CN104180776B - High-resolution roll angle measurement method and device based on difference interference phase method - Google Patents

High-resolution roll angle measurement method and device based on difference interference phase method Download PDF

Info

Publication number
CN104180776B
CN104180776B CN201410414682.0A CN201410414682A CN104180776B CN 104180776 B CN104180776 B CN 104180776B CN 201410414682 A CN201410414682 A CN 201410414682A CN 104180776 B CN104180776 B CN 104180776B
Authority
CN
China
Prior art keywords
angle
wave plate
phase
mrow
photelectric receiver
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201410414682.0A
Other languages
Chinese (zh)
Other versions
CN104180776A (en
Inventor
王昭
高建民
黄军辉
李朝辉
郭俊杰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xi an Jiaotong University
Original Assignee
Xi an Jiaotong University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xi an Jiaotong University filed Critical Xi an Jiaotong University
Priority to CN201410414682.0A priority Critical patent/CN104180776B/en
Publication of CN104180776A publication Critical patent/CN104180776A/en
Application granted granted Critical
Publication of CN104180776B publication Critical patent/CN104180776B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Abstract

The present invention discloses a kind of high-resolution roll angle measurement method and device based on difference interference phase method, Amici prism including dual-frequency transverse Zeeman laser and in its emergent light light path, is provided with the first analyzer and the first photelectric receiver in the reflected light path of the Amici prism;1/2 wave plate is provided with the transmitted light path of Amici prism, 1/2 wave plate is located among plane reflection lens array, phase delay chip and right-angle reflecting prism are provided with the final emitting light path of 1/2 wave plate, the second analyzer and the second photelectric receiver are set in the reflected light path of right-angle reflecting prism;First photelectric receiver and the second photelectric receiver are connected with phasometer, the output end of phasometer is connected with industrial computer, the present invention coordinates the superposability during use of plane reflection lens array to polarizing light action using 1/2 wave plate, it is placed in plane reflection lens array, it is used in conjunction with phase delay chip, further increases the resolution ratio of rolling angle measurement.

