that neutral spectroscope transmission or reflection is formed, second polarizing beamsplitter and reference mirror, it reflects or transmits on the second optical path formed in neutral spectroscope and set gradually plane mirror and the first polarizing beamsplitter, second polarizing beamsplitter and reference mirror, second polarizing beamsplitter, first polarizing beamsplitter and the first polarization polarization photelectric receiver of photelectric receiver/second are also sequentially located at the first optical path/second optical path from after reference mirror reflection in the optical path of return light.The present invention can be completed at the same time the measurement of roll angle and straightness, not only optical element number is reduced, and adjust process workload halve, and can eliminate due to first measurement light and second measurement light it is not parallel caused by rolling angle error, greatly promote measurement accuracy.
Description
Technical field
The invention belongs to accurate laser measurement technical field, in particular to a kind of application laser measures roll angle and straight simultaneously
The two-frequency laser interferometer of dimension.
Background technique
Rolling angle measurement and straight line degree measurement are all Metrology Projects most basic in geometry metrology field, motion guide rail,
The precision verification of the equipment such as coordinate measuring machine, lathe and error compensation etc. have a wide range of applications.
In terms of straight line degree measurement, Tsinghua University Yin Chun proposes a kind of side using two-frequency laser measurement straightness forever etc.
Method.The realization device of this method is as shown in Figure 1, comprising: two-frequency laser light source 101, spectroscope 102, the first and second Wollaston
Prism 105,106 and right-angle prism 107, the reflected light path and wollaston prism 105 for being separately positioned on the spectroscope 102 return
The first analyzer 103 and the first photelectric receiver 104, the second analyzer 108 and the second photelectric receiver 109 in optical path, with
And the signal being made of signal amplification circuit, phasometer 110 and computer 111 being connected with two photelectric receivers 104,109
Processing unit.
Wherein, the two-frequency laser light source 101 is directly emitted two frequency differences, mutually orthogonal linearly polarized light；
Two wollaston prisms 105,106, splitting angle is identical；The two-frequency laser light source 101, spectroscope
102, the first, second analyzer 103 and 108, the first, second photelectric receiver 104 and 109 are all mounted on a pedestal, structure
At laser head.
The course of work of above-mentioned apparatus are as follows: the crossed polarized light that two-frequency laser light source 101 is emitted first passes through spectroscope
102, incident light is divided into two bundles, a branch of to be used as reference light, another Shu Zuowei measures light.Reference light passes through the first analyzer 103
It is synthesized, ac signal-reference signal is converted by the reception of the first photelectric receiver 104.It is wet that measurement light first passes through first
After the prism 105 of Lars, a low-angle is separated, then by becoming two beam directional lights, through straight after the second wollaston prism 106
After angle prism 107 reflects, then the second wollaston prism 106 and the first wollaston prism 105 are passed sequentially through, and become a branch of
Light is synthesized by the second analyzer 108, is converted into ac signal-measurement by the reception of the second photelectric receiver 109 and is believed
Number.First wollaston prism 105 or the second wollaston prism 106 can make measuring signal phase perpendicular to the mobile of optical path direction
It changes for the phase between reference signal, reference signal and measuring signal is subjected to phase bit comparison with phasometer 110, will be tied
Fruit is sent to computer 111 and carries out data processing, so that it may obtain the first wollaston prism 105 or the second wollaston prism 106
Amount of movement.
If the second wollaston prism 106 and right-angle prism 107 are put in guide rail one end, laser head is put in the other end, adjusts
Whole optical path is allowed to be parallel to guide rail, moves the first wollaston prism 106 along guide rail, can measure guide rail horizontally or vertically
Straightness deviation on direction.
In terms of rolling angle measurement, existing measurement method, which has, to be measured using electrolevel and is surveyed using laser interferometer
Amount.Rolling angle measurement is carried out using electrolevel, is to be placed in electrolevel on tested platform, when platform is on the move
Roll angle when changing, the relative angle of the horizontal plane of the datum level and earth of electrolevel itself changes therewith, electricity
Sub- level meter measures the angle value of this variation, as platform roll angle variation on the move.The shortcomings that this measurement method
There are two, first is that can only measure in the horizontal plane, when platform is moved along plummet direction, be not available electrolevel into
Row measurement；Second is that measuring speed is slow, can only platform remain static it is lower can just measure, cannot be in platform moving process
Middle carry out real-time measurement.The existing roll angle measurement method using laser interferometer have precision it is high, can real-time measurement etc. it is excellent
Point, but generally have the shortcomings that optical element quantity is more, structure is complicated, sensitive to the temperature drift of optical device.
If two sets of linearity measurers said before are used side by side, straightness and rolling can be measured simultaneously
Angle.The realization device of this method is as shown in Figure 2, comprising: double-frequency laser head 201, neutral Amici prism 202, reflecting mirror 211, if
Set the first wollaston prism 203, the second wollaston prism 204, first in the transmitted light path of neutral Amici prism 202
Right-angle prism 205 and the first polarization photelectric receiver 206, are arranged in the third Wollaston in the reflected light path of reflecting mirror 211
Prism 209, the 4th wollaston prism 209, the second right-angle prism 207 and the second polarization photelectric receiver 210 and phasometer
212 and computer 213 constitute signal processing unit.
Wherein double-frequency laser head 201 is construed as two-frequency laser light source 101 in Fig. 1, spectroscope 102, the first analyzing
Made of device 103 and the first photelectric receiver 104 merge.First polarization photelectric receiver 206 and the second polarization photelectric receiver
210, it is the photelectric receiver and signal amplification circuit of built-in analyzer, that is to say, that be equivalent to analyzer, opto-electronic receiver
The merging of device and signal amplification circuit.
The course of work of Fig. 2 described device are as follows: inside double-frequency laser head 201, projected just from two-frequency laser light source
It hands over polarised light to first pass through spectroscope, incident light is divided into two bundles, it is a branch of to be used as reference light, it is synthesized by analyzer, by light
Electric receiver reception is converted into ac signal-reference signal, and another Shu Zuowei measures light, projects from double-frequency laser head 201.
