CN107036559A - A kind of measuring method of curved surface slope - Google Patents

A kind of measuring method of curved surface slope Download PDF

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CN107036559A
CN107036559A CN201710397923.9A CN201710397923A CN107036559A CN 107036559 A CN107036559 A CN 107036559A CN 201710397923 A CN201710397923 A CN 201710397923A CN 107036559 A CN107036559 A CN 107036559A
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point
curved surface
ccd camera
slope
optical
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李杏华
邢艳蕾
房丰洲
黄银国
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Tianjin University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/26Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes

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  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

本发明公开了一种曲面斜率的测量方法,采用光学测头进行测量,所述光学测头包括激光器、孔径光阑、反射镜、分光棱镜、成像透镜和CCD相机,激光器发出的准直光束经孔径光阑缩成细直光束,细直光束经反射镜后入射到分光棱镜中,1/2能量的反射光束投射到曲面上的任意一点,该点反射的光束经分光棱镜透射后,通过成像透镜成像在CCD相机上,数据处理模块根据CCD相机中光斑的位置,计算曲面上该点的斜率信息。本发明利用自准仪的原理,针对包括平面在内的曲面,能够测得曲面上任意一点的切线斜率,对光学自由曲面形貌的检测及各种角度的测量有很大的应用空间,并且精度高,数据准确可靠。

The invention discloses a method for measuring the slope of a curved surface. The optical measuring head is used for measurement. The optical measuring head includes a laser, an aperture stop, a reflector, a beam splitting prism, an imaging lens and a CCD camera. The collimated light beam emitted by the laser passes through the The aperture diaphragm shrinks into a thin straight beam, which enters the beam splitter after passing through the reflector, and the reflected beam with 1/2 energy is projected to any point on the curved surface. The lens is imaged on the CCD camera, and the data processing module calculates the slope information of the point on the surface according to the position of the light spot in the CCD camera. The present invention utilizes the principle of the autocollimator to measure the slope of the tangent line at any point on the curved surface including the plane, and has a large application space for the detection of the shape of the optical free-form surface and the measurement of various angles, and High precision, accurate and reliable data.

Description

一种曲面斜率的测量方法A Measuring Method of Surface Slope

技术领域technical field

本发明涉及一种曲面斜率的测量方法。The invention relates to a method for measuring the slope of a curved surface.

背景技术Background technique

在机床误差检测领域中,使用较为广泛的机床误差检测仪器有激光干涉仪和球杆仪,由于自身检测原理上的因素,这些仪器在应用于多轴数控机床的误差检测中存在各自的不足:如激光干涉仪调整复杂,一次测量只能获得一个参数,操作要求高,难以实现自动化、快速化,并且价格昂贵,一般企业不具备;球杆仪无法随意规划测量路径,为旋转轴误差辨识的测量步骤设计和理论解耦算法研究增加了难度,且球杆仪以磁力座配合精密球进行接触式测量,需要在低速下运动以保证测量精度,很难适应快速化趋势。一维球列适合各轴的直线标定,但对角度误差检测不具优势,而多轴机床各轴之间的相对误差对加工精度影响非常大。In the field of machine tool error detection, widely used machine tool error detection instruments include laser interferometers and ballbars. Due to their own detection principles, these instruments have their own shortcomings in the error detection of multi-axis CNC machine tools: For example, the adjustment of the laser interferometer is complicated, and only one parameter can be obtained for one measurement. The operation requirements are high, it is difficult to realize automation and speed, and the price is expensive, which is not available in general enterprises; The design of measurement steps and the study of theoretical decoupling algorithms have increased the difficulty, and the ballbar uses a magnetic base and a precision ball for contact measurement, which needs to be moved at a low speed to ensure measurement accuracy, and it is difficult to adapt to the trend of rapidity. The one-dimensional spherical column is suitable for the linear calibration of each axis, but it has no advantage in the detection of angular errors, and the relative error between the axes of the multi-axis machine tool has a great influence on the machining accuracy.

针对复杂异型零件的加工,多轴数控加工技术凭借其灵活、高效、高精的特点得到了广泛应用和推广,为满足定期精度校准的需要,高效的机床误差检测与辨识方法就成为亟待解决的问题。For the processing of complex special-shaped parts, multi-axis CNC machining technology has been widely used and promoted due to its characteristics of flexibility, high efficiency and high precision. In order to meet the needs of regular precision calibration, efficient machine tool error detection and identification methods have become an urgent problem to be solved. question.

