CN210773947U - Non-contact valve plate flatness detection device - Google Patents
Non-contact valve plate flatness detection device Download PDFInfo
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- CN210773947U CN210773947U CN201921650391.6U CN201921650391U CN210773947U CN 210773947 U CN210773947 U CN 210773947U CN 201921650391 U CN201921650391 U CN 201921650391U CN 210773947 U CN210773947 U CN 210773947U
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- guide rail
- direction guide
- valve plate
- control module
- rotary table
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Abstract
The utility model discloses a non-contact valve plate flatness detecting device. The utility model discloses a X is fixed on the portal frame crossbeam to the guide rail, Z is fixed on X is to guide rail slider to the guide rail, laser displacement sensor is fixed on the Z is to guide rail slider, make laser displacement sensor adjustable to measuring the optimum distance, and measurable quantity not co-altitude work piece, the valve plate is arranged in on the air supporting revolving stage, remove X to guide rail slider, change laser displacement sensor to central distance, through air supporting revolving stage rotation measurement a week 12 points, measure two weeks after, survey and pass to the computer, carry out the cross criterion fitting plane of error compensation and minimum contained region method by the application, the calculation obtains final plane degree error value, show on the display screen. The utility model discloses can accomplish the plane degree automatically and detect, can obtain more data, can the accurate reflection by survey work piece actual surface, and do not have gauge head wear error.
Description
Technical Field
The utility model relates to a detection device suitable for flatness measurement, in particular to valve plate flatness measurement's detection device suitable for non-contact.
Background
The valve plate is an important part in a hydraulic system of the excavator, and the flatness of the valve plate can influence the power consumption and the service life of the hydraulic system, so that the normal work of the excavator is influenced. In order to prevent the flow distribution plate with poor flatness from flowing into the subsequent assembly production of the excavator to cause the excavator to be incapable of working normally, the flow distribution plate needs to be subjected to strict flatness detection when leaving a factory.
At present, related enterprises mainly finish the detection of the planeness of the port plate by manually operating a dial indicator, the bottom of an indicator rod of the dial indicator is firstly pressed against the port plate, an indicator value of the dial indicator is read, the position of the dial indicator is manually moved, the indicator value of the dial indicator is read again, a plurality of dial indicator values are obtained by measuring for many times, a detection result is transmitted to a computer, and the planeness is evaluated. With the increasingly complicated shapes of the valve plates and the rapid development of science and technology, in practical application, higher updating requirements are provided for flatness detection of the valve plates, and even flatness errors are required to reach 5 micrometers, so that production enterprises are required to detect each valve plate, however, the traditional detection method is low in efficiency, high in labor intensity of workers, prone to errors due to visual fatigue after long-term work, and the measuring head is worn after long-term use, needs to be corrected regularly, and is poor in detection result reliability, and the requirements of purchasers on product quality inspection and the requirements of enterprise transformation development cannot be met.
Therefore, it is very important to develop a set of device capable of performing non-contact automatic flatness detection on the flatness error of the valve plate, and the device needs to rapidly complete flatness detection of the valve plate and store the detection result into a database, thereby improving and perfecting the product quality detection capability and quality tracing management system of enterprises.
Disclosure of Invention
To the background art not enough, the utility model aims to provide a detection device for valve plate plane degree detects.
The utility model provides a technical scheme that its technical problem adopted is: the utility model provides a detection device includes mobile control module, detection module, laboratory bench and support frame module and data processing and display module, mobile control module includes air supporting revolving stage control module, X to guide rail control module and Z to guide rail control module.
The gantry and the air-floating rotary table are arranged on the marble table, the valve plate is arranged in the center of the air-floating rotary table and fixed by a fixing pin, the X-direction guide rail is fixed on the gantry, the Z-direction guide rail is fixed on the X-direction guide rail sliding block, the Z-direction guide rail slides along with the X-direction guide rail sliding block, and the laser displacement sensor is installed on a Z-direction guide rail connecting plate and slides up and down along with the Z-direction guide rail sliding block through a Z-direction motor and a Z-direction coupler. The industrial personal computer controls the corresponding motor by controlling the motion control card so as to control the motion of the X-direction guide rail, the Z-direction guide rail and the air floatation rotary table.
The end jump of the control module of the air-floating rotary table is less than 250nm, and the measurement precision is less than 2.5 mu m. The X-direction guide rail control module is used for changing the central distance of a sensor of the non-contact valve plate flatness detection device relative to the air floatation rotary table, so that the device can measure workpieces to be measured with different radiuses. The Z-direction guide rail control module is used for changing the vertical distance between a sensor of the non-contact type valve plate flatness detection device and the air floatation rotary table, so that the workpiece to be detected is positioned at the optimal position for displacement measurement of the sensor, and the Z-direction guide rail control module can adapt to workpieces to be detected with different thicknesses.
