WO2021143525A1 - Transverse differential dark-field confocal microscopic measurement apparatus and method therefor - Google Patents

Transverse differential dark-field confocal microscopic measurement apparatus and method therefor Download PDF

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WO2021143525A1
WO2021143525A1 PCT/CN2020/141178 CN2020141178W WO2021143525A1 WO 2021143525 A1 WO2021143525 A1 WO 2021143525A1 CN 2020141178 W CN2020141178 W CN 2020141178W WO 2021143525 A1 WO2021143525 A1 WO 2021143525A1
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light
semi
lens
sample
tested
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PCT/CN2020/141178
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Chinese (zh)
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刘俭
刘辰光
刘婧
姜勇
陈刚
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哈尔滨工业大学
南京恒锐精密仪器有限公司
江苏锐精光电研究院有限公司
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2545—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object with one projection direction and several detection directions, e.g. stereo
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N2021/0106—General arrangement of respective parts
    • G01N2021/0112—Apparatus in one mechanical, optical or electronic block
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8822—Dark field detection

Definitions

  • the invention relates to the technical field of optical precision measurement, and more specifically to a lateral differential dark field confocal microscopic measurement device and a method thereof.
  • High-performance optical components and micro-electromechanical components are the core components of modern high-end equipment. In order to ensure their processing quality and service reliability, surface topography measurement and sub-surface defect detection are required. At present, there is no equipment at home and abroad that can achieve the above at the same time. Function.
  • the existing surface topography non-destructive measurement technologies at home and abroad mainly include: confocal microscopy measurement technology, white light interference microscopy measurement technology and zoom microscopy measurement technology.
  • the confocal microscopy measurement technology Compared with the other two technologies, the confocal microscopy measurement technology has the characteristics of wide applicability for measuring samples and the ability to measure complex sample structures, so it is widely used in the field of industrial testing.
  • Non-destructive testing techniques for subsurface defects mainly include: laser modulation and scattering technology, total internal reflection microscopy, optical coherence tomography, high-frequency scanning acoustic microscopy, and X-ray microscopy imaging technology. It generally has shortcomings such as low depth positioning accuracy, low signal-to-noise ratio, low detection efficiency, and limited detection samples.
  • the present invention provides a lateral differential dark-field confocal microscopy measurement device and method, which can simultaneously obtain the three-dimensional distribution information of nano-scale surface scratches, wear, subsurface cracks, bubbles and other defects, and has both surface and The integrated detection function of sub-surface defects solves the defects of various measurement technologies in the prior art.
  • a lateral differential dark field confocal microscopy measurement device comprising: a ring light illumination module, a ring light scanning module, and a differential confocal detection module;
  • the ring light illumination module is: a laser, a beam expander, a polarizer one, a concave conical lens, and a semi-reflective semi-transparent film one;
  • the annular light scanning module is sequentially: a two-dimensional scanning galvanometer, a scanning lens, a tube lens, and an objective lens;
  • the differential confocal detection module includes: a semi-reflective semi-transparent film and a detection light path; the detection light path includes a transmission light path unit and a reflection light path unit;
  • the transmitted light path unit includes: a diaphragm one, a polarizer two, a focusing lens one, a pinhole one, and a camera one in sequence;
  • the reflective light path unit includes: diaphragm 2, polarizer 3, focusing lens 2, pinhole 2 and camera 2 in sequence;
  • the semi-reflective semi-permeable membrane one and the two-dimensional scanning galvanometer are arranged correspondingly, and the semi-reflective semi-permeable membrane one and the semi-reflective semi-permeable membrane two are arranged correspondingly;
  • the light beam transmitted through the semi-reflective semi-transparent film reaches the two-dimensional scanning galvanometer, and the light beam reflected by the semi-reflective semi-transparent film reaches the semi-reflective semi-transparent film II.
  • the bottom angle ⁇ of the front and rear surfaces of the concave conical lens is the same, and the outer diameter of the Gaussian beam after being shaped into a ring light matches the entrance pupil of the objective lens.
  • the working surface of the scanning lens should be placed at the front focal surface of the tube lens.
  • the sample to be tested is arranged in front of the objective lens, and the ring light is incident on the objective lens to focus on the sample to be tested.
  • the apertures of the first and second diaphragms are complementary to the annular aperture produced by the concave cone lens, and the first and second diaphragms completely block the reflected light beam from the sample to be tested, and only the sample to be tested is allowed to be carried.
  • the scattered light of the information enters the subsequent detection light path.
  • the transmitted light beam is focused at the focal plane and is on the left side of the center position of the focal plane, and the light beam after being blocked and filtered by the pinhole is collected by the camera;
  • the reflected light beam is focused on the focal plane and is located on the right side of the center position of the focal plane.
  • the light beam blocked and filtered by the second pinhole is collected by the second camera.
  • the parallel laser beam emitted by the laser is enlarged by the beam diameter of the beam expander, and then becomes linearly polarized light after passing through the polarizer.
  • the Gaussian beam After passing through the concave cone lens, the Gaussian beam is shaped into a ring beam; the linearly polarized ring beam is transmitted halfway through Transparent film 1, after being reflected by a two-dimensional scanning galvanometer, it is focused to the front focal plane of the tube lens through the scanning lens, and a circular parallel beam is generated by the tube lens to enter the objective lens, and a focused spot is formed on the sample to be tested to realize the alignment Ring light illumination of the sample to be tested;
  • the light beam incident from the incident semi-reflective film 1 to the semi-reflective film 2 is divided into two detection beams:
  • the light beam passes through the diaphragm 1, the direct reflected light of the sample to be tested is blocked and filtered out, and the scattered light of the sample to be tested passes through the second polarizer and the focusing lens 1 to be focused on the focal plane and in focus.
