CN105547145B - A kind of super-resolution structure detects confocal coherent imaging device and its imaging method - Google Patents

A kind of super-resolution structure detects confocal coherent imaging device and its imaging method Download PDF

Info

Publication number
CN105547145B
CN105547145B CN201510868029.6A CN201510868029A CN105547145B CN 105547145 B CN105547145 B CN 105547145B CN 201510868029 A CN201510868029 A CN 201510868029A CN 105547145 B CN105547145 B CN 105547145B
Authority
CN
China
Prior art keywords
confocal
super
imaging
imaging device
detects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201510868029.6A
Other languages
Chinese (zh)
Other versions
CN105547145A (en
Inventor
王宝凯
张甦
邹丽敏
谭久彬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Harbin Institute of Technology
Original Assignee
Harbin Institute of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Harbin Institute of Technology filed Critical Harbin Institute of Technology
Priority to CN201510868029.6A priority Critical patent/CN105547145B/en
Publication of CN105547145A publication Critical patent/CN105547145A/en
Application granted granted Critical
Publication of CN105547145B publication Critical patent/CN105547145B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G01B9/02042—Confocal imaging
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G01B9/02048—Rough and fine measurement

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

A kind of super-resolution structure detects confocal coherent imaging device and its imaging method, it is related to a kind of imaging device and its imaging method.The purpose of the present invention is to solve the resolving powers of existing confocal limit technology to be difficult to improve, the unsharp problem of confocal imaging.The present invention includes including laser light source, collimator and extender device, Amici prism, quarter wave plate, scanning system, illumination objective lens, production piece, collecting lens and ccd detector are successively arranged along the laser light source light direction of propagation, it is integrated on test surface, the luminous sensitivity for changing corresponding detecting location, makes system CTF bandwidth become larger.The present invention improves the spatial-cut-off frequency of confocal coherence imaging system, widens spatial frequency domain bandwidth, so that imaging system transverse resolution is significantly improved, the fields of measurement suitable for the imaging of industrial pattern.

