CN101995230A - Talbot effect-based aspheric surface detection system - Google Patents
Talbot effect-based aspheric surface detection system Download PDFInfo
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- 230000003287 optical effect Effects 0.000 claims abstract description 13
- 239000005338 frosted glass Substances 0.000 claims abstract description 10
- 239000004065 semiconductor Substances 0.000 claims abstract description 10
- 230000004888 barrier function Effects 0.000 claims description 8
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- 238000005070 sampling Methods 0.000 abstract description 2
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Abstract
The invention discloses a Talbot effect-based aspheric surface detection system, which comprises a semiconductor laser, a micro objective, an autocollimator objective, a first reflector, a second reflector, an aspheric mirror to be detected, a dispersion prism, a first optical grating, a second optical grating, a frosted glass plate, a charge coupled device (CCD) camera, an image acquisition card and a computer. A light beam emitted from the semiconductor laser is collimated and expanded by the micro objective and the autocollimator objective, is incident into a certain sampling position of the aspheric mirror to be detected after being turned by the first reflector and the dispersion prism, and is incident into the first optical grating by the dispersion prism after being reflected by the second reflector to form a Talbot image at a Talbot distance thereof; simultaneously, the second optical grating is arranged at the position of the Talbot image, and the Talbot image of the first optical grating and the second optical grating form a Moire fringe; the CCD camera and the image acquisition card acquires the displacement of the Moire fringe; and the computer reconstructs an aspheric surface by wavefont fitting. The Talbot effect-based aspheric surface detection system has a simple structure, and can realize the high-accuracy detection of the aspheric mirrors with large apertures or relatively steeper surfaces.
Description
Technical field
The invention belongs to the optic test field, relate in particular to a kind of aspheric surface detection system of utilizing Tabo effect.
Background technology
In fields such as space optics, astronomy and military affairs, be that the optical system of critical component is being brought into play more and more important effect with the aspheric mirror, and required aspheric mirror bore is increasing.The manufacturing of heavy caliber aspherical mirror needs the relevant detection technology, but still there are a lot of difficulties in high Precision Detection at present.Instantly popular aspheric surface detection technique mainly is based on interference of light principle, need install compensating glass additional in whole interference system.But along with the increase of aspheric surface bore, the compensating glass that needs can become increasingly complex, and influences accuracy of detection greatly.Especially, for the aspheric mirror of face type steeper, existing interference detection method can accurately not obtain interference fringe, thereby can't detect owing to various principles and technical restriction.Therefore simple in structurely be easy to realize that the system of aspheric detection has very large application space.
Summary of the invention
The objective of the invention is at the deficiencies in the prior art, a kind of aspheric surface detection system based on Tabo effect is provided, the present invention can be used to realize the high Precision Detection to the aspheric mirror of heavy caliber or face type steeper.
The objective of the invention is to be achieved through the following technical solutions: the aspheric surface detection system based on Tabo effect comprises semiconductor laser, microcobjective, collimator objective, first catoptron, second catoptron, aspheric mirror to be measured, Amici prism, first grating, second grating, frosted glass plate, CCD camera, image pick-up card, computing machine and light barrier.The light beam that semiconductor laser sends is behind microcobjective and collimator objective collimator and extender, shine first catoptron, the folded light beam of first catoptron is divided into the two-way light beam by Amici prism, place the aspheric mirror to be measured and second catoptron therein on the optical axis of one road light beam successively, place first grating, second grating, frosted glass and CCD camera on the optical axis of another road light beam successively, the signal output part of CCD camera links to each other with computing machine through image pick-up card, and light barrier is between microcobjective, collimator objective and first grating, second grating, frosted glass plate.
The first above-mentioned grating is the periodicity linear gratings of even structure, and the cycle is 10～20 microns, and thickness is 0.5～3 millimeter.The periodicity grating that described second grating is an even structure, the cycle is 1～3 times of first grating, thickness is 0.5～3 millimeter.
Described aspheric mirror to be measured can be precipitous aspheric mirror of face type or heavy caliber aspherical mirror.Aspheric mirror 6 to be measured realizes that by the clamping of two-dimentional guide rail platform two dimension moves.
