CN1904544B - Laser tracking interferometer - Google Patents
Laser tracking interferometer Download PDFInfo
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- CN1904544B CN1904544B CN2006101076107A CN200610107610A CN1904544B CN 1904544 B CN1904544 B CN 1904544B CN 2006101076107 A CN2006101076107 A CN 2006101076107A CN 200610107610 A CN200610107610 A CN 200610107610A CN 1904544 B CN1904544 B CN 1904544B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/08—Systems determining position data of a target for measuring distance only
- G01S17/32—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated
- G01S17/36—Systems determining position data of a target for measuring distance only using transmission of continuous waves, whether amplitude-, frequency-, or phase-modulated, or unmodulated with phase comparison between the received signal and the contemporaneously transmitted signal
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/03—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring coordinates of points
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/42—Simultaneous measurement of distance and other co-ordinates
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/66—Tracking systems using electromagnetic waves other than radio waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4811—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver
- G01S7/4812—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver transmitted and received beams following a coaxial path
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/497—Means for monitoring or calibrating
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- Engineering & Computer Science (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Networks & Wireless Communication (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
A laser tracking interferometer directs a laser beam to a retroreflector serving as an object to be measured to sense a displacement of the retroreflector using interference with a laser beam back reflected from the retroreflector as well as to track the retroreflector using a change in position of the optical axis of the laser beam. The laser tracking interferometer includes: a reference sphere disposed at a fixed location; a carriage configured to rotate about a center of the reference sphere; a laser interferometer for providing a displacement signal corresponding to a displacement of the retroreflector, and a displacement gage for providing a displacement signal corresponding to a relative displacement between the reference sphere and the displacement gage, the laser interferometer and the displacement gage being disposed on the carriage; a data processing apparatus for computing a displacement of the retroreflector with respect to the reference sphere in accordance with the displacement signal provided by the displacement gage and the displacement signal provided by the laser interferometer; a position sensitive detector for providing a position signal corresponding to the amount of deviation of a laser beam when the laser beam is reflected off the retroreflector back into the laser interferometer and deviated in a direction orthogonal to its optical axis; and a controller for controlling rotation of the carriage based on the position signal from the position detector so that the amount of deviation becomes zero. This makes the laser tracking interferometer is robust to the runout of the rotational mechanism. The laser tracking interferometer is less susceptible to flaws and dust particles on the surface of the reference sphere, and is capable of employing a relatively inexpensive reference sphere.
Description
Technical field
The present invention relates to be used for tracking moving object, and measure the displacement of this moving body or the laser tracking interferometer of position accurately.Relate to especially to retroeflector illuminating laser beam as tested body, by utilizing this retroeflector to detect the displacement of retroeflector, and utilize the improvement of the laser tracking interferometer that the change in location of the optical axis of above-mentioned laser beam follows the trail of to the interference of Return-ing direction laser light reflected bundle.
Background technology
As everyone knows, oriented retroeflector illuminating laser beam as tested body, by utilizing this retroeflector to detect the displacement of retroeflector to the interference of Return-ing direction laser light reflected bundle, and the laser tracking interferometer that utilizes the change in location of the optical axis of above-mentioned laser beam to follow the trail of
For example, in No. 6147748 instructions of United States Patent (USP) (hereinafter referred to as patent documentation 1), shown in Fig. 1 (one-piece construction) and Fig. 2 (detailed structure of laser interferometer), record the laser tracking interferometer that is used to measure as the relative displacement of the center C of the retroeflector 10 of tested body and reference sphere 12.
This laser interferometer have reference sphere 12, with the center C of this reference sphere 12 as the balladeur train 14 of center rotation, be arranged on laser interferometer 16 on this balladeur train 14, the plus lens 18 of measuring light is converged on the center C or the surface of reference sphere 12 as focus with light source (diagram is omitted).
