CN111220624A - Surface and sub-surface integrated confocal microscopic measurement device and method - Google Patents
Surface and sub-surface integrated confocal microscopic measurement device and method Download PDFInfo
- Publication number
- CN111220624A CN111220624A CN202010056461.6A CN202010056461A CN111220624A CN 111220624 A CN111220624 A CN 111220624A CN 202010056461 A CN202010056461 A CN 202010056461A CN 111220624 A CN111220624 A CN 111220624A
- Authority
- CN
- China
- Prior art keywords
- lens
- semi
- light
- annular
- linearly polarized
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2545—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object with one projection direction and several detection directions, e.g. stereo
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8822—Dark field detection
Abstract
The invention discloses a surface and sub-surface integrated confocal microscopic measurement device and a method, wherein an annular light illumination module in the device comprises a laser, a beam expander, a polarizer I, a polarization splitting film, a quarter wave plate, a cone lens and a plane reflector; the annular light scanning module comprises a half-reflecting and half-transmitting film I, a two-dimensional scanning galvanometer, a scanning lens, a tube lens, an objective lens and a sample to be detected; the reflection confocal detection module comprises a semi-reflecting and semi-transmitting film II, a polarizing film II, a focusing lens I, a pinhole I and a camera I; the dark field confocal detection module comprises a diaphragm, a polarizing plate III, a focusing lens II, a pinhole II and a camera II. According to the invention, through the shaping of the illumination light beam and the shielding detection of the complementary aperture, the reflected signal of the surface of the sample and the sub-surface scattering signal are effectively separated, the three-dimensional distribution information of defects such as nano-scale surface scratches, abrasion, sub-surface cracks, bubbles and the like can be simultaneously obtained, and the integrated detection function of the defects of the surface and the sub-surface is realized.
Description
Technical Field
The invention relates to the technical field of optical precision measurement, in particular to a surface and sub-surface integrated confocal microscopic measurement device and method.
Background
High-performance optical elements and micro-electromechanical elements are core components of modern high-end equipment, and surface appearance measurement and subsurface defect detection are required for guaranteeing the processing quality and service reliability of the high-performance optical elements and the micro-electromechanical elements.
The existing surface topography nondestructive measurement technology at home and abroad mainly comprises the following steps: confocal microscopy, white light interference microscopy and zoom microscopy. Compared with the other two technologies, the confocal microscopic measurement technology has the characteristics of wide applicability of measurement samples and capability of measuring complex sample structures, and is widely applied to the field of industrial detection. The sub-surface defect nondestructive detection technology mainly comprises the following steps: laser modulation scattering technology, total internal reflection microscopy, optical coherence tomography, high frequency scanning acoustic microscopy, and X-ray microscopy. The method has the defects of low depth positioning precision, low signal-to-noise ratio, low detection efficiency, limited detection samples and the like. At present, no equipment is available at home and abroad to realize two functions of surface appearance measurement and subsurface defect detection at the same time.
Therefore, how to provide a surface and sub-surface integrated confocal micro-measurement device is a problem to be solved by those skilled in the art.
Disclosure of Invention
In view of the above, the present invention provides a surface and subsurface integrated confocal microscopic measurement apparatus and method, which can simultaneously obtain three-dimensional distribution information of defects such as nano-scale surface scratches, abrasion, subsurface cracks, bubbles, and the like, and have a surface and subsurface defect integrated detection function.
In order to achieve the purpose, the invention adopts the following technical scheme:
the surface and sub-surface integrated confocal microscopic measuring device comprises an annular light illuminating module, an annular light scanning module, a reflection confocal detection module and a dark field confocal detection module;
the annular light illuminating module sequentially comprises the following components in the light propagation direction: the device comprises a laser, a beam expander, a polarizer I, a polarization beam splitting film, a quarter wave plate, a cone lens and a plane reflector;
the annular light scanning module sequentially comprises according to the light propagation direction: the device comprises a semi-reflecting and semi-permeable membrane I, a two-dimensional scanning galvanometer, a scanning lens, a tube lens, an objective lens and a sample to be detected;
the reflection confocal detection module sequentially comprises the following components in the light propagation direction: a semi-reflecting and semi-transparent film II, a polaroid II, a focusing lens I, a pinhole I and a camera I;
the dark field confocal detection module sequentially comprises the following components according to the light propagation direction: the device comprises a diaphragm, a polarizing plate III, a focusing lens II, a pinhole II and a camera II.
Further, the cone lens and the plane mirror are used for shaping the linear polarization Gaussian beam into a linear polarization annular beam, the distance between the cone lens and the plane mirror is in direct proportion to the outer diameter of the linear polarization annular beam, and the outer diameter of the linear polarization annular beam is matched with the entrance pupil of the objective lens; the beam expander is used for adjusting the inner diameter of the linear polarization annular beam.
Further, the aperture of the diaphragm is the same as the inner diameter of the linearly polarized annular beam.
Further, the scan lens working surface is located at a front focal plane of the tube mirror.
The surface and sub-surface integrated confocal microscopic measurement method comprises the following steps:
the method comprises the following steps that firstly, a parallel laser beam emitted by a laser device is amplified through a beam expander, the diameter of the parallel laser beam is changed into a linear polarization Gaussian beam through a polarizer I, the linear polarization Gaussian beam sequentially passes through a polarization beam splitting film, a quarter-wave plate and a cone lens and is reflected by a plane reflector, a reflected beam passes through the cone lens and is shaped into a linear polarization annular beam, the polarization direction of the linear polarization Gaussian beam passes through the quarter-wave plate and is changed by 90 degrees, the linear polarization beam is sequentially reflected by the polarization beam splitting film and reflected by a semi-reflecting and semi-transmitting film I, the linear polarization annular beam is focused to the front focal plane of a tube lens through a two-dimensional scanning vibration mirror and a scanning lens, the annular parallel beam is generated by the tube lens and enters an objective lens, a focusing spot is;
controlling the deflection of the two-dimensional scanning galvanometer to enable a focusing light spot to perform two-dimensional scanning on the sample to be detected, wherein reflected light and scattered light in the surface and the subsurface of the sample to be detected sequentially pass through the objective lens, the tube lens, the scanning lens and the two-dimensional scanning galvanometer and then are transmitted through the semi-reflecting and semi-transparent film, so that annular light scanning of the sample to be detected is realized;
dividing the light beam incident to the semi-reflective and semi-transparent film II through the semi-reflective and semi-transparent film I into two detection light beams: the transmitted light beam of the semi-reflecting and semi-transmitting film II sequentially passes through the polarizing film II and the focusing lens I to be focused to the center of the pinhole I, the defocused light beam is blocked by the pinhole I, and the quasi-focal light beam carries the reflection information of the sample to be detected to the camera I; the reflected light beam of the semi-reflecting and semi-transparent film II sequentially passes through the diaphragm, the polarizing film III and the focusing lens II to be focused to the center of the pinhole II, the defocused light beam is blocked by the pinhole II, and the quasi-focal light beam carries scattering information of the sample to be detected to the camera II;
and fourthly, vertically moving the axial position of the sample to be measured in a single direction, and performing transverse two-dimensional scanning on different axial positions of the sample to be measured to realize surface and sub-surface three-dimensional microscopic measurement on the sample to be measured.
Further, the cone lens and the plane mirror are used for shaping the linear polarization Gaussian beam into a linear polarization annular beam, the distance between the cone lens and the plane mirror is in direct proportion to the outer diameter of the linear polarization annular beam, and the outer diameter of the linear polarization annular beam is matched with the entrance pupil of the objective lens; the beam expander is used for adjusting the inner diameter of the linear polarization annular beam.
Further, the aperture of the diaphragm is the same as the inner diameter of the linearly polarized annular beam.
Further, the scan lens working surface is located at a front focal plane of the tube mirror.
According to the technical scheme, compared with the prior art, the invention discloses a surface and sub-surface integrated confocal micro-measurement device and method, through shaping of an illumination beam and shielding detection of a complementary aperture, a reflected signal and a sub-surface scattering signal of a sample are effectively separated, three-dimensional distribution information of defects such as nano-scale surface scratches, abrasion, sub-surface cracks and bubbles can be obtained simultaneously, and the surface and sub-surface integrated defect detection device has a surface and sub-surface integrated defect detection function.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a surface and sub-surface integrated confocal micro-measurement device provided by the invention.
Wherein the content of the first and second substances,
the device comprises a laser 1, a beam expander 2, a first polarizer 3, a 4 polarization beam splitting film, a 5 quarter wave plate, a 6 cone lens, a 7 plane reflector, a first semi-reflecting and semi-transmitting film 8, a two-dimensional scanning galvanometer 9, a scanning lens 10, a tube lens 11, an objective lens 12, a sample to be detected 13, a second semi-reflecting and semi-transmitting film 14, a second polarizer 15, a first focusing lens 16, a first pinhole 17, a first camera 18, a diaphragm 19, a third polarizer 20, a second focusing lens 21, a second pinhole 22 and a second camera 23.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The embodiment of the invention discloses a surface and sub-surface integrated confocal micro-measurement device, which realizes the integrated detection function of the defects of the nanoscale surface and the sub-surface of a sample to be detected.
The device comprises an annular light illumination module, an annular light scanning module, a reflection confocal detection module and a dark field confocal detection module;
the annular light illuminating module is sequentially arranged according to the light propagation direction: the device comprises a laser 1, a beam expander 2, a polarizer I3, a polarization splitting film 4, a quarter-wave plate 5, a cone lens 6 and a plane reflector 7;
the annular light scanning module is sequentially as follows according to the light propagation direction: the device comprises a semi-reflecting and semi-permeable membrane I8, a two-dimensional scanning galvanometer 9, a scanning lens 10, a tube lens 11, an objective lens 12 and a sample to be detected 13;
the reflection confocal detection module is sequentially as follows according to the light propagation direction: a second half-reflecting and half-transmitting film 14, a second polarizing plate 15, a first focusing lens 16, a first pinhole 17 and a first camera 18;
the dark field confocal detection module sequentially comprises the following components according to the light propagation direction: a diaphragm 19, a polarizer three 20, a focusing lens two 21, a pinhole two 22 and a camera two 23.
More specifically: the combination of the cone lens 6 and the plane reflector 7 shapes the linear polarization Gaussian beam into a linear polarization annular beam with adjustable inner and outer diameters, the beam expander 2 arranged at the front end of the light path of the cone lens 6 is used for adjusting the inner diameter of the linear polarization annular beam, the larger the diameter of the output light spot of the beam expander 2 is, the larger the thickness of the annular beam is, and the smaller the inner diameter is; the outer diameter of the linear polarization annular light beam depends on the distance between the conical lens 6 and the plane reflector 7, and the longer the relative distance is, the larger the outer diameter is; the outer diameter of the Gaussian beam after being shaped into annular light is matched with the entrance pupil of the objective lens 12, so that the dark field observation requirement on the sample is met.
More specifically: the aperture of the stop 19 should be the same as the inner diameter of the linearly polarized ring light so that the directly reflected light from the sample 13 is filtered out at the dark field confocal detection end by using a complementary aperture blocking method, and only the scattered light from the sample 13 is allowed to be collected by the second camera 23 through the subsequent light path.
More specifically: the working surface of the scan lens 10 is placed at the front focal surface of the tube mirror 11.
More specifically: the light beam incident to the second half-reflecting and half-transmitting film 14 is divided into two paths: and the dark field confocal detection light path and the reflection confocal detection light path simultaneously realize the detection and collection of the scattered and reflected light beams in the surface and the sub-surface of the sample 13.
A surface and subsurface integrated confocal microscopic measurement method is used for realizing the integrated detection function of the defects of the nanoscale surface and subsurface of a sample to be detected, and comprises the following specific steps:
step a, a parallel laser beam emitted by a laser 1 is amplified through a beam expander 2, is changed into linearly polarized light through a polarizer I3, and is reflected by a plane reflector 7 after passing through a polarization splitting film 4, a quarter-wave plate 5 and a cone lens 6 in sequence; the reflected light beam is shaped into an annular light beam after passing through the conical lens 6 again, and the polarization direction changes by 90 degrees after passing through the quarter-wave plate 5 again, and is reflected by the polarization splitting film 4; the annular light beam is reflected by a half-reflecting and half-transmitting film I8 and a two-dimensional scanning galvanometer 9, is focused to the front focal plane of a tube lens 11 through a scanning lens 10, generates an annular parallel light beam through the tube lens 11 and enters an objective lens 12, and forms a focusing light spot on a sample 13 to be measured, so that annular light illumination on the sample 13 to be measured is realized;
b, controlling the deflection of the two-dimensional scanning galvanometer 9 to enable a focusing light spot to perform two-dimensional scanning on the sample 13, and transmitting the semi-reflective and semi-transparent film I8 after directly reflected light and scattered light in the surface and the subsurface of the sample 13 sequentially pass through the objective lens 12, the tube lens 11, the scanning lens 10 and the two-dimensional scanning galvanometer 9 to realize annular light scanning of the sample 13;
and c, dividing the light beam incident to the second semi-reflecting and semi-transmitting film 14 into two detection light beams: the transmitted light beam of the semi-reflecting and semi-transmitting film II 14 sequentially passes through the polarizing film II 15 and the focusing lens I16 to be focused to the center of the pinhole I17, the defocused light beam is blocked by the pinhole, and the quasi-focal light beam mainly carries the reflection information of the sample to be measured and is collected by the camera I18; the reflected light beam of the semi-reflecting and semi-transparent film II 14 sequentially passes through the diaphragm 19, the polaroid III 20 and the focusing lens II 21 and is focused to the center of the pinhole II 22, the defocused light beam is blocked by the pinhole, and the quasi-focal light beam carries scattering information of a sample to be detected and is collected by the camera II 23;
and d, vertically moving the axial position of the sample 13 to be measured in a single direction, and performing transverse two-dimensional scanning on different axial positions of the sample 13 to be measured to realize surface and sub-surface three-dimensional microscopic measurement on the sample 13 to be measured.
Has the advantages that:
1) the combination of the cone lens and the plane mirror is used for shaping the Gaussian beam into an annular beam with adjustable inner and outer diameters, annular light illumination with a proper aperture and complementary aperture shielding detection are utilized, a sample surface reflection signal and a sub-surface scattering signal are effectively separated, and sub-surface defect detection of a high-performance optical element and a micro-electro-mechanical element is realized;
2) the device comprises a dark field confocal detection module and a reflection confocal detection module, can simultaneously acquire three-dimensional distribution information of defects such as nano-scale surface scratches, abrasion, sub-surface cracks, bubbles and the like, and has the function of integrally detecting the defects of the surface and the sub-surface.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other. The device disclosed by the embodiment corresponds to the method disclosed by the embodiment, so that the description is simple, and the relevant points can be referred to the method part for description.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (8)
1. The surface and sub-surface integrated confocal microscopic measuring device is characterized by comprising an annular light illuminating module, an annular light scanning module, a reflection confocal detection module and a dark field confocal detection module;
the annular light illuminating module sequentially comprises the following components in the light propagation direction: the device comprises a laser (1), a beam expander (2), a polarizer I (3), a polarization splitting film (4), a quarter-wave plate (5), a cone lens (6) and a plane reflector (7);
the annular light scanning module sequentially comprises according to the light propagation direction: the device comprises a semi-reflecting and semi-permeable membrane I (8), a two-dimensional scanning galvanometer (9), a scanning lens (10), a tube lens (11), an objective lens (12) and a sample to be detected (13);
the reflection confocal detection module sequentially comprises the following components in the light propagation direction: a second half-reflecting and half-transmitting film (14), a second polaroid (15), a first focusing lens (16), a first pinhole (17) and a first camera (18);
the dark field confocal detection module sequentially comprises the following components according to the light propagation direction: the device comprises a diaphragm (19), a polarizing plate III (20), a focusing lens II (21), a pinhole II (22) and a camera II (23).
2. The surface and sub-surface integrated confocal microscopy apparatus according to claim 1, wherein the axicon lens (6) and the plane mirror (7) are used for shaping the linearly polarized Gaussian beam into a linearly polarized annular beam, the distance between the axicon lens (6) and the plane mirror (7) is proportional to the outer diameter of the linearly polarized annular beam, and the outer diameter of the linearly polarized annular beam is matched with the entrance pupil of the objective lens (12); the beam expander (2) is used for adjusting the inner diameter of the linear polarization annular beam.
3. The surface-and sub-surface integrated confocal microscopy measurement device according to claim 2, characterized in that the aperture of the stop (19) is the same as the inner diameter of the linearly polarized annular beam.
4. The surface-and subsurface-integrated confocal microscopy apparatus according to any one of claims 1 to 3, wherein the working surface of the scanning lens (10) is located at the front focal plane of the tube lens (11).
5. The surface and sub-surface integrated confocal microscopic measurement method is characterized by comprising the following steps:
step one, amplifying the diameter of a parallel laser beam emitted by a laser (1) through a beam expander (2), changing the diameter of the parallel laser beam into a linearly polarized Gaussian beam through a polarizer I (3), reflecting the linearly polarized Gaussian beam by a plane reflector (7) after the linearly polarized Gaussian beam sequentially passes through a polarization splitting film (4), a quarter-wave plate (5) and a cone lens (6), shaping the reflected beam into a linearly polarized annular beam after the reflected beam passes through the cone lens (6), changing the polarization direction by 90 degrees after the linearly polarized annular beam passes through the quarter-wave plate (5), reflecting the linearly polarized annular beam by the polarization splitting film (4) and reflecting the semi-reflecting semi-permeable film I (8) in sequence, focusing the linearly polarized annular beam to a front focal plane of a tube lens (11) through a two-dimensional scanning vibration mirror (9) and a scanning lens (10), generating an annular parallel beam through the tube lens (11) and irradiating the annular parallel beam to an objective lens (12), and forming a focusing spot on a, realizing annular light illumination of the sample (13) to be measured;
secondly, controlling the deflection of the two-dimensional scanning galvanometer (9) to enable a focusing light spot to perform two-dimensional scanning on the sample (13) to be detected, wherein reflected light and scattered light in the surface and subsurface of the sample (13) to be detected sequentially pass through the objective lens (12), the tube lens (11), the scanning lens (10) and the two-dimensional scanning galvanometer (9) and are transmitted through the semi-reflecting and semi-permeable membrane I (8), so that annular light scanning of the sample (13) to be detected is realized;
thirdly, dividing the light beam incident to the semi-reflective and semi-transparent film II (14) through the semi-reflective and semi-transparent film I (8) into two detection light beams: the transmitted light beam of the semi-reflecting and semi-transparent film II (14) sequentially passes through the polarizing film II (15) and the focusing lens I (16) to be focused to the center of the pinhole I (17), the defocused light beam is blocked by the pinhole I (17), and the quasi-focal light beam carries the reflection information of the sample to be detected (13) to the camera I (18); the reflected light beam of the semi-reflecting and semi-transparent film II (14) sequentially passes through the diaphragm (19), the polaroid III (20) and the focusing lens II (21) and is focused to the center of the pinhole II (22), the defocused light beam is blocked by the pinhole II (22), and the quasi-focal light beam carries scattering information of the sample to be detected (13) to the camera II (23);
and fourthly, vertically moving the axial position of the sample (13) to be measured in a single direction, and performing transverse two-dimensional scanning on different axial positions of the sample (13) to be measured to realize the surface and subsurface three-dimensional microscopic measurement of the sample (13) to be measured.
6. The surface and sub-surface integrated confocal microscopy measurement method according to claim 5, characterized in that the cone lens (6) and the plane mirror (7) are used for shaping a linearly polarized Gaussian beam into a linearly polarized annular beam, the distance between the cone lens (6) and the plane mirror (7) is proportional to the outer diameter of the linearly polarized annular beam, and the outer diameter of the linearly polarized annular beam is matched with the entrance pupil of the objective lens (12); the beam expander (2) is used for adjusting the inner diameter of the linear polarization annular beam.
7. The surface and sub-surface integrated confocal microscopy according to claim 6, characterized in that the aperture of the diaphragm (19) is the same as the inner diameter of the linearly polarized annular beam.
8. The surface and sub-surface integrated confocal microscopy measurement method according to any one of claims 5 to 7, characterized in that the working surface of the scanning lens (10) is located at the front focal plane of the tube mirror (11).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010056461.6A CN111220624A (en) | 2020-01-18 | 2020-01-18 | Surface and sub-surface integrated confocal microscopic measurement device and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010056461.6A CN111220624A (en) | 2020-01-18 | 2020-01-18 | Surface and sub-surface integrated confocal microscopic measurement device and method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111220624A true CN111220624A (en) | 2020-06-02 |
Family
ID=70829608
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010056461.6A Pending CN111220624A (en) | 2020-01-18 | 2020-01-18 | Surface and sub-surface integrated confocal microscopic measurement device and method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111220624A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113340910A (en) * | 2021-06-07 | 2021-09-03 | 南京航空航天大学 | Method for detecting sub-surface damage of fiber reinforced ceramic matrix composite by adopting polarized laser scattering |
| CN113884471A (en) * | 2021-09-24 | 2022-01-04 | 中国科学院光电技术研究所 | Crystal orientation testing device and method for two-dimensional material |
| CN113916891A (en) * | 2021-09-24 | 2022-01-11 | 哈尔滨工业大学 | Dark field confocal Brillouin microscopic measurement device and method based on optical fiber annular light beam |
| CN113984771A (en) * | 2021-09-24 | 2022-01-28 | 哈尔滨工业大学 | Depth learning dark field confocal microscopic measurement device and method based on vector polarized light |
| CN114396888A (en) * | 2021-12-30 | 2022-04-26 | 北京无线电计量测试研究所 | Confocal microscopic device capable of realizing bright field and dark field imaging simultaneously |
| CN114994929A (en) * | 2022-05-27 | 2022-09-02 | 湖北大学 | Device for generating circular flat-top light beam |
| WO2022183671A1 (en) * | 2021-03-03 | 2022-09-09 | 赤壁精迈光电科技有限公司 | Detection apparatus for sub-surface defects |
Citations (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050161593A1 (en) * | 2003-11-21 | 2005-07-28 | Olympus Corporation | Confocal laser scanning microscope |
| US20060091334A1 (en) * | 2004-11-03 | 2006-05-04 | Jan-Peter Urbach | Con-focal imaging system and method using destructive interference to enhance image contrast of light scattering objects on a sample surface |
| US20080140341A1 (en) * | 2006-07-10 | 2008-06-12 | The Board Of Trustees Of The University Of Illinois | Interferometric Synthetic Aperture Microscopy |
| CN102425998A (en) * | 2011-09-23 | 2012-04-25 | 西安工业大学 | Full parameter detection apparatus of polished surface quality of optical element and detection method thereof |
| CN103135369A (en) * | 2013-03-21 | 2013-06-05 | 中国科学院上海光学精密机械研究所 | Photoetching lighting mode generator |
| CN103207530A (en) * | 2013-03-22 | 2013-07-17 | 中国科学院上海光学精密机械研究所 | Pupil reshaping optical system of lithography machine and generation method of off-axis illumination mode |
| US20130301033A1 (en) * | 2012-05-08 | 2013-11-14 | King Abdullah University Of Science And Technology | Submicron Resolution Spectral-Domain Optical Coherence Tomography |
| CN105675615A (en) * | 2016-02-26 | 2016-06-15 | 苏州塞罗尔医学影像科技有限公司 | High-speed large-range high-resolution imaging system |
| CN205538736U (en) * | 2015-12-30 | 2016-08-31 | 中国工程物理研究院激光聚变研究中心 | Optical element surface defect detecting device of transmission dual wavelength synthetic aperture holography |
| US20170215738A1 (en) * | 2016-02-02 | 2017-08-03 | Parsin HAJIREZA | Non-interferometric photoacoustic remote sensing (ni-pars) |
| CN109459438A (en) * | 2018-11-27 | 2019-03-12 | 中国工程物理研究院激光聚变研究中心 | A kind of defect detection equipment and method |
| CN109470710A (en) * | 2018-12-07 | 2019-03-15 | 哈尔滨工业大学 | The confocal sub-surface detection device of dark field and method based on coaxial biconical lens |
| CN109580639A (en) * | 2018-12-07 | 2019-04-05 | 哈尔滨工业大学 | The confocal sub-surface detection device of dark field and method based on concentric double conical surface mirror |
| CN109668838A (en) * | 2018-11-13 | 2019-04-23 | 浙江大学 | A kind of device and method that can detect optical element surface and subsurface defect simultaneously |
| CN109781665A (en) * | 2018-11-27 | 2019-05-21 | 大连理工大学 | A kind of device scattering detection semiconductor material sub-surface damage using polarization laser |
| EP3492910A1 (en) * | 2017-12-04 | 2019-06-05 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO | Subsurface inspection method and system |
| CN109916909A (en) * | 2019-03-25 | 2019-06-21 | 西安工业大学 | The detection method and its device of optical element surface pattern and subsurface defect information |
| CN113959357A (en) * | 2021-09-24 | 2022-01-21 | 哈尔滨工业大学 | Surface and sub-surface integrated confocal microscopic measurement device and method |
-
2020
- 2020-01-18 CN CN202010056461.6A patent/CN111220624A/en active Pending
Patent Citations (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050161593A1 (en) * | 2003-11-21 | 2005-07-28 | Olympus Corporation | Confocal laser scanning microscope |
| US20060091334A1 (en) * | 2004-11-03 | 2006-05-04 | Jan-Peter Urbach | Con-focal imaging system and method using destructive interference to enhance image contrast of light scattering objects on a sample surface |
| US20080140341A1 (en) * | 2006-07-10 | 2008-06-12 | The Board Of Trustees Of The University Of Illinois | Interferometric Synthetic Aperture Microscopy |
| CN102425998A (en) * | 2011-09-23 | 2012-04-25 | 西安工业大学 | Full parameter detection apparatus of polished surface quality of optical element and detection method thereof |
| US20130301033A1 (en) * | 2012-05-08 | 2013-11-14 | King Abdullah University Of Science And Technology | Submicron Resolution Spectral-Domain Optical Coherence Tomography |
| CN103135369A (en) * | 2013-03-21 | 2013-06-05 | 中国科学院上海光学精密机械研究所 | Photoetching lighting mode generator |
| CN103207530A (en) * | 2013-03-22 | 2013-07-17 | 中国科学院上海光学精密机械研究所 | Pupil reshaping optical system of lithography machine and generation method of off-axis illumination mode |
| CN205538736U (en) * | 2015-12-30 | 2016-08-31 | 中国工程物理研究院激光聚变研究中心 | Optical element surface defect detecting device of transmission dual wavelength synthetic aperture holography |
| US20170215738A1 (en) * | 2016-02-02 | 2017-08-03 | Parsin HAJIREZA | Non-interferometric photoacoustic remote sensing (ni-pars) |
| CN105675615A (en) * | 2016-02-26 | 2016-06-15 | 苏州塞罗尔医学影像科技有限公司 | High-speed large-range high-resolution imaging system |
| EP3492910A1 (en) * | 2017-12-04 | 2019-06-05 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO | Subsurface inspection method and system |
| CN109668838A (en) * | 2018-11-13 | 2019-04-23 | 浙江大学 | A kind of device and method that can detect optical element surface and subsurface defect simultaneously |
| CN109459438A (en) * | 2018-11-27 | 2019-03-12 | 中国工程物理研究院激光聚变研究中心 | A kind of defect detection equipment and method |
| CN109781665A (en) * | 2018-11-27 | 2019-05-21 | 大连理工大学 | A kind of device scattering detection semiconductor material sub-surface damage using polarization laser |
| CN109470710A (en) * | 2018-12-07 | 2019-03-15 | 哈尔滨工业大学 | The confocal sub-surface detection device of dark field and method based on coaxial biconical lens |
| CN109580639A (en) * | 2018-12-07 | 2019-04-05 | 哈尔滨工业大学 | The confocal sub-surface detection device of dark field and method based on concentric double conical surface mirror |
| CN109916909A (en) * | 2019-03-25 | 2019-06-21 | 西安工业大学 | The detection method and its device of optical element surface pattern and subsurface defect information |
| CN113959357A (en) * | 2021-09-24 | 2022-01-21 | 哈尔滨工业大学 | Surface and sub-surface integrated confocal microscopic measurement device and method |
Non-Patent Citations (1)
| Title |
|---|
| 王辉: "《基于共焦成像法的亚表面损伤散射仿真》", 《光学仪器》 * |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022183671A1 (en) * | 2021-03-03 | 2022-09-09 | 赤壁精迈光电科技有限公司 | Detection apparatus for sub-surface defects |
| CN113340910B (en) * | 2021-06-07 | 2022-06-07 | 南京航空航天大学 | Method for detecting sub-surface damage of fiber reinforced ceramic matrix composite by adopting polarized laser scattering |
| CN113340910A (en) * | 2021-06-07 | 2021-09-03 | 南京航空航天大学 | Method for detecting sub-surface damage of fiber reinforced ceramic matrix composite by adopting polarized laser scattering |
| CN113916891B (en) * | 2021-09-24 | 2023-07-28 | 哈尔滨工业大学 | Dark field confocal Brillouin microscopic measurement device and method based on optical fiber annular light beam |
| CN113984771A (en) * | 2021-09-24 | 2022-01-28 | 哈尔滨工业大学 | Depth learning dark field confocal microscopic measurement device and method based on vector polarized light |
| CN113916891A (en) * | 2021-09-24 | 2022-01-11 | 哈尔滨工业大学 | Dark field confocal Brillouin microscopic measurement device and method based on optical fiber annular light beam |
| CN113884471A (en) * | 2021-09-24 | 2022-01-04 | 中国科学院光电技术研究所 | Crystal orientation testing device and method for two-dimensional material |
| CN113984771B (en) * | 2021-09-24 | 2023-07-28 | 哈尔滨工业大学 | Deep learning dark field confocal microscopic measurement device and method based on vector polarized light |
| CN113884471B (en) * | 2021-09-24 | 2023-10-03 | 中国科学院光电技术研究所 | Crystal orientation testing device and method for two-dimensional material |
| CN114396888A (en) * | 2021-12-30 | 2022-04-26 | 北京无线电计量测试研究所 | Confocal microscopic device capable of realizing bright field and dark field imaging simultaneously |
| CN114396888B (en) * | 2021-12-30 | 2023-11-14 | 北京无线电计量测试研究所 | Confocal microscopic device capable of simultaneously realizing bright field and dark field imaging |
| CN114994929A (en) * | 2022-05-27 | 2022-09-02 | 湖北大学 | Device for generating circular flat-top light beam |
| CN114994929B (en) * | 2022-05-27 | 2023-04-18 | 湖北大学 | Device for generating circular flat-top light beam |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN111220625B (en) | Surface and sub-surface integrated confocal microscopic measurement device and method | |
| CN111220624A (en) | Surface and sub-surface integrated confocal microscopic measurement device and method | |
| CN111239153B (en) | Axial differential dark field confocal microscopic measuring device and method thereof | |
| CN111257227B (en) | Dark field confocal microscopic measurement device and method based on polarization autocorrelation | |
| CN109975820B (en) | Linnik type interference microscope-based synchronous polarization phase shift focus detection system | |
| TWI644098B (en) | Method and apparatus for defect inspection of transparent substrate | |
| CN113959357A (en) | Surface and sub-surface integrated confocal microscopic measurement device and method | |
| US9696686B2 (en) | Method and device for focussing a microscope automatically | |
| CN110231321B (en) | Super-resolution microscopic imaging system based on nanopore-microlens scanning | |
| CN104296685B (en) | The method measuring smooth free form surface sample based on differential STED | |
| CA3013946A1 (en) | Method and system for improving lateral resolution in optical scanning microscopy | |
| CN111257226B (en) | Dark field confocal microscopic measurement device and method based on polarization autocorrelation | |
| US20120218558A1 (en) | Apparatus and methods for optical coherence tomography and confocal microscopy | |
| WO2021143525A1 (en) | Transverse differential dark-field confocal microscopic measurement apparatus and method therefor | |
| CN111257225B (en) | Transverse differential dark field confocal microscopic measuring device and method thereof | |
| CN103954598A (en) | Axial high-accuracy location method and device based on evanescent wave illumination | |
| CN113267252A (en) | Staring type confocal microscopic morphology spectrum four-dimensional detection system | |
| KR20210151709A (en) | Interferometric scattering microscopy | |
| WO2017210281A1 (en) | Dark field wafer nano-defect inspection system with a singular beam | |
| JP5592108B2 (en) | Interference confocal microscope and light source imaging method | |
| CN102818795A (en) | Biological fluorescence microscopic detection instrument | |
| CN105675615A (en) | High-speed large-range high-resolution imaging system | |
| CN111239155B (en) | Axial differential dark field confocal microscopic measuring device and method thereof | |
| CN110664369B (en) | Self-adaptive confocal line scanning harmonic microscopic imaging method and device | |
| CN205352958U (en) | High -speed high resolution imaging system on a large scale |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| AD01 | Patent right deemed abandoned |
Effective date of abandoning: 20230901 |
|
| AD01 | Patent right deemed abandoned |