Measurement light first passes through neutral Amici prism 202 and is divided, and transmitted light is as the first measurement light, and reflected light is after the reflection of reflecting mirror 211
As the second measurement light.First measurement light and the second measurement light pass through two sets of identical straightness interference devices respectively,
Working principle is as mentioned before.Wherein the second wollaston prism 204, the 4th wollaston prism 206, the first right-angle prism
205 and second right-angle prism 207 be put in guide rail one end, double-frequency laser head 201 is put in the other end, and adjustment optical path makes neutral light splitting rib
The transmitted light of mirror 202 and the reflected light of reflecting mirror 211 are respectively parallel to guide rail, the first wollaston prism 203 and the wet drawing of third
This prism 209 is fixed on a mobile station jointly, is moved along guide rail.
First measurement light and the second measurement light are after the return of respective optical path, respectively by the first polarization photelectric receiver 206
It is received with the second polarization photelectric receiver 210, is respectively converted into the first measuring signal and the second measuring signal.First Wollaston
Prism 203 and third wollaston prism 209 can be such that the first measuring signal and second surveys respectively perpendicular to the mobile of optical path direction
Amount signal changes relative to the phase of reference signal, and reference signal and two measuring signals are carried out phase with phasometer 212
Result is sent to computer 213 and carries out data processing, so that it may obtain the first wollaston prism and third Wollaston by bit comparison
The amount of movement of prism, its calculation formula is:
In formula: S1, S2: first straight line degree deviation and second straight line degree deviation
λ: optical maser wavelength
θ: the angle between two emergent lights of wollaston prism
C1, C2: the first cumulative number and the second cumulative number of phasometer counter
The roll angle of the straightness and mobile station of guide rail in moving process can be measured from the two numerical value, is calculated
Formula are as follows:
In formula: S: the straightness deviation of guide rail
α: the roll angle of mobile station
Interval between D: the first right-angle prism and the second right-angle prism
The shortcomings that this measurement method, is, if the direction of two right-angle prisms 205,207 is not adjusted to complete phase
It is mutually parallel, it will result in a very big rolling angle measurement error.Error analysis as shown in Figure 3, point 1 are the first Wollaston rib
The homeposition of mirror 203, straight line 3 are its moving direction, and straight line 5 is the normal direction of the first right-angle prism 205, between two straight lines
Angle 7 be denoted asPoint 2 is the homeposition of third wollaston prism 209, and straight line 4 is its moving direction, and straight line 6 is the
The normal direction of two right-angle prisms 207, the angle 8 between two straight lines areIf moving distance is L, without loss of generality, Bu Fangshe
The roll angle 9 occurred in moving process is α=0, and the first straight line degree deviation measured at this time and second straight line degree deviation are respectively as follows:
Substitute into the formula of front, the roll angle 9 measured at this time are as follows:
It is based on front it is assumed that practical roll angle is zero, so the value of α ' inherently rolling angle error.From this formula
In it can be concluded that two conclusions, first is that ifMinus sign front and back two is equal in magnitude in formula, then α '=0, that is, surveys
Measuring error is zero, and in other words, as long as two measurement light are parallel to each other, the angle non-zero of they and guide rail can't cause rolling
Angle error；Second is that ifα ' ≠ 0 then measured will have systematic error.
The size of this error is estimated below: being considered a common measurement parameter, might as well be assumed D=50mm, L=
1000mm considers that measurement light and the needs of guide rail direction manually adjust, and error is about 20 rads, i.e. 0.1mrad or so, in
It is to haveSubstituting into above formula can obtain, and α=0.23 °, i.e. error are 0.23 °.The survey of roll angle
Accuracy of measurement should generally reach a rad magnitude, and error big in this way is unacceptable in actual measurement.Generate this error
The reason of be: in straight line degree measurement, the normal direction of right-angle prism constitutes reference line, and straightness is exactly Wollaston
Change in location of the central point of prism relative to this straight line；Outer corner measurement is carried out with two sets of linearity measurers, two flat
The plane that row normal is constituted constitutes the datum plane of roll angle, and roll angle is exactly the line of centres of two wollaston prisms
Angle change relative to this plane；If the reference line of two straightness is parallel, even if they get along well, guide rail is parallel,
It will not cause rolling angle error；If the reference line of two straightness is not parallel, the plane that the two is constituted is deflection, is
System error is given birth to therefrom.
In addition, measuring according to the method is, it is necessary to two optical paths be respectively adjusted to, entire dress parallel with guide rail
Set that volume is big, optical element is more, the adjustment of at high cost, optical path is complicated.
Summary of the invention
The purpose of the present invention is the shortcoming to overcome prior art, propose that one kind can measure roll angle and straight line simultaneously
The two-frequency laser interferometer of degree, the optical device of two kinds of optical paths is integrated by specific structure, not only optics
Number of parts is reduced, and the workload for adjusting process halves, it is even more important that by allowing two-way straightness to share a base
Line of collimation, can eliminate due to first measurement light and second measurement light it is not parallel caused by rolling angle error, make measurement accuracy
It greatly promotes.
Technical scheme is as follows:
A kind of two-frequency laser interferometer that can measure roll angle and straightness simultaneously, including double-frequency laser head, neutral light splitting
Mirror, the first polarization photelectric receiver, the second polarization photelectric receiver and signal processing unit, the ginseng that the double-frequency laser hair goes out
The signal for examining optical path is received to form reference signal by signal processing unit, is arranged on the optical path that the double-frequency laser hair goes out
The neutrality spectroscope is respectively formed two optical paths after the neutrality spectroscope transmission and reflection, which is characterized in that described
The first polarizing beamsplitter, the second polarized beam splitting are disposed on the first optical path that neutral spectroscope transmission or reflection is formed
Mirror and reference mirror, second polarizing beamsplitter, the first polarizing beamsplitter and the first polarization photelectric receiver also successively position
After the first optical path is reflected from reference mirror in the optical path of return light, return light and edge after the reference mirror reflection
The incident light of the characteristic direction incidence of reference mirror is contrary, is parallel to each other and is spaced a distance, at described neutral point
Be disposed on the second optical path that light microscopic reflection or transmission are formed plane mirror and first polarizing beamsplitter,
Second polarizing beamsplitter and reference mirror, second polarizing beamsplitter, the first polarizing beamsplitter and the second polarization photoelectricity connect
It receives device and is also sequentially located at the second optical path from the optical path of return light, the first polarization photoelectricity is connect after reference mirror reflection
It receives device and the second polarization photelectric receiver is all connected with signal processing unit.
