CN109357623A - A kind of method and apparatus with confocal microscope system measurement mobile phone faceplate thickness - Google Patents
A kind of method and apparatus with confocal microscope system measurement mobile phone faceplate thickness Download PDFInfo
- Publication number
- CN109357623A CN109357623A CN201811383822.7A CN201811383822A CN109357623A CN 109357623 A CN109357623 A CN 109357623A CN 201811383822 A CN201811383822 A CN 201811383822A CN 109357623 A CN109357623 A CN 109357623A
- Authority
- CN
- China
- Prior art keywords
- mobile phone
- phone faceplate
- lens
- microcobjective
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
Abstract
The invention discloses a kind of method and apparatus with confocal microscope system measurement mobile phone faceplate thickness, belong to field of optical detection.This method is based on the basis of confocal microscopic imaging principle, utilize its axial chromatography, and combined high precision displacement platform is overlapped the upper and lower surfaces of tested mobile phone faceplate with microcobjective focal plane respectively, then receives tested mobile phone faceplate upper and lower surfaces reflected light signal by detector；It is received in the time interval of optical signal twice in detector, the thickness of tested mobile phone faceplate can be calculated according to the displacement of displacement platform.The characteristics of this method is: the thickness range (0.3mm-0.5mm) of versatile, high resolution, the current mobile phone faceplate material on the market of measurement range matching realizes the thickness of contactless high-acruracy survey mobile phone faceplate.
Description
Technical field
It is the invention belongs to the manufacture of advanced optics and detection field, in particular to a kind of to measure mobile phone with confocal microscope system
The method and apparatus of plate thickness.
Background technique
As technological progress and technological level improve, the thickness of mobile phone faceplate is also towards more and more thin trend development.?
Under conditions of same material compared with the mobile phone faceplate material of general thickness, light transmittance is higher, surface more smooth, it is flexible more
By force, optical property is also more excellent.But come along with high-performance, it is that mobile phone faceplate in process of production surveys its thickness
More stringent requirements are proposed for amount.Since ultrathin transparent material is applied mostly in high-accuracy, high-tech sector, so to the matter of material
Amount requires very high.It since mobile phone faceplate surface quality requirements are very strict, needs to avoid any tiny scuffing, therefore traditional connects
Touch measurement method can not be suitable for thin type cell phone plate thickness measurement new demand, so can satisfy conditions above and
The mobile phone faceplate thickness measurement technique of demand --- the appearance of non-contact measurement becomes inevitable.
It is mostly at present contact type measurement for the measurement method of mobile phone faceplate thickness, this measurement method is to measurement material
There is certain damage；Measurement range is small simultaneously, and position is uncertain, and measurement is difficult；In addition relatively slow from speed in the efficiency of measurement, essence
Spend low, measurement error is big.Mobile phone faceplate material therefor is transparent material, and the high-end devices of transparent material thickness measure are substantially western
Square developed country's monopolization, domestic production quotient rely on import mostly.It is very important, the product quality of transparent material and economic effect
Restriction of the benefit directly by its thickness measurement technique level, so, the measurement accuracy for improving mobile phone faceplate thickness will effectively
Improving The Quality of Products has significant economical, societal benefits；Meanwhile to photoelectric technology, optics manufacture and other application field
Development also there is realistic meaning.Therefore, Non-contact mobile phone plate thickness measuring technique with independent intellectual property rights is developed
It is necessary to.
The present invention utilizes the characteristics of confocal microscopy non-cpntact measurement and distinctive axial response characteristic, can be realized
Measurement process complies fully with basic demand of the mobile phone faceplate transparent material to thickness measure to zero active force of measured workpiece surface,
Non-contact measurement suitable for mobile phone faceplate transparent material thickness.
Summary of the invention
The object of the present invention is to provide a kind of method and apparatus with confocal microscope system measurement mobile phone faceplate thickness.
Its principle is based on the axial chromatography of confocal microscopy, and combined high precision displacement platform is realized to transparent side plate
The axial scan of material.System is focused by confocal microscope and displacement platform in the upper and lower surfaces of transparent panel material respectively, is gathered
The reflection light of burnt hot spot focuses on detector after collecting again by confocal microscope, is obtained by detector connection computer disposal
Two light intensity extreme values can be acquired according to displacement variable of the displacement platform in the time interval that two light intensity extreme values occur
Material thickness.
