CN207556477U - A kind of surface figure measuring device - Google Patents
A kind of surface figure measuring device Download PDFInfo
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- CN207556477U CN207556477U CN201721789870.7U CN201721789870U CN207556477U CN 207556477 U CN207556477 U CN 207556477U CN 201721789870 U CN201721789870 U CN 201721789870U CN 207556477 U CN207556477 U CN 207556477U
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Abstract
The utility model is related to arrive measuring surface form technical field, a kind of surface figure measuring device is provided, including：Light source for generating the emergent light of broad band, is transferred to collimation unit；Collimation unit, for collimating emergent light for collimated light beam, parallel beam incident to probe unit；Probe unit has a certain degree with the setting of object under test surface, and probe unit makes incident light generate dispersion and is irradiated to object under test surface after focusing on；The light of object under test surface reflection enters receiving unit, and receiving unit has a larger numerical aperture, and the light of measuring targets surface reflection is into line convergence and optical path-deflecting；The light being emitted from receiving unit enters focusing unit, and focusing unit focuses the light into information process unit；Incident optical signal is converted to electric signal, and carry out data processing by information process unit, to obtain measurement result；Displacement unit moves a distance after one-shot measurement is completed, by whole device, measures other positions on object under test surface.
Description
Technical field
The utility model is related to arrive measuring surface form or three-dimensional surface profile determination techniques field more particularly to a kind of table
Face topography measurement device.
Background technology
The surface quality of object is of great significance in modern processing, machinery, the fields such as electronics and material, is led to
Surface testing means are crossed to obtain the basis that the morphological feature on surface is research body surface quality.Surface measurement technology and
Among principle, traditional contact pin type contourgraph is measured by the mechanical pressure of contact pilotage, belongs to the mode of contact measurement.Separately
One kind is non-contacting mode, mainly has optical method, scanning electron microscopy etc., wherein the method for optical measurement is due to measuring
The features such as precision is high, and range is big, high resolution, has obtained larger development and application, and modern measuring method is to combine
Classical optical theory, image procossing automatically control, the comprehensive method of Miniature precision machinery and computer technology,
Important function has been played in the measurement process of different field.
Measuring method can be divided into three kinds according to different basic principles：1) profile based on principle of optical interference
Detection technique mainly has two-beam interference technology, white light interference technique, difference interference technology and differential interference microtechnic etc.；
2) the contour detecting technology based on structured light projection principle, mainly there is trigonometry and light cross-section method.3) using focus on light beam as spy
The contour detecting technology of needle, mainly there is position from defocus technology and confocal microscopy etc..
Confocal microscopy breaches the limitation of the limit of resolution and limited depth of focus of traditional ordinary optical microscope, in horizontal stroke
Being differentiated to resolution ratio and longitudinal direction chromatography has a stronger imaging capability, the basic principle of confocal microscopy for incident light by lens or
Lens group is focused on observing samples, after the fluorescence of sample, fluorescence is excited to be collected by another group of lens, is imaged on the filter of detector
On wave aperture, the focus of two lens groups is fallen on same position i.e. sample, and therefore named copolymerization is burnt, referred to as confocal.Spectrum is total to
Burnt principle then develops on the basis of confocal microscopy, and using secondary color light source, generally white light or bands of a spectrum is wider
Light source, axial dispersion profile is obtained by the dispersion element in system, it is by dispersion profile that wavelength and displacement one is a pair of
Should, and the signal that confocal principle obtains high contrast is combined, the axial scan process in confocal microscopy is eliminated, significantly
Detection speed is improved, this technology is enable to be applied during industrial detection.
Development there are many disclosed patent and paper studies Spectral Confocal technology and concrete application at present.But
Existing most of scan mode is to belong to spot scan, and spot scan Spectral Confocal method is in bad on acquisition speed
Gesture.
It should be noted that the introduction of technical background is intended merely to above convenient clear to the technical solution of the utility model progress
Chu, complete explanation, and facilitate the understanding of those skilled in the art and illustrate.Cannot merely because these schemes in this practicality
Novel background technology part is expounded and thinks that above-mentioned technical proposal is known to those skilled in the art.
Utility model content
The utility model embodiment proposes a kind of surface figure measuring device based on line scan mode, quickly to obtain object
The high accuracy data of body surface topography.