多轴数控机床的几何误差检测项目主要包括运动轴的角度误差、定位误差、直线度误差、垂直度误差等,为了检测运动轴的上述误差量,提出了一种基于曲面基准件的误差检测方法,采用这种方法需要检测不同面型基准件上各点的斜率,准直仪系统虽然可以对角度进行测量,但是自身光束光斑直径很大,对于测量曲面上任意一点的切线斜率来说,光斑直径越小测得的结果越接近实际测量点,因此需要针对曲面上各点的切线斜率检测开发一种曲面斜率的测量方法。The geometric error detection items of multi-axis CNC machine tools mainly include the angular error, positioning error, straightness error, and verticality error of the motion axis. In order to detect the above-mentioned errors of the motion axis, an error detection method based on a curved surface reference piece , using this method needs to detect the slope of each point on different surface-shaped reference parts. Although the collimator system can measure the angle, the diameter of its own beam spot is very large. For measuring the tangent slope of any point on the surface, the spot The smaller the diameter, the closer the measured result is to the actual measurement point. Therefore, it is necessary to develop a method for measuring the slope of the surface for the detection of the tangent slope of each point on the surface.

发明内容Contents of the invention

本发明为解决公知技术中存在的技术问题而提供一种曲面斜率的测量方法,采用该方法可以测得曲面上各点的切线斜率。The invention provides a method for measuring the slope of a curved surface in order to solve the technical problems in the known technology. The slope of the tangent line at each point on the curved surface can be measured by using the method.

本发明为解决公知技术中存在的技术问题所采取的技术方案是:一种曲面斜率的测量方法,采用光学测头进行测量,所述光学测头包括激光器、孔径光阑、反射镜、分光棱镜、成像透镜和CCD相机,所述激光器发出的准直光束经所述孔径光阑缩成细直光束,细直光束经所述反射镜后入射到所述分光棱镜中,1/2能量的反射光束投射到曲面上的任意一点,该点反射的光束经所述分光棱镜透射后,通过所述成像透镜成像在所述CCD相机上;采用所述光学测头进行测量的方法为:根据所述CCD相机中光斑的位置,计算曲面上该点的斜率信息:ξx=arctan(sox/f)/2,ξy=arctan(soy/f)/2,其中:ξx代表测量点A在XOZ平面内的切线与X轴方向的夹角;ξy代表测量点A在YOZ平面内的切线与Y轴方向的夹角;S0x代表成像光斑A′的中心在X轴方向距离系统光轴的距离;S0y代表成像光斑A′的中心在Y轴方向距离系统光轴的距离,f代表成像透镜的焦距。The technical solution adopted by the present invention to solve the technical problems existing in the known technology is: a method for measuring the slope of a curved surface, using an optical measuring head for measurement, and the optical measuring head includes a laser, an aperture diaphragm, a reflector, and a beam splitting prism , an imaging lens and a CCD camera, the collimated beam emitted by the laser is narrowed into a thin straight beam through the aperture stop, the thin straight beam is incident on the beam splitting prism after passing through the reflector, and the reflection of 1/2 energy The light beam is projected onto any point on the curved surface, and the light beam reflected by the point is transmitted through the dichroic prism and then imaged on the CCD camera through the imaging lens; the method of using the optical measuring head for measurement is: according to the The position of the light spot in the CCD camera, calculate the slope information of the point on the surface: ξ x = arctan(s ox /f)/2, ξ y = arctan(s ox /f)/2, where: ξ x represents the measurement point A The angle between the tangent line in the XOZ plane and the X-axis direction; ξ y represents the angle between the tangent line of the measurement point A in the YOZ plane and the Y-axis direction; S 0x represents the distance between the center of the imaging spot A' in the X-axis direction Axis distance; S 0y represents the distance between the center of the imaging spot A' and the optical axis of the system in the Y-axis direction, and f represents the focal length of the imaging lens.

本发明具有的优点和积极效果是:利用自准仪的原理,针对包括平面在内的曲面,能够测得曲面上任意一点的切线斜率,对光学自由曲面形貌的检测及各种角度的测量有很大的应用空间,并且精度高,数据准确可靠。The advantages and positive effects of the present invention are: using the principle of the autocollimator, for curved surfaces including planes, the slope of the tangent line at any point on the curved surface can be measured, the detection of the shape of the optical free-form surface and the measurement of various angles There is a large application space, and the precision is high, and the data is accurate and reliable.

