CN103278093B - Differential-motion double-area confocal axial measuring equipment - Google Patents
Differential-motion double-area confocal axial measuring equipment Download PDFInfo
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- CN103278093B CN103278093B CN201310229370.8A CN201310229370A CN103278093B CN 103278093 B CN103278093 B CN 103278093B CN 201310229370 A CN201310229370 A CN 201310229370A CN 103278093 B CN103278093 B CN 103278093B
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Abstract
The invention discloses differential-motion double-area confocal axial measuring equipment and belongs to the field of three-dimensional confocal microscopic measurement. The differential-motion double-area confocal axial measuring equipment comprises a laser arranged on a direct light path, a beam-expanding collimating lens, a polarized beam splitter prism, a quarter-wave plate, a detection objective lens and a sample. Laser beams emitted by the laser penetrate through the polarized beam splitter prism in a parallel mode after being collimated by the beam-expanding collimating lens, and then the laser beams pass through the quarter-wave plate and are focused on the sample through the detection objective lens. The differential-motion double-area confocal axial measuring equipment further comprises a differential-motion double-area confocal detection light path. Light beams reflected from the sample further pass through the detection objective lens and the quarter-wave plate again in sequence, are reflected by the polarized beam splitter prism, and are emitted to the differential-motion double-area confocal detection light path in an incident mode. Through the design, the differential-motion double-area confocal axial measuring equipment is higher in axial detection sensitivity and can restrain the effects of multiplicative noise in a confocal system. Meanwhile, an axial curve nearby a focal plane changed monotonously is obtained, and the axial position of the sample can be obtained by measuring once.
Description
Technical field
The confocal axial measurement mechanism in a kind of differential and double region belongs to three-dimensional confocal micrometering field, particularly the confocal axial measurement mechanism of one differential two-region detection.
Background technology
Confocal scanning microscope imaging technique is as the three-D imaging method of a kind of noncontact, high azimuthal resolution, be used widely in optical precision measurement field, especially along with the precision of micro-structured component processing improves constantly, the value of its investigation and application is also in continuous lifting.
Confocal microscopic imaging technology is proposed in nineteen fifty-seven by M.Minsky the earliest, has after this been established the theoretical foundation of confocal microscopic imaging technology by C.J.R.Sheppard, T.Wilson and M.Gu.And in the eighties in last century, have commercial confocal microscope commodity to occur successively, facilitate the development of three-dimensional micrometering technology greatly.
In confocal microscopy, Chinese scholars is for the large quantifier elimination of three-dimensional imaging energy masterpiece how improving confocal microscope system, in order to obtain higher imaging resolution, as by introduce Nonlinear fluorescence excite fluorescent confocal microtechnic, adopt improve the 4Pi confocal microscopy of illuminating aperture angle, the interference confocal microtechnic in conjunction with interferometry, and ad hoc structure is realized to the confocal microscopy of the Structured Illumination that high precision scans, in addition, changing detection mode, is also that confocal microscopy puies forward high-resolution a kind of approach.By introducing differential detection mode, improving axial measurement resolution is a kind of effective means, as patent: first the differential confocal scanning detection method (patent No.: ZL200410006359.6) with high spatial resolution introduces the concept of differential detection in basic confocal optical path, it passes through Amici prism, the light beam returned from detection object lens is divided into two-way, wherein sniffer is positioned over the positive out of focus place of collecting object lens by a road, sniffer is positioned over the negative out of focus place of collecting object lens by another road, using the difference of two sniffers outputs as exporting by sniffer, achieve the lifting of axial sensitivity 1 times, the additive noise that inhibit and exist in system is provided.In addition patent: compound shade ultra-distinguish differential confocal measurement method and device (patent No.: ZL200710301423.7), is combined polychromatic light illumination with differential confocal, further increases detection resolution.Patent: the three-differential focasing micro-three-dimensional super-resolution imaging method (patent No.: 200410090774.4) propose and a kind ofly promote three-dimensional resolution based on three differential confocal imaging methods.Patent: the spherical aberration measurement method of differential confocal system (patent No.: 201210140889.4) differential confocal method is applied the measurement in spherical aberration, in addition, differential confocal technology also has other forms.
