CN102175143A - Line scanning differential confocal measuring device based on light path of pillar lens - Google Patents

Line scanning differential confocal measuring device based on light path of pillar lens Download PDF

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CN102175143A
CN102175143A CN 201110041536 CN201110041536A CN102175143A CN 102175143 A CN102175143 A CN 102175143A CN 201110041536 CN201110041536 CN 201110041536 CN 201110041536 A CN201110041536 A CN 201110041536A CN 102175143 A CN102175143 A CN 102175143A
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lens
linear array
spectroscope
differential confocal
post lens
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CN102175143B (en
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刘俭
谭久彬
唐建波
李镁钰
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哈尔滨工业大学
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Abstract

The invention relates to a line scanning differential confocal measuring device based on a light path of a pillar lens, belonging to the field of a microcosmic measurement technique. The line scanning differential confocal measuring device provided by the invention can be used for solving the problem of low measurement efficiency when the three-dimensional measurement is carried out by a differential confocal detection technique. In the line scanning differential confocal measuring device provided by the invention, laser beams generated by a laser device are gathered in a pinhole through a focusing lens, expanded through a collimation and beam expansion lens after being filtered and then emitted to a first spectroscope through a rectangular diaphragm; the transmitted light beams of the first spectroscope are emitted to a detection focusing pillar lens; the line focusing is formed on the image focusing plane of the detection focusing pillar lens; after the light beams which are reflected by a sample to be measured are transmitted through the detection focusing pillar lens, the light beams which pass through the first spectroscope are emitted to a second spectroscope; and after passing through a first collecting pillar lens, the transmitted light beams of the second spectroscope are subjected to line focusing to reach the photosensitive surface of a first linear array point detector. The line scanning differential confocal measuring device provided by the invention is suitable for differential confocal detection.

Description

Line sweep differential confocal measuring device based on post lens light path

Technical field

The present invention relates to a kind of line sweep differential confocal measuring device, belong to the microscopic measurement technical field based on post lens light path.

Background technology

The basic thought of confocal microscopic imaging technology is to suppress parasitic light by introducing pinhole detector, and produce axial chromatography ability, this technology is carried out the two-dimensional scan measurement by the X-Y plane to sample of pointwise, obtain the image of current X-Y plane, again sample is carried out Z to (axially) scanning, and next X-Y plane is carried out the pointwise two-dimensional scan, by that analogy, carry out " piling up " by the two dimensional image that will obtain and handle, obtain the three-dimensionalreconstruction image of sample.Because this measuring method is very consuming time, for improving the efficiency of measurement of confocal detection technology, people have proposed to survey the replacement point with slit on this basis and have surveyed the method for carrying out confocal measurement.Survey the scanning detection speed that the method for carrying out confocal measurement has improved the sample X-Y plane greatly with slit, but because the employing of the front end light path of this method is the symmetrical light path of circle, make in the light distribution of slit detector receiving end inhomogeneous, central light strength is apparently higher than the light intensity of slit edge, thereby caused final measuring error.

In June, 2002, Wu Kaijie, Li Gang etc. are at " based on the research of the laser scanning confocal microscopy of line sweep mode " (Wu Kaijie, Li Gang, Yu Qilian, Jin Xia, Chinese journal of scientific instrument, the 23rd volume the 3rd phase supplementary issue) in, proposed to replace the confocal detection technology of circle lens with the post lens, this method makes the light distribution of detector receiving end more even, and has significantly improved horizontal range ability, has improved the efficiency of measurement of confocal detection technology.But the summit chromatography mode that this method adopts makes the system axial resolving power low, and the three-dimensional measurement inefficiency.

The differential confocal detection technique has been introduced differential detection in the confocal microscopy detection technique, and it adopts two-way differential detection signal that traditional confocal light path is improved.With respect to traditional confocal detection technology, the differential confocal detection technique has unique tracking characteristics at zero point, has high azimuthal resolution and is twice between the confocal axial response linear zone of tradition.When employing laminar analysis measurement method at zero point, the differential confocal detection technique provides the azimuthal resolution that is much higher than traditional confocal summit laminar analysis measurement method; When adopting axial response linear zone measurements method, the differential confocal detection technique provides and is twice in the confocal axial range of tradition and is higher than the confocal azimuthal resolution of tradition far away, when size between the sample axial dimension is less than the axial response linear zone in addition, can obtain the three-dimensional surface information of sample by a transversal scanning.Therefore, the sample axial dimension that differential confocal axial response linear zone measurements method can be measured can reach the twice of traditional confocal linear zone measurements method, azimuthal resolution also is significantly improved, and with respect to zero point chromatography method have higher efficiency of measurement.But when adopting the differential confocal detection technique to carry out three-dimensional measurement, still need the X-Y plane of sample is carried out point by point scanning, efficiency of measurement is still low.

Summary of the invention

The objective of the invention is in order to solve the differential confocal detection technique when carrying out three-dimensional measurement, the problem that efficiency of measurement is low provides a kind of line sweep differential confocal measuring device based on post lens light path.

Present invention resides in the laser instrument, condenser lens, pin hole and the collimator and extender lens that set gradually on the coaxial light path, it also comprises rectangular aperture, first spectroscope, second spectroscope, detection focal lens, the first collection post lens, the second collection post lens, the first linear array point probe and the second linear array point probe

The laser beam that laser instrument produces converges at pin hole by condenser lens, after the filtered pointolite of pin hole expands bundle through the collimator and extender lens, is incident to first spectroscope through rectangular aperture again,

Transmitted light beam after the first spectroscope transmission is incident to the detection focal lens, and forms the line gathering on the focal plane, picture side of surveying focal lens, is used for the tested sample that is arranged on the focal plane, picture side of surveying focal lens is carried out the line illumination;

Through after surveying the focal lens transmission, be incident to second spectroscope through the first spectroscope beam reflected by the light beam after the tested sample reflection again,

Second spectroscopical transmitted light beam is collected on the photosurface of line focus to the first linear array point probe behind the post lens through first, and the first linear array point probe is arranged at the first burnt front position of collecting the post lens;

Second spectroscopical folded light beam is collected on the photosurface of line focus to the second linear array point probe behind the post lens through second, and the second linear array point probe is arranged at the second defocused position of collecting the post lens;

The defocusing amount of the first linear array point probe and the second linear array point probe equates.

Advantage of the present invention is:

One: the present invention adopts the post lens that differential confocal measurement light path is carried out One-Dimensional Extended and has realized line sweep, utilize differential confocal axial response family curve linear zone measurements method to have the characteristics of big axial vector journey, high azimuthal resolution simultaneously, post lens differential confocal detection technique after the post lens introducing differential confocal system both had the advantage of big axial vector journey, high azimuthal resolution, can can realize measurement to (or X to) scanning by Y again, form quick measurement capability the large scale micro-structured component to sample;

Two: the present invention adopts the enlarged-diameter of collimator and extender lens with laser beam, has realized the expansion to tested sample surface illumination scope; The emergent light of collimator and extender lens uses rectangular aperture to block the marginal portion of light beam before by beam split, make final through after surveying focal lens, the beam intensity that tested sample is thrown light on is more even, be more conducive to axially measure, reduced the measuring error that causes because of measuring light intensity distribution is inhomogeneous based on the confocal detection of post lens light route scanning;

Three: adopt the linear array point probe to make line sweep differential confocal detection technique have three-dimensional resolution characteristic based on post lens light path; The linear array point probe can be realized the corresponding point of test surface line focus light beam are surveyed, thereby make the post lens not have the resolution characteristic of focal power direction, be reconstructed the three-dimensional surface information that can obtain sample by the each point signal that will detect, realized the three-dimensional measurement of post lens differential confocal measuring system; Compared to the line array CCD detector, employing linear array point probe can be realized the detection to feeble signal, and then improves measuring accuracy in addition.

The present invention can obtain its three-dimensional appearance by tested sample being carried out the one-dimensional scanning motion, has improved efficiency of measurement greatly; Can be used for the detection of three-dimensional microstructure in large scale Microstructure Optics element, microstructure mechanical organ, the integrated circuit component, and reach the purpose of high precision, noncontact and three-dimensional fast detecting.

Description of drawings

Fig. 1 is a structural representation of the present invention; Among the figure-u MThe expression defocusing amount.