附图说明Description of drawings

图1为本发明的结构示意图;Fig. 1 is a structural representation of the present invention;

图2为本发明的光路原理图。Fig. 2 is a schematic diagram of the optical path of the present invention.

图中:1、激光器;2、孔径光阑;3、反射镜;4、分光棱镜;5、成像透镜;6、CCD相机。In the figure: 1. Laser; 2. Aperture stop; 3. Mirror; 4. Beam splitting prism; 5. Imaging lens; 6. CCD camera.

具体实施方式detailed description

为能进一步了解本发明的发明内容、特点及功效,兹例举以下实施例,并配合附图详细说明如下:In order to further understand the invention content, characteristics and effects of the present invention, the following examples are given, and detailed descriptions are as follows in conjunction with the accompanying drawings:

请参阅图1,一种曲面斜率的测量方法,采用光学测头进行测量,所述光学测头包括激光器1、孔径光阑2、反射镜3、分光棱镜4、成像透镜5和CCD相机6。所述激光器1发出的准直光束经所述孔径光阑2缩成细直光束,细直光束经所述反射镜3后入射到所述分光棱镜4中,1/2能量的反射光束投射到曲面上的任意一点,该点反射的光束经所述分光棱镜4透射后,通过所述成像透镜5成像在所述CCD相机6上。Please refer to FIG. 1 , a method for measuring the slope of a curved surface, using an optical probe for measurement, and the optical probe includes a laser 1 , an aperture stop 2 , a mirror 3 , a beam splitting prism 4 , an imaging lens 5 and a CCD camera 6 . The collimated beam emitted by the laser 1 is narrowed into a thin straight beam by the aperture stop 2, and the thin straight beam is incident on the beam splitting prism 4 after passing through the reflector 3, and the reflected beam of 1/2 energy is projected to At any point on the curved surface, the beam reflected by the point is transmitted through the dichroic prism 4 and then imaged on the CCD camera 6 through the imaging lens 5 .

采用所述光学测头进行测量的方法为:根据所述CCD相机6中成像光斑的位置,计算曲面上该点的斜率信息:ξx=arctan(sox/f)/2,ξy=arctan(soy/f)/2,其中:ξx代表测量点A在XOZ平面内的切线与X轴方向的夹角;ξy代表测量点A在YOZ平面内的切线与Y轴方向的夹角;S0x代表成像光斑A′的中心在X轴方向距离系统光轴的距离,光轴和成像光斑在CCD相机中的像素坐标可以通过数据处理模块测量获得,通过CCD相机中像素对应的尺寸,进而可以将X轴方向的像素坐标转换为位移量S0x;S0y代表成像光斑A′的中心在Y轴方向距离系统光轴的距离,光轴和成像光斑在CCD相机中的像素坐标可以通过数据处理模块测量获得,通过CCD相机中像素对应的尺寸,进而可以将Y轴方向的像素坐标转换为位移量S0y;f代表成像透镜的焦距。The method for measuring with the optical measuring head is: according to the position of the imaging spot in the CCD camera 6, calculate the slope information of the point on the curved surface: ξ x = arctan(s ox /f)/2, ξ y =arctan (so y /f)/2, where: ξ x represents the angle between the tangent of measuring point A in the XOZ plane and the X-axis direction; ξ y represents the angle between the tangent of measuring point A in the YOZ plane and the Y-axis direction ; S 0x represents the distance of the center of the imaging spot A' from the optical axis of the system in the X-axis direction, and the pixel coordinates of the optical axis and the imaging spot in the CCD camera can be obtained by measuring the data processing module, and by the corresponding size of the pixel in the CCD camera, Furthermore, the pixel coordinates in the X-axis direction can be converted into displacement S 0x ; S 0y represents the distance between the center of the imaging spot A' and the optical axis of the system in the Y-axis direction, and the pixel coordinates of the optical axis and the imaging spot in the CCD camera can be obtained by The data processing module measures and obtains, and through the size corresponding to the pixel in the CCD camera, the pixel coordinates in the Y-axis direction can be converted into a displacement S 0y ; f represents the focal length of the imaging lens.

