CN111239153B - Axial differential dark field confocal microscopic measuring device and method thereof - Google Patents
Axial differential dark field confocal microscopic measuring device and method thereof Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2545—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object with one projection direction and several detection directions, e.g. stereo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8822—Dark field detection
Abstract
The invention discloses an axial differential dark field confocal microscopic measuring device and a method thereof, wherein the device comprises an annular light illumination module, an annular light scanning module and a differential confocal detection module; the three-dimensional distribution information of defects such as nano subsurface cracks, bubbles and the like is obtained by effectively separating a sample reflected signal and a scattering signal through illumination beam shaping and complementary aperture shielding detection; by differential confocal detection, the axial sensitivity, linearity and signal-to-noise ratio of the measurement system are improved, and common mode noise caused by environmental state difference, light source light intensity fluctuation, detector electrical drift and the like can be obviously restrained.
Description
Technical Field
The invention relates to the technical field of optical precision measurement, in particular to an axial differential dark field confocal microscopic measurement device and an axial differential dark field confocal microscopic measurement method.
Background
The high-performance optical element and the micro-electromechanical element are core components of modern high-end equipment, and surface morphology measurement and subsurface defect detection are required to be carried out on the high-performance optical element and the micro-electromechanical element in order to ensure the processing quality and the service reliability of the high-end equipment, so that no equipment at home and abroad can realize the functions at the same time.
The existing surface morphology nondestructive measurement technology at home and abroad mainly comprises the following steps: confocal microscopy, white light interferometry, and zoom microscopy. Compared with the other two technologies, the confocal microscopic measurement technology has the characteristics of wide applicability of a measurement sample and capability of measuring a complex sample structure, so that the confocal microscopic measurement technology is widely applied to the field of industrial detection. The subsurface defect nondestructive testing technology mainly comprises the following steps: laser modulation scattering technology, total internal reflection microscopy, optical coherence tomography, high frequency scanning acoustic microscopy, and X-ray microscopy. The method has the defects of low depth positioning precision, low signal-to-noise ratio, low detection efficiency, limited detection sample and the like.
Therefore, how to provide an axial differential dark-field confocal microscopic measuring device with high measuring precision and a method thereof is a problem to be solved by those skilled in the art.
Disclosure of Invention
In view of the above, the invention provides an axial differential dark field confocal microscopic measuring device and a method thereof, which can simultaneously acquire three-dimensional distribution information of defects such as nano-scale surface scratches, abrasion, subsurface cracks, bubbles and the like, have integrated detection functions of surface and subsurface defects, and solve the defects of various measuring technologies in the prior art.
In order to achieve the above purpose, the present invention adopts the following technical scheme:
an axial differential dark field confocal microscopy measurement apparatus comprising: the device comprises an annular light illumination module, an annular light scanning module and a differential confocal detection module;
the annular light illumination module sequentially comprises: the device comprises a laser, a beam expander, a first polaroid, a polarized light splitting film, a quarter wave plate, a conical lens and a plane reflector;
the annular light scanning module sequentially comprises the following components according to the light propagation direction: the device comprises a semi-reflective semi-permeable membrane I, a two-dimensional scanning galvanometer, a scanning lens, a tube mirror and an objective lens;
the differential confocal detection module includes: the second semi-reflecting semi-permeable membrane and the detection light path; the detection light path comprises a transmission light path unit and a reflection light path unit;
the transmission light path unit sequentially comprises: a first diaphragm, a second polarizing plate, a first focusing lens, a first pinhole and a first camera; the reflection light path unit sequentially comprises: a second diaphragm, a third polarizing plate, a second focusing lens, a second pinhole and a second camera;
the first semi-reflective and semi-permeable membrane and the second semi-reflective and semi-permeable membrane are correspondingly arranged;
the light beam reflected from the polarization beam splitting film is reflected and transmitted through the semi-reflection semi-transmission film I; the light beam transmitted through the first semi-reflecting and semi-transmitting membrane is reflected and transmitted through the second semi-reflecting and semi-transmitting membrane again.