Further, the two-frequency laser interferometer further includes the first total reflection mirror and the second total reflection mirror, the neutrality
The first polarisation point is first sequentially entered again through first total reflection mirror on the first optical path that spectroscope transmission or reflection is formed
Shu Jing, the second polarizing beamsplitter and reference mirror, and first total reflection mirror is additionally arranged at the first optical path from base
Between the first polarizing beamsplitter and the first polarization photelectric receiver after the reflection of quasi-reflection mirror in the optical path of return light；The neutrality
On the second optical path that spectroscope reflection or transmission are formed after plane mirror first through second total reflection mirror again successively
Into the first polarizing beamsplitter, the second polarizing beamsplitter and reference mirror, and second total reflection mirror is additionally arranged at
Two optical paths polarize opto-electronic receiver from the first polarizing beamsplitter and second after reference mirror reflection in the optical path of return light
Between device.
Further, the reflecting surface of the spectroscopical light splitting surface of neutrality and the plane mirror is parallel to each other.
Further, the reference mirror is translatable mirror or separation reflecting mirror, and the translatable mirror is in phase
The plane mirror structure that optical path drift adaptation function is mutually all had in vertical both direction, when incident light is along translatable mirror
When characteristic direction incidence, constant distance between return light and incident light after translatable mirror reflection, the distance is not with incident light
It translates and changes；The reference mirror is separation reflecting mirror, and the separation reflecting mirror is to roll over a reflecting surface and two
It penetrates face and incident light and reflected light is separated from each other the device of a certain distance, when incident light enters along the characteristic direction of separation reflecting mirror
When penetrating, constant distance, the distance do not translate with incident light and are changed between return light and incident light after separation reflecting mirror reflection.
Further, when the reference mirror is translatable mirror, the translatable mirror includes three reflectings surface, institute
State three reflectings surface normal is coplanar in space and the normal compound direction of three reflectings surface is parallel with incident light.
Further, the translatable mirror includes three other plane mirrors；Or the translatable mirror includes
One other plane mirror and a pentagonal prism.
Further, each total reflection mirror uses prism of corner cube, retroreflector or cat's -eye reflector.
Further, the structure and parameter of second polarizing beamsplitter is identical with the first polarizing beamsplitter.
Further, each polarizing beamsplitter uses wollaston prism or Rochon prism.
Further, the signal processing unit includes phasometer and computer, the first polarization photelectric receiver and
Second polarization photelectric receiver is connected by phasometer with computer, and the phasometer simultaneously measures the two-way of two optical paths
Signal carries out phase bit comparison with reference signal.
Technical effect of the invention is as follows:
The two-frequency laser interferometer of the present invention that roll angle and straightness can be measured simultaneously, what double-frequency laser hair went out
By being respectively formed two optical paths after neutral spectroscope transmission and reflection on optical path, in a wherein optical path first
One plane mirror is set, so that it is parallel with another optical path after optical path turnover, the first polarizing beamsplitter,
Second polarizing beamsplitter is arranged on the two parallel optical paths simultaneously with reference mirror, that is to say, that two optical paths
The first measurement light and the second measurement light commonly through first polarizing beamsplitter, the second polarizing beamsplitter and reference mirror,
It is then respectively enterd from return light after reference mirror reflection again commonly through the second polarizing beamsplitter and the first polarizing beamsplitter
Two polarization photelectric receivers.Two-frequency laser interferometer of the invention, by the way that common neutral spectroscope is arranged on optical path
And plane mirror, a branch of incident light is divided into two beams emergent light parallel to each other, it can be understood as be wherein light beam conduct
First emergent light, another the second emergent light of Shu Zuowei；Two beam emergent lights pass through the first polarizing beamsplitter and the second polarisation point jointly
Shu Jinghou still keeping parallelism, return light after being reflected respectively by reference mirror is contrary with incident light, is parallel to each other, phase
It is mutually spaced a distance, then passes sequentially through the second polarizing beamsplitter and the first polarizing beamsplitter is respectively synthesized light beam again, formed
First measurement light and the second measurement light respectively enter the first polarization photelectric receiver and the second polarization photelectric receiver with shape respectively
At the first measuring signal and the second measuring signal, by signal processing unit to two measuring signals and a reference signal received into
Row signal processing.The two-frequency laser interferometer is by the first polarizing beamsplitter/second polarizing beamsplitter perpendicular to optical path direction
Movement obtain straightness in this direction, and by the first polarizing beamsplitter/second polarizing beamsplitter relative to optical path side
To rolling obtain roll angle.First polarizing beamsplitter/second polarizing beamsplitter is moved along guide rail, can be measured simultaneously straight
Dimension and roll angle.Angle between reference mirror normal and tested guide rail straight line will not cause the measurement error of roll angle.
The present invention two-frequency laser interferometer can be completed at the same time the measurement of roll angle and straightness, measure two kinds specific structure is passed through
The optical device of optical path integrates, not only optical element number reduce, substantially reduce equipment volume, reduce equipment at
This, and the workload for adjusting process halves, and simplifies adjustment process, reduces regulating time, improves testing efficiency；More
Importantly, reference mirror is as measuring basis in measurement process by allowing two-way straightness to share a reference line
It remains stationary, can eliminate due to the first measurement light and the second not parallel caused rolling angle error of measurement light, raising
The stability of measurement result, reduces measurement error, ensure that measurement accuracy.