The detection module, namely the laser displacement sensor, is used for collecting data points of the non-contact valve plate flatness detection device, so that the abrasion of a traditional contact sensor measuring head in the measurement process is avoided, the abrasion error of the measuring head is introduced, a large number of data points can be obtained, and the surface flatness condition of the measured workpiece is accurately reflected. The utility model discloses the sensor accuracy can reach 0.2 mu m for use to the device, and repeatability is about 0.2 mu m, satisfies valve plate plane degree error less than or equal to 5 mu m.
The experiment table and support frame module comprises an experiment cabinet and a portal frame, wherein the experiment cabinet is used for mounting the portal frame, the air floatation rotary table and the display device; the portal frame is used for supporting the X-direction guide rail, the Z-direction guide rail and the laser displacement sensor. The portal frame adopts the triangle-shaped structure, multiplicable device stability. The utility model discloses the device is beaten equidistant hole of a plurality of on the crossbeam, and X is to the guide rail easy to assemble.
And the data processing and displaying module is used for carrying out error correction and flatness error evaluation after the data measurement of the non-contact valve plate flatness detection device, and displaying the final flatness error result on a computer.
Compared with the background art, the beneficial effects of the utility model are that:
the utility model discloses well adoption point laser displacement sensor detects the plane degree size of valve plate, carries out non-contact measurement, avoids the error that gauge head wearing and tearing introduced, and laser displacement detection precision can reach 0.2 mu m.
The utility model discloses in adopt the air supporting revolving stage, measuring range is
The end jump is less than 250nm, the air-floating rotary table adopts a servo motor, the speed stability of the motor is high, the motion error is small, the stability and the precision are high, the precision of a rotary encoder is high, the structural design is compact, and no mechanical contact exists.
The utility model discloses in through the slider position that changes Z to the guide rail, can measure the work piece of being surveyed of different thickness, practical application is wider.
The utility model discloses a rotatory and X of air supporting revolving stage changes to guide rail slider position, can adapt to the measured work piece of different diameters size, and can obtain more data, and measurement accuracy is higher, and practical application is wider, and more accurate reflection is surveyed surface flatness actual conditions.
The invention can improve the precision by calibrating the laser displacement sensor and compensating the parallelism error of the X-direction guide rail and the air-floating rotary table.
Drawings
Fig. 1 is a three-dimensional structure diagram of the non-contact valve plate flatness detecting device of the present invention.
Fig. 2 is a diagram of the mobile control module according to the present invention.
Fig. 3 is a structural diagram of the detection module of the present invention.
Fig. 4 is a structure diagram of the experiment table and the supporting frame module of the present invention.
Fig. 5 is a cloth point diagram of the present invention.
Fig. 6 is a software algorithm block diagram of the present invention.
Fig. 7 is a schematic diagram of the compensation of the laser displacement sensor according to the present invention.
Fig. 8 is a schematic diagram of the compensation of the parallelism error between the X-directional guide rail and the air-floating rotary table of the present invention.
Fig. 9 is a flowchart of the flatness error compensation calculation of the present invention.
Fig. 10 is a tracing path diagram of the present invention.
Detailed Description
As shown in fig. 1 and 2, the port plate 9 is placed on the air-bearing turntable 5, the gantry 4 and the air-bearing turntable 5 are placed on the marble table 2, the X-guide rail is fixed on the gantry, the Z-guide rail is fixed on the X-guide rail slider 13, the Z-guide rail 7 slides along with the X-guide rail slider 13, and the laser displacement sensor 8 is mounted on the Z-guide rail connecting plate 16 and slides up and down along with the Z-guide rail slider 16 through the Z-motor 14 and the Z-coupling 15. The industrial personal computer 3 controls the corresponding motors 10 and 14 through controlling the motion control card, and further controls the motion of the X-direction guide rail, the Z-direction guide rail and the air floatation rotary table.
As shown in FIG. 3, the laser displacement sensor has a general structure as shown in the figure, and the measurement accuracy is 0.2 μm.
As shown in fig. 4, the experiment table and support frame module is composed of a marble table 2 and a portal frame 4, and the portal frame 4 is composed of a beam 22, a column 23, an oblique column 24 and a connecting piece 25. The positioning holes on the cross beam 22 are used for fixing the X-direction guide rail 6, the upright 23 and the batter post 24 form a triangular structure to increase stability, and the connecting piece 25 is used for fixing the upright and the batter post.
