CN101963271B - Bracket capable of improving modal performance - Google Patents
Bracket capable of improving modal performance Download PDFInfo
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- CN101963271B CN101963271B CN2010102971524A CN201010297152A CN101963271B CN 101963271 B CN101963271 B CN 101963271B CN 2010102971524 A CN2010102971524 A CN 2010102971524A CN 201010297152 A CN201010297152 A CN 201010297152A CN 101963271 B CN101963271 B CN 101963271B
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- side panel
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Abstract
The invention provides a bracket capable of improving modal performance, comprising a left side plate, a right side plate, a front side plate and a rear side plate which are mutually connected in sequence, wherein, the front side plate and the rear side plate are parallel and are provided with corresponding holes. The bracket also comprises a top plate and a base plate which are parallel, wherein, the left side plate, the rear side plate, the right side plate, the front side plate, the top plate and the base plate are enclosed into a box body shape. The bracket also comprises a stud or a spring which penetrates the front side plate and the rear side plate through the corresponding holes, and two nuts respectively lock the studs outside the front side plate and the rear side plate; and the modal performance of the bracket is improved through adjusting nuts or the spring.
Description
Technical field
The present invention relates to a kind of fixing device, and be particularly related to a kind of fixing device that improves the mode performance.
Background technique
At optical apparatus, especially in the middle of the structure of lithography machine, the laser interferometer supporting structure is as the supporting structure of laser interferometer, and its vibration performance receives publicity.The dynamic stability that the mode performance of this supporting structure and the dynamic response performance of structure will directly influence laser interferometer influences the measuring accuracy of laser interferometer then.
In order to reach mode performance requirement preferably, the laser interferometer support adopts the box typed structure of sheet material composition usually, and the advantage of this structure is under the prerequisite that laser interferometer stent support function is provided, and improves the mode performance through the quality that alleviates self.
Because the structural vibration performance design depends on the finite element simulation analysis more; The simulation analysis process is to be based upon on the desirable mathematical model basis; But a lot of objective factors all can't be simulated and analyzed in the practical structure part manufacture process, comprise the material uniform properties of structure, the production process property of structure; The assembly technology characteristic of structure all can make the mode performance of the structural member that produces and design and simulation analysis result have certain gap.
If in the support structure that can regulate its mode performance is not set, after through processes such as simulation analysis, manufacturings, the mode performance of this support is just fixing, can't regulate its mode performance separately according to its working environment.
Summary of the invention
The invention provides a kind of laser interferometer box-type supporting structure that can regulate the mode performance; This structure is often used for after the part processing manufacturing; If discovery can't be satisfied the mode requirement of original design in the middle of test; Can take to change the mode of spring or bolt pretightening, improve the mode of support.
In order to achieve the above object, the present invention proposes a kind of support that improves the mode performance, comprising:
Left sideboard, back side panel, right sideboard, front side plate interconnect successively and front side plate is parallel with back side panel and have corresponding hole;
Left sideboard, back side panel, right sideboard, front side plate, top board and base plate are synthetic into a box shape;
Stud bolt, front side plate and back side panel are run through in the corresponding hole of passing through; And
Two nuts lock stud bolt in the outside of front side plate and back side panel respectively, through the adjustment nut, can improve the mode performance of support.
The present invention also proposes a kind of support that improves the mode performance, comprising:
Left sideboard, back side panel, right sideboard, front side plate interconnect successively and front side plate is parallel with back side panel and have corresponding hole;
Left sideboard, back side panel, right sideboard, front side plate, top board and base plate are synthetic into a box shape;
Two spring seats, the corresponding hole of passing through respectively;
Spring connects two spring seats, and spring seat and spring run through front side plate and back side panel; And
Two nuts lock two spring seats respectively in the outside of front side plate and back side panel, change other springs of different-stiffness through the pretightening force of adjustment spring or with spring, can improve the mode performance of support.
Furtherly, can improve the support of mode performance, also comprise central diaphragm, butt front side plate, back side panel.
Furtherly, can improve the support of mode performance, also comprise flat gasket, between two nuts and front side plate, back side panel.
The support that improves the mode performance provided by the invention, this structure are simply transformed intrinsic support just can reach the purpose that improves support mode performance.The structure that preceding simulation analysis optimization obtains is made in only relying on that the structure of this support is different from the past; But after supporting structure machines; Can get through the hole at the structural rigidity weakness according to mode test result, increase corresponding bolts and spring structure; And the pretightening force that provides through change bolt and spring improves the rigidity of adjacent sheet structure, thereby reaches the purpose that improves overall structure mode.
Description of drawings
The perspective view of the support of the improved mode performance for preferred embodiment of the present invention shown in Figure 1.
Shown in Figure 2 is A-A ' sectional view among Fig. 1.
Embodiment
In order more to understand technology contents of the present invention, special act specific embodiment also cooperates appended graphic explanation following.
The perspective view of the support of the improved mode performance for preferred embodiment of the present invention shown in Figure 1.Shown in Figure 2 is A-A ' sectional view among Fig. 1.Please combine with reference to figure 1 and Fig. 2.
Support is the box-type support, comprises that left sideboard 1, back side panel 2, right sideboard 8, front side plate 10 interconnect successively, and wherein back side panel 2 is parallel to each other with front side plate 10.Support comprises that also top board 12 and base plate 13 are parallel to each other; And top board 12 and base plate 13 are perpendicular to left sideboard 1, back side panel 2, right sideboard 8, front side plate 10; Left sideboard 1, back side panel 2, right sideboard 8, front side plate 10, top board 12 and base plate 13 are synthetic into a box shape, and laser interferometer (figure does not show) can be placed on it.
Wherein left sideboard 1, back side panel 2, right sideboard 8, front side plate 10, top board 12 and base plate 13 are thin-slab structure.
In order to increase the mode performance of support, support also comprises central diaphragm 7, central diaphragm 7 butt back side panels 2 and front side plate 10.
Support also comprises right pillar 9, left pillar 11 and rear strut 6.Right pillar 9 is positioned at the jointing place of left sideboard 11 and front side plate 10, and left pillar 11 is positioned at the jointing place of front side plate 10 and right sideboard 8, and rear strut 6 is positioned at the neutral position of back side panel 2.Through right pillar 9, left pillar 11 and rear strut 6, support can be placed in the plane.
Have corresponding hole respectively on front side plate 10 that it should be noted that support and the back side panel 2, stud bolt 3 through the hole of front side plate 10 with back side panel 2, runs through front side plate 10 and back side panel 2 successively.Two nuts 4 are attached on the stud bolt 3 in the outside lock of front side plate 10 with back side panel 2 respectively.Stud bolt 3 is fixing through support.Can adjust the pretightening force of stud bolt 3 through adjusting nut 4, thereby the mode performance of entire bracket can access adjustment.
Position between two nuts 4 and front side plate 10, the back side panel 2 can also be provided with flat gasket 5, plays the effect that increases load area, locking.
The other corresponding hole that has respectively can also be set on the front side plate 10 of support and the back side panel 2, and two spring seats 16 utilize spring 17 to interconnect respectively through the hole of front side plate 10 with back side panel 2 between two spring seats 16.Two nuts 4 are attached on two spring seats 16 in the outside lock of front side plate 10 with back side panel 2 respectively.Two spring seats 16 are fixing through support with spring 17.Can adjust the pretightening force of spring 17 through adjusting nut 4, thereby the mode performance of entire bracket can access adjustment.Also can adjust the mode performance of entire bracket through spring being changed other springs of different-stiffness.
Two nuts 4 can also be provided with flat gasket 5 with front side plate 10, back side panel 2 position contacting, play the effect that increases load area, locking.
Though the quantity of stud bolt 3 is one in preferred embodiment, the quantity of spring 17 is one, yet in other embodiments, an above stud bolt 3 or spring 17 can be set as required.Certainly, do not limit support yet and must use stud bolt 3 and spring 17 simultaneously, stud bolt 3 or spring 17 can only be set as required.
The invention provides a kind of support that improves the mode performance, this structure is simply transformed intrinsic support just can reach the purpose that improves support mode performance.The structure that preceding simulation analysis optimization obtains is made in only relying on that the structure of this support is different from the past; But after supporting structure machines; Can get through the hole at the structural rigidity weakness according to mode test result, increase corresponding bolts or spring structure; And the pretightening force that provides through change bolt or spring improves the rigidity of adjacent sheet structure, thereby reaches the purpose that improves overall structure mode.
Though the present invention discloses as above with preferred embodiment, so it is not in order to limit the present invention.Have common knowledge the knowledgeable in the technical field under the present invention, do not breaking away from the spirit and scope of the present invention, when doing various changes and retouching.Therefore, protection scope of the present invention is as the criterion when looking claims person of defining.
Claims (4)
1. the support that can improve the mode performance is characterized in that, comprising:
Left sideboard, back side panel, right sideboard, front side plate interconnect successively and said front side plate is parallel with back side panel and have corresponding hole;
Top board and base plate, said left sideboard, back side panel, right sideboard, front side plate, top board and base plate are synthetic into a box shape;
Stud bolt runs through said front side plate and back side panel through described corresponding hole; And
Two nuts lock said stud bolt in the outside of said front side plate and back side panel respectively, through adjusting said nut, regulate the mode performance of said support.
2. the support that can improve the mode performance is characterized in that, comprising:
Left sideboard, back side panel, right sideboard, front side plate interconnect successively and said front side plate is parallel with back side panel and have corresponding hole;
Top board and base plate, said left sideboard, back side panel, right sideboard, front side plate, top board and base plate are synthetic into a box shape;
Two spring seats are respectively through described corresponding hole;
Spring connects said two spring seats, and said spring seat and spring run through said front side plate and back side panel; And
Two nuts lock said two spring seats respectively in the outside of said front side plate and back side panel, the pretightening force through adjusting said spring or said spring changed other springs of different-stiffness, the mode performance of regulating said support.
3. the support that improves the mode performance according to claim 1 and 2 is characterized in that, also comprises central diaphragm, the said front side plate of butt, back side panel.
4. the support that improves the mode performance according to claim 1 and 2 is characterized in that, also comprises flat gasket, between said two nuts and said front side plate, back side panel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010102971524A CN101963271B (en) | 2010-09-29 | 2010-09-29 | Bracket capable of improving modal performance |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010102971524A CN101963271B (en) | 2010-09-29 | 2010-09-29 | Bracket capable of improving modal performance |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101963271A CN101963271A (en) | 2011-02-02 |
| CN101963271B true CN101963271B (en) | 2012-06-20 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010102971524A Active CN101963271B (en) | 2010-09-29 | 2010-09-29 | Bracket capable of improving modal performance |
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| CN (1) | CN101963271B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102322559B (en) * | 2011-08-19 | 2013-06-19 | 北京航天长征飞行器研究所 | Enhancement type device installation bracket |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2441116Y (en) * | 2000-08-24 | 2001-08-01 | 中国科学院长春光学精密机械与物理研究所 | Device for measuring moderate and long radius of curves with high accuracy |
| CN1904544A (en) * | 2005-07-26 | 2007-01-31 | 三丰株式会社 | Laser tracking interferometer |
| CN101180706A (en) * | 2005-10-05 | 2008-05-14 | 株式会社尼康 | Exposure apparatus and exposure method |
| CN101290808A (en) * | 2008-06-06 | 2008-10-22 | 华中科技大学 | 3 freedom degree ultra-precise micro displacement workbench |
-
2010
- 2010-09-29 CN CN2010102971524A patent/CN101963271B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2441116Y (en) * | 2000-08-24 | 2001-08-01 | 中国科学院长春光学精密机械与物理研究所 | Device for measuring moderate and long radius of curves with high accuracy |
| CN1904544A (en) * | 2005-07-26 | 2007-01-31 | 三丰株式会社 | Laser tracking interferometer |
| CN101180706A (en) * | 2005-10-05 | 2008-05-14 | 株式会社尼康 | Exposure apparatus and exposure method |
| CN101290808A (en) * | 2008-06-06 | 2008-10-22 | 华中科技大学 | 3 freedom degree ultra-precise micro displacement workbench |
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| Publication number | Publication date |
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| CN101963271A (en) | 2011-02-02 |
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Address after: 1525 Zhang Dong Road, Shanghai, No. 201203 Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 1525 Zhang Dong Road, Shanghai, No. 201203 Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |