CN101788271A - Method and device for measuring thickness of the center of confocal lens - Google Patents
Method and device for measuring thickness of the center of confocal lens Download PDFInfo
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Abstract
The invention belongs to the technical field of optical precision measurement, relating to a method and a device for measuring the thickness of the center of a confocal lens. The method comprises the following steps of: first respectively determining the positions of the front surface vertex and the back surface vertex of a lens according to the confocal focusing principle; obtaining first two position coordinates of locations by confocal measurement; and calculating the thickness of the center of the lens by utilizing the ray tracing formula. Meanwhile, an annular pupil is introduced to a measurement optical path to block paraxial rays and form a hollow measuring light cone, thereby reducing the effect of aberration on measurement results. The device comprises a light dividing system, an objective lens, a confocal system, a length measurement system and a movable guideway, wherein the light dividing system, the objective lens and the measured lens are sequentially arranged in the direction of emergent ray of a collimation light source; and the confocal system is arranged in the reflection direction of the light dividing system. The surface of the measured lens and the light dividing system reflect light to the confocal system and cooperate with the confocal system to realize accurate positioning of the front surface vertex and the back surface vertex of the measured lens, so that non-contact precision measurement of the thickness of the center of the lens is realized.
Description
Technical field
The invention belongs to technical field of optical precision measurement, the contactless high-precision that can be used for lens center thickness is measured.
Technical background
In optical field, the measurement of lens center thickness is significant.Lens center thickness is an important parameter in the optical system, and the quality of its crudy can produce considerable influence to the image quality of optical system.Particularly, need carry out accurate adjustment to end play, radial deflection and the optical axis drift angle of lens according to radius-of-curvature, refractive index and the center thickness of lens in the camera lens for the lens in photo-etching machine objective lens, the contour performance optical system of camera space.With the photo-etching machine objective lens is example, and the deviation of each simple lens center thickness all can cause the aberration of lithographic objective, influences the image quality of object lens.Widely used at present " digital camera lens " and " CCD scanning lens ", the precision of its lens center thickness is generally several microns, also need high-precision instrument and measure and check, so lens center thickness is that optical element must be examined and one of project of strict control.
At present, the lens center thickness measuring technique can be divided into two kinds of contact type measurement and non-contact measurements.
Contact type measurement, the general use handed clock gauge or miking.During measurement, the accuracy of lens center point position will directly influence measuring accuracy, therefore checker's measured lens that when measuring, will move around, seek peak (convex lens) or minimum point (concave mirror), thereby measuring speed is slow, error is big, and the height that uses at present sees through optical material, material is softer, and gauge head moves at lens surface during measurement, scratches lens surface easily.
At the problem that contact type measurement exists, domestic scholars has also been carried out correlative study.In " the explicit lens thickness measuring instrument of raster count " literary composition of delivering in " practical measuring technology " in 1999, author designed a kind of lens center thickness measuring instrument that is constituted as the precision measurement of length device with grating sensor, according to dissimilar optical lenses and measuring accuracy requirement, can adopt the combination of multi-form gauge head and measuring seat to measure, measuring accuracy is brought up to 1 μ m.(the patent No.: 200620125116.9) that Chinese patent " is measured the device of optics lens center thickness ", adopted in the method for measuring column top placement measured lens smelting tool, the damage that gauge head moves around lens are caused at lens surface when having avoided seeking the lens surface summit.
Non-contact measurement often has image measurement method, coplane capacitance method, the confocal method of white light and interferometric method.
In " based on the fit-up gap Research on on-line-measuring of image measurement technology " literary composition of delivering in " sensor technology " in 2005, introduced a kind of on-line measurement scheme based on image measurement technology, the picture that the gap becomes in ccd video camera by optical system is delivered image measurement software processes and analysis, provide the result by Survey Software.This method also can be applied to the measurement of lens center thickness, but owing to be subjected to the influence of video camera imaging system, CCD resolving power, clear picture degree and calibration coefficient degree of accuracy etc., measuring error is in 15 μ m.
In " optical lens center thickness automatic tester " literary composition of delivering in " Chinese journal of scientific instrument " in 1994, utilize coplane capacitance measurement lens center thickness.What it adopted is the method for relative measurement, promptly at first as requested electric capacity gauge head and reference field is adjusted to a certain fixed range; Then measured lens is placed on the reference field, has the clearance between measured lens and the gauge head, clearance and different gauge head electric capacity that different lens thicknesses is corresponding different; Go out the voltage signal that changes corresponding to electric capacity by circuit measuring at last, just can find out the relative variation of measured lens thickness, the sharpness of separation of the method is less than 5 μ m.But this method needs the signal voltage of known measured lens material and the relation curve of clearance before measuring, and in engineering reality, must accurately test coplane electric capacity gauge head, to obtain authentic data as detecting foundation.
In " Noncontact measurement of central lens thickness " literary composition of in " GLASS SCIENCE AND TECHNOLOGY ", delivering in 2005, adopt the confocal method of white light to measure lens center thickness.The probe that this method at first utilizes behind the white light scioptics axial aberration to form positions the measured lens surface vertices, then the thickness by measured lens upper and lower surface summit spectrum of reflected light information calculations lens.The characteristics of the method are to realize real-time measurement, but white light is an incoherent light, focus sensitivity and resolution is lower, operating distance limited (30 μ m-25mm).Particularly be difficult to the refractive index of accurate known measured lens at the different wave length place, general all is by measuring the refractive index interpolation gained of certain wave strong point, this parameter is bigger to the influence of measurement result, so this method is difficult to realize high-acruracy survey in actual applications.
Chinese patent " optical gauge of optical element the thickness " (patent No.: 87200715), utilize two interference systems that lens center thickness is carried out non-cpntact measurement.This instrument is made up of two Michelson interference systems, position according to two surfaces of white-light fringe measured lens, and with measured lens and calibrated bolck relatively in the hope of the center thickness of measured lens.Can be to balsaming lens, the opaque optical element of visible light, the optical elements of unknown material etc. are realized non-cpntact measurement.But the structure more complicated of this instrument, need to change element in the measuring process, its measuring accuracy not only depends on the bearing accuracy on a plurality of surfaces, also depends on the precision of calibrated bolck known thickness, in order to improve measuring accuracy, need choose the calibrated bolck close simultaneously with measured lens thickness.
Chinese patent " a kind of micro-optics measurement mechanism at interval " (patent No.: 93238743.8), adopt polarized light interference method measuring samples thickness.The incident white light forms interference fringe in two wave fronts that the sample upper and lower surface reflects to form on photodetector array behind polarizer, birefringent prism, analyzer, by the interference fringe spacing get final product thickness of sample.Adding post lens simultaneously between analyzer and photodetector array makes interference pattern obtain amplifying along the fringe spacing direction, reduced requirement to photodetector array, measuring accuracy is 1-5%, but this method only is used to measure the thickness of glass plate at present.
In recent years, the confocal technology fast development in micro-imaging field is both at home and abroad compared with traditional measuring method and to be had good chromatography ability, higher axial location pointing accuracy, stronger environment interference.The present invention utilizes the confocal principle that focuses that lens surface is accurately located, and has realized the measurement of lens center thickness, and it has advantages such as measuring accuracy height, operating distance be long, easy to use.
Summary of the invention
The objective of the invention is to propose a kind of method and apparatus that utilizes confocal technology accurately to measure lens center thickness in order to solve the contactless high-precision problems of measurement of lens center thickness.
The objective of the invention is to be achieved through the following technical solutions.
Confocal lens center thickness measuring method of the present invention may further comprise the steps:
(a) at first, adjust measured lens, make itself and confocal gauge head common optical axis;
(b) then, the confocal gauge head of the confocal light cone of outgoing moves along optical axis direction scanning, and confocal system determines that by the maximum value of probe response signal confocal light cone summit and measured lens front surface summit coincide, and this moment, the position coordinates of confocal gauge head was z
1
(c) confocal gauge head is continued move along optical axis direction scanning, utilize the maximum value of confocal response signal to determine that confocal light cone summit and summit, measured lens rear surface coincide once more, this moment, the position of confocal gauge head was z
2
(d) according to known parameters: the numerical aperture angle α of confocal light cone
0, the measured lens front surface radius-of-curvature r
1, air refraction n
0, measured lens refractive index n and twice location of confocal gauge head amount of movement l=|z
2-z
1|, can be by following formula:
Calculate the center thickness d of measured lens.
Measuring method of the present invention utilizes the method for curve fitting to ask for the maximum value of confocal response signal.
Measuring method of the present invention utilizes annular pupil to block paraxial rays, forms hollow measurement light cone, cuts down the influence of aberration to measurement result.
