CN103105143A - Differential motion confocal microscopic measurement device based on fluorescence excitation of surface to be detected - Google Patents
Differential motion confocal microscopic measurement device based on fluorescence excitation of surface to be detected Download PDFInfo
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- CN103105143A CN103105143A CN2013100334296A CN201310033429A CN103105143A CN 103105143 A CN103105143 A CN 103105143A CN 2013100334296 A CN2013100334296 A CN 2013100334296A CN 201310033429 A CN201310033429 A CN 201310033429A CN 103105143 A CN103105143 A CN 103105143A
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Abstract
The invention discloses a differential motion confocal microscopic measurement device based on fluorescence excitation of a surface to be detected and belongs to the technical field of surface topography measurement. The measurement device comprises a laser device, a collimation and beam expander and a polarizing beam splitter mirror, a quarter-wave plate, a detection objective lens and an object to be detected, a collection objective lens, a beam splitter mirror, a second pinhole, a second detector, a first pinhole and a first detector, wherein the collimation and beam expander and the polarizing beam splitter mirror are placed on a direct light path of the laser device along a light ray propagating direction; the quarter-wave plate, the detection objective lens and the object to be detected are placed on a reflecting light path of the polarizing beam splitter mirror; the collection objective lens, the beam splitter mirror, the second pinhole and the second detector are placed on a transmitting light path of the polarizing beam splitter mirror; and the first pinhole and the first detector are placed on a reflecting light path of the beam splitter mirror. The first detector and the second detector are respectively provided with a first spike filter and a second spike filter. A film is coated on the surface of the object to be detected in a vacuum evaporation coating mode and the surface of the object to be detected is borne by a micrometric displacement object stage. The design of the measurement device guarantees that after being reflected by the surface to be detected, measurement light can return to a detection system, solves the difficulty of detection of a surface with a high numerical aperture (Na) and a high slope, is applied to ultra precise measurement of a spherical surface with a high Na and a high slope, an aspheric surface, a free-form surface three-dimensional shape.
Description
Technical field
Differential confocal micro-measurement apparatus based on the measured surface fluorescence excitation belongs to the measuring surface form technical field, particularly a kind of ultra precise measurement device for Microstructure Optics element, microstructure mechanical organ, integrated circuit component three-dimensional microstructure, little step, little groove live width and the shape measure of large-numerical aperture optical element surface.
Background technology
Confocal spot scan measurement is to measure one of important technical of three-dimensional microstructure, little step, little groove live width, the degree of depth and surface configuration in micro-optic, micromechanics, microelectronic, limits to less than 1 principle but traditional confocal technology is subject to conventional lenses imaging numerical aperture always.
The differential confocal scanning survey is one of typical modified measuring method.the differential confocal scanning survey comprises the confocal interference microscope (publication number CN1614457A) with high-space resolution imaging ability, shaping circular light bundle formula differential confocal sensor (publication number CN1529123A) with high spatial resolution, three differential confocal microscopic imaging method and device (publication number CN1587898A), three-differential focasing micro-three-dimensional super-resolution imaging method (publication number CN1609590A), three-dimensional super-resolution confocal array scanning micro-detecting method and device (publication number CN1632448A), shaping circular light three differential confocal microscope (publication number CN1588157A), has the differential confocal scanning detection method (publication number CN1527026A) of high spatial resolution etc., it is equidistant away from burnt and nearly out of focus plane that the differential confocal measurement system is placed in respectively picture side with two confocal point probes, differential calculating by intensity response obtains the bipolarity response characteristic, produce and follow the tracks of zero point, overcome the traditional confocal deficiency that can only carry out relative position measurement.The relatively traditional confocal microscopy of this technology has significantly improved signal to noise ratio (S/N ratio), and axial resolution and measurement range be two times of traditional confocal microscopy, and it is more accurate especially to measure at null position.
But, change violent surface for high NA or curvature, because detection system can't be collected enough light echos, therefore be difficult to realize its surface detection.
Summary of the invention
Thereby be difficult to for solving detection light the difficult problem that Return Detecting System can't be realized high NA and the surface detection of high slope, the invention discloses a kind of differential confocal micro-measurement apparatus based on the measured surface fluorescence excitation.Change the character of surface of tested surface by plated film, guarantee measuring light can Return Detecting System after the tested surface reflection, solve the difficult problem of high NA and high slope surface detection, be applicable to the ultra precise measurement of high NA and high slope sphere, aspheric surface and 3 D profilometry of free-form surface.
The object of the present invention is achieved like this:
Based on the differential confocal micro-measurement apparatus of measured surface fluorescence excitation, comprise laser instrument, be configured in collimator and extender device and polarization spectroscope on laser instrument direct projection light path along the light transmition direction; Be configured in quarter-wave plate, detection object lens and measured piece on the polarization spectroscope reflected light path; Be configured in collection object lens, spectroscope, the second pin hole and the second detector on the polarization spectroscope transmitted light path; Be configured in the first pin hole and the first detector on the spectroscope reflected light path; Described the first detector is equipped with the first narrow band pass filter, the second detector to be equipped with the second narrow band pass filter; Described measured piece is by the carrying of micrometric displacement objective table, and the surface adopts vacuum evaporatation to carry out plated film.
