CN105547144A - Super-resolution structure detection array confocal coherent imaging device and imaging method thereof - Google Patents

Super-resolution structure detection array confocal coherent imaging device and imaging method thereof Download PDF

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CN105547144A
CN105547144A CN201510868011.6A CN201510868011A CN105547144A CN 105547144 A CN105547144 A CN 105547144A CN 201510868011 A CN201510868011 A CN 201510868011A CN 105547144 A CN105547144 A CN 105547144A
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confocal
super
imaging device
imaging
structure detection
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CN105547144B (en
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邹丽敏
王宝凯
张甦
谭久彬
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Harbin Institute of Technology
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G01B9/02042—Confocal imaging
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G01B9/02048—Rough and fine measurement

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Abstract

A super-resolution structure detection array confocal coherent imaging device and the imaging method thereof provided by the invention relate to an imaging device and an imaging method thereof. The objective of the invention is to solve the problems that the resolution of the confocal spacing technology is difficult to improve and the confocal imaging is not clear. The device provided by the invention comprises a laser source; a collimation device, a microlens array, a collimating lens, a beam splitter prism, a 1/4 wave plate, a scanning system, an illumination object lens, an industrial sample, a collection lens and a CCD detector are arranged in order in the ray propagation direction of the laser source; and integration is performed on the detection surface to change the luminous sensitivity corresponding to the detection position so as to allow the system CTF bandwidth to be enlarged. The transverse resolution of the confocal system is improved while the imaging rate of the structure detection confocal coherent imaging system is enhanced; and moreover, the super-resolution structure detection array confocal coherent imaging device and the imaging method thereof are suitable for the measurement field of the industry morphology imaging.