Description

High-resolution roll angle measurement method and device based on difference interference phase method
Technical field
The invention belongs to the photoelectric measurement field of angle, more particularly to a kind of high-resolution based on difference interference phase method Roll angle measurement method and device.
Background technology
Pith of the rolling angle error as high-grade lathe geometric error, its precision are to weigh machine tool capability and processing essence One of important references index of degree, its e measurement technology level are that high-grade lathe carries out error compensation and then realizes high accuracy processing Premise and basis.
Mechanical guide kinematic pair generally there are the angular error in three directions, i.e. pitching angle error, beat angle error and rolling Angular errors.Wherein, the angle of pitch and deflection angle error can be measured by high-precision laser interferometer, e measurement technology into It is ripe and very high precision can be reached;For rolling angle error, because its direction of error is vertical with measuring beam direction, can not introduce Extra optical path difference, thus the measurement relative difficulty of roll angle, at present both at home and abroad also in one kind research and exploratory stage.
Currently, mainly there is the electrolevel measurement side on the basis of gravity direction to the measuring method of roll angle both at home and abroad Method, collimation laser method, grating Diffraction Method based on position detection devices such as position sensor PSD etc., and Polarization Method.Wherein Electronic horizon instrument measurement method is primarily limited to its measurement accuracy and measuring speed, and the roll angle that can not measure vertical axes misses Difference, while for the developmental research of multi-dimensional measuring system, it is difficult to be blended with the error measuring system in other directions;Based on position The collimation laser methods of the position detection devices such as sensing element PSD, grating Diffraction Method etc., its measurement accuracy is by position detection device Precision limitation and can not further improve, and regulation to light path requires high, easily by detecting element pitching, beat equipotential Put the influence of error.And the Polarization Method on the basis of laser polarization direction, this method are included based on light intensity, three kinds of phase and frequency Measuring method, wherein the phase method based on polarised light, has higher measurement accuracy, resolution ratio is up to 0.65 " (uses phasometer Resolution ratio is 0.01 °).
In addition, Publication No. CN1335483A patent is on the basis of polarised light phase method, will be original using 1/2 wave plate Method sensitivity improves 4 times again on the basis of non-linear enhancing.Publication No. CN102654392A's and CN102818541A Patent, multiple echo method is incorporated in the rolling angle measurement of polarised light on the basis of aforementioned patent, largely improves it Measurement Resolution.But the above method has strict position accuracy demand to optical element in light path, quarter wave plate perpendicular to 1 ° of site error will make the measured value of system equal to twice of true value in optical axial plane, measuring system failure.This causes accordingly Measuring system adjustment and installation is difficult, and anti-interference is difficult to ensure that.
The content of the invention
It is an object of the invention to overcome above-mentioned prior art shortcoming, there is provided a kind of high score based on difference interference phase method Resolution roll angle measurement method and device, the error source of system in the case where ensureing high-resolution requirement, can be reduced, is improved The anti-interference of system, so as to the installation and debugging for the system of being convenient for measuring.
To solve the above problems, the technical scheme that the present invention takes is:Including dual-frequency transverse Zeeman laser and it is located at Amici prism in its emergent light light path, is disposed with the first analyzer and the first light in the reflected light path of the Amici prism Electric receiver;
1/2 wave plate is provided with the transmitted light path of the Amici prism, 1/2 described wave plate is located at two sets of plane mirrors Among array, phase delay chip and right-angle reflecting prism are disposed with the emergent light axis of two sets of plane reflection lens arrays, Second analyzer and the second photelectric receiver are set in the reflected light path of the right-angle reflecting prism;
The input of the first described photelectric receiver and the output end of the second photelectric receiver and phasometer connects, described The output end of phasometer be connected with industrial computer.
The reflectivity of described Amici prism is 50%.
Two sets of described plane reflection lens arrays include the first plane reflection lens array be arrangeding in parallel and the second plane is anti- Lens array is penetrated, 1/2 wave plate is between the first plane reflection lens array and the second plane reflection lens array.
The difference interference phase method of the high-resolution rolling angle measurement device based on difference interference phase method of the present invention High-resolution roll angle measurement method, comprises the following steps:
1) light beam that transverse zeeman laser is sent is divided into reflected light and transmitted light after Amici prism, wherein instead Penetrate light to be received by the first photelectric receiver after the first analyzer, as reference signal;
2) incided by the transmitted light of Amici prism outgoing after 1/2 wave plate in two sets of plane reflection lens arrays, through two Set plane reflection lens array repeatedly makes after reciprocal reflex light beam n time is round to pass through 1/2 wave plate;
3) phase delay chip is again incident on by the outgoing beam after 1/2 wave plate, is then emitted to corner cube mirror, then lead to Received after crossing the second analyzer by the second photelectric receiver, as measurement signal;