The invention provides confocal lens center thickness measurement mechanism, comprise collimated light source, it is characterized in that: comprise beam splitting system, object lens, confocal system, length measurement system and moving guide rail; Wherein beam splitting system, object lens and measured lens are successively placed on collimated light source emergent ray direction, confocal system is placed on the beam splitting system reflection direction, measured lens surface with beam splitting system with beam reflection to confocal system, and cooperate confocal system to realize the accurate location on measured lens front surface summit and summit, rear surface; Collimated light source, beam splitting system, object lens and confocal system are common to constitute confocal gauge head, and is installed on the moving guide rail with length measurement system.
Confocal system can be made of lens, pin hole and ccd detector in the measurement mechanism of the present invention; Light enters confocal system after lens converge at the pin hole place, and survey confocal response signal by the ccd detector behind the pin hole.
Confocal system can be made of lens and ccd detector in the measurement mechanism of the present invention; Light enters confocal system after lens are assembled, at the lens focus place by the confocal response signal of ccd detector direct detection.
Confocal system can be made of lens, microcobjective and ccd detector in the measurement mechanism of the present invention; Light enters confocal system after lens and microcobjective at the ccd detector surface imaging, and are surveyed confocal response signal by ccd detector.
Measurement mechanism of the present invention can also comprise annular pupil, is placed between collimated light source and the beam splitting system, forms hollow measurement light cone.
Measurement mechanism of the present invention can also comprise main control computer and electromechanical controlling device; Main control computer obtains confocal response signal; Main control computer controller controller for electric consumption makes it drive confocal gauge head and moves along optical axis direction scanning.
Measurement mechanism of the present invention can also comprise adjustment rack, in order to fixing measured lens and adjust the optical axis of measured lens.
Beneficial effect
The present invention contrasts prior art and has following innovative point:
1. this lens center thickness measuring method utilizes confocal light cone that lens surface is realized the contactless high-precision location, and to the measured lens not damaged, measuring speed is fast, and operating distance is long.
2. in light path, introduce annular pupil, block paraxial rays, form hollow measurement light cone, cut down the influence to measurement result of aberration.
The present invention contrasts prior art and has following remarkable advantage:
1. the accurate location that utilizes the good chromatography ability of confocal system to realize lens surface.
2. utilize the method for curve fitting to ask for the maximum value of confocal response signal, improved measuring accuracy.
3. in this measuring method, confocal principle, is compared with image, interference fringe and is had higher stability as the measuring method of orientation criterion as focusing criterion with the light intensity response curve.
Description of drawings
Fig. 1 is the synoptic diagram of the confocal lens center thickness measuring method of the present invention;
Fig. 2 is the synoptic diagram of confocal system of the present invention;
Fig. 3 is the synoptic diagram of confocal system of the present invention;
Fig. 4 is the synoptic diagram of confocal system of the present invention;
Fig. 5 is the synoptic diagram of the confocal gauge head of the present invention;
Fig. 6 is the synoptic diagram of the confocal lens center thickness measurement mechanism of the present invention;
Fig. 7 measures the synoptic diagram of embodiment for the confocal lens center thickness of the present invention;
Fig. 8 measures the confocal response curve of embodiment for the confocal lens center thickness of the present invention.
Wherein: 1-annular pupil, the 2-beam splitting system, the 3-object lens, 4-measured lens front surface summit, summit, 5-measured lens rear surface, the confocal light cone of 6-summit, the 7-measured lens, the 8-confocal system, the 9-CCD detector, the 10-pin hole, the 11-lens, the 12-CCD detector, the 13-lens, the 14-microcobjective, the 15-CCD detector, the 16-lens, the 17-collimated light source, the confocal gauge head of 18-, the 19-adjustment rack, the 20-moving guide rail, the 21-length measurement system, the 22-connecting rod, the 23-electromechanical controlling device, the 24-main control computer.
Embodiment
The invention will be further described below in conjunction with drawings and Examples.
Basic thought of the present invention is to utilize confocal light cone to lens surface summit hi-Fix, realizes that the contactless high-precision of lens center thickness is measured.In measuring light path, introduce annular pupil simultaneously, block paraxial rays, form hollow measurement light cone, cut down the influence of aberration measurement result.
Embodiment one
As Fig. 2, Fig. 5 and shown in Figure 7, confocal lens center thickness measuring method, its measuring process is:
At first, start the Survey Software in the main control computer (24), import correlation parameter, comprise the radius-of-curvature r of measured lens (7) front surface
1=90.7908mm, air refraction n
0=1 and measured lens (7) refractive index n=1.5143.