In such structure, as shown in Figure 2, light from the light source ejaculation, inject no polarised light splitter (NPBS) 24 via optical fiber 20 and collimation lens 22, be reflected by this NPBS24 part, via polarization plates 26 and optical fiber 28, be directed to photodetector (diagram is omitted) according to count signal as the beche-de-mer without spike that is used for the crosstalk in the compensated optical fiber.And, see through the light of above-mentioned NPBS24, be divided into two bundles by polarised light splitter (PBS) 30, a branch of craspedodrome and becoming be used to obtain to measure interference of light light with reference to light.Another bundle is reflected by PBS30, via 1/4 wavelength (λ/4) plate 32 and above-mentioned plus lens 18, penetrates to the center C or the surface of above-mentioned reference sphere 12 as measuring light.
The mensuration light that is reflected on the surface of this reference sphere 12 is via above-mentioned plus lens 18, λ/4 plates 32, PBS30, λ/4 plates 34, NPBS36, the above-mentioned retroeflector 10 of directive.
By the mensuration light of these retroeflector 10 reflections, inject laser interferometer 16 once more.Inject the part of the mensuration light of laser interferometer 16, reflected, inject position detector (PSB) 38 by above-mentioned NPBS36.And remainder with reference to the interference of light, is injected above-mentioned photodetector with above-mentioned via above-mentioned λ/4 plates 34, NPBS30, polarization plates 40, optical fiber 42.
The output of photodetector owing to the interference Light Interference Streaks corresponding to incident changes, so utilize the output of this photodetector, can be measured the displacement as the retroeflector 10 of benchmark of the center C of reference sphere 12.
The surface of high-precision reference sphere 12 is owing to are high precision and certain apart from the distance of the center C of reference sphere 12, even so follow the trail of retroeflector 10 on every side under the situation of rotating of the center C of reference sphere 12 in laser interferometer 16, the center C that also can detect accurately with reference sphere 12 is the displacement of the retroeflector 10 of benchmark.
Carry out the tracking of retroeflector 10 as described below.That is, inject the mensuration light of laser interferometer 16, a part is injected PSD38, by total position that keeps necessarily controlling balladeur train 14, the position that makes the mensuration light on this PSD38, can automatically follow the trail of retroeflector 10.This is because corresponding with the displacement of the retroeflector 10 of the optical axis vertical direction of measuring light, the change in location of the mensuration light of PSD38 is injected in utilization, if retroeflector 10 produces displacement on the direction vertical with the optical axis of measuring light, then carry out displacement abreast from the optical axis of rearward penetrating the mensuration light that device 10 returns.
In No. 2603429 communique of Jap.P. (hereinafter referred to as patent documentation 2), as shown in Figure 3, record and be used to measure the converse beam 106 that becomes benchmark and as the laser tracking interferometer of the relative displacement of the converse beam (retroeflector) 110 of target.
This interferometer has: be arranged on the first converse beam 106 on the fixed position, be arranged on the second converse beam 110 on the moving body, with the above-mentioned first converse beam 106 rotating part 108 that to be the center rotate freely respectively around the X-axis of quadrature and Y-axis, to not be subjected to the lead device of this rotating part 108 of the swing of above-mentioned rotating part 108 from the laser beam that LASER Light Source (omit diagram) sends with influencing, be fixedly installed on the above-mentioned rotating part 108 by a plurality of optical components (λ/4 plates 148,164, prism 150,152,158,160,162, PBS154) optical system of Gou Chenging.
This optical system utilizes will the lead laser beam of rotating part 108 of PBS154 to cut apart, the laser beam that makes the part of having cut apart via with the light path of X-axis quadrature to above-mentioned first converse beam 106 incidents, and make of the extending direction ejaculation of the laser beam of another part along above-mentioned light path, inject the above-mentioned second converse beam 110, can obtain reflected light respectively from the above-mentioned the 1st and the 2nd converse beam 106,110.
