CN105443930A - XY precision positioning platform - Google Patents
XY precision positioning platform Download PDFInfo
- Publication number
- CN105443930A CN105443930A CN201510926890.3A CN201510926890A CN105443930A CN 105443930 A CN105443930 A CN 105443930A CN 201510926890 A CN201510926890 A CN 201510926890A CN 105443930 A CN105443930 A CN 105443930A
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- axis
- guide rail
- supporting
- guide
- axis supporting
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- 230000033001 locomotion Effects 0.000 claims description 87
- 239000000758 substrate Substances 0.000 claims description 27
- 238000001514 detection method Methods 0.000 claims description 10
- 230000005540 biological transmission Effects 0.000 claims description 7
- 230000008878 coupling Effects 0.000 claims description 7
- 238000010168 coupling process Methods 0.000 claims description 7
- 238000005859 coupling reaction Methods 0.000 claims description 7
- 239000002360 explosive Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000004807 localization Effects 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/04—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
The invention discloses an XY precision positioning platform. The XY precision positioning platform comprises a base plate, wherein an active guide rail moving subsystem and a supporting guide rail moving subsystem which are arranged in parallel to each other on an X axis are mounted on the base plate in the X direction; an active guide rail moving subsystem and a supporting guide rail moving subsystem which are arranged on an Y axis are mounted on the base plate in the Y direction; the active guide rail moving subsystems on the X axis and the Y axis are of the same structure, so are the supporting guide rail moving subsystems on the X axis and the Y axis. The XY precision positioning platform further comprises a two-dimensional position detecting system which is driven to move in the X direction and the Y direction by the active guide rail moving subsystem and the supporting guide rail moving subsystem on the X axis and the active guide rail moving subsystem and the supporting guide rail moving subsystem on the Y axis. With the adoption of the XY precision positioning platform, the problem that two moving systems in a previous XY precision positioning platform form an overlapped structure can be solved, thus the abbe error can be avoided, and the positioning precision can be improved.
Description
Technical field
The present invention relates to locating platform field, specifically a kind of XY precisely locating platform.
Background technique
At present, common XY locating platform mostly is stacked structure (i.e. X-axis and Y-axis motion mutually stacking).Under normal conditions, because Y-axis motion is installed on the top of X-axis motion, add the stressed of X-axis motion, have a strong impact on the positioning precision of two-dimensional localization platform.XY locating platform generally adopts long grating encoder as the detection system of moving displacement.Under normal circumstances, in order to ensure the compactedness of whole locating platform, often straight grating encoder is arranged on the position be parallel to each other with motion, thus has run counter to abbe ' s principle, produce Abbe error.In addition, be difficult to ensure the perpendicularity between X travel axis and Y travel axis in the process of assembling at the motion of X and Y two axles.Therefore, existing XY locating platform is difficult to realize accurate location.
Summary of the invention the object of the invention is to provide a kind of XY precisely locating platform, to solve the problem that existing XY locating platform is difficult to realize precision positioning.