  • the filtered beam is blocked by the pinhole and collected by the camera;
  • the light beam passes through the second stop, the direct reflected light of the sample to be tested is blocked and filtered out, and the scattered light of the sample to be tested is focused on the focal plane through the third polarizer and the second focusing lens in turn, and is in On the right side of the center position of the focal plane, the filtered light beam is blocked by the second pinhole and collected by the second camera; the differential confocal detection of the sample to be tested is completed;
  • the present disclosure provides a lateral differential dark field confocal microscopy measurement device provided by the present disclosure, which has the following beneficial effects:
  • the present invention uses a concave cone lens to shape the Gaussian beam into a ring beam, and utilizes ring light illumination with a suitable aperture and complementary aperture blocking detection to effectively separate the reflected signal from the sample and the scattered signal, which overcomes the subsurface defects of the traditional confocal measurement sample. Insufficient, to achieve nano-level high-precision detection of sub-surface defects of high-performance optical components and micro-electromechanical components;
  • the present invention uses two detection light paths focused on the left and right sides of the center of the focal plane to scan the object to be measured, and perform differential processing to perform differential detection.
  • the optical path layout and detection of the differential confocal improves the lateral sensitivity, linearity and signal-to-noise ratio of the measurement system, and can significantly suppress common mode noise caused by differences in environmental conditions, fluctuations in light intensity of the light source, and electrical drift of the detector.
  • FIG. 1 is a schematic structural diagram of a lateral differential dark field confocal microscopy measurement device provided by the present invention.
  • the embodiment of the invention discloses a lateral differential dark field confocal microscopy measurement device, which includes: a ring light illumination module, a ring light scanning module and a differential confocal detection module;
  • the ring light illumination module is: laser 1, beam expander 2, polarizer one 3, concave conical lens 4 and semi-reflective semi-transparent film 5;
  • the ring light scanning module is in order according to the light propagation direction: two-dimensional scanning galvanometer 6, scanning lens 7, tube lens 8 and objective lens 9;
  • the differential confocal detection module includes: a semi-reflective semi-transparent film II 11 and a detection light path; the detection light path includes a transmission light path unit and a reflection light path unit;
  • the transmitted light path unit includes in turn according to the light propagation direction: a stop 12, a polarizer 2 13, a focusing lens 14, a pinhole 15 and a camera 16;
  • the reflective light path unit includes: diaphragm two 17, polarizer three 18, focusing lens two 19, pinhole two 20 and camera two 21;
  • the semi-reflective semi-permeable membrane one 5 and the two-dimensional scanning galvanometer 6 are correspondingly arranged, and the semi-reflective semi-permeable membrane one 5 and the semi-reflective semi-permeable membrane two 11 are arranged correspondingly;
  • the light beam transmitted through the semi-reflective film 5 reaches the two-dimensional scanning galvanometer 6, and the light beam reflected by the semi-reflective film 5 reaches the semi-reflective film II 11.
  • the bottom angle ⁇ of the front and rear surfaces of the concave conical lens 4 is the same, and the outer diameter of the Gaussian beam shaped into a ring light matches the entrance pupil of the objective lens 9.
  • the working surface of the scanning lens 7 should be placed at the front focal surface of the tube lens 8.
  • the sample 10 to be tested is arranged in front of the objective lens 9, and the ring light is incident on the objective lens 9 and then focused on the sample 10 to be tested.
  • the apertures of diaphragm one 12 and diaphragm two 17 are complementary matched with the annular aperture produced by the concave cone lens 4, diaphragm one 12 and diaphragm two 17 completely shield the reflected light beam from the sample 10 to be tested, Only the scattered light carrying the information of the sample 10 to be tested is allowed to enter the subsequent detection light path, effectively separating the reflected signal and the scattered signal from the sample to be tested.
  • the transmitted light beam is focused at the focal plane and on the left side of the center position of the focal plane, and the light beams blocked and filtered by the pinhole 15 are collected by the camera 16;
  • the reflected light beam is focused at the focal plane and on the right side of the center position of the focal plane.
  • the light beam blocked and filtered by the second pinhole 20 is collected by the second camera 21.
  • the device Due to the two light path units of the reflected light path and the transmitted light path, the device has an optical path layout for lateral differential detection.
  • the parallel laser beam emitted by laser 1 is enlarged by beam expander 2 and the beam diameter is transformed into linearly polarized light through polarizer-3.
  • the Gaussian beam After passing through concave cone lens 4, the Gaussian beam is shaped into a ring beam; linearly polarized ring beam
  • the transflective semi-transparent film 5 is reflected by the two-dimensional scanning galvanometer 6 and is focused by the scanning lens 7 to the front focal plane of the tube lens 8.
  • the tube lens 8 generates a circular parallel beam and enters the objective lens 9, on the sample 10 to be tested A focused spot is formed to realize the ring light illumination of the sample 10 to be tested;
  • the light beam incident from the incident semi-reflective film 1-5 to the semi-reflective film II 11 is divided into two detection beams:
  • the light beam passes through the aperture 12, the direct reflected light of the test sample 10 is blocked and filtered out, and the scattered light of the test sample 10 passes through the second polarizer 13 and the focusing lens 14 in turn to be focused on the focal plane , And on the left side of the center of the focal plane, the filtered light beam is blocked by the pinhole 15 and collected by the camera 16;
  • the light beam passes through the diaphragm two 17, the direct reflected light of the test sample 10 is blocked and filtered out, and the scattered light of the test sample 10 passes through the polarizer three 18 and the focusing lens two 19 to be focused on the focal point.
  • the filtered light beam is blocked by the second pinhole 20 and collected by the second camera 21; the differential confocal detection of the sample 10 to be tested is completed;

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Abstract

Disclosed are a transverse differential dark-field confocal microscopic measurement apparatus and a method therefor. The apparatus comprises: an annular light illumination module, an annular light scanning module and a differential confocal detection module. Illumination beam shaping and complementary aperture shielding detection are performed such that a sample reflection signal and a scattering signal are effectively separated, and three-dimensional distribution information of defects such as nano-scale subsurface cracks, bubbles, etc., is obtained; and differential confocal detection is performed such that the transverse sensitivity, linearity and signal-to-noise ratio of a measurement system are improved, and common-mode noise caused by environmental state difference, light intensity fluctuation of a light source, detector electrical drift, etc. can be significantly suppressed.

