CN103105143A - Differential motion confocal microscopic measurement device based on fluorescence excitation of surface to be detected - Google Patents
Differential motion confocal microscopic measurement device based on fluorescence excitation of surface to be detected Download PDFInfo
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- CN103105143A CN103105143A CN2013100334296A CN201310033429A CN103105143A CN 103105143 A CN103105143 A CN 103105143A CN 2013100334296 A CN2013100334296 A CN 2013100334296A CN 201310033429 A CN201310033429 A CN 201310033429A CN 103105143 A CN103105143 A CN 103105143A
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- 238000005259 measurement Methods 0.000 title claims abstract description 25
- 230000005284 excitation Effects 0.000 title claims abstract description 14
- 230000010287 polarization Effects 0.000 claims abstract description 16
- 238000001514 detection method Methods 0.000 claims abstract description 14
- 239000004606 Fillers/Extenders Substances 0.000 claims description 5
- 238000006073 displacement reaction Methods 0.000 claims description 5
- 238000012876 topography Methods 0.000 abstract 2
- 238000003384 imaging method Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000004624 confocal microscopy Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000001314 profilometry Methods 0.000 description 2
- 238000007493 shaping process Methods 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 1
- 238000002592 echocardiography Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
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Abstract
基于被测表面荧光激发的差动共焦显微测量装置属于表面形貌测量技术领域；该测量装置包括激光器、沿光线传播方向配置在激光器直射光路上的准直扩束器和偏振分光镜；配置在偏振分光镜反射光路上的四分之一波片、探测物镜和被测件；配置在偏振分光镜透射光路上的收集物镜、分光镜、第二针孔和第二探测器；配置在分光镜反射光路上的第一针孔和第一探测器；所述的第一、二探测器分别配备有第一、二窄带滤光片；被测件表面采用真空蒸发镀膜法进行镀膜并由微位移载物台承载；这种设计，保证测量光经被测面反射后能够返回探测系统，解决了高NA和高斜率表面检测的难题，适用于高NA和高斜率球面、非球面和自由曲面三维形貌的超精密测量。
The differential confocal microscopic measurement device based on the fluorescence excitation of the measured surface belongs to the technical field of surface topography measurement; the measurement device includes a laser, a collimating beam expander and a polarization beam splitter arranged on the direct light path of the laser along the light propagation direction; A quarter-wave plate, a detection objective lens, and a measured object on the reflected light path of the polarization beam splitter; a collecting objective lens, a beam splitter, a second pinhole, and a second detector arranged on the transmitted light path of the polarization beam splitter; arranged on the beam splitter The first pinhole and the first detector on the reflected light path; the first and second detectors are respectively equipped with the first and second narrow-band filters; The stage is loaded; this design ensures that the measurement light can return to the detection system after being reflected by the measured surface, which solves the problem of high NA and high slope surface detection, and is suitable for three-dimensional high NA and high slope spherical, aspheric and free-form surfaces Ultra-precise measurement of topography.
Description
Technical field
Differential confocal micro-measurement apparatus based on the measured surface fluorescence excitation belongs to the measuring surface form technical field, particularly a kind of ultra precise measurement device for Microstructure Optics element, microstructure mechanical organ, integrated circuit component three-dimensional microstructure, little step, little groove live width and the shape measure of large-numerical aperture optical element surface.
Background technology
Confocal spot scan measurement is to measure one of important technical of three-dimensional microstructure, little step, little groove live width, the degree of depth and surface configuration in micro-optic, micromechanics, microelectronic, limits to less than 1 principle but traditional confocal technology is subject to conventional lenses imaging numerical aperture always.
The differential confocal scanning survey is one of typical modified measuring method.the differential confocal scanning survey comprises the confocal interference microscope (publication number CN1614457A) with high-space resolution imaging ability, shaping circular light bundle formula differential confocal sensor (publication number CN1529123A) with high spatial resolution, three differential confocal microscopic imaging method and device (publication number CN1587898A), three-differential focasing micro-three-dimensional super-resolution imaging method (publication number CN1609590A), three-dimensional super-resolution confocal array scanning micro-detecting method and device (publication number CN1632448A), shaping circular light three differential confocal microscope (publication number CN1588157A), has the differential confocal scanning detection method (publication number CN1527026A) of high spatial resolution etc., it is equidistant away from burnt and nearly out of focus plane that the differential confocal measurement system is placed in respectively picture side with two confocal point probes, differential calculating by intensity response obtains the bipolarity response characteristic, produce and follow the tracks of zero point, overcome the traditional confocal deficiency that can only carry out relative position measurement.The relatively traditional confocal microscopy of this technology has significantly improved signal to noise ratio (S/N ratio), and axial resolution and measurement range be two times of traditional confocal microscopy, and it is more accurate especially to measure at null position.
But, change violent surface for high NA or curvature, because detection system can't be collected enough light echos, therefore be difficult to realize its surface detection.
Summary of the invention
Thereby be difficult to for solving detection light the difficult problem that Return Detecting System can't be realized high NA and the surface detection of high slope, the invention discloses a kind of differential confocal micro-measurement apparatus based on the measured surface fluorescence excitation.Change the character of surface of tested surface by plated film, guarantee measuring light can Return Detecting System after the tested surface reflection, solve the difficult problem of high NA and high slope surface detection, be applicable to the ultra precise measurement of high NA and high slope sphere, aspheric surface and 3 D profilometry of free-form surface.
The object of the present invention is achieved like this:
Based on the differential confocal micro-measurement apparatus of measured surface fluorescence excitation, comprise laser instrument, be configured in collimator and extender device and polarization spectroscope on laser instrument direct projection light path along the light transmition direction; Be configured in quarter-wave plate, detection object lens and measured piece on the polarization spectroscope reflected light path; Be configured in collection object lens, spectroscope, the second pin hole and the second detector on the polarization spectroscope transmitted light path; Be configured in the first pin hole and the first detector on the spectroscope reflected light path; Described the first detector is equipped with the first narrow band pass filter, the second detector to be equipped with the second narrow band pass filter; Described measured piece is by the carrying of micrometric displacement objective table, and the surface adopts vacuum evaporatation to carry out plated film.
Above-mentioned differential confocal micro-measurement apparatus based on the measured surface fluorescence excitation, centre wavelength and the bandwidth of described the first narrow band pass filter and the second narrow band pass filter are all identical.
Above-mentioned differential confocal micro-measurement apparatus based on the measured surface fluorescence excitation, the centre wavelength of described the first narrow band pass filter and the second narrow band pass filter is 610nm, bandwidth is 50nm.
Due to the differential confocal micro-measurement apparatus that the present invention is based on the measured surface fluorescence excitation, comprise laser instrument, be configured in collimator and extender device and polarization spectroscope on laser instrument direct projection light path along the light transmition direction; Be configured in quarter-wave plate, detection object lens and measured piece on the polarization spectroscope reflected light path; Be configured in collection object lens, spectroscope, the second pin hole and the second detector on the polarization spectroscope transmitted light path; Be configured in the first pin hole and the first detector on the spectroscope reflected light path; Described the first detector is equipped with the first narrow band pass filter, the second detector to be equipped with the second narrow band pass filter; Described measured piece is by the carrying of micrometric displacement objective table, and the surface adopts vacuum evaporatation to carry out plated film; This design that changes the character of surface of tested surface by plated film, guarantee measuring light can Return Detecting System after the tested surface reflection, solve the difficult problem of high NA and high slope surface detection, be applicable to the ultra precise measurement of high NA and high slope sphere, aspheric surface and 3 D profilometry of free-form surface.
Description of drawings
Fig. 1 is the structural representation that the present invention is based on the differential confocal micro-measurement apparatus of measured surface fluorescence excitation.
In figure: 1 laser instrument, 2 collimator and extender devices, 3 polarization spectroscopes, 4 quarter-wave plates, 5 are surveyed object lens, 6 measured pieces, 7 micrometric displacement objective tables, 8 collection object lens, 9 spectroscopes, 10 first pin holes, 11 first detectors, 12 second pin holes, 13 second detectors.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the invention is described in further detail.