In order to achieve the above object, the technical solution adopted in the present invention is:
A kind of XY precisely locating platform, include substrate, it is characterized in that: along X to the active guide rail movement subtense angle and the supporting guide motion subsystem that are provided with the X-axis be parallel to each other on substrate, the active guide rail movement subtense angle of X-axis, between the supporting guide motion subsystem of X-axis side substrate on the active guide rail movement subtense angle of Y-axis is installed along Y-direction, the active guide rail movement subtense angle of X-axis, between the supporting guide motion subsystem of X-axis opposite side substrate on the supporting guide motion subsystem of Y-axis is installed along Y-direction, and the active guide rail movement subtense angle of X-axis is identical with the active guide rail movement subsystem structure of Y-axis, the supporting guide motion subsystem of X-axis is identical with the supporting guide motion subsystem structure of Y-axis,
Active guide rail movement subtense angle on each direction comprises respectively and to be arranged on substrate and along the screw mandrel fixed base of direction, place word order, screw mandrel supporting base, screw mandrel fixed base, ballscrew nut fitting is supported with along direction, place between screw mandrel supporting base, the substrate of ballscrew nut fitting both sides is provided with guide rail along direction, place respectively, guide rail is slidably fitted with slide block respectively, connecting plate is installed with between two slide blocks, be fixedly connected with nut in ballscrew nut fitting bottom connecting plate, screw mandrel fixed base is provided with stepper motor, the output shaft of stepper motor is in transmission connection by ball screw one end in coupling and ballscrew nut fitting,
Supporting guide motion subsystem on each direction comprises two guide rails be arranged on along direction, place on substrate respectively, two guide rails is slidably fitted with slide block respectively, is installed with connecting plate between two guide rail top slide blocks;
Two-dimensional position detection system is by X-axis supporting guide, X-axis supporting slider, Y-axis supporting guide, Y-axis supporting slider, worktable, two-dimensional grating fixed bearing, two-dimensional grating, read head support, two-dimensional grating read head is formed, wherein Y-axis supporting guide two ends to be separately fixed in the supporting guide motion subsystem of connecting plate and X-axis in the active guide rail movement subtense angle of X-axis on connecting plate, Y-axis supporting slider is slidably mounted on Y-axis supporting guide, described two-dimensional grating fixed bearing is fixed on bottom Y-axis supporting slider, two-dimensional grating read head is fixed on two-dimensional grating fixed bearing bottom surface by read head support, described X-axis supporting guide is erected at above Y-axis supporting slider, and X-axis supporting guide two ends to be separately fixed in the supporting guide motion subsystem of connecting plate and Y-axis in the active guide rail movement subtense angle of Y-axis on connecting plate, X-axis supporting slider is slidably mounted on X-axis supporting guide, be fixedly connected with Y-axis supporting slider top bottom X-axis supporting slider, described worktable is fixed on X-axis supporting slider top.
Described a kind of XY precisely locating platform, is characterized in that: described stepper motor is arranged on screw mandrel fixed base by motor erection support, and the output shaft of stepper motor is in transmission connection by ball screw one end in coupling and ballscrew nut fitting.
Described a kind of XY precisely locating platform, it is characterized in that: described Y-axis supporting slider is inverted U-shaped, and Y-axis supporting slider is slidably mounted on Y-axis supporting guide by U-shaped mouth, on Y-axis supporting slider, fixed cover is connected to the contiguous block one in inverted U-shape, and described two-dimensional grating fixed bearing is fixed on bottom Y-axis supporting slider, contiguous block one; Described X-axis supporting slider is inverted U-shaped, and X-axis supporting slider is slidably mounted on X-axis supporting guide by U-shaped mouth, on X-axis supporting slider, fixed cover is connected to the contiguous block two taken the shape of the letter U, described contiguous block two is crisscross arranged in cross with contiguous block one, be fixedly connected with contiguous block one top bottom described contiguous block two, described worktable is fixed on X-axis supporting slider, contiguous block two top.
Advantage of the present invention is:
1. X of the present invention and Y-axis moving system adopt non-laminated formula structure to be connected with substrate, avoid two moving system stacked structure in XY precisely locating platform in the past.
2. XY precisely locating platform of the present invention adopts two-dimensional grating encoder as movement position detection system, can not produce Abbe error.
3. XY precisely locating platform of the present invention adopts the structure of initiatively guide rail movement subtense angle and supporting guide motion subsystem routing motion, can ensure the perpendicularity between X travel axis and Y travel axis, have higher positioning precision.
Accompanying drawing explanation
Fig. 1 is XY precisely locating platform structural drawing.
Fig. 2 is XY precisely locating platform live axle explosive view.
Fig. 3 is XY precisely locating platform grating mounting point explosive view.
Fig. 4 is XY precisely locating platform schematic diagram.