4) measurement signal passes data to industrial computer, industrial computer is according to the two with reference signal by phasometer phase demodulation Relational expression between the variable quantity and roll angle of phase difference calculates the i.e. tested roll angle of angle error of 1/2 wave plate.
Roll angle Δ α survey calculation formula is:
Wherein, Δ Ψ is that phase place change, n caused by roll angle Δ α are determined by the number of the array of plane mirror, is normal Number, δ are the phase-delay quantity of phase delay chip.
Compared with prior art, the invention has the advantages that:The height based on difference interference phase method of the present invention Resolution ratio rolling angle measurement device, make use of 1/2 wave plate coordinate plane mirror use when to polarize light action superposability, 1/2 wave plate is placed in plane reflection lens array, makes full use of light beam repeatedly to come and go detecting element, to reach the mesh of angle amplification , while increase phase delay chip in emergent light axis, further increase roll angle gain, ensure that cross-polarization phase method with The fusion of multiple echo method;Meanwhile phase delay chip used is in influence of the site error in optical axial plane to system It can be ignored, the influence of 1 ° of site error to system only has 0.06%;Ensureing that it is high-resolution same that system has When, reduce the error source of system, improve the anti-interference of system, facilitate the installation and debugging of system, relative to existing base There is very big advantage for the rolling angle measurement system of phase method.
The present invention based on the high-resolution roll angle measurement method of difference interference phase method using 1/2 wave plate as sensing element Part, repeatedly come and gone using light beam makes measured angle realize larger gain by 1/2 wave plate, so that the phase of cross-polarization laser Change correspondingly increases, while coordinates phase delay chip, further improves the gain factor of roll angle, it is applied to precise guide rail The rolling measurement of kinematic pair.The present invention is applied to high-precision field of industrial measurement, the precise guide rail that is particularly suitable for use in fortune The dynamic secondary and equipment based on it is such as:The rolling measurement of high-grade, digitally controlled machine tools, the promotion that its extensive use can be larger The industrial expansions such as Machine Manufacture.
Brief description of the drawings
Fig. 1 is the main light channel structure figure and its composition of the present invention;
Fig. 2 is the main light channel structure top view of the present invention;
Wherein, 1, dual-frequency transverse Zeeman laser, 2, Amici prism, the 3, first analyzer, the 4, first photelectric receiver, 5, Half wave plate, 6a, the first plane reflection lens array, 6b, the second plane reflection lens array, 7, phase delay chip, 8, right angle Reflecting prism, the 9, second analyzer, the 10, second photelectric receiver.
Embodiment
The present invention is described in further details below in conjunction with accompanying drawing:
Referring to Fig. 1 and Fig. 2, the high-resolution rolling angle measurement device of the invention based on difference interference phase method includes horizontal stroke Amici prism 2 to Dual-Frequency Zeeman Laser 1 and in its emergent light light path, in the reflected light path of the Amici prism 2 It is disposed with the first analyzer 3 and the first photelectric receiver 4;1/2 wave plate is provided with the transmitted light path of the Amici prism 2 5,1/2 wave plates 5 are set gradually among two sets of plane reflection lens arrays on the emergent light axis of two sets of plane reflection lens arrays There are phase delay chip 7 and right-angle reflecting prism 8, the second analyzer 9 and are set in the reflected light path of the right-angle reflecting prism 8 Two photelectric receivers 10;The output end of first photelectric receiver 4 and the second photelectric receiver 10 and the input of phasometer 11 connect Connect, the output end of phasometer 11 is connected with industrial computer 12, and the reflectivity for the Amici prism 2 that the present invention uses is 50%.
As illustrated, two sets of plane reflection lens arrays that the present invention uses include the first plane mirror battle array be arrangeding in parallel 6a and the second plane reflection lens array 6b is arranged, 1/2 wave plate 5 is located at the first plane reflection lens array 6a and the second plane mirror battle array Between row 6b.
The high-resolution of the difference interference phase method of high-resolution rolling angle measurement device based on difference interference phase method Roll angle measurement method, comprise the following steps:
1) light beam that transverse zeeman laser is sent is divided into reflected light and transmitted light after Amici prism 2, wherein instead Penetrate light to be received by the first photelectric receiver 4 after the first analyzer 3, as reference signal;
2) by the transmitted light that Amici prism 2 is emitted after 1/2 wave plate 5, incide in two sets of plane reflection lens arrays, pass through Two sets of plane reflection lens arrays repeatedly make after reciprocal reflex light beam come and go for n times to pass through 1/2 wave plate 5, and wherein n is by reflector battle array The number of reflector in row determines;
3) phase delay chip 7 is again incident on by the outgoing beam after 1/2 wave plate 5, is then emitted to corner cube mirror 8, Again by being received after the second analyzer 9 by the second photelectric receiver 10, as measurement signal;
4) measurement signal passes data to industrial computer 12, industrial computer 12 with reference signal by the phase demodulation of phasometer 11 The i.e. tested roll angle of angle error of 1/2 wave plate 5 is calculated according to the relational expression between the variable quantity and roll angle of the two phase difference.
The inventive method and device use 1/2 wave plate repeatedly to be come and gone using light beam as sensing element and pass through 1/2 wave plate Measured angle is realized larger gain, so that the phase place change of cross-polarization laser correspondingly increases, while coordinate phase delay Piece, further improve the gain factor of roll angle.It is applied to the rolling measurement of precise guide rail kinematic pair.