The technical solution adopted by the present invention is that: a kind of device with confocal microscope system measurement mobile phone faceplate thickness, institute
Stating device includes:
Laser, for emitting laser beam；
It expands and collimation lens set, it includes beam expanding lens and collimating mirror that this, which is expanded with collimation lens set, this expands and collimates
Microscope group is used for laser beam shaping and collimation；
Pin hole is illuminated, point light source is formed for the light after expanding to be focused on pin hole, can be simultaneously reached filter shape effect
Fruit；
Microcobjective group, the microcobjective group include the first lens, and the second lens, the third lens, the 4th lens, this is micro-
Object lens are that illuminating bundle is focused on to tested mobile phone faceplate, are received via tested mobile phone faceplate surface reflection, and by microcobjective group
Collection is focused on detecting pinhole by condenser lens again；By the filter action of detecting pinhole, detector can only receive object lens from coke
Reflected light intensity signal in plane, and the defocus optical signal that other positions are reflected will be stopped by pin hole, detector institute nothing
Method receives；
Tested mobile phone faceplate, positioned at the focal plane of micro- microscope group；
Spectroscope, for being divided, a part of light enters micro- microscope group by spectroscope, and another part collects microcobjective
To the reflected light on mobile phone faceplate surface separated from input path, focused on the detector by condenser lens；
Condenser lens, the reflected light on the mobile phone faceplate surface for microcobjective to be collected into, by after spectroscope by gathering
Focus lens focus at detecting pinhole, so that detector detects optical signal.
Wherein, the measurement of mobile phone thickness is by the distinctive axial chromatography of confocal microscopy, so as to realize
The scanning of different depth is carried out to tested panel.
Wherein, microcobjective group is one of most important component in confocal microscope system, because of its numerical aperture and photograph
The spatial distribution of bright point spread function is related, it means that numerical aperture will directly affect the axial response light intensity curve of device
Peak width, and then system resolution is influenced, in the case where wavelength is certain, the numerical aperture of microcobjective group decides that FWHM is big
It is small, while also determining the resolving power of device.
Wherein, spectroscope light splitting optical path use parallel light path, can be inserted into the optical path in this way Amici prism, polarizing film and
Aberration is not introduced, optical path length can also be adjusted as needed.
Wherein, during using confocal microscope system measurement ultra thin handset material thickness, the displacement of objective table is
It is determined according to intensity of the tested panel surface reflected light at detecting pinhole with the variation of tested panel surface defocus position,
So the dividing when carrying out the measurement of ultrathin transparent material thickness of confocal microscopy optical system can be measured with axial response light intensity
It distinguishes ability, according to the characteristic of axial response light intensity curve, can be measured using distinguishable range of signal near light intensity extreme value
System axial resolution capability, axial resolution is higher, and measurement accuracy is higher, determines confocal microscope system azimuthal resolution
It is half extreme value width FWHM of axial response light intensity curve.
A method of mobile phone faceplate thickness being measured with confocal microscope system, a kind of uses confocal microscope using described
The device of systematic survey mobile phone faceplate thickness, the measuring process of this method are as follows:
Step 1: adjusting each optical element contour coaxial, incident laser is gathered through beam expanding lens from the laser of laser emitting
Coke forms point light source on illumination pin hole；Point light source is become collimated light beam outgoing by collimating mirror, while to small-bore incident sharp
Beam expander makes it be full of the entrance pupil of microcobjective group as far as possible；
Step 2: light beam passes through spectroscope, into the first lens, the second lens, the third lens, the 4th of microcobjective group
Illuminating bundle is focused on into tested mobile phone faceplate surface after lens, via tested mobile phone faceplate surface reflection, and by microcobjective
Group is collected；It is focused on detecting pinhole by spectroscope, then by condenser lens；
Step 3: detector can only receive microcobjective group and reflect from focal plane by the filter action of detecting pinhole
Light intensity signal back, and the defocus optical signal that other positions are reflected stops detected pin hole；
Step 4: measuring the resolution energy of device carried out when ultrathin transparent plate thickness measures using axial response light intensity
Power, specific as follows:
Half extreme value width FWHM of axial response light intensity curve,
Wherein, there are two the factors for determining FWHM: the numerical aperture NA of wavelength X and microcobjective, in the reality of optical system
In the design of border, the illumination light of system will select short wavelength as far as possible, and select the biggish object lens of numerical aperture.
