CN103278088A - Symmetrical out-focus type axial high-resolution confocal microimaging device - Google Patents
Symmetrical out-focus type axial high-resolution confocal microimaging device Download PDFInfo
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- CN103278088A CN103278088A CN2013102296053A CN201310229605A CN103278088A CN 103278088 A CN103278088 A CN 103278088A CN 2013102296053 A CN2013102296053 A CN 2013102296053A CN 201310229605 A CN201310229605 A CN 201310229605A CN 103278088 A CN103278088 A CN 103278088A
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Abstract
A symmetrical out-focus type axial high-resolution confocal microimaging device belongs to the fields of optical accurate measurement. The symmetrical out-focus type axial high-resolution confocal microimaging device comprises a lighting light path and a detecting light path. The lighting light path is that a light beam emitted by a laser can be aligned by an alignment lens set to parallelly penetrate through a polarizing beam splitter and a 1/4 lambda water plate to be converged by a focus microscope objective on an article to be tested. The detecting light path is that the light beam reflected by the article to be tested passes through the focus microscope objective and the 1/4 lambda wave plate to be reflected by the polarized beam splitter on a 1:1 ordinary beam splitter. A reflecting light path and an incident light path of the 1:1 ordinary beam splitter are both provided with detecting light paths to achieve detection of two light beams. The symmetrical out-focus type axial high-resolution confocal microimaging device is equal to a differential confocal microtechnique. Furthermore, the out-focus amount can be set accurately to enable the systematical axial resolution capability to be optimal, and meanwhile, complex pinhole symmetrical out-focus adjustment is removed.
Description
Technical field
Symmetry is moved the axial high-resolution confocal microscopic imaging of burnt formula device and is belonged to the optical precision measurement field, and particularly a kind of symmetry is moved burnt formula confocal microscopic imaging method.
Background technology
The confocal laser micro-imaging technique is as a kind of three-D imaging method with noncontact, high azimuthal resolution, in the optical precision measurement field, be used widely, especially the precision along with micro-structured component processing improves constantly, to the value of its research and application also in continuous lifting.
In confocal microscopy, Chinese scholars at the three-dimensional imaging that how to improve confocal microscope system can masterpiece a large amount of research, its method mainly can be divided into two classes: a class is to introduce various super-resolution pupil filter elements, to realize breaking through diffraction limit, improve the resolution characteristic of confocal microscopic method, as adopt the phase type wave filter, complex amplitude mode filter etc., by changing system's light distribution, compression main lobe half-shadow value width, thereby improve the three-dimensional detection ability of system, but because azimuthal resolution and transverse resolution are difficult to obtain simultaneously optimum, thereby in application, be restricted; Another kind of is the structure that changes confocal microscope system, will survey light intensity signal and carry out beam splitting, and by detectable signal being handled to improve again the resolution characteristic of confocal system, as, laser interference confocal microscopy, differential confocal microtechnic etc.
Differential confocal scanning microtechnic, as accompanying drawing 1, be to utilize the detector axial defocusing only to produce the optics fundamental characteristics of axial response translation, to survey light path and be divided into two-way, two detecting pinholes place respectively apart from equidistant away from burnt and near out of focus planimetric position as square focal plane, carry out differential calculating by two-way is surveyed the light intensity response signal, axial detection sensitivity is improved.This method is compared with traditional confocal microscopic imaging method, have unique tracking characteristics at zero point, high azimuthal resolution and be twice between the confocal axial response linear zone of tradition, when azimuthal resolution improves, enlarged axial measurement range, and do not influenced radially resolving power.But this method is because improve for the resolving power of confocal system the detecting pinhole position plays an important role, and is difficult in actual applications the pin hole position is realized accurately adjusting, and can not make two detecting pinholes be positioned at the optimum position, thereby make its performance be difficult to reach optimum.
Summary of the invention
In order to address the above problem, the present invention has designed a kind of symmetry and has moved the axial high-resolution confocal microscopic imaging of burnt formula device, this symmetry is moved the axial high-resolution confocal microscopic imaging of burnt formula device and not only is equal to the differential confocal microtechnic, and move burnt amount and can accurately arrange, make the system axial resolution characteristic reach optimum, exempted complicated pin hole symmetry out of focus adjustment simultaneously.
