CN1614457A - Confocal interference microscope with high-space resolution imaging ability - Google Patents
Confocal interference microscope with high-space resolution imaging ability Download PDFInfo
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- CN1614457A CN1614457A CN 200410096338 CN200410096338A CN1614457A CN 1614457 A CN1614457 A CN 1614457A CN 200410096338 CN200410096338 CN 200410096338 CN 200410096338 A CN200410096338 A CN 200410096338A CN 1614457 A CN1614457 A CN 1614457A
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Abstract
A microscope consists of light source, extender collimation lens, pupil filter, spectroscope, objective, reference reflector, collecting mirror and detector. The microscope is featured as utilizing confocal microscopic imaging technique to improve axial resolution of confocal microscope and utilizing superresolution pupil filtering technique to improve horizontal resolution of confocal microscope.
Description
Technical field
The invention belongs to optical microphotograph imaging and microscopic measurement technical field, relate to a kind of confocal interference microscope with high-space resolution imaging ability, it can be used for 3 d surface topography, three-dimensional microstructure, little step, little flute, integrated circuit live width of measuring samples etc.
Background technology
The thought of confocal microscope is proposed in nineteen fifty-seven first by American scholar M.Minsky the earliest, and obtains United States Patent (USP) in 1961, and the patent No. is US3013467.Confocal microscope places the conjugate position that corresponds to each other with pointolite, some thing and point probe three, and the some illumination and the point that constitute unique chromatography ability in the optical microphotograph imaging are surveyed micro imaging system.The ultimate principle of general confocal microscope as shown in Figure 1, the light that light source 1 sends is reflected by testee 9 after testee surface 9 is focused into hot spot through diaphragm 10, object lens 5, reflected light is reflected by spectroscope 4, to import from the flashlight of object and be positioned in the pin hole 11 of photodetector 12 fronts, forming point at photodetector 12 places detects, the photodetector 12 main flashlights that receive from the object focal point place, the return light beyond the focus is blocked by pin hole 11.When object is positioned at focal plane A, the luminous energy maximum that photodetector 12 receives, when object departs from focal plane A, reflected light is focused a certain position before or after the pin hole, this moment, photodetector 12 only received the sub-fraction luminous energy, that is to say that signal that object detects is than in the focal plane time when out of focus a little less than, so just can change and reflect the position of object with respect to the focal plane by the power that photodetector 12 detects light intensity signals.When object is done scanning motion in the x-y plane perpendicular to optical axis direction, confocal microscope according to optical axis z to defocus signal, x to y to the displacement size, can construct the three-D profile of testee.In the optical microscope imaging, confocal microscope has unique tomography ability because of it, and this just makes it be widely used in fields such as bioengineering, medical science detection, information stores, microelectronics, semiconductor material and surface profile measurement.
Confocal microscope is widely used in carrying out imaging measurement in the fields such as microelectronics, material, the accurate detection of industry, biomedicine, life science because of it has three-dimensional chromatography imaging capability, but, restricted the further raising of its imaging resolution characteristic owing to be subjected to the restriction of diffraction phenomena.Although its imaging resolution characteristic can be improved with traditional methods such as reducing optical wavelength by increasing numerical aperture of objective value NA, its improvement degree still is subjected to the restriction of diffraction limit.For fundamentally breaking through diffraction limit, improve the imaging resolution characteristic of confocal microscope, existing recently numerous unconventional confocal microscopic imaging principles and ultra-resolution method are suggested.
