CN103105143B - Based on the differential confocal micro-measurement apparatus of measured surface fluorescence excitation - Google Patents
Based on the differential confocal micro-measurement apparatus of measured surface fluorescence excitation Download PDFInfo
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- CN103105143B CN103105143B CN201310033429.6A CN201310033429A CN103105143B CN 103105143 B CN103105143 B CN 103105143B CN 201310033429 A CN201310033429 A CN 201310033429A CN 103105143 B CN103105143 B CN 103105143B
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Abstract
Differential confocal micro-measurement apparatus based on measured surface fluorescence excitation belongs to measuring surface form technical field; This measurement mechanism comprises laser instrument, be configured in collimator and extender device in laser instrument direct projection light path and polarization spectroscope along light transmition direction; Be configured in the quarter-wave plate on polarization spectroscope reflected light path, detection object lens and measured piece; Be configured in the collection object lens on polarization spectroscope transmitted light path, spectroscope, the second pin hole and the second detector; Be configured in the first pin hole in dichroic mirror light path and the first detector; First and second described detector is equipped with first and second narrow band pass filter respectively; Measured piece surface adopts vacuum evaporatation carry out plated film and carried by micrometric displacement objective table; This design, ensureing to measure light can Return Detecting System after tested surface reflection, solves a difficult problem for high NA and high slope Surface testing, is applicable to the ultra precise measurement of high NA and high slope sphere, aspheric surface and 3 D profilometry of free-form surface.
Description
Technical field
Differential confocal micro-measurement apparatus based on measured surface fluorescence excitation belongs to measuring surface form technical field, particularly a kind of ultra precise measurement device for three-dimensional microstructure in Microstructure Optics element, microstructure mechanical organ, integrated circuit component, micro-step, very low power live width and the shape measure of large-numerical aperture optical element surface.
Background technology
Confocal spot scan measurement is micro-optic, measure one of important technical of three-dimensional microstructure, micro-step, very low power live width, the degree of depth and surface configuration in micromechanics, microelectronic, but conventional confocal technology is subject to the principle limitation that conventional lenses image numerical aperture is less than 1 always.
Differential confocal scanning survey is one of typical modified measuring method.Differential confocal scanning survey comprises the confocal interference microscope (publication number CN1614457A) with high-space resolution imaging ability, there is shaping circular light bundle formula differential confocal sensor (publication number CN1529123A) of high spatial resolution, three differential confocal microscopic imaging method and device (publication number CN1587898A), three-differential focasing micro-three-dimensional super-resolution imaging method (publication number CN1609590A), three-dimensional super-resolution confocal array scanning micro-detecting method and device (publication number CN1632448A), shaping circular light three differential confocal microscope (publication number CN1588157A), there is the differential confocal scanning detection method (publication number CN1527026A) etc. of high spatial resolution, it is equidistant away from burnt and nearly focal plane that two confocal point probes are placed in image space by differential confocal measurement system respectively, bipolarity response characteristic is obtained by the differential calculating of intensity response, produce and follow the tracks of zero point, overcome the deficiency that conventional confocal can only carry out relative position measurement.The relative conventional confocal microtechnic of this technology significantly improves signal to noise ratio (S/N ratio), and axial resolution and measurement range are two times of conventional confocal microtechnic, and it is more accurate especially to measure at null position.
But, for high NA or the violent surface of Curvature varying, because detection system cannot collect enough light echos, be therefore difficult to realize its Surface testing.
Summary of the invention
Be difficult to Return Detecting System for solving detection light thus a difficult problem for high NA and high slope Surface testing cannot be realized, the invention discloses a kind of differential confocal micro-measurement apparatus based on measured surface fluorescence excitation.The character of surface of tested surface is changed by plated film, ensureing to measure light can Return Detecting System after tested surface reflection, solve a difficult problem for high NA and high slope Surface testing, be applicable to the ultra precise measurement of high NA and high slope sphere, aspheric surface and 3 D profilometry of free-form surface.
The object of the present invention is achieved like this:
Based on the differential confocal micro-measurement apparatus of measured surface fluorescence excitation, comprise laser instrument, be configured in collimator and extender device in laser instrument direct projection light path and polarization spectroscope along light transmition direction; Be configured in the quarter-wave plate on polarization spectroscope reflected light path, detection object lens and measured piece; Be configured in the collection object lens on polarization spectroscope transmitted light path, spectroscope, the second pin hole and the second detector; Be configured in the first pin hole in dichroic mirror light path and the first detector; The first described detector is equipped with the first narrow band pass filter, the second detector is equipped with the second narrow band pass filter; Described measured piece is carried by micrometric displacement objective table, and surface adopts vacuum evaporatation to carry out plated film.
The above-mentioned differential confocal micro-measurement apparatus based on measured surface fluorescence excitation, the first described narrow band pass filter is all identical with bandwidth with the centre wavelength of the second narrow band pass filter.
The above-mentioned differential confocal micro-measurement apparatus based on measured surface fluorescence excitation, the first described narrow band pass filter and the centre wavelength of the second narrow band pass filter are 610nm, and bandwidth is 50nm.