The differential confocal micro-measurement apparatus based on the measured surface fluorescence excitation of the present embodiment comprises laser instrument 1, is configured in collimator and extender device 2 and polarization spectroscope 3 on laser instrument 1 direct projection light path along the light transmition direction; Be configured in quarter-wave plate 4, detection object lens 5 and measured piece 6 on polarization spectroscope 3 reflected light paths; Be configured in collection object lens 8, spectroscope 9, the second pin hole 12 and the second detector 13 on polarization spectroscope 3 transmitted light paths; Be configured in the first pin hole 10 and the first detector 11 on spectroscope 9 reflected light paths; Described the first detector 11 is equipped with the first narrow band pass filter, the second detector 13 to be equipped with the second narrow band pass filter; Described measured piece 6 is by 7 carryings of micrometric displacement objective table, and the surface adopts vacuum evaporatation to carry out plated film; Centre wavelength and the bandwidth of described the first narrow band pass filter and the second narrow band pass filter are all identical, and centre wavelength is 610nm, and bandwidth is 50nm.
Claims (3)
1. based on the differential confocal micro-measurement apparatus of measured surface fluorescence excitation, it is characterized in that comprising laser instrument (1), be configured in collimator and extender device (2) and polarization spectroscope (3) on laser instrument (1) direct projection light path along the light transmition direction; Be configured in quarter-wave plate (4), detection object lens (5) and measured piece (6) on polarization spectroscope (3) reflected light path; Be configured in collection object lens (8), spectroscope (9), the second pin hole (12) and the second detector (13) on polarization spectroscope (3) transmitted light path; Be configured in the first pin hole (10) and the first detector (11) on spectroscope (9) reflected light path; Described the first detector (11) is equipped with the first narrow band pass filter, the second detector (13) to be equipped with the second narrow band pass filter; Described measured piece (6) is by micrometric displacement objective table (7) carrying, and the surface adopts vacuum evaporatation to carry out plated film.
2. the differential confocal micro-measurement apparatus based on the measured surface fluorescence excitation according to claim 1, is characterized in that the centre wavelength of described the first narrow band pass filter and the second narrow band pass filter and bandwidth are all identical.
3. the differential confocal micro-measurement apparatus based on the measured surface fluorescence excitation according to claim 2, the centre wavelength that it is characterized in that described the first narrow band pass filter and the second narrow band pass filter is 610nm, bandwidth is 50nm.
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Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103278919A (en) * | 2013-05-28 | 2013-09-04 | 上海理工大学 | Confocal microscopic imaging method for colored three-dimensional area |
| CN103278088A (en) * | 2013-06-09 | 2013-09-04 | 哈尔滨工业大学 | Symmetrical out-focus type axial high-resolution confocal microimaging device |
| CN103383247A (en) * | 2013-07-30 | 2013-11-06 | 中国计量科学研究院 | Optical detection system and device |
| TWI465683B (en) * | 2013-08-20 | 2014-12-21 | Univ Nat Taiwan | Differential filtering chromatic confocal microscopic system |
| CN104296688A (en) * | 2014-11-05 | 2015-01-21 | 哈尔滨工业大学 | Smooth free-form surface sample measuring device and method based on differential two-photon method |
| CN104296686A (en) * | 2014-11-05 | 2015-01-21 | 哈尔滨工业大学 | Smooth large-curvature sample measurement device and method based on fluorescent differential confocal technology |