Present invention utilizes 1/2 wave plate 5 to coordinate to the superposability for polarizing light action during the use of plane reflection lens array, will 1/2 wave plate is placed in plane reflection lens array, makes full use of light beam repeatedly to come and go detecting element, to reach the purpose of angle amplification, Increase phase delay chip in emergent light axis simultaneously, further increase roll angle gain.Ensure that cross-polarization phase method with it is more The fusion of secondary reflection method;Meanwhile phase delay chip used can in influence of the site error in optical axial plane to system To ignore, the influence of 1 ° of site error to system only has 0.06%;I.e. while ensureing that system has high-resolution, Reduce the error source of system, improve the anti-interference of system, facilitate the installation and debugging of system, phase is based on relative to existing There is very big advantage for the rolling angle measurement system of position method.
This method is applied to high-precision field of industrial measurement, the precise guide rail that is particularly suitable for use in kinematic pair and using it as base The equipment of plinth is such as:The industry such as the rolling measurement of high-grade, digitally controlled machine tools, the promotion Machine Manufacture that its extensive use can be larger Development.
The course of work of the present invention is as follows:Dual-frequency transverse Zeeman laser 1 sends double-frequency laser beam, is 50% through reflectivity Amici prism 2 be divided into two-beam (the reflected beams and transmitted light beam);Wherein the reflected beams are through analyzer 3, by photelectric receiver 4 Received, as reference signal, transmitted light beam then passes through 1/2 wave plate 5, reflects and returns under plane reflection lens array 6a effects, And pass through 1/2 wave plate 5, now light beam is come and gone by 1/2 wave plate 5 up to 1 time;Subsequent light beam reaches plane reflection lens array 6b And reflected, in the presence of two plane reflection lens arrays 6a and 6b, light beam the 2nd time, which comes and goes, passes through 1/2 wave plate 5;So, this Light beam comes and goes after 1/2 wave plate 5 reaches n times, is emitted to up to phase delay chip between two plane reflection lens arrays 6a and 6b 7, then through the right angle reflection effect of rib 8 realize 90 ° turn back after through analyzer 9, received by photelectric receiver 10, as measurement letter Number.Phase measurement is carried out to measurement signal and reference signal by phasometer 11, according to the variable quantity of two signal phase differences and rolling The relational expression at angle can calculate the value of the roll angle of the tested wave plate 5 of roll angle 1/2, so as to realize rolling angle measurement.Its phase Change is as follows with the derivation of the mathematic(al) representation of roll angle:
As shown in figure 1, it is respectively E1 and E2 to set crossed polarized light electric vector, and respectively using direction where two vectors as x-axis And y-axis, the light direction of propagation are that z-axis establishes coordinate system;F (fast axle) axles of half wave plate 5 and x-axis angle are α;And make light It is n that beam, which is come and gone by the number of half wave plate wave plate 5, the fast of phase delay chip 7, the slow axis x-axis and y with coordinate system respectively Overlapping of axles, then Jones matrix can use to represent that measurement signal is as follows:
Wherein, P is the Jones matrix of polarizer;HnRepresent Jones matrix when n-th passes through 1/2 wave plate 5;R is phase Postpone the Jones matrix of piece 7;For Jones's vector representation of light beam.They are respectively:
Wherein, δ is the phase-delay quantity of delay piece.
Above expression formula is substituted into formula (1), can be obtained:
Wherein:
According to formula (2), the light intensity of the measurement signal received by the second photelectric receiver 10 is represented by:
In (3) formula, Ψ is that half wave plate 5 occurs caused by roll error, and its expression formula is:
For reference signal, the intensity signal that the first photelectric receiver 4 receives is represented by:
It can show that the phase difference of measurement signal and reference signal is by (3) and (5) formula:
Define KaFor angle gain coefficient, obtained by formula (6):
Relational expression of the formula (4) between phase Ψ and angle α, wherein, n is determined by the array size of right-angle prism, is normal Number.In the case of different δ phase-delay quantities, the curve that it changes is different.Generally its relation is nonlinear change. Obtained by formula (7):
From formula (8), α is meeting conditionLocate its gain coefficient and obtain maximum Value, and in less scope can be linear zone by nonlinear approximation near the value, now have:
Obtained by formula (9), had in approximately linear sensitive volume:
Its differential form is:
Δ α is the change of roll angle, is caused by the rolling of the wave plate 5 of sensing element 1/2, is measured;Δ Ψ is Phase place change caused by this roll angle.
Therefore, by formula (10) roll angle Δ α survey calculation formula is:
Formula (11) shows that δ is oneself amount of knowing, is needed in specific experiment by demarcating determination in advance, thus can determine that angle gain COEFFICIENT Ka.It is bigger, and angle gain is bigger, and rolling angle measurement resolution capability is stronger.If n=2, phase-delay quantity δ takes 2 °, phasometer Resolution ratio is 0.01 °, then Ka=458, therefore the detectable angular resolution of this method is 0.07 ", sign passes through system calibrating To determine.
Therefore, the inventive method and device have high angular resolution, meanwhile, compared with existing roll angle measurement method, With less error source, the installation and debugging of system are facilitated, so as to further ensure the high-resolution of system in the application And stability.It can be provided for the rolling angle measurement of precise guide rail kinematic pair, high-grade, digitally controlled machine tools etc. more accurate and reliable Detection method and technology.