Description

A kind of super-resolution structure detects confocal coherent imaging device and its imaging method
Technical field
The present invention relates to imaging device and its imaging methods, and in particular to a kind of confocal coherent imaging of super-resolution structure detection Device and its imaging method, belong to technical field of optical precision measurement.
Background technique
Optical microscopy is a kind of with a long history and highly important no destructive technology, is widely used in biology and material The fields such as material science.Confocal micro-measurement technology is a kind of micro- skill of three-dimensional optical measured suitable for micron and submicron-scale Art.The chromatography ability of reflection-type confocal microscopic system is allowed to seem particularly significant in three-dimensional imaging field.
Middle and later periods in the 1950s, confocal microscope are invented by Minsky, 1977, C.J.R.Sheppard and A.Choudhury illustrates confocal microscope system under the action of pinhole mask for the first time, to sacrifice visual field as cost, makes laterally point Resolution is increased to 1.4 times of same apertures simple microscope.Hereafter, confocal micro-measurement technology is become by common concern The important branch in micrology field.
But conventional confocal technology is constantly subjected to the influence of detector size, the resolving power of confocal microscopy is difficult to mention It is high.
Summary of the invention
The purpose of the present invention is to solve the resolving powers of existing confocal microscopy to be difficult to improve, and confocal imaging is unintelligible The problem of.
The technical scheme is that a kind of super-resolution structure detects confocal coherent imaging device, including laser light source, edge The laser light source light direction of propagation is successively arranged collimator and extender device, Amici prism, quarter wave plate, scanning system, illumination objective lens, work Industry sample, collecting lens and ccd detector, the imaging process of entire optical path are coherent imaging.
The scanning system includes scanning galvanometer, and scanning galvanometer changes beam deflection angle and swept in the object plane of production piece It retouches.
The imaging method of confocal coherent imaging device is detected based on a kind of super-resolution structure, comprising the following steps:
Step 1: obtaining the integral light intensity of confocal system using the probe function of ccd detector；
Step 2: the integral light intensity according to step 1 obtains the three-dimensional amplitude point spread function of confocal system；
Step 3: the three-dimensional amplitude point spread function described in step 2 carries out two-dimensional Fourier transform, confocal system is obtained The two-dimentional coherence transfer function of system；
Step 4: the detection result that will be obtained, is reconstructed with three phase linearity separation methods, obtains super resolution image.
The step 1 specifically includes: the test surface uses non-homogeneous detection mode, so that detection is sensitive in test surface Coefficient is spent into Sine distribution, detects hot spot light intensity in the circular function that radius is Airy radius multiplied by the detection system of Sine distribution Number, obtains the integral light intensity of confocal system.
The test surface uses non-homogeneous detection mode, is integrated in test surface region, and corresponding detecting location is changed Luminous sensitivity coefficient, and then make probe function at Sine distribution, within the system, since probe function is Sine distribution, visit It surveys spectrum of function effective width compared with common confocal system to increase, so as to increase system CTF bandwidth, system is laterally divided Distinguish that power significantly improves the transverse direction that confocal system is sufficiently excavated while the chromatography ability that can play reflection-type confocal microscopic system Differentiate potentiality.
The method that the step 2 obtains confocal system three-dimensional amplitude point spread function includes: by integral described in step 1 Light intensity is converted into root of making even after Three dimensional convolution form, in the measurement of thin sample, it is believed that equiphase in focal beam spot, then The square root of the collected light distribution of ccd detector can approximately indicate distribution of amplitudes.
It is constant in the position of test surface that the scanning system detects hot spot during the scanning process.
The detection hot spot light intensity root is in the circular function that radius is Airy radius and in the circular function after calculating Light intensity integral realizes pin hole detection, using this method instead of the pin hole before the detector in existing confocal system, realizes needle Hole detecting function.
The present invention has the effect that super-resolution structure of the present invention detects confocal coherent imaging device compared with prior art With in, the pin hole of test surface in common confocal system is not needed；It is integrated in test surface specific region, changes corresponding detection position The luminous sensitivity set, probe function keep search coverage identical with common confocal middle pin hole region at Sine distribution；The invention Property structure detection imaging method is combined with confocal relevant microscopic system, improve confocal coherence imaging system space cut Only frequency widens spatial frequency domain bandwidth, so that imaging system transverse resolution is significantly improved, the survey suitable for the imaging of industrial pattern Amount field.
Detailed description of the invention
Fig. 1 is that superstructure of the present invention detects confocal coherent imaging device structural schematic diagram；
Fig. 2 is NA=0.1, λ=660nm, test surface pin hole radiusWhen, substantially confocal relevant microscopic system Test surface frequency spectrum normalize analogous diagram；
Fig. 3 is NA=0.1, λ=660nm, test surface pin hole radius probe functionWhen, structure detects confocal phase Dry systems test surface frequency spectrum normalizes analogous diagram；
Fig. 4 is NA=0.1, λ=660nm, test surface pin hole radiusWhen, substantially confocal relevant microscopic system CTF normalize analogous diagram；
Fig. 5 is NA=0.1, λ=660nm, test surface pin hole radius probe functionWhen, structure detects confocal phase Dry systems CTF normalizes analogous diagram；
Fig. 6 is NA=0.1, λ=660nm, test surface pin hole radius probe functionWhen, structure detects confocal phase Dry systems CTF and substantially confocal coherent system CTF are in fxDirection comparison normalization analogous diagram；
Fig. 7 be on the direction x and the direction y between be divided into the striped sample analogous diagram of 3.5um；
Fig. 8 is striped sample in NA=0.1, λ=660nm, test surface pin hole radiusWhen substantially confocal phase The frequency spectrum analogous diagram detected in dry microscopic system；
Fig. 9 is striped sample in NA=0.1, λ=660nm, test surface pin hole radiusWhen substantially confocal phase Imaging amplitude normalization analogous diagram in dry microscopic system；
Figure 10 is striped sample in NA=0.1, λ=660nm, test surface pin hole radius probe functionWhen, structure detection it is confocal The frequency spectrum analogous diagram detected in relevant microscopic system；