Then, open collimated light source (17), the directional light of its ejaculation is the annular pupil (1) of 6.8mm-9.6mm by transmission diameter, see through beam splitting system (2), through vertex focal length is that 35mm object lens (3) are focused at the focal position, forms hollow cone simultaneously, and light is again by after measured lens (7) surface reflection, enter confocal system (8) by object lens (3) and beam splitting system (2) reflection once more, lens (11) converge at pin hole (10) back lighting ccd detector (9) in confocal system (8).
By adjusting adjustment rack (19), make measured lens (7) and confocal gauge head (18) common optical axis, avoid the measuring error that causes because of light shaft offset.
In the measuring process, electromechanical controlling device (23) drives confocal gauge head (18) and moves in optical axis direction scanning along moving guide rail (20), confocal system (8) determines that by the maximum value of surveying the confocal response signal of ccd detector (9) confocal light cone summit (6) overlaps with measured lens (7) surface vertices, and writes down the position coordinates z of two confocal gauge heads in coincide point place (18) successively
1, z
2Response signal as shown in Figure 8, I
1(z), I
2(z) be respectively z
1, z
2The confocal response signal at some place, wherein the maximum value of response signal is tried to achieve by the higher order polynomial fitting method.
Then, with the position coordinates z of confocal gauge head (18)
1, z
2, sending main control computer (24) to, the Survey Software in the main control computer (24) is according to known parameters: the numerical aperture angle α of confocal light cone
0, measured lens (7) front surface radius-of-curvature r
1, air refraction n
0, measured lens (7) refractive index n and confocal gauge head (18) twice location amount of movement l=|z
2-z
1|, can be by following formula:
Calculate the center thickness d of measured lens (7).
As Fig. 2, Fig. 5 and shown in Figure 7, confocal lens center thickness measurement mechanism, comprise collimated light source (17), be successively placed on annular pupil (1), beam splitting system (2) and the object lens (3) of collimated light source (17) outgoing directional light direction, also comprise the confocal system (8) that is placed on beam splitting system (2) reflection direction, wherein to confocal system (8), lens (11) converge at pin hole (10) back lighting ccd detector (9) in confocal system (8) with beam reflection for measured lens (7) surface and beam splitting system (2).
Collimated light source (17), annular pupil (1), beam splitting system (2), object lens (3) and confocal system (8) constitute confocal gauge head (18) jointly, are installed on the moving guide rail (20) by connecting rod (22).Measured lens (7) is fixed on the adjustment rack (19).Main control computer (24) obtains confocal response signal; Main control computer (24) is connected with electromechanical controlling device (23), makes it drive confocal gauge head (18) and moves in optical axis direction scanning, cooperates confocal system (8) and length measurement system (21) can obtain the positional information on lens two surfaces.
The confocal gauge head of present embodiment gained (18) is followed successively by along optical axis direction scanning gained position coordinates: z
1=-2.6985mm, z
2=-0.0205mm.The substitution computing formula can get lens center thickness d=4.0088mm.
Embodiment two
As Fig. 3, Fig. 5 and shown in Figure 7, the confocal system (8) among embodiment one Fig. 2 is replaced with confocal system (8) among Fig. 3, can constitute embodiment two.Different is with embodiment one, and light enters confocal system (8) after lens (13) are assembled, at the lens focus place by the confocal response signal of ccd detector (12) direct detection.All the other measuring methods are identical with embodiment one with device.
Embodiment three
As Fig. 4, Fig. 5 and shown in Figure 7, the confocal system (8) among embodiment one Fig. 2 is replaced with confocal system (8) among Fig. 4, can constitute embodiment three.Different is with embodiment one, and light enters confocal system (8) after lens (16) and microcobjective (14) at ccd detector (15) surface imaging, and are surveyed confocal response signal by ccd detector (15).All the other measuring methods are identical with embodiment one with device.
This embodiment has realized the contactless high-precision measurement of lens center thickness by a series of measure, realized the method and apparatus that confocal lens center thickness is measured, had advantages such as measured lens not damaged, measuring accuracy height, operating distance are long, easy to use.
Below in conjunction with the accompanying drawings the specific embodiment of the present invention is described; but these explanations can not be understood that to have limited scope of the present invention; protection scope of the present invention is limited by the claims of enclosing, and any change on claim of the present invention basis all is protection scope of the present invention.