The object of the present invention is achieved like this:
Symmetry is moved the axial high-resolution confocal microscopic imaging of burnt formula device, and comprise illumination path and survey light path,
Described illumination path sets gradually laser instrument, collimating mirror group, polarization spectroscope, 1/4 λ wave plate, focuses on microcobjective and sample along direction of beam propagation; The light beam that laser instrument sends is behind collimating mirror group collimation, and parallel polarization spectroscope and the 1/4 λ wave plate of passing converges on the testee by focusing on microcobjective;
Described detection light path comprises the common spectroscope of 1:1, first via phase fitler, first via collecting lens, first via pin hole, first via light intensity converter, No. the second phase fitler, the second road collecting lens, the second road pin hole, the second tunnel light intensity converter; From the testee beam reflected, successively through focusing on microcobjective and 1/4 λ wave plate, and reflex to the common spectroscope of 1:1 by polarization spectroscope, passed through first via phase fitler successively by the common spectroscope beam reflected of 1:1, first via collecting lens and first via pin hole are received by first via light intensity converter; Described first via pin hole be positioned at first move Jiao and, first moves focal plane is in Jiao when not adding first via phase fitler and the rear position; Successively through No. the second phase fitler, the second road collecting lens and the second road pin hole are received by the second tunnel light intensity converter through the light beam of the common spectroscope transmission of 1:1; Described the second road pin hole is positioned at second and moves focal plane, and second moves focal plane is in focal plane anterior position when not adding No. the second phase fitler.
Last symmetry is moved the axial high-resolution confocal microscopic imaging of burnt formula device, described first via phase fitler and No. the second phase fitler conjugation; Described first moves focal plane and second moves focal plane when not adding first via phase fitler and No. the second phase fitler, the focal plane symmetry of first via collecting lens and the second road collecting lens.
Last symmetry is moved the axial high-resolution confocal microscopic imaging of burnt formula device, and first via pin hole is positioned at when not adding first via phase fitler, the position of focal plane of first via collecting lens; The second road pin hole is positioned at when not adding No. the second phase fitler, the position of focal plane of the second road collecting lens.
Last symmetry is moved the axial high-resolution confocal microscopic imaging of burnt formula device, and first via phase fitler is circle symmetry, two ring or multiring structures; No. the second phase fitler is circle symmetry, two ring or multiring structures.
Last symmetry is moved the axial high-resolution confocal microscopic imaging of burnt formula device, and described first via collecting lens is identical with the second road collecting lens, and first via pin hole is identical with the second road pin hole, and first via light intensity converter is identical with the second tunnel light intensity converter.
Beneficial effect of the present invention is:
1, two-way is collected light path and has been adopted symmetry to move burnt technology among the present invention, and the two axial light distribution of surveying light paths have realized symmetrical translation when not adding wave filter, and its effect is equal to the differential confocal microtechnic;
2, the present invention utilizes a phase iris filter to have and moves burnt characteristic, by using conjugation position phase iris filter, carry out exactly symmetry and move Jiao surveying focal plane in the light path, can accurately arrange owing to move burnt amount, therefore can make the system axial resolution characteristic reach optimum;
3, this method has been exempted complicated pin hole symmetry out of focus adjustment in actual applications, only need make two pin holes of surveying light path place the position of focal plane when not adding wave filter, wave filter is added to get final product then.
Description of drawings
Fig. 1 is that symmetry of the present invention is moved the axial high-resolution confocal microscopic imaging of burnt formula apparatus structure synoptic diagram.
Among the figure: 1 laser instrument, 2 collimating mirror groups, 3 polarization spectroscopes, 41/4 λ wave plate, 5 focus on microcobjective, 6 samples, 7 first via collecting lenses, 8 first via pin holes, 9 first via light intensity converters, the common spectroscope of 101:1,11 the second road collecting lenses, 12 the second road pin holes, 13 the second tunnel light intensity converters, 14 No. the second phase fitlers, 15 first via phase fitlers.
Embodiment
Below in conjunction with accompanying drawing the specific embodiment of the invention is described in further detail.
