CN107121065A - A kind of portable phase quantitative testing device - Google Patents
A kind of portable phase quantitative testing device Download PDFInfo
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- CN107121065A CN107121065A CN201710308199.8A CN201710308199A CN107121065A CN 107121065 A CN107121065 A CN 107121065A CN 201710308199 A CN201710308199 A CN 201710308199A CN 107121065 A CN107121065 A CN 107121065A
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- phase
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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- General Physics & Mathematics (AREA)
- Microscoopes, Condenser (AREA)
Abstract
The invention discloses a kind of portable phase quantitative testing device, including light source module and phase micro-imaging module, light source module provides uniform and stable lighting source using monochromatic LED light source, collimating optics component and speculum for phase micro-imaging module, phase micro-imaging module realizes system axial quickly scanning and the constant intensity image of collection magnifying power by using flexible zoom lens, microcobjective, 4f imaging systems and camera, light intensity transmission equation is solved using the three width intensity images collected, you can obtain the phase information of object.The present apparatus need to be only installed in precision displacement table when working, you can possess phase-detection function, with it is simple in construction, be easy to carry and the features such as detection speed is fast, be particularly suitable for the application in terms of biological cell phase imaging.
Description
Technical field
The present invention relates to a kind of portable phase quantitative testing device, belong to optical measurement and 3 Dimension Image Technique field.
Technical background
Wave field, as described by Maxwell equation, the property comprising amplitude and phase is simultaneously described as space-time letter
Number.Phase is a kind of intrinsic characteristic of wavelength, and research shows the information of a quarter or so in amplitude, and about 3/4ths
Information then in phase.But in practice, existing detection device is only capable of the intensity (amplitude) of direct measurement wave field, it is impossible to
The phase of direct measurement wave field, because a kind of at present still can be with light or quantum mechanics without detector time bandwidth phase
Match somebody with somebody.These phase informations lost are most important in resurfacing, microscopy, position detection and depth survey.At present, most
Conventional phase detection techniques are interferometries, and this method can obtain amplitude and phase information simultaneously.But the technology
It is very high to the coherence requirement of light source due to needing object light and reference light to be overlapped, and interference device is complicated, measures ring
Border requires strict so that the application of interferometric method has many defects.Therefore non-interfering detection method turns into study hotspot.
The method for recovering wave surface based on ionization meter is proposed by Nobel Laureate Dennis Gabor in 1977.
Phase recuperation technique includes GSF (Gerchberg-Saxton-Fienup) iterative algorithms and based on intensity transmission equation at present
The certainty derivation algorithm of (Transport of Intensity Equation, TIE).
Phase detection techniques based on light intensity transmission equation (Transport of Intensity Equation, TIE) are
A kind of non-interfering e measurement technology.Light intensity transmission equation is actually a Some Second Order Elliptic partial differential equation, and which depict along optical axis
Quantitative relationship on direction between the variable quantity of light intensity and the phase of light wave.TIE methods only need to measurement vertical with optical axis two and arrived
Intensity in three planes, it is possible to the phase space of ripple is reconstructed by solving second order differential equation, iterative method is overcome
The shortcomings of iteration is uncertain, noise robustness is poor.Compared with interferometric method, the major advantage of TIE methods has：Non-interfering, without phase
Position unpacking, (white-light illuminating) low to light source requirements, optical texture are simple, low to experimental situation requirement.
Light intensity transmission equation method needs to gather the intensity signal on different defocus faces, as shown in Figure 1.Traditional method is all
It is that different defocus positions are obtained using the method for mechanical displacement, so as to carry out the collection of intensity signal.But this method
Acquisition rate it is very low and also very high to the precise requirements of displacement, and the displacement platform of high-precision and high-stability
Cost is general also very high, it is difficult to applied to real-time measurement occasion.Flexible zoom lens (ETL) can pass through control electric current size
To realize the rapid change of focal length, so as to possess axial scan, with speed is fast, precision is high.Fig. 2 is using flexible zoom lens
(ETL) common micro imaging system, can realize the rapid axial scanning to testing sample using this structure, obtain sample
From, focus on intensity image.But this optical texture there is also it is one very big the problem of, i.e., carry out zoom during,
Image-side numerical aperture NA change and the change of image magnifying power can be caused, be to be brought not when solving light intensity transmission equation in the later stage
Just.
The content of the invention
It is an object of the invention to provide a kind of portable phase quantitative testing device, to solve the dynamic of prior art presence
State poor performance, it is complicated and be unfavorable for carry the problems such as, realize the quantitative phase of the three-dimensional transparent object of high speed, high resolution
Detection.
To reach above-mentioned purpose, the present invention is achieved through the following technical solutions：
A kind of portable phase quantitative testing device, including a light source module 1 and a phase micro-imaging module 2；
Light source module 1 include monochromatic LED light source 3, collimating optics component and speculum 7, wherein collimating optics component comprising focus lamp 4,
Diaphragm 5, collimator objective 6, wherein focus lamp 4 carry out the light emitted from monochromatic LED light source 3 to converge to diaphragm 5, and light leads to
Divergent irradiation is crossed after diaphragm 5 to collimator objective 6, diverging light is shaped to after directional light horizontal irradiation to speculum 7 by collimator objective 6
On, testing sample 8 is irradiated after being reflected vertically upward, applying aspect micro-imaging module 2 is entered through the light of testing sample 8；The phase
Position micro-imaging module 2 includes microcobjective 9, lens 10, lens 11, flexible zoom lens 12, camera 13；Through testing sample
8 light successively into microcobjective 9, the 4f imaging systems being made up of lens 10 and lens 11, light by 4f imaging systems it
Enter flexible zoom lens 12 afterwards, be finally imaged on camera 13.
The present invention compared with prior art, its remarkable advantage：(1) present invention substitutes tradition side using flexible zoom lens 12
Mechanical displacement in method obtains a series of defocus intensity images, substantially increases picking rate and the degree of accuracy, it is adaptable to dynamic
The application of imaging；(2) the phase micro-imaging module 2 in apparatus of the present invention is due in microcobjective 9 and flexible zoom lens 12
One 4f imaging system of middle insertion, and microcobjective 9 is located at the front and rear focus of 4f imaging systems with flexible zoom lens 12 respectively
Place, that is, flexible zoom lens 12 are located at the conjugate planes of microcobjective 2, so that formation is as telecentric beam path, it is ensured that
In the flexible zooming procedure of zoom lens 12, the acquired image magnifying power of camera 13 will not change, and reduce at later stage algorithm
The complexity of reason；(3) light source module 1 and phase micro-imaging module 2 in apparatus of the present invention is separate and separation mould
Block, need to only be installed in precision displacement table during work, you can for carrying out phase-detection, with it is simple in construction, portable,
The features such as easy to use and fast measuring speed.
Brief description of the drawings
Fig. 1 is the experiment device schematic diagram that traditional light intensity transmission equation is used；
Fig. 2 is the common micro imaging system containing flexible zoom lens (ETL)；
Fig. 3 is the systematic schematic diagram of portable phase quantitative testing device of the invention；
Fig. 4 is scheme of installation of the portable phase quantitative testing device in actual use；
Fig. 5 be system shown in Figure 2 microscope and flexible zoom lens (ETL) at different distances in the case of, flexibility becomes
During focus lens (ETL) zoom, the situation of change of system value aperture NA values；
Fig. 6 is system shown in Figure 4 under the different zoom conditions of flexible zoom lens (ETL), the change of system value aperture NA values
Change situation.
Embodiment
The invention discloses a kind of portable phase quantitative testing device, including light source module and phase imaging module, light
Source module provides uniform and stable lighting source for phase imaging module using monochromatic LED light source, collimating optics component, phase into
As module realized by using flexible zoom lens, microcobjective, 4f imaging systems and camera system axial quickly scanning and
The constant intensity image of magnifying power is gathered, light intensity transmission equation is solved using the three width intensity images collected, you can thing is obtained
The phase information of body.
Below in conjunction with the accompanying drawings and the present invention is discussed in detail in embodiment.
A kind of optical texture of portable phase quantitative testing device of the present invention is as shown in figure 3, including a light source module 1
With a phase micro-imaging module 2.The light source module 1 includes monochromatic LED light source 3, collimating optics component and speculum 7；
Wherein collimating optics component includes focus lamp 4, diaphragm 5, collimator objective 6, and focus lamp 4 will be emitted from monochromatic LED light source 3
Light converges to diaphragm 5, and the diaphragm 5 is used to control by aperture, improves source mass；Light passes through divergent irradiation after diaphragm 5
To collimator objective 6, diverging light is shaped to after directional light horizontal irradiation to speculum 7 by collimator objective 6, and reflected mirror 7 reflects
Testing sample 8 is irradiated afterwards, and applying aspect micro-imaging module 2 is entered through the light of testing sample 8；The phase micro-imaging module 2 is wrapped
Include microcobjective 9, lens 10, lens 11, flexible zoom lens 12, camera 13, through testing sample 8 light first by micro-
Object lens 9, subsequently enter the 4f imaging systems being made up of lens 10 and lens 11, and the lens 10 are identical with the focal length of lens 11；
Light is finally imaged on camera 13 by entering flexible zoom lens 12 after 4f imaging systems.
In actual use, the scheme of installation of portable phase quantitative testing device is as shown in figure 4, first by accurate position
Moving stage 16 is fixed on machinery mount 14, then by the phase micro-imaging module 2 in portable phase quantitative testing device with
Precision displacement table 16 is fixed, and installation process ensures the optical axis and horizontal plane of phase micro-imaging module 2, it is ensured that phase is micro-
Image-forming module 2 being capable of fine adjustment in the direction of the optical axis；Light source module 1 is fixed on the base of machinery mount 14, it is ensured that light source
The optical axis 17 of module 1 and phase micro-imaging module 2 is overlapped, and sample to be tested 8 is fixed on objective table 15, and objective table 15 is fixed on
On machinery mount 14, possesses the two-dimensional movement of X-Y both directions.
During measurement, sample to be tested 8 is placed on objective table 15 first；Subsequent adjustment precision displacement platform 16 causes phase to show
Micro- image-forming module 2 results in the more clearly image of sample to be tested 8；Accurately control flexible zoom saturating secondly by regulation electric current
Mirror 12 carries out accurate focusing and defocus, while corresponding intensity image is gathered by the camera 13 in phase micro-imaging module 2, will
Collect it is deficient it is burnt, focus on, the width intensity image of overfocus three, I is denoted as respectively+z(x,y)、I0(x,y)、I-z(x, y), their defocus
Distance is respectively Δ z, 0 ,-Δ z.Finally, the phase and elevation information of object are calculated using light intensity transmission equation, detailed process is such as
Under：
First：The axial differential of the light intensity on light intensity transmission equation (1) left sideGenerally with the intensity image collected
Diff represent
Secondly：The phase information of object can be obtained by solving equation (1)
WhereinIt is inverse Laplace's operation symbol,For gradient operator, k is wave number.
Finally：The actual height of sample to be tested 8
Wherein λ is optical wavelength, and Δ n is the specific refractivity of sample and surrounding medium.
In order to illustrate the advantage that is combined with 4f imaging systems of flexible zoom lens of the present invention, we use optical design soft
Part has carried out contrast simulation experiment.Fig. 5 be between microscope and flexible zoom lens (ETL) at different distances in the case of,
The situation of change of numerical aperture NA values during flexible zoom lens (ETL) zoom.It can be seen that in flexible zoom lens (ETL) zoom
When NA change it is very big therefore corresponding as magnifying power can also have greatly changed therewith.Fig. 6 is in flexible zoom
The index path of 4f imaging systems is added between lens 12 and microcobjective, 4 have been selected out of flexible zoom lens 12 zooming range
Individual focal length, the situation of change of the image space NA values of system, as can be seen from the figure NA value changes are very small, preferably eliminate with
Shortcoming of the magnifying power also with change when the flexible focal length of zoom lens 12 changes.
Claims (4)
1. a kind of portable phase quantitative testing device, it is characterised in that including a light source module 1 and a phase it is micro- into
As module 2；The light source module 1 is made up of monochromatic LED light source 3, collimating optics component and speculum 7, wherein collimating optics group
Part is made up of focus lamp 4, diaphragm 5 and collimator objective 6；The phase micro-imaging module 2 by microcobjective 9,4f imaging systems,
Flexible zoom lens 12 and camera 13 are constituted, and wherein 4f imaging systems are made up of lens 10 and lens 11 with identical focal length；
Operation principle is as follows：Focus lamp 4 converges to the light that monochromatic LED light source 3 is emitted on diaphragm 5, and light passes through diaphragm 5
Divergent irradiation is to collimator objective 6 afterwards, and diverging light is shaped to after directional light horizontal irradiation to speculum 7 by collimator objective 6, anti-
Testing sample 8 is irradiated after penetrating vertically upward, through testing sample 8 light after applying aspect micro-imaging module 2 is entered, successively pass through
Microcobjective 9,4f imaging systems, afterwards into flexible zoom lens 12, are finally imaged on camera 13；During measurement, pass through control
The flexible zoom lens 12 of system are accurately focused on and defocus to testing sample 8, while gathering corresponding light intensity respectively by camera 13
Image, solves light intensity transmission equation, you can obtain the phase of object by the deficient burnt, focusing collected, the width intensity image of overfocus three.
2. a kind of portable phase quantitative testing device according to claim 1, it is characterised in that：The flexible zoom is saturating
Mirror 12 is the focus adjustable lens that clear aperture is more than 10mm, additional 0 ~ 5V control voltage, focal length can quickly be adjusted to-
Some particular value in the range of 667mm ~ 286mm, the response time is less than 2.5 milliseconds.
3. a kind of portable phase quantitative testing device according to claim 1, it is characterised in that：Microcobjective 9 with it is soft
Property zoom lens 12 be strictly located at the front and rear focal points of 4f imaging systems, it is ensured that flexible zoom lens 12 are located at microcobjective 9
At conjugate planes position.
4. a kind of portable phase quantitative testing device according to claim 1, it is characterised in that：Light source module 1 and phase
Position micro-imaging module 2 is separate and separation module, need to be only installed in during work in precision displacement table, you can use
To carry out phase-detection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201710308199.8A CN107121065A (en) | 2017-05-04 | 2017-05-04 | A kind of portable phase quantitative testing device |
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| CN201710308199.8A CN107121065A (en) | 2017-05-04 | 2017-05-04 | A kind of portable phase quantitative testing device |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107796324A (en) * | 2017-11-27 | 2018-03-13 | 罗琪 | Displacement measuring device and method based on light pipe |
| CN108918465A (en) * | 2018-06-11 | 2018-11-30 | 中国科学院苏州纳米技术与纳米仿生研究所 | Optical 3-dimensional imaging system and optical 3-dimensional imaging method |
| CN110132993A (en) * | 2019-06-19 | 2019-08-16 | 中国工程物理研究院激光聚变研究中心 | A kind of device and method of quick detection optical film layer plethora defect |
| CN110658570A (en) * | 2019-10-17 | 2020-01-07 | 天津大学 | Microscope system based on liquid zoom lens and microscopic imaging method thereof |
| CN110763161A (en) * | 2019-11-22 | 2020-02-07 | 安徽大学 | Three-dimensional reconstruction data acquisition system based on intensity transmission equation |
| CN111288914A (en) * | 2020-03-31 | 2020-06-16 | 北京信息科技大学 | Digital speckle interference method and system based on spatial carrier |
| CN111413070A (en) * | 2020-04-13 | 2020-07-14 | 蔚海光学仪器（上海）有限公司 | Brightness detection device and detection method thereof |
| CN111474698A (en) * | 2020-04-30 | 2020-07-31 | 重庆邮电大学 | Double-light-source optical microscopic imaging system and image processing method |
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| CN104344793A (en) * | 2014-10-29 | 2015-02-11 | 南京理工大学 | Single-frame light intensity transmission quantitative phase microscope system and method |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107796324A (en) * | 2017-11-27 | 2018-03-13 | 罗琪 | Displacement measuring device and method based on light pipe |
| CN107796324B (en) * | 2017-11-27 | 2023-08-11 | 罗琪 | Displacement measuring device and method based on light pipe |
| CN108918465A (en) * | 2018-06-11 | 2018-11-30 | 中国科学院苏州纳米技术与纳米仿生研究所 | Optical 3-dimensional imaging system and optical 3-dimensional imaging method |
| CN110132993A (en) * | 2019-06-19 | 2019-08-16 | 中国工程物理研究院激光聚变研究中心 | A kind of device and method of quick detection optical film layer plethora defect |
| CN110132993B (en) * | 2019-06-19 | 2022-04-01 | 中国工程物理研究院激光聚变研究中心 | Device and method for rapidly detecting node defect of optical film |
| CN110658570A (en) * | 2019-10-17 | 2020-01-07 | 天津大学 | Microscope system based on liquid zoom lens and microscopic imaging method thereof |
| CN110763161A (en) * | 2019-11-22 | 2020-02-07 | 安徽大学 | Three-dimensional reconstruction data acquisition system based on intensity transmission equation |
| CN110763161B (en) * | 2019-11-22 | 2024-04-09 | 安徽大学 | Three-dimensional reconstruction data acquisition system based on intensity transmission equation |
| CN111288914A (en) * | 2020-03-31 | 2020-06-16 | 北京信息科技大学 | Digital speckle interference method and system based on spatial carrier |
| CN111413070A (en) * | 2020-04-13 | 2020-07-14 | 蔚海光学仪器（上海）有限公司 | Brightness detection device and detection method thereof |
| CN111474698A (en) * | 2020-04-30 | 2020-07-31 | 重庆邮电大学 | Double-light-source optical microscopic imaging system and image processing method |
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Application publication date: 20170901 |