Description

A kind of super-resolution confocal coherent imaging device of structure detection array and formation method thereof
Technical field
The present invention relates to imaging device and formation method thereof, be specifically related to the confocal coherent imaging device of a kind of super-resolution structure detection array and formation method thereof, belong to technical field of optical precision measurement.
Background technology
Optical microscopy is a kind of with a long history and very important in destructive technology, is widely used in the fields such as biological and material science.Confocal micro-measurement technology is a kind of three-dimensional optical microtechnic being applicable to micron and submicron-scale measurement.The chromatography ability of reflection-type confocal microscopic system makes it to seem very important in three-dimensional imaging field.
In middle and later periods the 1950's, confocal microscope is invented by Minsky, 1977, C.J.R.Sheppard and A.Choudhury illustrates confocal microscope system first under the effect of a pinhole mask, to sacrifice visual field for cost, lateral resolution is made to bring up to 1.4 times of same apertures simple microscope.After this, confocal micro-measurement technology is subject to common concern, becomes the important branch in micrology field.
But conventional confocal technology is subject to the impact of detector size always, the resolving power of confocal microscopy is difficult to improve.
Summary of the invention
The resolving power that the object of the invention is to solve existing confocal microscopy is difficult to improve, and imaging rate is low, the unsharp problem of confocal imaging.
Technical scheme of the present invention is: the confocal coherent imaging device of a kind of super-resolution structure detection array, comprise LASER Light Source, place collimator and extender device, microlens array, collimation lens, Amici prism, quarter wave plate, scanning system, illumination objective lens, production piece, collecting lens and ccd detector successively along LASER Light Source light transmition direction.
What the present invention adopted is coherent illumination, and whole light path imaging process is similar to coherent imaging.
Described scanning system comprises scanning galvanometer, and scanning galvanometer changes beam deflection angle and scans at the object plane of production piece.
Based on the formation method of the confocal coherent imaging device of described a kind of super-resolution structure detection array, comprise the following steps:
Step one, ccd detector obtain the integration light intensity of confocal system according to the probe function of hot spot light intensity each in circular array;
Step 2, obtain the three-dimensional amplitude points spread function of confocal system according to the integration light intensity described in step one;
Step 3, two-dimensional Fourier transform is carried out to the three-dimensional amplitude points spread function described in step 2, obtain the two-dimentional coherence transfer function of confocal system;
Step 4, the result of detection that will obtain, be reconstructed with three phase linearity separation methods and obtain super resolution image.
Described step one specifically comprises: described test surface adopts non-homogeneous detection mode, make in test surface circular array, in single border circular areas, detection sensitivity coefficient becomes Sine distribution, each detection hot spot light intensity is multiplied by the detection coefficient of Sine distribution in the circular function that radius is Airy disk radius, obtains the integration light intensity of confocal system.
Described test surface adopts non-homogeneous detection mode, integration is carried out in test surface region, change the luminous sensitivity coefficient of corresponding detecting location, and then make probe function become Sine distribution, within the system, because probe function is Sine distribution, probe function frequency spectrum effective width compared with common confocal system increases, thus system CTF bandwidth can be made to increase, system transverse resolution significantly improves the transverse direction of fully excavating confocal system while playing the chromatography ability of reflection-type confocal microscopic system and differentiates potentiality.
The method that described step 2 obtains the three-dimensional amplitude points spread function of confocal system comprises: root of making even after converting the integration light intensity described in step one to Three dimensional convolution form.
Described scanning system detects the invariant position of hot spot at test surface in scanning process.
The present invention compared with prior art has following effect: super-resolution structure of the present invention detect confocal coherent imaging device with in, do not need the pin hole of test surface in common confocal system; Carry out integration in test surface specific region, change the luminous sensitivity of corresponding detecting location, probe function becomes Sine distribution, makes search coverage identical with common confocal middle pin hole field; Gather hot spot data because super-resolution structure detects in confocal coherent imaging device by CCD, measuring speed is reduced greatly; Adding microlens array by detecting in confocal coherence imaging system in structure, realizing multiple spot illumination at sample surfaces, and select in CCD detection face corresponding array region detection hot spot can improve structure to detect confocal coherent imaging speed; Non-homogeneous detection is adopted at test surface, in test surface circular array, in single border circular areas, detection sensitivity coefficient becomes Sine distribution, thus the frequency spectrum of probe function is broadened, the coherence transfer function of detection light path also will broaden, and then increase system CTF bandwidth, make system can detect higher frequency information.Being combined with confocal relevant microscopic system by structure detection imaging method of the invention, improves the imaging rate that structure detects confocal coherence imaging system, is applicable to the fields of measurement of production piece imaging while improving confocal system transverse resolution.
Accompanying drawing explanation
Fig. 1 is the confocal coherent imaging device structural representation of superstructure detection array of the present invention.
Fig. 2 is NA=0.1, λ=660nm, test surface pin hole radius time, the test surface frequency spectrum normalization analogous diagram of basic confocal microscope system.
Fig. 3 is NA=0.1, λ=660nm, test surface pin hole radius probe function time, structure detection confocal system test surface frequency spectrum normalization analogous diagram.
Fig. 4 is NA=0.1, λ=660nm, test surface pin hole radius time, the CTF normalization analogous diagram of basic confocal microscope system.
Fig. 5 is NA=0.1, λ=660nm, test surface pin hole radius probe function time, structure detection confocal system CTF normalization analogous diagram.
Fig. 6 is NA=0.1, λ=660nm, test surface pin hole radius probe function time, confocal system CTF and basic confocal system CTF is at f in structure detection xdirection contrast normalization analogous diagram.
Fig. 7 is striped sample analogous diagram x direction and y direction being spaced apart 3.5um.
Fig. 8 be striped sample at NA=0.1, λ=660nm, test surface pin hole radius time basic confocal microscope system in the frequency spectrum analogous diagram that detects.
Fig. 9 be striped sample at NA=0.1, λ=660nm, test surface pin hole radius time basic confocal microscope system in imaging light intensity normalization analogous diagram.