Detailed description of the invention
Fig. 1 is existing double-frequency laser linearity measurer structural schematic diagram.
Fig. 2 is the structural schematic diagram that existing double-frequency laser linearity measurer realizes rolling angle measurement.
Fig. 3 is the error analysis figure that Fig. 2 shown device realizes rolling angle measurement.
Fig. 4 is a kind of preferred structure signal for the two-frequency laser interferometer that the present invention can measure roll angle and straightness simultaneously
Figure.
Fig. 5 is the roll angle and straight line degree measurement light path principle schematic diagram according to Fig. 4 two-frequency laser interferometer.
Fig. 6 is that another preferred structure for the two-frequency laser interferometer that the present invention can measure roll angle and straightness simultaneously shows
It is intended to.
Fig. 7 a, 7b, 7c, 7d and 7e are the preferred structure schematic diagram of reference mirror of the invention.
Specific embodiment
The present invention will be described with reference to the accompanying drawing.
Fig. 4 is a kind of preferred structure signal for the two-frequency laser interferometer that the present invention can measure roll angle and straightness simultaneously
Figure, including double-frequency laser head 401, first polarize photelectric receiver 402, second and polarize photelectric receiver 403, neutral spectroscope
404, plane mirror 405, the first polarizing beamsplitter 406, the second polarizing beamsplitter 407, reference mirror 408 and signal processing
Unit, the signal processing unit of the embodiment include phasometer 409 and computer 410 interconnected.Double-frequency laser head 401 is sent out
The signal of reference path out forms reference signal by the reception of phasometer 409 of signal processing unit, and double-frequency laser head 401 issues
Optical path optical path axis on neutral spectroscope 404 is set, be respectively formed two surveys after the neutral transmission of spectroscope 404 and reflection
Optical path is measured, is set gradually on the first optical path that neutral 404 transmission or reflection of spectroscope (embodiment is reflection) is formed
First polarizing beamsplitter 406, the second polarizing beamsplitter 407 and reference mirror 408, the second polarizing beamsplitter 407, the first polarisation
Beam splitter 406 and the first polarization photelectric receiver 402 are also sequentially located at the first optical path and return after the reflection of reference mirror 408
In the optical path of light echo, the incident light of return light and the characteristic direction incidence along reference mirror 408 after reference mirror 408 reflects
It is contrary, be parallel to each other and be spaced a distance, reflect or transmit (embodiment be transmission) in neutral spectroscope 404 and formed
The second optical path on set gradually plane mirror 405, the first polarizing beamsplitter 406, the second polarizing beamsplitter 407 and base
Quasi-reflection mirror 408, the second polarizing beamsplitter 407, the first polarizing beamsplitter 406 and the second polarization photelectric receiver 403 are also successively
Positioned at the second optical path from after the reflection of reference mirror 408 in the optical path of return light, the first polarization photelectric receiver 402 and the
Two polarization photelectric receivers 403 are all connected with phasometer 409.
Wherein, double-frequency laser head 401 is directly emitted the mutually orthogonal linearly polarized light in two frequency differences, polarization directions, this
The optical frequency of two polarized components is stablized, which provides a reference signal, the frequency etc. of the signal simultaneously
In the difference of the light frequency of two polarized components.The structure and parameter of first polarizing beamsplitter 406 and the second polarizing beamsplitter 407
Structure and parameter is identical, the two polarizing beamsplitters can be wollaston prism, is also possible to the polarisation of other configurations
Two orthogonal linearly polarized lights in incident light are emitted to different directions by beam splitter, such as Rochon prism respectively.Two partially
The structure of vibration photelectric receiver 402 and 403 is identical, can pass through analyzer and photelectric receiver is realized, received light beam passes through
Enter photelectric receiver after analyzer.It can be by 401, two polarization photelectric receivers 402 and 403 of double-frequency laser head, neutral light splitting
Mirror 404 and plane mirror 405 are all mounted on a pedestal, constitute integrated laser head.Second polarizing beamsplitter 407 and benchmark
Reflecting mirror 408 is mounted on another pedestal, constitutes perflectometer.First polarizing beamsplitter 406 is mounted on a pedestal, is constituted
Measuring head.
The specific work process of apparatus of the present invention shown in Fig. 4 are as follows: two frequencies that double-frequency laser head 401 issues are different
Orhtogonal linear polarizaiton light, and the reference signal that a frequency is equal to the difference of the two frequency is provided.Neutral spectroscope 404 is incident light point
It include two orthogonal linear polarization components in this two-beam to reflect and transmiting two beams, wherein light beam is as the first outgoing
Light.Plane mirror 405 reflects other light beam, forms second emergent light parallel with the first emergent light, two beam emergent lights
Between be separated a distance.First emergent light and the second emergent light pass sequentially through the first polarizing beamsplitter 406 and the second polarisation point
Beam mirror 407 respectively becomes two beam directional lights, contrary with incident light, be parallel to each other, phase after the reflection of reference mirror 408
It is mutually spaced a distance, then passes sequentially through the second polarizing beamsplitter 407 and the first polarizing beamsplitter 406, and respectively become a branch of
Light respectively becomes the first measurement light and the second measurement light, is connect respectively by the first polarization photelectric receiver 402 and the second polarization photoelectricity
It receives device 403 to receive, is converted into ac signal respectively, form the first measuring signal and the second measuring signal.
First polarizing beamsplitter 406 can make the first measuring signal and the second measuring signal phase by the rolling of axis of optical path direction
Phase between reference signal occurs opposite variation, in addition to this, shifting of the polarizing beamsplitter on other two direction
Dynamic and angle offset will not all cause this phase change.With phasometer 409 by reference signal respectively with the first measuring signal,
Two measuring signals carry out phase bit comparison, and result is sent to computer 410 and carries out data processing, so that it may obtain the first polarizing beamsplitter
406 rolling amount, i.e. the rolling angular data of measuring head.
