CN208223415U - A kind of non-contact 3-D face shape contourgraph - Google Patents
A kind of non-contact 3-D face shape contourgraph Download PDFInfo
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- CN208223415U CN208223415U CN201820234830.4U CN201820234830U CN208223415U CN 208223415 U CN208223415 U CN 208223415U CN 201820234830 U CN201820234830 U CN 201820234830U CN 208223415 U CN208223415 U CN 208223415U
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Abstract
Measured point normal direction need to be directed to probe the utility model discloses a kind of non-contact 3-D face shape contourgraph, when solving the problems, such as to measure using existing non-contact coordinate measuring machine so as to cause positioning accuracy reduction；Spherical shell lens are introduced on the basis of safe graceful-Green's optical interference circuit successfully builds interference optical probe, when measurement, certain point on measured piece is focused on by adjusting optic probe, measuring beam is reflected back into optical system by spherical shell lens inner surface, measuring beam enters on ccd image sensor through beam splitter reflection forms interference fringe with reference beam, and the location information of three-dimensional motion mechanism at this time is recorded by position metering device；The rear focus that adjustment three-dimensional motion mechanism successively records condenser lens focuses on the location information that other are put on measured piece, and the face shape pattern of measured piece can be obtained by data processing；Three-dimensional motion mechanism is simplified, machinery positioning error is reduced, can measure high steepness element.
Description
Technical field
The utility model belongs to technical field of optical detection, and in particular to a kind of measuring three-dimensional profile machine.
Background technique
The most common method of three dimension profile measurement is three-dimensional coordinates measurement.Three-dimensional coordinates measurement technology has versatile, automatic
The many merits such as change degree height, measurement accuracy height, are used widely in fields such as machinery, electronics.Currently, being surveyed according to three coordinates
Three coordinate measuring machine can be divided into Contacting three coordinates measurement machine and contactless three coordinate measuring machine by the form of amount machine gauge head.
Contactless three coordinate measuring machine mainly has laser point measurement and line laser structured light to measure two kinds of forms at present.For contact three
For coordinate measuring machine and non-contact laser point measurement three coordinate measuring machine, measurement process needs frequent acceleration, slows down, and makes
It is slower at measuring speed, it is easy to scratch measured piece additionally due to gauge head is directly contacted with measured piece surface.Contactless line
Laser scanning measurement acceleration and deceleration process in measurement is less, and measuring speed can be greatly improved, but since line laser is surveyed
Itself error for measuring head is greater than 3 μm, and when survey needs to adjust measured point normal direction alignment laser feeler,
Three-dimensional motion mechanism is complicated, so that its measurement accuracy sharp fall, therefore the precision measured is not high.
Utility model content
The technical issues of solution of the utility model, is: solving now to measure using existing non-contact 3-D face shape contourgraph
When need to by measured point normal direction be aligned probe so as to cause positioning accuracy reduction the problem of.
A kind of non-contact 3-D face shape contourgraph, including rack, optic probe, three-dimensional motion mechanism, display system and
Control system, the optic probe are set on the three-dimensional motion mechanism, and the three-dimensional motion mechanism is set in the rack, institute
Being connected for rack and the control system is stated, the control system is connected with the display system, wherein three maintenance and operations
Motivation structure is mutually perpendicular to translation mechanism by three and forms, one of translation mechanism vertical direction setting, on three-dimensional motion mechanism
It is provided with position metering device, is used for record position variable quantity；
It is characterized by: the optic probe is made of optical interference circuit, the optical interference circuit includes light source, collimates thoroughly
Mirror, beam splitter, imaging len, condenser lens, plane mirror, spherical shell lens, ccd image sensor；With light source side
For object space, the light that the light source issues is incident on beam splitter after being collimated collimated, and the light through beam splitter reflection is as ginseng
Light beam is examined, backtracking after the plane mirror reflection that reference light is sit upright is gathered again by beam splitter by imaging len
Coke is on ccd image sensor；Wherein ccd image sensor is connect with display system, and interference image is transmitted to display in real time
System；
Transmitted through beam splitter light as measuring beam, measuring beam focuses on the picture of condenser lens after condenser lens
Square focal point；The spherical shell lens inner surface is provided with semi-transparent semi-reflecting film, and spherical shell lens are placed on condenser lens and focus
Between the rear focus of lens, the centre of sphere of spherical shell lens is overlapped with the rear focus of condenser lens.
Based on the above-mentioned technical proposal, the utility model also provides a kind of non-contact 3-D surface shape measurement method,
When measurement, the rear focus of condenser lens is set to focus on certain point on measured piece by adjusting three-dimensional motion mechanism,
Measuring beam is reflected back into optical system by spherical shell lens inner surface, and measuring beam enters ccd image through beam splitter reflection and passes
Interference fringe is formed with reference beam on sensor, the location information of three-dimensional motion mechanism at this time is recorded by position metering device；It adjusts
The rear focus that whole three-dimensional motion mechanism successively records condenser lens focuses on the location information that other are put on measured piece, passes through number
The face shape pattern of measured piece can must be obtained according to processing.
When measuring workpiece, under the driving of three-dimensional motion mechanism, by the rear focus track of condenser lens on optic probe
Along ideal optical components curvilinear motion, is scanned by the translation shaft of vertical direction (Z axis), be tested if focal position is deviateed up and down
Behind the relative position for judging focal position and measured point by interference fringe, Z axis is moved up or down for point, until interference
Striped is ideal zero order fringe, and the location information of this measurement point is recorded by position metering device, is successively carried out on tested surface
Shape scanning in face obtains more cloud point coordinates a little, then carries out processing and surface errors fitting to point based data, after fitting
Face shape is analyzed compared with the shape of workpiece face and determines its face shape error.
The use of above-mentioned technical proposal, simplifies three-dimensional motion mechanism, so as to reduce machinery positioning error；It is emitted to
No matter the measuring beam on tested surface reflects away at any angle, original optical path can be reflected back by spherical shell lens；It can be light
It is some special that pine carries out plane, spherical surface, aspherical, free form surface and lens ring, optical element with diffraction step etc.
Element；It can measure spherical surface and deviate biggish element；Measurement accuracy is high, speed is fast.
Detailed description of the invention
Fig. 1 is optic probe schematic diagram；
Fig. 2 is the non-contact 3-D face shape contourgraph for being equipped with optic probe；
Fig. 3 is that optic probe measures some schematic diagrames on high steepness measured piece；
Fig. 4 is that optic probe measures other some schematic diagrames on high steepness measured piece；
Wherein: 1- light source, 2- collimation lens, 3- beam splitter, 4- reference beam, 5- plane mirror, 6- imaging len, 7-
Ccd image sensor, 8- measuring beam, 9- condenser lens, 10- spherical shell lens, the rear focus of 11- condenser lens, 12- are tested
Part, 13- aperture, 14- rack, 15-X axis translation mechanism, 16-Z axis translation mechanism, 17-Y axis translation mechanism, 18- control
System, 19- display system, 20- measured piece face shape topographic profile.