Figure 10 be striped sample at NA=0.1, λ=660nm, test surface pin hole radius probe function time, structure detection confocal microscope system in the frequency spectrum analogous diagram that detects.
Figure 11 be striped sample at NA=0.1, λ=660nm, test surface pin hole radius probe function time, imaging light intensity normalization analogous diagram in structure detection confocal microscope system.
Figure 12 be striped sample and its detect imaging in confocal microscope system at basic confocal microscope system and structure and contrast normalization analogous diagram in x direction light intensity.
In figure: 1, LASER Light Source, 2, collimator and extender device, 3, microlens array, 4, collimation lens, 5, Amici prism, 6, collecting lens, 7, CCD, 8, quarter wave plate, 9, scanning system, 10, illumination objective lens, 11, production piece.
Embodiment
Accompanying drawings the specific embodiment of the present invention, the confocal coherent imaging device of a kind of super-resolution structure detection array of the present invention, comprise LASER Light Source 1, place collimator and extender device 2, microlens array 3, collimation lens 4, Amici prism 5, quarter wave plate 8, scanning system 9, illumination objective lens 10, production piece 11, collecting lens 6 and ccd detector 7 successively along LASER Light Source 1 light transmition direction.
Described scanning is that 9 turnkeys draw together scanning galvanometer, and scanning galvanometer changes beam deflection angle and scans at the object plane of production piece.
Based on the formation method of the confocal coherent imaging device of described a kind of super-resolution structure detection array, comprise the following steps:
Step one, in test surface light distribution be:
I ( r s ) = Σ w , t [ δ ( w , t ) ⊗ 2 | ∫ ∫ - ∞ ∞ exp ( i k ( - 2 z 1 ) ) × h 1 ( M 1 r 1 ) o ( r s - r 1 ) h 2 ( r 1 + M 2 r 2 ) D ( r 2 ) dr 1 dr 2 | ] - - - ( 1 )
for two-dimensional convolution symbol;
Described test surface adopts non-homogeneous detection mode, make in test surface circular array, in single border circular areas, detection sensitivity coefficient becomes Sine distribution, each detection hot spot light intensity is multiplied by the detection coefficient of Sine distribution in the circular function that radius is Airy disk radius, obtains the integration light intensity of confocal system;
I ( r s ) = | ∫ ∫ - ∞ ∞ exp ( i k ( - 2 z 1 ) ) h 1 ( M 1 r 1 ) o ( r s - r 1 ) h 2 ( r 1 + M 2 r 2 ) D ( r 2 ) dr 1 dr 2 | 2 - - - ( 2 ) ;
Due to reality basic confocal system detection light intensity be test surface amplitude to the integration of test surface in limited range square, so the potentiality of the lateral resolution of confocal microscope system will be affected, namely the detection of finite size will cause system lateral resolution to be deteriorated.
Wherein D (r) is probe function, r in formula 1, r s, r 2represent object space coordinate respectively; M 1, M 2represent illuminator and detection system enlargement ratio respectively; Scanning position coordinate and image space coordinate, h 1(r), o (r), h 2r () represents illuminator point spread function respectively, thing function and detection system point spread function.
Described test surface adopts non-homogeneous detection mode, in test surface region, carry out integration, changes the luminous sensitivity coefficient of corresponding detecting location, and then makes probe function become Sine distribution.
Step 2, convert the integration light intensity described in step one to Three dimensional convolution form:
I ( r s ) = | o ( r s ) ⊗ 3 ∫ - ∞ ∞ exp ( i k ( - 2 z s ) ) h 1 ( M 1 r s ) h 2 ( r s + M 2 r 2 ) D ( r 2 ) dr 2 | 2 - - - ( 3 ) ;
In formula for Three dimensional convolution symbol, root of (3) formula being made even obtains three-dimensional amplitude points spread function (APSF) h (r) and is:
h ( r ) = ∫ - ∞ ∞ exp ( i k ( - 2 z ) ) h 1 ( M 1 r ) h 2 ( r + M 2 r 2 ) D ( r 2 ) dr 2 - - - ( 4 ) ;
Step 3, suppose that axial defocusing amount z=0 carries out two-dimensional Fourier transform to three-dimensional amplitude points spread function (APSF) h (r), the two-dimentional coherence transfer function (CTF) of system can be obtained:
C ( m ) = F 2 [ h 1 ( M 1 r ) ] ⊗ 2 { F 2 [ h 2 ( r ) ] F 2 [ D ( r / M 2 ) ] } - - - ( 5 ) ;
From CTF angle analysis, CTF and the probe function frequency spectrum product of collecting object lens cause the equivalent CTF bandwidth of collecting object lens to diminish, thus whole system CTF bandwidth diminishes.Under some detection condition, system CTF bandwidth is maximum, is 2 times of simple microscope.Under the infinitely great condition of detection area, system CTF bandwidth is the most minimum.
In basic confocal system, probe function is D (r)=circ (r/r d) δ (z), its Fourier transform normalization analogous diagram is as shown in Figure 2.
Step 4, the result of detection that will obtain, be reconstructed with three phase linearity separation methods and obtain super resolution image.
Described scanning system 9 detects the invariant position of hot spot at test surface in scanning process.
Described test surface adopts non-homogeneous detection mode, makes detection sensitivity coefficient in test surface become Sine distribution, in test surface region, carries out integration, change the luminous sensitivity coefficient of corresponding detecting location, and then make probe function become Sine distribution.
Getting probe function in the present embodiment is:
F in formula 0represent the spatial frequency of cosine component in probe function; represent the initial phase of different directions cosine component respectively; r drepresent the radius of probe function.
In formula, nA=0.1, λ=660nm, obtains integration light intensity by above formula, through process of convolution with carry out Fourier transform and obtain following formula:
In formula represent probe function frequency spectrum; M, n represent x respectively, y direction frequency content.
Fig. 3 is probe function fourier transform normalization analogous diagram.
Now, the CTF of confocal system becomes:
Fig. 4 is NA=0.1, λ=660nm, test surface pin hole radius time, the CTF normalization analogous diagram of basic confocal microscope system.
Fig. 5 is NA=0.1, λ=660nm, test surface pin hole radius probe function time, structure detection array confocal system CTF normalization analogous diagram.
Fig. 6 is NA=0.1, λ=660nm, test surface pin hole radius probe function time, structure detection array confocal system CTF and basic confocal system CTF is at f xdirection contrast normalization analogous diagram.
By two curves in comparison diagram 6, can obviously find out, structure detection array confocal microscope system CTF cutoff frequency is improved relative to basic confocal microscope system.
Fig. 7 is striped sample analogous diagram x direction and y direction being spaced apart 3.5um.
Fig. 8 and Fig. 9 is the sample spectrum information detected in basic confocal microscope system respectively, and sample imaging analogous diagram in basic confocal microscope system.
Figure 10 and Figure 11 is the sample spectrum information detected in structure detection array confocal microscope system respectively, and sample imaging analogous diagram in structure detection array confocal microscope system.
Can find out that the highest sample frequency that the present embodiment can detect is apparently higher than basic confocal microscope system by comparison diagram 8 and Figure 10.
By comparison diagram 9 and Figure 11, can find out that integral image resolving power that the confocal ultra-resolution method of structure detection array obtains is apparently higher than basic confocal microscope system, in conjunction with the comparing result of Figure 12, the present embodiment achieves the two-dimensional super-resolution of confocal microscope system, and the equivalent CTF bandwidth of confocal microscope system is expanded.