Preferably, the combination of the conical lens and the plane reflecting mirror shapes the Gaussian beam into annular light with adjustable inner diameter and outer diameter, the beam expander arranged at the front end of the conical lens light path is used for adjusting the inner diameter of the annular light, and the larger the diameter of an output facula of the beam expander is, the larger the thickness of the annular light is, and the smaller the inner diameter is; the outer diameter of the annular light depends on the distance between the conical lens and the plane reflecting mirror, and the longer the relative distance is, the larger the outer diameter is; the outer diameter of the Gaussian beam after being shaped into annular light is matched with the entrance pupil of the objective lens.
Preferably, the scanning lens working surface is arranged at the front focal surface of the tube mirror.
Preferably, the sample to be measured is disposed in front of the objective lens, and the annular light is focused on the sample to be measured after entering the objective lens.
Preferably, the apertures of the first diaphragm and the second diaphragm are complementarily matched with the inner diameter of the annular light, the first diaphragm and the second diaphragm completely shade the reflected light beam from the sample to be detected, and only the scattered light carrying the information of the sample to be detected is allowed to enter the detection light path.
Preferably, in the transmission light path unit, the transmission light beam is focused far from the focal plane, passes through the pinhole first and is collected by the camera first;
in the reflection light path unit, the reflection light beam is focused to a near-defocus plane and passes through a second pinhole to be collected by a second camera;
the far focus plane is located between the first pinhole and the camera, and the near focus plane is located between the second focusing lens and the second pinhole.
An axial differential dark field confocal microscopic measurement method specifically comprises the following steps:
s1, a parallel laser beam emitted by a laser is amplified by a beam expander in beam diameter, changed into linearly polarized light by a first polarizer, sequentially passes through a polarization beam splitting film, a quarter wave plate and a conical lens, and is reflected by a plane reflector; the reflected light beam is shaped into an annular light beam after passing through the conical lens again, the polarization direction changes by 90 degrees after passing through the quarter wave plate again, and the annular light beam is reflected to a semi-reflection semi-transmission film I by the polarization beam splitting film; the annular light beam is reflected by the semi-reflective semi-permeable membrane I and the two-dimensional scanning galvanometer, is focused to the front focal plane of the tube lens through the scanning lens, and is generated to be incident to the objective lens through the tube lens, so that a focusing light spot is formed on the sample to be tested, and the annular light illumination of the sample to be tested is realized;
s2, controlling deflection of the two-dimensional scanning vibrating mirror to enable a focusing light spot to perform two-dimensional scanning on a sample, and enabling direct reflected light and scattered light in the surface and the subsurface of the sample to be detected to sequentially pass through the objective lens, the tube lens, the scanning lens and the two-dimensional scanning vibrating mirror and then to transmit the semi-reflective semi-transparent film I so as to realize annular light scanning of the sample to be detected;
s3, dividing the light beam entering the semi-reflective semi-transparent film II from the semi-reflective semi-transparent film I into two paths of detection light beams:
in the transmission light path, a light beam passes through a first diaphragm, direct reflected light of the sample to be detected is shielded and filtered, scattered light of the sample to be detected is focused to a position far away from a focal plane through a second polarizing plate and a first focusing lens in sequence, and the scattered light is collected by a first camera through a first pinhole;
in the reflection light path, the light beam passes through a diaphragm II, the direct reflected light of the sample to be detected is shielded and filtered, and the scattered light of the sample to be detected is focused to a near-defocus plane through a polarizer III and a focusing lens II in sequence and is collected by a camera II through a pinhole II; completing differential confocal detection of the sample to be detected;
s4, moving the sample to be measured in the vertical direction, and performing transverse two-dimensional scanning on different axial positions of the sample to be measured to realize the three-dimensional microscopic measurement of the sample to be measured.
