CN207816197U - A kind of optic probe for contactless surface shape measurement - Google Patents
A kind of optic probe for contactless surface shape measurement Download PDFInfo
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- CN207816197U CN207816197U CN201820235574.0U CN201820235574U CN207816197U CN 207816197 U CN207816197 U CN 207816197U CN 201820235574 U CN201820235574 U CN 201820235574U CN 207816197 U CN207816197 U CN 207816197U
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Abstract
The utility model discloses a kind of optic probe for contactless surface shape measurement, belong to technical field of optical detection, it pops one's head in more particularly to a kind of non-contact optical, need to measured point normal direction be directed at probe when solving the problems, such as to be measured using existing non-contact probe is reduced so as to cause positioning accuracy；Spherical shell lens are introduced on the basis of safe graceful-Green's optical interference circuit successfully builds interference optical probe, when measurement, certain point on measured piece is focused on by adjusting optic probe, measuring beam is reflected back by spherical shell lens inner surface in optical system, measuring beam enters through beam splitter reflection on ccd image sensor forms interference fringe with reference beam, and the location information of motion at this time is recorded by position metering device；The rear focus that adjustment motion records condenser lens successively focuses on the location information that other are put on measured piece, and the face shape pattern of measured piece can be obtained by data processing；Motion is simplified, machinery positioning error is reduced, can measure high steepness element.
Description
Technical field
The utility model belongs to technical field of optical detection, and in particular to a kind of non-contact optical probe.
Background technology
The most common method of three dimension profile measurement is three-dimensional coordinates measurement.Three-dimensional coordinates measurement technology has versatile, automatic
The many merits such as change degree height, measurement accuracy height, are used widely in fields such as machinery, electronics.Currently, being surveyed according to three coordinates
Three coordinate measuring machine can be divided into Contacting three coordinates measurement machine and contactless three coordinate measuring machine by the form of amount machine gauge head.
Contactless three coordinate measuring machine mainly has laser point to measure and line laser structured light two kinds of forms of measurement at present.For contact three
For coordinate measuring machine and non-contact laser point measure three coordinate measuring machine, measurement process needs frequent acceleration, slows down, and makes
It is slower at measuring speed, it is easy to scratch measured piece additionally due to gauge head is directly contacted with measured piece surface.Contactless line
Laser scanning measurement acceleration and deceleration process when measuring is less, and measuring speed can be greatly improved, but since line laser is surveyed
Itself error for measuring head is more than 3 μm, and when survey needs to adjust measured point normal direction alignment laser feeler, and motion is complicated, makes
It obtains its measurement accuracy significantly to decline, therefore the precision measured is not high.
Utility model content
The technical issues of solution of the utility model is：Solving need to be by measured point when now being measured using existing non-contact probe
The problem of normal direction alignment probe reduces so as to cause positioning accuracy.
A kind of optic probe for contactless surface shape measurement, the optic probe are made of optical interference circuit, the interference
Light path includes light source, collimation lens, beam splitter, imaging len, condenser lens, plane mirror, spherical shell lens, ccd image biography
Sensor；Using light source side as object space, it is incident on beam splitter after the collimated collimated of light that the light source is sent out, through dividing
The light of beam device reflection, which is used as, refers to light beam, backtracking after the plane mirror reflection that reference light is sit upright, again by
Beam splitter is focused on by imaging len on ccd image sensor；
Transmitted through beam splitter light as measuring beam, measuring beam and reference beam aplanatism, measuring beam is by poly-
It is focused on after focus lens at the rear focus of condenser lens；The spherical shell lens inner surface is provided with semi-transparent semi-reflecting film, and ball
Shell lens are placed between condenser lens and the rear focus of condenser lens, and the centre of sphere of spherical shell lens and the image space of condenser lens are burnt
Point overlaps.
Based on the above-mentioned technical proposal, the utility model also provides a kind of non-contact 3-D surface shape measurement method, including such as
Lower step：
1) builds the step of above-mentioned interference formula optic probe；
2) builds the step of motion：The motion is for adjusting opposite position between measured piece and optic probe
It sets, the rear focus of condenser lens is made to focus on the arbitrary measurement point in measured piece surface, and be provided with position meter on the motion
Device is measured, record position variable quantity is used for；The motion can be made of two translation mechanisms and a rotating mechanism；The movement
Mechanism can also be made of three translation mechanisms；
3) scanning surveys step：When measurement, the rear focus of condenser lens is set to focus on by adjusting motion tested
Certain point on part, measuring beam are reflected back by spherical shell lens inner surface in optical system, measuring beam through beam splitter reflection into
Enter and form interference fringe with reference beam on ccd image sensor, the position of motion at this time is recorded by position metering device
Information；The rear focus that adjustment motion records condenser lens successively focuses on the location information that other are put on measured piece, leads to
The face shape pattern of measured piece can be obtained by crossing data processing.