Description

一种横向差动暗场共焦显微测量装置及其方法Lateral differential dark field confocal microscopic measuring device and method 技术领域Technical field
本发明涉及光学精密测量技术领域，更具体的说是涉及一种横向差动暗场共焦显微测量装置及其方法。The invention relates to the technical field of optical precision measurement, and more specifically to a lateral differential dark field confocal microscopic measurement device and a method thereof.
背景技术Background technique
高性能光学元件及微机电元件是现代高端装备的核心组成部分，为保障其加工质量和服役可靠性需要对其进行表面形貌测量和亚表面缺陷检测，目前国内外尚无设备能够同时实现上述功能。High-performance optical components and micro-electromechanical components are the core components of modern high-end equipment. In order to ensure their processing quality and service reliability, surface topography measurement and sub-surface defect detection are required. At present, there is no equipment at home and abroad that can achieve the above at the same time. Function.
国内外现有表面形貌无损测量技术主要包括：共焦显微测量技术、白光干涉显微测量技术和变焦显微测量技术。其中共焦显微测量技术相比于另外两种技术具有测量样品适用性宽、可以测量复杂样品结构的特点，因而在工业检测领域广泛应用。亚表面缺陷无损检测技术主要包括：激光调制散射技术，全内反射显微技术，光学相干层析技术，高频扫描声学显微技术，X射线显微成像技术。其普遍存在深度定位精度不高、信噪比低、检测效率不高，检测样品受限等不足。The existing surface topography non-destructive measurement technologies at home and abroad mainly include: confocal microscopy measurement technology, white light interference microscopy measurement technology and zoom microscopy measurement technology. Compared with the other two technologies, the confocal microscopy measurement technology has the characteristics of wide applicability for measuring samples and the ability to measure complex sample structures, so it is widely used in the field of industrial testing. Non-destructive testing techniques for subsurface defects mainly include: laser modulation and scattering technology, total internal reflection microscopy, optical coherence tomography, high-frequency scanning acoustic microscopy, and X-ray microscopy imaging technology. It generally has shortcomings such as low depth positioning accuracy, low signal-to-noise ratio, low detection efficiency, and limited detection samples.
因此，如何提供一种测量精度高的横向差动暗场共焦显微测量装置及其方法是本领域技术人员亟需解决的问题。Therefore, how to provide a lateral differential dark field confocal microscopy measurement device and method with high measurement accuracy is an urgent problem to be solved by those skilled in the art.
发明内容Summary of the invention
有鉴于此，本发明提供了一种横向差动暗场共焦显微测量装置及其方法，可同时获取纳米级表面划痕、磨损及亚表面裂痕、气泡等缺陷的三维分布信息，兼具表面及亚表面缺陷一体化检测功能，解决了现有技术中的各测量技术所存在的缺陷。In view of this, the present invention provides a lateral differential dark-field confocal microscopy measurement device and method, which can simultaneously obtain the three-dimensional distribution information of nano-scale surface scratches, wear, subsurface cracks, bubbles and other defects, and has both surface and The integrated detection function of sub-surface defects solves the defects of various measurement technologies in the prior art.
为了实现上述目的，本发明采用如下技术方案：In order to achieve the above objectives, the present invention adopts the following technical solutions:
一种横向差动暗场共焦显微测量装置，包括：环形光照明模块、环形光扫描模块和差动共焦探测模块；A lateral differential dark field confocal microscopy measurement device, comprising: a ring light illumination module, a ring light scanning module, and a differential confocal detection module;
所述环形光照明模块按照光线传播方向依次为：激光器、扩束镜、偏振片一、凹面锥透镜和半反半透膜一；According to the light propagation direction, the ring light illumination module is: a laser, a beam expander, a polarizer one, a concave conical lens, and a semi-reflective semi-transparent film one;
所述环形光扫描模块按照光线传播方向依次为：二维扫描振镜、扫描透镜、管镜和物镜；According to the light propagation direction, the annular light scanning module is sequentially: a two-dimensional scanning galvanometer, a scanning lens, a tube lens, and an objective lens;
所述差动共焦探测模块包括：半反半透膜二和探测光路；所述探测光路包括透射光路单元和反射光路单元；The differential confocal detection module includes: a semi-reflective semi-transparent film and a detection light path; the detection light path includes a transmission light path unit and a reflection light path unit;
所述透射光路单元按照光线传播方向依次包括：光阑一、偏振片二、聚焦透镜一、针孔一和相机一；According to the light propagation direction, the transmitted light path unit includes: a diaphragm one, a polarizer two, a focusing lens one, a pinhole one, and a camera one in sequence;
所述反射光路单元按照光线传播方向依次包括：光阑二、偏振片三、聚焦透镜二、针孔二和相机二；According to the light propagation direction, the reflective light path unit includes: diaphragm 2, polarizer 3, focusing lens 2, pinhole 2 and camera 2 in sequence;
其中所述半反半透膜一和所述二维扫描振镜对应设置，所述半反半透膜一和所述半反半透膜二对应设置；Wherein the semi-reflective semi-permeable membrane one and the two-dimensional scanning galvanometer are arranged correspondingly, and the semi-reflective semi-permeable membrane one and the semi-reflective semi-permeable membrane two are arranged correspondingly;
经过所述半反半透膜一透射的光束到达所述二维扫描振镜，经过所述半反半透膜一反射的光束到达所述半反半透膜二。The light beam transmitted through the semi-reflective semi-transparent film reaches the two-dimensional scanning galvanometer, and the light beam reflected by the semi-reflective semi-transparent film reaches the semi-reflective semi-transparent film II.
优选的，所述凹面锥透镜的前后表面底角α相同，高斯光束整形为环形光后的外径与所述物镜的入瞳相匹配。Preferably, the bottom angle α of the front and rear surfaces of the concave conical lens is the same, and the outer diameter of the Gaussian beam after being shaped into a ring light matches the entrance pupil of the objective lens.
优选的，所述扫描透镜工作面应置于管镜的前焦面处。Preferably, the working surface of the scanning lens should be placed at the front focal surface of the tube lens.
优选的，待测样品设置于所述物镜的前方，环形光入射至所述物镜后在所述待测样品上聚焦。Preferably, the sample to be tested is arranged in front of the objective lens, and the ring light is incident on the objective lens to focus on the sample to be tested.
优选的，光阑一和光阑二的孔径与凹面锥透镜所产生的环形光孔径互补匹配，光阑一和光阑二完全遮挡来自所述待测样品的反射光束，仅允许携带所述待测样品信息的散射光进入后续探测光路。Preferably, the apertures of the first and second diaphragms are complementary to the annular aperture produced by the concave cone lens, and the first and second diaphragms completely block the reflected light beam from the sample to be tested, and only the sample to be tested is allowed to be carried. The scattered light of the information enters the subsequent detection light path.
优选的，在透射光路单元中，透射光束被聚焦于焦平面处，且处于焦平面中心位置的左侧，被针孔一遮挡滤除后的光束被相机一收集；Preferably, in the transmitted light path unit, the transmitted light beam is focused at the focal plane and is on the left side of the center position of the focal plane, and the light beam after being blocked and filtered by the pinhole is collected by the camera;
在反射光路单元中，反射光束被聚焦于焦平面处，且处于焦平面中心位置的右侧，被针孔二遮挡滤除后的光束被相机二收集。In the reflected light path unit, the reflected light beam is focused on the focal plane and is located on the right side of the center position of the focal plane. The light beam blocked and filtered by the second pinhole is collected by the second camera.
一种横向差动暗场共焦显微测量方法，具体包括以下步骤：A lateral differential dark field confocal microscopy measurement method specifically includes the following steps:
S1.激光器所发平行激光光束，通过扩束镜光束直径放大后，经过偏振片一变为线偏振光，经过凹面锥透镜后，高斯光束被整形为环形光束；线偏振环形光束透射半反半透膜一，经过二维扫描振镜反射，通过扫描透镜聚焦至管镜前焦面处，通过所述管镜产生环形平行光束入射物镜，在所述待测样品上形成聚焦光斑，实现对所述待测样品的环形光照明；S1. The parallel laser beam emitted by the laser is enlarged by the beam diameter of the beam expander, and then becomes linearly polarized light after passing through the polarizer. After passing through the concave cone lens, the Gaussian beam is shaped into a ring beam; the linearly polarized ring beam is transmitted halfway through Transparent film 1, after being reflected by a two-dimensional scanning galvanometer, it is focused to the front focal plane of the tube lens through the scanning lens, and a circular parallel beam is generated by the tube lens to enter the objective lens, and a focused spot is formed on the sample to be tested to realize the alignment Ring light illumination of the sample to be tested;
S2.控制所述二维扫描振镜偏转使聚焦光斑在所述待测样品上进行二维扫描，所述待测样品的散射光和反射光依次经过所述物镜、所述管镜、所述扫描透镜和所述二维扫描振镜，被所述半反半透膜一反射，实现对所述待测样品的环形光扫描；S2. Control the deflection of the two-dimensional scanning galvanometer so that the focused spot performs two-dimensional scanning on the sample to be tested, and the scattered light and reflected light of the sample to be tested pass through the objective lens, the tube lens, and the The scanning lens and the two-dimensional scanning galvanometer are reflected by the semi-reflective and semi-transparent film to realize circular light scanning of the sample to be tested;
S3.从所述入射半反半透膜一入射到半反半透膜二的光束被分为两路探测光束：S3. The light beam incident from the incident semi-reflective film 1 to the semi-reflective film 2 is divided into two detection beams:
透射光路中，光束经过光阑一，所述待测样品直接反射光被遮挡滤除，所述待测样品的散射光依次通过偏振片二和聚焦透镜一被聚焦于焦平面处，且处于焦平面中心位置的左侧，被针孔一遮挡过滤后的光束被相机一收集；In the transmitted light path, the light beam passes through the diaphragm 1, the direct reflected light of the sample to be tested is blocked and filtered out, and the scattered light of the sample to be tested passes through the second polarizer and the focusing lens 1 to be focused on the focal plane and in focus. On the left side of the center of the plane, the filtered beam is blocked by the pinhole and collected by the camera;
反射光路中，光束经过光阑二，所述待测样品的直接反射光被遮挡滤除，所述待测样品的散射光依次通过偏振片三和聚焦透镜二被聚焦于焦平面处，且处于焦平面中心位置的右侧，被针孔二遮挡过滤后的光束被相机二收集；完成对所述待测样品的差动共焦探测；In the reflected light path, the light beam passes through the second stop, the direct reflected light of the sample to be tested is blocked and filtered out, and the scattered light of the sample to be tested is focused on the focal plane through the third polarizer and the second focusing lens in turn, and is in On the right side of the center position of the focal plane, the filtered light beam is blocked by the second pinhole and collected by the second camera; the differential confocal detection of the sample to be tested is completed;
S4.竖直方向移动所述待测样品，进行对所述待测样品不同轴向位置的横向二维扫描，实现对所述待测样品的立体显微测量。S4. Move the sample to be tested in the vertical direction, and perform a horizontal two-dimensional scan of different axial positions of the sample to be tested, so as to realize the three-dimensional microscopic measurement of the sample to be tested.
经由上述的技术方案可知，与现有技术相比，本发明公开提供了本发明公开提供了一种横向差动暗场共焦显微测量装置，具有以下有益效果：It can be seen from the above technical solutions that, compared with the prior art, the present disclosure provides a lateral differential dark field confocal microscopy measurement device provided by the present disclosure, which has the following beneficial effects:
第一、本发明使用凹面锥透镜将高斯光束整形为环形光束，利用合适孔径的环形光照明与互补孔径遮挡探测，有效分离样品反射信号与散射信号，克服了传统共焦测量样品亚表面缺陷的不足，实现高性能光学元件及微机电元件的亚表面缺陷的纳米级高精度检测；First, the present invention uses a concave cone lens to shape the Gaussian beam into a ring beam, and utilizes ring light illumination with a suitable aperture and complementary aperture blocking detection to effectively separate the reflected signal from the sample and the scattered signal, which overcomes the subsurface defects of the traditional confocal measurement sample. Insufficient, to achieve nano-level high-precision detection of sub-surface defects of high-performance optical components and micro-electromechanical components;
第二、本发明利用聚焦于焦平面中心位置左右两侧的两路探测光路对被测物体进行扫描，进行差动处理来进行差动探测。差动共焦的光路布局和探 测提高了测量系统横向的灵敏度、线性和信噪比，可显著抑制环境状态差异、光源光强波动、探测器电气漂移等引起的共模噪声。Second, the present invention uses two detection light paths focused on the left and right sides of the center of the focal plane to scan the object to be measured, and perform differential processing to perform differential detection. The optical path layout and detection of the differential confocal improves the lateral sensitivity, linearity and signal-to-noise ratio of the measurement system, and can significantly suppress common mode noise caused by differences in environmental conditions, fluctuations in light intensity of the light source, and electrical drift of the detector.
附图说明Description of the drawings
为了更清楚地说明本发明实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据提供的附图获得其他的附图。In order to explain the embodiments of the present invention or the technical solutions in the prior art more clearly, the following will briefly introduce the drawings that need to be used in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only It is an embodiment of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on the provided drawings without creative work.
图1为本发明提供的一种横向差动暗场共焦显微测量装置的结构示意图。FIG. 1 is a schematic structural diagram of a lateral differential dark field confocal microscopy measurement device provided by the present invention.
图中：1激光器、2扩束镜、3偏振片一、4凹面锥透镜、5半反半透膜一、6二维扫描振镜、7扫描透镜、8管镜、9物镜、10样品、11半反半透膜二、12光阑一、13偏振片二、14聚焦透镜一、15针孔一、16相机一、17光阑二、18偏振片三、19聚焦透镜二、20针孔二、21相机二。In the picture: 1 laser, 2 beam expander, 3 polarizer, 4 concave cone lens, 5 semi-reflective film, 6 two-dimensional scanning galvanometer, 7 scanning lens, 8 tube lens, 9 objective lens, 10 samples, 11 Semi-reflective film two, 12 aperture one, 13 polarizer two, 14 focusing lens one, 15 pinhole one, 16 camera one, 17 aperture two, 18 polarizer three, 19 focusing lens two, 20 pinhole Two, 21 cameras two.
具体实施方式Detailed ways
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.
本发明实施例公开了一种横向差动暗场共焦显微测量装置，包括：环形光照明模块、环形光扫描模块和差动共焦探测模块；The embodiment of the invention discloses a lateral differential dark field confocal microscopy measurement device, which includes: a ring light illumination module, a ring light scanning module and a differential confocal detection module;
环形光照明模块按照光线传播方向依次为：激光器1、扩束镜2、偏振片一3、凹面锥透镜4和半反半透膜一5；According to the direction of light propagation, the ring light illumination module is: laser 1, beam expander 2, polarizer one 3, concave conical lens 4 and semi-reflective semi-transparent film 5;
环形光扫描模块按照光线传播方向依次为：二维扫描振镜6、扫描透镜7、管镜8和物镜9；The ring light scanning module is in order according to the light propagation direction: two-dimensional scanning galvanometer 6, scanning lens 7, tube lens 8 and objective lens 9;
差动共焦探测模块包括：半反半透膜二11和探测光路；探测光路包括透射光路单元和反射光路单元；The differential confocal detection module includes: a semi-reflective semi-transparent film II 11 and a detection light path; the detection light path includes a transmission light path unit and a reflection light path unit;
透射光路单元按照光线传播方向依次包括：光阑一12、偏振片二13、聚焦透镜一14、针孔一15和相机一16；The transmitted light path unit includes in turn according to the light propagation direction: a stop 12, a polarizer 2 13, a focusing lens 14, a pinhole 15 and a camera 16;
反射光路单元按照光线传播方向依次包括：光阑二17、偏振片三18、聚焦透镜二19、针孔二20和相机二21；According to the light propagation direction, the reflective light path unit includes: diaphragm two 17, polarizer three 18, focusing lens two 19, pinhole two 20 and camera two 21;
其中半反半透膜一5和二维扫描振镜6对应设置，半反半透膜一5和半反半透膜二11对应设置；Among them, the semi-reflective semi-permeable membrane one 5 and the two-dimensional scanning galvanometer 6 are correspondingly arranged, and the semi-reflective semi-permeable membrane one 5 and the semi-reflective semi-permeable membrane two 11 are arranged correspondingly;
经过半反半透膜一5透射的光束到达二维扫描振镜6，经过半反半透膜一5反射的光束到达半反半透膜二11。The light beam transmitted through the semi-reflective film 5 reaches the two-dimensional scanning galvanometer 6, and the light beam reflected by the semi-reflective film 5 reaches the semi-reflective film II 11.
为了进一步实施上述技术方案，凹面锥透镜4的前后表面底角α相同，高斯光束整形为环形光后的外径与物镜9的入瞳相匹配。In order to further implement the above technical solution, the bottom angle α of the front and rear surfaces of the concave conical lens 4 is the same, and the outer diameter of the Gaussian beam shaped into a ring light matches the entrance pupil of the objective lens 9.
为了进一步实施上述技术方案，扫描透镜7工作面应置于管镜8的前焦面处。In order to further implement the above technical solution, the working surface of the scanning lens 7 should be placed at the front focal surface of the tube lens 8.
为了进一步实施上述技术方案，待测样品10设置于物镜9的前方，环形光入射至物镜9后在待测样品10上聚焦。In order to further implement the above technical solution, the sample 10 to be tested is arranged in front of the objective lens 9, and the ring light is incident on the objective lens 9 and then focused on the sample 10 to be tested.
为了进一步实施上述技术方案，光阑一12和光阑二17的孔径与凹面锥透镜4所产生的环形光孔径互补匹配，光阑一12和光阑二17完全遮挡来自待测样品10的反射光束，仅允许携带待测样品10信息的散射光进入后续探测光路，有效分离来自待测样品的反射信号与散射信号。In order to further implement the above technical solution, the apertures of diaphragm one 12 and diaphragm two 17 are complementary matched with the annular aperture produced by the concave cone lens 4, diaphragm one 12 and diaphragm two 17 completely shield the reflected light beam from the sample 10 to be tested, Only the scattered light carrying the information of the sample 10 to be tested is allowed to enter the subsequent detection light path, effectively separating the reflected signal and the scattered signal from the sample to be tested.
为了进一步实施上述技术方案，在透射光路单元中，透射光束被聚焦于焦平面处，且处于焦平面中心位置的左侧，被针孔一15遮挡滤除后的光束被相机一16收集；In order to further implement the above technical solution, in the transmission light path unit, the transmitted light beam is focused at the focal plane and on the left side of the center position of the focal plane, and the light beams blocked and filtered by the pinhole 15 are collected by the camera 16;
在反射光路单元中，反射光束被聚焦于焦平面处，且处于焦平面中心位置的右侧，被针孔二20遮挡滤除后的光束被相机二21收集。In the reflected light path unit, the reflected light beam is focused at the focal plane and on the right side of the center position of the focal plane. The light beam blocked and filtered by the second pinhole 20 is collected by the second camera 21.
需要说明的是：It should be noted:
由于具有反射光路和透射光路两个光路单元，装置具有横向差动探测的光路布局。Due to the two light path units of the reflected light path and the transmitted light path, the device has an optical path layout for lateral differential detection.
一种横向差动暗场共焦显微测量方法，具体包括以下步骤：A lateral differential dark field confocal microscopy measurement method specifically includes the following steps:
S1.激光器1所发平行激光光束，通过扩束镜2光束直径放大后，经过偏振片一3变为线偏振光，经过凹面锥透镜4后，高斯光束被整形为环形光束；线偏振环形光束透射半反半透膜一5，经过二维扫描振镜6反射，通过扫描透 镜7聚焦至管镜8前焦面处，通过管镜8产生环形平行光束入射物镜9，在待测样品10上形成聚焦光斑，实现对待测样品10的环形光照明；S1. The parallel laser beam emitted by laser 1 is enlarged by beam expander 2 and the beam diameter is transformed into linearly polarized light through polarizer-3. After passing through concave cone lens 4, the Gaussian beam is shaped into a ring beam; linearly polarized ring beam The transflective semi-transparent film 5 is reflected by the two-dimensional scanning galvanometer 6 and is focused by the scanning lens 7 to the front focal plane of the tube lens 8. The tube lens 8 generates a circular parallel beam and enters the objective lens 9, on the sample 10 to be tested A focused spot is formed to realize the ring light illumination of the sample 10 to be tested;
S2.控制二维扫描振镜6偏转使聚焦光斑在待测样品10上进行二维扫描，待测样品10的散射光和反射光依次经过物镜9、管镜8、扫描透镜7和二维扫描振镜6，被半反半透膜一5反射，实现对待测样品10的环形光扫描；S2. Control the deflection of the two-dimensional scanning galvanometer 6 so that the focused spot is scanned on the sample 10 for two-dimensional scanning. The scattered light and reflected light of the sample 10 to be tested sequentially pass through the objective lens 9, the tube lens 8, the scanning lens 7 and the two-dimensional scanning The galvanometer 6 is reflected by the semi-reflective and semi-transparent film 5 to realize the circular light scanning of the sample 10 to be tested;
S3.从所述入射半反半透膜一5入射到半反半透膜二11的光束被分为两路探测光束：S3. The light beam incident from the incident semi-reflective film 1-5 to the semi-reflective film II 11 is divided into two detection beams:
透射光路中，光束经过光阑一12，所述待测样品10直接反射光被遮挡滤除，所述待测样品10的散射光依次通过偏振片二13和聚焦透镜一14被聚焦于焦平面处，且处于焦平面中心位置的左侧，被针孔一15遮挡过滤后的光束被相机一16收集；In the transmitted light path, the light beam passes through the aperture 12, the direct reflected light of the test sample 10 is blocked and filtered out, and the scattered light of the test sample 10 passes through the second polarizer 13 and the focusing lens 14 in turn to be focused on the focal plane , And on the left side of the center of the focal plane, the filtered light beam is blocked by the pinhole 15 and collected by the camera 16;
反射光路中，光束经过光阑二17，所述待测样品10的直接反射光被遮挡滤除，所述待测样品10的散射光依次通过偏振片三18和聚焦透镜二19被聚焦于焦平面处，且处于焦平面中心位置的右侧，被针孔二20遮挡过滤后的光束被相机二21收集；完成对所述待测样品10的差动共焦探测；In the reflected light path, the light beam passes through the diaphragm two 17, the direct reflected light of the test sample 10 is blocked and filtered out, and the scattered light of the test sample 10 passes through the polarizer three 18 and the focusing lens two 19 to be focused on the focal point. At the plane and on the right side of the center position of the focal plane, the filtered light beam is blocked by the second pinhole 20 and collected by the second camera 21; the differential confocal detection of the sample 10 to be tested is completed;
S4.竖直方向移动待测样品10，进行对待测样品10不同轴向位置的横向二维扫描，实现对待测样品10的立体显微测量。S4. Move the sample 10 to be tested in the vertical direction, and perform a horizontal two-dimensional scan of the sample 10 to be tested at different axial positions, so as to realize the three-dimensional microscopic measurement of the sample 10 to be tested.
本说明书中各个实施例采用递进的方式描述，每个实施例重点说明的都是与其他实施例的不同之处，各个实施例之间相同相似部分互相参见即可。对于实施例公开的装置而言，由于其与实施例公开的方法相对应，所以描述的比较简单，相关之处参见方法部分说明即可。The various embodiments in this specification are described in a progressive manner. Each embodiment focuses on the differences from other embodiments, and the same or similar parts between the various embodiments can be referred to each other. For the device disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and the relevant parts can be referred to the description of the method part.
对所公开的实施例的上述说明，使本领域专业技术人员能够实现或使用本发明。对这些实施例的多种修改对本领域的专业技术人员来说将是显而易见的，本文中所定义的一般原理可以在不脱离本发明的精神或范围的情况下，在其它实施例中实现。因此，本发明将不会被限制于本文所示的这些实施例，而是要符合与本文所公开的原理和新颖特点相一致的最宽的范围。The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be obvious to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown in this document, but should conform to the widest scope consistent with the principles and novel features disclosed in this document.

Claims (7)

  1. 一种横向差动暗场共焦显微测量装置，其特征在于，包括：环形光照明模块、环形光扫描模块和差动共焦探测模块；A lateral differential dark field confocal microscopy measurement device, which is characterized by comprising: a ring light illumination module, a ring light scanning module and a differential confocal detection module;
    所述环形光照明模块按照光线传播方向依次为：激光器(1)、扩束镜(2)、偏振片一(3)、凹面锥透镜(4)和半反半透膜一(5)；According to the light propagation direction, the ring light illumination module is: laser (1), beam expander (2), polarizer one (3), concave conical lens (4) and semi-reflective semi-transparent film one (5);
    所述环形光扫描模块按照光线传播方向依次为：二维扫描振镜(6)、扫描透镜(7)、管镜(8)和物镜(9)；According to the light propagation direction, the annular light scanning module is sequentially: a two-dimensional scanning galvanometer (6), a scanning lens (7), a tube lens (8) and an objective lens (9);
    所述差动共焦探测模块包括：半反半透膜二(11)和探测光路；所述探测光路包括透射光路单元和反射光路单元；The differential confocal detection module includes: a semi-reflective semi-transparent film (11) and a detection light path; the detection light path includes a transmission light path unit and a reflection light path unit;
    所述透射光路单元按照光线传播方向依次包括：光阑一(12)、偏振片二(13)、聚焦透镜一(14)、针孔一(15)和相机一(16)；According to the light propagation direction, the transmitted light path unit includes: stop one (12), polarizer two (13), focusing lens one (14), pinhole one (15) and camera one (16) in sequence;
    所述反射光路单元按照光线传播方向依次包括：光阑二(17)、偏振片三(18)、聚焦透镜二(19)、针孔二(20)和相机二(21)；According to the light propagation direction, the reflected light path unit includes: stop two (17), polarizer three (18), focus lens two (19), pinhole two (20) and camera two (21) in sequence;
    其中所述半反半透膜一(5)和所述二维扫描振镜(6)对应设置，所述半反半透膜一(5)和所述半反半透膜二(11)对应设置；Wherein the semi-reflective semi-permeable membrane one (5) and the two-dimensional scanning galvanometer (6) are arranged correspondingly, and the semi-reflective semi-permeable membrane one (5) and the semi-reflective semi-permeable membrane two (11) correspond to set up;
    经过所述半反半透膜一(5)透射的光束到达所述二维扫描振镜(6)，经过所述半反半透膜一(5)反射的光束到达所述半反半透膜二(11)。The light beam transmitted through the semi-reflective film one (5) reaches the two-dimensional scanning galvanometer (6), and the light beam reflected by the semi-reflective film one (5) reaches the semi-reflective film Two (11).
  2. 根据权利要求1所述的一种横向差动暗场共焦显微测量装置，其特征在于，所述凹面锥透镜(4)的前后表面底角α相同，高斯光束整形为环形光后的外径与所述物镜(9)的入瞳相匹配。The lateral differential dark field confocal microscopy measurement device according to claim 1, wherein the bottom angle α of the front and rear surfaces of the concave conical lens (4) is the same, and the outer diameter of the Gaussian beam after being shaped into a ring light is the same as The entrance pupil of the objective lens (9) matches.
  3. 根据权利要求1所述的一种横向差动暗场共焦显微测量装置，其特征在于，所述扫描透镜(7)工作面应置于管镜(8)的前焦面处。The lateral differential dark field confocal microscopy measurement device according to claim 1, wherein the working surface of the scanning lens (7) should be placed at the front focal plane of the tube lens (8).
  4. 根据权利要求1所述的一种横向差动暗场共焦显微测量装置，其特征在于，待测样品(10)设置于所述物镜(9)的前方，环形光入射至所述物镜(9)后在所述待测样品(10)上聚焦。The lateral differential dark field confocal microscopy measurement device according to claim 1, characterized in that the sample (10) to be tested is arranged in front of the objective lens (9), and the ring light is incident on the objective lens (9) Then focus on the sample to be tested (10).
  5. 根据权利要求4所述的一种横向差动暗场共焦显微测量装置，其特征在于，光阑一(12)和光阑二(17)的孔径与凹面锥透镜(4)所产生的环形光孔径互补匹配，光阑一(12)和光阑二(17)完全遮挡来自所述待测样品(10)的反射光束，仅允许携带所述待测样品(10)信息的散射光进入后续探测光路。The lateral differential dark field confocal microscopy measurement device according to claim 4, characterized in that the apertures of stop one (12) and stop two (17) and the annular light aperture produced by the concave conical lens (4) Complementary matching, aperture one (12) and aperture two (17) completely block the reflected light beam from the sample (10) to be tested, and only the scattered light carrying the information of the sample to be tested (10) is allowed to enter the subsequent detection optical path.
  6. 根据权利要求1所述的横向差动暗场共焦显微测量装置，其特征在于，The lateral differential dark field confocal microscopy measurement device according to claim 1, characterized in that:
    在透射光路单元中，透射光束被聚焦于焦平面处，且处于焦平面中心位置的左侧，被针孔一(15)遮挡滤除后的光束被相机一(16)收集；In the transmitted light path unit, the transmitted light beam is focused at the focal plane and on the left side of the center position of the focal plane, and the light beam after being blocked and filtered by pinhole one (15) is collected by camera one (16);
    在反射光路单元中，反射光束被聚焦于焦平面处，且处于焦平面中心位置的右侧，被针孔二(20)遮挡滤除后的光束被相机二(21)收集。In the reflected light path unit, the reflected light beam is focused on the focal plane and on the right side of the center position of the focal plane. The light beam blocked and filtered by the second pinhole (20) is collected by the second camera (21).
  7. 一种横向差动暗场共焦显微测量方法，基于权利要求1～6中任意一项所述的横向差动暗场共焦显微测量装置，其特征在于，具体包括以下步骤：A lateral differential dark field confocal microscopy measurement method, based on the lateral differential dark field confocal microscopy measurement device according to any one of claims 1 to 6, characterized in that it specifically includes the following steps:
    S1.激光器(1)所发平行激光光束，通过扩束镜(2)光束直径放大后，经过偏振片一(3)变为线偏振光，经过凹面锥透镜(4)后，高斯光束被整形为环形光束；线偏振环形光束透射半反半透膜一(5)，经过二维扫描振镜(6)反射，通过扫描透镜(7)聚焦至管镜(8)前焦面处，通过所述管镜(8)产生环形平行光束入射物镜(9)，在所述待测样品(10)上形成聚焦光斑，实现对所述待测样品(10)的环形光照明；S1. The parallel laser beam emitted by the laser (1) is enlarged by the beam diameter of the beam expander (2), and then becomes linearly polarized light through the polarizer one (3). After passing through the concave conical lens (4), the Gaussian beam is shaped It is a ring beam; the linearly polarized ring beam transmits through the semi-reflective film one (5), is reflected by the two-dimensional scanning galvanometer (6), is focused by the scanning lens (7) to the front focal plane of the tube lens (8), and passes through all The tube lens (8) generates a circular parallel light beam and enters the objective lens (9) to form a focused spot on the test sample (10) to realize the ring light illumination of the test sample (10);
    S2.控制所述二维扫描振镜(6)偏转使聚焦光斑在所述待测样品(10)上进行二维扫描，所述待测样品(10)的散射光和反射光依次经过所述物镜(9)、所述管镜(8)、所述扫描透镜(7)和所述二维扫描振镜(6)，被所述半反半透膜一(5)反射，实现对所述待测样品(10)的环形光扫描；S2. Control the deflection of the two-dimensional scanning galvanometer (6) so that the focused spot performs two-dimensional scanning on the sample to be tested (10), and the scattered light and reflected light of the sample to be tested (10) pass through the The objective lens (9), the tube lens (8), the scanning lens (7) and the two-dimensional scanning galvanometer (6) are reflected by the semi-reflective film one (5) to realize the Ring light scanning of the sample (10) to be tested;
    S3.从所述入射半反半透膜一(5)入射到半反半透膜二(11)的光束被分为两路探测光束：S3. The light beam incident from the incident semi-reflective film one (5) to the semi-reflective film two (11) is divided into two detection beams:
    透射光路中，光束经过光阑一(12)，所述待测样品(10)直接反射光被遮挡滤除，所述待测样品(10)的散射光依次通过偏振片二(13)和聚焦透镜一(14)被聚焦于焦平面处，且处于焦平面中心位置的左侧，被针孔一(15)遮挡过滤后的光束被相机一(16)收集；In the transmitted light path, the light beam passes through the diaphragm one (12), the direct reflected light of the test sample (10) is blocked and filtered out, and the scattered light of the test sample (10) passes through the second polarizer (13) and focuses in turn Lens one (14) is focused on the focal plane, and is on the left side of the center of the focal plane, and the filtered light beam is blocked by pinhole one (15) and collected by camera one (16);
    反射光路中，光束经过光阑二(17)，所述待测样品(10)的直接反射光被遮挡滤除，所述待测样品(10)的散射光依次通过偏振片三(18)和聚焦透镜二(19)被聚焦于焦平面处，且处于焦平面中心位置的右侧，被针孔二(20)遮挡过滤后的光束被相机二(21)收集；完成对所述待测样品(10)的差动共焦探测；In the reflected light path, the light beam passes through the second aperture (17), the direct reflected light of the test sample (10) is blocked and filtered, and the scattered light of the test sample (10) passes through the third polarizer (18) and The second focusing lens (19) is focused on the focal plane and is on the right side of the center position of the focal plane. The filtered light beam is blocked by the second pinhole (20) and collected by the second camera (21); completing the measurement of the sample to be tested (10) Differential confocal detection;
    S4.竖直方向移动所述待测样品(10)，进行对所述待测样品(10)不同轴向位置的横向二维扫描，实现对所述待测样品(10)的立体显微测量。S4. Move the sample to be tested (10) in the vertical direction, and perform horizontal two-dimensional scanning of the sample to be tested (10) at different axial positions, so as to realize the three-dimensional microscopic measurement of the sample to be tested (10) .
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