CN105547144B - A kind of confocal coherent imaging device of super-resolution structure detection array and its imaging method - Google Patents

A kind of confocal coherent imaging device of super-resolution structure detection array and its imaging method Download PDF

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CN105547144B
CN105547144B CN201510868011.6A CN201510868011A CN105547144B CN 105547144 B CN105547144 B CN 105547144B CN 201510868011 A CN201510868011 A CN 201510868011A CN 105547144 B CN105547144 B CN 105547144B
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confocal
imaging
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imaging device
test surface
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CN105547144A (en
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邹丽敏
王宝凯
张甦
谭久彬
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Harbin Institute of Technology
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G01B9/02042—Confocal imaging
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G01B9/02048—Rough and fine measurement

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Abstract

A kind of confocal coherent imaging device of super-resolution structure detection array and its imaging method, it is related to a kind of imaging device and its imaging method.The purpose of the present invention is to solve the resolving powers of existing confocal limit technology to be difficult to improve, the unsharp problem of confocal imaging.The present invention includes laser light source, collimator and extender device, microlens array, collimation lens, Amici prism, quarter wave plate, scanning system, illumination objective lens, production piece, collecting lens and ccd detector are sequentially placed along the laser light source light direction of propagation, it is integrated on test surface, the luminous sensitivity for changing corresponding detecting location, makes system CTF bandwidth become larger.The present invention improves the imaging rate that structure detects confocal coherence imaging system while improving confocal system transverse resolution, is applicable to the fields of measurement of production piece imaging.