Figure 11 is striped sample in NA=0.1, λ=660nm, test surface pin hole radius probe functionWhen, structure detection is confocal aobvious Imaging amplitude normalization analogous diagram in relevant micro-system；
Figure 12 be striped sample and its basic confocal microscope system and structure detection confocal microscope system in imaging in x Direction amplitude comparison normalization analogous diagram；
In figure: 1, laser light source, 2, collimator and extender device, 3, Amici prism, 4, collecting lens, 5, quarter wave plate, 6, CCD spy Survey device, 7, scanning system, 8, illumination objective lens, 9, production piece.
Specific embodiment
A specific embodiment of the invention is described with reference to the drawings, a kind of super-resolution structure detection of the invention is confocal to be concerned with into As device, including laser light source 1, collimator and extender device 2, Amici prism 3,1/4 are successively arranged along the 1 light direction of propagation of laser light source Wave plate 5, scanning system 7, illumination objective lens 8, production piece 9, collecting lens 4 and ccd detector 6.
The scanning system includes scanning galvanometer, and scanning galvanometer changes beam deflection angle and swept in the object plane of production piece It retouches.
The imaging method of confocal coherent imaging device is detected based on a kind of super-resolution structure, comprising the following steps:
Step 1: the step 1 specifically includes: the test surface uses non-homogeneous detection mode, so that visiting in test surface Sensitivity coefficient is surveyed into Sine distribution, detects hot spot light intensity in the circular function that radius is Airy radius multiplied by Sine distribution Coefficient is detected, the integral light intensity of confocal system is obtained:
Since practical substantially confocal coherent system detection light intensity is product of the test surface amplitude to test surface in limited range Square divided, so the potentiality of the lateral resolution of confocal relevant microscopic system will be affected, i.e. the detection of finite size will System lateral resolution is caused to be deteriorated.
Wherein D (r) is probe function, r in formula1,rs,r2Respectively indicate object space coordinate；M1,M2Respectively indicate lighting system With detection system enlargement ratio；Scan position coordinate and image space coordinate, h1(r), o (r) and h2(r) lighting system is respectively indicated Point spread function, object function and detection system point spread function.
The test surface uses non-homogeneous detection mode, is integrated in test surface region, and corresponding detecting location is changed Luminous sensitivity coefficient, and then make probe function at Sine distribution.
Step 2: integral light intensity described in step 1 is converted into Three dimensional convolution form:
In formulaFor Three dimensional convolution symbol, (2) formula evolution is obtained into three-dimensional amplitude point spread function (APSF) h (r) are as follows:
Step 3: assuming that axial defocusing amount z=0 carries out two-dimentional Fourier to three-dimensional amplitude point spread function (APSF) h (r) Transformation, can be obtained the two-dimentional coherence transfer function (CTF) of system:
From CTF angle analysis, the CTF and probe function frequency spectrum product for collecting object lens lead to the equivalent CTF band for collecting object lens Width becomes smaller, so that whole system CTF bandwidth becomes smaller.Under the conditions of point detection, system CTF bandwidth is maximum, is the 2 of simple microscope Times.Under the conditions of detection area is infinitely great, system CTF bandwidth is minimum.
In basic confocal system, probe function is D (r)=circ (r/rd) δ (z), Fourier transformation normalizes imitative True figure is as shown in Figure 2.
Step 4: the detection result that will be obtained, is reconstructed with three phase linearity separation methods, obtains super resolution image.
It is constant in the position of test surface that the scanning system 7 detects hot spot during the scanning process.
The test surface uses non-homogeneous detection mode so that in test surface detectivity coefficient at Sine distribution, Test surface is integrated in region, changes the luminous sensitivity coefficient of corresponding detecting location, and then makes probe function at Sine distribution.
Probe function is taken in the present embodiment are as follows:
F in formula0Indicate the spatial frequency of cosine component in probe function；Respectively indicate different directions cosine point The initial phase of amount；rdIndicate the radius of probe function.
In formula,NA=0.1, λ=660nm obtain integral light intensity to above formula, are melted into convolution Fourier transformation is carried out after form:
In formulaIndicate probe function frequency spectrum；M, n respectively indicate x, the direction y frequency content.
Fig. 3 is probe functionFu in Leaf transformation normalizes analogous diagram.
At this point, the CTF of confocal system becomes:
The five cross one another parts of component frequency information need to be varied multiple times there are phase aliasing in above formulaWith's Value, is reconstructed acquired image, removes the frequency information of a part of phase overlapping area, obtain last super resolution image.
The detection hot spot light intensity root is in the circular function that radius is Airy radius and in the circular function after calculating Light intensity integral realizes pin hole detection.
Fig. 4 is NA=0.1, λ=660nm, test surface pin hole radiusWhen, substantially confocal relevant microscopic system CTF normalize analogous diagram；
Fig. 5 is NA=0.1, λ=660nm, test surface pin hole radius probe functionWhen, structure detects confocal phase Dry systems CTF normalizes analogous diagram；
Fig. 6 is NA=0.1, λ=660nm, test surface pin hole radius probe functionWhen, structure detects confocal phase Dry systems CTF and substantially confocal coherent system CTF are in fxDirection comparison normalization analogous diagram；
By two curves in comparison diagram 6, it will be evident that structure detects confocal relevant microscopic system CTF cutoff frequency It is improved relative to substantially confocal relevant microscopic system.
Fig. 7 be on the direction x and the direction y between be divided into the striped sample analogous diagram of 3.3um；
Fig. 8 and Fig. 9 is the sample spectrum information detected in substantially confocal relevant microscopic system and sample respectively in base Imaging analogous diagram in this confocal relevant microscopic system.
Figure 10 and Figure 11 is that structure detects the sample spectrum information and sample detected in confocal relevant microscopic system respectively Product detect imaging analogous diagram in confocal relevant microscopic system in structure.
It is substantially confocal to can be seen that highest sample frequency that the present embodiment can detect is apparently higher than by comparison diagram 8 and Figure 10 Relevant microscopic system.
Pass through comparison diagram 9 and Figure 11, it can be seen that it is bright that structure detects the integral image resolving power that confocal ultra-resolution method obtains Aobvious to be higher than basic confocal microscope system, in conjunction with the comparing result of Figure 12, the present embodiment realizes the two of confocal relevant microscopic system Super-resolution is tieed up, the equivalent CTF bandwidth of confocal relevant microscopic system is expanded.