Specific embodiment
In order to illustrate more clearly of utility model, it is further described with reference to the accompanying drawings and embodiments
Embodiment one:
As shown in Fig. 2, a kind of non-contact 3-D face shape contourgraph, including rack 14, optic probe, three-dimensional motion machine
Structure, display system 19 and control system 18, the optic probe are set on the three-dimensional motion mechanism, the three-dimensional motion mechanism
In the rack, the rack is connected with the control system, and the control system is connected with the display system,
Wherein the three-dimensional motion mechanism is mutually perpendicular to X-axis translation mechanism 15, Y-axis translation mechanism 17 and Z axis translation mechanism by three
16 compositions, one of translation mechanism vertical direction are arranged, and position metering device are provided on three-dimensional motion mechanism, for recording
Location variation；
It is characterized by: the optic probe is made of optical interference circuit, as shown in Figure 1, the optical interference circuit includes light
Source 1, collimation lens 2, beam splitter 3, imaging len 8, condenser lens 9, plane mirror 5, spherical shell lens 10, ccd image sensing
Device 7；Using light source side as object space, the light that the light source 1 issues is incident on beam splitter after being collimated collimated, through dividing
The light of beam device reflection as reference beam 4, lead to again by backtracking after the plane mirror 5 that reference light is sit upright reflects
Beam splitter 3 is crossed to be focused on ccd image sensor 7 by imaging len 8；Wherein ccd image sensor is connect with display system, real
When interference image is transmitted to display system；
Transmitted through beam splitter light as measuring beam 8, measuring beam focuses on condenser lens after condenser lens 9
At rear focus 11；10 inner surface of spherical shell lens is provided with semi-transparent semi-reflecting film, and spherical shell lens are placed on condenser lens
Between the rear focus of condenser lens, the centre of sphere of spherical shell lens is overlapped with the rear focus of condenser lens.
When measuring workpiece, under the driving of three-dimensional motion mechanism, by the rear focus track of condenser lens on optic probe
Along ideal optical components curvilinear motion, is scanned by the translation shaft of vertical direction (Z axis), be tested if focal position is deviateed up and down
Behind the relative position for judging focal position and measured point by interference fringe, Z axis is moved up or down for point, until interference
Striped is ideal zero order fringe, and the location information of this measurement point is recorded by position metering device, is successively carried out on tested surface
Shape scanning in face obtains more cloud point coordinates a little, then carries out processing to point based data and surface errors fitting obtains measured piece face shape
Topographic profile 20 is analyzed through the face shape after fitting compared with the shape of workpiece theory face and determines its face shape error.
Embodiment two:
On the basis of above-described embodiment technical solution, as shown in Figure 1, a kind of non-contact 3-D face shape contourgraph, described
Aperture 13 is additionally provided between spherical shell lens and condenser lens.The aperture can effectively filter stray light, improve
Interference fringe quality.As shown in Figures 2 and 3, when measuring high steepness measured piece, without by the sensing point normal direction of measured piece
Data acquisition can be completed in alignment optic probe.
Embodiment three: on the basis of one technical solution of embodiment, a kind of non-contact 3-D face shape contourgraph, the three-dimensional
The position metering device being arranged on movement mechanism is grating scale or lead titanate piezoelectric ceramics (PZT) displaced position metering dress
It sets.
Example IV: on the basis of above-described embodiment technical solution, a kind of non-contact 3-D face shape contourgraph, measuring beam
After beam splitter reflection enters on ccd image sensor and forms interference fringe with reference beam, interference fringe item number is adjusted to zero
When, position metering device records the location information of three-dimensional motion mechanism at this time and the location information is sent to computer.Zero
Line acquires standard as location information, can further decrease three-dimensional motion mechanism position error.
On the basis of one technical solution of above-described embodiment, a kind of non-contact 3-D face shape contourgraph, measuring beam and reference
Light beam aplanatism.
The technical program unspecified part belongs to technology well known to those skilled in the art.