Step 5: in displacement platform axial displacement process be tested mobile phone faceplate upper and lower surfaces will respectively with microcobjective
The focal plane of group is overlapped, and such detector can receive the optical signal of tested mobile phone faceplate upper and lower surfaces reflection；By detecting
Device connection computer disposal obtains two light intensity extreme values, according to displacement platform in the time interval that two light intensity extreme values occur
Displacement variable can acquire tested mobile phone faceplate thickness.
Wherein, in the 4th step by half extreme value width FWHM calculation formula of axial response light intensity curve it is found that determining FWHM
Factor there are two: the numerical aperture of wavelength and microcobjective, therefore in the actual design of optical system, the illumination light of system
Short wavelength is selected as far as possible, and selects the biggish object lens of numerical aperture, in addition, can also take reduction pinhole size, selection higher
The measures such as the microcobjective of numerical aperture improve systemic resolution, however reduce effect of the pinhole size to systemic resolution is improved
It is limited, and cause the received luminous intensity of detector institute energy insufficient, the requirement to the response sensitivity of detector in this way will mention
Height, cost also just rise with it, therefore comprehensively consider the factor of various aspects, and selecting the microcobjective of high numerical aperture is to improve
The most viable method of confocal microscope system axial resolution.
The advantages of the present invention over the prior art are that:
(1) measurement accuracy of mobile phone faceplate thickness is improved, effectively Improving The Quality of Products, there is significant economic, society
Benefit；
(2) compared with contact type measurement mode, the measurement method is to measurement material either with or without damage；Measurement range simultaneously
Greatly, measurement position is flexible, and measurement is easy；
(3) compared with the efficiency of current measurement measurement, have that measuring speed is very fast, measurement accuracy is high, measurement error is small.
Detailed description of the invention
Fig. 1 is that a kind of device composition for measuring mobile phone faceplate thickness with confocal microscope system of one embodiment of the invention is shown
It is intended to；
Fig. 2 is expanded with collimation lens set for one embodiment of the invention in Zemax model and MTF curve；
Fig. 3 is the micro- microscope group of one embodiment of the invention in Zemax model and MTF curve；
Fig. 4 is the convergent lens of one embodiment of the invention in Zemax model and MTF curve；
Fig. 5 is that the confocal microscope system of one embodiment of the invention normalizes axial response light intensity；
Fig. 6 is that the confocal microscope system of one embodiment of the invention estimates instrumentation plan.
In figure, 1 is laser, and 2 be beam expanding lens, and 3 be illumination pin hole, and 4 be collimating mirror, and 5 be the first lens, and 6 is saturating for second
Mirror, 7 be the third lens, and 8 be the 4th lens, and 9 be tested mobile phone faceplate, and 10 be spectroscope, and 11 be condenser lens, and 12 be detection needle
Hole, 13 be detector.
Specific embodiment
With reference to the accompanying drawing and the present invention is discussed in detail in specific embodiment.
As shown in Figure 1, a kind of device with confocal microscope system measurement mobile phone faceplate thickness, comprising: laser 1；Expand
Beam and collimation lens set, it includes beam expanding lens 2 and collimating mirror 4 that this, which is expanded with collimation lens set, this is expanded is used for collimation lens set
The shaping of laser beam and collimation；Illuminate pin hole 3；Microcobjective group includes the first lens 5 being sequentially arranged, the second lens 6, and
Three lens 7 and the 4th lens 8, the microcobjective group are used to that illuminating bundle to be focused and be collected the reflected light of tested panel；It is tested
Mobile phone faceplate 9；Spectroscope 10, the spectroscope 10 is for being divided；Condenser lens 11, the focus lens group 11 are used for reflected light meeting
Gather at detecting pinhole 12, so that detector detects optical signal；Detecting pinhole 12；Detector 13, detector 13 can be CCD.