Claims (6)

1. a kind of super-resolution structure detects the imaging method of confocal coherent imaging device, the imaging device includes laser light source (1), collimator and extender device (2) is successively arranged along laser light source (1) spread fiber direction, Amici prism (3), quarter wave plate (5), sweep Retouch system (7), illumination objective lens (8), production piece (9), collecting lens (4) and ccd detector (6), collecting lens (4) and light splitting Prism (3) connection, ccd detector (6) connect collecting lens (4), and the scanning system (7) includes scanning galvanometer, scanning galvanometer Change beam deflection angle to be scanned in the object plane of production piece, be characterized in that following steps:
Step 1: obtaining the integral light intensity of confocal system using the probe function of the Sine distribution of ccd detector；
Step 2: the integral light intensity according to step 1 obtains the three-dimensional amplitude point spread function of confocal system；
Step 3: the three-dimensional amplitude point spread function described in step 2 carries out two-dimensional Fourier transform, confocal system is obtained Two-dimentional coherence transfer function；
Step 4: the detection result that will be obtained, is reconstructed with three phase linearity separation methods, obtains super resolution image.
2. a kind of super-resolution structure according to claim 1 detects the imaging method of confocal coherent imaging device, feature Be: the step 1 specifically includes: the ccd detector uses non-homogeneous detection mode, so that in ccd detector test surface Detectivity coefficient detects hot spot light intensity in the circle that radius is Airy radius multiplied by the spy of Sine distribution at Sine distribution Coefficient is surveyed, the integral light intensity of confocal system is obtained.
3. a kind of super-resolution structure according to claim 2 detects the imaging method of confocal coherent imaging device, feature Be: the test surface uses non-homogeneous detection mode, is integrated in test surface region, changes the light of corresponding detecting location Sensitivity coefficient, and then make probe function at Sine distribution.
4. a kind of super-resolution structure according to claim 1 detects the imaging method of confocal coherent imaging device, feature Be: the method that the step 2 obtains confocal system three-dimensional amplitude point spread function includes: by integral light described in step 1 It is converted into root of making even after Three dimensional convolution form by force.
5. a kind of super-resolution structure according to claim 1 detects the imaging method of confocal coherent imaging device, feature Be: it is constant in the position of test surface that the scanning system (7) detects hot spot during the scanning process.
6. a kind of super-resolution structure according to claim 1 detects the imaging method of confocal coherent imaging device, feature Be: the hot spot light intensity sqrt of ccd detector test surface acquisition multiplied by the circular function that radius is Airy radius simultaneously Pin hole detection is realized to light intensity integral in the circular function after calculating.
CN201510868029.6A 2015-11-30 2015-11-30 A kind of super-resolution structure detects confocal coherent imaging device and its imaging method Active CN105547145B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201510868029.6A CN105547145B (en) 2015-11-30 2015-11-30 A kind of super-resolution structure detects confocal coherent imaging device and its imaging method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201510868029.6A CN105547145B (en) 2015-11-30 2015-11-30 A kind of super-resolution structure detects confocal coherent imaging device and its imaging method

Publications (2)

Publication Number Publication Date
CN105547145A CN105547145A (en) 2016-05-04
CN105547145B true CN105547145B (en) 2019-02-05