本发明的工作原理为:Working principle of the present invention is:

请参见图2,光束投射到曲面上任意一点时,由于各点的曲率不同,故不同测量点在CCD相机中的成像光斑位置不同,即曲面上各点切线的斜率与CCD相机中成像光斑的位置有一一对应的关系,根据CCD相机中成像光斑的位置可以求出曲面上任意一点的斜率。Please refer to Figure 2. When the light beam is projected onto any point on the curved surface, due to the different curvatures of each point, the imaging spot positions of different measurement points in the CCD camera are different, that is, the slope of the tangent line at each point on the curved surface is different from the imaging spot in the CCD camera. The position has a one-to-one correspondence, and the slope of any point on the surface can be obtained according to the position of the imaging spot in the CCD camera.

以XOZ平面为例进行说明:Take the XOZ plane as an example to illustrate:

其中:ξx代表测量点A在XOZ平面内的切线与X轴方向的夹角;Among them: ξ x represents the angle between the tangent of the measuring point A in the XOZ plane and the X-axis direction;

S0x代表成像光斑A′的中心在X轴方向距离系统光轴的距离;S 0x represents the distance from the center of the imaging spot A' to the optical axis of the system in the X-axis direction;

f代表成像透镜的焦距。f represents the focal length of the imaging lens.

通过式(1)可得:Through formula (1) can get:

ξx=arctan(sox/f)/2ξ x =arctan(s ox /f)/2

同理可得:In the same way:

ξy=arctan(soy/f)/2ξ y =arctan(s y /f)/2

因此可以获得曲面上任意一点在XOZ与YOZ平面内的斜率的信息。Therefore, the slope information of any point on the surface in the XOZ and YOZ planes can be obtained.

尽管上面结合附图对本发明的优选实施例进行了描述,但是本发明并不局限于上述的具体实施方式,上述的具体实施方式仅仅是示意性的,并不是限制性的,本领域的普通技术人员在本发明的启示下,在不脱离本发明宗旨和权利要求所保护的范围的情况下,还可以做出很多形式,这些均属于本发明的保护范围之内。Although the preferred embodiments of the present invention have been described above in conjunction with the accompanying drawings, the present invention is not limited to the above-mentioned specific embodiments. The above-mentioned specific embodiments are only illustrative and not restrictive. Those of ordinary skill in the art Under the enlightenment of the present invention, people can also make many forms without departing from the purpose of the present invention and the scope of protection of the claims, and these all belong to the protection scope of the present invention.

Claims (1)

1.一种曲面斜率的测量方法,其特征在于,采用光学测头进行测量,所述光学测头包括激光器、孔径光阑、反射镜、分光棱镜、成像透镜和CCD相机,所述激光器发出的准直光束经所述孔径光阑缩成细直光束,细直光束经所述反射镜后入射到所述分光棱镜中,1/2能量的反射光束投射到曲面上的任意一点,该点反射的光束经所述分光棱镜透射后,通过所述成像透镜成像在所述CCD相机上;1. a method for measuring the slope of a curved surface, characterized in that, an optical probe is used to measure, and the optical probe includes a laser, an aperture stop, a mirror, a beam splitting prism, an imaging lens and a CCD camera, and the laser sends The collimated beam is narrowed into a thin straight beam by the aperture stop, and the thin straight beam is incident on the beam splitting prism after passing through the reflector, and the reflected beam of 1/2 energy is projected onto any point on the curved surface, and the point reflects After the light beam is transmitted through the dichroic prism, it is imaged on the CCD camera through the imaging lens; 采用所述光学测头进行测量的方法为:根据所述CCD相机中光斑的位置,计算曲面上该点的斜率信息:The method for measuring with the optical measuring head is: according to the position of the light spot in the CCD camera, calculate the slope information of the point on the curved surface: ξx=arctan(sox/f)/2,ξ x = arctan(s ox /f)/2, ξy=arctan(soy/f)/2,ξ y =arctan(s oy /f)/2, 其中:ξx代表测量点在XOZ平面内的切线与X轴方向的夹角;Among them: ξ x represents the angle between the tangent of the measuring point in the XOZ plane and the X-axis direction; ξy代表测量点在YOZ平面内的切线与Y轴方向的夹角;ξ y represents the angle between the tangent of the measurement point in the YOZ plane and the Y-axis direction; S0x代表成像光斑的中心在X轴方向距离系统光轴的距离;S 0x represents the distance from the center of the imaging spot to the optical axis of the system in the X-axis direction; S0y代表成像光斑的中心在Y轴方向距离系统光轴的距离;S 0y represents the distance from the center of the imaging spot to the optical axis of the system in the Y-axis direction; f代表成像透镜的焦距。f represents the focal length of the imaging lens.
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