Wherein laser belongs to lighting source, and lighting source is the important component of confocal microscopy optical system.Entirely
Optical system requires the light beam of lighting source transmitting to have higher collimation；Simultaneously again because of the number of elements in optical system
It is more, the attenuations such as absorption, the scattering of luminous energy can not be ignored, so also needing lighting source energy stable output power high
Effect, to ensure that detector can receive the optical signal of sufficient intensity.Comprehensively consider above-mentioned factor, selects the angle of divergence small and monochromatic
The good laser of property is as light source, output wavelength 450nm.It expands and collimation lens set, illumination pin hole and microcobjective combination
It forms together, the effect of the optical path is will to pass through microcobjective in tested mobile phone faceplate table after laser filter shape, collimation
Face focuses.When being optimized to illumination path, it is only necessary to correct and put spherical aberration on axis, the pupil that laser is full of microcobjective as far as possible can
To improve the resolving power of system.Therefore it in order to guarantee that the laser after expanding can be full of the pupil of microcobjective, expands than cannot
Less than 1.5 times.Subject to the design considerations microcobjective of condenser lens, the entrance pupil of microcobjective is 6mm, so condenser lens enters
Pupil cannot be less than 6mm, could sufficiently collect the reflected beams in this way and focus on the detector.The effect of condenser lens is by micro- object
The reflected light that mirror is collected focuses on detecting pinhole, therefore focuses energy and more concentrate, and light intensity is easier to reach detector response
Threshold value, cause the response of detector.Spectroscopical main function is the anti-of the sample surface for being collected into microcobjective
It penetrates light to separate from input path, be focused on the detector by condenser lens.
A method of mobile phone faceplate thickness being measured with confocal microscope system, utilizes apparatus of the present invention, this method step
It is as follows:
Step 1: adjust each optical element contour coaxial, the laser that is emitted from laser 1 is through beam expanding lens 2 by incident laser
It focuses on illumination pin hole 3, forms point light source；Collimating mirror 4 by point light source become collimated light beam outgoing, while to it is small-bore enter
It penetrates laser beam to expand, it is made to be full of the entrance pupil of microcobjective as far as possible；
It expands as shown in Figure 2 with MTF curve of the collimation lens set under the afocal focus mode of Zemax, it is known that its
Close to diffraction limit, therefore expand more satisfactory with the optimum results of collimation lens set, luminous energy propagation efficiency is very high.
Step 2: light beam passes through spectroscope 10, into the first lens 5 of microcobjective group, the second lens 6, the third lens 7
Illuminating bundle is focused on into tested 9 surface of mobile phone faceplate with after the 4th lens 8, via tested 9 surface reflection of mobile phone faceplate, and by
Microcobjective group is collected；It is focused on detecting pinhole 12 by spectroscope 10, then by condenser lens 11；Wherein microcobjective group and
Condenser lens design carries out in Zemax, and confocal microscopy objective lens MTF curve is at full filed spatial frequency after the completion of design
MTF > 0.1, close to diffraction limit, therefore microcobjective group has high resolution ratio.Fig. 3 be microcobjective group design structure and
Its MTF curve；Condenser lens design structure and MTF curve, such as Fig. 4, MTF > 0.09 at full filed spatial frequency, therefore focus
Optical path has high optical delivery efficiency.
Step 3: detector 13 can only receive microcobjective group from focal plane by the filter action of detecting pinhole 12
Reflected light intensity signal, and the defocus optical signal that other positions are reflected will be stopped by pin hole；
Step 4: measuring the resolution energy of device carried out when ultrathin transparent plate thickness measures using axial response light intensity
Power, specific as follows:
Half extreme value width FWHM of axial response light intensity curve,
Wherein, there are two the factors for determining FWHM: the numerical aperture NA of wavelength X and microcobjective.Therefore in optical system
Actual design in, the illumination light of system will select short wavelength as far as possible, and select the biggish object lens of numerical aperture；
Step 5: detector axis is indicated to response light intensity normalization expression formula are as follows:
Wherein, IfFor the light intensity on detector, axial off-axis amount u is normalized；
By numerical simulation, confocal microscope system normalization axial response light intensity curve such as Fig. 5 ideally is obtained
It is shown.As seen from the figure, the extreme point of curve is (0,1), and closer to extreme point, curve is steeper, and variation is faster, and light intensity value is bigger；
Further away from extreme point, curve is more slow, and variation is slower, and light intensity is more worth small.It can be seen that when sample surface and microcobjective
When focus is overlapped, detector can receive intensity of reflected light and reach maximum value just；When sample surfaces deviate microcobjective group
When focal plane, the intensity of reflected light that detector 13 receives decays rapidly.The variation for the Intensity response that detector 13 receives can be with
Accurately reflect the relative position on tested mobile phone faceplate surface Yu microcobjective group focal plane.