Embodiment
As Figure 1-Figure 4, a kind of XY precisely locating platform, include substrate 1, supporting guide motion subsystem 5 along X to the active guide rail movement subtense angle 2 and X-axis that are provided with the X-axis be parallel to each other on substrate 1, the active guide rail movement subtense angle 2 of X-axis, between the supporting guide motion subsystem 5 of X-axis side substrate 1 on the active guide rail movement subtense angle 3 of Y-axis is installed along Y-direction, the active guide rail movement subtense angle 2 of X-axis, between the supporting guide motion subsystem 5 of X-axis opposite side substrate 1 on the supporting guide motion subsystem 6 of Y-axis is installed along Y-direction, and the active guide rail movement subtense angle 2 of X-axis is identical with the active guide rail movement subsystem structure 3 of Y-axis, the supporting guide motion subsystem 5 of X-axis is identical with the supporting guide motion subsystem structure 6 of Y-axis,
Active guide rail movement subtense angle on each direction comprises installation respectively on substrate 1 and along the screw mandrel fixed base 11 of direction, place word order, screw mandrel supporting base 17, screw mandrel fixed base 11, ballscrew nut fitting is supported with along direction, place between screw mandrel supporting base 17, the substrate 1 of ballscrew nut fitting both sides is provided with guide rail 14A along direction, place respectively, guide rail 14A is slidably fitted with slide block 13A respectively, connecting plate 12A is installed with between two slide block 13A, be fixedly connected with nut in ballscrew nut fitting 16 bottom connecting plate 12A, screw mandrel fixed base 11 is provided with stepper motor 8, in the output shaft of stepper motor 8 and ballscrew nut fitting, ball screw 15 one end is in transmission connection,
Supporting guide motion subsystem on each direction comprises respectively along direction, place setting two guide rail 14B on substrate 1, two guide rail 14B is slidably fitted with slide block 13B respectively, is installed with connecting plate 12B between two guide rail 14B top slide block 13B;
Two-dimensional position detection system 4 is by X-axis supporting guide 20, X-axis supporting slider 19, Y-axis supporting guide 22, Y-axis supporting slider 23, worktable 18, two-dimensional grating fixed bearing 24, two-dimensional grating 25, read head support 26, two-dimensional grating read head 27 is formed, wherein Y-axis supporting guide 22 two ends to be separately fixed in the supporting guide motion subsystem 5 of connecting plate and X-axis in the active guide rail movement subtense angle 2 of X-axis on connecting plate, Y-axis supporting slider 23 is slidably mounted on Y-axis supporting guide 22, two-dimensional grating fixed bearing 24 is fixed on bottom Y-axis supporting slider 23, two-dimensional grating read head 27 is fixed on two-dimensional grating fixed bearing 24 bottom surface by read head support 26, X-axis supporting guide 20 is erected at above Y-axis supporting slider 23, and X-axis supporting guide 20 two ends to be separately fixed in the supporting guide motion subsystem 6 of connecting plate and Y-axis in the active guide rail movement subtense angle 3 of Y-axis on connecting plate, X-axis supporting slider 19 is slidably mounted on X-axis supporting guide 20, be fixedly connected with Y-axis supporting slider 23 top bottom X-axis supporting slider 19, worktable 18 is fixed on X-axis supporting slider 19 top.
Stepper motor 8 is arranged on screw mandrel fixed base 11 by motor erection support 9, and the output shaft of stepper motor 8 is in transmission connection by coupling 10 and ball screw 15 one end in ballscrew nut fitting.
Y-axis supporting slider 23 is in inverted U-shaped, and Y-axis supporting slider 23 is slidably mounted on Y-axis supporting guide 22 by U-shaped mouth, on Y-axis supporting slider 23, fixed cover is connected to contiguous block one 21A in inverted U-shape, and two-dimensional grating fixed bearing 24 is fixed on bottom Y-axis supporting slider 23, contiguous block one 21A; X-axis supporting slider 19 is in inverted U-shaped, and X-axis supporting slider 19 is slidably mounted on X-axis supporting guide 20 by U-shaped mouth, on X-axis supporting slider 19, fixed cover is connected to contiguous block two 21B taken the shape of the letter U, contiguous block two 21B and contiguous block one 21A is that cross is crisscross arranged, be fixedly connected with contiguous block one 21A top bottom contiguous block two 21B, worktable 18 is fixed on X-axis supporting slider 19, contiguous block two 21B top.
As shown in Figure 1, fixing for X-axis moving system and Y-axis moving system two moving systems of substrate 1; On substrate, surrounding is uniformly distributed four tapped holes 7, is connected by four tapped holes and shock insulation worktable.X-axis moving system is made up of the active guide rail movement subtense angle 2 of X-axis and X-axis supporting guide motion subsystem 5; Equally, Y-axis moving system is made up of the active guide rail movement subtense angle 3 of Y-axis and Y-axis supporting guide motion subsystem 6.Utilize the active guide rail movement subtense angle of the active guide rail movement subtense angle of X-axis, X-axis supporting guide motion subsystem, Y-axis and Y-axis supporting guide motion subsystem to fix two-dimensional position detection system 4, two-dimensional position detection system can realize XY In-plane position and measure.
As shown in Figure 2, the active guide rail movement subtense angle of X-axis is made up of stepper motor 8, motor erection support 9, coupling 10, screw mandrel fixed base 11, connecting plate 12, slide block 13, guide rail 14, ball screw 15, screw mandrel annex 16 and screw mandrel supporting base 17.Motor erection support is used for fixing stepper motor; By coupling, stepper motor and ball screw are in transmission connection; Connecting plate is used for slide block and is connected with screw mandrel annex; Slide block and guide rail form kinematic pair; Connecting plate can be driven to move along X-axis direction by driving stepper motor ball screw; In like manner, the active guide rail movement subtense angle of Y-axis forms the active guide rail movement subtense angle with X-axis.
As shown in Figure 3, the supporting guide motion subsystem of Y-axis is made up of connecting plate 12, slide block 13 and guide rail 14; The supporting guide motion subsystem of X-axis forms the supporting guide motion subsystem with Y-axis.Two-dimensional position detection system is made up of worktable 18, X-axis supporting slider 19, X-axis supporting guide 20, contiguous block 21, Y-axis supporting guide 22, Y-axis slide block 23, two-dimensional grating fixed bearing 24, two-dimensional grating 25, read head support 26 and two-dimensional grating read head; X-axis supporting guide two ends are connected with the connecting plate of the active guide rail movement subtense angle of Y-axis and the supporting guide motion subsystem of Y-axis respectively; In like manner, the supporting guide two ends of Y-axis are connected with the connecting plate of the active guide rail movement subtense angle of X-axis and the supporting guide motion subsystem of X-axis respectively; Worktable is connected with X-axis slide block, then contiguous block is connected with worktable, two-dimensional grating fixed bearing and Y-axis slide block respectively; Two-dimensional grating fixed bearing is used for fixing two-dimensional grating; By read head support, two-dimensional grating read head is fixed; More than can form two-dimensional position detection system.
The present invention includes X-axis moving system, Y-axis moving system and movement position detection system, X and Y-axis moving system comprise two secondary guide rails respectively, two width guide rail one pairs are active guide rail, an other pair is supporting guide, initiatively guide rail is made up of with screw mandrel rotary actuation slide block stepper motor, and supporting guide drives the slide block on supporting guide to realize by active guide rail; Initiatively connected by a root connection guide rail between guide rail and supporting guide.X and Y-axis moving system are connected with substrate respectively, avoid two moving system stacked structure in XY precisely locating platform in the past.In X and Y-axis moving system, by a criss-crossing formula slide block, two two connection guide rails are connected, a worktable is installed in criss-crossing formula upper end of slide block face, a 100(mm is installed in lower end surface) × 100(mm) square connecting plate, square connecting plate is the scale for fixing two-dimensional grating encoder.Staggered form slide block movement can drive the scale motion of two-dimensional grating encoder.The read head of two-dimensional grating encoder is connected with substrate by read head support, and read head support need be arranged on the central position of substrate to ensure that the reading of the central motion of encoder to grating reading head during substrate center position is just for the central position of encoder.As shown in Figure 4, the central position of two-dimensional grating is as the initial point of XY precisely locating platform; When X-axis moving system and the work of Y-axis moving system, worktable can be driven to move in XY plane; Detected the position coordinate of concrete motion by two-dimensional grating simultaneously
.