Compared with the prior art, the invention discloses an axial differential dark field confocal microscopic measuring device, which has the following beneficial effects:
firstly, the device uses the combination of the conical lens and the plane reflecting mirror to shape the Gaussian beam into the annular beam with adjustable inner diameter and outer diameter, utilizes annular light illumination with proper aperture and complementary aperture shielding detection to effectively separate the reflected signal and the scattered signal of the sample, overcomes the defect of the subsurface of the traditional confocal measurement sample, and realizes the nanoscale high-precision detection of the subsurface defect of the high-performance optical element and the microelectromechanical element;
secondly, the invention scans the detected object by utilizing two paths of detection light paths before and after the focus, and performs differential processing to perform differential detection; the differential confocal optical path layout and detection improves the axial sensitivity, linearity and signal-to-noise ratio of the measuring system, and common mode noise caused by environmental state difference, light source light intensity fluctuation, detector electrical drift and the like can be obviously restrained.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are required to be used in the embodiments or the description of the prior art will be briefly described below, and it is obvious that the drawings in the following description are only embodiments of the present invention, and that other drawings can be obtained according to the provided drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of an axial differential dark field confocal microscopic measuring device according to the present invention;
in the figure: the laser comprises a laser device 1, a beam expander 2, a polarizing plate 3, a polarizing beam splitting film 4, a quarter wave plate 5, a conical lens 6, a plane reflecting mirror 7, a semi-reflecting semi-transparent film 8, a two-dimensional scanning galvanometer 9, a scanning lens 10, a tube lens 11, an objective lens 12, a sample 13, a semi-reflecting semi-transparent film 14, a diaphragm 15, a polarizing plate 16, a focusing lens 17, a pinhole 18, a camera 19, a diaphragm 20, a polarizing plate 21, a focusing lens 22, a pinhole 23 and a camera 24.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The embodiment of the invention discloses an axial differential dark field confocal microscopic measuring device, which comprises: the device comprises an annular light illumination module, an annular light scanning module and a differential confocal detection module;
the annular light illumination module sequentially comprises: the device comprises a laser 1, a beam expander 2, a first polaroid 3, a polarization beam splitting film 4, a quarter wave plate 5, a conical lens 6 and a plane reflector 7;
the annular light scanning module sequentially comprises: a semi-reflective semi-transparent film I8, a two-dimensional scanning galvanometer 9, a scanning lens 10, a tube mirror 11 and an objective lens 12;
the differential confocal detection module includes: a second semi-reflective semi-permeable membrane 14 and a detection light path; the detection light path comprises a transmission light path unit and a reflection light path unit;
the transmission light path unit sequentially comprises: a first diaphragm 15, a second polarizing plate 16, a first focusing lens 17, a first pinhole 18 and a first camera 19; the reflection light path unit sequentially comprises: a second diaphragm 20, a third polarizing plate 21, a second focusing lens 22, a second pinhole 23 and a second camera 24;
the polarization beam splitting film 4 is correspondingly arranged with the semi-reflecting and semi-transmitting film I8, and the semi-reflecting and semi-transmitting film I8 and the semi-reflecting and semi-transmitting film II 14 are correspondingly arranged;
the light beam reflected from the polarization beam splitting film 4 is reflected and transmitted through the semi-reflection and semi-transmission film 8; the light beam transmitted through the first semi-reflective and semi-transmissive film 8 is reflected and transmitted again through the second semi-reflective and semi-transmissive film 14.
In order to further implement the above technical scheme, the combination of the conical lens 6 and the plane reflecting mirror 7 shapes the gaussian beam into the annular light with adjustable inner and outer diameters, the beam expander 2 arranged at the front end of the optical path of the conical lens 6 is used for adjusting the inner diameter of the annular light, and the larger the diameter of the light spot output by the beam expander 2 is, the larger the thickness of the annular light is, and the smaller the inner diameter is; the outer diameter of the annular light depends on the distance between the conical lens 6 and the plane reflecting mirror 7, and the longer the relative distance is, the larger the outer diameter is; the outer diameter of the Gaussian beam after being shaped into annular light is matched with the entrance pupil of the objective lens 12, so that the observation requirement of a sample is met.