Summary of the invention
In order to solve the problem, the present invention devises the confocal axial measurement mechanism in a kind of differential and double region, the confocal axial measurement mechanism in this differential and double region not only possesses higher axial detection sensitivity, and the impact of multiplicative noise in confocal system can be suppressed, Output rusults is had nothing to do with the reflectivity of input light intensity and sample; Axial curve near the focal plane simultaneously obtaining monotone variation, when making sample be in position near detection focal plane of lens, can obtain its axial location by one-shot measurement.
The object of the present invention is achieved like this:
The confocal axial measurement mechanism in a kind of differential and double region, comprise the laser instrument be arranged in direct projection light path, beam-expanding collimation mirror, polarization splitting prism, 1/4 slide, detection object lens and sample, from the laser beam that laser instrument is launched, after beam-expanding collimation mirror beam-expanding collimation, parallel across polarization splitting prism, then through 1/4 slide, converge on sample by detection object lens; Also comprise the differential and double region confocal detection light path be arranged on reflected light path, from the light beam of sample reflection, more successively through detection object lens, 1/4 slide, reflected by polarization splitting prism, incide differential and double region confocal detection light path.
The above-mentioned confocal axial measurement mechanism in a kind of differential and double region, described differential and double region confocal detection light path comprises spectroscope, and first collects object lens, and second collects object lens, and the first dual area ratio exports sniffer, and the second dual area ratio exports sniffer; Incide spectroscope from the light beam of polarization splitting prism reflection is parallel, direct beam is collected object lens through first and is converged to the first dual area ratio output sniffer; Folded light beam is collected object lens through second and is converged to the second dual area ratio output sniffer.
The above-mentioned confocal axial measurement mechanism in a kind of differential and double region, described first dual area ratio exports sniffer or the second dual area ratio and exports sniffer and comprise and be arranged on the first photosurface in crust of the device and the second photosurface; Be arranged on the first photoelectric switching circuit module outside crust of the device, the second photoelectric switching circuit module, hardware division circuit module, analog-to-digital conversion module and digital output interface; The first described photosurface is circular, and pin hole is opened in the center of circle, the second photosurface be circle, places after being positioned at the first photosurface with the second photosurface is concentric; First photosurface exports analog voltage V through the first photoelectric switching circuit module opto-electronic conversion
1, the second photosurface exports analog voltage V through the second photoelectric switching circuit module opto-electronic conversion
2, V
1with V
2enter hardware division circuit module input end, V
1for divisor end, V
2for dividend end, with V
3=V
2/ V
1, through hardware division circuit module computing output intensity ratio value, complete analog to digital conversion through analog-to-digital conversion module, and exported by digital output interface.
The above-mentioned confocal axial measurement mechanism in a kind of differential and double region, it is the first CCD camera that the first described dual area ratio exports sniffer, it is the second CCD camera that the second described dual area ratio exports sniffer, by taking the mode of dummy pinhole in the light spot image to the first CCD camera and the acquisition of the second CCD camera, light spot image is divided into inner circle region and ring belt area, using the ratio of inner circle area pixel gray-scale value sum and ring belt area grey scale pixel value sum as output.
Due to the confocal axial measurement mechanism in differential and double region of the present invention, comprise the laser instrument be arranged in direct projection light path, beam-expanding collimation mirror, polarization splitting prism, 1/4 slide, detection object lens and sample, from the laser beam that laser instrument is launched, after beam-expanding collimation mirror beam-expanding collimation, parallel across polarization splitting prism, then through 1/4 slide, converge on sample by detection object lens; Also comprise the differential and double region confocal detection light path be arranged on reflected light path, from the light beam of sample reflection, more successively through detection object lens, 1/4 slide, reflected by polarization splitting prism, incide differential and double region confocal detection light path; This design, makes the confocal axial measurement mechanism in this differential and double region not only possess higher axial detection sensitivity, and can suppress the impact of multiplicative noise in confocal system, and Output rusults is had nothing to do with the reflectivity of input light intensity and sample; Axial curve near the focal plane simultaneously obtaining monotone variation, when making sample be in position near detection focal plane of lens, can obtain its axial location by one-shot measurement.