In order to achieve the above object, the utility model embodiment provides a kind of surface figure measuring device, including light source, standard
Straight unit, probe unit, receiving unit, focusing unit, information process unit and displacement unit：Wherein, the light source, is used for
The emergent light of broad band is generated, is transferred to the collimation unit；The collimation unit, for being parallel by emergent light collimation
Light beam, the parallel beam incident to the probe unit；The probe unit is arranged to certain angle with object under test surface
Degree, and the probe unit makes incident light generate dispersion and is irradiated to the object under test surface after focusing on；The determinand
The light of body surface face reflection enters the receiving unit, and the receiving unit has larger numerical aperture, to the determinand
The light of body surface face reflection is into line convergence and optical path-deflecting；The light being emitted from the receiving unit enters the focusing unit, institute
It states focusing unit and focuses the light into described information processing unit；Incident optical signal is converted to telecommunications by described information processing unit
Number, and data processing is carried out, to obtain measurement result；Institute's displacement unit moves whole device after one-shot measurement is completed
A distance measures other positions on the object under test surface.
Further, in one embodiment, the light source is white light source or white light-infrared light supply.
Further, in one embodiment, the collimation unit for lens, lens group or speculum group into collimation system
System.
Further, in one embodiment, the probe unit is non axial dispersion to the dispersion of incident light, generation
The straight line that the focus of the light of different wave length is formed is vertical with the object under test surface.
Further, in one embodiment, the probe unit includes dispersion element and lens；The dispersion element is used for
Incident light is made to generate dispersion；The lens are used to focus on the light after dispersion, and the light after focusing is irradiated at an angle
To the object under test surface.
Further, in one embodiment, the dispersion element is equilateral prism.
Further, in one embodiment, the receiving unit includes lens and prism；The lens have larger number
It is worth aperture, to the light of object under test surface reflection into line convergence；The prism carries out light path to the light that the lens are assembled
Deflection.
Further, in one embodiment, described information processing unit includes the sensing for converting optical signals to electric signal
Device and the processor of responsible data processing and automation control.
Further, in one embodiment, the sensor is slit spectrometer.
Further, in one embodiment, institute's displacement unit is high-precision Bit andits control platform, provides at two dimension
Or precision more than two dimension is mobile.
The utility model embodiment proposes a kind of surface figure measuring device, by the way of line scanning, can be quick
To the high accuracy data of object surface appearance, foundation and method are provided for real-time online measuring in commercial Application.
With reference to following explanation and attached drawing, the particular implementation of the utility model is disclosed in detail, specifies this practicality
Novel principle can be in a manner of adopted.It should be understood that the embodiment of the utility model in range not thus by
Limitation.In the range of the spirit and terms of appended claims, the embodiment of the utility model includes many changes, modifications
With it is equivalent.
The feature for describing and/or showing for a kind of embodiment can be in a manner of same or similar one or more
Used in a other embodiment, with the feature in other embodiment it is combined or substitute other embodiment in feature.
It should be emphasized that term "comprises/comprising" refers to the presence of feature, one integral piece, step or component when being used herein, but simultaneously
It is not excluded for the presence or additional of one or more other features, one integral piece, step or component.
Description of the drawings
It in order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only
It is some embodiments of the utility model, for those skilled in the art, without having to pay creative labor,
It can also be obtained according to these attached drawings other attached drawings.
Fig. 1 is the structure diagram of the surface figure measuring device of the utility model embodiment；
Fig. 2 is the structure diagram of the surface figure measuring device of another embodiment of the utility model；
Fig. 3 is the schematic diagram of plane 106 formed by focus after light beam shown in FIG. 1 focuses on；
The signal of scanning motion when Fig. 4 is the surface figure measuring device scanning surface to be measured of the utility model embodiment
Figure；
Fig. 5 is the schematic diagram for detecting light measurement surface height at certain position on object under test surface；
Fig. 6 is schematic diagram when light enters spectrometer and light is incident on slit plane；
Fig. 7 is the schematic diagram for the light distribution for being incident on slit plane；
Fig. 8 is the flow chart that whole surface topography measurement device completes a complete measurement；
Fig. 9 is the result obtained by spectrometer when measuring a plane mirror.