Step 6: in displacement platform axial displacement process be tested mobile phone faceplate upper and lower surfaces will respectively with microcobjective
The focal plane of group is overlapped, and such detector 13 can receive the optical signal of tested mobile phone faceplate upper and lower surfaces reflection；By visiting
It surveys the connection computer disposal of device 13 and obtains two light intensity extreme values, the time interval occurred according to displacement platform in two light intensity extreme values
Interior displacement variable can acquire tested mobile phone faceplate thickness.Estimate instrumentation plan 6.
The above, the only specific embodiment in the present invention, but scope of protection of the present invention is not limited thereto, appoints
What is familiar with the partial modification or replacement of the people of the technology within the technical scope disclosed by the invention, should all cover of the invention
Within scope.
Claims (7)
1. a kind of device with confocal microscope system measurement mobile phone faceplate thickness, which is characterized in that described device includes:
Laser (1), for emitting laser beam；
It expands and collimation lens set, it includes beam expanding lens (2) and collimating mirror (4) that this, which is expanded with collimation lens set, this expands and collimates
Lens group is used for laser beam shaping and collimation；
It illuminates pin hole (3), forms point light source for the light after expanding to be focused on pin hole, can be simultaneously reached filter shape effect
Fruit；
Microcobjective group, the microcobjective group include the first lens (5), the second lens (6), the third lens (7), the 4th lens
(8), which is that illuminating bundle is focused on to tested mobile phone faceplate, via tested mobile phone faceplate surface reflection, and by
Microcobjective group is collected, is focused on detecting pinhole (12) by condenser lens (11) again；By the filter action of detecting pinhole, visit
Object lens reflected light intensity signal from focal plane can only be received by surveying device, and the defocus optical signal that other positions are reflected will be by
Pin hole stops, and detector can not receive；
Tested mobile phone faceplate (9), positioned at the place of the focal plane of micro- microscope group；
Spectroscope (10), for being divided, a part of light enters micro- microscope group by spectroscope, and another part collects microcobjective
To the reflected light on mobile phone faceplate surface separated from input path, focused on the detector by condenser lens；
Condenser lens (11), the reflected light on the mobile phone faceplate surface for microcobjective to be collected into, by after spectroscope by gathering
Focus lens focus at detecting pinhole (12), so that detector (13) detect optical signal.
2. a kind of device with confocal microscope system measurement mobile phone faceplate thickness as described in claim 1, which is characterized in that
The measurement of mobile phone thickness is carried out so as to realize to tested panel by the distinctive axial chromatography of confocal microscopy
The scanning of different depth.
3. a kind of device with confocal microscope system measurement mobile phone faceplate thickness as described in claim 1, which is characterized in that
Microcobjective group is one of most important component in confocal microscope system, because of its numerical aperture and illumination point spread function
Spatial distribution is related, it means that numerical aperture will directly affect the peak width of the axial response light intensity curve of device, and then influence
System resolution, in the case where wavelength is certain, the numerical aperture of microcobjective group decides FWHM size, also determines simultaneously
The resolving power of device.
4. a kind of device with confocal microscope system measurement mobile phone faceplate thickness as described in claim 1, which is characterized in that
Wherein spectroscope (10), light splitting optical path use parallel light path, can be inserted into Amici prism, polarizing film in the optical path in this way without drawing
Enter aberration, optical path length can also be adjusted as needed.
