CN206531473U - Non-contact thickness measuring device - Google Patents
Non-contact thickness measuring device Download PDFInfo
- Publication number
- CN206531473U CN206531473U CN201720247508.0U CN201720247508U CN206531473U CN 206531473 U CN206531473 U CN 206531473U CN 201720247508 U CN201720247508 U CN 201720247508U CN 206531473 U CN206531473 U CN 206531473U
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- CN
- China
- Prior art keywords
- laser displacement
- displacement transducer
- base
- fixed
- rack
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Length Measuring Devices By Optical Means (AREA)
Abstract
The utility model provides a kind of non-contact thickness measuring device of optical element, including base, rail plate, support frame, rack, gear, first laser displacement transducer, objective table, second laser displacement transducer, slide unit and controller, the rail plate is fixed on base, and the slide unit is arranged on rail plate；Support frame as described above is fixed on base, and the rack is arranged on support frame, and first laser displacement transducer is provided with the rack, and the wheel and rack coordinates；The objective table is fixed on slide unit, the second laser displacement transducer is fixed on base, the measurement point of the second laser displacement transducer and first laser displacement transducer is on same vertical curve, and the first laser displacement transducer and second laser displacement transducer are connected with controller respectively.The resolution ratio of the utility model measurement is 0.1 μm, and measurement error is 0.01%, can carry out accurate measurement to the thickness of optical elements of large caliber and other material elements.
Description
Technical field
The utility model is related to a kind of measurer for thickness, more particularly to a kind of non-contact thickness measuring device.
Background technology
Optical element is widely used in device of high power laser and semicon industry, and the Thickness sensitivity of optical element is advanced
An important step in optics manufacturing process, the table of optical element is highly vulnerable to breakage using contact measuring apparatus such as micrometers
Face, and the non-contact measurement apparatus such as laser interference device is complicated, measurement result is easily influenceed by external environment, therefore,
To meet the application demand of advanced optics manufacture, a kind of reliable noncontact, high accuracy (sub-micron) measurer for thickness and side
Method is necessary, to meet the demand in terms of the control of element removal amount and depth of parallelism correction.
Utility model content
Technical problem to be solved in the utility model is to provide a kind of non-contact thickness measuring device of optical element,
Quick, high-precision thickness measure can be carried out to optical element.
The utility model solves the technical scheme that is used of technical problem：Non-contact thickness measuring device, including bottom
Seat, rail plate, support frame, rack, gear, first laser displacement transducer, objective table, second laser displacement transducer, cunning
Platform and controller, the rail plate are fixed on base, and the slide unit is arranged on rail plate, and can be along rail plate
Move left and right；Support frame as described above is fixed on base, and the rack is arranged on support frame, and first is provided with the rack and is swashed
Optical displacement sensor, the wheel and rack coordinates, and is moved by swing pinion band carry-over bar, so as to drive first laser displacement
Sensor is moved up and down；The objective table is fixed on slide unit, and the second laser displacement transducer is fixed on base, described
The measurement point of second laser displacement transducer and first laser displacement transducer is on same vertical curve, the first laser displacement
Sensor and second laser displacement transducer are connected with controller respectively.
Further, the placement region of the objective table is provided with three minute protrusions, makes detected element in placement
Contacted for.
Further, the second laser displacement transducer is measured to the lower surface of detected element, and described first swashs
Optical displacement sensor is measured to the upper surface of detected element.
Further, it is additionally provided with handle on the slide unit.
Further, the rail plate is fixed by screws on base, and the objective table is fixed by screws in cunning
On platform.
Further, the base is placed on the stationary platform.
The beneficial effects of the utility model are：The utility model, can by about two opposed laser displacement sensors
Fast and easy, lossless contactless thickness measure are carried out to optical element, measured and simple to operate, it is reproducible, to light
The surface of element and sub-surface quality control and the raising of processing efficiency are significant.Point of the utility model measurement
Resolution is 0.1 μm, and measurement error is 0.01%, while the utility model device can be also extended, passes through combined high precision two
Mobile platform is tieed up, accurate measurement can be carried out to the thickness of optical elements of large caliber and other material elements.