As shown in fig. 5, the present invention measures two circles, measuring one point every 30 °. The Z-direction guide rail sliding block 16 is moved to a proper position firstly, so that the laser displacement sensor reaches the optimal measuring position, the X-direction guide rail sliding block 13 is moved to the first circular ring, the air-floating rotary table starts to rotate for a circle, 12 points are measured, then the position of the Z-direction guide rail sliding block 16 is unchanged, the X-direction guide rail sliding block 13 is moved to the second circular ring, which is equivalent to changing the measuring radius, and the air-floating rotary table 5 starts to rotate for a circle, and 12 values are measured similarly.
As shown in fig. 6, the software needs to judge the rotation times of the air-floating turntable, judge the moving times of the X-direction guide rail and display the flatness error result. The first step, after opening the flatness detection device, starting initialization, the contents to be initialized include: initializing n and i values, initializing ports, initializing ADC configuration and initializing display screen parameters. Reading the value n, judging whether the value is smaller than a set threshold value, if so, indicating that the air floatation rotary table does not rotate for one circle, continuing to measure, and rotating the air floatation rotary table; otherwise, if the value is equal to the set threshold value, it indicates that the air-floating rotary table has just rotated one circle, the X-direction guide rail needs to be moved to a specified position, and then the measurement and the rotation of the air-floating rotary table are performed. When the X-direction guide rail moves once, the X-direction guide rail does not move any more, and only the rotation of the air-floating rotary table and the data measurement are carried out. Judging the value of i to judge whether the flatness detection device finishes the measurement, if i is less than 2, the measurement is not finished, and continuing to execute; and otherwise, calculating the flatness error, and displaying the final calculated value on a display after calculation. The procedure can only be displayed once and needs to be reinitialized if measurements are to be taken again.
As shown in FIG. 7, when calibrating the laser displacement sensor, the standard gauge block 1 is first placed on the air-float turntable, and the laser displacement sensor initially reads X1Then, the standard gauge block 2 is ground on the standard gauge block 1, and the standard height of the standard gauge block 2 is h1At this time, the reading of the laser displacement sensor is X2. Then the reading X is compared to the initial displacement1The amount of change in displacement is X2-X1Is recorded as Δ1. Then the standard gauge block 2 is taken down, the standard gauge block 3 is ground on the standard gauge block 1, and the standard height of the standard gauge block 3 is h2At this time, the reading of the laser displacement sensor is X3. Then the reading X is compared to the initial displacement1The amount of change in displacement is X3-X1Is recorded as Δ2. Comparing the standard values of the standard gauge blocks 2 and 3 and the displacement reading variation of the laser displacement sensor by the standard gauge blocks, and calibrating the displacement sensor by a two-point calibration method (delta)1,h1)，(Δ2,h2) Obtaining sensor readingsx and the standard value h.
As shown in fig. 8, when the parallelism error between the X-directional guide rail and the air-floating turntable is calibrated, the laser sensor is moved along the guide rail to measure the distance from the standard flat crystal, the distance measured at the first ring is taken as a zero reference line to obtain the relative error value Δ H between the measured values of the second ring and the first ring, and the parallelism error between the X-directional guide rail and the air-floating turntable is compensated by using Δ H.
ΔH＝H2-H1
As shown in FIG. 9, in the measurement, first, the value m of each point is measured from the distribution diagram1，m2,…,m12,n1,n2,…,n12Then compensating the value of each point on the second ring by the error delta H of the parallelism of the X-direction guide rail and the air-floating rotary table to obtain m1，m2,…,m12,n1-ΔH,n2-ΔH,…,n12- Δ H, fitting the plane by a minimum containment region method after compensation to obtain a difference Δ m between each point and the fitted plane1，Δm2,…,Δm12,Δn1,Δn2,…,Δn12Substituting the difference into the compensation relation of the error of the digital display dial indicator to obtain a corresponding difference f1,f2,…f12,f13,f14,…,f24Then find the maximum value f of the differencemaxAnd minimum value fminBy the formula f ═ fmax-fminAnd obtaining a compensated flatness error value.
Right the utility model discloses laser displacement sensor, portal frame and the guide rail that use in the device carry out periodic calibration to can make valve plate plane degree testing result trace to the national length benchmark.
The above, only be the utility model discloses a preferred embodiment, it is not right the utility model discloses do any restriction, all according to the utility model discloses the technical entity all still belongs to any simple modification, change and the equivalent structure change of doing above embodiment the utility model discloses technical scheme's within the scope of protection.