5. a kind of device with confocal microscope system measurement mobile phone faceplate thickness as described in claim 1, which is characterized in that
During using confocal microscope system measurement ultra thin handset material thickness, the displacement of objective table is according to tested panel table
What intensity of the face reflected light at detecting pinhole was determined with the variation of tested panel surface defocus position, it is possible to axially
Light intensity is responded to measure the resolution capability of confocal microscopy optical system carried out when ultrathin transparent material thickness measures, according to axial direction
The characteristic for responding light intensity curve can measure system axial using distinguishable range of signal near light intensity extreme value and differentiate energy
Power, axial resolution is higher, and measurement accuracy is higher, and determine confocal microscope system azimuthal resolution is axial response light intensity
Half extreme value width FWHM of curve.
6. a kind of method with confocal microscope system measurement mobile phone faceplate thickness, altogether using a kind of use described in claim 1
The device of focusing microscope systematic survey mobile phone faceplate thickness, it is characterised in that: the measuring process of this method is as follows:
Step 1: adjust each optical element contour coaxial, the laser that is emitted from laser (1) is through beam expanding lens (2) by incident laser
It focuses in illumination pin hole (3), forms point light source；Point light source is become collimated light beam outgoing by collimating mirror (4), while to small-bore
Incoming laser beam expand, so that it is full of the entrance pupil of microcobjective group as far as possible；
Step 2: light beam passes through spectroscope (10), the first lens (5), the second lens (6), third into microcobjective group are saturating
Illuminating bundle is focused on into tested mobile phone faceplate (9) surface after mirror (7), the 4th lens (8), via tested mobile phone faceplate (9) table
Face reflection, and collected by microcobjective group；Detecting pinhole (12) are focused on by spectroscope (10), then by condenser lens (11)
On；
Step 3: detector (13) can only receive microcobjective group from focal plane by the filter action of detecting pinhole (12)
Reflected light intensity signal, and the defocus optical signal that other positions are reflected stops detected pin hole (12)；
Step 4: the resolution capability of device carried out when ultrathin transparent plate thickness measures is measured using axial response light intensity,
It is specific as follows:
Half extreme value width FWHM of axial response light intensity curve,
Wherein, there are two the factors for determining FWHM: the numerical aperture NA of wavelength X and microcobjective, in actually setting for optical system
In meter, the illumination light of system will select short wavelength as far as possible, and select the biggish object lens of numerical aperture；
Step 5: in displacement platform axial displacement process be tested mobile phone faceplate upper and lower surfaces by respectively with microcobjective group
Focal plane is overlapped, and such detector (13) can receive the optical signal of tested mobile phone faceplate upper and lower surfaces reflection；By detecting
Device (13) connection computer disposal obtains two light intensity extreme values, the time interval occurred according to displacement platform in two light intensity extreme values
Interior displacement variable can acquire tested mobile phone faceplate thickness.
7. a kind of method with confocal microscope system measurement mobile phone faceplate thickness according to claim 6, feature exist
In, in the 4th step by half extreme value width FWHM calculation formula of axial response light intensity curve it is found that determine FWHM because being known as two
It is a: the numerical aperture of wavelength and microcobjective, therefore in the actual design of optical system, the illumination light of system will select as far as possible
Short wavelength, and the biggish object lens of numerical aperture are selected, reduce pinhole size in addition, can also take, select high numerical aperture
The measures such as microcobjective improve systemic resolution, however reduction pinhole size is limited to the effect for improving systemic resolution, and