Claims (1)

1. the high-resolution rolling of the difference interference phase method of the high-resolution rolling angle measurement device based on difference interference phase method Rotating Angle Measurement, it is characterised in that:High-resolution rolling angle measurement device based on difference interference phase method, including horizontal plug Graceful two-frequency laser (1) and the Amici prism (2) in its emergent light light path, in the reflected light path of the Amici prism (2) In be disposed with the first analyzer (3) and the first photelectric receiver (4);
1/2 wave plate (5) is provided with the transmitted light path of the Amici prism (2), described 1/2 wave plate (5) is located at two sets of planes Among reflection mirror array, phase delay chip (7) and right angle are disposed with the emergent light axis of two sets of plane reflection lens arrays Reflecting prism (8), the second analyzer (9) and the second photelectric receiver are set in the reflected light path of the right-angle reflecting prism (8) (10);
Described the first photelectric receiver (4) and the output end of the second photelectric receiver (10) and the input of phasometer (11) connect Connect, the output end of described phasometer (11) is connected with industrial computer (12);
Measuring method comprises the following steps:
1) light beam that transverse zeeman laser is sent is divided into reflected light and transmitted light after Amici prism (2), wherein reflecting Light is received after the first analyzer (3) by the first photelectric receiver (4), as reference signal;
2) incided in two sets of plane reflection lens arrays, passed through after 1/2 wave plate (5) by the transmitted light of Amici prism (2) outgoing Two sets of plane reflection lens arrays repeatedly make after reciprocal reflex light beam come and go for n times to pass through 1/2 wave plate (5);
3) phase delay chip (7) is again incident on by the outgoing beam after 1/2 wave plate (5), is then emitted to right-angle reflecting prism (8), then by being received after the second analyzer (9) by the second photelectric receiver (10), as measurement signal;
4) measurement signal passes data to industrial computer (12), industrial computer (12) with reference signal by phasometer (11) phase demodulation The i.e. tested rolling of angle error of 1/2 wave plate (5) is calculated according to the relational expression between the variable quantity and roll angle of the two phase difference Angle Δ α;
Roll angle Δ α survey calculation formula is:
<mrow> <mi>&amp;Delta;</mi> <mi>&amp;alpha;</mi> <mo>=</mo> <mfrac> <mrow> <mi>&amp;Delta;</mi> <mi>&amp;psi;</mi> </mrow> <msub> <mi>K</mi> <mi>a</mi> </msub> </mfrac> <mo>=</mo> <mo>&amp;PlusMinus;</mo> <mfrac> <mrow> <mi>&amp;Delta;</mi> <mi>&amp;psi;</mi> </mrow> <mrow> <mn>4</mn> <mi>n</mi> <mrow> <mo>(</mo> <mi>cot</mi> <mfrac> <mi>&amp;delta;</mi> <mn>2</mn> </mfrac> <mo>-</mo> <mi>t</mi> <mi>a</mi> <mi>n</mi> <mfrac> <mi>&amp;delta;</mi> <mn>2</mn> </mfrac> <mo>)</mo> </mrow> </mrow> </mfrac> </mrow>
Wherein, Δ Ψ is that phase place change, n caused by roll angle Δ α are determined by the number of the level crossing of the array of plane mirror, For constant, δ is the phase-delay quantity of phase delay chip, KaFor angle gain coefficient.
CN201410414682.0A 2014-08-21 2014-08-21 High-resolution roll angle measurement method and device based on difference interference phase method Active CN104180776B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201410414682.0A CN104180776B (en) 2014-08-21 2014-08-21 High-resolution roll angle measurement method and device based on difference interference phase method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201410414682.0A CN104180776B (en) 2014-08-21 2014-08-21 High-resolution roll angle measurement method and device based on difference interference phase method