Further, also have test section (omitting diagram), 4 segmented photodiodes (QPD) 112 and control device (figure slightly), above-mentioned this test section, it detects the amount of movement of the second converse beam 110 according to 2 catoptrical interference that obtain via above-mentioned optical system; Above-mentioned four segmented photodiodes (QPD) 112, it is fixedly installed on the above-mentioned rotating part 108, from catoptrical a part of incident of the above-mentioned second converse beam 110, and as the position detecting device of output correspondence to the position signalling of the side-play amount of the laser beam of above-mentioned second converse beam 110 incidents; Above-mentioned control device, making above-mentioned side-play amount according to the position signalling from this position detecting device is the zero X-axis of above-mentioned rotating part 108 and the position of rotation around the Y-axis controlled.
In patent disclosure 2002-98510 communique in (hereinafter referred to as patent documentation 3), disclose and yaw motion light fork (first Zhen り ?Move light て こ) is set in the light path of interference optics to replace the said reference ball, laser beam is to the center incident of the reflecting surface of this yaw motion light fork, by control yaw motion light fork, this reflection ray can be changed to any direction, with reflection ray to as irradiation of the retroeflector of measuring object and the ray tracing formula laser interference length-measuring device followed the trail of.
But, in the technology of patent documentation 1 record, (1) measuring under the situation that the center C of light with reference sphere 12 is focus and optically focused, exists the easy affected problem of diameter run-out (skew of the track of the reality that certain point when rotating mechanism rotates on the rotating mechanism draws and desirable track) with respect to rotating mechanism.That is,,, can not carry out determining displacement from the signal S/N variation that photodetector produces if the diameter run-out of rotating mechanism causes measuring the offset of the focus center of light from C.Therefore, be subjected to the influence of the diameter run-out of rotating mechanism easily.And (2) exist the flaw that is subjected to the reference field surface easily or the influence of dust under the situation of surface as focus with reference sphere 12, and especially, the diameter of focus is more little, the easy more problem that is subjected to the influence of little flaw or dust.
Even in the technology of patent documentation 2, for converse beam 106 as reference sphere, used under the situation of glass bead of Metal Ball or metallic coating, identical with patent documentation 1, also exist (1) under the situation of the center of reference sphere as focus, with respect to the diameter run-out of rotating mechanism and unreliable, (2) under the situation of the surface of reference sphere as focus, is subjected to the problem of the influence of the flaw on reference sphere surface or dust easily.
Under the situation that the ball that the material that is 2.0 to refractive index is made uses as reference sphere, the problem points of above-mentioned in addition (2), such ball is not generally sold, thus exist the price height of reference sphere, and un-come-at-able problem.
In the technology of patent documentation 3 records, under the center of laser beam and the inconsistent situation of the rotation center of catoptron, this error becomes the main cause of surveying long error, is difficult to measure accurately the center of laser beam, be difficult to make its rotation center consistent accurately with catoptron.And,,, be difficult to carry out accurate control so the friction of the hemispherical portion of the steel ball of 3 spheric seatings and catoptron becomes greatly because utilized the tension force of extension spring in place with making steel ball and hemisphere pressurization.Further, high-precision ball is made than being easier to, but high-precision hemisphere is very expensive, exists the problem that the cost of manufacture of the catoptron of semi-spherical shape rises.
Summary of the invention
The present invention is in order to eliminate the invention of above-mentioned existing problem points, purpose is to provide a kind of laser tracking interferometer, its diameter run-out with respect to rotating mechanism is reliable, and is not easy to be subjected to the influence of the flaw or the dust on reference sphere surface, also can use cheaper reference sphere.