First polarizing beamsplitter 406 is parallel to light splitting plane, the first measurement can be made to believe perpendicular to mobile on optical path direction
Number and the second measuring signal relative to the phase between reference signal identical variation occurs, in addition to this, which exists
Movement and angle offset on other two direction will not all cause this phase change.Reference signal is divided with phasometer 409
Not and the first measuring signal, the second measuring signal carry out phase bit comparison, and result is sent to computer 410 and carries out data processing, just
The amount of movement of available first polarizing beamsplitter 406, i.e. the straightness data of measuring head.
If integrated laser head to be put in one end of guide rail (not shown), adjustment emitting light path is allowed to be parallel to guide rail,
Perflectometer is put in the other end of guide rail, and adjusts reflected light path and is allowed to be parallel to guide rail, moves measuring head along guide rail
The straightness deviation on the roll angle of guide rail direction and the horizontal or vertical direction of guide rail is measured simultaneously.
The specific calculating process of phase difference is described below with reference to Fig. 5.
Fig. 5 is the roll angle and straight line degree measurement light path principle schematic diagram according to Fig. 4 device, including the first polarizing beamsplitter
501, the second polarizing beamsplitter 502 and reference mirror 503, top half optical path is unfolded in y-z plane in figure, lower half portion
Optical path is unfolded in x-z-plane.
Incident beam is two light beams being parallel to each other, i.e. the from neutral spectroscope 404 and plane mirror 405
One emergent light and the second emergent light constitute two identical straight line degree measurement optical paths, respectively first straight line degree optical path (1)
With second straight line degree optical path (2), between two optical paths between be divided into distance (3).First straight line degree optical path (1) enters
Comprising the different orhtogonal linear polarizaiton component of two frequencies, respectively light beam (4) and light beam (5) in irradiating light beam, respectively with line segment with
Circle mark, the two pass sequentially through the first polarizing beamsplitter 501 and the second polarizing beamsplitter 502, and two polarized components are parallel
Ground separates, and is then reflected by reference mirror 503, contrary with incident light, be parallel to each other, be spaced apart from each other a distance, then
The second polarizing beamsplitter 502 and the first polarizing beamsplitter 501 are passed sequentially through, two polarized components are converged again, form first and survey
Light beam is measured, ac signal is converted by the first polarization photelectric receiver 402, forms the first measuring signal.Second straight line degree is surveyed
Measure optical path (2) it is identical with first straight line degree optical path (1), different orthogonal of two frequencies is separately included in incident beam
Linear polarization component, two polarized components pass sequentially through the first polarizing beamsplitter 501 and the second polarizing beamsplitter 502, two polarizations
Component is separated in parallel, is then reflected by reference mirror 503, contrary with incident light, be parallel to each other, be spaced apart from each other one
Section distance, then the second polarizing beamsplitter 502 and the first polarizing beamsplitter 501 are passed sequentially through, two polarized components are converged again, shape
At the second measuring beam, ac signal is converted by the second polarization photelectric receiver 403, forms the second measuring signal.
When the measuring head edge being made of the first polarizing beamsplitter 501 is parallel to beam splitting plane, perpendicular to the shifting of optical path direction
When momentum is X, i.e., straightness deviation is X；When the measuring head being made of the first polarizing beamsplitter 501 is using optical path direction as axis
When rotational angle is R, i.e., roll angle is R.Calculating process is as follows:
In the plane where first straight line degree interferometry optical path, when the second polarizing beamsplitter 502 and reference mirror
503 motionless, the first polarizing beamsplitters 501 are X perpendicular to the amount of movement of optical path direction1When, light beam (4) passes through the polarisation point every time
Shu Jing, the light path as extraordinary ray increase neX1Tan β, the light path reduction n as ordinary lightoX1Tan β adds up to (ne-no)
X1Tan β, because light beam (4) passes through first polarizing beamsplitter 501 twice, total optical path variable quantity is 2 (ne-no)
X1tanβ.The path of light beam (5) and light beam (4) is identical, polarization direction and light beam (4) vertically, change in optical path length and light beam (4) are big
Small equal, symbol is on the contrary, then its total optical path variable quantity are as follows: -2 (ne-no)X1tanβ.It can thus be concluded that total light between two-beam
The difference of journey variable quantity are as follows:
Δ1=4 (ne-no)X1tanβ
In formula: X1: first straight line degree deviation
β: the apex angle of polarizing beamsplitter
ne、no: the refractive index of extraordinary ray and ordinary light
Equally, in the plane where second straight line degree interferometry optical path, when the second polarizing beamsplitter 502 and benchmark are anti-
Penetrate that mirror 503 is motionless, the first polarizing beamsplitter 501 perpendicular to the amount of movement of optical path direction is X2When, between two polarized components
The difference Δ of total optical path variable quantity2Are as follows:
Δ2=4 (ne-no)X2tanβ
In formula: X2: second straight line degree deviation
The phase change of two measuring signals and the difference of respective total optical path variable quantity are directly proportional, are respectively as follows:
In formula: X1、X2: first straight line degree deviation, second straight line degree deviation
λ: optical maser wavelength
β: the apex angle of polarizing beamsplitter
ne、no: the refractive index of extraordinary ray and ordinary light
C1、C2: the phasometer measured value of the first measuring signal, the second measuring signal
Reference signal is subjected to phase bit comparison with the first measuring signal, the second measuring signal respectively with phasometer 409, it can be with
Obtain C1And C2。
When the second polarizing beamsplitter 502 and reference mirror 503 is motionless, center of the first polarizing beamsplitter 501 is along the party
To amount of movement be X and when roll angle is R, have following relationship:
By C1And C2The calculating of the two formula is substituted into, the calculation formula of straightness deviation and roll angle can be obtained are as follows:
In formula: X: straightness deviation
R: roll angle
D: the interval of first straight line degree optical path and second straight line degree optical path
