CN104296687A - Smooth large-curvature sample measurement device and method based on fluorescent confocal microscopy - Google Patents
Smooth large-curvature sample measurement device and method based on fluorescent confocal microscopy Download PDFInfo
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- CN104296687A CN104296687A CN201410617221.3A CN201410617221A CN104296687A CN 104296687 A CN104296687 A CN 104296687A CN 201410617221 A CN201410617221 A CN 201410617221A CN 104296687 A CN104296687 A CN 104296687A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
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Abstract
The invention discloses a smooth large-curvature sample measurement device and method based on the fluorescent confocal microscopy and relates to the technical field of optical precision measurement, in particular to a device and method for measuring the surface topography of a smooth large-curvature sample through the confocal microscopy. The device comprises an illumination module, a detection module and a coated sample. According to the method, a sample to be measured is made into a coated sample, a fluorescent film on the surface of the sample is excited through the illumination module to emit fluorescence, the surface position of the coated sample is determined by the detection module through the position of the vertex of an axial response curve, finally a three-dimensional scanning image is formed, the film is cleaned, and the state of the sample to be measured before being coated is recovered. With the device and method, the measurement precision and the measurement efficiency can be improved, and the measurement cost can be reduced.
Description
Technical field
Based on smooth deep camber sample measuring device and the method technical field of optical precision measurement of fluorescent confocal microtechnic, be specifically related to a kind of apparatus and method utilizing confocal microscopy to measure smooth deep camber sample surface morphology.
Background technology
Along with the raising that Precision Machining manufacturing requires measuring accuracy, the measurement that smooth great Qu leads mirror article and class mirror article is subject to increasing attention.When adopting optical triangle method method to measure to this type of sample, according to reflection theorem, can only be that incident ray becomes special angle direction just can receive comparatively high light signal, and due to the restriction of gleanings aperture of mirror, causing Measurement Resolution to decline, the measurement to this type of sample overall picture cannot be completed when not increasing degree of freedom.By conventional confocal microtechnic, interfere measurement technique, the scanning of fringe projection technology cooperative mechanical or multi-angle Detection Techniques, the measurement to this type of sample overall picture can be realized, but, the uncertainty that data fusion is brought introduced by mechanical scanning and multi-angle detector, and measurement cannot be completed by precise and high efficiency.
Summary of the invention
In order to solve the problem, the invention discloses a kind of smooth deep camber sample measuring device based on fluorescent confocal microtechnic and method, these apparatus and method compared with the existing technology, not only can improve measuring accuracy, and measurement efficiency can be improved, measurement cost can also be reduced simultaneously.
The object of the present invention is achieved like this:
Based on the smooth deep camber sample measuring device of fluorescent confocal microtechnic, comprising:
Lighting module, detecting module and plated film sample:
Described lighting device is followed successively by according to illuminating light propagation direction: laser instrument, conduction optical fiber, collimating mirror, diaphragm, two-phase look mirror, object lens and three-dimensional micrometric displacement objective table;
Described detecting module is followed successively by according to the flashlight direction of propagation: object lens, dichroic mirror, optical filter, collecting lens, pin hole and photodetector;
Described lighting module, detecting module share object lens and dichroic mirror;
Described plated film sample is the testing sample of plated surface fluorescent material film;
In described lighting module, laser instrument sends laser, directional light is formed after conduction optical fiber and collimating mirror, again after dichroic mirror reflects and object lens transmission, plated film sample forms focal beam spot, the fluorescent film on described focal beam spot excited sample surface sends fluorescence;
The fluorescence that described plated film sample surfaces inspires, successively after object lens, dichroic mirror, optical filter, collecting lens and pin hole, is collected by photodetector.
The above-mentioned smooth deep camber sample measuring device based on fluorescent confocal microtechnic, described plated film sample surfaces plates one deck organic fluorescent substance by the method for evaporation and forms fluorescent film, described fluorescent film thickness is between 0.02 μm-2 μm, and the solubleness of film in water or alcohol, acetone and other organic solvent is greater than 10g/100g.
The above-mentioned smooth deep camber sample measuring device based on fluorescent confocal microtechnic, laser emission wavelength scope 200nm-1200nm, illumination light luminous power after object lens is less than 1W.
The above-mentioned smooth deep camber sample measuring device based on fluorescent confocal microtechnic, described pin hole is positioned on the back focal plane of collecting lens.
In the above-mentioned smooth deep camber sample measuring method based on fluorescent confocal microtechnic based on the smooth deep camber sample measuring device of fluorescent confocal microtechnic realizes, comprise the following steps:
Step a, form the organic fluorescence film of a layer thickness between 0.02 μm-2 μm by the method for evaporation on testing sample surface, make testing sample become plated film sample;
Step b, laser instrument send exciting light, directional light is formed after conduction optical fiber and collimator objective, parallel beam forms focal beam spot after dichroic mirror reflects and object lens transmission on plated film sample, and the fluorescent film on described focal beam spot excited sample surface sends fluorescence;
The fluorescence that step c, fluorescent film inspire, after photodetector is collected, determines plated film specimen surface positions by axial response curve vertex position;
Steps d, three-dimensional micrometric displacement objective table drive plated film sample three-dimensional mobile, form 3-D scanning imaging;
Step e, by water-soluble for plated film sample or alcohol, acetone and other organic solvent, cleaning film, recovers the state before testing sample plated film.
Beneficial effect: the present invention can measure smooth great Qu and lead mirror article and class minute surface object surface appearance by overall picture, compare with existing method, due to without the need in conjunction with mechanical scanning and multi-angle detector technology, therefore can avoid the uncertainty that mechanical scanning and multi-angle detector technology bring, improve measuring accuracy; Owing to saving the step of data fusion, therefore measurement efficiency can be improved; Owing to eliminating mechanical scanner or multidetector, therefore again reduce cost.
Accompanying drawing explanation
Fig. 1 is the smooth deep camber sample measuring device structural representation that the present invention is based on fluorescent confocal microtechnic.
Fig. 2 is the smooth deep camber sample measuring method process flow diagram that the present invention is based on fluorescent confocal microtechnic.
In figure: 1 laser instrument, 2 conduction optical fiber, 3 collimating mirrors, 4 diaphragms, 5 two-phase look mirrors, 6 object lens, 7 plated film samples, 8 three-dimensional micrometric displacement objective tables, 9 optical filters, 10 collecting lenses, 11 pin holes, 12 photodetectors.
Embodiment
According to a specific embodiment of the present invention, provide a kind of smooth deep camber sample measuring device based on fluorescent confocal microtechnic, for the surface topography of smooth deep camber sample.
Please refer to Fig. 1, Fig. 1 is the embodiment schematic diagram of the smooth deep camber sample measuring device based on fluorescent confocal microtechnic of the present invention.As shown in Figure 1, based on the smooth deep camber sample measuring device of fluorescent confocal microtechnic, comprising: lighting module, detecting module and plated film sample.Lighting device is followed successively by according to illuminating light propagation direction: laser instrument 1, conduction optical fiber 2, collimating mirror 3, diaphragm 4, two-phase look mirror 5, object lens 6 and three-dimensional micrometric displacement objective table 8; Detecting module is followed successively by according to the flashlight direction of propagation: object lens 6, dichroic mirror 5, optical filter 9, collecting lens 10, pin hole 11 and photodetector 12.Lighting module, detecting module share object lens 6 and dichroic mirror 5.Plated film sample 7 is the testing sample of plated surface fluorescent material film.
In lighting module, laser instrument 1 sends laser, directional light is formed after conduction optical fiber 2 and collimating mirror 3, again after dichroic mirror 5 reflection and object lens 6 transmission, plated film sample 7 forms focal beam spot, and the fluorescent film on focal beam spot excited sample surface sends fluorescence; The fluorescence that plated film sample 7 surface excitation goes out after object lens 6, dichroic mirror 5, optical filter 9, collecting lens 10 and pin hole 11, is collected by photodetector 12 successively.
Wherein plated film sample 7 surface plates one deck organic fluorescent substance by the method for evaporation and forms fluorescent film, and described fluorescent film thickness is between 0.02 μm-2 μm, and the solubleness of film in water or alcohol, acetone and other organic solvent is greater than 10g/100g.Laser emission wavelength scope 200nm-1200nm, illumination light luminous power after object lens is less than 1W.Pin hole 11 is positioned on the back focal plane of collecting lens 10.
According to a specific embodiment of the present invention, provide a kind of smooth deep camber sample measuring method based on fluorescent confocal technology, for the surface topography of smooth deep camber sample.
The process flow diagram of this embodiment as shown in Figure 2, comprises the following steps:
Step a, form the organic fluorescence film of a layer thickness between 0.02 μm-2 μm by the method for evaporation on testing sample surface, make testing sample become plated film sample 7;
Step b, laser instrument 1 send exciting light, directional light is formed after conduction optical fiber 2 and collimator objective 3, parallel beam reflects through dichroic mirror 5 and on plated film sample 7, forms focal beam spot after object lens 6 transmission, and the fluorescent film on described focal beam spot excited sample surface sends fluorescence;
The fluorescence that step c, fluorescent film inspire, after photodetector 12 is collected, determines plated film specimen surface positions by axial response curve vertex position;
Steps d, three-dimensional micrometric displacement objective table 8 drive plated film sample 7 three-dimensional mobile, form 3-D scanning imaging;
Step e, by water-soluble for plated film sample 7 or alcohol, acetone and other organic solvent, cleaning film, recovers the state before testing sample plated film.
The present invention is not limited to above-mentioned preferred forms, and anyone should learn the structure change or method improvement made under enlightenment of the present invention, and every have identical or close technical scheme with the present invention, all falls within protection scope of the present invention.
Claims (5)
1., based on the smooth deep camber sample measuring device of fluorescent confocal microtechnic, it is characterized in that, comprising:
Lighting module, detecting module and plated film sample:
Described lighting device is followed successively by according to illuminating light propagation direction: laser instrument (1), conduction optical fiber (2), collimating mirror (3), diaphragm (4), two-phase look mirror (5), object lens (6) and three-dimensional micrometric displacement objective table (8);
Described detecting module is followed successively by according to the flashlight direction of propagation: object lens (6), dichroic mirror (5), optical filter (9), collecting lens (10), pin hole (11) and photodetector (12);
Described lighting module, detecting module share object lens (6) and dichroic mirror (5);
The testing sample of described plated film sample (7) the fluorescent material film that has been plated surface;
In described lighting module, laser instrument (1) sends laser, directional light is formed after conduction optical fiber (2) and collimating mirror (3), again after dichroic mirror (5) reflection and object lens (6) transmission, plated film sample (7) forms focal beam spot, and the fluorescent film on described focal beam spot excited sample surface sends fluorescence;
The fluorescence that described plated film sample (7) surface excitation goes out, successively after object lens (6), dichroic mirror (5), optical filter (9), collecting lens (10) and pin hole (11), is collected by photodetector (12).
2. the smooth deep camber sample measuring device based on fluorescent confocal microtechnic according to claim 1, it is characterized in that, described plated film sample (7) surface plates one deck organic fluorescent substance by the method for evaporation and forms fluorescent film, described fluorescent film thickness is between 0.02 μm-2 μm, and the solubleness of film in water or alcohol, acetone and other organic solvent is greater than 10g/100g.
3. the smooth deep camber sample measuring device based on fluorescent confocal microtechnic according to claim 1, it is characterized in that, laser emission wavelength scope 200nm-1200nm, illumination light luminous power after object lens is less than 1W.
4. the smooth deep camber sample measuring device based on fluorescent confocal microtechnic according to claims 1, is characterized in that, described pin hole (11) is positioned on the back focal plane of collecting lens (10).
5., in the smooth deep camber sample measuring method based on fluorescent confocal microtechnic based on the smooth deep camber sample measuring device of fluorescent confocal microtechnic realizes according to claim 1, it is characterized in that, comprise the following steps:
Step a, form the organic fluorescence film of a layer thickness between 0.02 μm-2 μm by the method for evaporation on testing sample surface, make testing sample become plated film sample (7);
Step b, laser instrument (1) send exciting light, directional light is formed after conduction optical fiber (2) and collimator objective (3), parallel beam forms focal beam spot after dichroic mirror (5) reflection and object lens (6) transmission on plated film sample (7), and the fluorescent film on described focal beam spot excited sample surface sends fluorescence;
The fluorescence that step c, fluorescent film inspire, after photodetector (12) is collected, determines plated film specimen surface positions by axial response curve vertex position;
Steps d, three-dimensional micrometric displacement objective table (8) drive plated film sample (7) three-dimensional mobile, form 3-D scanning imaging;
Step e, by water-soluble for plated film sample (7) or alcohol, acetone and other organic solvent, cleaning film, recovers the state before testing sample plated film.
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| CN201410617221.3A CN104296687A (en) | 2014-11-05 | 2014-11-05 | Smooth large-curvature sample measurement device and method based on fluorescent confocal microscopy |
| PCT/CN2015/093580 WO2016070768A1 (en) | 2014-11-05 | 2015-11-02 | Fluorescence confocal microscopy-based smooth large curvature sample measurement device and method |
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| CN201410617221.3A CN104296687A (en) | 2014-11-05 | 2014-11-05 | Smooth large-curvature sample measurement device and method based on fluorescent confocal microscopy |
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| CN105158220A (en) * | 2015-07-01 | 2015-12-16 | 上海睿钰生物科技有限公司 | Multi-fluorescence channel synchronous microimaging method and apparatus |
| WO2016070768A1 (en) * | 2014-11-05 | 2016-05-12 | 哈尔滨工业大学 | Fluorescence confocal microscopy-based smooth large curvature sample measurement device and method |
| CN106403843A (en) * | 2016-12-09 | 2017-02-15 | 哈尔滨工业大学 | Contour scanning measurement device and method for large-aperture high-curvature optical element based on confocal microscopy |
| CN106705881A (en) * | 2016-12-12 | 2017-05-24 | 哈尔滨工业大学 | Confocal microscopy principle-based large-aperture optical element bus profile measurement method |
| CN106767510A (en) * | 2016-12-27 | 2017-05-31 | 哈尔滨工业大学 | A kind of measurement apparatus and method of heavy caliber free form surface sample surface profiles |
| CN106908017A (en) * | 2017-02-24 | 2017-06-30 | 哈尔滨工业大学 | Free-float space robot device and its measuring method based on metal human lymph node fluorescence |
| CN107036559A (en) * | 2017-05-31 | 2017-08-11 | 天津大学 | A kind of measuring method of curved surface slope |
| CN109443241A (en) * | 2018-12-07 | 2019-03-08 | 哈尔滨工业大学 | A kind of high speed axial direction scanning confocal micro-measurement apparatus and method based on tuning fork driving |
| CN109443240A (en) * | 2018-12-07 | 2019-03-08 | 哈尔滨工业大学 | A kind of laser triangulation optical measurement instrument and method based on intermediary layer scattering |
| CN109458950A (en) * | 2018-12-07 | 2019-03-12 | 哈尔滨工业大学 | A kind of servo-actuated confocal microscopy device and method of pin hole based on intermediary layer scattering |
| CN109884020A (en) * | 2018-12-19 | 2019-06-14 | 长春理工大学 | Using common focus point migration microscopic system to the non-destructive measuring method of micro/nano level Medium Wave Guide or stepped ramp type structure side wall angle |
| CN110044821A (en) * | 2019-05-22 | 2019-07-23 | 四川朴澜医疗科技有限公司 | It is a kind of for fluorescent signals detection light channel structure, optical assay device |
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| CN104279984A (en) * | 2014-11-05 | 2015-01-14 | 哈尔滨工业大学 | Two-photon-method-based device and method for measuring smooth free-form surface sample |
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| WO2016070768A1 (en) * | 2014-11-05 | 2016-05-12 | 哈尔滨工业大学 | Fluorescence confocal microscopy-based smooth large curvature sample measurement device and method |
| CN105158220A (en) * | 2015-07-01 | 2015-12-16 | 上海睿钰生物科技有限公司 | Multi-fluorescence channel synchronous microimaging method and apparatus |
| CN105158220B (en) * | 2015-07-01 | 2018-05-01 | 上海睿钰生物科技有限公司 | A kind of more fluorescence channel synchronization micro imaging methods and device |
| CN106403843A (en) * | 2016-12-09 | 2017-02-15 | 哈尔滨工业大学 | Contour scanning measurement device and method for large-aperture high-curvature optical element based on confocal microscopy |
| CN106705881A (en) * | 2016-12-12 | 2017-05-24 | 哈尔滨工业大学 | Confocal microscopy principle-based large-aperture optical element bus profile measurement method |
| CN106767510A (en) * | 2016-12-27 | 2017-05-31 | 哈尔滨工业大学 | A kind of measurement apparatus and method of heavy caliber free form surface sample surface profiles |
| CN106908017A (en) * | 2017-02-24 | 2017-06-30 | 哈尔滨工业大学 | Free-float space robot device and its measuring method based on metal human lymph node fluorescence |
| CN107036559A (en) * | 2017-05-31 | 2017-08-11 | 天津大学 | A kind of measuring method of curved surface slope |
| CN109443241A (en) * | 2018-12-07 | 2019-03-08 | 哈尔滨工业大学 | A kind of high speed axial direction scanning confocal micro-measurement apparatus and method based on tuning fork driving |
| CN109443240A (en) * | 2018-12-07 | 2019-03-08 | 哈尔滨工业大学 | A kind of laser triangulation optical measurement instrument and method based on intermediary layer scattering |
| CN109458950A (en) * | 2018-12-07 | 2019-03-12 | 哈尔滨工业大学 | A kind of servo-actuated confocal microscopy device and method of pin hole based on intermediary layer scattering |
| CN109884020A (en) * | 2018-12-19 | 2019-06-14 | 长春理工大学 | Using common focus point migration microscopic system to the non-destructive measuring method of micro/nano level Medium Wave Guide or stepped ramp type structure side wall angle |
| CN109884020B (en) * | 2018-12-19 | 2021-07-09 | 长春理工大学 | Nondestructive measurement method for micro-nano dielectric waveguide or step-type structure side wall angle by using confocal laser scanning microscope system |
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