CN105044895B - A kind of super-resolution confocal microscopic imaging apparatus and method - Google Patents
A kind of super-resolution confocal microscopic imaging apparatus and method Download PDFInfo
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Abstract
The invention discloses a kind of super-resolution confocal microscopic imaging apparatus and method, belong to optical microphotograph imaging and Technology of Precision Measurement field, the measuring method that the device is used for, the laser for being produced by laser first is focused on testee through over shock oscillation zone plate, and inject catoptric micro objective through testee, then laser is focused at confocal pinhole by two secondary reflections, and is collected by a photodetector.The mobile of testee and catoptric micro objective in the device is completed by three-dimensional PZT and one-dimensional PZT respectively, to realize the tomography to object；The device comprehensively realizes the convergence of scanning light beam using hyperoscillating zone plate and catoptric micro objective, it is to avoid the alignment error that existing confocal imaging device is caused using multiple lens, so as to significantly improve the imaging effect of confocal imaging device.The present invention can be used for the super-resolution confocal imaging of micro devices without lens subassembly, the simple structure of device, stable performance.
Description
Technical field：
The invention belongs to optical microphotograph imaging and Technology of Precision Measurement field, and in particular to a kind of super-resolution confocal it is micro- into
As apparatus and method.
Background technology：
First confocal microscope is in nineteen fifty-five in the world, by the junior research worker for being worked in Harvard University at that time
Minsky is proposed, and U.S. patent Nos power was obtained in 1961.Based on the proposition of confocal microscopy principle, confocal microscopy into
As device can realize the perspective stereoscopic observation to transparent or semitransparent biological sample internal structure, and to industrial microstructure sample
The micro tomography measurement of surface topography, it has the advantage that compared with common wide field light microscope：Light scattering can be reduced to draw
That rises is image blurring, improves imaging resolution and imaging signal to noise ratio；Blur-free imaging can be carried out to thick, light scattering sample；Can be right
The optical characteristics of sample carries out quantitative study；Allow to use simple microcobjective etc..
The outstanding feature of confocal microscopic imaging device is detected using point illumination and point, and with axial optical tomography
Characteristic, it is typically made up of following five parts in structure：Micro optical system, scanning means, light source, detector and application are soft
Part system.Wherein, micro optical system is the core of confocal microscopic imaging device, existing confocal microscopic imaging device
In, the part is typically made up of multiple lens, to realize the focusing of scanning light beam and the imaging of testee, in such device
Lens quality drastically influence the collection effect of each point position information and its imaging in testee with the quality of debuging of system
Definition.Therefore, in order to effectively reduce the measurement error that quality causes of debuging due to imaging device, it is necessary to propose a kind of
The detection technique of above-mentioned purpose can be reached.
Additionally, confocal microscope has wide market prospects at home, but current main-stream product is relied on from external import,
Research due to China in confocal microscopy field is started late, and the development of current domestic confocal microscope is generally in low side
Level.The method for exploring raising confocal microscope image quality is extremely important.
The content of the invention：
The problem more complicated it is an object of the invention to be directed to existing confocal microscopic imaging apparatus structure, there is provided Yi Zhongjie
Structure is simple, debugs convenient super-resolution confocal microscopic imaging apparatus and method, and device synthesis is using hyperoscillating zone plate and instead
Catoptric micro objective realizes the convergence of scanning light beam, it is to avoid existing confocal imaging device debugs mistake using what multiple object lens were caused
Difference, so as to significantly improve the imaging effect of confocal imaging device.