Owing to the present invention is based on the differential confocal micro-measurement apparatus of measured surface fluorescence excitation, comprise laser instrument, be configured in collimator and extender device in laser instrument direct projection light path and polarization spectroscope along light transmition direction; Be configured in the quarter-wave plate on polarization spectroscope reflected light path, detection object lens and measured piece; Be configured in the collection object lens on polarization spectroscope transmitted light path, spectroscope, the second pin hole and the second detector; Be configured in the first pin hole in dichroic mirror light path and the first detector; The first described detector is equipped with the first narrow band pass filter, the second detector is equipped with the second narrow band pass filter; Described measured piece is carried by micrometric displacement objective table, and surface adopts vacuum evaporatation to carry out plated film; This design being changed the character of surface of tested surface by plated film, ensureing to measure light can Return Detecting System after tested surface reflection, solve a difficult problem for high NA and high slope Surface testing, be applicable to the ultra precise measurement of high NA and high slope sphere, aspheric surface and 3 D profilometry of free-form surface.
Accompanying drawing explanation
Fig. 1 is the structural representation of the differential confocal micro-measurement apparatus that the present invention is based on measured surface fluorescence excitation.
In figure: 1 laser instrument, 2 collimator and extender devices, 3 polarization spectroscopes, 4 quarter-wave plates, 5 detection object lens, 6 measured pieces, 7 micrometric displacement objective tables, 8 collect object lens, 9 spectroscopes, 10 first pin holes, 11 first detectors, 12 second pin holes, 13 second detectors.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the invention is described in further detail.
The differential confocal micro-measurement apparatus based on measured surface fluorescence excitation of the present embodiment, comprises laser instrument 1, is configured in collimator and extender device 2 in laser instrument 1 direct projection light path and polarization spectroscope 3 along light transmition direction; Be configured in the quarter-wave plate 4 on polarization spectroscope 3 reflected light path, detection object lens 5 and measured piece 6; Be configured in the collection object lens 8 on polarization spectroscope 3 transmitted light path, spectroscope 9, second pin hole 12 and the second detector 13; Be configured in the first pin hole 10 and the first detector 11 on spectroscope 9 reflected light path; The first described detector 11 is equipped with the first narrow band pass filter, the second detector 13 is equipped with the second narrow band pass filter; Described measured piece 6 is carried by micrometric displacement objective table 7, and surface adopts vacuum evaporatation to carry out plated film; The first described narrow band pass filter is all identical with bandwidth with the centre wavelength of the second narrow band pass filter, and centre wavelength is 610nm, and bandwidth is 50nm.
Claims (1)
1., based on the differential confocal micro-measurement apparatus of measured surface fluorescence excitation, it is characterized in that comprising laser instrument (1), be configured in collimator and extender device (2) in laser instrument (1) direct projection light path and polarization spectroscope (3) along light transmition direction; Be configured in the quarter-wave plate (4) on polarization spectroscope (3) reflected light path, detection object lens (5) and measured piece (6); Be configured in the collection object lens (8) on polarization spectroscope (3) transmitted light path, spectroscope (9), the second pin hole (12) and the second detector (13); Be configured in the first pin hole (10) on spectroscope (9) reflected light path and the first detector (11); Described the first detector (11) is equipped with the first narrow band pass filter, the second detector (13) is equipped with the second narrow band pass filter; The first described narrow band pass filter and the centre wavelength of the second narrow band pass filter are 610nm, and bandwidth is 50nm; Described measured piece (6) is carried by micrometric displacement objective table (7), and surface adopts vacuum evaporatation to carry out plated film.
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| CN103105143B true CN103105143B (en) | 2015-07-29 |
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| CN103278919B (en) * | 2013-05-28 | 2015-08-26 | 上海理工大学 | A kind of color solid region confocal microscopic imaging method |
| CN103278088A (en) * | 2013-06-09 | 2013-09-04 | 哈尔滨工业大学 | Symmetrical out-focus type axial high-resolution confocal microimaging device |
| CN103383247B (en) * | 2013-07-30 | 2016-08-10 | 中国计量科学研究院 | A kind of Systems for optical inspection and device |
| TWI465683B (en) * | 2013-08-20 | 2014-12-21 | Univ Nat Taiwan | Differential filtering chromatic confocal microscopic system |
| CN104296688A (en) * | 2014-11-05 | 2015-01-21 | 哈尔滨工业大学 | Smooth free-form surface sample measuring device and method based on differential two-photon method |
| CN104359419B (en) * | 2014-11-05 | 2017-08-11 | 哈尔滨工业大学 | The wide curvature sample microscopic appearance measurement thickness means for correcting of difference structure and method |
| CN104296685B (en) * | 2014-11-05 | 2016-09-28 | 哈尔滨工业大学 | The method measuring smooth free form surface sample based on differential STED |
| CN104315993B (en) * | 2014-11-05 | 2016-12-07 | 哈尔滨工业大学 | A kind of apparatus and method measuring free-curved-surface-type |
| CN104296686A (en) * | 2014-11-05 | 2015-01-21 | 哈尔滨工业大学 | Smooth large-curvature sample measurement device and method based on fluorescent differential confocal technology |
| CN104848802B (en) * | 2015-06-10 | 2018-02-13 | 中国计量科学研究院 | Normal tracking mode differential confocal non-spherical measuring method and system |
| CN105823433A (en) * | 2016-04-28 | 2016-08-03 | 哈尔滨工业大学 | Apparatus and method for measuring large aperture aspheric harmonic diffractive sample based on confocal microscopy technology |
| CN106291509B (en) * | 2016-10-12 | 2019-05-17 | 北京万集科技股份有限公司 | Laser radar optical system |
| CN106595526A (en) * | 2016-12-28 | 2017-04-26 | 哈尔滨工业大学 | Differential measuring device and method for large-aperture free surface sample surface profile |
| CN116430565A (en) * | 2023-04-25 | 2023-07-14 | 西安工业大学 | Microscopic imaging device and imaging method |
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