Publications (2)

Publication Number Publication Date
CN104180776A CN104180776A (en) 2014-12-03
CN104180776B true CN104180776B (en) 2017-12-15

Family

ID=51961990

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201410414682.0A Active CN104180776B (en) 2014-08-21 2014-08-21 High-resolution roll angle measurement method and device based on difference interference phase method

Country Status (1)

Country Link
CN (1) CN104180776B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108775878A (en) * 2018-05-31 2018-11-09 中国科学院高能物理研究所 Grating Heterodyne Interferometer System Based and its roll angle measurement method

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9863753B2 (en) * 2015-02-06 2018-01-09 Zhejiang Sci-Tech University Laser heterodyne interferometric straightness measurement apparatus and method with six DOFs determination
CN105222726B (en) * 2015-07-07 2018-12-07 西安交通大学 Photon flux method rolling angle measurement device and method based on multipass half wave plate
CN105180845B (en) * 2015-09-07 2017-12-26 上海理工大学 A kind of High precision roll angle interferometric measuring means based on balzed grating,
CN105444698B (en) * 2015-11-05 2019-03-01 西安交通大学 Heterodyne interferometry rolling angle measurement device and method based on oblique fold high reflective mirror
CN106247989B (en) * 2016-07-05 2019-02-05 西安交通大学 A kind of guide rail rolling angle field calibration and measuring device and method
CN106764600B (en) * 2016-11-25 2018-06-19 沈阳师范大学 Using space structure design of the light as curtain wall
CN106644068B (en) * 2016-12-30 2018-05-11 聚光科技(杭州)股份有限公司 A kind of long light path optical system
CN107356780A (en) * 2017-06-28 2017-11-17 北京航天控制仪器研究所 A kind of low speed speed precision detecting system of high precision turntable
CN108168465B (en) * 2017-12-23 2019-07-23 西安交通大学 A kind of optical path laser heterodyne interferometry roll angle high precision measuring device and method altogether
CN110849293B (en) * 2019-11-13 2020-10-27 西安交通大学 Four-beam structure laser heterodyne interference roll angle measuring device and method
CN111043991B (en) * 2020-03-17 2020-08-11 常州工学院 Straightness measuring interferometer system without nonlinear error and measuring method