Above-mentioned differential confocal micro-measurement apparatus based on the measured surface fluorescence excitation, centre wavelength and the bandwidth of described the first narrow band pass filter and the second narrow band pass filter are all identical.
Above-mentioned differential confocal micro-measurement apparatus based on the measured surface fluorescence excitation, the centre wavelength of described the first narrow band pass filter and the second narrow band pass filter is 610nm, bandwidth is 50nm.
Due to the differential confocal micro-measurement apparatus that the present invention is based on the measured surface fluorescence excitation, comprise laser instrument, be configured in collimator and extender device and polarization spectroscope on laser instrument direct projection light path along the light transmition direction; Be configured in quarter-wave plate, detection object lens and measured piece on the polarization spectroscope reflected light path; Be configured in collection object lens, spectroscope, the second pin hole and the second detector on the polarization spectroscope transmitted light path; Be configured in the first pin hole and the first detector on the spectroscope reflected light path; Described the first detector is equipped with the first narrow band pass filter, the second detector to be equipped with the second narrow band pass filter; Described measured piece is by the carrying of micrometric displacement objective table, and the surface adopts vacuum evaporatation to carry out plated film; This design that changes the character of surface of tested surface by plated film, guarantee measuring light can Return Detecting System after the tested surface reflection, solve the difficult problem of high NA and high slope surface detection, be applicable to the ultra precise measurement of high NA and high slope sphere, aspheric surface and 3 D profilometry of free-form surface.
Description of drawings
Fig. 1 is the structural representation that the present invention is based on the differential confocal micro-measurement apparatus of measured surface fluorescence excitation.
In figure: 1 laser instrument, 2 collimator and extender devices, 3 polarization spectroscopes, 4 quarter-wave plates, 5 are surveyed object lens, 6 measured pieces, 7 micrometric displacement objective tables, 8 collection object lens, 9 spectroscopes, 10 first pin holes, 11 first detectors, 12 second pin holes, 13 second detectors.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the invention is described in further detail.
The differential confocal micro-measurement apparatus based on the measured surface fluorescence excitation of the present embodiment comprises laser instrument 1, is configured in collimator and extender device 2 and polarization spectroscope 3 on laser instrument 1 direct projection light path along the light transmition direction; Be configured in quarter-wave plate 4, detection object lens 5 and measured piece 6 on polarization spectroscope 3 reflected light paths; Be configured in collection object lens 8, spectroscope 9, the second pin hole 12 and the second detector 13 on polarization spectroscope 3 transmitted light paths; Be configured in the first pin hole 10 and the first detector 11 on spectroscope 9 reflected light paths; Described the first detector 11 is equipped with the first narrow band pass filter, the second detector 13 to be equipped with the second narrow band pass filter; Described measured piece 6 is by 7 carryings of micrometric displacement objective table, and the surface adopts vacuum evaporatation to carry out plated film; Centre wavelength and the bandwidth of described the first narrow band pass filter and the second narrow band pass filter are all identical, and centre wavelength is 610nm, and bandwidth is 50nm.
Claims (3)
1. based on the differential confocal micro-measurement apparatus of measured surface fluorescence excitation, it is characterized in that comprising laser instrument (1), be configured in collimator and extender device (2) and polarization spectroscope (3) on laser instrument (1) direct projection light path along the light transmition direction; Be configured in quarter-wave plate (4), detection object lens (5) and measured piece (6) on polarization spectroscope (3) reflected light path; Be configured in collection object lens (8), spectroscope (9), the second pin hole (12) and the second detector (13) on polarization spectroscope (3) transmitted light path; Be configured in the first pin hole (10) and the first detector (11) on spectroscope (9) reflected light path; Described the first detector (11) is equipped with the first narrow band pass filter, the second detector (13) to be equipped with the second narrow band pass filter; Described measured piece (6) is by micrometric displacement objective table (7) carrying, and the surface adopts vacuum evaporatation to carry out plated film.
2. the differential confocal micro-measurement apparatus based on the measured surface fluorescence excitation according to claim 1, is characterized in that the centre wavelength of described the first narrow band pass filter and the second narrow band pass filter and bandwidth are all identical.
3. the differential confocal micro-measurement apparatus based on the measured surface fluorescence excitation according to claim 2, the centre wavelength that it is characterized in that described the first narrow band pass filter and the second narrow band pass filter is 610nm, bandwidth is 50nm.