To reach above-mentioned purpose, the present invention is adopted the following technical scheme that and is achieved：
A kind of super-resolution confocal microscopic imaging device, including it is laser, hyperoscillating zone plate, three-dimensional PZT, reflective micro-
Object lens, one-dimensional PZT, confocal pinhole and photo-detector；Wherein,
Hyperoscillating zone plate, catoptric micro objective, confocal pinhole and photo-detector are set gradually in laser transmitting terminal；
Catoptric micro objective is arranged on one-dimensional PZT；
During work, testee is arranged on three-dimensional PZT, the laser that laser sends is converged to through hyperoscillating zone plate
On testee, the transmitted light for then being produced through testee is received by catoptric micro objective, in catoptric micro objective,
Laser is focused at confocal pinhole by two secondary reflections, and is incident upon on the photosurface of photo-detector.
The present invention is further improved：Three-dimensional PZT and one-dimensional PZT are respectively used to testee and reflective micro-
The accurate displacement control of object lens.
The present invention is further improved：The feature of testee is transmission-type film object.
The present invention is further improved：Confocal pinhole is located on the focal plane of catoptric micro objective.
A kind of imaging method of super-resolution microscopic imaging device, comprises the following steps：
1) testee is determined for transmission-type film object, and testee is fixed on three-dimensional PZT；
2) laser sends laser, is converged on testee through over shock oscillation zone plate, then through testee
The transmitted light of generation is received by catoptric micro objective, and in catoptric micro objective, laser is focused on altogether by two secondary reflections
Jiao Zhenkongchu, and be incident upon on the photosurface of photo-detector；
3) focus on after the laser at confocal pinhole received by photo-detector, by the position relationship between each part come really
Determine the position of testee interior point；Wherein, three-dimensional PZT drives testee to be moved up in tri- sides of X, Y and Z, is formed
3-D scanning optical imagery；One-dimensional PZT drives catoptric micro objective to be moved in Z-direction, and testee is positioned at into reflection
In the front focal plane of formula microcobjective, and the laser of different wave length is met by being focused at confocal pinhole after light path.
Relative to prior art, beneficial effects of the present invention are：
Hyperoscillating zone plate and reflection have been used in a kind of optical system of super-resolution confocal microscopic imaging device of the present invention
Formula microcobjective, above-mentioned two element is respectively converged on testee and at confocal pinhole laser, realizes scanning laser
Focusing, the present apparatus and the difference of existing confocal microscopic imaging device are not realize the poly- of scanning light beam using lens
It is burnt；The present apparatus simplifies the structure of super-resolution confocal microscopic imaging device, can effectively reduce the alignment error of device, is conducive to carrying
The imaging effect of device high.
A kind of super-resolution confocal microscopic imaging method of the present invention, laser sends laser, through over shock oscillation zone plate by its
Converge on testee, the transmitted light for then being produced through testee is received by catoptric micro objective, reflective micro-
In object lens, laser is focused at confocal pinhole by two secondary reflections, and is incident upon on the photosurface of photo-detector；Focus on confocal
After laser at pin hole is received by photo-detector, and then determine that testee inside is each by the position relationship between each part
The position of point；Additionally, three-dimensional PZT drives testee to be moved up in tri- sides of X, Y and Z, 3-D scanning optics can be formed
Imaging；One-dimensional PZT drives catoptric micro objective to be moved in Z-direction, and testee is positioned at into catoptric micro objective
In front focal plane, and the laser of different wave length is met by being focused at confocal pinhole after light path.
Brief description of the drawings：
Fig. 1 is a kind of structural representation of super-resolution confocal microscopic imaging device of the invention；
Wherein：1-laser, 2-hyperoscillating zone plate, 3-three-dimensional PZT, 4-testee, 5-reflective micro- thing
Mirror, 6-one-dimensional PZT, 7-confocal pinhole, 8-photo-detector.
Specific embodiment：
The present invention is further detailed below in conjunction with the accompanying drawings.
As shown in figure 1, a kind of super-resolution confocal microscopic imaging device of the invention, including laser 1, hyperoscillating zone plate 2,
Three-dimensional PZT 3, catoptric micro objective 5, one-dimensional PZT 6, confocal pinhole 7 and photo-detector 8；Wherein, in the transmitting terminal of laser 1
Set gradually hyperoscillating zone plate 2, testee 4, catoptric micro objective 5, confocal pinhole 7 and photo-detector 8；Testee
4 are arranged on three-dimensional PZT 3, and catoptric micro objective 5 is arranged on one-dimensional PZT 6, by three-dimensional PZT 3 and one-dimensional PZT 6
The accurate displacement control to testee 4 and catoptric micro objective 5 is realized respectively；The laser sent by laser 1 shakes through super
Swing zone plate 2 to converge on testee 4, the transmitted light for then being produced through testee is received by catoptric micro objective 5,
In catoptric micro objective 5, laser is focused at confocal pinhole 7 by two secondary reflections, and is incident upon the photosurface of photo-detector 8
On；The feature of described testee 4 is transmission-type film object；Described confocal pinhole 7 is located at catoptric micro objective 5
On focal plane.
A kind of super-resolution confocal microscopic imaging method of the present invention, comprises the following steps：
1) testee 4 is determined for transmission-type film object, and testee 4 is fixed on three-dimensional PZT 3；
2) laser 1 sends laser, is converged on testee 4 and then through measured object through over shock oscillation zone plate 2
The transmitted light that body 4 is produced is received by catoptric micro objective 5, and in catoptric micro objective 5, laser is focused on by two secondary reflections
At confocal pinhole 7, and it is incident upon on the photosurface of photo-detector 8；
3) focus on after the laser at confocal pinhole 7 received by photo-detector 8, by the position relationship between each part come
Determine the position of the interior point of testee 4；Wherein, three-dimensional PZT 3 drives testee 4 to be moved on tri- directions of X, Y and Z
It is dynamic, form 3-D scanning optical imagery；One-dimensional PZT 6 drives catoptric micro objective to be moved in Z-direction, by testee 4
It is positioned in the front focal plane of catoptric micro objective, and meets the laser of different wave length by focusing on confocal pinhole 7 after light path
Place.
Present invention utilizes confocal microscopic imaging principle, but it is this with the difference of existing confocal microscopic imaging device
There is no lens subassembly in the optical system of device；In the present apparatus, the laser that laser sends first passes through hyperoscillating zone plate 2
Converged on testee 4, the movement of testee 4 is controlled by three-dimensional PZT 3, to realize the layer to testee 4
Analysis imaging；The laser focused on by hyperoscillating zone plate 2 is connect through the transmitted light that testee 4 is produced by catoptric micro objective 5
Receive, by two secondary reflections in catoptric micro objective 5, laser is finally focused at confocal pinhole 7, is then incident upon optical detection
On the photosurface of device 8.This embodiment realizes transparent or translucent object micro tomography and measures by a series of measure,
Super-resolution confocal microscopic imaging is realized, compared with other method, with simple structure, steady performance.
Specific embodiment of the invention is described above in association with accompanying drawing, but these explanations can not be understood to limitation
The scope of the present invention, protection scope of the present invention is limited by appended claims, any in the claims in the present invention base
Change on plinth is all protection scope of the present invention.
Claims (5)
1. a kind of super-resolution confocal microscopic imaging device, it is characterised in that：Including laser (1), hyperoscillating zone plate (2), three
Dimension PZT (3), catoptric micro objective (5), one-dimensional PZT (6), confocal pinhole (7) and ultraviolet light detector (8)；Wherein,
Laser (1) transmitting terminal set gradually hyperoscillating zone plate (2), catoptric micro objective (5), confocal pinhole (7) and
Photo-detector (8)；Catoptric micro objective (5) is arranged on one-dimensional PZT (6)；
During work, testee (4) is arranged on three-dimensional PZT (3), the laser that laser (1) sends is through hyperoscillating zone plate
(2) converge on testee (4), the transmitted light for then being produced through testee (4) is received by catoptric micro objective (5),
In catoptric micro objective (5), laser focuses on confocal pinhole (7) place by two secondary reflections, and is incident upon photo-detector (8)
Photosurface on.
2. a kind of super-resolution confocal microscopic imaging device according to claim 1, it is characterised in that：Three-dimensional PZT (3) and one
Dimension PZT (6) is respectively used to the accurate displacement control to testee (4) and catoptric micro objective (5).
3. a kind of super-resolution confocal microscopic imaging device according to claim 1, it is characterised in that：Testee (4)
It is characterized as transmission-type film object.
4. a kind of super-resolution confocal microscopic imaging device according to claim 1, it is characterised in that：In confocal pinhole (7)
The heart is located at the focal point of catoptric micro objective (5).
5. a kind of imaging method of the super-resolution confocal microscopic imaging device any one of Claims 1-4, its feature exists
In comprising the following steps：
1) determine that testee (4) is transmission-type film object, and testee (4) is fixed on three-dimensional PZT (3)；
2) laser (1) sends laser, is converged on testee (4) through over shock oscillation zone plate (2), then through tested
The transmitted light that object (4) is produced is received by catoptric micro objective (5), and in catoptric micro objective (5), laser is by twice
Reflection focuses on confocal pinhole (7) place, and is incident upon on the photosurface of photo-detector (8)；
3) focus on after the laser at confocal pinhole (7) place received by photo-detector (8), by the position relationship between each part come
Determine the position of testee (4) interior point；Wherein, three-dimensional PZT (3) drives testee (4) in tri- directions of X, Y and Z
Upper movement, forms 3-D scanning optical imagery；One-dimensional PZT (6) drives catoptric micro objective to be moved in Z-direction, will be tested
Object (4) is positioned in the front focal plane of catoptric micro objective, and meets the laser of different wave length by being focused on after light path altogether
Burnt pin hole (7) place.
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| CN106767431B (en) * | 2016-12-09 | 2019-04-16 | 西安交通大学 | A kind of confocal micro-displacement measuring device of length scanning and method |
| CN106547091B (en) * | 2017-01-12 | 2019-02-26 | 西安交通大学 | A method of large-numerical aperture Fresnel zone plate is designed by axial resolution |
| CN108519666B (en) * | 2018-06-20 | 2023-11-17 | 苏州驰鸣纳米技术有限公司 | Super long working distance imaging microscope and microscopic imaging system using same |
| CN108873287B (en) * | 2018-08-07 | 2020-06-19 | 西安交通大学 | Miniature confocal microscopic imaging device |
| CN109656019B (en) * | 2019-01-03 | 2020-08-18 | 西安交通大学 | Design method of dielectric super-oscillation ring band piece |
| CN110208936A (en) * | 2019-05-31 | 2019-09-06 | 中国计量科学研究院 | Nanoscale micrometric displacement regulation device for Laser Scanning Confocal Microscope detecting pinhole |
| CN111123496B (en) * | 2020-01-19 | 2020-11-06 | 西安交通大学 | Structure illumination rapid three-dimensional color microscopic imaging method based on Hilbert transform |
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| CN104614846A (en) * | 2015-03-03 | 2015-05-13 | 北京理工大学 | Reflection type spectral pupil differential confocal-photoacoustic microimaging device and method |
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| DE10038527A1 (en) * | 2000-08-08 | 2002-02-21 | Zeiss Carl Jena Gmbh | Arrangement to increase depth discrimination in optical imaging systems |
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| CN1758015A (en) * | 2005-11-21 | 2006-04-12 | 哈尔滨工业大学 | Reflection multilight bean confocal interference microscope having several tens nanometer lateral discriminability |
| CN101126834A (en) * | 2007-09-04 | 2008-02-20 | 西安交通大学 | In plane scanning method and system for point scanning laser confocal microscope |
| CN103256888A (en) * | 2013-05-09 | 2013-08-21 | 哈尔滨工业大学 | Super resolution moving grating confocal imaging device and confocal imaging method |
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