Cause the received luminous intensity of detector institute energy insufficient, the requirement to the response sensitivity of detector in this way will improve, cost
It just rises with it, comprehensively considers the factor of various aspects, selecting the microcobjective of high numerical aperture is to improve confocal microscope system
The most viable method of axial resolution.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811383822.7A CN109357623A (en) | 2018-11-16 | 2018-11-16 | A kind of method and apparatus with confocal microscope system measurement mobile phone faceplate thickness |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811383822.7A CN109357623A (en) | 2018-11-16 | 2018-11-16 | A kind of method and apparatus with confocal microscope system measurement mobile phone faceplate thickness |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109357623A true CN109357623A (en) | 2019-02-19 |
Family
ID=65332419
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811383822.7A Pending CN109357623A (en) | 2018-11-16 | 2018-11-16 | A kind of method and apparatus with confocal microscope system measurement mobile phone faceplate thickness |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109357623A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111982027A (en) * | 2020-09-01 | 2020-11-24 | 中国科学院长春光学精密机械与物理研究所 | Free-form surface non-contact type measuring system based on dispersion confocal |
| CN113137931A (en) * | 2021-04-27 | 2021-07-20 | 珠海横琴美加澳光电技术有限公司 | Spectrum confocal device and method capable of measuring surface shape or thickness |
| CN113625289A (en) * | 2020-05-06 | 2021-11-09 | 圣邦微电子（北京）股份有限公司 | Depth measuring device and method based on structured light and shooting equipment |
| CN115774262A (en) * | 2023-02-10 | 2023-03-10 | 深圳赛陆医疗科技有限公司 | Cover glass thickness detection device, cover glass thickness detection method, electronic device and storage medium |
Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5785651A (en) * | 1995-06-07 | 1998-07-28 | Keravision, Inc. | Distance measuring confocal microscope |
| CN1614457A (en) * | 2004-11-30 | 2005-05-11 | 哈尔滨工业大学 | Confocal interference microscope with high-space resolution imaging ability |
| CN1773212A (en) * | 2004-11-08 | 2006-05-17 | 松下电器产业株式会社 | Confocal optical device, and spherical-aberration correction method |
| CN1940468A (en) * | 2005-09-30 | 2007-04-04 | 财团法人工业技术研究院 | Object-size measurement system and method |
| CN101788271A (en) * | 2010-03-17 | 2010-07-28 | 北京理工大学 | Method and device for measuring thickness of the center of confocal lens |
| CN102116930A (en) * | 2011-03-02 | 2011-07-06 | 中国科学院光电技术研究所 | Tri-differential confocal microscope imaging method with high axial resolution and imaging device |
| CN102749027A (en) * | 2011-04-18 | 2012-10-24 | 陈亮嘉 | Linear color confocal microscope system |
| CN106443996A (en) * | 2016-12-07 | 2017-02-22 | 深圳立仪科技有限公司 | Spectral confocal lens module |
| CN106931911A (en) * | 2017-04-01 | 2017-07-07 | 浙江协同光电科技有限公司 | The confocal line scanning device of white-light spectrum |
| CN107209356A (en) * | 2014-12-09 | 2017-09-26 | 阿森提斯股份有限公司 | For height and the integrated optical device of the non-contact measurement of thickness |
| CN206724892U (en) * | 2017-05-27 | 2017-12-08 | 宁波九纵智能科技有限公司 | Spectral Confocal displacement transducer system |
| CN108445602A (en) * | 2018-01-17 | 2018-08-24 | 江苏大学 | A kind of confocal optical system for measuring bloomed lens center thickness |
| CN108474645A (en) * | 2015-12-25 | 2018-08-31 | 株式会社基恩士 | Confocal displacement meter |
-
2018
- 2018-11-16 CN CN201811383822.7A patent/CN109357623A/en active Pending
Patent Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5785651A (en) * | 1995-06-07 | 1998-07-28 | Keravision, Inc. | Distance measuring confocal microscope |
| CN1773212A (en) * | 2004-11-08 | 2006-05-17 | 松下电器产业株式会社 | Confocal optical device, and spherical-aberration correction method |
| CN1614457A (en) * | 2004-11-30 | 2005-05-11 | 哈尔滨工业大学 | Confocal interference microscope with high-space resolution imaging ability |
| CN1940468A (en) * | 2005-09-30 | 2007-04-04 | 财团法人工业技术研究院 | Object-size measurement system and method |
| CN101788271A (en) * | 2010-03-17 | 2010-07-28 | 北京理工大学 | Method and device for measuring thickness of the center of confocal lens |
| CN102116930A (en) * | 2011-03-02 | 2011-07-06 | 中国科学院光电技术研究所 | Tri-differential confocal microscope imaging method with high axial resolution and imaging device |