λ: optical maser wavelength
β: the apex angle of polarizing beamsplitter
ne、no: the refractive index of extraordinary ray and ordinary light
C1、C2: the first measuring signal, the phasometer count value of the second measuring signal
Fig. 6 is that another preferred structure of the two-frequency laser interferometer that can measure roll angle and straightness simultaneously of the invention shows
It is intended to, including double-frequency laser head 601, the neutral light splitting that is arranged on the optical path axis of the 601 light source transmitting terminal of double-frequency laser head
Mirror 602, be arranged in the neutrality spectroscope 602 reflection direction the first total reflection mirror 605, setting it is spectroscopical in the neutrality
The second total reflection mirror 604 for penetrating the plane mirror 603 in direction, the reflection direction that the plane mirror 603 is arranged in, successively sets
Set the first polarizing beamsplitter on the reflected light path (first reflection) of the first total reflection mirror 605 and the second total reflection mirror 604
606, the second polarizing beamsplitter 607 and reference mirror 608, the reflected light path of the first total reflection mirror 605 is arranged in, and (second anti-
Penetrate) on the first polarization photelectric receiver 610 and be arranged on the reflected light path (the second secondary reflection) of the second total reflection mirror 604
Second polarization photelectric receiver 609, the phasometer 611 and computer being connected with two-frequency laser and two photelectric receivers
612.Compared with the structure of the two-frequency laser interferometer of embodiment structure shown in Fig. 4,605 He of the first total reflection mirror is additionally used
Second total reflection mirror 604, in this way, first through the first 605 mirrors of total reflection on the first optical path that neutral spectroscope 602 reflects to form
The first polarizing beamsplitter 606, the second polarizing beamsplitter 607 and reference mirror 608, and the first total reflection mirror are sequentially entered again
605 are additionally arranged at the first optical path from the first polarizing beamsplitter 606 after the reflection of reference mirror 608 in the optical path of return light
And first polarization photelectric receiver 610 between；In plane mirror on the second optical path that the neutral transmission of spectroscope 602 is formed
It is anti-first through the second total reflection mirror 604 the first polarizing beamsplitter 606, the second polarizing beamsplitter 607 and benchmark to be sequentially entered again after 603
Mirror 608 is penetrated, and the second total reflection mirror 604 is additionally arranged at the second optical path from return light after the reflection of reference mirror 608
Between the first polarizing beamsplitter 606 and the second polarization photelectric receiver 609 in optical path.
Double-frequency laser head 601, neutral spectroscope 602, plane mirror 603, the second polarizing beamsplitter 607, baseline reflectance
608, two polarization photelectric receivers 609 and 610 of mirror are all mounted on a pedestal, constitute integrated laser head.First polarisation point
606, two total reflection mirrors 604 and 605 of beam mirror are mounted on a pedestal, constitute measuring head.
Its specific work process are as follows: the incident light from double-frequency laser head 601 first projects on neutral spectroscope 602,
It is divided into two beams of reflection and transmission, is respectively used to first straight line degree optical path and second straight line degree optical path.From neutrality point
The reflected light that light microscopic 602 is emitted passes sequentially through the first total reflection mirror 605, the first polarizing beamsplitter 606 and the second polarizing beamsplitter
607, become two beam directional lights, it is contrary with incident light, be parallel to each other, be spaced apart from each other one after the reflection of reference mirror 608
Section distance, then the second polarizing beamsplitter 607 and the first polarizing beamsplitter 606 are passed sequentially through, and become light beam, become the first survey
Light is measured, the first total reflection mirror 605 is again introduced into, is received after being reflected again by the first polarization photelectric receiver 610, conversion strikes a bargain
Galvanic electricity signal forms the first measuring signal.The transmitted light being emitted from neutral spectroscope 602 is reflected by plane mirror 603, then
The reflected light passes sequentially through the second total reflection mirror 604, the first polarizing beamsplitter 606 and the second polarizing beamsplitter 607, becomes two beams
Directional light, it is contrary with incident light, be parallel to each other, be spaced apart from each other a distance after the reflection of reference mirror 608, then according to
It is secondary to pass through the second polarizing beamsplitter 607 and the first polarizing beamsplitter 606, and become light beam, become the second measurement light, again into
Enter the second total reflection mirror 604, is received after being reflected again by the second polarization photelectric receiver 609, be converted into ac signal, shape
At the second measuring signal.
Measuring head can make two-way measuring signal by the rolling of axis of optical path direction, and phase occurs for the phase between reference signal
Anti- variation, in addition to this, movement and angle offset of the measuring head on other two direction will not all cause this phase
Variation.Reference signal is subjected to phase bit comparison with two-way measuring signal respectively with phasometer 611, result is sent to computer 612
Carry out data processing, so that it may obtain the rolling angular data of measuring head.
Measuring head is parallel to the light splitting plane of the first polarizing beamsplitter 606, can make two perpendicular to mobile on optical path direction
Relative to the phase between reference signal identical variation occurs for road measuring signal, and in addition to this, the measuring head is in other two side
Upward movement and angle offset will not all cause this phase change.With phasometer 611 by reference signal respectively with two drive tests
It measures signal and carries out phase bit comparison, result is sent to computer 612 and carries out data processing, so that it may obtain the straight line degree of measuring head
According to.
If laser head to be put in one end of guide rail (not shown), adjustment emitting light path is allowed to be parallel to guide rail, makes to survey
Amount head is moved along guide rail, can measure the straightness on the roll angle of guide rail direction and the horizontal or vertical direction of guide rail simultaneously
Deviation.It is compared with front embodiment shown in Fig. 4, embodiment illustrated in fig. 6 eliminates perflectometer, simplifies two-frequency laser interferometer
Overall structure reduces the workload of optical path adjustment.