When measuring workpiece, under the driving of motion, the rear focus track of condenser lens is along reason on optic probe
Think optical element curvilinear motion, is scanned by the translation shaft of vertical direction (Z axis), if measured point is deviateed in focal position, led to up and down
The relative position that interference fringe judges focal position and measured point is crossed, Z axis is moved up or down, until interference fringe is reason
The zero order fringe thought is recorded the location information of this measurement point by position metering device, carries out face shape scanning on tested surface successively,
Then processing and surface errors fitting are carried out to point based data, by the comparison of face shape and workpiece face shape after fitting, analysis determines
Its face shape error.
The use of above-mentioned technical proposal, simplifies motion, so as to reduce machinery positioning error；It is emitted to tested
No matter the measuring beam on face reflects away at any angle, original optical path can be reflected back by spherical shell lens；It can measure spherical surface
Deviate larger element；High certainty of measurement, speed are fast.
Description of the drawings
Fig. 1 is the optic probe schematic diagram for contactless surface shape measurement；
Fig. 2 is that optic probe measures some schematic diagrames on high steepness measured piece；
Fig. 3 is that optic probe measures other some schematic diagrames on high steepness measured piece；
Wherein：1- light sources, 2- collimation lenses, 3- beam splitters, 4- reference beams, 5- plane mirrors, 6- imaging lens, 7-
Ccd image sensor, 8- measuring beams, 9- condenser lenses, 10- spherical shell lens, the rear focus of 11- condenser lenses, 12- are tested
Part, 13- apertures.
Specific implementation mode
In order to illustrate more clearly of technical solution, it is further described with reference to the accompanying drawings and embodiments
Embodiment one：
As shown in Fig. 1, a kind of optic probe for contactless surface shape measurement, the optic probe is by optical interference circuit group
At the optical interference circuit includes light source 1, collimation lens 2, beam splitter 3, imaging len 8, condenser lens 9, plane mirror 5, ball
Shell lens 10, ccd image sensor 7；Using light source side as object space, the light that the light source 1 is sent out is collimated collimated
After be incident on beam splitter, the light through beam splitter reflection be used as refer to light beam 4, the plane mirror 5 that reference light is sit upright
Backtracking after reflection is focused on by imaging len 8 on ccd image sensor 7 again by beam splitter 3；
Transmitted through beam splitter light as measuring beam 8, measuring beam and reference beam aplanatism, measuring beam is by poly-
It is focused on after focus lens 9 at the rear focus 11 of condenser lens；10 inner surface of spherical shell lens is provided with semi-transparent semi-reflecting film,
And spherical shell lens are placed between condenser lens and the rear focus of condenser lens, the centre of sphere of spherical shell lens and the picture of condenser lens
Square focus overlaps.
Non-contact 3-D surface shape measurement method on the basis of said program, includes the following steps：
1) builds the step of above-mentioned interference formula optic probe；
2) builds the step of motion：The motion is for adjusting opposite position between measured piece and optical interference circuit
It sets, the rear focus of condenser lens is made to focus on the arbitrary measurement point in measured piece surface, and be provided with position meter on the motion
Device is measured, record position variable quantity is used for；The motion can be made of two translation mechanisms and a rotating mechanism；The movement
Mechanism can also be made of three translation mechanisms；
3) scanning surveys step：When measurement, the rear focus of condenser lens is set to focus on by adjusting motion tested
Certain point on part, measuring beam are reflected back by spherical shell lens inner surface in optical system, measuring beam through beam splitter reflection into
Enter and form interference fringe with reference beam on ccd image sensor, the position of motion at this time is recorded by position metering device
Information；The rear focus that adjustment motion records condenser lens successively focuses on the location information that other are put on measured piece, leads to
The face shape pattern of measured piece can must be obtained by crossing data processing.
The control mode of above-mentioned motion can have following several：
1. the measured piece in above-mentioned steps 2 is motionless, the motion is used for rate-determining steps 1) optic probe movement,
It completes to be measured by the surface sweeping of side part.
2. optic probe is motionless, the motion is completed to be measured by the surface sweeping of side part for controlling measured piece movement.
3. a translation mechanism in motion described in is used for rate-determining steps 1) optic probe built is along optical axis
Direction is moved, and other two motion controls measured piece movement, completes to be measured by the surface sweeping of side part.
Embodiment two：
On the basis of one technical solution of embodiment, a kind of optic probe for contactless surface shape measurement, the optics
Probe is mounted on motion, for adjusting relative position between measured piece and optic probe, and is arranged on the motion
There is position metering device, is used for record position variable quantity.