Specific embodiment
The following is a combination of the drawings in the embodiments of the present utility model, and the technical scheme in the embodiment of the utility model is carried out
It clearly and completely describes, it is clear that the described embodiments are only a part of the embodiments of the utility model rather than whole
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are without making creative work
All other embodiments obtained shall fall within the protection scope of the present invention.
Art technology technical staff knows that the embodiment of the utility model can be implemented as a kind of system, device, set
Standby, method or computer program product.Therefore, the disclosure can be with specific implementation is as follows, i.e.,：Complete hardware, completely
Software (including firmware, resident software, microcode etc.) or hardware and software combine form.
Below with reference to several representative embodiments of the utility model, the principle and essence of the utility model are illustrated in detail
God.
First, the coordinate system in attached drawing involved by the utility model is illustrated, the coordinate system in all attached drawings is all adopted
It is straight down z-axis (thumb direction in right-handed coordinate system) in all plan views of attached drawing with right-handed coordinate system,
Horizontal is to the right y-axis (four direction referred in right-handed coordinate system), and perpendicular to paper, for x-axis, (four fingers are curved in right-handed coordinate system outward
Song subsequently points to the direction of the palm of the hand).Schematic three dimensional views in attached drawing are also labelled with corresponding coordinate system, so as to the different positions to device
It puts, Different Plane is described in detail.
In addition, the concepts such as the line being previously mentioned in text, point, should all do the understanding of broad sense, and theoretic Points And lines are not specific to,
For example, point has radius size, and line is also to have width, only very big in length-width ratio, and width does not influence to understand generally
It reads and describes restriction using this with during result.
Fig. 1 is the structure diagram of the surface figure measuring device 100 of the utility model embodiment.As shown in Figure 1, it is wrapped
It includes：Light source 101, collimation unit 102, probe unit 103, receiving unit 107, focusing unit 108, information process unit 109 with
And displacement unit 110.Wherein：Light source 101 for generating the emergent light of broad band, is transferred to the collimation unit 102；Collimation
Unit 102, for collimating the emergent light for collimated light beam, the parallel beam incident to the probe unit 103；It is described
Probe unit 103 has a certain degree, and the probe unit 103 makes incident light generate color with the setting of object under test surface
It dissipates and the object under test surface is irradiated to after focusing on；The light of the object under test surface reflection enters the receiving unit
107, the receiving unit 107 has larger numerical aperture, to the light of object under test surface reflection into line convergence and light
Road deflects；The light being emitted from the receiving unit 107 enters the focusing unit 108, and the focusing unit 108 focuses the light into
To described information processing unit 109；Incident optical signal is converted to electric signal by described information processing unit 109, line number of going forward side by side
According to processing, to obtain measurement result；Whole device is moved a distance by institute's displacement unit 110 after one-shot measurement is completed,
Measure other positions on the object under test surface.
Enter collimation unit 102 referring to the light 104 that shown in Fig. 1, light source 101 is sent out, collimation unit 102 is removed incident beam
Become outside directional light, the actions such as shaping apodization can also be carried out to light beam, the light beam of outgoing is made to meet the requirement of light path, such as light
The shape of beam is round or rectangle.After directional light enters probe unit 103, probe unit 103 by light, open simultaneously in space by dispersion
It is focused, as seen from Figure 1,104A and 104B represent the light of different wave length respectively, their formed focuses are in alignment
106, this straight line 106 is perpendicular to object under test surface 105, and the dispersion element used in the utility model not merely causes
Axial dispersion, therefore the light being emitted from probe unit 103 needs to be incident on object under test surface at an angle.Work as detection
When light is so radiated on object under test surface, the light of different wave length has a different performances, the light of wavelength representated by 104A in Fig. 1
Focus is just on surface to be measured, and the optical focus of wavelength representated by 104B can then become one in surface on surface to be measured
The wide colour band of item, it is seen that the extended line of 104B.Light beam needs receiving unit 107 to collect reflection after being reflected by object under test surface
Light, receiving unit 107 need larger numerical aperture to receive the larger reflected light of dispersion angle, and by beam collimation in favor of
Transmission in subsequent optical path.Focusing unit 108 generally using lens, is projected light beams upon in information process unit 109, letter
Breath processing unit 109 converts optical signals to electric signal, and carry out relevant treatment and obtain measurement result.Whole surface topography measurement
Device 100 further comprises the displacement unit 110 of machinery, and device is enable to be moved along direction initialization, so as to measuring targets surface
Entire surface is scanned.Especially, it should be noted that Fig. 1 is the schematic diagram in device yz planes, x directions are perpendicular to yz planes
, there is the other information of light beam and device in the x direction.