Description

A kind of confocal coherent imaging device of super-resolution structure detection array and its imaging method
Technical field
The present invention relates to imaging device and its imaging methods, and in particular to a kind of super-resolution structure detection array is confocal relevant Imaging device and its imaging method, belong to technical field of optical precision measurement.
Background technique
Optical microscopy is a kind of with a long history and highly important no destructive technology, is widely used in biology and material The fields such as material science.Confocal micro-measurement technology is a kind of micro- skill of three-dimensional optical measured suitable for micron and submicron-scale Art.The chromatography ability of reflection-type confocal microscopic system is allowed to seem particularly significant in three-dimensional imaging field.
Middle and later periods in the 1950s, confocal microscope are invented by Minsky, 1977, C.J.R.Sheppard and A.Choudhury illustrates confocal microscope system under the action of pinhole mask for the first time, to sacrifice visual field as cost, makes laterally point Resolution is increased to 1.4 times of same apertures simple microscope.Hereafter, confocal micro-measurement technology is become by common concern The important branch in micrology field.
But conventional confocal technology is constantly subjected to the influence of detector size, the resolving power of confocal microscopy is difficult to mention It is high.
Summary of the invention
The purpose of the present invention is to solve the resolving powers of existing confocal microscopy to be difficult to improve, and imaging rate is low, altogether Burnt the problem of the imaging is not clear.
The technical scheme is that a kind of confocal coherent imaging device of super-resolution structure detection array, including laser light Source is sequentially placed collimator and extender device, microlens array, collimation lens, Amici prism, 1/4 along the laser light source light direction of propagation Wave plate, scanning system, illumination objective lens, production piece, collecting lens and ccd detector.
The present invention is using coherent illumination, entire light path imaging process approximation coherent imaging.
The scanning system includes scanning galvanometer, and scanning galvanometer changes beam deflection angle and swept in the object plane of production piece It retouches.
Based on a kind of imaging method of the confocal coherent imaging device of super-resolution structure detection array, including following step It is rapid:
Step 1: ccd detector obtains the product of confocal system according to the probe function of hot spot light intensity each in circular array Light splitting is strong；
Step 2: the integral light intensity according to step 1 obtains the three-dimensional amplitude point spread function of confocal system；
Step 3: the three-dimensional amplitude point spread function described in step 2 carries out two-dimensional Fourier transform, confocal system is obtained The two-dimentional coherence transfer function of system；
Step 4: the detection result that will be obtained, is reconstructed to obtain super resolution image with three phase linearity separation methods.
The step 1 specifically includes: the test surface uses non-homogeneous detection mode, so that in test surface circular array, Detectivity coefficient is at Sine distribution in single border circular areas, and each detection hot spot light intensity is in the circle that radius is Airy radius Multiplied by the detection coefficient of Sine distribution in function, the integral light intensity of confocal system is obtained.
The test surface uses non-homogeneous detection mode, is integrated in test surface region, and corresponding detecting location is changed Luminous sensitivity coefficient, and then make probe function at Sine distribution, within the system, since probe function is Sine distribution, visit It surveys spectrum of function effective width compared with common confocal system to increase, so as to increase system CTF bandwidth, system is laterally divided Distinguish that power significantly improves the transverse direction that confocal system is sufficiently excavated while the chromatography ability that can play reflection-type confocal microscopic system Differentiate potentiality.
The method that the step 2 obtains confocal system three-dimensional amplitude point spread function includes: by integral described in step 1 Light intensity is converted into root of making even after Three dimensional convolution form.
It is constant in the position of test surface that the scanning system detects hot spot during the scanning process.
The present invention has the effect that super-resolution structure of the present invention detects confocal coherent imaging device compared with prior art With in, the pin hole of test surface in common confocal system is not needed；It is integrated in test surface specific region, changes corresponding detection position The luminous sensitivity set, probe function keep search coverage identical with common confocal middle pin hole field at Sine distribution；Due to super-resolution Structure detects in confocal coherent imaging device and acquires hot spot data by CCD, so that measuring speed substantially reduces；By in structure It detects in confocal coherence imaging system and microlens array is added, realize multiple spot illumination in sample surfaces, and select in CCD detection face Corresponding array region detection hot spot can be improved structure and detect confocal coherent imaging rate；Non-homogeneous spy is used in test surface It surveys, in test surface circular array, detectivity coefficient is at Sine distribution in single border circular areas, to make the frequency of probe function Spectrum broadens, and the coherence transfer function for detecting optical path will also broaden, and then increases system CTF bandwidth, enables the system to detect Higher frequency information.The combining structure detection imaging method with confocal relevant microscopic system of the invention, is mentioning The imaging rate that structure detects confocal coherence imaging system is improved while high confocal system transverse resolution, is applicable to industry The fields of measurement of sample imaging.
Detailed description of the invention
Fig. 1 is the confocal coherent imaging device structural schematic diagram of superstructure detection array of the present invention.
Fig. 2 is NA=0.1, λ=660nm, test surface pin hole radiusWhen, the spy of basic confocal microscope system Survey face frequency spectrum normalizes analogous diagram.
Fig. 3 is NA=0.1, λ=660nm, test surface pin hole radiusProbe functionWhen, structure detects confocal system Test surface frequency spectrum of uniting normalizes analogous diagram.
Fig. 4 is NA=0.1, λ=660nm, test surface pin hole radiusWhen, the CTF of basic confocal microscope system Normalize analogous diagram.
Fig. 5 is NA=0.1, λ=660nm, test surface pin hole radiusProbe functionWhen, structure detects confocal system The CTF that unites normalizes analogous diagram.
Fig. 6 is NA=0.1, λ=660nm, test surface pin hole radiusProbe functionWhen, structure detects confocal system CTF and basic confocal system CTF unite in fxDirection comparison normalization analogous diagram.
Fig. 7 be on the direction x and the direction y between be divided into the striped sample analogous diagram of 3.5um.
Fig. 8 is striped sample in NA=0.1, λ=660nm, test surface pin hole radiusWhen it is substantially confocal aobvious The frequency spectrum analogous diagram detected in micro-system.