Accompanying drawing explanation
Fig. 1 is the confocal axial measurement mechanism structural representation in differential and double region of the present invention.
Fig. 2 is the differential and double region confocal detection light channel structure schematic diagram of specific embodiment one.
Fig. 3 is differential and double region confocal detection light path axial response curve.
Fig. 4 is the differential and double region confocal detection light channel structure schematic diagram of specific embodiment two.
In figure: 101 laser instruments, 102 beam-expanding collimation mirrors, 103 polarization splitting prisms, 1041/4 slide, 105 detection object lens, 106 samples, 107 spectroscopes, 108 first collect object lens, 109 second collect object lens, 110 first dual area ratios export sniffer, 111 second dual area ratios export sniffer, 201 first photosurfaces, 202 second photosurfaces, 203 first photoelectric switching circuit modules, 204 second photoelectric switching circuit modules, 205 hardware division circuit modules, 206 analog-to-digital conversion modules, 207 digital output interfaces, 301 first CCD camera, 302 second CCD camera.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the invention is described in further detail.
Specific embodiment one
The confocal axial measurement mechanism structural representation in differential and double region of the present embodiment as shown in Figure 1, the confocal axial measurement mechanism in this differential and double region comprises the laser instrument 101 be arranged in direct projection light path, beam-expanding collimation mirror 102, polarization splitting prism 103,1/4 slide 104, detection object lens 105 and sample 106, from the laser beam that laser instrument 101 is launched, after beam-expanding collimation mirror 102 beam-expanding collimation, parallel across polarization splitting prism 103, again through 1/4 slide 104, converge on sample 106 by detection object lens 105; Also comprise the differential and double region confocal detection light path be arranged on reflected light path, from the light beam that sample 106 reflects, more successively through detection object lens 105,1/4 slide 104, reflected by polarization splitting prism 103, incide differential and double region confocal detection light path.
Described differential and double region confocal detection light channel structure schematic diagram as shown in Figure 2, this differential and double region confocal detection light path comprises spectroscope 107, and first collects object lens 108, second collects object lens 109, first dual area ratio exports sniffer 110, second dual area ratio and exports sniffer 111; Incide spectroscope 107 from the light beam of polarization splitting prism 103 reflection is parallel, direct beam is collected object lens 108 through first and is converged to the first dual area ratio output sniffer 110; Folded light beam is collected object lens 109 through second and is converged to the second dual area ratio output sniffer 111.
The first described dual area ratio exports sniffer 110 or the second dual area ratio output sniffer 111 comprises the first photosurface 201 and the second photosurface 202 be arranged in crust of the device 208; Be arranged on the first photoelectric switching circuit module 203, second photoelectric switching circuit module 204 outside crust of the device 208, hardware division circuit module 205, analog-to-digital conversion module 206 and digital output interface 207; The first described photosurface 201 is circular, and pin hole is opened in the center of circle, and the second photosurface 202 be circular, is positioned at the first photosurface 201 afterwards and place with the second photosurface 202 is concentric; First photosurface 201 exports analog voltage V through the first photoelectric switching circuit module 203 opto-electronic conversion
1, the second photosurface 202 exports analog voltage V through the second photoelectric switching circuit module 204 opto-electronic conversion
2, V
1with V
2enter hardware division circuit module 205 input end, V
1for divisor end, V
2for dividend end, with V
3=V
2/ V
1, through hardware division circuit module 205 computing output intensity ratio value, complete analog to digital conversion through analog-to-digital conversion module 206, and exported by digital output interface 207.
The double-deck test surface that describes, the central needle hole of the first photosurface 201 is of a size of r
1, the radius of the first photosurface 201 is r
2.The radius of the second photosurface 202 should ensure the detection to all light intensity through the first photosurface 201 central needle hole.Consider the optical magnification M from sample 106 surface to the first photosurface 201 and the second photosurface 202, physical size is r
1=3M/ (ksin α), r
2=10M/ (ksin α), wherein: k=2 π/λ, α are the angle, semiaperture of detection object lens 105.