Fig. 2 is the structural representation of described linear array point probe;

Fig. 3 is the left view of tested sample among Fig. 1, and arrow y represents the moving direction of tested sample;

Fig. 4 is the equivalent index path of apparatus of the present invention;

Fig. 5 is incident to the diffraction pattern synoptic diagram of surveying focal lens for the ideal plane ripple through rectangular aperture;

Fig. 6 is the confocal and confocal transverse response characteristic correlation curve figure of traditional round lens of post lens of the present invention;

Fig. 7 is the confocal and confocal axial response characteristic correlation curve figure of traditional round lens of post lens of the present invention;

Fig. 8 is the axial difference dynamic response performance diagram of apparatus of the present invention.

Embodiment

Embodiment one: below in conjunction with Fig. 1 to Fig. 3 present embodiment is described,

Present embodiment is included in laser instrument 1, condenser lens 2, pin hole 3 and the collimator and extender lens 4 that set gradually on the coaxial light path, it also comprises rectangular aperture 5, the first spectroscope 6-1, the second spectroscope 6-2, surveys focal lens 7, the first collection post lens 8-1, the second collection post lens 8-2, the first linear array point probe 9-1 and the second linear array point probe 9-2

The laser beam that laser instrument 1 produces converges at pin hole 3 by condenser lens 2, after pin hole 3 filtered pointolites expand bundle through collimator and extender lens 4, is incident to the first spectroscope 6-1 through rectangular aperture 5 again,

Transmitted light beam after the first spectroscope 6-1 transmission is incident to surveys focal lens 7, and on the focal plane, picture side of surveying focal lens 7, form the line gathering, be used for the tested sample 10 that is arranged on the focal plane, picture side of surveying focal lens 7 is carried out the line illumination;

Through after surveying focal lens 7 transmissions, be incident to the second spectroscope 6-2 through the first spectroscope 6-1 beam reflected by the light beam after tested sample 10 reflections again,

The transmitted light beam of the second spectroscope 6-2 is collected on the photosurface of line focus to the first linear array point probe 9-1 behind the post lens 8-1 through first, and the first linear array point probe 9-1 is arranged at the first burnt front position of collecting post lens 8-1;

The folded light beam of the second spectroscope 6-2 is collected on the photosurface of line focus to the second linear array point probe 9-2 behind the post lens 8-2 through second, and the second linear array point probe 9-2 is arranged at the second defocused position of collecting post lens 8-2;

The defocusing amount of the first linear array point probe 9-1 and the second linear array point probe 9-2 equates.

Rectangular aperture 5 in the present embodiment, detection focal lens 7, first are collected post lens 8-1, the first linear array point probe 9-1, the second collection post lens 8-2 and the second linear array point probe 9-2 and have been constituted post lens line sweep differential confocal measurement light path, realize the One-Dimensional Extended of differential confocal micrometering technology, kept the advantage of the big axial vector journey of differential confocal measuring technique, high azimuthal resolution simultaneously; Wherein survey on the transmitted light path that focal lens 7 is positioned at the first spectroscope 6-1, and before tested sample 10; The first collection post lens 8-1 and the first linear array point probe 9-1 are positioned on the transmitted light path of the second spectroscope 6-2 successively, and the second collection post lens 8-2 and the second linear array point probe 9-2 are positioned on the reflected light path of the second spectroscope 6-2 successively.

Present embodiment utilization angle pencil of ray and three post lens after by rectangular aperture 5 shapings have carried out One-Dimensional Extended with traditional differential confocal measuring system, tested surface at tested sample 10 forms line sweep, thereby obtains big axial vector journey, high azimuthal resolution and big laterally range simultaneously; Use the linear array point probe to receive the test surface light intensity, thereby make the post lens not have the resolution characteristic of focal power direction, realize three-dimensional imaging tested sample 10 tested surfaces.Adopt post lens differential confocal axial response curve linear region measurement method, to tested sample 10 carry out Y to or X to stripscan, can obtain the three-dimensional information on surface, tested sample 10 corresponding region, has the parallel scan capability of continuity point, and have high precision, the wide range characteristics that the differential confocal measuring technique is had concurrently, can realize quick scanning survey to sample.

Embodiment two: below in conjunction with Fig. 1 present embodiment is described,

Present embodiment is for to the further specifying of embodiment one, and described pin hole 3 is arranged on the rear focus place of condenser lens 2.Other is identical with embodiment one.

Embodiment three: below in conjunction with Fig. 1 present embodiment is described,

Present embodiment is for to the further specifying of embodiment one or two, and the rear focus of described condenser lens 2 overlaps with the focus in object space of collimator and extender lens 4.Other is identical with embodiment one or two.