Brief description of the drawings
Fig. 1 is structural representation of the present utility model.
Fig. 2 is Fig. 1 top view.
Fig. 3 is Fig. 1 side view.
Embodiment
As Figure 1-3, non-contact thickness measuring device of the present utility model includes base 1, rail plate 2, support
Frame 3, rack 4, gear 5, first laser displacement transducer 6, objective table 8, second laser displacement transducer 10, slide unit 11 and control
Device.The base 1 is placed on the stationary platform, and the rail plate 2 is fixed by screws on base 1, and the slide unit 11 is set
Put on rail plate 2, and can be moved left and right along rail plate 2；Support frame as described above 3 is fixed on base 1, the rack 4
It is arranged on support frame 3, first laser displacement transducer 6 is installed on the rack 4, the gear 5 coordinates with rack 4, leads to
The manual outer end of swing pinion 5 is crossed, the movement of rack 4 can be achieved, so as to drive first laser displacement transducer 6 to move up and down；Institute
State objective table 8 to be fixed by screws on slide unit 11, during work, detected element 7 is placed on objective table 8, and in objective table 8
The placement region of detected element 7 is provided with three minute protrusions, and it is point contact condition to make detected element 7 in placement, works as slide unit
11 along rail plate 2 move left and right when, can drive be placed on objective table 8 detected element 7 carries out left and right translation, thus
Thickness at the measurable diverse location of detected element 7；The second laser displacement transducer 10 is fixed on base 1, and second swashs
Optical displacement sensor 10 and first laser displacement transducer 6 are in opposed arrangement up and down so that second laser displacement transducer 10 with
The measurement point of first laser displacement transducer 6 is on same vertical curve；The first laser displacement transducer 6 and second laser position
Displacement sensor 10 is connected with controller respectively, and the lower surface of detected element 7 is carried out using second laser displacement transducer 10
Measurement, is obtained displacement S1, the upper surface of detected element 7 is measured using first laser displacement transducer 6, displacement is obtained
S2, then the thickness of detected element 7 is h=S1+S2+C, and the C is for compensation offset, it is necessary to be demarcated when measuring first.
Push-and-pull slide unit 11, handle 12 is additionally provided with above-mentioned slide unit 11 for convenience, passes through the band of Manual push-pull handle 12
Dynamic slide unit 11 is moved left and right along rail plate 2.
Measuring method of the present utility model comprises the following steps：
1) first laser displacement transducer 6 and second laser displacement transducer 10 are opened, by first laser displacement transducer 6
It is connected respectively with controller with second laser displacement transducer 10, second laser displacement transducer 10 is passed with first laser displacement
The measurement point of sensor 6 is on same vertical curve；
2) thickness of any article is measured using high-precision spiral micrometer, obtains absolute measured value, the article
1mm is cannot be greater than with the thickness difference of detected element 7, then the article is placed on objective table 8, the relative measurement of the article is measured
Value；Or the direct calibrated bolck of known thickness (absolute measured value) is placed on objective table 8 measures, and obtains the phase of the calibrated bolck
To measured value；
3) calculate and be compensated offset C=absolute measured values-relative measurement, and the amount of compensating is set in the controller
Put；
4) detected element 7 is placed on objective table 8 and measured, now the numerical value of controller display window is tested
The actual (real) thickness of element 7, when carrying out duplicate measurements to detected element 7, keeps first laser displacement transducer 6 and second laser
The position of displacement transducer 10 is fixed, then it is also fixed value to compensate offset C, it is not necessary to calibration compensation offset C again, can be straight
Tap into row reading.
In measurement process, when the thickness of detected element 7 has larger change, it is necessary to which swing pinion 5 is tested first to adapt to
Part 7, now needs to re-scale compensation offset C.