Described differential and double region confocal detection light path, first photosurface 201 of the first dual area ratio output sniffer 110 is positioned at the front focal plane of the first collection object lens 108, first photosurface 201 of the second dual area ratio output sniffer 111 is positioned at the back focal plane of the second collection object lens 109, and the first photosurface 201 that the first dual area ratio exports sniffer 110 is identical with the first photosurface 201 defocusing amount that the second dual area ratio exports sniffer 111.Finally export the output difference of sniffer 110 and the second dual area ratio output sniffer 111 with the first dual area ratio, export as differential and double region confocal detection light path axial response, the axial response curve obtained as shown in Figure 3.
Specific embodiment two
The present embodiment is from the different of specific embodiment one, in described differential and double region confocal detection light path, first dual area ratio is exported sniffer 110 and replaces to the first CCD camera 301, the second dual area ratio is exported sniffer 111 and replaces to the second CCD camera 302, as shown in Figure 4.By taking the mode of dummy pinhole in the light spot image to the first CCD camera 301 and the acquisition of the second CCD camera 302, light spot image is divided into inner circle region and ring belt area, using the ratio of inner circle area pixel gray-scale value sum and ring belt area grey scale pixel value sum as output.Finally with the output difference of the first CCD camera 301 and the second CCD camera 302, export as differential and double region confocal detection light path axial response.
Claims (1)
1. the confocal axial measurement mechanism in differential and double region, comprise the laser instrument (101) be arranged in direct projection light path, beam-expanding collimation mirror (102), polarization splitting prism (103), 1/4 slide (104), detection object lens (105) and sample (106), from the laser beam that laser instrument (101) is launched, after beam-expanding collimation mirror (102) beam-expanding collimation, parallel across polarization splitting prism (103), again through 1/4 slide (104), converge on sample (106) by detection object lens (105); Also comprise the differential and double region confocal detection light path be arranged on reflected light path, from the light beam that sample (106) reflects, again successively through detection object lens (105), 1/4 slide (104), reflected by polarization splitting prism (103), incide differential and double region confocal detection light path; Described differential and double region confocal detection light path comprises spectroscope (107), first collects object lens (108), second collects object lens (109), and the first dual area ratio exports sniffer (110) and the second dual area ratio exports sniffer (111); It is the first CCD camera (301) that the first described dual area ratio exports sniffer (110), it is the second CCD camera (302) that the second described dual area ratio exports sniffer (111), by taking the mode of dummy pinhole in the light spot image that obtains the first CCD camera (301) and the second CCD camera (302), light spot image is divided into inner circle region and ring belt area, using the ratio of inner circle area pixel gray-scale value sum and ring belt area grey scale pixel value sum as output; The light beam reflected from polarization splitting prism (103) is parallel incides spectroscope (107), and direct beam is collected object lens (108) through first and converged to the first dual area ratio and export sniffer (110); Folded light beam is collected object lens (109) through second and is converged to the second dual area ratio output sniffer (111);
It is characterized by: described first dual area ratio exports sniffer (110) or the second dual area ratio and exports sniffer (111) and comprise and be arranged on the first photosurface (201) in crust of the device (208) and the second photosurface (202); Be arranged on crust of the device (208) the first photoelectric switching circuit module (203) outward, second photoelectric switching circuit module (204), hardware division circuit module (205), analog-to-digital conversion module (206) and digital output interface (207); Described the first photosurface (201) is circular, and pin hole is opened in the center of circle, and the second photosurface (202) be circular, is positioned at the first photosurface (201) afterwards and place with the second photosurface (202) is concentric; First photosurface (201) exports analog voltage V through the first photoelectric switching circuit module (203) opto-electronic conversion
1, the second photosurface (202) exports analog voltage V through the second photoelectric switching circuit module (204) opto-electronic conversion
2, V
1with V
2enter hardware division circuit module (205) input end, V
1for divisor end, V
2for dividend end, with V
3=V
2/ V
1, through hardware division circuit module (205) computing output intensity ratio value, complete analog to digital conversion through analog-to-digital conversion module (206), and exported by digital output interface (207).
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