Embodiment four: below in conjunction with Fig. 1 present embodiment is described,

Present embodiment is for to the further specifying of embodiment one, and the catercorner length of described rectangular aperture 5 is less than the spot diameter of the light beam after expanding bundle through collimator and extender lens 4, greater than the spot radius of the light beam after expanding bundle through collimator and extender lens 4.Other is identical with embodiment one.

Embodiment five: below in conjunction with Fig. 1 present embodiment is described,

Present embodiment is for to the further specifying of embodiment one, and described detection focal lens 7 is plano-convex post lens.Other is identical with embodiment one.

Embodiment six: below in conjunction with Fig. 1 present embodiment is described,

Present embodiment is for to the further specifying of embodiment one, and first collects post lens 8-1 and second, and to collect post lens 8-2 be the identical plano-convex post lens of technical parameter.Other is identical with embodiment one.

Embodiment seven: present embodiment is for to the further specifying of embodiment one, and the described first linear array point probe 9-1 is identical with the technical parameter of the second linear array point probe 9-2.Other is identical with embodiment one.

Embodiment eight: below in conjunction with Fig. 2 to Fig. 8 present embodiment is described,

Present embodiment is for to the further specifying of embodiment one or seven, and the described first linear array point probe 9-1 and the second linear array point probe 9-2 all constitute for the linear array light intensity point end of probe that is made of one group of single-mode fiber and the photelectric receiver of correspondence.Other is identical with embodiment one or seven.

The composition of the described first linear array point probe 9-1 and the second linear array point probe 9-2 is respectively: an end of one group of single-mode fiber closely is arranged as straight line, and the other end of each bar single-mode fiber is connected with corresponding photelectric receiver.

The course of work of apparatus of the present invention is as follows:

The laser beam that laser instrument 1 produces converges on the rear focus of condenser lens 2 by condenser lens 2, and the 3 pairs of light beams of pin hole that are positioned at condenser lens 2 rear focus places carry out shaping, makes to form the approximate ideal pointolite.

The focus in object space of collimator and extender lens 4 overlaps with the rear focus of condenser lens 2, form the approximate ideal plane wave through the filtered pointolites of pin hole 3 through collimator and extender lens 4 backs, obtain the uniform more rectangle plane ripple of light distribution block the marginal portion of light beam through rectangular aperture 5 after.

After the uniform more approximate ideal plane wave of the light distribution that rectangular aperture 5 obtains was through the first spectroscope 6-1 transmission, through surveying focal lens 7, tested sample 10 places on the focal plane, picture side of surveying focal lens 7 formed line focus.

Through tested sample 10 reflections, through after surveying focal lens 7, first spectroscope 6-1 reflection, the second spectroscope 6-2 transmission, collect post lens 8-1 by first and form line focus again; Through tested sample 10 reflections, through after surveying focal lens 7, first spectroscope 6-1 reflection, second spectroscope 6-2 reflection, collect post lens 8-2 by second and form line focus again.

At last to detect by the first linear array point probe 9-1 and the second linear array point probe 9-2 etc. defocus signal carry out differential processing, utilize the height that calculates sample between the linear zone of non-cumulative curve; Because the each point end of probe of the first linear array point probe 9-1 and the second linear array point probe 9-2 has definite spatial positional information, therefore can obtain the lateral coordinates of tested sample 10, thereby obtain the three-dimensional structure of sample.

Apparatus of the present invention can be divided into following five parts:

First: adopt the enlarged-diameter of collimator and extender lens 4 with its incident beam, can expand 2-3cm to, it has directly expanded the horizontal range of pick-up unit, the emergent light of collimator and extender lens 4 uses rectangular aperture 5 to block the marginal portion of light beam before beam split, make the illuminating bundle intensity distributions more even, be beneficial to confocal detection and axially measure, reduced the measuring error that causes because of measuring light intensity distribution is inhomogeneous;

Second portion: through the line focus hot spot of surveying focal lens 7 formation tested sample 10 is carried out the line illumination, make confocal measuring technique become the line illumination, can obtain tested sample 10 surface line focal beam spot area informations simultaneously by an illumination;

Third part: first of configuration collect post lens 8-1, the first linear array point probe 9-1 successively on the transmitted light path of the second spectroscope 6-2, second of configuration collect the post lens 8-2 and the second linear array point probe 9-2 successively on the reflected light path of the second spectroscope 6-2, realized utilizing the post lens differential confocal to be measured the linear expansion of light path, thereby make this measurement mechanism have the characteristics of big axial vector journey, high azimuthal resolution, and can obtain tested sample 10 line focus spot area surface informations simultaneously;

The 4th part: use the first linear array point probe 9-1 and the second linear array point probe 9-2 probe portion as apparatus of the present invention.

The 5th part: adopted differential confocal axial response linear zone measurements method, make tested sample 10 do the motion of one dimension uniform speed scanning, can obtain its three-dimensional surface information by this measurement mechanism, improve the efficiency of measurement of confocal microscopy detection technique greatly, realize quick measurement.

Provide theoretical analysis result below, and do contrast, feasibility of the present invention and superiority are described with the transverse response characteristic and the axial response characteristic of traditional round lens differential confocal to apparatus of the present invention based on fresnel diffraction.

Analytic process is based upon on the basis of Fig. 3, and S is a pointolite among the figure, lens L 2iBe collimation extender lens 4, t 0Be the transmittance function of imaging sample, P 1Be L 1iAnd L 1cPupil function, L in the actual light path 1iAnd L 1cBe same detection focal lens, P 2Be L 2cPupil function, L 2cFor surveying focal lens, f 1Be L 1iAnd L 1cFocal length, f 2Be L 2cFocal length, D2 is the linear array point probe.Out of focus position Δ z after detector is positioned at 2The time COMPLEX AMPLITUDE on the test surface For:

U Δz 2 ( x i , y i ) = C · ∫ ∫ h 1 ( ξ , η ) t 0 ( ξ - x s , η - y s ) · ∫ ∫ P 2 ( x 2 , y 2 ) · , (formula one)

exp [ - jk 1 2 ( Δz 1 f 1 2 + Δz 2 f 2 2 ) x 2 2 ] · exp [ jk 2 ( 1 f 2 + d 0 + 1 f 1 ) y 2 2 ] ·

exp { - jk [ ( ξ f 1 + x i f 2 ) x 2 + ( η f 1 + y i f 2 + d 0 ) y 2 } d x 2 dy 2 · dξdη

Wherein C is a constant; Δ z 1Be tested surface skew focal plane distance, (x s, y s) be that sample is in the tested surface side-play amount; K is a wave number, k=2 π/λ; d 0Be post lens L 1cAnd L 2cBetween distance; (ξ η) is the tested surface coordinate, (x 2, y 2) be post lens L 1cAreal coordinate; h 1(ξ is η) for collecting post lens L 1iPupil function.

h 1 ( ξ , η ) = ∫ ∫ P 1 ( x 1 , y 1 ) exp ( - jk Δz 1 2 f 1 2 x 1 2 ) exp ( jk 2 f 1 y 1 2 ) exp [ - jk f 1 ( x 1 ξ + y 1 η ) dx 1 dy 1 , Formula two

Definition U is the axial nondimensional displacement of system,

V is the horizontal nondimensional displacement of system,

u dBe the axial dimensionless defocusing amount of linear array point probe D2,

D in the following formula 1, L 1Be respectively post lens L 1iAnd L 1cWidth and length, D 2Be post lens L 2cWidth.

The normalization light intensity that then detects is:

I (u+u d, v)=| h 1(u, v) | 2| h 2(u+u d, v) | 2, formula three

H wherein 1(u, v) and h 2(u+ud, v) four definition by formula,

h ( u , v ) = D ∫ - 1 2 1 2 exp ( - jux 2 ) exp ( - jvx ) dx , Formula four

Wherein D is the post lens width.

Need to prove, the y direction of ideal column lens does not have focal power, so corresponding its x with focal power of the horizontal normalization coordinate of post lens is to actual coordinate, the employed improvement confocal methods of the formula three explanation devices axial response characteristic function I (u confocal with tradition, v)=| h (u, v) | 2| h (u+u d, v) | 2Have identical form, different is the difference that pupil function has caused net result.

Axial response characteristic after the introducing differential detection technology is:

I=I (u+u d, v)-I (u-u d, v), formula five

Formula five is the axial response characteristic function of described device.

I (u-u wherein d, v) three definition by formula.As axial dimensionless defocusing amount u d=25 o'clock, each resonse characteristic was seen Fig. 5 to Fig. 7.

By Figure of description 5 and Fig. 6 as can be seen, the post lens are confocal to have similar character to circle lens is confocal, and the difference of pupil function make the post lens confocal axially, lateral resolution is all confocal less than circle lens, and axially, laterally range is all confocal greater than circle lens.It is confocal that the confocal details resolution characteristic of above presentation of results post lens is weaker than circle lens, and the sample microstructure size of institute's energy measurement is confocal greater than circle lens.

As shown in Figure 7, the linear zone measurement range of apparatus of the present invention is about the twice of the confocal response curve of conventional post lens, and axial measurement resolution is far above conventional post lens confocal technology.Above presentation of results apparatus of the present invention have wide range, the high axially characteristics of measurement resolution.

Set forth theoretically below that the circle lens that will have now in the confocal detector (collect object lens and survey condenser lens) replaces with the post lens and the feasibility and the superiority that constitute apparatus of the present invention.

The present invention is not limited to above-mentioned embodiment, can also be the reasonable combination of technical characterictic described in the respective embodiments described above.

Claims (8)

1. line sweep differential confocal measuring device based on post lens light path, it is included in the laser instrument (1) that sets gradually on the coaxial light path, condenser lens (2), pin hole (3) and collimator and extender lens (4), it is characterized in that: it also comprises rectangular aperture (5), first spectroscope (6-1), second spectroscope (6-2), survey focal lens (7), first collects post lens (8-1), second collects post lens (8-2), the first linear array point probe (9-1) and the second linear array point probe (9-2)
The laser beam that laser instrument (1) produces converges at pin hole (3) by condenser lens (2), after the filtered pointolite of pin hole (3) expands bundle through collimator and extender lens (4), is incident to first spectroscope (6-1) through rectangular aperture (5) again,
Transmitted light beam after first spectroscope (6-1) transmission is incident to surveys focal lens (7), and on the focal plane, picture side of surveying focal lens (7), form the line gathering, be used for the tested sample (10) that is arranged on the focal plane, picture side of surveying focal lens (7) is carried out the line illumination;
Through after surveying focal lens (7) transmission, be incident to second spectroscope (6-2) through first spectroscope (6-1) beam reflected by the light beam after tested sample (10) reflection again,
The transmitted light beam of second spectroscope (6-2) is collected on the photosurface of post lens (8-1) back line focus to the first linear array point probes (9-1) through first, and the first linear array point probe (9-1) is arranged at the first burnt front position of collecting post lens (8-1);
The folded light beam of second spectroscope (6-2) is collected on the photosurface of post lens (8-2) back line focus to the second linear array point probes (9-2) through second, and the second linear array point probe (9-2) is arranged at the second defocused position of collecting post lens (8-2);
The defocusing amount of the first linear array point probe (9-1) and the second linear array point probe (9-2) equates.
2. the line sweep differential confocal measuring device based on post lens light path according to claim 1 is characterized in that: described pin hole (3) is arranged on the rear focus place of condenser lens (2).
3. the line sweep differential confocal measuring device based on post lens light path according to claim 1 and 2 is characterized in that: the rear focus of described condenser lens (2) overlaps with the focus in object space of collimator and extender lens (4).
4. the line sweep differential confocal measuring device based on post lens light path according to claim 1, it is characterized in that: the catercorner length of described rectangular aperture (5) is less than the spot diameter of the light beam after expanding bundle through collimator and extender lens (4), greater than the spot radius of the light beam after expanding bundle through collimator and extender lens (4).
5. the line sweep differential confocal measuring device based on post lens light path according to claim 1 is characterized in that: described detection focal lens (7) is plano-convex post lens.
6. the line sweep differential confocal measuring device based on post lens light path according to claim 1 is characterized in that: it is the identical plano-convex post lens of technical parameter that the first collection post lens (8-1) and second are collected post lens (8-2).
7. the line sweep differential confocal measuring device based on post lens light path according to claim 1 is characterized in that: the described first linear array point probe (9-1) is identical with the technical parameter of the second linear array point probe (9-2).
8. according to claim 1 or 7 described line sweep differential confocal measuring devices based on post lens light path, it is characterized in that: the described first linear array point probe (9-1) and the second linear array point probe (9-2) all constitute for linear array light intensity point end of probe and the corresponding photelectric receiver that is made of one group of single-mode fiber.
CN2011100415364A 2011-02-21 2011-02-21 Line scanning differential confocal measuring device based on light path of pillar lens CN102175143B (en)

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