Laser tracking interferometer of the present invention, in order to address the above problem, to retroeflector irradiation as tested body, utilize of the interference of this retroeflector to Return-ing direction laser light reflected bundle, detect the displacement of retroeflector, and utilize the variation of position of the optical axis of above-mentioned laser beam to follow the trail of, wherein, have: the reference sphere that fixedly installs; The balladeur train that rotates as the center with the center of this reference sphere; Be arranged on the laser interferometer of displacement signal of the displacement of the corresponding above-mentioned retroeflector of output on this balladeur train, and the displacement meter of displacement signal that is arranged on the relative displacement of corresponding said reference ball of output on this balladeur train and displacement meter; Calculate the data processing equipment of reference sphere by the displacement signal of this displacement meter output and the displacement signal of laser interferometer output as the displacement of the retroeflector of benchmark; From the reflection of above-mentioned retroeflector and turn back to the laser beam of laser interferometer, with the direction of its light shaft positive cross on when being offset, output is to the position detecting device of outgoing position signal that should side-play amount; According to the position signalling from this position detecting device, making above-mentioned side-play amount is the zero control device that balladeur train rotates of controlling.
Above-mentioned laser interferometer can be a Michelson interferometer.
Above-mentioned displacement meter can be arranged on the both sides of said reference ball, not be subjected to the influence of temperature change.
Above-mentioned displacement meter can be static capacity type displacement meter or eddy current type displacement meter.
The said reference ball can be a metallic.
Above-mentioned position detecting device can be that 4 segmented photodiodes (QPD) or two-dimensional position detect shape detecting device (PSD).
By the present invention, the displacement meter of the displacement signal of the relative displacement of output corresponding reference sphere and displacement meter is arranged on the balladeur train, utilize this displacement meter and laser interferometer to measure distance, so be not subjected to the influence of the diameter run-out of rotating mechanism on the principle, very reliable with respect to the diameter run-out of rotating mechanism.And because not to reference sphere surface irradiation laser beam, so reliable with respect to the flaw or the dust on reference sphere surface.Can use comparatively cheap reference sphere.
By specifying of following preferred embodiment, will recognize these and other new feature of the present invention and advantage.
Description of drawings
Preferred embodiment is described with reference to the accompanying drawings, the assembly with identical function is paid identical label.
Fig. 1 is the sectional view of primary structure of the laser tracking interferometer of expression patent documentation 1 record;
Fig. 2 is the index path of the detailed structure of the identical interferometer part of expression;
Fig. 3 is the index path of primary structure of the laser tracking interferometer of expression patent documentation 2 record.
Fig. 4 is the sectional view of the primary structure of expression the 1st embodiment of the present invention;
Fig. 5 is the stereographic map of expression the 1st embodiment of the present invention;
Fig. 6 is the index path of the interferometer part of expression the 1st embodiment of the present invention;
Fig. 7 is the sectional view of the primary structure of expression the present invention the 2nd embodiment.
Embodiment
Describe embodiments of the present invention in detail with reference to the following drawings.
The 1st embodiment of the present invention shown in Fig. 4 (overall diagram), Fig. 5 (stereographic map of major part) and Fig. 6 (index path of interferometer part), has: the reference sphere 212 that fixedly installs; Center C with this reference sphere 212 is that the balladeur train 214 that is provided with is rotated at the center; Be arranged on output on this balladeur train 214 corresponding to laser interferometer 216 as the displacement signal of the displacement of the retroeflector 210 of tested body, and be used to export corresponding to the displacement signal of the relative displacement of reference sphere 212 and displacement meter, coaxial with laser beam and clip the displacement meter 218,219 that reference sphere 212 relative its both sides are provided with; Utilize the displacement signal of this displacement meter 218,219 outputs and the displacement signal of above-mentioned laser interferometer 216 outputs, calculating with reference sphere 212 is the data processing equipment 250 (Fig. 5) of displacement of the retroeflector 210 of benchmark; When from 210 reflections of above-mentioned retroeflector and the laser beam of return laser light interferometer 216 when the direction with this light shaft positive cross moves, as the QPD238 (Fig. 6) of output to the position detecting device of position signalling that should side-play amount; According to position signalling, be zero to control the X-axis motor 252X and the Y-axis motor 252Y of control device of the rotation of balladeur train 214 as making above-mentioned side-play amount from above-mentioned position detecting device.
As above-mentioned displacement meter 218,219, can use for example static capacity type displacement meter or eddy current type displacement meter.The useful area of the sensor of these displacement meters is bigger than dust or flaw, and the horizontal capacity of decomposition of sensor is lower, is not easy to be subjected to the influence of reference sphere 212 lip-deep dust or flaw.In addition, as displacement meter 218,219, can use the displacement transducer of Fibre Optical Sensor or various contacts.
As said reference ball 212, can use the metal ball of selling on the market.This ball is widely used industrial, compares with the ball of the material of the usefulness refractive index 2.0 of use in the patent documentation 2, and is cheap a lot.In addition, reference sphere 212 can use beyond metal, the ball of ceramic, semiconductor system, glass or metallic coating.But, under the situation of eddy current sensor, must use the ball of metallic or metallic coating as the displacement transducer use.
Above-mentioned QPD238 can be a Two-dimensional PSD.
In Fig. 5, the 260th, the supporting frame of free rotating support balladeur train 214 around Y week, the 262nd, the pedestal of this supporting frame 260 of free rotating support around X-axis is in Fig. 6, the 220th, be used for from the light of light source (omit diagram) optical fiber to laser interferometer 216 incidents, the 222nd, collimation lens, the 230th, PBS, the 226th, λ/4 plates, the 236th, NPBS, the 240th, polarization plates, the 270th, be used to reflect level crossing with reference to light, the 272nd, be used to detect the photodetector of interference light intensity.
Below, the assay method of detailed description displacement.
As the reference point of position and fixed reference ball 212 that uses and length variations amount (displacement) the Δ L between the retroeflector 210 calculate by following formula.
ΔL＝(ΔL
2-ΔL
3)/2+ΔL
1 …(1)
Here, Δ L
1Be to utilize the laser interferometer 216 of above-mentioned laser interferometer 216 detections and the relative displacement of retroeflector 210 (being+) apart from increasing direction.Δ L
2Be arranged on the relative displacement (distance increase direction for+) on the surface of displacement meter 218 between laser interferometer 216 and the reference sphere 212 and reference sphere 212.Δ L
3It is the relative displacement (being+) on the surface of displacement meter 219 and reference sphere 212 apart from increasing direction.
Concerning the surface of high-precision reference sphere 212, because the distance apart from the center C of reference sphere 212 is a high precision and certain, even so be that the center C that also can measure accurately with reference sphere 212 is the displacement of the retroeflector 210 of benchmark under the situation of rotating of center with C at balladeur train 214.
As shown in Figure 6, above-mentioned Δ L
1Mensuration, can utilize retroeflector 210 is measured as the assay method of the known Michelson interferometer of tested body.
That is, to optical fiber 220 incidents and the light that penetrates from collimation lens 222, a part is used as reference light from not shown light source, and remainder is used as measuring light.
With reference to light transmission PBS230, reflected by level crossing 270, again by PBS230 reflection and directive photodetector 272.
The mensuration light that is reflected by PBS230 is penetrated and is penetrated device 210 towards the rear at first.Returned by the mensuration light of this retroeflector 210 reflections and to laser interferometer 216 incidents, wherein a part is cut apart QPD238 incident by the NPBS236 reflection to 4.And, see through the mensuration light of NPBS236 and above-mentioned with reference to the interference of light and to photodetector 272 incidents.
The output of this photodetector 272, the interference Light Interference Streaks of corresponding incident and changing so utilize the output of this photodetector 272, can be measured the relative displacement Δ L of laser interferometer 216 and retroeflector 210
1
The automatic tracking of above-mentioned retroeflector 210 utilizes the method identical with the method shown in patent documentation 1 or 2 to carry out.