To further implement the above technical solution, the working surface of the scanning lens 10 is disposed at the front focal surface of the tube mirror 11.
In order to further implement the above technical solution, the sample 13 to be measured is disposed in front of the objective 12, and the annular light is focused on the sample 13 to be measured after entering the objective 12.
In order to further implement the above technical scheme, the apertures of the first diaphragm 15 and the second diaphragm 20 are complementarily matched with the inner diameter of the annular light, the first diaphragm 15 and the second diaphragm 20 completely shade the reflected light beam from the sample 13 to be detected, only the scattered light carrying the information of the sample 13 to be detected is allowed to enter the detection light path, and the reflected signal and the scattered signal from the sample are effectively separated.
To further implement the above technical solution, in the transmission light path unit, the transmission light beam is focused far from the focal plane, passes through the pinhole one 18 and is collected by the camera one 19;
in the reflected light path unit, the reflected light beam is focused to a near-defocus plane, passes through the pinhole two 23 and is collected by the camera two 24;
the far defocus plane is located between the pinhole one 18 and the camera one 19 and the near defocus plane is located between the focusing lens two 22 and the pinhole two 23.
It should be noted that:
the first camera 19 is placed against the first pinhole 18; the second camera 22 is closely attached to the second pinhole 23; the device has a differential detection optical path layout due to the two optical path units, namely a reflection optical path and a transmission optical path.
An axial differential dark field confocal microscopic measurement method specifically comprises the following steps:
s1, a parallel laser beam emitted by a laser 1 is amplified by a beam diameter of a beam expander 2, changed into linearly polarized light by a first polarizer 3, sequentially passes through a polarization beam splitting film 4, a quarter wave plate 5 and a conical lens 6, and is reflected by a plane reflector 7; the reflected light beam is shaped into an annular light beam after passing through the conical lens 6 again, the polarization direction changes by 90 degrees after passing through the quarter wave plate 5 again, and the annular light beam is reflected to the semi-reflection semi-transmission film I8 by the polarization beam splitting film 4; the annular light beam is reflected by a semi-reflective semi-transparent film I8 and a two-dimensional scanning galvanometer 9, is focused to the front focal plane of a tube mirror 11 through a scanning lens 10, and is generated to be incident to an objective lens 12 through the tube mirror 11, so that a focusing light spot is formed on a sample 13 to be tested, and annular light illumination of the sample 13 to be tested is realized;
s2, controlling deflection of a two-dimensional scanning galvanometer 9 to enable a focusing light spot to perform two-dimensional scanning on a sample 13, and enabling direct reflected light and scattered light in the surface and subsurface of the sample 13 to be detected to pass through an objective lens 12, a tube lens 11, a scanning lens 10 and the two-dimensional scanning galvanometer 9 in sequence to penetrate through a semi-reflective semi-transparent film 8 so as to realize annular light scanning of the sample 13 to be detected;
s3, the light beam entering the semi-reflective semi-transparent film II 14 from the semi-reflective semi-transparent film I8 is divided into two paths of detection light beams:
in the transmission light path, the light beam passes through a first diaphragm 15, direct reflected light of the sample 13 to be detected is shielded and filtered, scattered light of the sample 13 to be detected is focused to a position far away from a focal plane through a second polarizing plate 16 and a first focusing lens 17 in sequence, and is collected by a first camera 19 through a first pinhole 18;
in the reflected light path, the light beam passes through a second diaphragm 20, direct reflected light of the sample 13 to be detected is shielded and filtered, scattered light of the sample 13 to be detected is focused to a near-defocus plane through a third polarizer 21 and a second focusing lens 22 in sequence, and is collected by a second camera 24 through a second pinhole 23; completing differential confocal detection of the sample 13 to be detected;
s4, moving the sample 13 to be detected in the vertical direction, and performing transverse two-dimensional scanning on different axial positions of the sample 13 to be detected, so as to realize the stereo microscopic measurement of the sample 13 to be detected.
In the present specification, each embodiment is described in a progressive manner, and each embodiment is mainly described in a different point from other embodiments, and identical and similar parts between the embodiments are all enough to refer to each other. For the device disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and the relevant points refer to the description of the method section.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (5)
1. An axial differential dark-field confocal microscopy measurement apparatus comprising: the device comprises an annular light illumination module, an annular light scanning module and a differential confocal detection module;
the annular light illumination module sequentially comprises: the device comprises a laser (1), a beam expander (2), a first polaroid (3), a polarization beam splitting film (4), a quarter wave plate (5), a conical lens (6) and a plane reflector (7);
the annular light scanning module sequentially comprises the following components according to the light propagation direction: a semi-reflective semi-permeable membrane I (8), a two-dimensional scanning galvanometer (9), a scanning lens (10), a tube mirror (11) and an objective lens (12);
the differential confocal detection module includes: a semi-reflective semi-permeable membrane II (14) and a detection light path; the detection light path comprises a transmission light path unit and a reflection light path unit;
the transmission light path unit sequentially comprises: a first diaphragm (15), a second polarizing plate (16), a first focusing lens (17), a first pinhole (18) and a first camera (19), wherein the transmitted light beam is focused far away from the focal plane, passes through the first pinhole (18) and is collected by the first camera (19);
the reflection light path unit sequentially comprises: the second diaphragm (20), the third polaroid (21), the second focusing lens (22), the second pinhole (23) and the second camera (24), the reflected light beam is focused to a near-defocus plane, passes through the second pinhole (23) and is collected by the second camera (24);
the polarization light splitting film (4) is arranged corresponding to the first semi-reflecting and semi-transmitting film (8), and the first semi-reflecting and semi-transmitting film (8) and the second semi-reflecting and semi-transmitting film (14) are arranged corresponding to each other;
the light beam reflected from the polarization beam splitting film (4) is reflected and transmitted through the semi-reflective semi-transparent film I (8); the light beam transmitted through the first semi-reflecting and semi-transmitting membrane (8) is reflected and transmitted through the second semi-reflecting and semi-transmitting membrane (14) again;
the Gaussian beam is shaped into annular light with adjustable inner diameter and outer diameter by the combination of the conical lens (6) and the plane reflecting mirror (7), the beam expander (2) arranged at the front end of the optical path of the conical lens (6) is used for adjusting the inner diameter of the annular light, and the larger the diameter of an output light spot of the beam expander (2), the larger the thickness of the annular light and the smaller the inner diameter; the outer diameter of the annular light depends on the distance between the conical lens (6) and the plane reflecting mirror (7), and the longer the relative distance is, the larger the outer diameter is; the outer diameter of the Gaussian beam after being shaped into annular light is matched with the entrance pupil of the objective lens (12);
the far focal plane is located between the first pinhole (18) and the first camera (19), and the near focal plane is located between the second focusing lens (22) and the second pinhole (23).
2. An axial differential dark-field confocal microscopy measurement device according to claim 1, characterized in that the scanning lens (10) working surface is disposed at the front focal plane of the tube mirror (11).
3. An axial differential dark-field confocal microscopy device according to claim 1, characterized in that the sample (13) to be measured is arranged in front of the objective (12), and that the annular light is focused on the sample (13) to be measured after incidence on the objective (12).
4. An axial differential dark field confocal microscopy apparatus according to claim 3, wherein the aperture of said first aperture (15) and said second aperture (20) are complementarily matched to the annular light internal diameter, said first aperture (15) and said second aperture (20) completely blocking the reflected light beam from the sample (13) to be measured, allowing only the scattered light carrying the information of the sample (13) to be measured to enter said detection light path.
5. An axial differential dark field confocal microscopic measuring method based on the axial differential dark field confocal microscopic measuring device of any one of claims 1-4, characterized by comprising the following steps:
s1, a parallel laser beam emitted by a laser (1) is amplified by a beam expander (2) in beam diameter, changed into linearly polarized light by a first polaroid (3), sequentially passes through a polarization beam splitting film (4), a quarter wave plate (5) and a conical lens (6), and is reflected by a plane reflector (7); the reflected light beam is shaped into an annular light beam after passing through the conical lens (6) again, the polarization direction changes by 90 degrees after passing through the quarter wave plate (5) again, and the annular light beam is reflected to a semi-reflective semi-transparent film I (8) by the polarization splitting film (4); the annular light beam is reflected by the semi-reflective semi-transparent film I (8) and the two-dimensional scanning galvanometer (9), is focused to the front focal plane of the tube mirror (11) through the scanning lens (10), and is generated to be incident to the objective lens (12) through the tube mirror (11), so that a focusing light spot is formed on the sample (13) to be detected, and annular light illumination of the sample (13) to be detected is realized;
s2, controlling deflection of the two-dimensional scanning vibrating mirror (9) to enable a focusing light spot to perform two-dimensional scanning on a sample (13) to be detected, and enabling direct reflected light and scattered light in the surface and subsurface of the sample (13) to be detected to sequentially pass through the objective lens (12), the tube mirror (11), the scanning lens (10) and the two-dimensional scanning vibrating mirror (9) and then transmit the semi-reflective semi-transparent film I (8) to realize annular light scanning of the sample (13) to be detected;
s3, dividing the light beam entering the semi-reflecting and semi-permeable membrane II (14) from the semi-reflecting and semi-permeable membrane I (8) into two paths of detection light beams: in the transmission light path, the light beam passes through a first diaphragm (15), direct reflected light of the sample (13) to be detected is shielded and filtered, scattered light of the sample (13) to be detected is focused to a position far away from a focal plane through a second polaroid (16) and a first focusing lens (17) in sequence, and is collected by a first camera (19) through a first pinhole (18);
in the reflection light path, the light beam passes through a second diaphragm (20), direct reflected light of the sample (13) to be detected is shielded and filtered, scattered light of the sample (13) to be detected is focused to a near-defocus plane through a third polarizer (21) and a second focusing lens (22) in sequence, and is collected by a second camera (24) through a second pinhole (23); completing differential confocal detection of the sample (13) to be detected;
s4, moving the sample (13) to be measured in the vertical direction, and performing transverse two-dimensional scanning on different axial positions of the sample (13) to be measured, so as to realize the three-dimensional microscopic measurement of the sample (13) to be measured.
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| CN202010056473.9A CN111239153B (en) | 2020-01-18 | 2020-01-18 | Axial differential dark field confocal microscopic measuring device and method thereof |
| PCT/CN2020/141185 WO2021143527A1 (en) | 2020-01-18 | 2020-12-30 | Axial differential dark field confocal microscopic measurement device and method |
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| CN111239153B (en) * | 2020-01-18 | 2023-09-15 | 哈尔滨工业大学 | Axial differential dark field confocal microscopic measuring device and method thereof |
| CN113984771B (en) * | 2021-09-24 | 2023-07-28 | 哈尔滨工业大学 | Deep learning dark field confocal microscopic measurement device and method based on vector polarized light |
| CN114018873A (en) * | 2021-11-09 | 2022-02-08 | 之江实验室 | Rapid large-field-of-view high-resolution optical endoscopic microscopy system and method |
| CN115128002B (en) * | 2022-06-20 | 2024-04-12 | 中国科学院上海光学精密机械研究所 | System and method for measuring nonlinear optical properties of material |
| CN115598147A (en) * | 2022-09-30 | 2023-01-13 | 南京理工大学（Cn） | Device and method for detecting defects on inner and outer surfaces of microsphere based on white light microscopic interference |
| CN116952544B (en) * | 2023-08-29 | 2024-03-08 | 茂莱（南京）仪器有限公司 | Auxiliary calibration tool for AR optical waveguide performance detection equipment and use method |
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