Contactless measurement of the utility model based on laser displacement sensor, passes through about two opposed laser
Displacement transducer, can carry out quick accurate thickness measure to optical element, and measurement process will not be damaged to element surface,
Measurement process is simple, reliable, and the resolution ratio of measurement is 0.1 μm, and the error of measurement result is 0.016%.In addition, the utility model
Device can be extended, by combined high precision two-dimensional movement platform, can be to optical elements of large caliber and other material elements
Thickness carries out accurate measurement.
Claims (6)
1. non-contact thickness measuring device, it is characterised in that：Including base (1), rail plate (2), support frame (3), rack
(4), gear (5), first laser displacement transducer (6), objective table (8), second laser displacement transducer (10), slide unit (11) and
Controller, the rail plate (2) is fixed on base (1), and the slide unit (11) is arranged on rail plate (2), and can edge
Rail plate (2) to move left and right；Support frame as described above (3) is fixed on base (1), and the rack (4) is arranged on support frame (3)
On, first laser displacement transducer (6) is installed, the gear (5) coordinates with rack (4), passes through rotation on the rack (4)
Gear (5) band carry-over bar (4) is mobile, so as to drive first laser displacement transducer (6) to move up and down；The objective table (8) is solid
It is scheduled on slide unit (11), the second laser displacement transducer (10) is fixed on base (1), the second laser displacement sensing
The measurement point of device (10) and first laser displacement transducer (6) is on same vertical curve, the first laser displacement transducer (6)
It is connected respectively with controller with second laser displacement transducer (10).
2. non-contact thickness measuring device as claimed in claim 1, it is characterised in that：Placement in the objective table (8)
Region is provided with three minute protrusions, and it is point contact to make detected element (7) in placement.
3. non-contact thickness measuring device as claimed in claim 1, it is characterised in that：The second laser displacement transducer
(10) lower surface of detected element (7) is measured, the first laser displacement transducer (6) is to the upper of detected element (7)
Surface is measured.
4. non-contact thickness measuring device as claimed in claim 1, it is characterised in that：Also set up on the slide unit (11)
There is handle (12).
5. non-contact thickness measuring device as claimed in claim 1, it is characterised in that：The rail plate (2) passes through spiral shell
Nail is fixed on base (1), and the objective table (8) is fixed by screws on slide unit (11).
6. non-contact thickness measuring device as claimed in claim 1, it is characterised in that：The base (1) is placed on fixation
On platform.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720247508.0U CN206531473U (en) | 2017-03-14 | 2017-03-14 | Non-contact thickness measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720247508.0U CN206531473U (en) | 2017-03-14 | 2017-03-14 | Non-contact thickness measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206531473U true CN206531473U (en) | 2017-09-29 |
Family
ID=59914665
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720247508.0U Expired - Fee Related CN206531473U (en) | 2017-03-14 | 2017-03-14 | Non-contact thickness measuring device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206531473U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108942539A (en) * | 2018-09-19 | 2018-12-07 | 中国工程物理研究院激光聚变研究中心 | A kind of high-frequency vibration processing unit (plant) and annular polishing machine |
| CN109520435A (en) * | 2018-12-26 | 2019-03-26 | 延锋汽车内饰系统（上海）有限公司 | A kind of damage-free measuring apparatus and its non-destructive measuring method for epidermis |
| CN112837998A (en) * | 2021-02-05 | 2021-05-25 | 福建晶安光电有限公司 | Substrate processing method and device |
-
2017
- 2017-03-14 CN CN201720247508.0U patent/CN206531473U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108942539A (en) * | 2018-09-19 | 2018-12-07 | 中国工程物理研究院激光聚变研究中心 | A kind of high-frequency vibration processing unit (plant) and annular polishing machine |
| CN109520435A (en) * | 2018-12-26 | 2019-03-26 | 延锋汽车内饰系统（上海）有限公司 | A kind of damage-free measuring apparatus and its non-destructive measuring method for epidermis |
| CN112837998A (en) * | 2021-02-05 | 2021-05-25 | 福建晶安光电有限公司 | Substrate processing method and device |
| CN112837998B (en) * | 2021-02-05 | 2023-08-25 | 福建晶安光电有限公司 | Substrate processing device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170929 Termination date: 20210314 |