Family

ID=55826508

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201510868029.6A Active CN105547145B (en) 2015-11-30 2015-11-30 A kind of super-resolution structure detects confocal coherent imaging device and its imaging method

Country Status (1)

Country Link
CN (1) CN105547145B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107085290B (en) * 2017-06-12 2019-02-01 哈尔滨工业大学 A kind of Laser Scanning Confocal Microscope parallel scan device and scan method based on scanning galvanometer and semiconductor laser
CN108535217A (en) * 2018-04-08 2018-09-14 雄安华讯方舟科技有限公司 optical coherence tomography system
CN109883955B (en) * 2019-03-04 2021-10-08 哈尔滨工业大学 Device and method for obtaining optimal structure detection function of structure detection microscopic imaging system

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1614457A (en) * 2004-11-30 2005-05-11 哈尔滨工业大学 Confocal interference microscope with high-space resolution imaging ability
CN101182992A (en) * 2007-12-27 2008-05-21 哈尔滨工业大学 Compound shade ultra-distinguish differential confocal measurement method and device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008062879B4 (en) * 2008-10-10 2010-10-28 Universität Stuttgart Method and arrangement for scalable interferometry
TWI403756B (en) * 2010-06-18 2013-08-01 Univ Nat Taiwan 3d optical coherent tomography with confocal imaging apparatus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1614457A (en) * 2004-11-30 2005-05-11 哈尔滨工业大学 Confocal interference microscope with high-space resolution imaging ability
CN101182992A (en) * 2007-12-27 2008-05-21 哈尔滨工业大学 Compound shade ultra-distinguish differential confocal measurement method and device

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
Factors Influencing the Resolution of the Confocal Laser Scanning Optical Microscope;Min Chang et al;《Advances in Optoelectronics and Micro/nano-optics》;20101231;1-3
Super-resolution imaging based on virtual airy spot;Zhengjun Liu et al;《Proc. Of SPIE》;20150228;第9446卷;94460Y-1-94460Y-7

Also Published As

Publication number Publication date
CN105547145A (en) 2016-05-04

Similar Documents

Publication Publication Date Title
CN105319195B (en) A kind of super-resolution structure detection array confocal fluorescent imaging device and its imaging method
CN105758799B (en) A kind of super-resolution array virtual architecture optical illumination imaging device and its imaging method
CN106767400B (en) Structure detection confocal microscopic imaging method and device based on spatial light modulator
CN100398980C (en) Three-dimensional super-resolution confocal array scanning and micro-detecting method and device
CN103969239B (en) A kind of point pupil laser differential confocal Raman spectra test method and device
CN101290293B (en) Differential confocal Raman spectra test method
CN105486638B (en) A kind of super-resolution array scanning Structured Illumination imaging device and its imaging method
CN207556477U (en) A kind of surface figure measuring device
CN109001207B (en) Method and system for detecting surface and internal defects of transparent material
US20150241351A1 (en) Methods for resolving positions in fluorescence stochastic microscopy using three-dimensional structured illumination
CN105510229B (en) A kind of super-resolution virtual architecture optical illumination imaging device and its imaging method
CN103411957A (en) High-space-resolution double-shaft confocal atlas micro-imaging method and device
CN105547145B (en) A kind of super-resolution structure detects confocal coherent imaging device and its imaging method
CN106248532A (en) The optical detecting method of particle shape and system
CN102636118A (en) Laser three-differential cofocal theta imaging detection method
CN105319196B (en) A kind of super-resolution structure detection confocal fluorescent imaging device and its imaging method
Grochalski et al. The optical aspect of errors in measurements of surface asperities using the optical profilometry method
CN104931481B (en) Laser dual-axis differential confocal induced breakdown Raman spectrum imaging detection method and device
CN104034271B (en) A kind of lateral resolution reaches the interference rotation map detection method of 1nm
CN105547144B (en) A kind of confocal coherent imaging device of super-resolution structure detection array and its imaging method
Arvidson et al. Lateral resolution enhancement of vertical scanning interferometry by sub-pixel sampling
Wang et al. Divided-aperture differential confocal fast-imaging microscopy
CN109520973A (en) Postposition is divided pupil laser differential confocal microscopic detection method and device
Chen et al. High-speed chromatic confocal microscopy using multispectral sensors for sub-micrometer-precision microscopic surface profilometry
Buajarern et al. Characteristics of laser scanning confocal microscopes for surface texture measurements

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant