CN111239155B - Axial differential dark field confocal microscopic measuring device and method thereof - Google Patents
Axial differential dark field confocal microscopic measuring device and method thereof Download PDFInfo
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
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- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2545—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object with one projection direction and several detection directions, e.g. stereo
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- G01N21/88—Investigating the presence of flaws or contamination
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Abstract
The invention discloses an axial differential dark field confocal microscopic measuring device and a method thereof, wherein the device comprises an annular light illumination module, an annular light scanning module and a differential confocal detection module; the three-dimensional distribution information of defects such as nano subsurface cracks, bubbles and the like is obtained by effectively separating a sample reflected signal and a scattering signal through illumination beam shaping and complementary aperture shielding detection; by differential confocal detection, the axial sensitivity, linearity and signal-to-noise ratio of the measurement system are improved, and common mode noise caused by environmental state difference, light source light intensity fluctuation, detector electrical drift and the like can be obviously restrained.
Description
Technical Field
The invention relates to the technical field of optical precision measurement, in particular to an axial differential dark field confocal microscopic measurement device and an axial differential dark field confocal microscopic measurement method.
Background
The high-performance optical element and the micro-electromechanical element are core components of modern high-end equipment, and surface morphology measurement and subsurface defect detection are required to be carried out on the high-performance optical element and the micro-electromechanical element in order to ensure the processing quality and the service reliability of the high-end equipment, so that no equipment at home and abroad can realize the functions at the same time.
The existing surface morphology nondestructive measurement technology at home and abroad mainly comprises the following steps: confocal microscopy, white light interferometry, and zoom microscopy. Compared with the other two technologies, the confocal microscopic measurement technology has the characteristics of wide applicability of a measurement sample and capability of measuring a complex sample structure, so that the confocal microscopic measurement technology is widely applied to the field of industrial detection. The subsurface defect nondestructive testing technology mainly comprises the following steps: laser modulation scattering technology, total internal reflection microscopy, optical coherence tomography, high frequency scanning acoustic microscopy, and X-ray microscopy. The method has the defects of low depth positioning precision, low signal-to-noise ratio, low detection efficiency, limited detection sample and the like.
Therefore, how to provide an axial differential dark-field confocal microscopic measuring device with high measuring precision and a method thereof is a problem to be solved by those skilled in the art.
Disclosure of Invention
In view of the above, the invention provides an axial differential dark field confocal microscopic measuring device and a method thereof, which can simultaneously acquire three-dimensional distribution information of defects such as nano-scale surface scratches, abrasion, subsurface cracks, bubbles and the like, have integrated detection functions of surface and subsurface defects, and solve the defects of various measuring technologies in the prior art.
In order to achieve the above purpose, the present invention adopts the following technical scheme:
an axial differential dark field confocal microscopy measurement apparatus comprising: the device comprises an annular light illumination module, an annular light scanning module and a differential confocal detection module;
the annular light illumination module sequentially comprises the following components according to the light propagation direction: the device comprises a laser, a beam expander, a first polaroid, a concave conical lens and a first semi-reflective semi-permeable membrane;
the annular light scanning module sequentially comprises the following components according to the light propagation direction: the two-dimensional scanning galvanometer, the scanning lens, the tube mirror and the objective lens;
the differential confocal detection module includes: the second semi-reflecting semi-permeable membrane and the detection light path; the detection light path comprises a transmission light path unit and a reflection light path unit;
the transmission light path unit sequentially comprises: a first diaphragm, a second polarizing plate, a first focusing lens, a first pinhole and a first camera;
the reflection light path unit sequentially comprises: a second diaphragm, a third polarizing plate, a second focusing lens, a second pinhole and a second camera;
the first semi-reflecting and semi-permeable membrane and the second semi-reflecting and semi-permeable membrane are correspondingly arranged;
the light beam transmitted through the first semi-reflecting and semi-transmitting membrane reaches the two-dimensional scanning vibrating mirror, and the light beam reflected through the first semi-reflecting and semi-transmitting membrane reaches the second semi-reflecting and semi-transmitting membrane.