Promptly, mensuration light to 216 incidents of laser-bounce instrument, a part by the position that the position that makes the mensuration light on this QPD238 always keeps necessarily making motor 252X, Y and Spin Control balladeur train 214, can automatically be followed the trail of retroeflector 210 to QPD238 incident thus.Here corresponding to the displacement of the retroeflector 210 of the vertical direction of the optical axis of relative determination light, utilize displacement to produce displacement to the mensuration light of QPD238 incident.Promptly, after retroeflector 210 produces the displacement of vertical direction with respect to the optical axis of measuring light, produce displacement abreast from the optical axis of rearward penetrating the mensuration light that device 210 returns, so, make from QPD238 and drive X-axis motor 252X and Y-axis motor 252Y definitely, follow the trail of retroeflector 210 thus automatically to the total maintenance of displacement signal of data processing equipment 250 outputs.
In the present embodiment, displacement meter 218,219 being arranged on the both sides of reference sphere 212, is the temperature drift for compensate for displacement meter 218,219.That is, if the tendency of displacement meter 218 and 219 temperature drift is identical, the displacement L that tries to achieve in (1) formula then
1Be not subjected to the influence of the temperature drift of displacement meter.For example, the variation delta L that records of displacement meter 218
2Produce error delta D by temperature drift, and become Δ L
2+ Δ D.If the tendency of displacement meter 218 and 219 temperature drift equates, the variation delta L that this moment, displacement meter 219 recorded then
3Also because temperature drift produces error, and become Δ L
3+ Δ D.At this moment, Δ L becomes and is shown below, and Δ L is not subjected to the influence of the temperature drift of displacement meter.
ΔL＝{ΔL
2+ΔD-(ΔL
3+ΔD)}/2+ΔL
1
＝(ΔL
2-ΔL
3)/2+ΔL
1 …(2)
Similarly,, can the thermal expansion of this reference sphere 212 be compensated in the same manner under the situation of thermal expansion in reference sphere 212 all directions.
Therefore, be arranged at displacement meter 218,219 under the situation of both sides of reference sphere 212, can be based upon in the temperature change system reliably.
Below, even represent for the radial vibration of rotating mechanism also very reliable with regard to the device of present embodiment.
ΔL＝{(ΔL
2+ΔD)-(ΔL
3-ΔD)}/2+(ΔL
1-ΔD)
＝(ΔL
2-ΔL
3)/2+ΔL
1 …(3)
Like this, even balladeur train 214 produces displacement on the optical axis direction of measuring light, the Δ L that calculates is not subjected to the influence of this displacement yet.
Next, balladeur train 214 is described when rotating around the reference sphere 212, even balladeur train integral body is producing displacement with the light shaft positive cross direction (point-blank) of measuring light, the Δ L that calculates is not subjected to the influence of this displacement.At first, Δ L
1Be not subjected to the influence of this displacement.Even laser interferometer 216 with the direction of the light shaft positive cross of measuring light on produce displacement because the reciprocal optical length of laser interferometer 216 and retroeflector 210 does not change Δ L
1Be not subjected to the influence of this displacement.This is that character owing to retroeflector 210 causes.Next, displacement meter 218 with the direction of the light shaft positive cross of measuring light on produce displacement, as Δ L
2Value when only increasing Δ E, Δ L
3Value also increase Δ E.At this moment, Δ L is a following formula.
ΔL＝{(ΔL
2+ΔE)-(ΔL
3+ΔE)}/2+ΔL
1
＝(ΔL
2-ΔL
3)/2+ΔL
1 …(4)
So, even balladeur train integral body with the direction of the light shaft positive cross of measuring light on produce displacement, the Δ L that calculates is not subjected to the influence of this displacement yet.
As above-mentioned explanation, even laser interferometer 216 produces displacement on the direction of the optical axis of measuring light, or with the direction of the light shaft positive cross of measuring light on produce displacement, Δ L also will not be subjected to the influence of these displacements.Thus, the device of present embodiment is very reliable for the diameter run-out of rotating mechanism.