Claims (5)
1. A non-contact valve plate flatness detection device is characterized in that: the device comprises a movement control module, a detection module, an experiment table, a support frame module and a data processing and displaying module, wherein the movement control module comprises an air-floating turntable control module, an X-direction guide rail control module and a Z-direction guide rail control module; the experiment table and support frame module comprises an experiment cabinet and a portal frame; the detection module is a laser displacement sensor; the gantry and the air-floating rotary table are arranged on the marble table, the valve plate is arranged in the center of the air-floating rotary table and fixed by a fixing pin, the X-direction guide rail is fixed on the gantry, the Z-direction guide rail is fixed on the X-direction guide rail sliding block, and the Z-direction guide rail slides along with the X-direction guide rail sliding block; the laser displacement sensor is installed on the Z-direction guide rail connecting plate and slides up and down along with the Z-direction guide rail sliding block through the Z-direction motor and the Z-direction coupler, and the industrial personal computer controls the corresponding motor through the control motion control card so as to control the motion of the X-direction guide rail, the Z-direction guide rail and the air flotation rotary table.
2. The non-contact type port plate flatness detecting apparatus according to claim 1, wherein: the end jump of the control module of the air-floating rotary table is less than 250nm, and the measurement precision is less than 2.5 mu m; the X-direction guide rail control module is used for changing the central distance of a sensor of the non-contact valve plate flatness detection device relative to the air floatation rotary table, so that the device can measure workpieces to be measured with different radiuses; the Z-direction guide rail control module is used for changing the vertical distance between a sensor of the non-contact type valve plate flatness detection device and the air floatation rotary table, so that the workpiece to be detected is positioned at the optimal position for displacement measurement of the sensor, and the Z-direction guide rail control module can adapt to workpieces to be detected with different thicknesses.
3. The non-contact type port plate flatness detecting apparatus according to claim 1, wherein: the laser displacement sensor is used for collecting data points of the non-contact valve plate flatness detection device, so that the abrasion of a traditional contact sensor measuring head in the measurement process is avoided, the measuring head abrasion error is introduced, a large number of data points can be obtained, and the surface flatness condition of a measured workpiece is accurately reflected; the precision of the sensor selected by the device can reach 0.2 mu m, the repetition precision is about 0.2 mu m, and the flatness error of the valve plate is less than or equal to 5 mu m.
4. The non-contact type port plate flatness detecting apparatus according to claim 1, wherein: the experimental cabinet is used for installing a portal frame, an air floatation rotary table and a display device; the portal frame is used for supporting the X-direction guide rail, the Z-direction guide rail and the laser displacement sensor, and the portal frame adopts a triangular structure, so that the stability of the device can be improved; the device is provided with a plurality of equidistant holes on the cross beam, and the X-direction guide rail is convenient to install.
5. The non-contact type port plate flatness detecting apparatus according to claim 1, wherein: and the data processing and displaying module is used for evaluating flatness errors after data measurement of the non-contact valve plate flatness detection device and displaying the final flatness error result on a computer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921650391.6U CN210773947U (en) | 2019-09-29 | 2019-09-29 | Non-contact valve plate flatness detection device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921650391.6U CN210773947U (en) | 2019-09-29 | 2019-09-29 | Non-contact valve plate flatness detection device |
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| CN210773947U true CN210773947U (en) | 2020-06-16 |
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| CN201921650391.6U Expired - Fee Related CN210773947U (en) | 2019-09-29 | 2019-09-29 | Non-contact valve plate flatness detection device |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110530302A (en) * | 2019-09-29 | 2019-12-03 | 中国计量大学 | Contactless valve plate flatness checking device and method |
| CN111829462A (en) * | 2020-07-24 | 2020-10-27 | 重庆浯天电子科技有限公司 | Flatness detection equipment and detection method thereof |
| CN112066900A (en) * | 2020-09-16 | 2020-12-11 | 江西财经大学 | Distance measuring device |
-
2019
- 2019-09-29 CN CN201921650391.6U patent/CN210773947U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110530302A (en) * | 2019-09-29 | 2019-12-03 | 中国计量大学 | Contactless valve plate flatness checking device and method |
| CN111829462A (en) * | 2020-07-24 | 2020-10-27 | 重庆浯天电子科技有限公司 | Flatness detection equipment and detection method thereof |
| CN111829462B (en) * | 2020-07-24 | 2022-06-28 | 重庆大泰电子科技有限公司 | Flatness detection device and detection method thereof |
| CN112066900A (en) * | 2020-09-16 | 2020-12-11 | 江西财经大学 | Distance measuring device |
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Granted publication date: 20200616 Termination date: 20210929 |
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