| CN104296685A (en) * | 2014-11-05 | 2015-01-21 | 哈尔滨工业大学 | Device and method for measuring smooth free-form surface sample based on differential STED |
| CN104359419A (en) * | 2014-11-05 | 2015-02-18 | 哈尔滨工业大学 | Differential-structure film thickness correction device and method for measuring microstructure of smooth large-curvature sample |
| CN104848802A (en) * | 2015-06-10 | 2015-08-19 | 中国计量科学研究院 | Differential confocal aspheric surface measurement method and system of normal tracking type |
| CN105823433A (en) * | 2016-04-28 | 2016-08-03 | 哈尔滨工业大学 | Apparatus and method for measuring large aperture aspheric harmonic diffractive sample based on confocal microscopy technology |
| CN104315993B (en) * | 2014-11-05 | 2016-12-07 | 哈尔滨工业大学 | A kind of apparatus and method measuring free-curved-surface-type |
| CN106291509A (en) * | 2016-10-12 | 2017-01-04 | 北京万集科技股份有限公司 | Laser radar optical system |
| CN106595526A (en) * | 2016-12-28 | 2017-04-26 | 哈尔滨工业大学 | Differential measuring device and method for large-aperture free surface sample surface profile |
| CN116430565A (en) * | 2023-04-25 | 2023-07-14 | 西安工业大学 | Microscopic imaging device and imaging method |
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Cited By (19)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103278919B (en) * | 2013-05-28 | 2015-08-26 | 上海理工大学 | A kind of color solid region confocal microscopic imaging method |
| CN103278919A (en) * | 2013-05-28 | 2013-09-04 | 上海理工大学 | Confocal microscopic imaging method for colored three-dimensional area |
| CN103278088A (en) * | 2013-06-09 | 2013-09-04 | 哈尔滨工业大学 | Symmetrical out-focus type axial high-resolution confocal microimaging device |
| CN103383247A (en) * | 2013-07-30 | 2013-11-06 | 中国计量科学研究院 | Optical detection system and device |
| CN103383247B (en) * | 2013-07-30 | 2016-08-10 | 中国计量科学研究院 | A kind of Systems for optical inspection and device |
| TWI465683B (en) * | 2013-08-20 | 2014-12-21 | Univ Nat Taiwan | Differential filtering chromatic confocal microscopic system |
| CN104296685B (en) * | 2014-11-05 | 2016-09-28 | 哈尔滨工业大学 | The method measuring smooth free form surface sample based on differential STED |
| CN104359419A (en) * | 2014-11-05 | 2015-02-18 | 哈尔滨工业大学 | Differential-structure film thickness correction device and method for measuring microstructure of smooth large-curvature sample |
| CN104296685A (en) * | 2014-11-05 | 2015-01-21 | 哈尔滨工业大学 | Device and method for measuring smooth free-form surface sample based on differential STED |
| CN104296686A (en) * | 2014-11-05 | 2015-01-21 | 哈尔滨工业大学 | Smooth large-curvature sample measurement device and method based on fluorescent differential confocal technology |
| CN104296688A (en) * | 2014-11-05 | 2015-01-21 | 哈尔滨工业大学 | Smooth free-form surface sample measuring device and method based on differential two-photon method |
| CN104315993B (en) * | 2014-11-05 | 2016-12-07 | 哈尔滨工业大学 | A kind of apparatus and method measuring free-curved-surface-type |
| CN104848802A (en) * | 2015-06-10 | 2015-08-19 | 中国计量科学研究院 | Differential confocal aspheric surface measurement method and system of normal tracking type |
| CN104848802B (en) * | 2015-06-10 | 2018-02-13 | 中国计量科学研究院 | Normal tracking mode differential confocal non-spherical measuring method and system |
| CN105823433A (en) * | 2016-04-28 | 2016-08-03 | 哈尔滨工业大学 | Apparatus and method for measuring large aperture aspheric harmonic diffractive sample based on confocal microscopy technology |
| CN106291509A (en) * | 2016-10-12 | 2017-01-04 | 北京万集科技股份有限公司 | Laser radar optical system |
| CN106291509B (en) * | 2016-10-12 | 2019-05-17 | 北京万集科技股份有限公司 | Lidar Optical System |
| CN106595526A (en) * | 2016-12-28 | 2017-04-26 | 哈尔滨工业大学 | Differential measuring device and method for large-aperture free surface sample surface profile |
| CN116430565A (en) * | 2023-04-25 | 2023-07-14 | 西安工业大学 | Microscopic imaging device and imaging method |
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