It is identical with previous embodiment, the calculation formula of straightness deviation and roll angle are as follows:
In formula: X: straightness deviation
R: roll angle
D: the interval of first straight line degree optical path and second straight line degree optical path
λ: optical maser wavelength
β: the apex angle of polarizing beamsplitter
ne、no: the refractive index of extraordinary ray and ordinary light
C1、C2: the first measuring signal, the phasometer count value of the second measuring signal
Specifically, the present invention can measure the neutral spectroscope of the two-frequency laser interferometer use of roll angle and straightness simultaneously
Light splitting surface it is preferably parallel to each other with the reflecting surface of plane mirror.Each total reflection mirror can use prism of corner cube, hollow corner
Prism or cat's -eye reflector.Reference mirror preferably using translatable mirror or can separate reflecting mirror, as shown in figure 7 a-7e,
Preferred structure, wherein Fig. 7 a, 7b, 7c and 7d is, using the preferred structure schematic diagram of translatable mirror, translatable mirror are in phase
The plane mirror structure that optical path drift adaptation function is mutually all had in vertical both direction, when incident light is along translatable mirror
When characteristic direction incidence, constant distance between return light and incident light after translatable mirror reflection, the distance is not with incident light
It translates and changes；Specifically, translatable mirror can be tool there are three or three or more odd number effective reflecting surfaces it is flat
Face mirror structure, so-called effective reflecting surface are exactly the face that incident light reflects in translatable mirror, which can be with
It is three or five or more, these effective reflecting surfaces are coplanar in space and its normal compound direction is parallel with incident light.Such as
Fig. 7 a, 7b and 7c include that all there are three reflectings surface for tool in other words for three plane mirrors, and the normal of these three reflectings surface is in sky
Between coplanar and three reflectings surface normal compound direction it is parallel with incident light, i.e., be reflected three times to go out again after incident light beam strikes
Penetrate, emergent light and incident light are contrary, be parallel to each other and translate one it is fixed at a distance from, which can be by multiple
Combination plane mirrow is coated with the polyhedral prism of reflectance coating into either one.In addition, translatable mirror can also be flat by one
Face reflecting mirror and a pentagonal prism composition, incident light as shown in figure 7d are first incident on pentagonal prism, it is anti-to be again incident on plane
Penetrate mirror.Certainly it is also not limited to the combination of three reflectings surface, can be the combination of more reflectings surface.Fig. 7 e is anti-using separation
The preferred structure schematic diagram of mirror is penetrated, separation reflecting mirror is with a reflecting surface and two planes of refraction and incident light and reflected light phase
Mutually device separated by a distance, when characteristic direction incidence of the incident light along separation reflecting mirror, after separation reflecting mirror reflection
Constant distance between return light and incident light, the distance do not translate with incident light and are changed.Said reference reflecting mirror it is preferred
Structure can meet incident light and emergent light is spaced apart from each other the requirement of certain distance.In addition, in the beam splitting plane of polarizing beamsplitter
Interior, i.e., in the side where tested straightness, said reference reflecting mirror is equivalent to a plane reflection to the comprehensive function of light beam
Mirror, this, which allows for interferometer of the invention, has adaptively the angle drift of integrated laser head output beam with parallel drift
Property, that is to say, that the angle drift of integration laser output beam will not cause measurement error with parallel drift.
Roll angle and verticality measuring method are carried out using device as shown in Figure 4 of the invention the following steps are included:
1, light source is made using double-frequency laser head 401, it is stable, mutually orthogonal which exports two frequency differences, optical frequency
Linearly polarized light, while output frequency be equal to both frequency difference reference signal；
2, it is divided into reflected light and transmitted light two after passing through neutral spectroscope 404 from the orhtogonal linear polarizaiton light that the light source is emitted
Light splitting；
3, first part's light (can be reflected light or transmitted light) is by the first polarizing beamsplitter 406, and two therein partially
Vibration component is split up into the two-beam for accompanying a low-angle, then by the second polarizing beamsplitter 407, becomes two beam directional lights, should
Two beam directional lights by reference mirror 408 reflect after, reflected light at this time is still two beam directional lights, and with incident light interval one
Section distance, the reflected light become light beam again after passing sequentially through the second polarizing beamsplitter 407 and the first polarizing beamsplitter 406 again,
It is received by the first polarization photelectric receiver 402, forms the first measuring signal；
4, second part light (can be reflected light or transmitted light) passes through the first polarisation after the reflection of plane mirror 405
Beam splitter 406, two polarized components therein are split up into the two-beam for accompanying a low-angle, then pass through the second polarizing beamsplitter
407, become two beam directional lights, after which is reflected by reference mirror 408, reflected light at this time is still that two beams are parallel
Light, and be spaced a distance with incident light, which passes sequentially through the second polarizing beamsplitter 407 and the first polarized beam splitting again
Become light beam again after mirror 406, is received by the second polarization photelectric receiver 403, form the second measuring signal；
5, by the first measuring signal described in the rapid described reference signal of step 1, third step and step 4 rapid described the
Two measuring signals are sent into phasometer 409 and carry out phase bit comparison, obtain the first measuring signal and the second measuring signal relative to reference
The phase change of signal.When the first polarizing beamsplitter 406 perpendicular to optical path, its be divided plane in move when, the phase of the two
The difference of variation has just reacted the amount of movement, i.e. roll angle；
6, by the first measuring signal described in the rapid described reference signal of step 1, third step and step 4 rapid described the
Two measuring signals are sent into phasometer 409 and carry out phase bit comparison, obtain the first measuring signal and the second measuring signal relative to reference
The phase change of signal.When the first polarizing beamsplitter 406 perpendicular to optical path, its be divided plane in move when, the phase of the two
The average of variation has just reacted the amount of movement, i.e. straightness deviation；
7, implement that step 5 is rapid and step 6 is rapid simultaneously, so that it may while measuring roll angle and straightness.