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1335483A (en) * 2001-08-31 2002-02-13 清华大学 Tumble angle measuring method and measurer
CN101113927A (en) * 2007-08-22 2008-01-30 中国科学院上海光学精密机械研究所 Phase shifting lateral direction shearing interferometer
CN102654392A (en) * 2012-05-21 2012-09-05 西安交通大学 Roll angle measurement device and method based on array-type multiple reflections
TW201305530A (en) * 2011-07-29 2013-02-01 Univ Ching Yun Measurement method of small angle and small displacement and the device thereof

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4897572B2 (en) * 2006-06-30 2012-03-14 株式会社ミツトヨ Oblique incidence interferometer

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1335483A (en) * 2001-08-31 2002-02-13 清华大学 Tumble angle measuring method and measurer
CN101113927A (en) * 2007-08-22 2008-01-30 中国科学院上海光学精密机械研究所 Phase shifting lateral direction shearing interferometer
TW201305530A (en) * 2011-07-29 2013-02-01 Univ Ching Yun Measurement method of small angle and small displacement and the device thereof
CN102654392A (en) * 2012-05-21 2012-09-05 西安交通大学 Roll angle measurement device and method based on array-type multiple reflections

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
滚转角测量方法综述;翟玉生等;《激光与光电子学进展》;20140325;正文第3页第2段,图3 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108775878A (en) * 2018-05-31 2018-11-09 中国科学院高能物理研究所 Grating Heterodyne Interferometer System Based and its roll angle measurement method

Also Published As

Publication number Publication date
CN104180776A (en) 2014-12-03

Similar Documents

Publication Publication Date Title
CN102937411B (en) Double-frequency grating interferometer displacement measurement system
CN104729402B (en) High-optical-subdivision grating interferometer based on plane mirrors
CN103454619B (en) Electrical axis optical calibration system of spaceborne microwave tracking-pointing radar and calibration method thereof
CN102176088B (en) Two-dimensional photoelectric auto-collimation method and device for polarized light pyramid target common-path compensation
CN101403650B (en) Differential confocal combination ultra-long focal length measuring method and apparatus
CN102168955B (en) Method for detecting curvature radius of optical spherical surface
CN100429475C (en) Method and apparatus for reducing heterodyne interference nonlinear error first harmonic component
CN101893448B (en) Method for eliminating or reducing nonlinearity errors in laser heterodyne interferometry
US20150043004A1 (en) High speed high resolution heterodyne interferometric method and system
CN104634283B (en) Laser heterodyne interference linearity measuring device and laser heterodyne interference linearity measuring method with six-degree-of-freedom detection
CN103673891B (en) A kind of grating difference interference self-collimation measurement device
CN103983214B (en) A kind of device utilizing diffraction light-free to measure guide rail four-degree-of-freedom kinematic error
CN101650166B (en) Laser interference system used for measuring micro roll angle
CN104019762B (en) High-precision long-range surface shape detector for optical surface
Feng et al. A straightness measurement system using a single-mode fiber-coupled laser module
CN2884141Y (en) Laser, six freedom simultaneous measuring apparatus
CN104330039B (en) A kind of large-numerical aperture optical fiber point-diffraction interference device and method for three-dimensional coordinates measurement
CN1091874C (en) Fiber coupled interferometric displacement sensor
CN101581576B (en) Method for measuring straightness accuracy and position thereof based on double frequency interference principle
CN101799271B (en) Method for obtaining camera calibration point under large viewing field condition
CN101339012B (en) Rolling angle measurement method and device based on grating
CN103604376B (en) Double frequency laser grating interference three-dimensional measurement method and system with optical aliasing resistance
CN201187993Y (en) Device for large distance light parallel regulation
CN1687702A (en) 2D photoelectric auto collimation equipment and measuring method based on dynamic differential compensation process
CN105423917B (en) The scaling method of Position-Sensitive Detector position error

Legal Events

Date Code Title Description
PB01 Publication
C06 Publication
SE01 Entry into force of request for substantive examination
C10 Entry into substantive examination
GR01 Patent grant
GR01 Patent grant