As shown in Figures 2 and 3, when measuring high steepness measured piece, it is not necessary that the sensing point normal direction of measured piece is aligned
Data acquisition can be completed in optic probe.And use zero striped of interference fringe as data acquiring location criterion, it can be with
Further increase positioning accuracy.
Embodiment three：
On the basis of one technical solution of embodiment, a kind of optic probe for contactless surface shape measurement, the movement
Mechanism is made of three translation mechanisms.Three translation mechanisms are mutually perpendicular to, and D translation motion are constituted, wherein one
A translation mechanism vertical direction setting, the distance for adjusting optic probe and measured piece vertical direction, other two translation machine
Structure is for switching measured piece and optic probe horizontal direction relative position.D translation mechanism structure is simple, and linear orientation is more accurate
Really.
Example IV：
On the basis of one technical solution of embodiment, a kind of optic probe for contactless surface shape measurement, the movement
The position metering device being arranged in mechanism is grating scale or lead titanate piezoelectric ceramics (PZT) displaced position metering device.
Embodiment five：
On the basis of above-described embodiment technical solution, as shown in Figure 1, a kind of optics for contactless surface shape measurement is visited
Head is additionally provided with aperture 13 between the spherical shell lens and condenser lens.The aperture can effectively filter miscellaneous
Astigmatism improves interference fringe quality.
Embodiment six：
On the basis of above-described embodiment technical solution, a kind of optic probe for contactless surface shape measurement, measuring beam
Through beam splitter reflection enter on ccd image sensor with reference beam formed interference fringe after, by interference fringe item number adjust to
Zero, the location information of motion at this time is recorded by position metering device.Zero striped acquires standard as location information, can be into one
Step reduces motion position error.Aplanatism can further increase positioning accuracy, reduce alignment error.
Embodiment seven：
On the basis of above-described embodiment technical solution, a kind of optic probe for contactless surface shape measurement, described is flat
It is additionally provided with weakener between face speculum 5 and beam splitter 3.Weakener can effectively adjust reference beam and measuring beam energy
Ratio is measured, intetference-fit strengthening is further increased.
The technical program unspecified part belongs to technology well known to those skilled in the art.
Claims (7)
1. a kind of optic probe for contactless surface shape measurement, which is made of optical interference circuit, the interference light
Road includes light source, collimation lens, beam splitter, imaging len, condenser lens, plane mirror, spherical shell lens, ccd image sensing
Device；Using light source side as object space, it is incident on beam splitter after the collimated collimated of light that the light source is sent out, through beam splitting
The light of device reflection, which is used as, refers to light beam, backtracking after the reflection of plane mirror that reference light is sit upright, again by point
Beam device is focused on by imaging len on ccd image sensor；
Transmitted through beam splitter light as measuring beam, measuring beam and reference beam aplanatism, measuring beam is through over-focusing
It is focused on after mirror at the rear focus of condenser lens；The spherical shell lens inner surface is provided with semi-transparent semi-reflecting film, and spherical shell is saturating
Mirror is placed between condenser lens and the rear focus of condenser lens, the centre of sphere of spherical shell lens and the rear focus weight of condenser lens
It closes.
2. a kind of optic probe for contactless surface shape measurement according to claim 1, it is characterised in that：Described
Aperture is additionally provided between spherical shell lens and condenser lens.
3. a kind of optic probe for contactless surface shape measurement according to claim 1 or 2, it is characterised in that：Also
Including motion；The optic probe is mounted on motion, opposite between measured piece and optic probe for adjusting
Position, and position metering device is provided on the motion, it is used for record position variable quantity.
4. a kind of optic probe for contactless surface shape measurement according to claim 3, it is characterised in that：Described
Motion is mutually perpendicular to translation mechanism by three and forms, one of translation mechanism vertical direction setting.
5. a kind of optic probe for contactless surface shape measurement according to claim 3, it is characterised in that：Described
The position metering device being arranged on motion is grating scale.
6. a kind of optic probe for contactless surface shape measurement according to claim 3, it is characterised in that：Described
The position metering device being arranged on motion is lead titanate piezoelectric ceramics displaced position metering device.
7. a kind of optic probe for contactless surface shape measurement according to claim 3, it is characterised in that：Described
Weakener is additionally provided between plane mirror and beam splitter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820235574.0U CN207816197U (en) | 2018-02-09 | 2018-02-09 | A kind of optic probe for contactless surface shape measurement |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820235574.0U CN207816197U (en) | 2018-02-09 | 2018-02-09 | A kind of optic probe for contactless surface shape measurement |
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| Publication Number | Publication Date |
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| CN207816197U true CN207816197U (en) | 2018-09-04 |
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| CN201820235574.0U Active CN207816197U (en) | 2018-02-09 | 2018-02-09 | A kind of optic probe for contactless surface shape measurement |
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- 2018-02-09 CN CN201820235574.0U patent/CN207816197U/en active Active
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