Fig. 9 is striped sample in NA=0.1, λ=660nm, test surface pin hole radiusWhen it is substantially confocal aobvious Imaging light intensity normalizes analogous diagram in micro-system.
Figure 10 is striped sample in NA=0.1, λ=660nm, test surface pin hole radiusProbe functionWhen, structure detection it is confocal The frequency spectrum analogous diagram detected in microscopic system.
Figure 11 is striped sample in NA=0.1, λ=660nm, test surface pin hole radiusProbe functionWhen, structure detection is confocal aobvious Imaging light intensity normalizes analogous diagram in micro-system.
Figure 12 be striped sample and its basic confocal microscope system and structure detection confocal microscope system in imaging in x Direction light intensity comparison normalization analogous diagram.
In figure: 1, laser light source, 2, collimator and extender device, 3, microlens array, 4, collimation lens, 5, Amici prism, 6, receipts Collect lens, 7, CCD, 8, quarter wave plate, 9, scanning system, 10, illumination objective lens, 11, production piece.
Specific embodiment
A specific embodiment of the invention, a kind of confocal phase of super-resolution structure detection array of the invention is described with reference to the drawings Dry imaging device, including laser light source 1 are sequentially placed collimator and extender device 2, lenticule battle array along the 1 light direction of propagation of laser light source Column 3, collimation lens 4, Amici prism 5, quarter wave plate 8, scanning system 9, illumination objective lens 10, production piece 11,6 and of collecting lens Ccd detector 7.
The scanning is that 9 systems include scanning galvanometer, and scanning galvanometer changes beam deflection angle to carry out in the object plane of production piece Scanning.
Based on a kind of imaging method of the confocal coherent imaging device of super-resolution structure detection array, including following step It is rapid:
Step 1: in test surface light distribution are as follows:
For two-dimensional convolution symbol；
The test surface uses non-homogeneous detection mode, so that in test surface circular array, detection in single border circular areas Sensitivity coefficient is at Sine distribution, and each detection hot spot light intensity is in the circular function that radius is Airy radius multiplied by Sine distribution Detection coefficient, obtain the integral light intensity of confocal system；
Since practical basic confocal system detection light intensity is integral of the test surface amplitude to test surface in limited range Square, so the potentiality of the lateral resolution of confocal microscope system will be affected, i.e. the detection of finite size will lead to system Lateral resolution is deteriorated.
Wherein D (r) is probe function, r in formula1,rs,r2Respectively indicate object space coordinate；M1,M2Respectively indicate lighting system With detection system enlargement ratio；Scan position coordinate and image space coordinate, h1(r)、o(r)、h2(r) lighting system point is respectively indicated Spread function, object function and detection system point spread function.
The test surface uses non-homogeneous detection mode, is integrated in test surface region, and corresponding detecting location is changed Luminous sensitivity coefficient, and then make probe function at Sine distribution.
Step 2: integral light intensity described in step 1 is converted into Three dimensional convolution form:
In formulaFor Three dimensional convolution symbol, (3) formula root of making even is obtained into three-dimensional amplitude point spread function (APSF) h (r) Are as follows:
Step 3: assuming that axial defocusing amount z=0 carries out two-dimentional Fourier to three-dimensional amplitude point spread function (APSF) h (r) Transformation, can be obtained the two-dimentional coherence transfer function (CTF) of system:
From CTF angle analysis, the CTF and probe function frequency spectrum product for collecting object lens lead to the equivalent CTF band for collecting object lens Width becomes smaller, so that whole system CTF bandwidth becomes smaller.Under the conditions of point detection, system CTF bandwidth is maximum, is the 2 of simple microscope Times.Under the conditions of detection area is infinitely great, system CTF bandwidth is minimum.
In basic confocal system, probe function is D (r)=circ (r/rd) δ (z), Fourier transformation normalizes imitative True figure is as shown in Figure 2.
Step 4: the detection result that will be obtained, is reconstructed to obtain super resolution image with three phase linearity separation methods.
It is constant in the position of test surface that the scanning system 9 detects hot spot during the scanning process.
The test surface uses non-homogeneous detection mode so that in test surface detectivity coefficient at Sine distribution, Test surface is integrated in region, changes the luminous sensitivity coefficient of corresponding detecting location, and then makes probe function at Sine distribution.
Probe function is taken in the present embodiment are as follows:
F in formula0Indicate the spatial frequency of cosine component in probe function；Respectively indicate different directions cosine point The initial phase of amount；rdIndicate the radius of probe function.
In formula,NA=0.1, λ=660nm obtain integral light intensity by above formula, through pulleying Product processing and progress Fourier transformation obtain following formula:
In formulaIndicate probe function frequency spectrum；M, n respectively indicate x, the direction y frequency content.
Fig. 3 is probe functionFu in Leaf transformation normalizes analogous diagram.
At this point, the CTF of confocal system becomes:
Fig. 4 is NA=0.1, λ=660nm, test surface pin hole radiusWhen, the CTF of basic confocal microscope system Normalize analogous diagram.
Fig. 5 is NA=0.1, λ=660nm, test surface pin hole radiusProbe functionWhen, structure detection array is total Burnt system CTF normalizes analogous diagram.
Fig. 6 is NA=0.1, λ=660nm, test surface pin hole radiusProbe functionWhen, structure detection array is total Burnt system CTF and basic confocal system CTF are in fxDirection comparison normalization analogous diagram.
By two curves in comparison diagram 6, it will be evident that structure detection array confocal microscope system CTF cutoff frequency It is improved relative to basic confocal microscope system.
Fig. 7 be on the direction x and the direction y between be divided into the striped sample analogous diagram of 3.5um.
Fig. 8 and Fig. 9 is the sample spectrum information detected in basic confocal microscope system and sample respectively substantially total Imaging analogous diagram in burnt microscopic system.
Figure 10 and Figure 11 is the sample spectrum information and sample detected in structure detection array confocal microscope system respectively Product imaging analogous diagram in structure detection array confocal microscope system.
It is substantially confocal to can be seen that highest sample frequency that the present embodiment can detect is apparently higher than by comparison diagram 8 and Figure 10 Microscopic system.
Pass through comparison diagram 9 and Figure 11, it can be seen that the integral image that the confocal ultra-resolution method of structure detection array obtains is differentiated Power is apparently higher than basic confocal microscope system, and in conjunction with the comparing result of Figure 12, the present embodiment realizes the two of confocal microscope system Super-resolution is tieed up, the equivalent CTF bandwidth of confocal microscope system is expanded.