The symmetry of present embodiment is moved the axial high-resolution confocal microscopic imaging of burnt formula apparatus structure synoptic diagram as shown in Figure 1, and this symmetry is moved the axial high-resolution confocal microscopic imaging of burnt formula device and comprised illumination path and survey light path,
Described illumination path sets gradually laser instrument 1, collimating mirror group 2, polarization spectroscope 3,1/4 λ wave plate 4, focuses on microcobjective 5 and sample 6 along direction of beam propagation; The light beam that laser instrument 1 sends is behind collimating mirror group 2 collimations, and parallel polarization spectroscope 3 and the 1/4 λ wave plate 4 of passing converges on the testee 6 by focusing on microcobjective 5;
Described detection light path comprises the common spectroscope 10 of 1:1, first via phase fitler 15, first via collecting lens 7, first via pin hole 8, first via light intensity converter 9, No. the second phase fitler 14, the second road collecting lens, 11, the second road pin hole, 12, the second tunnel light intensity converter 13; From testee 6 beam reflected, successively through focusing on microcobjective 5 and 1/4 λ wave plate 4, and reflex to the common spectroscope 10 of 1:1 by polarization spectroscope 3, passed through first via phase fitler 15 successively by common spectroscope 10 beam reflected of 1:1, first via collecting lens 7 and first via pin hole 8 are received by first via light intensity converter 9; Described first via pin hole 8 is positioned at first and moves focal plane, and first moves focal plane is in focal plane rear position when not adding first via phase fitler 15; Light beam through common spectroscope 10 transmissions of 1:1 is received by the second tunnel light intensity converter 13 through No. the second phase fitler 14, the second road collecting lens 11 and the second road pin hole 12 successively; Described the second road pin hole 12 is positioned at second and moves focal plane, and second moves focal plane is in focal plane anterior position when not adding No. the second phase fitler 14.
Wherein, first via collecting lens 7 is identical with the second road collecting lens 11; First via pin hole 8 is identical with the second road pin hole 12; First via light intensity converter 9 is identical with the second tunnel light intensity converter 13; First via phase fitler 15 and No. the second phase fitler 14 conjugation, described first moves focal plane and second moves focal plane when not adding first via phase fitler 15 and No. the second phase fitler 14, the focal plane symmetry of first via collecting lens 7 and the second road collecting lens 11; First via pin hole 8 is positioned at when not adding first via phase fitler 15, the position of focal plane of first via collecting lens 7; The second road pin hole 12 is positioned at when not adding No. the second phase fitler 14, the position of focal plane of the second road collecting lens 11.
Described first via phase fitler 15 is positioned at the entrance pupil position of first via collecting lens 7, and No. the second phase fitler 14 is positioned at the entrance pupil position of the second road collecting lens 11.
Utilize bit phase delay principles of construction polarization mask iris filter to be in the present embodiment
According to the scalar diffraction principle as can be known, lens focusing light field COMPLEX AMPLITUDE is in the space exploration:
ρ is the normalization radius in the formula, and v, t are near the radial and axial normalization coordinate focus, and axial intensity distribution can be expressed as near its focus:
Radial strength on the focal plane is:
U wherein
fBe the burnt amount of moving of focal plane.
Under the second order approximate condition, axial intensity distribution is:
Wherein In is:
It is differentiated, when derivative is zero, Jiao who gets axial focus move into:
As the parameter r of pupil function, φ
1-φ
2When getting different values, Jiao Yiliang changes, and it is changed to symmetrical distribution, therefore can survey two and adopt different phase filters to move Jiao to realize symmetry in the light path.
Because the first via phase fitler 15 that adopts in the present embodiment and No. the second phase fitler 14 are to utilize the polarization mask method to realize that Jiao moves control, by the polarization phase on the binary annular region polarization mask realization pupil plane or amplitude control, thereby obtain to produce the pupil function that Jiao moves, utilize axial Jiao to move the symmetrical out of focus placement that effect realizes pin hole.When surveying, the two-way detectable signal adopts differential mode to handle, and can improve the system axial detection performance does not influence radially resolution characteristic of system simultaneously.Usually, when the slope of I (u) zero crossing is more big, its azimuthal resolution is more high, therefore utilizes and asks for I (u) when the second derivative at zero point is zero, and the out of focus distance that obtains is the highest for the differential system azimuthal resolution.