| CN102749027A (en) * | 2011-04-18 | 2012-10-24 | 陈亮嘉 | Linear color confocal microscope system |
| CN107209356A (en) * | 2014-12-09 | 2017-09-26 | 阿森提斯股份有限公司 | For height and the integrated optical device of the non-contact measurement of thickness |
| CN108474645A (en) * | 2015-12-25 | 2018-08-31 | 株式会社基恩士 | Confocal displacement meter |
| CN106443996A (en) * | 2016-12-07 | 2017-02-22 | 深圳立仪科技有限公司 | Spectral confocal lens module |
| CN106931911A (en) * | 2017-04-01 | 2017-07-07 | 浙江协同光电科技有限公司 | The confocal line scanning device of white-light spectrum |
| CN206724892U (en) * | 2017-05-27 | 2017-12-08 | 宁波九纵智能科技有限公司 | Spectral Confocal displacement transducer system |
| CN108445602A (en) * | 2018-01-17 | 2018-08-24 | 江苏大学 | A kind of confocal optical system for measuring bloomed lens center thickness |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113625289A (en) * | 2020-05-06 | 2021-11-09 | 圣邦微电子（北京）股份有限公司 | Depth measuring device and method based on structured light and shooting equipment |
| CN111982027A (en) * | 2020-09-01 | 2020-11-24 | 中国科学院长春光学精密机械与物理研究所 | Free-form surface non-contact type measuring system based on dispersion confocal |
| CN113137931A (en) * | 2021-04-27 | 2021-07-20 | 珠海横琴美加澳光电技术有限公司 | Spectrum confocal device and method capable of measuring surface shape or thickness |
| CN113137931B (en) * | 2021-04-27 | 2023-03-14 | 珠海横琴美加澳光电技术有限公司 | Spectrum confocal device and method capable of measuring surface shape or thickness |
| CN115774262A (en) * | 2023-02-10 | 2023-03-10 | 深圳赛陆医疗科技有限公司 | Cover glass thickness detection device, cover glass thickness detection method, electronic device and storage medium |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109357623A (en) | A kind of method and apparatus with confocal microscope system measurement mobile phone faceplate thickness | |
| EP2538170A1 (en) | Method and device for measuring multiple parameters of differential confocal interference component | |
| CN109975820B (en) | Linnik type interference microscope-based synchronous polarization phase shift focus detection system | |
| CN104950429B (en) | Including for providing repeatedly the 3D microscope of the pluggable component of imaging and measurement capability | |
| CN201233362Y (en) | Multi optical spectrum imaging device for detecting fruit quality | |
| US9696686B2 (en) | Method and device for focussing a microscope automatically | |
| CN102425998B (en) | Full parameter detection apparatus of polished surface quality of optical element and detection method thereof | |
| CN107144217B (en) | Fiber optic interferometric confocal system for optical element processing quality on-line checking | |
| CN104482880B (en) | Laser stimulated emission depletion three-dimensional super-resolution light splitting pupil differential confocal imaging method and device | |
| CN105181298B (en) | Multiple reflections formula confocal laser Long focal length measurement method and apparatus | |
| CN104567674B (en) | Bilateral fitting confocal measurement method | |
| CN101498833A (en) | Ultra-discrimination differential confocal microscope with macro-micro view field observation | |
| CN104515469A (en) | Light microscope and microscopy method for examining a microscopic specimen | |
| CN102313976A (en) | Autofocusing device for microscopes and suitable autofocus aperture stops | |
| CN104165758B (en) | Lens focal length measuring device and method based on Fizeau interferomenter | |
| CN103940796A (en) | Novel multi-angle and multi-mode quick switching circular optical illumination microscopic imaging system | |
| CN105044895B (en) | A kind of super-resolution confocal microscopic imaging apparatus and method | |
| KR101181395B1 (en) | Multiple detection confocal microscope | |
| CN202814861U (en) | Multifunctional biomedical microscope | |
| CN109945797A (en) | A kind of surface figure measuring device | |
| CN109187430A (en) | Postposition is divided pupil laser differential confocal index of refraction in lens measurement method and device | |
| CN103954598A (en) | Axial high-accuracy location method and device based on evanescent wave illumination | |
| CN113267252A (en) | Staring type confocal microscopic morphology spectrum four-dimensional detection system | |
| CN104154868A (en) | Bifocal lens-based non-contact lens central thickness measuring device | |
| CN109520973A (en) | Postposition is divided pupil laser differential confocal microscopic detection method and device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |