CN104296686A - Smooth large-curvature sample measurement device and method based on fluorescent differential confocal technology - Google Patents
Smooth large-curvature sample measurement device and method based on fluorescent differential confocal technology Download PDFInfo
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- CN104296686A CN104296686A CN201410617215.8A CN201410617215A CN104296686A CN 104296686 A CN104296686 A CN 104296686A CN 201410617215 A CN201410617215 A CN 201410617215A CN 104296686 A CN104296686 A CN 104296686A
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Abstract
The invention discloses a smooth large-curvature sample measurement device and method based on a fluorescent differential confocal technology and relates to the technical field of optical precision measurement, in particular to a device and method for measuring the surface topography of a smooth large-curvature sample through the fluorescent differential confocal technology. The device comprises an illumination module, a first detection module, a second detection module and a coated sample. According to the method, a sample to be measured is made into the coated sample first, a fluorescent film on the surface of the sample is excited by the illumination module to emit fluorescence, the surface position of the coated sample is determined through the zero point of a differential response curve obtained by the first detection module and the second detection module, finally, a three-dimensional scanning image is formed, the film is cleaned, and the state of the sample to be measured before being coated is recovered. Through the device and method, the measurement precision and the measurement efficiency can be improved, and the measurement cost can be reduced.
Description
Technical field
Based on smooth deep camber sample measuring device and the method technical field of optical precision measurement of fluorescence differential confocal technology, be specifically related to a kind of apparatus and method utilizing differential confocal microtechnic to measure smooth deep camber sample surface morphology.
Background technology
Along with the raising that Precision Machining manufacturing requires measuring accuracy, the measurement that smooth great Qu leads mirror article and class mirror article is subject to increasing attention.When adopting optical triangle method method to measure to this type of sample, according to reflection theorem, can only be that incident ray becomes special angle direction just can receive comparatively high light signal, and due to the restriction of gleanings aperture of mirror, causing Measurement Resolution to decline, the measurement to this type of sample overall picture cannot be completed when not increasing degree of freedom.By conventional confocal microtechnic, interfere measurement technique, the scanning of fringe projection technology cooperative mechanical or multi-angle Detection Techniques, the measurement to this type of sample overall picture can be realized, but, the uncertainty that data fusion is brought introduced by mechanical scanning and multi-angle detector, and measurement cannot be completed by precise and high efficiency.
Summary of the invention
In order to solve the problem, the invention discloses a kind of smooth deep camber sample measuring device based on fluorescence differential confocal technology and method, these apparatus and method compared with the existing technology, not only can improve measuring accuracy, and measurement efficiency can be improved, measurement cost can also be reduced simultaneously.
The object of the present invention is achieved like this:
Smooth deep camber sample based on fluorescence differential confocal technology is measured, and comprising:
Lighting module, the first detecting module, the second detecting module and plated film sample:
Described lighting device is followed successively by according to illuminating light propagation direction: laser instrument, conduction optical fiber, collimating mirror, diaphragm, two-phase look mirror, object lens and three-dimensional micrometric displacement objective table;
The first described detecting module is followed successively by according to the flashlight direction of propagation: object lens, dichroic mirror, optical filter, spectroscope, collecting lens one, pin hole one and photodetector one;
The second described detecting module is followed successively by according to the flashlight direction of propagation: object lens, dichroic mirror, optical filter, spectroscope, collecting lens two, pin hole two and photodetector two;
Described lighting module, the first detecting module and the second detecting module share object lens and dichroic mirror;
The first described detecting module and the second detecting module also share optical filter and spectroscope;
Described plated film sample is the testing sample of plated surface fluorescent material film;
In described lighting module, laser instrument sends laser, directional light is formed after conduction optical fiber and collimating mirror, again after dichroic mirror reflects and object lens transmission, plated film sample forms focal beam spot, the fluorescent film on described focal beam spot excited sample surface sends fluorescence;
The fluorescence that described plated film sample surfaces the inspires mirror that is split after object lens, dichroic mirror, filter transmission is successively divided into two-beam, and light beam is collected by photodetector one through needle passing hole one, and another light beam is collected by photodetector two through needle passing hole two.
The above-mentioned smooth deep camber sample measuring device based on fluorescence differential confocal technology, described plated film sample surfaces plates one deck organic fluorescent substance by the method for evaporation and forms fluorescent film, described fluorescent film thickness is between 0.02 μm-2 μm, and the solubleness of film in water or alcohol, acetone and other organic solvent is greater than 10g/100g.
The above-mentioned smooth deep camber sample measuring device based on fluorescence differential confocal technology, laser emission wavelength scope 200nm-1200nm, illumination light luminous power after object lens is less than 1W.
The above-mentioned smooth deep camber sample measuring device based on fluorescence differential confocal technology, described pin hole one be positioned at collecting lens focal plane after Z
0place, pin hole two be positioned at collecting lens focal plane before Z
0place.
In the above-mentioned smooth deep camber sample measuring method based on fluorescence differential confocal technology based on the smooth deep camber sample measuring device of fluorescence differential confocal technology realizes, comprise the following steps:
Step a, form the organic fluorescence film of a layer thickness between 0.02 μm-2 μm by the method for evaporation on testing sample surface, make testing sample become plated film sample;
Step b, laser instrument send exciting light, directional light is formed after conduction optical fiber and collimator objective, parallel beam forms focal beam spot after dichroic mirror reflects and object lens transmission on plated film sample, and the fluorescent film on described focal beam spot excited sample surface sends fluorescence;
The fluorescence that step c, fluorescent film inspire is after photodetector one and photodetector two are collected, and two paths of signals carries out calculus of differences and obtains differential response curve, determines plated film specimen surface positions zero point by differential response curve;
Steps d, three-dimensional micrometric displacement objective table drive plated film sample three-dimensional mobile, form 3-D scanning imaging;
Step e, by water-soluble for plated film sample or alcohol, acetone and other organic solvent, cleaning film, recovers the state before testing sample plated film.
Beneficial effect: the present invention can measure smooth great Qu and lead mirror article and class minute surface object surface appearance by overall picture, compare with existing method, due to without the need in conjunction with mechanical scanning and multi-angle detector technology, therefore can avoid the uncertainty that mechanical scanning and multi-angle detector technology bring, improve measuring accuracy; Owing to saving the step of data fusion, therefore measurement efficiency can be improved; Owing to eliminating mechanical scanner or multidetector, therefore again reduce cost.
Accompanying drawing explanation
Fig. 1 is the smooth deep camber sample measuring device structural representation that the present invention is based on fluorescence differential confocal technology.
Fig. 2 is the smooth deep camber sample measuring method process flow diagram that the present invention is based on fluorescence differential confocal technology.
In figure: 1 laser instrument, 2 conduction optical fiber, 3 collimating mirrors, 4 diaphragms, 5 two-phase look mirrors, 6 object lens, 7 plated film samples, 8 three-dimensional micrometric displacement objective tables, 9 optical filters, 10 spectroscopes, 11 collecting lens one, 12 pin hole one, 13 photodetector one, 14 collecting lens two, 15 pin hole two, 16 photodetectors two.
Embodiment
According to a specific embodiment of the present invention, provide a kind of smooth deep camber sample measuring device based on fluorescence differential confocal technology, for the surface topography of smooth deep camber sample.
Please refer to Fig. 1, Fig. 1 is the embodiment schematic diagram of the smooth deep camber sample measuring device based on fluorescence differential confocal technology of the present invention.As shown in Figure 1, this device comprises lighting module, the first detecting module, the second detecting module and plated film sample.In this embodiment, lighting device is followed successively by according to illuminating light propagation direction: laser instrument 1, conduction optical fiber 2, collimating mirror 3, diaphragm 4, two-phase look mirror 5, object lens 6 and three-dimensional micrometric displacement objective table 8; First detecting module is followed successively by according to the flashlight direction of propagation: object lens 6, dichroic mirror 5, optical filter 9, spectroscope 10, collecting lens 1, pin hole 1 and photodetector 1; Second detecting module is followed successively by according to the flashlight direction of propagation: object lens 6, dichroic mirror 5, optical filter 9, spectroscope 10, collecting lens 2 14, pin hole 2 15 and photodetector 2 16.Lighting module, the first detecting module and the second detecting module share object lens 6 and dichroic mirror 5; First detecting module and the second detecting module also share optical filter 9 and spectroscope 10; Plated film sample 7 is the testing sample of plated surface fluorescent material film.
In lighting module, laser instrument 1 sends laser, directional light is formed after conduction optical fiber 2 and collimating mirror 3, again after dichroic mirror 5 reflection and object lens 6 transmission, plated film sample 7 forms focal beam spot, and the fluorescent film on described focal beam spot excited sample surface sends fluorescence; The fluorescence that plated film sample 7 surface excitation the goes out mirror 10 that is split after object lens 6, dichroic mirror 5, optical filter 9 transmission is successively divided into two-beam, light beam is collected by photodetector 1 through needle passing hole 1, and another light beam is collected by photodetector 2 16 through needle passing hole 2 15.
Plated film sample 7 surface plates one deck organic fluorescent substance by the method for evaporation and forms fluorescent film, and fluorescent film thickness is between 0.02 μm-2 μm, and the solubleness of film in water or alcohol, acetone and other organic solvent is greater than 10g/100g.Laser emission wavelength scope 200nm-1200nm, illumination light luminous power after object lens is less than 1W.Pin hole 1 be positioned at collecting lens 11 focal plane after Z
0place, pin hole 2 15 be positioned at collecting lens 14 focal plane before Z
0place.
According to a specific embodiment of the present invention, provide a kind of smooth deep camber sample measuring method based on fluorescence differential confocal technology, for the surface topography of smooth deep camber sample.
The process flow diagram of this embodiment as shown in Figure 2, comprises the following steps:
Step a, form the organic fluorescence film of a layer thickness between 0.02 μm-2 μm by the method for vacuum evaporation on testing sample surface, make testing sample become plated film sample 7;
Step b, laser instrument 1 send exciting light, directional light is formed after conduction optical fiber 2 and collimator objective 3, parallel beam reflects through dichroic mirror 5 and on plated film sample 7, forms focal beam spot after object lens 6 transmission, and the fluorescent film on described focal beam spot excited sample surface sends fluorescence;
The fluorescence that step c, fluorescent film inspire is after photodetector 1 and photodetector 2 16 are collected, and two paths of signals carries out calculus of differences and obtains differential response curve, determines plated film specimen surface positions zero point by differential response curve;
Steps d, three-dimensional micrometric displacement objective table 8 drive plated film sample 7 three-dimensional mobile, form 3-D scanning imaging;
Step e, by water-soluble for plated film sample 7 or alcohol, acetone and other organic solvent, cleaning film, recovers the state before testing sample plated film.
The present invention is not limited to above-mentioned preferred forms, and anyone should learn the structure change or method improvement made under enlightenment of the present invention, and every have identical or close technical scheme with the present invention, all falls within protection scope of the present invention.
Claims (5)
1. the smooth deep camber sample based on fluorescence differential confocal technology is measured, and it is characterized in that, comprising:
Lighting module, the first detecting module, the second detecting module and plated film sample:
Described lighting device is followed successively by according to illuminating light propagation direction: laser instrument (1), conduction optical fiber (2), collimating mirror (3), diaphragm (4), two-phase look mirror (5), object lens (6) and three-dimensional micrometric displacement objective table (8);
The first described detecting module is followed successively by according to the flashlight direction of propagation: object lens (6), dichroic mirror (5), optical filter (9), spectroscope (10), collecting lens one (11), pin hole one (12) and photodetector one (13);
The second described detecting module is followed successively by according to the flashlight direction of propagation: object lens (6), dichroic mirror (5), optical filter (9), spectroscope (10), collecting lens two (14), pin hole two (15) and photodetector two (16);
Described lighting module, the first detecting module and the second detecting module share object lens (6) and dichroic mirror (5);
The first described detecting module and the second detecting module also share optical filter (9) and spectroscope (10);
The testing sample of described plated film sample (7) the fluorescent material film that has been plated surface;
In described lighting module, laser instrument (1) sends laser, directional light is formed after conduction optical fiber (2) and collimating mirror (3), again after dichroic mirror (5) reflection and object lens (6) transmission, plated film sample (7) forms focal beam spot, and the fluorescent film on described focal beam spot excited sample surface sends fluorescence;
The fluorescence that described plated film sample (7) surface excitation the goes out mirror (10) that is split after object lens (6), dichroic mirror (5), optical filter (9) transmission is successively divided into two-beam, light beam is collected by photodetector one (13) through needle passing hole one (12), and another light beam is collected by photodetector two (16) through needle passing hole two (15).
2. the smooth deep camber sample measuring device based on fluorescence differential confocal technology according to claim 1, it is characterized in that, described plated film sample (7) surface plates one deck organic fluorescent substance by the method for evaporation and forms fluorescent film, described fluorescent film thickness is between 0.02 μm-2 μm, and the solubleness of film in water or alcohol, acetone and other organic solvent is greater than 10g/100g.
3. the smooth deep camber sample measuring device based on fluorescence differential confocal technology according to claim 1, it is characterized in that, laser emission wavelength scope 200nm-1200nm, illumination light luminous power after object lens is less than 1W.
4. the smooth deep camber sample measuring device based on fluorescence differential confocal technology according to claims 1, is characterized in that, described pin hole one (12) be positioned at collecting lens (11) focal plane after Z
0place, pin hole two (15) be positioned at collecting lens (14) focal plane before Z
0place.
5., in the smooth deep camber sample measuring method based on fluorescence differential confocal technology based on the smooth deep camber sample measuring device of fluorescence differential confocal technology realizes according to claim 1, it is characterized in that, comprise the following steps:
Step a, form the organic fluorescence film of a layer thickness between 0.02 μm-2 μm by the method for evaporation on testing sample surface, make testing sample become plated film sample (7);
Step b, laser instrument (1) send exciting light, directional light is formed after conduction optical fiber (2) and collimator objective (3), parallel beam forms focal beam spot after dichroic mirror (5) reflection and object lens (6) transmission on plated film sample (7), and the fluorescent film on described focal beam spot excited sample surface sends fluorescence;
The fluorescence that step c, fluorescent film inspire is after photodetector one (13) and photodetector two (16) are collected, two paths of signals carries out calculus of differences and obtains differential response curve, determines plated film specimen surface positions zero point by differential response curve;
Steps d, three-dimensional micrometric displacement objective table (8) drive plated film sample (7) three-dimensional mobile, form 3-D scanning imaging;
Step e, by water-soluble for plated film sample (7) or alcohol, acetone and other organic solvent, cleaning film, recovers the state before testing sample plated film.
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Cited By (10)
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| WO2016070768A1 (en) * | 2014-11-05 | 2016-05-12 | 哈尔滨工业大学 | Fluorescence confocal microscopy-based smooth large curvature sample measurement device and method |
| CN106595526A (en) * | 2016-12-28 | 2017-04-26 | 哈尔滨工业大学 | Differential measuring device and method for large-aperture free surface sample surface profile |
| CN107727003A (en) * | 2017-11-30 | 2018-02-23 | 哈尔滨工业大学 | Surface shape measurement apparatus and method based on Structured Illumination |
| CN108007382A (en) * | 2017-11-30 | 2018-05-08 | 哈尔滨工业大学 | Surface shape measurement apparatus and method based on Structured Illumination |
| CN108020173A (en) * | 2017-11-30 | 2018-05-11 | 哈尔滨工业大学 | Surface shape measurement apparatus and method based on Structured Illumination |
| CN108020505A (en) * | 2017-11-30 | 2018-05-11 | 哈尔滨工业大学 | The burnt optical tweezer microscopic imaging device of zoom copolymerization and method |
| CN108020174A (en) * | 2017-11-30 | 2018-05-11 | 哈尔滨工业大学 | Surface shape measurement apparatus and method based on Structured Illumination |
| CN108267095A (en) * | 2018-01-19 | 2018-07-10 | 北京理工大学 | The bilateral dislocation differential confocal detection method of free form surface pattern and device |
| CN108362221A (en) * | 2018-01-19 | 2018-08-03 | 北京理工大学 | A kind of free form surface pattern nano-precision detection method and device |
| CN114450554A (en) * | 2019-08-30 | 2022-05-06 | Asml荷兰有限公司 | Self-differential confocal tilt sensor for measuring horizontal variations in a charged particle beam system |
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Cited By (15)
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| WO2016070768A1 (en) * | 2014-11-05 | 2016-05-12 | 哈尔滨工业大学 | Fluorescence confocal microscopy-based smooth large curvature sample measurement device and method |
| CN106595526A (en) * | 2016-12-28 | 2017-04-26 | 哈尔滨工业大学 | Differential measuring device and method for large-aperture free surface sample surface profile |
| CN108020174A (en) * | 2017-11-30 | 2018-05-11 | 哈尔滨工业大学 | Surface shape measurement apparatus and method based on Structured Illumination |
| CN108007382A (en) * | 2017-11-30 | 2018-05-08 | 哈尔滨工业大学 | Surface shape measurement apparatus and method based on Structured Illumination |
| CN108020173A (en) * | 2017-11-30 | 2018-05-11 | 哈尔滨工业大学 | Surface shape measurement apparatus and method based on Structured Illumination |
| CN108020505A (en) * | 2017-11-30 | 2018-05-11 | 哈尔滨工业大学 | The burnt optical tweezer microscopic imaging device of zoom copolymerization and method |
| CN107727003A (en) * | 2017-11-30 | 2018-02-23 | 哈尔滨工业大学 | Surface shape measurement apparatus and method based on Structured Illumination |
| CN108007382B (en) * | 2017-11-30 | 2019-06-11 | 哈尔滨工业大学 | Surface shape measurement device and method based on Structured Illumination |
| CN108020173B (en) * | 2017-11-30 | 2019-06-11 | 哈尔滨工业大学 | Surface shape measurement device and method based on Structured Illumination |
| CN107727003B (en) * | 2017-11-30 | 2019-06-18 | 哈尔滨工业大学 | Surface shape measurement device and method based on Structured Illumination |
| CN108267095A (en) * | 2018-01-19 | 2018-07-10 | 北京理工大学 | The bilateral dislocation differential confocal detection method of free form surface pattern and device |
| CN108362221A (en) * | 2018-01-19 | 2018-08-03 | 北京理工大学 | A kind of free form surface pattern nano-precision detection method and device |
| CN108267095B (en) * | 2018-01-19 | 2019-12-17 | 北京理工大学 | Bilateral dislocation differential confocal detection method and device for free-form surface morphology |
| CN108362221B (en) * | 2018-01-19 | 2019-12-17 | 北京理工大学 | Method and device for detecting nanometer precision of free-form surface morphology |
| CN114450554A (en) * | 2019-08-30 | 2022-05-06 | Asml荷兰有限公司 | Self-differential confocal tilt sensor for measuring horizontal variations in a charged particle beam system |
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