Claims (7)

1. the confocal coherent imaging device of super-resolution structure detection array, comprise LASER Light Source (1), it is characterized in that: place collimator and extender device (2), microlens array (3), collimation lens (4), Amici prism (5), quarter wave plate (8), scanning system (9), illumination objective lens (10), production piece (11), collecting lens (6) and ccd detector (7) along LASER Light Source (1) light transmition direction successively.
2. the confocal coherent imaging device of a kind of super-resolution structure detection array according to claim 1, is characterized in that: described scanning system (9) comprises scanning galvanometer, and scanning galvanometer changes beam deflection angle and scans at the object plane of production piece.
3., based on the formation method of the confocal coherent imaging device of a kind of super-resolution structure detection array described in claim 1, it is characterized in that: comprise the following steps:
Step one, ccd detector obtain the integration light intensity of confocal system according to the probe function of hot spot light intensity each in circular array;
Step 2, obtain the three-dimensional amplitude points spread function of confocal system according to the integration light intensity described in step one;
Step 3, two-dimensional Fourier transform is carried out to the three-dimensional amplitude points spread function described in step 2, obtain the two-dimentional coherence transfer function of confocal system;
Step 4, the result of detection that will obtain, be reconstructed with three phase linearity separation methods, obtain super resolution image.
4. the formation method of the confocal coherent imaging device of a kind of super-resolution structure detection array according to claim 3, it is characterized in that: described step one specifically comprises: described test surface adopts non-homogeneous detection mode, make in test surface circular array, in single border circular areas, detection sensitivity coefficient becomes Sine distribution, each detection hot spot light intensity is multiplied by the detection coefficient of Sine distribution in the circular function that radius is Airy disk radius, obtains the integration light intensity of confocal system.
5. the formation method of the confocal coherent imaging device of a kind of super-resolution structure detection array according to claim 4, it is characterized in that: described test surface adopts non-homogeneous detection mode, integration is carried out in test surface region, change the luminous sensitivity coefficient of corresponding detecting location, and then make probe function become Sine distribution.
6. the formation method of the confocal coherent imaging device of a kind of super-resolution structure detection array according to claim 3, is characterized in that: the method that described step 2 obtains the three-dimensional amplitude points spread function of confocal system comprises: root of making even after converting the integration light intensity described in step one to Three dimensional convolution form.
7. the formation method of the confocal coherent imaging device of a kind of super-resolution structure detection array according to claim 3, is characterized in that: described scanning system (7) detects the invariant position of hot spot at test surface in scanning process.
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