The present invention relates to while measure roll angle and straightness two-frequency laser interferometer, on optical path setting in
Property spectroscope, set gradually plane mirror, the first polarized beam splitting on neutral spectroscopical transmitted light path or reflected light path
Mirror, the second polarizing beamsplitter and reference mirror, the present invention is integrally disposed by two kinds of optical paths, so that optical element number subtracts
It is few, it is only necessary to which that a mobile device is arranged can be complete with the optical path of a fixed device and adjustment that guide rail one end is arranged in
At measurement, without electric wire or wireless device are arranged on the mobile device, rolling angle measurement and level can be completed at the same time or hung down
The upward straight line degree measurement of histogram, thus substantially reduces equipment volume, reduces equipment cost, simplify adjustment process,
Regulating time is reduced, testing efficiency is improved；Optical path of the invention is to disturbing factors such as air agitation and variation of ambient temperature
Has good resistivity, the change in location in angle change of the measuring part in moving process and other directions does not cause
Measurement error, the reference mirror as linearity reference remain stationary in measurement process, and two optical paths share same
A reference mirror eliminates the systematic error of roll angle as benchmark, to improve the stability of measurement result, reduces
Measurement error ensure that measurement accuracy.
It should be pointed out that specific embodiment described above can make those skilled in the art that the present invention be more fully understood
It creates, but do not limit the invention in any way is created.Therefore, although this specification creates the present invention referring to drawings and examples
It makes and has been carried out detailed description, it will be understood by those skilled in the art, however, that still can modify to the invention
Or equivalent replacement, in short, the technical solution and its improvement of all spirit and scope for not departing from the invention, should all contain
It covers in the protection scope of the invention patent.
Claims (10)
1. one kind can measure the two-frequency laser interferometer of roll angle and straightness simultaneously, including double-frequency laser head, neutral spectroscope,
First polarization photelectric receiver, the second polarization photelectric receiver and signal processing unit, the reference that the double-frequency laser hair goes out
The signal of optical path is received to form reference signal by signal processing unit, and institute is arranged on the optical path that the double-frequency laser hair goes out
Neutral spectroscope is stated, is respectively formed two optical paths after the neutrality spectroscope transmission and reflection, which is characterized in that in described
Property spectroscope transmission or reflection formed the first optical path on be disposed with the first polarizing beamsplitter, the second polarizing beamsplitter
And reference mirror, second polarizing beamsplitter, the first polarizing beamsplitter and the first polarization photelectric receiver are also sequentially located at
First optical path from after reference mirror reflection in the optical path of return light, after the reference mirror reflection return light with along base
The incident light of the characteristic direction incidence of quasi-reflection mirror is contrary, is parallel to each other and is spaced a distance, in the neutral light splitting
Plane mirror and first polarizing beamsplitter, the are disposed on the second optical path that mirror reflection or transmission are formed
Two polarizing beamsplitters and reference mirror, second polarizing beamsplitter, the first polarizing beamsplitter and the second polarization opto-electronic receiver
Device is also sequentially located at the second optical path from the optical path of return light, described first polarizes opto-electronic receiver after reference mirror reflection
Device and the second polarization photelectric receiver are all connected with signal processing unit.
2. two-frequency laser interferometer according to claim 1, which is characterized in that further include that the first total reflection mirror and second are complete
Reflecting mirror, on the first optical path that the neutrality spectroscope transmission or reflection is formed first through first total reflection mirror again successively
Into the first polarizing beamsplitter, the second polarizing beamsplitter and reference mirror, and first total reflection mirror is additionally arranged at
One optical path polarizes opto-electronic receiver from the first polarizing beamsplitter and first after reference mirror reflection in the optical path of return light
Between device；First through described second after plane mirror on the second optical path that the neutrality spectroscope reflection or transmission are formed
Total reflection mirror sequentially enters the first polarizing beamsplitter, the second polarizing beamsplitter and reference mirror again, and described second is all-trans
It penetrates mirror and is additionally arranged at the second optical path from the first polarizing beamsplitter and the after reference mirror reflection in the optical path of return light
Between two polarization photelectric receivers.
3. two-frequency laser interferometer according to claim 1 or 2, which is characterized in that the spectroscopical light splitting surface of neutrality
It is parallel to each other with the reflecting surface of the plane mirror.
4. two-frequency laser interferometer according to claim 3, which is characterized in that the reference mirror is translatable mirror
Or separation reflecting mirror, the translatable mirror are that optical path drift adaptation function is all had in orthogonal both direction
Plane mirror structure, when characteristic direction incidence of the incident light along translatable mirror, return light and incidence after translatable mirror reflection
Constant distance between light, the distance do not translate with incident light and are changed；The reference mirror is to separate reflecting mirror, described point
From reflecting mirror be with a reflecting surface and two planes of refraction and incident light and reflected light are separated from each other the device of a certain distance,
When characteristic direction incidence of the incident light along separation reflecting mirror, distance is permanent between return light and incident light after separation reflecting mirror reflection
Fixed, the distance does not translate with incident light and is changed.
5. two-frequency laser interferometer according to claim 4, which is characterized in that the reference mirror is translatable mirror
When, the translatable mirror includes three reflectings surface, and the normal of three reflectings surface is coplanar in space and three reflectings surface
Normal compound direction is parallel with incident light.
6. two-frequency laser interferometer according to claim 5, which is characterized in that the translatable mirror include three in addition
Plane mirror；Or the translatable mirror includes an other plane mirror and a pentagonal prism.
7. two-frequency laser interferometer according to claim 2, which is characterized in that each total reflection mirror uses prism of corner cube, sky
Heart corner cube or cat's -eye reflector.
8. two-frequency laser interferometer according to claim 1 or 2, which is characterized in that the knot of second polarizing beamsplitter
Structure and parameter are identical with the first polarizing beamsplitter.
9. two-frequency laser interferometer according to claim 8, which is characterized in that each polarizing beamsplitter uses Wollaston rib
Mirror or Rochon prism.
10. two-frequency laser interferometer according to claim 1 or 2, which is characterized in that the signal processing unit includes phase
Position meter and computer, the first polarization photelectric receiver and the second polarization photelectric receiver pass through phasometer and computer phase
Even, the two-way measuring signal of two optical paths and reference signal are carried out phase bit comparison simultaneously by the phasometer.
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