Aspect the research of confocal microscope, confocal interference microscope, 4PI confocal microscope, θ confocal microscope have appearred, based on the two-photon of optical nonlinearity behavior and multi-photon confocal microscope etc.Wherein, aspect the research of confocal interference microscope, M. turn round and look at and reported that the basic thought that interference technique and confocal microscopy are merged mutually (sees " the three-dimensional imaging principle of confocal microscopy " for details, M. turn round and look at work, Wang Guiying etc. translate, the New Age Press, publish in January, 2000), its principle as shown in Figure 2, the pointolite that light source 1 sends is parallel beam through beam-expanding collimation mirror 2 collimations, this parallel beam is divided into measuring beam and reference beam by spectroscope 4, measuring beam is reflected to condenser 7 after object lens 5 focus on measured object 9 surfaces, reference beam arrives condenser 7 after reference mirror 6 reflections, and condenser 7 can produce interference by coalescence with measuring beam and reference beam, the focus that detector 8 is positioned at condenser 7 is used to survey the confocal interference signal, and its big or small corresponding measured object is with respect to the relative displacement at object lens 5 focus places.This confocal interference microscope is keeping under the high prerequisite of the horizontal resolution characteristic of confocal microscope, can improve the azimuthal resolution of confocal microscope by interference technique.
At the super-resolution imaging technical elements, method of having studied and technology can reduce following a few class, one class is the Airy disk that reduces by the Rayleigh criterion decision, but do not increase the spatial-cut-off frequency of optical system, technology commonly used comprises: pupil filtering technology, Phase-Shift Masking Technique, based on super resolution technology of optical property nonlinearities change etc.; Second class is by increasing the optical system spatial-cut-off frequency, increase high frequency light proportion, reducing the Airy disk main lobe of optical system; The 3rd class is by changing optical system incident beam spatial frequency distribution, reach the main lobe that reduces the optical system Airy disk, generally can realize by light illumination technology such as off-axis illumination technology, deformation illumination technology, crossed polarized light lighting engineering, ring light lighting engineering and interfering beam space frequency displacement methods.
On the whole, above-mentioned novel confocal microscope and ultra-resolution method and technology, improve the imaging resolution characteristic of confocal microscope, solved the demand that numerous confocal microscope super-resolution micro-imagings are measured, but as one wishes not to the utmost aspect the three-dimensional super-resolution imaging of confocal microscope.Although existing three-dimensional super-resolution iris filter can be used for improving the three-dimensional super-resolution imaging ability of confocal microscope, should carry out transverse super-resolution and take into account axial super resolution again but they exist, the three-dimensional super-resolution effect is not special significant disadvantage usually, and the spatial discrimination imaging capability of confocal microscope is not significantly improved.
Summary of the invention
The objective of the invention is for overcoming the deficiency of above-mentioned prior art, the confocal interference microscope with high-space resolution imaging ability (being that azimuthal resolution and transverse resolution are all high) of a kind of lateral optical super-resolution, axial confocal interference high resolution is provided, detects carrying out the high spatial resolution micro-imaging in the fields such as microelectronics, material, the accurate detection of industry, biomedicine, life science in the hope of realizing.
Thought of the present invention is that the confocal interference microtechnic that will improve azimuthal resolution merges mutually with the super-resolution pupil filtering confocal microscopy that improves transverse resolution, constitutes the confocal interference microscope with high-space resolution imaging ability of pupil filtering formula.Its iris filter that adopts particular design carries out the mask correction to the pupil function of confocal interference microscope, and then reaches the change wavefront, and sharpening Airy disk main lobe reaches the transverse super-resolution power that improves confocal interference microscope.The raising of confocal microscope azimuthal resolution can realize by the confocal interference micro-imaging technique.Like this, just, can reach the purpose that improves the confocal microscope high spatial resolution.
Know-why of the present invention is a branch of as measuring beam with in the two-beam of spectroscope 4 beam splitting, reflexes to condenser 7 again after the object lens 5 by confocal microscope system focus on measured object 9 surfaces, constitutes the confocal micro-measurement light path system; With another light beams of spectroscope 4 beam splitting as the reference light beam, after this reference light is reflected by reference mirror 6 and spectroscope 4, arrive condenser 7, condenser 7 focuses on measuring beam and reference beam and produces interference fringe on the detector 8 and received by detector 8, reaches the axial resolution characteristic of improving the confocal interference microscopic system.Owing to adopt iris filter 3, sharpening the Airy disk master of confocal interference microscope distinguish, improved the horizontal resolution imaging ability of confocal microscope system, thereby improved the ability of confocal interference microscope high-space resolution imaging.
The confocal interference microscope that the present invention has high-space resolution imaging ability comprises light source 1, be successively placed on the light emitted end beam-expanding collimation mirror 2, iris filter 3, spectroscope 4, be placed on the object lens 5 on the spectroscope 4 folded light beam travel paths, the reference mirror 6 that comprises reflection beam splitting mirror 4 transmitted light beams also comprises condenser 7 that converges measuring beam and reference beam and the detector 8 that is placed on condenser 7 focuses.
The present invention preferentially selects for use light source 1 to be made of coherent source 13, focus lamp 14 and single-mode fiber 21, and the exit end A of single-mode fiber 21 forms the coherent point light source of high brightness.Light source 1 can also be made of coherent source 13, condenser 14, diaphragm 10, and coherent source 13 focuses on through condenser 14 and forms high brightness coherent point light source on the diaphragm 10.
The present invention preferentially selects for use detector 8 to be made of single-mode fiber 21 and photelectric receiver 12, the emergent light of single-mode fiber 21 B end is all received by photelectric receiver 12, the incident end B of single-mode fiber 21 is positioned on the focus of condenser 7, makes single-mode fiber 21 incident end B play the effect of confocal microscope pin hole 11.Detector 8 can also be made of pin hole 11 and photelectric receiver 12, and photelectric receiver 12 is close to pin hole 11 back.
Iris filter 3 can be between beam-expanding collimation mirror 2 and the spectroscope 4, also can be placed between condenser 7 and the spectroscope 4, between spectroscope 4 and the object lens 5, and can also be between condenser 7 and detector 8.Iris filter 3 can be phase-type wave filter, amplitude type wave filter, amplitude position phase hybrid filter and ring light shaping device 23, and ring light shaping device 23 can be the binary optical device that the annulus morpheme distributes mutually.
Among the present invention, can a z be set in object lens 5 fronts, be used to expand microscope z to the spotting scaming scope to microcobjective micropositioner 18.
Iris filter 3 of the present invention is preferentially selected ring light shaping device 23 for use, ring light shaping device 23 by particular design, with the incident laser beam shaping of confocal microscope is the ring light of the required ad hoc structure of transverse super-resolution, thereby reach the transverse resolution that improves confocal microscope, simultaneously, by adopting the light path arrangement of confocal interference, improve the azimuthal resolution of confocal microscope.And then when having avoided existing three-dimensional super-resolution iris filter to be used to improve confocal microscope, should improve transverse resolution, improve azimuthal resolution again, thereby reduced the combination property of iris filter 3 three-dimensional super-resolutions.
The confocal interference microscope that the present invention has high-space resolution imaging ability has following advantage:
1) improves the three-dimensional super-resolution ability of confocal interference microscope;
2) when improving horizontal resolution characteristic, the axial range ability of expansion confocal interference microscopic system;
3) can improve the out of focus characteristic of confocal interference microscopic system.
Description of drawings
Fig. 1 is the synoptic diagram of existing confocal microscope;
Fig. 2 is the synoptic diagram of existing confocal interference microscope;
Fig. 3 has the synoptic diagram of the confocal interference microscope of high-space resolution imaging ability for the present invention;
Fig. 4 is the synoptic diagram of the preferred embodiment of the present invention one;
Fig. 5 is the synoptic diagram of the preferred embodiment of the present invention two;
Fig. 6 is the horizontal normalized response simulation curve of the preferred embodiment of the present invention one under different ε;
Fig. 7 is the axial normalized response simulation curve of the preferred embodiment of the present invention one under ε=0.5 situation.
Wherein, 1 light source, 2 beam-expanding collimation mirrors, 3 iris filters, 4 spectroscopes, 5 object lens, 6 reference mirrors, 7 condensers, 8 detectors, 9 testees, 10 diaphragms, 11 pin holes, 12 photodetectors, 13 coherent sources, 14 focus lamps, 15 λ/4 wave plates, 16 detectable signal processing and amplifying systems, 17 computer measurement control system, 18z is to the microcobjective micropositioner, 19 adjustable diaphragms, the 20x-y two-dimentional work bench, 21 single-mode fibers, 22 polarization spectroscopes, 23 ring light shaping devices, the horizontal normalized response simulation curve of 24 ε=0 o'clock embodiment one, the horizontal normalized response simulation curve of 25 ε=0.25 o'clock embodiment one, the horizontal normalized response simulation curve of 26 ε=0.50 o'clock embodiment one, the horizontal normalized response simulation curve of 27 ε=0.75 o'clock embodiment one, the axial normalized response simulation curve of 28 ε=0.50 o'clock embodiment one.
With preferred embodiment the present invention is further described with reference to the accompanying drawings, technical scheme of the present invention, feature and advantage are described.
Embodiment
The present invention has the structure of confocal interference microscope of high-space resolution imaging ability and principle of work, and to reach description of drawings in conjunction with the embodiments as follows:
The structure of the preferred embodiment of the present invention one as shown in Figure 4, it comprises laser instrument 13, and focus lamp 14, diaphragm 10, beam-expanding collimation mirror 2, the shaping incident light that is successively placed on laser instrument 13 transmitting terminals be the ring light shaping device 23 of ring light, adjust adjustable diaphragm 19, the polarization spectroscope 22 of ring light inner and outer ring normalization radius, be placed on λ/4 wave plates 15 on the measuring beam travel path of polarization spectroscope 22 reflections, z is to microcobjective micropositioner 18, object lens 5 and x-y two-dimentional work bench 20; Comprise λ/4 wave plates 15 and the reference mirror 6 that is placed on the reference beam propagates path of polarization spectroscope 22 transmissions; A detectable signal processing and amplifying system 16 that comprise the condenser 7 that converges measuring beam and reference beam, be placed on pin hole 11 on condenser 7 focuses, be close to photodetector 12 behind the pin hole 11, links to each other with photodetector 12, a computer measurement control system 17 and an x-y two-dimentional work bench 20, whole measuring process is by 17 controls of computer measurement control system and handle.
Owing to adopted the shaping circular light irradiation, increased the shared ratio of laser beam irradiation system high-frequency light, the main lobe of confocal interference microscopic system Airy disk is diminished, thereby reach the horizontal resolution imaging ability that improves confocal microscope system, reduced the main lobe halfwidth of axial response characteristic simultaneously by confocal interference, improve the axial resolution characteristic of confocal interference system, thereby reached the ability of improving the confocal interference microscope high-space resolution imaging.
The ring light shaping device 3 of the preferred embodiment of the present invention one can also can be placed between condenser 7 and the polarization spectroscope 22 between beam-expanding collimation mirror 2 and polarization spectroscope 22, can also be placed between polarization spectroscope 22 and the object lens 5.Ring light shaping device can be the binary optical device that the annulus morpheme distributes mutually.
The structure of another preferred embodiment of the present invention two as shown in Figure 5, different with embodiment one is light source 1 for by laser instrument 13, be successively placed on the focus lamp 14 of laser instrument transmitting terminal, the coherent point light-source system that single-mode fiber 21 constitutes, light beam forms high brightness coherent point light source through single-mode fiber exit end B.Detector 8 can also be the some detection system that is made of single-mode fiber 21 and photelectric receiver 12, is equivalent to the pin hole 11 of confocal microscope system on the incident end B function of single-mode fiber 21, is used to satisfy the required point of confocal interference microscope and surveys requirement.
Below the axial and transverse response characteristic of the embodiment of the invention one is carried out emulation, further specify its high spatial imaging capability.
Measure object lens 8 in the embodiment of the invention one and select 40 * 0.65 common flat field achromatic micro objectives for use, pin hole 11 diameters are selected 10 μ m for use.
ε is the ratio of ring radius and outer shroud radius in the ring light, and Fig. 6 has provided ε=0,0.25,0.50 and the horizontal normalized response simulation curve 24,25,26 and 27 of 0.75 o'clock the embodiment of the invention one.As seen from Figure 6, along with the increase of ε, the transverse resolution of confocal interference microscope of the present invention increases.
Fig. 7 has provided ε=0.50 o'clock, the horizontal normalized response simulation curve 28 of the embodiment of the invention one.As seen from Figure 7, the halfwidth of the axial response center curve of the embodiment of the invention one is significantly less than the halfwidth of confocal interference microscope axial response contour curve, i.e. the introducing of interference technique has improved the azimuthal resolution of confocal microscope.
As seen, the spatial discrimination imaging capability of the embodiment of the invention one improves.
Below in conjunction with the accompanying drawings concrete preferred implementation of the present invention and simulated effect are described; but these explanations can not be understood that to have limited scope of the present invention; protection scope of the present invention is limited by the claims of enclosing, and any change of carrying out on claim of the present invention basis all is protection scope of the present invention.
Claims (8)
1. confocal interference microscope with high-space resolution imaging ability, it is characterized in that this microscope comprises light source (1), be successively placed on the light emitted end beam-expanding collimation mirror (2), iris filter (3), spectroscope (4), be placed on the object lens (5) on spectroscope (4) the folded light beam travel path, the reference mirror (6) that comprises reflection beam splitting mirror (4) transmitted light beam also comprises the condenser (7) that converges measuring beam and reference beam and is placed on detector (8) on condenser (7) focus.
2. the confocal interference microscope with high-space resolution imaging ability according to claim 1, it is characterized in that described light source (1) is made of coherent source (13), condenser (14), diaphragm (10), coherent source (13) focuses on diaphragm (10) through condenser (14) and goes up formation high brightness coherent point light source.
3. the confocal interference microscope with high-space resolution imaging ability according to claim 1, it is characterized in that described light source (1) is made of coherent source (13), focus lamp (14) and single-mode fiber (21), the exit end A of single-mode fiber (21) forms the coherent point light source of high brightness.
4. the confocal interference microscope with high-space resolution imaging ability according to claim 1, it is characterized in that described detector (8) is made of single-mode fiber (21) and photelectric receiver (12), the emergent light of single-mode fiber (21) B end is all received by photelectric receiver (12), and the incident end B of single-mode fiber (21) is positioned on the focus of condenser (7).
5. the confocal interference microscope with high-space resolution imaging ability according to claim 1 is characterized in that described detector (8) is made of pin hole (11) and photelectric receiver (12), and photelectric receiver (12) is close to pin hole (11) back.
6. the confocal interference microscope with high-space resolution imaging ability according to claim 1, it is characterized in that iris filter (3) is positioned between beam-expanding collimation mirror (2) and the spectroscope (4) or is placed between condenser (7) and the spectroscope (4) or places between spectroscope (4) and the object lens (5), can also be placed between condenser (7) and the detector (8).
7. the confocal interference microscope with high-space resolution imaging ability according to claim 1 is characterized in that iris filter (3) is phase-type wave filter or amplitude type wave filter or amplitude position phase hybrid filter or ring light shaping device.
8. ring light shaping device according to claim 7 is characterized in that described ring light shaping device is the binary optical device that the annulus morpheme distributes mutually.
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| CN1323309C (en) * | 2005-11-21 | 2007-06-27 | 哈尔滨工业大学 | Reflection multilight bean confocal interference microscope having several tens nanometer lateral discriminability |
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