Claims (5)

1. a kind of imaging method of the confocal coherent imaging device of super-resolution structure detection array, the imaging device includes laser light Source (1) is sequentially placed collimator and extender device (2), microlens array (3), collimation lens along laser light source (1) light direction of propagation (4), Amici prism (5), quarter wave plate (8), scanning system (9), illumination objective lens (10), production piece (11), collecting lens (6) With ccd detector (7), collecting lens (6) are connect with Amici prism (5), and ccd detector (7) connects collecting lens (6), described Scanning system (9) includes scanning galvanometer, and scanning galvanometer changes beam deflection angle and is scanned in the object plane of production piece, and feature exists In following steps:
Step 1: ccd detector obtains the product of confocal system according to the sinusoidal probe function of hot spot light intensity each in circular array Light splitting is strong；
Step 2: the integral light intensity according to step 1 obtains the three-dimensional amplitude point spread function of confocal system；
Step 3: the three-dimensional amplitude point spread function described in step 2 carries out two-dimensional Fourier transform, confocal system is obtained Two-dimentional coherence transfer function；
Step 4: the detection result that will be obtained, is reconstructed with three phase linearity separation methods, obtains super resolution image.
2. a kind of imaging method of confocal coherent imaging device of super-resolution structure detection array according to claim 1, Be characterized in that: the step 1 specifically includes: the ccd detector uses non-homogeneous detection mode, so that ccd detector detects In the circular array of face, detectivity coefficient is in radius at Sine distribution, each detection hot spot light intensity in single border circular areas Multiplied by the detection coefficient of Sine distribution in the circular function of Airy radius, the integral light intensity of confocal system is obtained.
3. a kind of imaging method of confocal coherent imaging device of super-resolution structure detection array according to claim 2, Be characterized in that: the test surface uses non-homogeneous detection mode, is integrated in test surface region, changes corresponding detecting location Luminous sensitivity coefficient, and then make probe function at Sine distribution.
4. a kind of imaging method of confocal coherent imaging device of super-resolution structure detection array according to claim 1, Be characterized in that: the method that the step 2 obtains confocal system three-dimensional amplitude point spread function includes: by product described in step 1 Root of making even is divided after being converted into Three dimensional convolution form by force.
5. a kind of imaging method of confocal coherent imaging device of super-resolution structure detection array according to claim 1, Be characterized in that: it is constant in the position of test surface that the scanning system (9) detects hot spot during the scanning process.
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