In the utility model embodiment, the light source 101 is necessary for the light source of broad band, such as white light source or white
Light-infrared light supply, and light source that is uniform for radiancy and stablizing；The collimation unit 102 is lens, lens group or speculum
The colimated light system of composition.
The effect of probe unit 103 is that light beam is become to the light radiation of detectable surface information, is needed to incident parallel light
Shu Jinhang dispersions and focus movement, and make the straight line (plane) of different wave length focus perpendicular to surface to be measured.Probe unit 103 is
One of core cell of surface figure measuring device, the simplest composition form of probe unit 103 is dispersing prism and lens.
Wherein, prism is for carrying out dispersion, and lens are used to focus on.Also, the probe unit 103 is non-to the dispersion of incident light
Axial dispersion, the straight line (i.e. " probe ") that the focus of the light of the different wave length of generation is formed hang down with the object under test surface
Directly.Probe length formed by different wave length is the theoretical measuring limit of device, and the actual range of device will be in the theoretical measurement
In the range of choose.
Focusing unit 108 for focusing the light into information process unit 109, is at least one piece of condenser lens.
Information process unit 109 is used to convert optical signals to electric signal, Yi Jipei including at least a sensor 109A
It covers software and carries out data processing and the control of displacement unit.Wherein, the sensor is slit spectrometer.It as shown in Figure 1, can profit
Data processing and the control of displacement unit 110 are carried out with processor 109B, and processor 109B may be provided in computer equipment.
Displacement unit 110 for moving the position of surface figure measuring device, that is, detects the position of light, entire to scan
The surface information of determinand, displacement unit 110 are accurate automatic displacement platform, can at least be provided more than two dimension or two dimension
Precision is mobile.
In the utility model, mentioned based on line scanning be the light being emitted in probe unit is a line, is obtained simultaneously
The data on the line of one, surface are taken, diaphragm is added in the optical path thus, controls the shape of light beam, be generally added in collimation unit.
Fig. 2 is the structure diagram of the surface figure measuring device 200 of another embodiment of the utility model.As shown in Fig. 2,
Light source 201 is wide spectrum light source, becomes collimated light beam after the 204 collimated lens 202 of light sent out, parallel beam incident is to one etc.
On arris mirror, equilateral prism generates the light of different wave length dispersion, and the two-beam 204A for representing different wave length is can see in figure
It is emitted from prism at different angles with 204B, then by a lens focus, equilateral prism constitutes a letter with lens
Single probe unit 203, and meet the requirement of probe unit：Dispersion is with focusing on.Probe unit 203 light shines object under test
On surface 205,204A and 204B is focused in the vertical direction 206 on object under test surface in figure, some height on surface, only
The focus for having special wavelength light is just fallen on the surface, is reflected by surface, is finally obtained on information process unit 209 stronger
Signal, the optical wavelength representated by 204A as shown in Figure 2.Its commplementary wave length then becomes wider colour band on surface to be measured, such as
In Fig. 2 shown in the light extended on surface of 204B.The light reflected through object under test surface is received by receiving unit 207, this
Lens and prism composition receiving unit are selected in embodiment, since the light diverging of object under test surface reflection is serious, the number of lens
It is worth that aperture is bigger, for the light being emitted from lens using a prism, prism here plays change beam angle
Effect, it is possible to use other devices complete the deflection to light beam.Slit spectrometer is finally converged light to by focusing unit 208
On 209A, electric signal is converted optical signals to, the processing of data is completed by 209B, obtains measurement result.Whole device 200 is wrapped
The device that includes as shown in Fig. 2, and precision displacement platform 210 is installed, completing to surface after the measurement of a certain position, it is mobile
The position of device is the position of mobile detection light, completes the detection process to entire surface to be measured.
Fig. 3 is please referred to, Fig. 3 show the schematic diagram of the plane 106 in Fig. 1.Device shown in FIG. 1 is in yz planes
Schematic diagram, it is shown that the situation of certain point in x-axis, and the wordline light used in line scanning has length in x-axis.In Fig. 3
Wavelength is progressively longer from top to bottom for shown spectrogram, this is caused by dispersing prism is to the refraction bigger of short-wavelength light.
Bands of a spectrum shown in plane 106 can not be observed in practice, it may be observed that bands of a spectrum be to be irradiated on object under test surface
Be stretched the bands of a spectrum of deformation.
Fig. 4 is please referred to, Fig. 4 is shown scans determinand body surface using the surface figure measuring device of embodiment illustrated in fig. 1
The schematic diagram of scanning motion during face.There is precision displacement platform on device 100, the wordline light being emitted from probe unit 103 is visited
What is surveyed is the surface information on surface to be measured in y-axis at certain point position along x-axis, makes detection light along the y-axis direction by displacement platform 110
It is mobile, complete entire scanning process.The linear light detected shown in figure is of same size with surface to be measured, but displacement platform actually may be used
To carry out the scanning motion of bidimensional, so as to realize the scanning to larger surface to be measured in the case where detecting linear light limited width.
The displacement accuracy of displacement platform then determines measurement accuracy of the surface to be measured along y-axis, but least displacement interval will also be scanned
The limitation of speed and the limitation of signal aliasing.
Fig. 5 is please referred to, Fig. 5 show the signal of detection light measurement surface height at certain position on object under test surface
Figure, as previously mentioned, why line scanning can improve sweep speed, the wordline light 401 that reason is to detect is while measurement table
Multipoint data on the line of one, face, such as A in figure, the schematic diagram that 3 points of B, C, the A on this line, B, the height that 3 points of C is different,
3 points of elevation information is just reflected by different focusing wavelength.Although it should be noted that irradiation light be it is continuous,
Since the data of information process unit acquisition are discrete, so the multiple point datas precisely acquired on a line are come
Represent the line measured.It should also be noted that, one wordline light of detection mentioned herein is not shown on surface to be measured
Colour band, and refer to a line formed by the specific wavelength that works of measurement.
Fig. 6 is please referred to, Fig. 6 show schematic diagram when light enters spectrometer.Slit spectrum has been used in the present embodiment
Instrument it can be seen that slit 501 and the light being incident in slit plane 502, slit have filter action in figure, can only allow certain
The light of spectrum width is entered in spectrometer, and the resolution capability of spectrometer is better, and the halfwidth for obtaining curve of spectrum characteristic peak is smaller, whole
The measurement accuracy of a device is also higher.Judge that the characteristic wavelength of wave crest has just obtained the elevation information of corresponding points, on condition that height
The correspondence of information and wavelength has demarcated completion.
Fig. 7 is please referred to, Fig. 7 show the schematic diagram for the light distribution for being incident on slit plane 502, it can be seen that having in figure
5 apparent different spectral bands, and the optical wavelength for entering slit is different, tells them on the characteristic wavelength of the curve of spectrum
Come, the elevation information of 5 points can be obtained.In spectrometer camera along the imaging unit number of slit direction at least at hundreds of,
Hundreds of bands of a spectrum are at least had in actual conditions, but since the difference of adjacent spectral band is minimum, so the different spectral bands that can be differentiated
Number be less than aforementioned number, the number of different spectral bands that can be differentiated also determines measurement accuracy of the device in x-axis.
Fig. 8 is please referred to, Fig. 8 show the flow chart that whole surface topography measurement device completes a complete measurement.Flow
It since preparation, in step 601, needs whether the software and hardware of check device works normally, places sample to be tested.In step
In rapid 602, system initialization then needs the distance of the operating distance, i.e. device and sample of emphasis adjusting apparatus, it is also necessary to set
Detection light is scanned since which position of sample surfaces, which position terminates to scan.The preparation of device and initial work are complete
Cheng Hou can be entered in next step 603, before illustrated operation principle, be not repeated herein, data acquisition
Speed is exceedingly fast, and after the completion of being acquired on a line, displacement unit can move detection optical position and go to adopt the data of the next position,
That is step 604, the action entirely scanned is coherent, after program judges entire measurement process, i.e. step 605, and device
Scanning complete, while the data of entire sample surface morphology have been also stored into software, last step 606 is at data
The surface profile of entire sample is carried out 3D modeling using corresponding software, is finally completed measurement process by reason.
Fig. 9 is please referred to, Fig. 9 show the result obtained by slit spectrometer when measuring a plane mirror.Due to plane
Speculum is the plane of a near ideal, and characteristic wavelength difference is minimum, so being one on the spectrum axis being reflected in figure
Straight line.This bright filament in figure can see not for stringent straight line, this is the Spectral line bend as caused by prism dispersion
Phenomenon.The lower section of bright filament can also be seen that one than dark filament in figure, this illustrates to detect flash ranging to two tables
The data in face namely the topographic data of speculum rear surface have been also communicated in spectrometer, the light that certain rear surface is reflected
Signal strength greatly weakens, and such case is only present in the material of the such light-transmissive of similar glass, for other materials
Material is still based on the reflection with surface.
The light of broad band is carried out dispersion, utilizes different wave length by the surface figure measuring device of the utility model embodiment
It is irradiated and treated in a manner of oblique incidence to carry out the measurement of surface topography and detection light with the correspondence of apparent height to be measured
Surface is surveyed, available for high-precision measuring surface form, while sweep speed is improved by the way of line scanning, is commercial Application
Middle real-time online measuring provides foundation and method.
Specific embodiment is applied in the utility model to be expounded the principle and embodiment of the utility model, with
The explanation of upper embodiment is merely used to help understand the method and its core concept of the utility model；Meanwhile for this field
Those skilled in the art, according to the thought of the utility model, there will be changes, comprehensive in specific embodiments and applications
Upper described, the content of the present specification should not be construed as a limitation of the present invention.
Claims (10)
1. a kind of surface figure measuring device, which is characterized in that including light source, collimation unit, probe unit, receiving unit, gather
Burnt unit, information process unit and displacement unit：Wherein,
The light source for generating the emergent light of broad band, is transferred to the collimation unit；
The collimation unit, for being collimated light beam by emergent light collimation, the parallel beam incident is single to the detection
Member；
The probe unit has a certain degree with the setting of object under test surface, and the probe unit makes incident light generate color
It dissipates and the object under test surface is irradiated to after focusing on；
The light of the object under test surface reflection enters the receiving unit, and the receiving unit has larger numerical aperture
Diameter, to the light of object under test surface reflection into line convergence and optical path-deflecting；
The light being emitted from the receiving unit enters the focusing unit, and the focusing unit is focused the light at described information
Manage unit；
Incident optical signal is converted to electric signal, and carry out data processing by described information processing unit, to obtain measurement result；
Whole device is moved a distance by institute's displacement unit after one-shot measurement is completed, and measures the object under test surface
Other positions.
2. surface figure measuring device according to claim 1, which is characterized in that the light source is for white light source or in vain
Light-infrared light supply.
3. surface figure measuring device according to claim 1, which is characterized in that the collimation unit is lens, lens
Group or speculum group into colimated light system.
4. surface figure measuring device according to claim 1, which is characterized in that the probe unit is to incident light
Dispersion is non axial dispersion, and the straight line that the focus of the light of the different wave length of generation is formed is vertical with the object under test surface.
5. surface figure measuring device according to claim 1, which is characterized in that the probe unit includes dispersion element
And lens；
The dispersion element is used to that incident light to be made to generate dispersion；
The lens are used to focus on the light after dispersion, and the light after focusing is irradiated to the determinand body surface at an angle
Face.
6. surface figure measuring device according to claim 5, which is characterized in that the dispersion element is equilateral prism.
7. according to the surface figure measuring device described in claim 1, which is characterized in that the receiving unit include lens and
Prism；
The lens have larger numerical aperture, to the light of object under test surface reflection into line convergence；
The prism carries out optical path-deflecting to the light that the lens are assembled.
8. surface figure measuring device according to claim 1, which is characterized in that described information processing unit is included light
Signal is converted to the sensor of electric signal and the processor of responsible data processing and automation control.
9. surface figure measuring device according to claim 8, which is characterized in that the sensor is slit spectrometer.
10. surface figure measuring device according to claim 1, which is characterized in that institute's displacement unit is high-precision
Bit andits control platform, the precision provided at more than two dimension or two dimension are mobile.
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