Below, represented the major part of the 2nd embodiment of the present invention among Fig. 7.
In the 2nd embodiment, only retroeflector 210 sides at reference sphere 212 are provided with displacement meter 218, to measure Δ L.Displacement L utilizes following formula to calculate.
ΔL＝ΔL
2+ΔL
1 …(5)
Here, Δ L
2And Δ L
1Definition identical with the 1st embodiment.
By present embodiment and since displacement in respect of 1 just can, producing device cheaply.
In addition, in the present embodiment, balladeur train integral body with the direction of the light shaft positive cross of measuring light on (point-blank) produce under the situation of displacement Δ L
2Be added on the Δ L to the error former state that produces, compare as the situation of the patent documentation 1 of focus with the center C with reference sphere 12 of the prior art, do not have the S/N variation of displacement signal of laser interferometer output and not measurable problem, so reliable with respect to the diameter run-out of rotating mechanism.
The disclosure of the Japanese patent application No.2005-216110 of application on July 6th, 2005, the whole of its instructions, accompanying drawing and claim are incorporated in this, as a reference.
For a person skilled in the art, the foregoing description obviously only is illustrative.Those skilled in the art can realize other various distortion under the situation that does not break away from the spirit and scope of the present invention.
Claims (7)
1. laser tracking interferometer, it utilizes the interference of this retroeflector to Return-ing direction laser light reflected bundle to the retroeflector irradiation as tested body, detects the displacement of retroeflector, and utilize the variation of position of the optical axis of above-mentioned laser beam to follow the trail of, it is characterized in that:
Have: the reference sphere that fixedly installs;
The balladeur train that rotates as the center with the center of this reference sphere;
Be arranged on the corresponding above-mentioned retroeflector of output on this balladeur train displacement displacement signal laser interferometer and be arranged on the corresponding said reference ball of output on this balladeur train and the displacement meter of the displacement signal of the relative displacement of displacement meter;
Calculate the data processing equipment of reference sphere according to the displacement signal of this displacement meter output and the displacement signal of laser interferometer output as the displacement of the retroeflector of benchmark;
The reflection of above-mentioned retroeflector also turns back to the laser beam of laser interferometer, with the direction of this light shaft positive cross on when being offset, output is to the position detecting device of outgoing position signal that should side-play amount;
According to the position signalling from this position detecting device, the control balladeur train rotates so that above-mentioned side-play amount is zero control device.
2. laser tracking interferometer as claimed in claim 1 is characterized in that:
Above-mentioned laser interferometer is a Michelson interferometer.
3. laser tracking interferometer as claimed in claim 1 is characterized in that:
Above-mentioned displacement meter is arranged on the both sides of said reference ball.
4. as claim 1 or 3 described laser tracking interferometers, it is characterized in that:
Static capacity type displacement meter or eddy current type displacement meter are counted in above-mentioned displacement.
5. as claim 1 or 3 described laser tracking interferometers, it is characterized in that:
The said reference ball is a metallic.
6. as claim 1 or 3 described laser tracking interferometers, it is characterized in that:
Above-mentioned position detecting device is 4 segmented photodiodes.
7. as claim 1 or 3 described laser tracking interferometers, it is characterized in that:
Above-mentioned position detecting device is that two-dimensional position detects the shape detecting device.
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| JP2005216110 | 2005-07-26 | ||
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| US (1) | US7388674B2 (en) |
| EP (1) | EP1750085B1 (en) |
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| CN1904544A (en) | 2007-01-31 |
| US7388674B2 (en) | 2008-06-17 |
| EP1750085A3 (en) | 2012-04-18 |
| EP1750085B1 (en) | 2013-07-31 |
| US20070024861A1 (en) | 2007-02-01 |
| EP1750085A2 (en) | 2007-02-07 |
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