Claims (10)
1. confocal lens center thickness measuring method is characterized in that:
(a) at first, adjust measured lens, make itself and confocal gauge head common optical axis;
(b) then, the confocal gauge head of the confocal light cone of outgoing moves along optical axis direction scanning, and confocal system determines that by the maximum value of surveying confocal response signal confocal light cone summit and measured lens front surface summit coincide, and this moment, the position coordinates of confocal gauge head was z
1
(c) confocal gauge head is continued move along optical axis direction scanning, utilize confocal system to determine that by the maximum value of surveying confocal response signal confocal light cone summit and summit, measured lens rear surface coincide once more, this moment, the position of confocal gauge head was z
2
(d) according to known parameters: the numerical aperture angle α of confocal light cone
0, the measured lens front surface radius-of-curvature r
1, air refraction n
0, measured lens refractive index n and twice location of confocal gauge head amount of movement l=|z
2-z
1|, can be by following formula:
Calculate the center thickness d of measured lens.
2. confocal lens center thickness measuring method according to claim 1 is characterized in that: utilize the method for curve fitting to ask for the maximum value of confocal response signal.
3. confocal lens center thickness measuring method according to claim 1 and 2 is characterized in that: utilize annular pupil to block paraxial rays, form hollow measurement light cone, cut down the influence of aberration to measurement result.
4. confocal lens center thickness measurement mechanism comprises collimated light source, it is characterized in that: comprise beam splitting system, object lens, confocal system, length measurement system and moving guide rail; Wherein beam splitting system, object lens and measured lens are successively placed on collimated light source emergent ray direction, confocal system is placed on the beam splitting system reflection direction, measured lens surface with beam splitting system with beam reflection to confocal system, and cooperate confocal system to realize the accurate location on measured lens front surface summit and summit, rear surface; Collimated light source, beam splitting system, object lens and confocal system are common to constitute confocal gauge head, and is installed on the moving guide rail with length measurement system.
5. confocal lens center thickness measurement mechanism according to claim 4, it is characterized in that: confocal system is made of lens, pin hole and ccd detector; Light enters confocal system after lens converge at the pin hole place, and survey confocal response signal by the ccd detector behind the pin hole.
6. confocal lens center thickness measurement mechanism according to claim 4, it is characterized in that: confocal system is made of lens and ccd detector; Light enters confocal system after lens are assembled, at the lens focus place by the confocal response signal of ccd detector direct detection.
7. confocal lens center thickness measurement mechanism according to claim 4, it is characterized in that: confocal system is made of lens, microcobjective and ccd detector; Light enters confocal system after lens and microcobjective at the ccd detector surface imaging, and are surveyed confocal response signal by ccd detector.
8. according to claim 4 or 5 or 6 or 7 described confocal lens center thickness measurement mechanisms, it is characterized in that: comprise annular pupil, be placed between collimated light source and the beam splitting system, form hollow measurement light cone.
9. according to claim 4 or 5 or 6 or 7 or 8 described confocal lens center thickness measurement mechanisms, it is characterized in that: comprise main control computer and electromechanical controlling device; Main control computer obtains confocal response signal; Main control computer controller controller for electric consumption makes it drive confocal gauge head and moves along optical axis direction scanning.
10. according to claim 4 or 5 or 6 or 7 or 8 or 9 described confocal lens center thickness measurement mechanisms, it is characterized in that: comprise adjustment rack, in order to fixing measured lens and adjust the optical axis of measured lens.
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Cited By (14)
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| CN102679895A (en) * | 2012-06-11 | 2012-09-19 | 北京理工大学 | Method for measuring center thickness of reflective confocal lens |
| CN104613882A (en) * | 2015-02-12 | 2015-05-13 | 江苏宇迪光学股份有限公司 | Lens center thickness measuring device based on optical phase demodulation and measuring method using same |
| CN105466345A (en) * | 2015-12-21 | 2016-04-06 | 中国科学院长春光学精密机械与物理研究所 | Optical lens center thickness measuring method based on thickness reference transmission |
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| CN109186477A (en) * | 2018-11-13 | 2019-01-11 | 北京理工大学 | Postposition is divided pupil laser differential confocal lens center thickness measurement method and device |
| CN109357623A (en) * | 2018-11-16 | 2019-02-19 | 中国科学院光电技术研究所 | A kind of method and apparatus with confocal microscope system measurement mobile phone faceplate thickness |
| CN109458939A (en) * | 2018-12-18 | 2019-03-12 | 南京理工大学 | With the lens center thickness measurement method combined of quickly feeling relieved |
| CN109974603A (en) * | 2019-04-19 | 2019-07-05 | 北京理工大学 | Bilateral dislocation differential confocal lens center thickness measurement method |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5785651A (en) * | 1995-06-07 | 1998-07-28 | Keravision, Inc. | Distance measuring confocal microscope |
| JP2003279440A (en) * | 2002-03-26 | 2003-10-02 | Tomey Corp | Thickness measuring method for optical lens |
| CN101408478A (en) * | 2008-11-21 | 2009-04-15 | 北京理工大学 | Method and apparatus for measuring cofocal combined ultra-long focal distance |
| CN101526341A (en) * | 2009-04-21 | 2009-09-09 | 北京理工大学 | Differential confocal curvature radius measurement method and device |
-
2010
- 2010-03-17 CN CN 201010128449 patent/CN101788271A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5785651A (en) * | 1995-06-07 | 1998-07-28 | Keravision, Inc. | Distance measuring confocal microscope |
| JP2003279440A (en) * | 2002-03-26 | 2003-10-02 | Tomey Corp | Thickness measuring method for optical lens |
| CN101408478A (en) * | 2008-11-21 | 2009-04-15 | 北京理工大学 | Method and apparatus for measuring cofocal combined ultra-long focal distance |
| CN101526341A (en) * | 2009-04-21 | 2009-09-09 | 北京理工大学 | Differential confocal curvature radius measurement method and device |
Non-Patent Citations (1)
| Title |
|---|
| 《OPTICS EXPRESS》 20100204 Weiqian Zhao et al. "Lenses axial space ray tracing measurement" 3608-3617 全文 第18卷, 第4期 2 * |
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| CN106197297B (en) * | 2010-11-30 | 2019-04-09 | 庄臣及庄臣视力保护公司 | Method for measuring unhydrated ophthalmic lens |
| CN106197297A (en) * | 2010-11-30 | 2016-12-07 | 庄臣及庄臣视力保护公司 | For the method measuring unhydrated ophthalmic lens |
| CN102679895A (en) * | 2012-06-11 | 2012-09-19 | 北京理工大学 | Method for measuring center thickness of reflective confocal lens |
| CN104613882A (en) * | 2015-02-12 | 2015-05-13 | 江苏宇迪光学股份有限公司 | Lens center thickness measuring device based on optical phase demodulation and measuring method using same |
| CN106556348A (en) * | 2015-09-24 | 2017-04-05 | 上海思信科学仪器有限公司 | Sapphire thickness measurement equipment |
| CN108139205A (en) * | 2015-10-23 | 2018-06-08 | 卡驰诺光电系统股份有限公司 | Optical element characteristic detecting apparatus |
| CN105466345A (en) * | 2015-12-21 | 2016-04-06 | 中国科学院长春光学精密机械与物理研究所 | Optical lens center thickness measuring method based on thickness reference transmission |
| CN105783745A (en) * | 2016-04-21 | 2016-07-20 | 清华大学 | Apparatus and method for measuring spherical lens |
| CN105783745B (en) * | 2016-04-21 | 2018-10-02 | 清华大学 | The measuring device and measuring method of spherical lens |
| CN107782697A (en) * | 2017-09-27 | 2018-03-09 | 北京理工大学 | The confocal Infrared Lens element refractive index measurement method of broadband and device |
| CN109186477A (en) * | 2018-11-13 | 2019-01-11 | 北京理工大学 | Postposition is divided pupil laser differential confocal lens center thickness measurement method and device |
| CN109357623A (en) * | 2018-11-16 | 2019-02-19 | 中国科学院光电技术研究所 | A kind of method and apparatus with confocal microscope system measurement mobile phone faceplate thickness |
| CN109458939A (en) * | 2018-12-18 | 2019-03-12 | 南京理工大学 | With the lens center thickness measurement method combined of quickly feeling relieved |
| CN110006360A (en) * | 2019-03-08 | 2019-07-12 | 北京理工大学 | Confocal laser nuclear fusion pellet geometric parameter comprehensive measuring method and device |
| CN109974603A (en) * | 2019-04-19 | 2019-07-05 | 北京理工大学 | Bilateral dislocation differential confocal lens center thickness measurement method |
| CN113203708A (en) * | 2021-04-22 | 2021-08-03 | 平方和(北京)科技有限公司 | Optical device |
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