Claims (5)
1. symmetry is moved the axial high-resolution confocal microscopic imaging of burnt formula device, it is characterized in that: comprise illumination path and survey light path,
Described illumination path sets gradually laser instrument (1), collimating mirror group (2), polarization spectroscope (3), 1/4 λ wave plate (4), focuses on microcobjective (5) and sample (6) along direction of beam propagation; The light beam that laser instrument (1) sends is behind collimating mirror group (2) collimation, and parallel polarization spectroscope (3) and the 1/4 λ wave plate (4) of passing converges on the testee (6) by focusing on microcobjective (5);
Described detection light path comprises the common spectroscope of 1:1 (10), first via phase fitler (15), first via collecting lens (7), first via pin hole (8), first via light intensity converter (9), No. the second phase fitler (14), the second road collecting lens (11), the second road pin hole (12), the second tunnel light intensity converter (13); From testee (6) beam reflected, successively through focusing on microcobjective (5) and 1/4 λ wave plate (4), and reflex to the common spectroscope of 1:1 (10) by polarization spectroscope (3), passed through first via phase fitler (15) successively by the common spectroscope of 1:1 (10) beam reflected, first via collecting lens (7) and first via pin hole (8) are received by first via light intensity converter (9); Described first via pin hole (8) is positioned at first and moves focal plane, and first moves focal plane is in focal plane rear position when not adding first via phase fitler (15); Successively through No. the second phase fitler (14), the second road collecting lens (11) and the second road pin hole (12) are received by the second tunnel light intensity converter (13) through the light beam of the common spectroscope of 1:1 (10) transmission; Described the second road pin hole (12) is positioned at second and moves focal plane, and second moves focal plane is in focal plane anterior position when not adding No. the second phase fitler (14).
2. symmetry according to claim 1 is moved the axial high-resolution confocal microscopic imaging of burnt formula device, it is characterized in that: described first via phase fitler (15) and No. the second phase fitler (14) conjugation; Described first moves focal plane and second moves focal plane when not adding first via phase fitler (15) and No. the second phase fitler (14), the focal plane symmetry of first via collecting lens (7) and the second road collecting lens (11).
3. symmetry according to claim 1 is moved the axial high-resolution confocal microscopic imaging of burnt formula device, it is characterized in that: first via pin hole (8) is positioned at when not adding first via phase fitler (15), the position of focal plane of first via collecting lens (7); The second road pin hole (12) is positioned at when not adding No. the second phase fitler (14), the position of focal plane of the second road collecting lens (11).
4. symmetry according to claim 1 is moved the axial high-resolution confocal microscopic imaging of burnt formula device, it is characterized in that: first via phase fitler (15) is circle symmetry, two ring or multiring structures; No. the second phase fitler (14) is circle symmetry, two ring or multiring structures.
5. symmetry according to claim 1 is moved the axial high-resolution confocal microscopic imaging of burnt formula device, it is characterized in that: described first via collecting lens (7) is identical with the second road collecting lens (11), first via pin hole (8) is identical with the second road pin hole (12), and first via light intensity converter (9) is identical with the second tunnel light intensity converter (13).
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108020505A (en) * | 2017-11-30 | 2018-05-11 | 哈尔滨工业大学 | The burnt optical tweezer microscopic imaging device of zoom copolymerization and method |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06265791A (en) * | 1993-03-11 | 1994-09-22 | Ishikawajima Harima Heavy Ind Co Ltd | Laser microscope |
| CN1632448A (en) * | 2005-02-04 | 2005-06-29 | 哈尔滨工业大学 | Three-dimensional super-resolution confocal array scanning and micro-detecting method and device |
| CN101852594A (en) * | 2010-05-10 | 2010-10-06 | 北京理工大学 | Super-resolution laser polarization differential confocal imaging method and device |
| CN103105143A (en) * | 2013-01-29 | 2013-05-15 | 哈尔滨工业大学 | Differential motion confocal microscopic measurement device based on fluorescence excitation of surface to be detected |
-
2013
- 2013-06-09 CN CN2013102296053A patent/CN103278088A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06265791A (en) * | 1993-03-11 | 1994-09-22 | Ishikawajima Harima Heavy Ind Co Ltd | Laser microscope |
| CN1632448A (en) * | 2005-02-04 | 2005-06-29 | 哈尔滨工业大学 | Three-dimensional super-resolution confocal array scanning and micro-detecting method and device |
| CN101852594A (en) * | 2010-05-10 | 2010-10-06 | 北京理工大学 | Super-resolution laser polarization differential confocal imaging method and device |
| CN103105143A (en) * | 2013-01-29 | 2013-05-15 | 哈尔滨工业大学 | Differential motion confocal microscopic measurement device based on fluorescence excitation of surface to be detected |
Non-Patent Citations (1)
| Title |
|---|
| 朱加兴: "对称离焦的共焦微位移传感方法研究", 《万方学位论文库》, 25 December 2012 (2012-12-25) * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108020505A (en) * | 2017-11-30 | 2018-05-11 | 哈尔滨工业大学 | The burnt optical tweezer microscopic imaging device of zoom copolymerization and method |
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Application publication date: 20130904 |