Claims (6)
1. a kind of non-contact 3-D face shape contourgraph, including rack, optic probe, three-dimensional motion mechanism, computer, display system
System, control system, the optic probe are set on the three-dimensional motion mechanism, and the three-dimensional motion mechanism is set to the rack
On, the rack is connected with the control system, and the control system is connected to a computer, wherein the three-dimensional motion machine
Structure is mutually perpendicular to translation mechanism by three and forms, one of translation mechanism vertical direction setting, is arranged on three-dimensional motion mechanism
There is position metering device, is used for record position variable quantity；
It is characterized by: the optic probe is made of optical interference circuit, the optical interference circuit includes light source, collimation lens, divides
Beam device, imaging len, condenser lens, plane mirror, spherical shell lens, ccd image sensor；Using light source side as object
Side, the light that the light source issues are incident on beam splitter after being collimated collimated, and the light through beam splitter reflection is as reference light
Beam, backtracking after the plane mirror reflection that reference light is sit upright, is focused on again by beam splitter by imaging len
On ccd image sensor；The interference image real-time transmission that wherein ccd image sensor obtains is to display system；The interference pattern
When the interference fringe item of picture is zero striped, the location information of three-dimensional motion mechanism is sent to computer by position metering device；
Transmitted through beam splitter light as measuring beam, the image space that measuring beam focuses on condenser lens after condenser lens is burnt
At point；The spherical shell lens inner surface is provided with semi-transparent semi-reflecting film, and spherical shell lens are placed on condenser lens and condenser lens
Rear focus between, the centre of sphere of spherical shell lens is overlapped with the rear focus of condenser lens.
2. a kind of non-contact 3-D face shape contourgraph according to claim 1, it is characterised in that: the spherical shell lens
Aperture is additionally provided between condenser lens.
3. a kind of non-contact 3-D face shape contourgraph according to claim 1, it is characterised in that: measuring beam and reference
Light beam aplanatism.
4. a kind of non-contact 3-D face shape contourgraph described in one of -3 according to claim 1, it is characterised in that: described three
The position metering device being arranged on dimension movement mechanism is grating scale.
5. a kind of non-contact 3-D face shape contourgraph described in one of -3 according to claim 1, it is characterised in that: described three
The position metering device being arranged on dimension movement mechanism is lead titanate piezoelectric ceramics displaced position metering device.
6. a kind of non-contact 3-D face shape contourgraph described in one of -3 according to claim 1, it is characterised in that: described is flat
Weakener is additionally provided between face reflecting mirror and beam splitter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820234830.4U CN208223415U (en) | 2018-02-09 | 2018-02-09 | A kind of non-contact 3-D face shape contourgraph |
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| CN201820234830.4U CN208223415U (en) | 2018-02-09 | 2018-02-09 | A kind of non-contact 3-D face shape contourgraph |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111102925A (en) * | 2019-12-31 | 2020-05-05 | 苏州浩智博智能科技有限公司 | Optical detection cooperation robot |
| CN112388159A (en) * | 2020-10-29 | 2021-02-23 | 青岛理工大学 | System and method for three-dimensional parallel processing and monitoring of fractional Fourier holographic femtosecond laser |
| CN113091658A (en) * | 2021-04-12 | 2021-07-09 | 广东工业大学 | Laser diffraction surface roughness profiler based on area array charge coupled device |
| CN113758442A (en) * | 2021-09-27 | 2021-12-07 | 中国科学院沈阳自动化研究所 | Non-contact type small-diameter tube inner cavity morphology detection device and method based on low coherence interference |
-
2018
- 2018-02-09 CN CN201820234830.4U patent/CN208223415U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111102925A (en) * | 2019-12-31 | 2020-05-05 | 苏州浩智博智能科技有限公司 | Optical detection cooperation robot |
| CN112388159A (en) * | 2020-10-29 | 2021-02-23 | 青岛理工大学 | System and method for three-dimensional parallel processing and monitoring of fractional Fourier holographic femtosecond laser |
| WO2022088533A1 (en) * | 2020-10-29 | 2022-05-05 | 青岛理工大学 | Fractional fourier holographic femtosecond laser three-dimensional parallel processing system and method, and fractional fourier holographic femtosecond laser three-dimensional parallel processing monitoring system |
| CN113091658A (en) * | 2021-04-12 | 2021-07-09 | 广东工业大学 | Laser diffraction surface roughness profiler based on area array charge coupled device |
| CN113758442A (en) * | 2021-09-27 | 2021-12-07 | 中国科学院沈阳自动化研究所 | Non-contact type small-diameter tube inner cavity morphology detection device and method based on low coherence interference |
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