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| CN103278919A (en) * | 2013-05-28 | 2013-09-04 | 上海理工大学 | Confocal microscopic imaging method for colored three-dimensional area |
| CN103278088A (en) * | 2013-06-09 | 2013-09-04 | 哈尔滨工业大学 | Symmetrical out-focus type axial high-resolution confocal microimaging device |
| CN103383247A (en) * | 2013-07-30 | 2013-11-06 | 中国计量科学研究院 | Optical detection system and device |
| TWI465683B (en) * | 2013-08-20 | 2014-12-21 | Univ Nat Taiwan | Differential filtering chromatic confocal microscopic system |
| CN104296685A (en) * | 2014-11-05 | 2015-01-21 | 哈尔滨工业大学 | Device and method for measuring smooth free-form surface sample based on differential STED |
| CN104296686A (en) * | 2014-11-05 | 2015-01-21 | 哈尔滨工业大学 | Smooth large-curvature sample measurement device and method based on fluorescent differential confocal technology |
| CN104296688A (en) * | 2014-11-05 | 2015-01-21 | 哈尔滨工业大学 | Smooth free-form surface sample measuring device and method based on differential two-photon method |
| CN104359419A (en) * | 2014-11-05 | 2015-02-18 | 哈尔滨工业大学 | Differential-structure film thickness correction device and method for measuring microstructure of smooth large-curvature sample |
| CN104848802A (en) * | 2015-06-10 | 2015-08-19 | 中国计量科学研究院 | Differential confocal aspheric surface measurement method and system of normal tracking type |
| CN105823433A (en) * | 2016-04-28 | 2016-08-03 | 哈尔滨工业大学 | Apparatus and method for measuring large aperture aspheric harmonic diffractive sample based on confocal microscopy technology |
| CN104315993B (en) * | 2014-11-05 | 2016-12-07 | 哈尔滨工业大学 | A kind of apparatus and method measuring free-curved-surface-type |
| CN106291509A (en) * | 2016-10-12 | 2017-01-04 | 北京万集科技股份有限公司 | Laser radar optical system |
| CN106595526A (en) * | 2016-12-28 | 2017-04-26 | 哈尔滨工业大学 | Differential measuring device and method for large-aperture free surface sample surface profile |
| CN116430565A (en) * | 2023-04-25 | 2023-07-14 | 西安工业大学 | Microscopic imaging device and imaging method |
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Cited By (19)
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| CN103278919B (en) * | 2013-05-28 | 2015-08-26 | 上海理工大学 | A kind of color solid region confocal microscopic imaging method |
| CN103278919A (en) * | 2013-05-28 | 2013-09-04 | 上海理工大学 | Confocal microscopic imaging method for colored three-dimensional area |
| CN103278088A (en) * | 2013-06-09 | 2013-09-04 | 哈尔滨工业大学 | Symmetrical out-focus type axial high-resolution confocal microimaging device |
| CN103383247A (en) * | 2013-07-30 | 2013-11-06 | 中国计量科学研究院 | Optical detection system and device |
| CN103383247B (en) * | 2013-07-30 | 2016-08-10 | 中国计量科学研究院 | A kind of Systems for optical inspection and device |
| TWI465683B (en) * | 2013-08-20 | 2014-12-21 | Univ Nat Taiwan | Differential filtering chromatic confocal microscopic system |
| CN104296685B (en) * | 2014-11-05 | 2016-09-28 | 哈尔滨工业大学 | The method measuring smooth free form surface sample based on differential STED |
| CN104359419A (en) * | 2014-11-05 | 2015-02-18 | 哈尔滨工业大学 | Differential-structure film thickness correction device and method for measuring microstructure of smooth large-curvature sample |
| CN104296688A (en) * | 2014-11-05 | 2015-01-21 | 哈尔滨工业大学 | Smooth free-form surface sample measuring device and method based on differential two-photon method |
| CN104296686A (en) * | 2014-11-05 | 2015-01-21 | 哈尔滨工业大学 | Smooth large-curvature sample measurement device and method based on fluorescent differential confocal technology |
| CN104296685A (en) * | 2014-11-05 | 2015-01-21 | 哈尔滨工业大学 | Device and method for measuring smooth free-form surface sample based on differential STED |
| CN104315993B (en) * | 2014-11-05 | 2016-12-07 | 哈尔滨工业大学 | A kind of apparatus and method measuring free-curved-surface-type |
| CN104848802A (en) * | 2015-06-10 | 2015-08-19 | 中国计量科学研究院 | Differential confocal aspheric surface measurement method and system of normal tracking type |
| CN104848802B (en) * | 2015-06-10 | 2018-02-13 | 中国计量科学研究院 | Normal tracking mode differential confocal non-spherical measuring method and system |
| CN105823433A (en) * | 2016-04-28 | 2016-08-03 | 哈尔滨工业大学 | Apparatus and method for measuring large aperture aspheric harmonic diffractive sample based on confocal microscopy technology |
| CN106291509A (en) * | 2016-10-12 | 2017-01-04 | 北京万集科技股份有限公司 | Laser radar optical system |
| CN106291509B (en) * | 2016-10-12 | 2019-05-17 | 北京万集科技股份有限公司 | Laser radar optical system |
| CN106595526A (en) * | 2016-12-28 | 2017-04-26 | 哈尔滨工业大学 | Differential measuring device and method for large-aperture free surface sample surface profile |
| CN116430565A (en) * | 2023-04-25 | 2023-07-14 | 西安工业大学 | Microscopic imaging device and imaging method |
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