Principle of work of the present invention: the light beam that semiconductor laser sends is behind microcobjective and collimator objective collimator and extender, turn back via first catoptron and Amici prism and to incide a certain sampling location of aspheric mirror to be measured after the light path, through inciding on first grating by Amici prism again after second mirror reflects, on its talbot distance, form the Taibo picture, simultaneously place second grating in the position of Taibo picture, the Taibo picture of first grating and second grating form Moire fringe.CCD camera and image pick-up card are gathered Moire fringe and are moved number, reconstruct aspheric surface face type by computing machine by wavefront fitting again.Light barrier can be eliminated the influence of the parasitic light of microcobjective and collimator objective to Moire fringe.
The invention has the beneficial effects as follows:
1. the present invention utilizes Tabo effect and Moire fringe technology, and the technology of this diffractometry has higher precision than existing interferometry, can realize the high Precision Detection of the aspheric mirror that the face type is precipitous.
2. the present invention utilizes the automatic aspheric mirror to be measured that is clamped on the two-dimentional guide rail platform of controlling of computer programming to move, thereby the gated sweep aspheric mirror can be realized the high Precision Detection to heavy caliber aspherical mirror.
3. light path of the present invention simply is easy to realization, and utilizes computer control can realize detecting automatically and data processing, has good application prospects.
Description of drawings
Fig. 1 is based on the structure principle chart of the aspheric surface detection system of Tabo effect;
Fig. 2 is the scan control process flow diagram.
Embodiment
Describe the present invention below with reference to the accompanying drawings in detail, it is more obvious that purpose of the present invention and effect will become.
As shown in Figure 1, the aspheric surface detection system that the present invention is based on Tabo effect comprises semiconductor laser 1, microcobjective 2, collimator objective 3, first catoptron 4, second catoptron 5, aspheric mirror 6 to be measured, Amici prism 7, first grating 8, second grating 9, frosted glass plate 10, CCD camera 11, image pick-up card 12, computing machine 13 and light barrier 14, the light beam that semiconductor laser 1 sends is behind microcobjective 2 and collimator objective 3 collimator and extenders, shine first catoptron 4, the folded light beam of first catoptron 4 is divided into the two-way light beam by Amici prism 7, place the aspheric mirror 6 to be measured and second catoptron 5 therein on the optical axis of one road light beam successively, place first grating 8 on the optical axis of another road light beam successively, second grating 9, frosted glass 10 and CCD camera 11, the signal output part of CCD camera 11 links to each other with computing machine 13 through image pick-up card 12, and light barrier 14 is positioned at microcobjective 2, the collimator objective 3 and first grating 8, second grating 9, between the frosted glass plate 10.
The first above-mentioned grating is the periodicity linear gratings of even structure, and the cycle is 10～20 microns, and thickness is 0.5～3 millimeter.The periodicity grating that described second grating is an even structure, the cycle is 1～3 times of first grating, thickness is 0.5～3 millimeter.
Described aspheric mirror to be measured can be precipitous aspheric mirror of face type or heavy caliber aspherical mirror.Aspheric mirror 6 to be measured realizes that by the clamping of two-dimentional guide rail platform two dimension moves.
Its ultimate principle is: the laser beam that semiconductor laser 1 sends forms uniform parallel beam through microcobjective 2 and collimator objective 3, incide on the Amici prism 7 by first reflective mirror 4 light path of turning back again, and then incide aspheric mirror 6 to be measured, return by second catoptron, 5 folded light beams again, through Amici prism 7, incide first grating 8 and second grating 9 subsequently again, first grating 8 forms the Taibo picture on its talbot distance, this Taibo picture and second overlap of grating form Moire fringe, when inciding light on first grating angular deflection arranged, can produce moving of Moire fringe, utilize CCD camera 11 and image pick-up card 12 collection Moire fringes and striped to move number, on computing machine 13, handle stripe information at last, thereby match obtains the face type of aspheric mirror 6 to be measured.Wherein, add light barrier 14 and protect light path for fear of the influence of parasitic light.
Be based on the scan control process flow diagram of the aspheric surface detection system of Tabo effect as shown in Figure 2, an at first selected measurement point also reads coordinate figure, the two-dimentional guide rail of driving governor control clamping aspheric mirror to be measured moves then, when aspheric mirror to be measured moves to some positions, light beam obtains having the Moire fringe of face type information through this position, carry out the collection of Moire fringe image, in computing machine, carry out Flame Image Process then and calculate angle.Subsequently, judge whether to measure to finish,, carry out the Moire fringe collection of next sampled point as not finishing then to continue the controlling and driving controller and two-dimentional guide rail moves, carry out the data that obtained are carried out wavefront fitting as finishing then to stop scan control, finally obtain the face type of aspheric mirror to be measured.
Claims (4)
1. the aspheric surface detection system based on Tabo effect is characterized in that comprising semiconductor laser (1), microcobjective (2), collimator objective (3), first catoptron (4), second catoptron (5), aspheric mirror to be measured (6), Amici prism (7), first grating (8), second grating (9), frosted glass plate (10), CCD camera (11), image pick-up card (12), computing machine (13) and light barrier (14).The light beam that semiconductor laser (1) sends is behind microcobjective (2) and collimator objective (3) collimator and extender, shine first catoptron (4), the folded light beam of first catoptron (4) is divided into the two-way light beam by Amici prism (7), place aspheric mirror to be measured (6) and second catoptron (5) therein on the optical axis of one road light beam successively, place first grating (8) on the optical axis of another road light beam successively, second grating (9), frosted glass (10) and CCD camera (11), the signal output part of CCD camera (11) links to each other with computing machine (13) through image pick-up card (12), and light barrier (14) is positioned at microcobjective (2), collimator objective (3) and first grating (8), second grating (9), between the frosted glass plate (10).
2. according to claims 1 described aspheric surface detection system, it is characterized in that described first grating (8) is the periodicity linear gratings of even structure, the cycle is 10～20 microns, and thickness is 0.5～3 millimeter.
3. according to claims 1 described aspheric surface detection system, it is characterized in that described second grating (9) is the periodicity grating of even structure, the cycle is 1～3 times of first grating 8, and thickness is 0.5～3 millimeter.
4. aspheric surface detection system according to claim 1 is characterized in that, described aspheric mirror to be measured (6) realizes that by the clamping of two-dimentional guide rail platform two dimension moves.
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| CN 201010524036 CN101995230A (en) | 2010-10-29 | 2010-10-29 | Talbot effect-based aspheric surface detection system |
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Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102313642A (en) * | 2011-08-30 | 2012-01-11 | 浙江大学 | High-precision focus detection device for long-focus lens |
| CN102607407A (en) * | 2012-03-19 | 2012-07-25 | 复旦大学 | Telescope-based multifunctional digital photoelectric measuring system |
| CN102661746A (en) * | 2012-05-23 | 2012-09-12 | 北京科技大学 | Sensor main mounting boxes and passive optical sensor |
| CN103063413A (en) * | 2012-12-24 | 2013-04-24 | 南京理工大学 | Integrated long-focus measuring device based on Talbot-moire technology |
| CN103674498A (en) * | 2014-01-08 | 2014-03-26 | 中国工程物理研究院激光聚变研究中心 | Grating sampling parameter detection device |
| CN106152969A (en) * | 2016-06-17 | 2016-11-23 | 哈尔滨工业大学 | Collect the easy detection device of eyeglass face type and detection method based on this device |
| CN106651964A (en) * | 2017-02-28 | 2017-05-10 | 嘉兴锐视智能科技有限公司 | Calibration system and calibration device of laser camera |
| CN107121095A (en) * | 2017-06-08 | 2017-09-01 | 杭州电子科技大学 | A kind of method and device of accurate measurement super-large curvature radius |
| CN108490524A (en) * | 2018-04-04 | 2018-09-04 | 中国科学院长春光学精密机械与物理研究所 | A kind of preparation method and system of high linear density grating mask |
| CN108562240A (en) * | 2018-01-24 | 2018-09-21 | 北京理工大学 | Splice the digital Moire phase-shifting interference measuring method of method based on two step carrier waves |
| CN109737892A (en) * | 2019-01-08 | 2019-05-10 | 北京卫星环境工程研究所 | Surface shape measurement method is interfered in digital Moire phase shift based on zone location fitting algorithm |
| CN110793467A (en) * | 2018-08-02 | 2020-02-14 | 昆明勋凯瑞光学仪器有限公司 | Optical lens piece curvature radius precision detection device |
| CN115638741A (en) * | 2022-10-11 | 2023-01-24 | 淮安艾利光电仪器有限公司 | Aspheric lens surface type detection system |
Citations (1)
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|---|---|---|---|---|
| CN1030641A (en) * | 1987-07-10 | 1989-01-25 | 浙江大学 | The Mei Er moire fringe testing method and the device thereof of minute surface flatness |
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2010
- 2010-10-29 CN CN 201010524036 patent/CN101995230A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1030641A (en) * | 1987-07-10 | 1989-01-25 | 浙江大学 | The Mei Er moire fringe testing method and the device thereof of minute surface flatness |
Non-Patent Citations (1)
| Title |
|---|
| 《中国优秀硕士论文》 20070815 吴冬梅 大口径长焦距像质检测系统研究 , 第02期 2 * |
Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102313642A (en) * | 2011-08-30 | 2012-01-11 | 浙江大学 | High-precision focus detection device for long-focus lens |
| CN102607407A (en) * | 2012-03-19 | 2012-07-25 | 复旦大学 | Telescope-based multifunctional digital photoelectric measuring system |
| CN102661746A (en) * | 2012-05-23 | 2012-09-12 | 北京科技大学 | Sensor main mounting boxes and passive optical sensor |
| CN102661746B (en) * | 2012-05-23 | 2015-04-08 | 北京科技大学 | Sensor main mounting boxes and passive optical sensor |
| CN103063413A (en) * | 2012-12-24 | 2013-04-24 | 南京理工大学 | Integrated long-focus measuring device based on Talbot-moire technology |
| CN103063413B (en) * | 2012-12-24 | 2015-06-24 | 南京理工大学 | Integrated long-focus measuring device based on Talbot-moire technology |
| CN103674498A (en) * | 2014-01-08 | 2014-03-26 | 中国工程物理研究院激光聚变研究中心 | Grating sampling parameter detection device |
| CN103674498B (en) * | 2014-01-08 | 2016-01-27 | 中国工程物理研究院激光聚变研究中心 | A kind of grating sampling parameter detection device |
| CN106152969A (en) * | 2016-06-17 | 2016-11-23 | 哈尔滨工业大学 | Collect the easy detection device of eyeglass face type and detection method based on this device |
| CN106651964A (en) * | 2017-02-28 | 2017-05-10 | 嘉兴锐视智能科技有限公司 | Calibration system and calibration device of laser camera |
| CN107121095A (en) * | 2017-06-08 | 2017-09-01 | 杭州电子科技大学 | A kind of method and device of accurate measurement super-large curvature radius |
| CN108562240A (en) * | 2018-01-24 | 2018-09-21 | 北京理工大学 | Splice the digital Moire phase-shifting interference measuring method of method based on two step carrier waves |
| CN108562240B (en) * | 2018-01-24 | 2019-08-23 | 北京理工大学 | Digital Moire phase-shifting interference measuring method based on two step carrier waves splicing method |
| CN108490524A (en) * | 2018-04-04 | 2018-09-04 | 中国科学院长春光学精密机械与物理研究所 | A kind of preparation method and system of high linear density grating mask |
| CN108490524B (en) * | 2018-04-04 | 2020-04-10 | 中国科学院长春光学精密机械与物理研究所 | Method and system for preparing high linear density grating mask |
| CN110793467A (en) * | 2018-08-02 | 2020-02-14 | 昆明勋凯瑞光学仪器有限公司 | Optical lens piece curvature radius precision detection device |
| CN109737892A (en) * | 2019-01-08 | 2019-05-10 | 北京卫星环境工程研究所 | Surface shape measurement method is interfered in digital Moire phase shift based on zone location fitting algorithm |
| CN115638741A (en) * | 2022-10-11 | 2023-01-24 | 淮安艾利光电仪器有限公司 | Aspheric lens surface type detection system |
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Application publication date: 20110330 |