Preferably, the base angles α of the front and rear surfaces of the concave conical lens are the same, and the outer diameter of the shaped Gaussian beam after shaping into annular light is matched with the entrance pupil of the objective lens.
Preferably, the scan lens working surface should be placed at the front focal plane of the tube mirror.
Preferably, the sample to be measured is disposed in front of the objective lens, and the annular light is focused on the sample to be measured after entering the objective lens.
Preferably, the apertures of the first diaphragm and the second diaphragm are complementarily matched with the annular light aperture generated by the concave conical lens, the first diaphragm and the second diaphragm completely shade the reflected light beam from the sample to be detected, and only the scattered light carrying the information of the sample to be detected is allowed to enter a subsequent detection light path.
Preferably, in the transmission light path unit, the transmission light beam is focused to a near-defocus plane, passes through the pinhole one and is collected by the camera one;
in the reflection light path unit, the reflection light beam is focused to a position far away from a focal plane, passes through a pinhole II and is collected by the camera II, and the device has a light path layout of differential detection;
the near defocus plane is located between the first focusing lens and the first pinhole, and the far defocus plane is located between the second pinhole and the second camera.
An axial differential dark field confocal microscopic measurement method specifically comprises the following steps:
s1, amplifying the beam diameter of a parallel laser beam emitted by a laser through a beam expander, changing the beam diameter into linearly polarized light through a first polarizing plate, and shaping a Gaussian beam into an annular beam after the linearly polarized light passes through a concave conical lens; the linear polarization annular light beam is transmitted through the semi-reflective semi-transparent film I, is reflected by the two-dimensional scanning vibrating mirror, is focused to the front focal plane of the tube mirror through the scanning lens, generates an annular parallel light beam to enter the objective lens through the tube mirror, forms a focusing light spot on the sample to be tested, and realizes annular light illumination of the sample to be tested;
s2, controlling deflection of the two-dimensional scanning vibrating mirror to enable a focusing light spot to perform two-dimensional scanning on the sample to be detected, wherein scattered light and reflected light of the sample to be detected sequentially pass through the objective lens, the tube lens, the scanning lens and the two-dimensional scanning vibrating mirror and are reflected by the semi-reflective semi-transparent film, so that annular light scanning of the sample to be detected is achieved;
s3, dividing the light beam entering the semi-reflective semi-transparent film II from the incident semi-reflective semi-transparent film I into two paths of detection light beams:
in the transmission light path, light beams pass through a first diaphragm, direct reflected light of the sample to be detected is shielded and filtered, scattered light of the sample to be detected is focused to a near-defocusing plane through a second polarizing plate and a first focusing lens in sequence, and the scattered light is collected by a first camera through a first pinhole;
in the reflection light path, the light beam passes through a diaphragm II, the direct reflected light of the sample to be detected is shielded and filtered, and the scattered light of the sample to be detected is focused to a position far away from a focal plane through a polarizer III and a focusing lens II in sequence and is collected by a camera II through a pinhole II; completing differential confocal detection of the sample to be detected;
s4, moving the sample to be measured in the vertical direction, and performing transverse two-dimensional scanning on different axial positions of the sample to be measured to realize the three-dimensional microscopic measurement of the sample to be measured.
Compared with the prior art, the invention discloses an axial differential dark field confocal microscopic measuring device, which has the following beneficial effects:
firstly, the invention uses the concave cone lens to shape Gaussian beam into annular beam, utilizes annular light illumination with proper aperture and complementary aperture shielding detection to effectively separate sample reflection signal and scattering signal, overcomes the defect of subsurface defect of traditional confocal measurement sample, and realizes nanoscale high-precision detection of subsurface defect of high-performance optical element and micro-electromechanical element;
and secondly, the invention scans the detected object by utilizing two paths of detection light paths before and after the focus, and performs differential processing to perform differential detection. The differential confocal optical path layout and detection improves the axial sensitivity, linearity and signal-to-noise ratio of the measuring system, and common mode noise caused by environmental state difference, light source light intensity fluctuation, detector electrical drift and the like can be obviously restrained.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are required to be used in the embodiments or the description of the prior art will be briefly described below, and it is obvious that the drawings in the following description are only embodiments of the present invention, and that other drawings can be obtained according to the provided drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic structural diagram of an axial differential dark field confocal microscopic measuring device provided by the invention.
In the figure: the device comprises a laser 1, a beam expander 2, a polarizing plate 3, a concave conical lens 4, a semi-reflective semi-transparent film 5, a two-dimensional scanning galvanometer 6, a scanning lens 7, a tube lens 8, an objective lens 9, a sample 10, a semi-reflective semi-transparent film 11, a diaphragm 12, a polarizing plate 13, a focusing lens 14, a pinhole 15, a camera 16, a diaphragm 17, a polarizing plate 18, a focusing lens 19, a pinhole 20 and a camera 21.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The embodiment of the invention discloses an axial differential dark field confocal microscopic measuring device, which comprises: the device comprises an annular light illumination module, an annular light scanning module and a differential confocal detection module;
the annular light illumination module sequentially comprises the following components according to the light propagation direction: the device comprises a laser 1, a beam expander 2, a first polaroid 3, a concave conical lens 4 and a first semi-reflective and semi-permeable membrane 5;
the annular light scanning module sequentially comprises the following components according to the light propagation direction: a two-dimensional scanning galvanometer 6, a scanning lens 7, a tube mirror 8 and an objective lens 9;
the differential confocal detection module includes: a second semi-reflective semi-transparent membrane 11 and a detection light path; the detection light path comprises a transmission light path unit and a reflection light path unit;
the transmission light path unit sequentially comprises: a first diaphragm 12, a second polarizing plate 13, a first focusing lens 14, a first pinhole 15 and a first camera 16;
the reflection light path unit sequentially comprises: a second diaphragm 17, a third polarizing plate 18, a second focusing lens 19, a second pinhole 20 and a second camera 21;
the first semi-reflecting and semi-transmitting membrane 5 and the second semi-reflecting and semi-transmitting membrane 11 are correspondingly arranged;
the light beam transmitted through the first semi-reflecting and semi-transmitting membrane 5 reaches the two-dimensional scanning galvanometer 6, and the light beam reflected by the first semi-reflecting and semi-transmitting membrane 5 reaches the second semi-reflecting and semi-transmitting membrane 11.
In order to further implement the above technical solution, the base angles α of the front and rear surfaces of the concave conical lens 4 are the same, and the outer diameter of the gaussian beam after shaping into annular light matches the entrance pupil of the objective lens 9.
To further implement the above solution, the working surface of the scanning lens 7 should be placed at the front focal surface of the tube mirror 8.
In order to further implement the above technical solution, the sample to be measured 10 is disposed in front of the objective lens 9, and the annular light is focused on the sample to be measured 10 after entering the objective lens 9.
In order to further implement the above technical solution, the apertures of the first diaphragm 12 and the second diaphragm 17 are complementarily matched with the aperture of the annular light generated by the concave conical lens 4, the first diaphragm 12 and the second diaphragm 17 completely shade the reflected light beam from the sample 10 to be detected, only the scattered light carrying the information of the sample 10 to be detected is allowed to enter the subsequent detection light path, and the reflected signal and the scattered signal from the sample to be detected are effectively separated.
In order to further implement the above technical solution, in the transmission light path unit, the transmission light beam is focused to a near-defocus plane, passes through the pinhole one 15 and is collected by the camera one 16;
in the reflected light path unit, the reflected light beam is focused to a position far away from the focal plane, passes through the pinhole 20 and is collected by the camera 21, and the device has a light path layout of differential detection;
the near defocus plane is located between the first focusing lens 14 and the first pinhole 15, and the far defocus plane is located between the second pinhole 20 and the second camera 21.
It should be noted that:
the first camera 16 is closely attached to the first pinhole 15; the second camera 21 is closely attached to the second pinhole 20; the device has a differential detection optical path layout due to the two optical path units, namely a reflection optical path and a transmission optical path.
An axial differential dark field confocal microscopic measurement method specifically comprises the following steps:
s1, a parallel laser beam emitted by a laser 1 is amplified by a beam expander 2 in beam diameter and then is changed into linearly polarized light by a polarizing plate I3, and a Gaussian beam is shaped into an annular beam after passing through a concave conical lens 4; the linear polarized annular light beam is transmitted through the semi-reflective semi-transparent film I5, reflected by the two-dimensional scanning galvanometer 6, focused to the front focal surface of the tube mirror 8 through the scanning lens 7, and is incident into the objective lens 9 through the tube mirror 8 to generate an annular parallel light beam, so that a focusing light spot is formed on the sample 10 to be tested, and annular light illumination of the sample 10 to be tested is realized;
s2, controlling deflection of a two-dimensional scanning galvanometer 6 to enable a focusing light spot to perform two-dimensional scanning on a sample 10 to be detected, wherein scattered light and reflected light of the sample 10 to be detected sequentially pass through an objective lens 9, a tube lens 8, a scanning lens 7 and the two-dimensional scanning galvanometer 6 and are reflected by a semi-reflective semi-transparent film I5, so that annular light scanning of the sample 10 to be detected is achieved;
s3, the light beam entering the semi-reflective semi-transparent film II 11 from the incident semi-reflective semi-transparent film I5 is divided into two paths of detection light beams:
in the transmission light path, the light beam passes through a first diaphragm 12, direct reflected light of a sample 10 to be detected is shielded and filtered, scattered light of the sample 10 to be detected is focused to a near-defocus plane through a second polarizer 13 and a first focusing lens 14 in sequence, and is collected by a first camera 16 through a first pinhole 15;
in the reflected light path, the light beam passes through a second diaphragm 17, direct reflected light of the sample 10 to be detected is shielded and filtered, scattered light of the sample 10 to be detected is focused to a position far away from a focal plane through a third polarizing plate 18 and a second focusing lens 19 in sequence, and is collected by a second camera 21 through a second pinhole 20; completing differential confocal detection of the sample 10 to be detected;
s4, moving the sample 10 to be detected in the vertical direction, and performing transverse two-dimensional scanning on different axial positions of the sample 10 to be detected, so as to realize the stereo microscopic measurement of the sample 10 to be detected.
In the present specification, each embodiment is described in a progressive manner, and each embodiment is mainly described in a different point from other embodiments, and identical and similar parts between the embodiments are all enough to refer to each other. For the device disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and the relevant points refer to the description of the method section.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (5)
1. An axial differential dark-field confocal microscopy measurement apparatus comprising: the device comprises an annular light illumination module, an annular light scanning module and a differential confocal detection module;
the annular light illumination module sequentially comprises the following components according to the light propagation direction: the device comprises a laser (1), a beam expander (2), a first polaroid (3), a concave conical lens (4) and a first semi-reflective and semi-permeable membrane (5);
the annular light scanning module sequentially comprises the following components according to the light propagation direction: a two-dimensional scanning galvanometer (6), a scanning lens (7), a tube mirror (8) and an objective lens (9);
the differential confocal detection module includes: a semi-reflective semi-permeable membrane II (11) and a detection light path; the detection light path comprises a transmission light path unit and a reflection light path unit;
the transmission light path unit sequentially comprises: a first diaphragm (12), a second polarizing plate (13), a first focusing lens (14), a first pinhole (15) and a first camera (16), wherein the transmitted light beam is focused to a near-defocus plane, passes through the first pinhole (15) and is collected by the first camera (16);
the reflection light path unit sequentially comprises: the device comprises a second diaphragm (17), a third polarizing plate (18), a second focusing lens (19), a second pinhole (20) and a second camera (21), wherein reflected light beams are focused far away from a focal plane, pass through the second pinhole (20) and are collected by the second camera (21), and the device is provided with a differential detection optical path layout;
the first semi-reflecting and semi-permeable membrane (5) and the two-dimensional scanning vibrating mirror (6) are correspondingly arranged, and the first semi-reflecting and semi-permeable membrane (5) and the second semi-reflecting and semi-permeable membrane (11) are correspondingly arranged;
the light beam transmitted through the first semi-reflecting and semi-transmitting membrane (5) reaches the two-dimensional scanning galvanometer (6), and the light beam reflected by the first semi-reflecting and semi-transmitting membrane (5) reaches the second semi-reflecting and semi-transmitting membrane (11);
the aperture of the first diaphragm (12) and the aperture of the second diaphragm (17) are complementarily matched with the annular light aperture generated by the concave conical lens (4), the first diaphragm (12) and the second diaphragm (17) completely shade the reflected light beam from the sample (10) to be detected, and only the scattered light carrying the information of the sample (10) to be detected is allowed to enter a subsequent detection light path;
the near defocus plane is located between the focusing lens one (14) and the pinhole one (15), and the far focus plane is located between the pinhole two (20) and the camera two (21).
2. An axial differential dark field confocal microscopy device according to claim 1, characterized in that the front and rear surface base angles α of the concave axicon (4) are the same, and the outer diameter of the gaussian beam after shaping into annular light matches the entrance pupil of the objective lens (9).
3. An axial differential dark-field confocal microscopy measurement device according to claim 1, characterized in that the scanning lens (7) working surface is to be placed at the front focal surface of tube mirror (8).
4. An axial differential dark-field confocal microscopy device according to claim 1, characterized in that the sample (10) to be measured is arranged in front of the objective (9), and that the annular light is focused on the sample (10) to be measured after incidence on the objective (9).
5. An axial differential dark field confocal microscopic measuring method based on the axial differential dark field confocal microscopic measuring device of any one of claims 1-4, characterized by comprising the following steps:
s1, a parallel laser beam emitted by a laser (1) is amplified by a beam expander (2) in beam diameter and then changed into linearly polarized light by a first polaroid (3), and after passing through a concave conical lens (4), a Gaussian beam is shaped into an annular beam; the linear polarization annular light beam is transmitted through the semi-reflective semi-transparent film I (5), reflected by the two-dimensional scanning vibrating mirror (6), focused to the front focal surface of the tube mirror (8) through the scanning lens (7), and is generated into an annular parallel light beam incident objective lens (9) through the tube mirror (8), so that a focusing light spot is formed on the sample (10) to be detected, and annular light illumination of the sample (10) to be detected is realized;
s2, controlling deflection of the two-dimensional scanning vibrating mirror (6) to enable a focusing light spot to perform two-dimensional scanning on the sample (10) to be detected, wherein scattered light and reflected light of the sample (10) to be detected sequentially pass through the objective lens (9), the tube mirror (8), the scanning lens (7) and the two-dimensional scanning vibrating mirror (6) and are reflected by the semi-reflective semi-transparent film (5) so as to realize annular light scanning of the sample (10) to be detected;
s3, dividing the light beam entering the semi-reflecting and semi-permeable membrane II (11) from the semi-reflecting and semi-permeable membrane I (5) into two paths of detection light beams:
in the transmission light path, light beams pass through a first diaphragm (12), direct reflected light of the sample (10) to be detected is shielded and filtered, scattered light of the sample (10) to be detected is focused to a near-defocus plane through a second polaroid (13) and a first focusing lens (14) in sequence, and is collected by a first camera (16) through a first pinhole (15);
in the reflection light path, the light beam passes through a second diaphragm (17), direct reflected light of the sample (10) to be detected is shielded and filtered, scattered light of the sample (10) to be detected is focused to a position far away from a focal plane through a third polarizing plate (18) and a second focusing lens (19) in sequence, and is collected by a second camera (21) through a second pinhole (20); completing differential confocal detection of the sample (10) to be detected;
s4, moving the sample (10) to be measured in the vertical direction, and performing transverse two-dimensional scanning on different axial positions of the sample (10) to be measured, so as to realize the three-dimensional microscopic measurement of the sample (10) to be measured.
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