Claims (3)
1. an XY precisely locating platform, include substrate, it is characterized in that: along X to the active guide rail movement subtense angle and the supporting guide motion subsystem that are provided with the X-axis be parallel to each other on substrate, the active guide rail movement subtense angle of X-axis, between the supporting guide motion subsystem of X-axis side substrate on the active guide rail movement subtense angle of Y-axis is installed along Y-direction, the active guide rail movement subtense angle of X-axis, between the supporting guide motion subsystem of X-axis opposite side substrate on the supporting guide motion subsystem of Y-axis is installed along Y-direction, and the active guide rail movement subtense angle of X-axis is identical with the active guide rail movement subsystem structure of Y-axis, the supporting guide motion subsystem of X-axis is identical with the supporting guide motion subsystem structure of Y-axis,
Active guide rail movement subtense angle on each direction comprises respectively and to be arranged on substrate and along the screw mandrel fixed base of direction, place word order, screw mandrel supporting base, screw mandrel fixed base, ballscrew nut fitting is supported with along direction, place between screw mandrel supporting base, the substrate of ballscrew nut fitting both sides is provided with guide rail along direction, place respectively, guide rail is slidably fitted with slide block respectively, connecting plate is installed with between two slide blocks, be fixedly connected with nut in ballscrew nut fitting bottom connecting plate, screw mandrel fixed base is provided with stepper motor, the output shaft of stepper motor is in transmission connection by ball screw one end in coupling and ballscrew nut fitting,
Supporting guide motion subsystem on each direction comprises two guide rails be arranged on along direction, place on substrate respectively, and two guide rails are separately installed with slide block, is connected between two guide rail top slide blocks by connecting plate, two-dimensional position detection system is by X-axis supporting guide, X-axis supporting slider, Y-axis supporting guide, Y-axis supporting slider, worktable, two-dimensional grating fixed bearing, two-dimensional grating, read head support, two-dimensional grating read head is formed, wherein Y-axis supporting guide two ends to be separately fixed in the supporting guide motion subsystem of connecting plate and X-axis in the active guide rail movement subtense angle of X-axis on connecting plate, Y-axis supporting slider is slidably mounted on Y-axis supporting guide, described two-dimensional grating fixed bearing is fixed on bottom Y-axis supporting slider, two-dimensional grating read head is fixed on two-dimensional grating fixed bearing bottom surface by read head support, described X-axis supporting guide is erected at above Y-axis supporting slider, and X-axis supporting guide two ends to be separately fixed in the supporting guide motion subsystem of connecting plate and Y-axis in the active guide rail movement subtense angle of Y-axis on connecting plate, X-axis supporting slider is slidably mounted on X-axis supporting guide, be fixedly connected with Y-axis supporting slider top bottom X-axis supporting slider, described worktable is fixed on X-axis supporting slider top.
2. a kind of XY precisely locating platform according to claim 1, it is characterized in that: described stepper motor is arranged on screw mandrel fixed base by motor erection support, stepper motor is in transmission connection by ball screw one end in coupling and ballscrew nut fitting.
3. a kind of XY precisely locating platform according to claim 1, it is characterized in that: described Y-axis supporting slider is inverted U-shaped, and Y-axis supporting slider is slidably mounted on Y-axis supporting guide by U-shaped mouth, on Y-axis supporting slider, fixed cover is connected to the contiguous block one in inverted U-shape, and described two-dimensional grating fixed bearing is fixed on bottom Y-axis supporting slider, contiguous block one; Described X-axis supporting slider is inverted U-shaped, and X-axis supporting slider is slidably mounted on X-axis supporting guide by U-shaped mouth, on X-axis supporting slider, fixed cover is connected to the contiguous block two taken the shape of the letter U, described contiguous block two is crisscross arranged in cross with contiguous block one, be fixedly connected with contiguous block one top bottom contiguous block two, described worktable is fixed on X-axis supporting slider, contiguous block two top.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510926890.3A CN105443930A (en) | 2015-12-10 | 2015-12-10 | XY precision positioning platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510926890.3A CN105443930A (en) | 2015-12-10 | 2015-12-10 | XY precision positioning platform |
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| CN105443930A true CN105443930A (en) | 2016-03-30 |
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| CN201510926890.3A Pending CN105443930A (en) | 2015-12-10 | 2015-12-10 | XY precision positioning platform |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106742516A (en) * | 2017-01-12 | 2017-05-31 | 苏州布德机电设备有限公司 | A kind of electrical equipment transports device safely |
| CN108150887A (en) * | 2017-12-21 | 2018-06-12 | 董桂芳 | A kind of precision stage based on LED light source |
| CN109268650A (en) * | 2018-09-21 | 2019-01-25 | 哈尔滨理工大学 | A kind of equipment mounting height requirement identification apparatus |
| CN110076734A (en) * | 2019-05-20 | 2019-08-02 | 青岛理工大学 | Pneumatic bellows drive ultraprecise two-dimensional localization platform |
| CN110986792A (en) * | 2019-12-13 | 2020-04-10 | 合肥工业大学 | High-precision detection device and detection method for one-dimensional ball or cone nest array |
| CN112004068A (en) * | 2020-09-11 | 2020-11-27 | 合肥创兆电子科技有限公司 | Intelligent invigilating system with three-dimensional dimension structure |
| CN112192044A (en) * | 2020-10-10 | 2021-01-08 | 佛山市宏石激光技术有限公司 | Laser cutting method |
| CN113523652A (en) * | 2021-05-18 | 2021-10-22 | 小虫智能电器(常熟)有限公司 | Copper strip double-side composite welding device |
| CN114279338A (en) * | 2021-12-24 | 2022-04-05 | 北京华卓精科科技股份有限公司 | Reading head installation tool, integration method thereof and reading head installation method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106742516B (en) * | 2017-01-12 | 2018-06-05 | 苏州布德机电设备有限公司 | A kind of electrical equipment transports device safely |
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| CN108150887A (en) * | 2017-12-21 | 2018-06-12 | 董桂芳 | A kind of precision stage based on LED light source |
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| CN110076734A (en) * | 2019-05-20 | 2019-08-02 | 青岛理工大学 | Pneumatic bellows drive ultraprecise two-dimensional localization platform |
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| CN112004068B (en) * | 2020-09-11 | 2022-04-29 | 合肥创兆电子科技有限公司 | Intelligent invigilating system with three-dimensional dimension structure |
| CN112192044A (en) * | 2020-10-10 | 2021-01-08 | 佛山市宏石激光技术有限公司 | Laser cutting method |
| CN113523652A (en) * | 2021-05-18 | 2021-10-22 | 小虫智能电器(常熟)有限公司 | Copper strip double-side composite welding device |
| CN113523652B (en) * | 2021-05-18 | 2023-11-14 | 小虫智能电器(常熟)有限公司 | Copper strip double-side composite welding device |
| CN114279338A (en) * | 2021-12-24 | 2022-04-05 | 北京华卓精科科技股份有限公司 | Reading head installation tool, integration method thereof and reading head installation method |
| CN114279338B (en) * | 2021-12-24 | 2024-04-26 | 北京华卓精科科技股份有限公司 | Reading head mounting tool, integration method thereof and reading head mounting method |
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